Pn Junction Isolation (epo) Patents (Class 257/E21.544)
  • Patent number: 10933631
    Abstract: An ink-jet head driving circuit includes: PMOS transistors each of which has an Nwell area, a drain terminal and a source terminal, the PMOS transistors connected to a piezoelectric element for jetting ink from a nozzle; and an NMOS transistor connected to the drain terminals of the PMOS transistors. The source terminals and Nwell areas of the PMOS transistors are connected respectively to power sources, and voltage of one of the power sources connected to the Nwell area of each of the PMOS transistors is equal to or higher than the highest voltage of the power sources connected to the source terminals of the PMOS transistors.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: March 2, 2021
    Assignee: BROTHER KOGYO KABUSHIKI KAISHA
    Inventor: Toru Yamashita
  • Patent number: 10797690
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: October 6, 2020
    Assignee: pSemi Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 10790814
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: September 29, 2020
    Assignee: pSemi Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 10790815
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: November 4, 2019
    Date of Patent: September 29, 2020
    Assignee: pSemi Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 10784855
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: September 22, 2020
    Assignee: pSemi Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 10192863
    Abstract: An electrostatic discharge (ESD) protection circuit (FIG. 2A) for an integrated circuit is disclosed. The circuit is formed on a substrate (P-EPI) having a first conductivity type. A buried layer (NBL 240) having a second conductivity type is formed below a face of the substrate. A first terminal (206) and a second terminal (204) are formed at a face of the substrate. A first ESD protection device (232) has a first current path between the first terminal and the buried layer. A second ESD protection device (216) has a second current path in series with the first current path and between the second terminal and the buried layer.
    Type: Grant
    Filed: March 21, 2014
    Date of Patent: January 29, 2019
    Assignee: Texas Instruments Incorporated
    Inventors: Henry L. Edwards, Akram A. Salman, Md Iqbal Mahmud
  • Patent number: 10115639
    Abstract: A method may include depositing a first conductive material in an opening disposed between a first semiconductor structure and a second semiconductor structure, the first conductive material comprising at least one first void. The method further includes removing a portion of the first conductive material to form a trench, the trench exposing the at least one first void and being defined by a remaining portion of the first conductive material; and depositing a second conductive material in the trench, the second conductive material and the remaining portion of the first conductive material forming a dummy gate layer.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: October 30, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ping Hung Li, Lun-Kuang Tan, Hui-Ying Lu, Chia-Ao Chang
  • Patent number: 9741816
    Abstract: A method for manufacturing an electrical device is disclosed. In an embodiment, the method includes providing a first layer of a first conductivity type, providing an intrinsic layer onto the first layer, providing one or more trenches into the intrinsic layer, filling the one or more trenches with a material of a second conductivity type opposite to the first conductivity type, and providing a second layer of a second conductivity type onto the intrinsic layer.
    Type: Grant
    Filed: April 26, 2016
    Date of Patent: August 22, 2017
    Assignee: Infineon Technologies AG
    Inventor: Jakob Huber
  • Patent number: 9412621
    Abstract: A semiconductor device in which a gettering layer is formed in a semiconductor substrate, and a method for forming the same are disclosed, resulting in increased reliability of the semiconductor substrate including the gettering layer. The semiconductor device includes a semiconductor substrate; a gettering layer formed of a first-type impurity and a second-type impurity in the semiconductor substrate so as to perform gettering of metal ion; and a deep-well region formed over the gettering layer in the semiconductor substrate.
    Type: Grant
    Filed: December 1, 2015
    Date of Patent: August 9, 2016
    Assignee: SK HYNIX INC.
    Inventor: Jae Bum Kim
  • Patent number: 9374035
    Abstract: An oscillator with a differential structure which is formed in an integrated circuit, including: a first transistor and a second transistor in each of which a drain electrode, a gate electrode, and a source electrode are sequentially arranged, a drain of the first transistor is connected with a gate of the second transistor through a first wiring, a drain of the second transistor is connected with a gate of the first transistor through a second wiring, and a first end of a source of the first transistor and a first end of a source of the second transistor are connected through a third wiring, and a second end of the source of the first transistor and a second end of the source of the second transistor are connected through a fourth wiring.
    Type: Grant
    Filed: December 15, 2014
    Date of Patent: June 21, 2016
    Assignee: SOONGSIL UNIVERSITY RESEARCH CONSORTIUM TECHNO-PARK
    Inventors: Mi Lim Lee, Chang Kun Park
  • Patent number: 9012312
    Abstract: A semiconductor device manufacturing method includes (a) forming a buried diffusion layer of a first conductivity type in a semiconductor substrate of a second conductivity type, (b) forming a first impurity region by implanting an impurity of the first conductivity type, (c) diffusing the buried diffusion layer and the first impurity region to an extent that the buried diffusion layer and the first impurity region are not connected by performing a first thermal process on the semiconductor substrate, (d) forming a second impurity region by implanting an impurity of the first conductivity type at a concentration higher than that of in step (b), and (e) diffusing the buried diffusion layer, the first impurity region, and the second impurity region by performing a second thermal process on the semiconductor substrate.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: April 21, 2015
    Assignee: Seiko Epson Corporation
    Inventor: Tomoyuki Furuhata
  • Patent number: 8981480
    Abstract: A semiconductor device includes a buried well, first and second active regions, an isolation layer, and a low resistance region. The buried well is disposed on a substrate and has impurity ions of a first conductivity type. The first and second active regions are disposed on the buried well and each have impurity ions of a second conductivity type, which is different from the first conductivity type. The isolation layer is disposed between the first and second active regions. The low resistance region is disposed between the isolation layer and the substrate and has impurity ions of the second conductivity type. The concentration of impurity ions in the low resistance region is greater than the concentration of the impurity ions in each of the first and second active regions.
    Type: Grant
    Filed: July 12, 2011
    Date of Patent: March 17, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jun-Hee Lim, Satoru Yamada, Sung-Duk Hong
  • Patent number: 8809139
    Abstract: Embodiments of the present disclosure are a FinFET device, and methods of forming a FinFET device. An embodiment is a method for forming a FinFET device, the method comprising forming a semiconductor strip over a semiconductor substrate, wherein the semiconductor strip is disposed in a dielectric layer, forming a gate over the semiconductor strip and the dielectric layer, and forming a first recess and a second recess in the semiconductor strip, wherein the first recess is on an opposite side of the gate from the second recess. The method further comprises forming a source region in the first recess and a drain region in the second recess, and recessing the dielectric layer, wherein a first portion of the semiconductor strip extends above a top surface of the dielectric layer forming a semiconductor fin.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: August 19, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Ming-Huan Tsai, Clement Hsingjen Wann
  • Patent number: 8803277
    Abstract: An electronic device includes a semiconductor layer, a primary junction in the semiconductor layer, a lightly doped region surrounding the primary junction and a junction termination structure in the lightly doped region adjacent the primary junction. The junction termination structure has an upper boundary, a side boundary, and a corner between the upper boundary and the side boundary, and the lightly doped region extends in a first direction away from the primary junction and normal to a point on the upper boundary by a first distance that is smaller than a second distance by which the lightly doped region extends in a second direction away from the primary junction and normal to a point on the corner. At least one floating guard ring segment may be provided in the semiconductor layer outside the corner of the junction termination structure. Related methods are also disclosed.
    Type: Grant
    Filed: February 10, 2011
    Date of Patent: August 12, 2014
    Assignee: Cree, Inc.
    Inventors: Jason Henning, Qingchun Zhang, Sei-Hyung Ryu
  • Patent number: 8796818
    Abstract: A semiconductor memory device that has an isolated area formed from one conductivity and formed in part by a buried layer of a second conductivity that is implanted in a substrate. The walls of the isolated area are formed by implants that are formed from the second conductivity and extend down to the buried layer. The isolated region has implanted source lines and is further subdivided by overlay strips of the second conductivity that extend substantially down to the buried layer. Each isolation region can contain one or more blocks of memory cells.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: August 5, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Frankie F. Roohparvar
  • Patent number: 8728904
    Abstract: A variety of isolation structures for semiconductor substrates include a trench formed in the substrate that is filled with a dielectric material or filled with a conductive material and lined with a dielectric layer along the walls of the trench. The trench may be used in combination with doped sidewall isolation regions. Both the trench and the sidewall isolation regions may be annular and enclose an isolated pocket of the substrate. The isolation structures are formed by modular implant and etch processes that do not include significant thermal processing or diffusion of dopants so that the resulting structures are compact and may be tightly packed in the surface of the substrate.
    Type: Grant
    Filed: August 8, 2007
    Date of Patent: May 20, 2014
    Assignee: Advanced Analogic Technologies (Hong Kong) Limited
    Inventors: Richard K. Williams, Donald Ray Disney, Wai Tien Chan
  • Publication number: 20140070361
    Abstract: Integrated circuits and manufacturing methods are presented for creating diffusion resistors (101, 103) in which the diffusion resistor well is spaced from oppositely doped wells to mitigate diffusion resistor well depletion under high biasing so as to provide reduced voltage coefficient of resistivity and increased breakdown voltage for high-voltage applications.
    Type: Application
    Filed: September 11, 2012
    Publication date: March 13, 2014
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Kamel Benaissa, Amitava Chatterjee
  • Patent number: 8652930
    Abstract: A method of fabricating a reduced surface field (RESURF) transistor includes forming a first well in a substrate, the first well having a first conductivity type, doping a RESURF region of the first well to have a second conductivity type, doping a portion of the first well to form a drain region of the RESURF transistor, the drain region having the first conductivity type, and forming a second well in the substrate, the second well having the second conductivity type. A plug region is formed in the substrate, the plug region extending to the RESURF region.
    Type: Grant
    Filed: August 22, 2013
    Date of Patent: February 18, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Jiang-Kai Zuo
  • Publication number: 20140001546
    Abstract: Embodiments of semiconductor devices and driver circuits include a semiconductor substrate having a first conductivity type, an isolation structure (including a sinker region and a buried layer), an active device within a portion of the substrate contained by the isolation structure, and a resistor circuit. The buried layer is positioned below the top substrate surface, and has a second conductivity type. The sinker region extends between the top substrate surface and the buried layer, and has the second conductivity type. The active device includes a current carrying region (e.g., a source region of the first conductivity type and/or a drain region of the second conductivity type), and the resistor circuit is connected between the isolation structure and the current carrying region. The resistor circuit may include one or more resistor networks and, optionally, a Schottky diode and/or one or more PN diode(s) in series and/or parallel with the resistor network(s).
    Type: Application
    Filed: June 29, 2012
    Publication date: January 2, 2014
    Inventors: HUBERT M. BODE, WEIZE CHEN, RICHARD J. DE SOUZA, PATRICE M. PARRIS
  • Publication number: 20130222950
    Abstract: A device is presented. The device includes a first circuit coupled to first and second power rails of the device. The first circuit is subject to a latch up event in the presence of a latch up condition. The latch up event includes a low resistance path created between the first and second power rails. The device also includes a latch up sensing (LUS) circuit coupled to the first circuit. The LUS circuit is configured to receive a LUS input signal from the first circuit and generates a LUS output signal to the first circuit. When the input signal is an active latch up signal which indicates the presence of a latch up condition, the LUS circuit generates an active LUS output signal which creates a break in the low resistance path to terminate the latch up event.
    Type: Application
    Filed: February 28, 2012
    Publication date: August 29, 2013
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Da-Wei LAI, Mahadeva Iyer NATARAJAN
  • Patent number: 8482031
    Abstract: This invention generally relates to lateral insulated gate bipolar transistors (LIGBTs), for example in integrated circuits, methods of increasing switching speed of an LIGBT, a method of suppressing parasitic thyristor latch-up in a bulk silicon LIGBT, and methods of fabricating an LIGBT. In particular, a method of suppressing parasitic thyristor latch-up in a bulk silicon LIGBT comprises selecting a current gain ?v for a vertical transistor of a parasitic thyristor of the LIGBT such that in at least one predetermined mode of operation of the LIGBT ?v<1??p where ?p is a current gain of a parasitic bipolar transistor having a base-emitter junction formed by a Schottky contact between the a semiconductor surface and a metal enriched epoxy die attach.
    Type: Grant
    Filed: December 29, 2009
    Date of Patent: July 9, 2013
    Assignee: Cambridge Semiconductor Limited
    Inventors: Florin Udrea, Vasantha Pathirana, Tanya Trajkovic, Nishad Udugampola
  • Publication number: 20130134511
    Abstract: A device includes a semiconductor substrate including a surface, a drain region in the semiconductor substrate having a first conductivity type, a well region in the semiconductor substrate on which the drain region is disposed, the well region having the first conductivity type, a buried isolation layer in the semiconductor substrate extending across the well region, the buried isolation layer having the first conductivity type, a reduced surface field (RESURF) region disposed between the well region and the buried isolation layer, the RESURF region having a second conductivity type, and a plug region in the semiconductor substrate extending from the surface of the substrate to the RESURF region, the plug region having the second conductivity type.
    Type: Application
    Filed: November 30, 2011
    Publication date: May 30, 2013
    Applicant: Freescale Semiconductor, Inc.
    Inventors: Hongning Yang, Jiang-Kai Zuo
  • Patent number: 8404565
    Abstract: A manufacturing method and a structure of a surface-mounting type diode co-constructed from a silicon wafer and a base plate, in the method, a diffused wafer is stacked with a high temperature durable high strength base plate to have them sintered and molten together for connecting with each other to form a co-constructure; then the diffused wafer is processed by etching and ditching for filling with insulation material, electrodes of the diffused wafer are metalized and all on an identical plane, then production of all functional lines is completed; and then the co-constructure is cut to form a plurality of separated individuals which each forms a surface-mounting type diode to be applied straight. In comparison with the conventional techniques, manufacturing of the present invention is simplified and economic in reducing working hours, size and cost of production and the wafer is not subjected to breaking during manufacturing.
    Type: Grant
    Filed: May 4, 2010
    Date of Patent: March 26, 2013
    Assignee: Formosa Microsemi Co., Ltd.
    Inventors: Wen-Ping Huang, Paul Wu
  • Patent number: 8384183
    Abstract: An integrated circuit and a method of making the integrated circuit provide a Hall effect element having a germanium Hall plate. The germanium Hall plate provides an increased electron mobility compared with silicon, and therefore, a more sensitive Hall effect element.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: February 26, 2013
    Assignee: Allegro Microsystems, Inc.
    Inventors: Harianto Wong, William P. Taylor, Ravi Vig
  • Patent number: 8378445
    Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity, an epitaxial layer of a second conductivity on the substrate and a buried layer of the second conductivity interposed between the substrate and the epitaxial layer. A first trench structure extends through the epitaxial layer and the buried layer to the substrate and includes sidewall insulation and conductive material in electrical contact with the substrate at a bottom of the first trench structure. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. A region of insulating material laterally extends from the conductive material of the first trench structure to the conductive material of the second trench structure and longitudinally extends to a substantial depth of the second trench structure.
    Type: Grant
    Filed: August 31, 2010
    Date of Patent: February 19, 2013
    Assignee: Infineon Technologies AG
    Inventors: Brahim Elattari, Franz Hirler
  • Publication number: 20130015552
    Abstract: Embodiments of the invention include a III-nitride semiconductor layer including a first portion having a first defect density and a second portion having a second defect density. The first defect density is greater than the second defect density. An insulating material is disposed over the first portion. The insulating material is not formed on or is removed from the second portion.
    Type: Application
    Filed: July 12, 2011
    Publication date: January 17, 2013
    Applicant: EPOWERSOFT, INC.
    Inventors: Isik C. Kizilyalli, David P. Bour, Richard J. Brown, Andrew P. Edwards, Hui Nie, Linda T. Romano
  • Patent number: 8318580
    Abstract: An electrical component includes a semiconductor layer having a first conductivity type and a interconnect layer disposed adjacent to a frontside of the semiconductor layer. At least one bond pad is disposed in the interconnect layer and formed adjacent to the frontside of the semiconductor layer. An opening formed from the backside of the semiconductor layer and through the semiconductor layer exposes at least a portion of the bond pad. A first region having a second conductivity type extends from the backside of the semiconductor layer to the frontside of the semiconductor layer and surrounds the opening. The first region can abut a perimeter of the opening or alternatively, a second region having the first conductivity type can be disposed between the first region and a perimeter of the opening.
    Type: Grant
    Filed: April 29, 2010
    Date of Patent: November 27, 2012
    Assignee: OmniVision Technologies, Inc.
    Inventors: John P. McCarten, Cristian A. Tivarus
  • Publication number: 20120241900
    Abstract: An electrostatic discharge (ESD) protected device may include a substrate, an N-type well region disposed corresponding to a first portion of the substrate and having two N+ segments disposed at a surface thereof, an a P-type well region disposed proximate to a second portion of the substrate and having a P+ segment and an N+ segment. The two N+ segments may be spaced apart from each other and each may each be associated with an anode of the device. The N+ segment may be associated with a cathode of the device. A contact may be positioned in a space between the two N+ segments and connected to the P+ segment. The contact may form a parasitic capacitance that, in connection with a parasitic resistance formed in association with the N+ segment, provides self detection for high voltage ESD protection.
    Type: Application
    Filed: March 22, 2011
    Publication date: September 27, 2012
    Inventors: Hsin-Liang Chen, Shou-Lun Tu, Wing-Chor Chan, Shyi-Yuan Wu
  • Patent number: 8264038
    Abstract: A buried layer architecture which includes a floating buried layer structure adjacent to a high voltage buried layer connected to a deep well of the same conductivity type for components in an IC is disclosed. The floating buried layer structure surrounds the high voltage buried layer and extends a depletion region of the buried layer to reduce a peak electric field at lateral edges of the buried layer. When the size and spacing of the floating buried layer structure are optimized, the well connected to the buried layer may be biased to 100 volts without breakdown. Adding a second floating buried layer structure surrounding the first floating buried layer structure allows operation of the buried layer up to 140 volts. The buried layer architecture with the floating buried layer structure may be incorporated into a DEPMOS transistor, an LDMOS transistor, a buried collector npn bipolar transistor and an isolated CMOS circuit.
    Type: Grant
    Filed: August 7, 2009
    Date of Patent: September 11, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Sameer P. Pendharkar, Binghua Hu, Xinfen Chen
  • Publication number: 20120205666
    Abstract: An electronic device includes a semiconductor layer, a primary junction in the semiconductor layer, a lightly doped region surrounding the primary junction and a junction termination structure in the lightly doped region adjacent the primary junction. The junction termination structure has an upper boundary, a side boundary, and a corner between the upper boundary and the side boundary, and the lightly doped region extends in a first direction away from the primary junction and normal to a point on the upper boundary by a first distance that is smaller than a second distance by which the lightly doped region extends in a second direction away from the primary junction and normal to a point on the corner. At least one floating guard ring segment may be provided in the semiconductor layer outside the corner of the junction termination structure. Related methods are also disclosed.
    Type: Application
    Filed: February 10, 2011
    Publication date: August 16, 2012
    Inventors: Jason Henning, Qingchun Zhang, Sei-Hyung Ryu
  • Patent number: 8236639
    Abstract: A semiconductor device manufacturing method is a method of forming a semiconductor device that includes a cell part that includes plural transistor cells in each of which a gate of a trench type is formed in a semiconductor layer, and diffused layers are formed on both sides of the gate, and a guard ring part that surrounds the cell part. The semiconductor device manufacturing method includes forming an interlayer dielectric film on a surface of the semiconductor layer in which the gate and the diffused layers are formed; reducing a thickness of the interlayer dielectric film formed in the cell part through etch back; forming a contact part having a shape of a hole or a groove in the interlayer dielectric film at a position above the diffused layer; and forming a metal film on the interlayer dialectic film.
    Type: Grant
    Filed: March 24, 2011
    Date of Patent: August 7, 2012
    Assignee: Mitsumi Electric Co., Ltd.
    Inventors: Hiroaki Kikuchi, Katsunori Kondo, Shigeru Shinohara, Osamu Takahashi, Tomoaki Yamabayashi
  • Publication number: 20120187526
    Abstract: At least one exemplary embodiment is directed to a semiconductor edge termination structure, where the edge termination structure comprises several conductivity layers and a buffer layer.
    Type: Application
    Filed: January 21, 2011
    Publication date: July 26, 2012
    Inventors: Jaume Roig-Guitart, Zia Hossain, Peter Moens
  • Publication number: 20120187527
    Abstract: At least one embodiment is directed to a semiconductor edge termination structure, where the edge termination structure comprises several doped layers and a buffer layer.
    Type: Application
    Filed: September 7, 2011
    Publication date: July 26, 2012
    Inventors: Jaume Roig Guitart, Peter Moens, Zia Hossain
  • Patent number: 8222148
    Abstract: A semiconductor device includes a first well formed in a predetermined region of a semiconductor substrate, a second well formed in a predetermined region in the first well, and a third well formed in the first well with the third well being spaced apart from the second well at a predetermined distance. A multiple well of the semiconductor substrate, the first well, the second well, the first well, and the third well, which are sequentially disposed, is formed. Accordingly, a breakdown voltage can be increased and a leakage current can be reduced. It is therefore possible to prevent the drop of an erase voltage and to reduce the error of an erase operation.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: July 17, 2012
    Assignee: Hynix Semiconductor Inc.
    Inventor: Wan Cheul Shin
  • Publication number: 20120175730
    Abstract: An integrated circuit and a production method is disclosed. One embodiment forms reverse-current complexes in a semiconductor well, so that the charge carriers, forming a damaging reverse current, cannot flow into the substrate.
    Type: Application
    Filed: March 20, 2012
    Publication date: July 12, 2012
    Applicant: INFINEON TECHNOLOGIES AG
    Inventor: Matthias Stecher
  • Publication number: 20120126244
    Abstract: The invention provides a STI structure and a method for manufacturing the same. The STI includes a semiconductor substrate; a first trench formed on the upper surface of the semiconductor substrate and filled with an epitaxial layer, wherein the upper surface of the epitaxial layer is higher than that of the semiconductor substrate; and a second trench formed on the epitaxial layer and filled with a first dielectric layer, wherein the upper surface of the first dielectric layer is flush with that of the epitaxial layer, and the width of the second trench is smaller than that of the first trench. The invention reduces the influences of divots on performance of the semiconductor device.
    Type: Application
    Filed: January 27, 2011
    Publication date: May 24, 2012
    Inventors: Huicai Zhong, Haizhou Yin, Qingqing Liang, Huilong Zhu
  • Patent number: 8134212
    Abstract: An n-type isolation structure is disclosed which includes an n-type BISO layer in combination with a shallow n-well, in an IC. The n-type BISO layer is formed by implanting n-type dopants into a p-type IC substrate in addition to a conventional n-type buried layer (NBL), prior to growth of a p-type epitaxial layer. The n-type dopants in the BISO implanted layer diffuse upward from the p-type substrate to between one-third and two-thirds of the thickness of the p-type epitaxial layer. The shallow n-type well extends from a top surface of the p-type epitaxial layer to the n-type BISO layer, forming a continuous n-type isolation structure from the top surface of the p-type epitaxial layer to the p-type substrate. The width of the n-type BISO layer may be less than the thickness of the epitaxial layer, and may be used alone or with the NBL to isolate components in the IC.
    Type: Grant
    Filed: August 10, 2009
    Date of Patent: March 13, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Pinghai Hao, Seetharaman Sridhar, James Robert Todd
  • Publication number: 20120049274
    Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity, an epitaxial layer of a second conductivity on the substrate and a buried layer of the second conductivity interposed between the substrate and the epitaxial layer. A first trench structure extends through the epitaxial layer and the buried layer to the substrate and includes sidewall insulation and conductive material in electrical contact with the substrate at a bottom of the first trench structure. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. A region of insulating material laterally extends from the conductive material of the first trench structure to the conductive material of the second trench structure and longitudinally extends to a substantial depth of the second trench structure.
    Type: Application
    Filed: August 31, 2010
    Publication date: March 1, 2012
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Brahim Elattari, Franz Hirler
  • Patent number: 8084843
    Abstract: A semiconductor memory device that has an isolated area formed from one conductivity and formed in part by a buried layer of a second conductivity that is implanted in a substrate. The walls of the isolated area are formed by implants that are formed from the second conductivity and extend down to the buried layer. The isolated region has implanted source lines and is further subdivided by overlay strips of the second conductivity that extend substantially down to the buried layer. Each isolation region can contain one or more blocks of memory cells.
    Type: Grant
    Filed: October 6, 2008
    Date of Patent: December 27, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Frankie F. Roohparvar
  • Patent number: 8071454
    Abstract: A method for manufacturing a dielectric isolation type semiconductor device comprises: forming a plurality of trenches in a first region on a major surface of a semiconductor substrate; forming a first dielectric layer on the major surface of the semiconductor substrate and a first thick dielectric layer in the first region by oxidizing a surface of the semiconductor substrate; bonding a semiconductor layer of a first conductive type to the semiconductor substrate via the first dielectric layer; forming a first semiconductor region by implanting an impurity into a part of the semiconductor layer above the first thick dielectric layer; forming a second semiconductor region by implanting an impurity of a second conductive type into a part of the semiconductor layer so as to surround the first semiconductor region separating from the first semiconductor region.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: December 6, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventor: Hajime Akiyama
  • Publication number: 20110272777
    Abstract: A manufacturing method and a structure of a surface-mounting type diode co-constructed from a silicon wafer and a base plate, in the method, a diffused wafer is stacked with a high temperature durable high strength base plate to have them sintered and molten together for connecting with each other to form a co-constructure; then the diffused wafer is processed by etching and ditching for filling with insulation material, electrodes of the diffused wafer are metalized and all on an identical plane, then production of all functional lines is completed; and then the co-constructure is cut to form a plurality of separated individuals which each forms a surface-mounting type diode to be applied straight. In comparison with the conventional techniques, manufacturing of the present invention is simplified and economic in reducing working hours, size and cost of production and the wafer is not subjected to breaking during manufacturing.
    Type: Application
    Filed: May 4, 2010
    Publication date: November 10, 2011
    Applicant: FORMOSA MICROSEMI CO., Ltd.
    Inventors: Wen-Ping Huang, Paul Wu
  • Publication number: 20110269292
    Abstract: An electrical component includes a semiconductor layer having a first conductivity type and a interconnect layer disposed adjacent to a frontside of the semiconductor layer. At least one bond pad is disposed in the interconnect layer and formed adjacent to the frontside of the semiconductor layer. An opening formed from the backside of the semiconductor layer and through the semiconductor layer exposes at least a portion of the bond pad. A first region having a second conductivity type extends from the backside of the semiconductor layer to the frontside of the semiconductor layer and surrounds the opening. The first region can abut a perimeter of the opening or alternatively, a second region having the first conductivity type can be disposed between the first region and a perimeter of the opening.
    Type: Application
    Filed: April 29, 2010
    Publication date: November 3, 2011
    Inventors: John P. McCarten, Cristian A. Tivarus
  • Patent number: 8049300
    Abstract: An inductive device including an inductor coil located over a substrate, at least one electrically insulating layer interposing the inductor coil and the substrate, and a plurality of current interrupters each extending into the substrate, wherein a first aggregate outer boundary of the plurality of current interrupters substantially encompasses a second aggregate outer boundary of the inductor coil.
    Type: Grant
    Filed: June 25, 2007
    Date of Patent: November 1, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Andrew Yeh, Alex Chang, Sung-Pi Tseng, Chang-Yun Chang, Hao-Yu Chen, Fu-Liang Yang
  • Publication number: 20110241171
    Abstract: Provided are a method of fabricating a semiconductor integrated circuit device and a semiconductor integrated circuit device fabricated using the method. The method includes: forming a mask film, which exposes a portion of a substrate, on the substrate; forming a first buried impurity layer, which contains impurities of a first conductivity type and of a first concentration, in a surface of the exposed portion of the substrate by using the mask film; removing the mask film; forming a second buried impurity layer, which contains impurities of a second conductivity type and of a second concentration, using blank implantation; and forming an epitaxial layer on the substrate having the first and second buried impurity layers, wherein the first concentration is higher than the second concentration.
    Type: Application
    Filed: March 30, 2010
    Publication date: October 6, 2011
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Yong-Don Kim, Eung-Kyu Lee, Sung-Ryoul Bae, Soo-Bang Kim, Dong-Eun Jang
  • Patent number: 8030731
    Abstract: An isolated diode comprises a floor isolation region, a dielectric-filled trench and a sidewall region extending from a bottom of the trench at least to the floor isolation region. The floor isolation region, dielectric-filled trench and a sidewall region are comprised in one terminal (anode or cathode) of the diode and together form an isolated pocket in which the other terminal of the diode is formed. In one embodiment the terminals of the diode are separated by a second dielectric-filled trench and sidewall region.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: October 4, 2011
    Assignees: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) Limited
    Inventors: Richard K. Williams, Donald Ray Disney, Wai Tien Chan
  • Publication number: 20110233715
    Abstract: A semiconductor device according to the present invention includes: a cell active region including a p-base layer being an active layer of a second conductivity type that is diffused above a high concentration n-type substrate being a semiconductor substrate of a first conductivity type; and a p-well layer being a first well region of the second conductivity type having a ring shape, which is adjacent to the p-base layer, is diffused above the high concentration n-type substrate so as to surround the cell active region, and serves as a main junction part of a guard ring structure, wherein in a region on a surface of the p-well layer other than both ends, a trench region that is a ring-shaped recess having a tapered side surface is formed along the ring shape of the p-well layer 4, the side surface widening upward.
    Type: Application
    Filed: October 19, 2010
    Publication date: September 29, 2011
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Atsushi NARAZAKI
  • Publication number: 20110227191
    Abstract: A silicon-on-insulator device with a with buried depletion shield layer.
    Type: Application
    Filed: March 19, 2010
    Publication date: September 22, 2011
    Inventor: Donald R. Disney
  • Publication number: 20110198612
    Abstract: A SiC semiconductor device includes: a SiC substrate made of intrinsic SiC having semi-insulating property; first and second conductive type SiC layers disposed in the substrate; an insulation separation layer made of intrinsic SiC for isolating the first conductive type SiC layer from the second conductive type SiC layer; first and second conductive type channel JFETs disposed in the first and second conductive type SiC layers, respectively. The first and second conductive type channel JFETs provide a complementary junction field effect transistor. Since an electric element is formed on a flat surface, a manufacturing method is simplified. Further, noise propagation at high frequency and current leakage at high temperature are restricted.
    Type: Application
    Filed: January 24, 2011
    Publication date: August 18, 2011
    Applicant: DENSO CORPORATION
    Inventor: Rajesh Kumar MALHAN
  • Patent number: 7994032
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a substrate having a front surface and a back surface; a plurality of sensor elements formed on the front surface of the substrate, each of the plurality of sensor elements configured to receive light directed towards the back surface; and an aluminum doped feature formed in the substrate and disposed horizontally between two adjacent elements of the plurality of sensor elements and vertically between the back surface and the plurality of sensor elements.
    Type: Grant
    Filed: July 28, 2010
    Date of Patent: August 9, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shang-Yi Chiang, Chung Wang, Shou-Gwo Wuu, Dun-Nian Yaung
  • Patent number: RE46303
    Abstract: A method for isolation region fabrication for replacement gate integrated circuit (IC) processing includes forming a plurality of dummy gates on a substrate; forming a block mask over the plurality of dummy gates, such that the block mask selectively exposes a dummy gate of the plurality of dummy gates; removing the exposed dummy gate to form an isolation region recess corresponding to the removed dummy gate; filling the isolation region recess with an insulating material to form an isolation region; removing the block mask to expose a remaining plurality of dummy gates; and performing replacement gate processing on the remaining plurality of dummy gates to form a plurality of active devices, wherein at least two of the plurality of active devices are electrically isolated from each other by the isolation region.
    Type: Grant
    Filed: October 1, 2015
    Date of Patent: February 7, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Brent A. Anderson, Edward J. Nowak