Manufacture Or Treatment Of Devices Consisting Of Plurality Of Solid-state Components Formed In Or On Common Substrate Or Of Parts Thereof; Manufacture Of Integrated Circuit Devices Or Of Parts Thereof (epo) Patents (Class 257/E21.532)
- Making of localized buried regions, e.g., buried collector layer, internal connection, substrate contacts (EPO) (Class 257/E21.537)
- Making of isolation regions between components (EPO) (Class 257/E21.54)
- Interconnections, comprising conductors and dielectrics, for carrying current between separate components within device (EPO) (Class 257/E21.575)
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Patent number: 12148463Abstract: A dual-port memory cell includes first pull-up and pull-down transistors coupled at a first node between supply and reference voltage nodes, second pull-up and pull-down transistors coupled at a second node between the supply and reference voltage nodes, and first through fourth bit line landing pads in a metal layer. A first pass-gate transistor is coupled between the first bit line landing pad and the first node, a second pass-gate transistor is coupled between the second bit line landing pad and the second node, a third pass-gate transistor is coupled between the third bit line landing pad and the first node, and a fourth pass-gate transistor is coupled between the fourth bit line landing pad and the second node. The first node includes an interconnect between the first and second bit line landing pads, and the second node includes an interconnect between the third and fourth bit line landing pads.Type: GrantFiled: February 14, 2022Date of Patent: November 19, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventor: Jhon Jhy Liaw
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Patent number: 12082440Abstract: Disclosed is a display apparatus including a plurality of subpixels configured to include a light emission area, a planarization layer configured to include a plurality of light extraction patterns having a plurality of concave portions and protruding portions in each of the subpixels, a light emitting device layer at the planarization layer of each of the subpixels, and a bank layer disposed between the planarization layer and the light emitting device layer to open the light emission area in each of the plurality of subpixels, an end of the bank layer is disposed at the concave portion of the outermost light extraction pattern of at least one of the subpixels.Type: GrantFiled: October 14, 2021Date of Patent: September 3, 2024Assignee: LG DISPLAY CO., LTD.Inventors: Jintae Kim, Sookang Kim, Mingeun Choi
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Patent number: 12015042Abstract: A method of fabricating a semiconductor device includes forming an interconnect structure over a front side of a sensor substrate, thinning the sensor substrate from a back side of the sensor substrate, etching trenches into the sensor substrate, pre-cleaning an exposed surface of the sensor substrate, epitaxially growing a charge layer directly on the pre-cleaned exposed surface of the sensor substrate, and forming isolation structures within the etched trenches.Type: GrantFiled: February 21, 2020Date of Patent: June 18, 2024Assignee: Applied Materials, Inc.Inventors: Papo Chen, Schubert Chu, Errol Antonio C Sanchez, John Timothy Boland, Zhiyuan Ye, Lori Washington, Xianzhi Tao, Yi-Chiau Huang, Chen-Ying Wu
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Patent number: 11527596Abstract: A display device includes a light transmitting substrate in which pixels are arranged, the pixels having a light transmitting region that transmits external light and a light emitting region in which a light emitting element is disposed; a first light blocking layer that is disposed in the light emitting region and blocks the external light; a thin film transistor that is disposed on the first light blocking layer and controls a light emission of the light emitting element; a first insulating layer that covers an active layer of the thin film transistor; a second light blocking layer that is disposed on the first insulating layer so as to cover the thin film transistor and blocks the external light; and a first light blocking wall that is connected to the first light blocking layer and the second light blocking layer and blocks the external light.Type: GrantFiled: July 23, 2020Date of Patent: December 13, 2022Assignees: TIANMA JAPAN, LTD., WUHAN TIANMA MICRO-ELECTRONICS CO., LTD.Inventor: Jun Tanaka
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Patent number: 10580667Abstract: A heat treatment apparatus is provided with two cool chambers, that is, a first cool chamber and a second cool chamber. A semiconductor wafer before treatment is alternately carried into the first cool chamber or the second cool chamber and then transported to a heat treatment part by a transport robot after a nitrogen purge is performed. The semiconductor wafer after being heat-treated in the heat treatment part is alternately transported to the first cool chamber or the second cool chamber to be cooled. A sufficient cooling time is secured for the independent semiconductor wafer, and a reduction in throughput as the whole heat treatment apparatus can be suppressed.Type: GrantFiled: June 29, 2017Date of Patent: March 3, 2020Assignee: SCREEN Holdings Co., Ltd.Inventors: Takayuki Aoyama, Yasuaki Kondo, Shinji Miyawaki, Shinichi Kato, Kazuhiko Fuse, Hideaki Tanimura, Akitsugu Ueda, Hikaru Kawarazaki, Masashi Furukawa
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Patent number: 10566321Abstract: In a method for wafer-to-wafer bonding, an integrated circuit (IC) wafer and a phase-change material (PCM) switch wafer are provided. The IC includes at least one active device, and has an IC substrate side and a metallization side. The PCM switch wafer has a heat spreading side and a radio frequency (RF) terminal side. A heat spreader is formed in the PCM switch wafer. In one approach, the heat spreading side of the PCM switch wafer is bonded to the metallization side of the IC wafer, then a heating element is formed between the heat spreader and a PCM in the PCM switch wafer. In another approach, a heating element is formed between the heat spreader and a PCM in the PCM switch wafer, then the RF terminal side of the PCM switch wafer is bonded to the metallization side of the IC wafer.Type: GrantFiled: May 15, 2019Date of Patent: February 18, 2020Assignee: Newport Fab, LLCInventors: Gregory P. Slovin, David J. Howard
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Patent number: 9530964Abstract: In a method of manufacturing a display, the method includes: forming a display device on a substrate attached to a first surface of a carrier; arranging, on a second surface of the carrier, a shield that corresponds to at least a portion of edge areas of the substrate and comprises non-transparent shielding areas; and irradiating light onto the second surface of the carrier to separate a portion of the substrate from the carrier.Type: GrantFiled: November 25, 2015Date of Patent: December 27, 2016Assignee: Samsung Display Co., Ltd.Inventors: Donghoon Lee, Joonhyung Kim
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Patent number: 9023688Abstract: A method for processing a semiconductor device, the method including; providing a first semiconductor layer including first transistors; forming interconnection layers overlying the transistors, where the interconnection layers include copper or aluminum; forming a shielding heat conducting layer overlaying the interconnection layers; forming an isolation layer overlaying the shielding heat conducting layer; forming a second semiconductor layer overlying the isolation layer, and processing the second semiconductor layer at a temperature greater than about 400° C., where the interconnection layers are kept at a temperature below about 400° C.Type: GrantFiled: June 7, 2014Date of Patent: May 5, 2015Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Brian Cronquist, Albert Karl Henning
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Patent number: 9000418Abstract: A field-effect transistor includes a semiconductor layer (14) having a portion functioning as a channel region. The semiconductor layer (14) includes, as its constituent components, a plurality of electrically conductive microparticles (52), organic semiconductor molecules (53) bonded to the microparticles (52) so as to link the microparticles to one another (52), and cyclic molecules. Each of the organic semiconductor molecules (53) includes a ?-electron conjugated chain as its main chain, and the ?-electron conjugated chain is insulated by cyclic molecules.Type: GrantFiled: November 18, 2005Date of Patent: April 7, 2015Assignee: Panasonic CorporationInventors: Takayuki Takeuchi, Kenji Harada, Nobuaki Kambe, Jun Terao
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Patent number: 8987865Abstract: A resistor structure incorporated into a resistive switching memory cell or device to form memory devices with improved device performance and lifetime is provided. The resistor structure may be a two-terminal structure designed to reduce the maximum current flowing through a memory device. A method is also provided for making such memory device. The method includes depositing a resistor structure and depositing a variable resistance layer of a resistive switching memory cell of the memory device, where the resistor structure is disposed in series with the variable resistance layer to limit the switching current of the memory device. The incorporation of the resistor structure is very useful in obtaining desirable levels of device switching currents that meet the switching specification of various types of memory devices. The memory devices may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices.Type: GrantFiled: May 27, 2014Date of Patent: March 24, 2015Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Dipankar Pramanik, Tony P. Chiang, Mankoo Lee
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Patent number: 8957430Abstract: A light emitting device is fabricated by providing a mounting substrate and an array of light emitting diode dies adjacent the mounting substrate to define gaps. A gel that is diluted in a solvent is applied on the substrate and on the array of light emitting dies. At least some of the solvent is evaporated so that the gel remains in the gaps, but does not completely cover the light emitting diode dies. For example, the gel substantially recedes from the substrate beyond the array of light emitting diode dies and also substantially recedes from an outer face of the light emitting diode dies. Related light emitting device structures are also described.Type: GrantFiled: February 9, 2012Date of Patent: February 17, 2015Assignee: Cree, Inc.Inventor: Matthew Donofrio
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Patent number: 8859391Abstract: A method for manufacturing a semiconductor device including: forming a wiring layer on a surface side of a first semiconductor wafer; forming a buried film so as to fill in a level difference on the wiring layer, the level difference being formed at a boundary between a peripheral region of the first semiconductor wafer and an inside region being on an inside of the peripheral region, and the level difference being formed as a result of a surface over the wiring layer in the peripheral region being formed lower than a surface over the wiring layer in the inside region, and making the surfaces over the wiring layer in the peripheral region and the inside region substantially flush with each other; and opposing and laminating the surfaces over the wiring layer formed in the first semiconductor wafer to a desired surface of a second semiconductor wafer.Type: GrantFiled: February 3, 2012Date of Patent: October 14, 2014Assignee: Sony CorporationInventor: Hiroyasu Matsugai
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Patent number: 8828779Abstract: A backside illumination (BSI) CMOS image sensing process includes the following steps. A substrate having an active side is provided. A curving process is performed to curve the active side. A reflective layer is formed on the active side, so that at least a curved mirror is formed on the active side.Type: GrantFiled: November 1, 2012Date of Patent: September 9, 2014Assignee: United Microelectronics Corp.Inventor: Xin Zhao
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Patent number: 8822281Abstract: A semiconductor device has a semiconductor die mounted over a carrier. An encapsulant is deposited over the semiconductor die and carrier. An insulating layer is formed over the semiconductor die and encapsulant. A plurality of first vias is formed through the insulating layer and semiconductor die while mounted to the carrier. A plurality of second vias is formed through the insulating layer and encapsulant in the same direction as the first vias while the semiconductor die is mounted to the carrier. An electrically conductive material is deposited in the first vias to form conductive TSV and in the second vias to form conductive TMV. A first interconnect structure is formed over the insulating layer and electrically connected to the TSV and TMV. The carrier is removed. A second interconnect structure is formed over the semiconductor die and encapsulant and electrically connected to the TSV and TMV.Type: GrantFiled: February 23, 2010Date of Patent: September 2, 2014Assignee: STATS ChipPAC, Ltd.Inventors: Reza A. Pagaila, Yaojian Lin, Seung Uk Yoon
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Patent number: 8779517Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: GrantFiled: March 8, 2012Date of Patent: July 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Patent number: 8754538Abstract: A semiconductor chip includes a first mark for identifying a position of the chip within an exposure field. The semiconductor chip includes a first matrix in a first layer of the chip and a second mark within the first matrix identifying a position of the exposure field on a wafer.Type: GrantFiled: June 24, 2008Date of Patent: June 17, 2014Assignee: Infineon Technologies AGInventor: Jörg Ortner
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Patent number: 8748237Abstract: A resistor structure incorporated into a resistive switching memory cell or device to form memory devices with improved device performance and lifetime is provided. The resistor structure may be a two-terminal structure designed to reduce the maximum current flowing through a memory device. A method is also provided for making such memory device. The method includes depositing a resistor structure and depositing a variable resistance layer of a resistive switching memory cell of the memory device, where the resistor structure is disposed in series with the variable resistance layer to limit the switching current of the memory device. The incorporation of the resistor structure is very useful in obtaining desirable levels of device switching currents that meet the switching specification of various types of memory devices. The memory devices may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices.Type: GrantFiled: October 28, 2013Date of Patent: June 10, 2014Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Dipankar Pramanik, Tony P. Chiang, Mankoo Lee
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Patent number: 8742547Abstract: A semiconductor wafer includes: a first semiconductor chip area formed with a semiconductor element; a second semiconductor chip area formed with a semiconductor element; and a scribe area sandwiched between the first and second semiconductor chip areas; wherein: the first semiconductor chip area includes a first metal ring surrounding the semiconductor element formed in the first semiconductor chip area; and the metal ring is constituted of a plurality of metal layers including a lower metal layer and an upper metal layer superposed upon the lower metal layer, and the upper metal layer is superposed upon the lower metal layer in such a manner that an outer side wall of the upper metal layer is flush with the outer side wall of the lower metal layer or is at an inner position of the first semiconductor chip area relative to the outer side wall of the lower metal layer.Type: GrantFiled: February 15, 2011Date of Patent: June 3, 2014Assignee: Fujitsu Semiconductor LimitedInventors: Kazutaka Yoshizawa, Taiji Ema
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Patent number: 8728846Abstract: A thermoelectric device is disclosed which includes metal thermal terminals protruding from a top surface of an IC, connected to vertical thermally conductive conduits made of interconnect elements of the IC. Lateral thermoelectric elements are connected to the vertical conduits at one end and heatsinked to the IC substrate at the other end. The lateral thermoelectric elements are thermally isolated by interconnect dielectric materials on the top side and field oxide on the bottom side. When operated in a generator mode, the metal thermal terminals are connected to a heat source and the IC substrate is connected to a heat sink. Thermal power flows through the vertical conduits to the lateral thermoelectric elements, which generate an electrical potential. The electrical potential may be applied to a component or circuit in the IC. The thermoelectric device may be integrated into an IC without adding fabrication cost or complexity.Type: GrantFiled: August 20, 2009Date of Patent: May 20, 2014Assignee: Texas Instruments IncorporatedInventors: Barry Jon Male, Philip L. Hower
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Patent number: 8647945Abstract: A semiconductor structure is provided that includes a material stack including an epitaxially grown semiconductor layer on a base semiconductor layer, a dielectric layer on the epitaxially grown semiconductor layer, and an upper semiconductor layer present on the dielectric layer. A capacitor is present extending from the upper semiconductor layer through the dielectric layer into contact with the epitaxially grown semiconductor layer. The capacitor includes a node dielectric present on the sidewalls of the trench and an upper electrode filling at least a portion of the trench. A substrate contact is present in a contact trench extending from the upper semiconductor layer through the dielectric layer and the epitaxially semiconductor layer to a doped region of the base semiconductor layer. A substrate contact is also provided that contacts the base semiconductor layer through the sidewall of a trench. Methods for forming the above-described structures are also provided.Type: GrantFiled: December 3, 2010Date of Patent: February 11, 2014Assignee: International Business Machines CorporationInventors: Geng Wang, Roger A. Booth, Jr., Kangguo Cheng, Joseph Ervin, Chengwen Pei, Ravi M. Todi
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Patent number: 8637862Abstract: A device housing is provided. The device housing includes a substrate, a silicon dioxide film formed on the substrate, and a zinc oxide film formed on the silicon dioxide film. The silicon dioxide film has micrometer sized structures. The zinc oxide film has nanometer sized structures. A method for making the device housing is also described there.Type: GrantFiled: April 15, 2011Date of Patent: January 28, 2014Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd, Hon Hai Precision Industry Co., Ltd.Inventors: Hsin-Pei Chang, Wen-Rong Chen, Huann-Wu Chiang, Cheng-Shi Chen, Ying-Ying Wang
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Patent number: 8598682Abstract: A resistor structure incorporated into a resistive switching memory cell or device to form memory devices with improved device performance and lifetime is provided. The resistor structure may be a two-terminal structure designed to reduce the maximum current flowing through a memory device. A method is also provided for making such memory device. The method includes depositing a resistor structure and depositing a variable resistance layer of a resistive switching memory cell of the memory device, where the resistor structure is disposed in series with the variable resistance layer to limit the switching current of the memory device. The incorporation of the resistor structure is very useful in obtaining desirable levels of device switching currents that meet the switching specification of various types of memory devices. The memory devices may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices.Type: GrantFiled: November 13, 2012Date of Patent: December 3, 2013Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLCInventors: Dipankar Pramanik, Tony P. Chiang, Mankoo Lee
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Patent number: 8592107Abstract: Provided is an apparatus that includes an overlay mark. The overlay mark includes a first portion that includes a plurality of first features. Each of the first features have a first dimension measured in a first direction and a second dimension measured in a second direction that is approximately perpendicular to the first direction. The second dimension is greater than the first dimension. The overlay mark also includes a second portion that includes a plurality of second features. Each of the second features have a third dimension measured in the first direction and a fourth dimension measured in the second direction. The fourth dimension is less than the third dimension. At least one of the second features is partially surrounded by the plurality of first features in both the first and second directions.Type: GrantFiled: November 2, 2012Date of Patent: November 26, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Guo-Tsai Huang, Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke
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Patent number: 8563366Abstract: A resistor structure incorporated into a resistive switching memory cell or device to form memory devices with improved device performance and lifetime is provided. The resistor structure may be a two-terminal structure designed to reduce the maximum current flowing through a memory device. A method is also provided for making such memory device. The method includes depositing a resistor structure and depositing a variable resistance layer of a resistive switching memory cell of the memory device, where the resistor structure is disposed in series with the variable resistance layer to limit the switching current of the memory device. The incorporation of the resistor structure is very useful in obtaining desirable levels of device switching currents that meet the switching specification of various types of memory devices. The memory devices may be formed as part of a high-capacity nonvolatile memory integrated circuit, which can be used in various electronic devices.Type: GrantFiled: February 28, 2012Date of Patent: October 22, 2013Assignees: Intermolecular Inc., Kabushiki Kaisha Toshiba, Sandisk 3D LLCInventors: Dipankar Pramanik, Tony P. Chiang, Mankoo Lee
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Patent number: 8551830Abstract: There is provided a small-type semiconductor integrated circuit whose circuit area is small and whose wiring length is short. The semiconductor integrated circuit is constructed in a multi-layer structure and is provided with a first semiconductor layer, a first semiconductor layer transistor formed in the first semiconductor layer, a wiring layer which is deposited on the first semiconductor layer and in which metal wires are formed, a second semiconductor layer deposited on the wiring layer and a second semiconductor layer transistor formed in the second semiconductor layer. It is noted that insulation of a gate insulating film of the first semiconductor layer transistor is almost equal with that of a gate insulating film of the second semiconductor layer transistor and the gate insulating film of the second semiconductor layer transistor is formed by means of radical oxidation or radical nitridation.Type: GrantFiled: April 28, 2008Date of Patent: October 8, 2013Assignees: Advantest Corporation, National University Corporation Tohoku UniversityInventors: Tadahiro Ohmi, Koji Kotani, Kazuyuki Maruo, Takahiro Yamaguchi
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Patent number: 8492884Abstract: A stacked leadframe assembly is disclosed. The stacked leadframe assembly includes a first die having a surface that defines a mounting plane, a first leadframe stacked over and attached to the first die, a second die stacked over and attached to the first leadframe; and a second leadframe stacked over and attached to the second die. The leadframes have die paddles with extended side panels that have attachment surfaces in the mounting plane.Type: GrantFiled: June 7, 2010Date of Patent: July 23, 2013Assignee: Linear Technology CorporationInventor: David Alan Pruitt
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Publication number: 20130134544Abstract: An energy harvesting integrated circuit (IC) includes electrical connectors, each having a portion of a first material and a portion of a second material. The first and the second materials have a thermoelectric potential. The IC includes a trace of the first material coupled to the first material of each electrical connector, and a trace of the second material coupled to the second material of each electrical connector and the first trace. A portion of the second trace extends away from a portion of the first trace. The IC has charge storing elements coupled to the first and/or second traces. The first material and the second material are heated to create an electron flow from a thermal gradient between a first zone of the heated first and second materials and a second zone of the first and the second materials away from the first zone.Type: ApplicationFiled: November 28, 2011Publication date: May 30, 2013Applicant: QUALCOMM INCORPORATEDInventor: Henry L. Sanchez
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Patent number: 8426235Abstract: A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.Type: GrantFiled: May 13, 2010Date of Patent: April 23, 2013Assignee: Canon Kabushiki KaishaInventor: Chienliu Chang
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Patent number: 8420453Abstract: A method of forming an active region structure includes preparing a semiconductor substrate including a cell array region and a peripheral circuit region, forming preliminary cell active regions in the cell array region of the semiconductor substrate, and forming cell active regions in the preliminary cell active regions and at least one peripheral active region in the peripheral circuit region of the semiconductor substrate, such that the preliminary cell active regions, the cell active regions, and the at least one peripheral active region are integrally formed with the semiconductor substrate and protrude from the semiconductor substrate.Type: GrantFiled: May 20, 2010Date of Patent: April 16, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jun-Ho Yoon, Byeong-Soo Kim, Kyoung-Sub Shin, Hong Cho, Hyung-Yong Kim
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Patent number: 8373236Abstract: The invention relates to a semiconductor device (10) with a substrate (11) and a semiconductor body (1) comprising a bipolar transistor with in that order a collector region (2), a base region (3), and an emitter region (4), wherein the semiconductor body comprises a projecting mesa (5) comprising at least a portion of the collector region (2) and the base region (3), which mesa is surrounded by an isolation region (6). According to the invention, the semiconductor device (10) also comprises a field effect transistor with a source region, a drain region, an interposed channel region, a superimposed gate dielectric (7), and a gate region (8), which gate region (8) forms a highest part of the field effect transistor, and the height of the mesa (5) is greater than the height of the gate region (8). This device can be manufactured inexpensively and easily by a method according to the invention, and the bipolar transistor can have excellent high-frequency characteristics.Type: GrantFiled: June 12, 2007Date of Patent: February 12, 2013Assignees: NXP, B.V., Interuniversitair Microelektronica Centrum VZWInventors: Erwin Hijzen, Joost Melai, Wibo Van Noort, Johannes Donkers, Philippe Meunier-Beillard, Andreas M. Piontek, Li Jen Choi, Stefaan Van Huylenbroeck
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Patent number: 8362574Abstract: FinFETs and methods of making FinFETs are provided. The FinFET contains two or more fins over a semiconductor substrate; two or more epitaxial layers over side surfaces of the fins; and metal-semiconductor compounds over an upper surfaces of the epitaxial layers. The fin has side surfaces that are substantially vertical relative to the upper surface of the semiconductor substrate. The epitaxial layer has an upper surface that extends at an oblique angle with respect to the side surface of the fin. The FinFET can contain a contact over the metal-semiconductor compounds.Type: GrantFiled: June 4, 2010Date of Patent: January 29, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Hirohisa Kawasaki, Chung-hsun Lin
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Patent number: 8329360Abstract: Provided is an apparatus that includes an overlay mark. The overlay mark includes a first portion that includes a plurality of first features. Each of the first features have a first dimension measured in a first direction and a second dimension measured in a second direction that is approximately perpendicular to the first direction. The second dimension is greater than the first dimension. The overlay mark also includes a second portion that includes a plurality of second features. Each of the second features have a third dimension measured in the first direction and a fourth dimension measured in the second direction. The fourth dimension is less than the third dimension. At least one of the second features is partially surrounded by the plurality of first features in both the first and second directions.Type: GrantFiled: December 4, 2009Date of Patent: December 11, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Guo-Tsai Huang, Fu-Jye Liang, Li-Jui Chen, Chih-Ming Ke
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Publication number: 20120299127Abstract: A dynamic quantity sensor device includes: first and second dynamic quantity sensors having first and second dynamic quantity detecting units; and first and second substrates, which are bonded to each other to provide first and second spaces. The first and second units are air-tightly accommodated in the first and second spaces, respectively. A SOI layer of the first substrate is divided into multiple semiconductor regions by trenches. First and second parts of the semiconductor regions provide the first and second units, respectively. The second part includes: a second movable semiconductor region having a second movable electrode, which is provided by a sacrifice etching of the embedded oxide film; and a second fixed semiconductor region having a second fixed electrode. The second sensor detects the second dynamic quantity by measuring a capacitance between the second movable and fixed electrodes, which is changeable in accordance with the second dynamic quantity.Type: ApplicationFiled: May 24, 2012Publication date: November 29, 2012Applicant: DENSO CORPORATIONInventors: Tetsuo FUJII, Keisuke GOTOH, Kenichi AO
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Patent number: 8299613Abstract: The invention relates to a method for connecting two joining surfaces, particularly in the field of semiconductors, wherein at least one joining surface is produced by depositing a layer comprising 20 to 40% gold and 80 to 60% silver onto a substrate and selectively removing the silver from the deposited layer in order to produce a nanoporous gold layer as a joining surface. The joining surface with the nanoporous gold layer and an additional joining surface are disposed one above the other and pressed together.Type: GrantFiled: November 14, 2008Date of Patent: October 30, 2012Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.Inventor: Hermann Oppermann
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Patent number: 8278746Abstract: Described herein are wafer-level semiconductor device packages with stacking functionality and related stacked package assemblies and methods. In one embodiment, a semiconductor device package includes a set of connecting elements disposed adjacent to a periphery of a set of stacked semiconductor devices. At least one of the connecting elements is wire-bonded to an active surface of an upper one of the stacked semiconductor devices.Type: GrantFiled: April 2, 2010Date of Patent: October 2, 2012Assignee: Advanced Semiconductor Engineering, Inc.Inventors: Yi-Chuan Ding, Chia-Ching Chen
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Patent number: 8268674Abstract: A semiconductor device includes a semiconductor constituent provided with a semiconductor substrate and a plurality of electrodes for external connection provided under the semiconductor substrate. A lower-layer insulating film is provided under and around the semiconductor constituent. A plurality of lower-layer wirings are electrically connected to the electrodes for external connection of the semiconductor constituent, and provided under the lower-layer insulating film. An insulation layer is provided on the lower-layer insulating film in the periphery of the semiconductor constituent. An upper-layer insulating film is provided on the semiconductor constituent and the Insulation layer. A plurality of upper-layer wirings are provided on the upper-layer insulating film. A base plate on which the semiconductor constituent and the insulation layer are mounted is removed.Type: GrantFiled: August 3, 2010Date of Patent: September 18, 2012Assignee: Teramikros, Inc.Inventor: Hiroyasu Jobetto
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Patent number: 8242007Abstract: Provided are a semiconductor device including a source/drain and a gate formed using a doped polysilicon process, and a method of fabricating the semiconductor device. The method comprises: forming a gate insulating layer on a part of an active region on a first conductivity type epitaxial layer; forming a conductive layer on the epitaxial layer; implanting high concentration impurities of a second conductivity type a first portion of the conductive layer on the gate insulating layer and second portions of the conductive layer on both sides of the first insulating layer; patterning the conductive layer; forming a second insulating layer on the epitaxial layer and high concentration impurity regions of the second conductivity type below the second conductive pattern; and implanting low-concentration impurities of the second conductivity type into the epitaxial layer between a gate structure and the high concentration impurity regions.Type: GrantFiled: March 11, 2009Date of Patent: August 14, 2012Assignee: Fairchild Korea Semiconductor, Ltd.Inventors: Jong-ho Park, Chang-ki Jeon, Hyi-jeong Park
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Patent number: 8232603Abstract: A gated diode structure and a method for fabricating the gated diode structure use a relaxed liner that is derived from a stressed liner that is typically used within the context of a field effect transistor formed simultaneously with the gated diode structure. The relaxed liner is formed incident to treatment, such as ion implantation treatment, of the stressed liner. The relaxed liner provides improved gated diode ideality in comparison with the stressed liner, absent any gated diode damage that may occur incident to stripping the stressed liner from the gated diode structure while using a reactive ion etch method.Type: GrantFiled: February 9, 2010Date of Patent: July 31, 2012Assignee: International Business Machines CorporationInventors: Anthony I. Chou, Gregory G. Freeman, Kevin McStay, Shreesh Narasimha
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Publication number: 20120168873Abstract: Transmission gates, methods of fabricating transmission gates, and design structures for a transmission gate. The transmission gate includes an n-channel field effect transistor characterized by terminals that are asymmetrically doped and a p-channel field effect transistor characterized by terminals that are asymmetrically doped.Type: ApplicationFiled: January 5, 2011Publication date: July 5, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Brent A. Anderson, Andres Bryant, Edward J. Nowak
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Publication number: 20120104538Abstract: Disclosed is a damascene method for forming a semiconductor structure and the resulting semiconductor structure having multiple fin-shaped channel regions with different widths. In the method, fin-shaped channel regions are etched using differently configured isolating caps as masks to define the different widths. For example, a wide width isolating cap can comprise a dielectric body positioned laterally between dielectric spacers and can be used as a mask to define a relatively wide width channel region; a medium width isolating cap can comprise a dielectric body alone and can be used as a mask to define a medium width channel region and/or a narrow width isolating cap can comprise a dielectric spacer alone and can be used as a mask to define a relatively narrow width channel region. These multiple fin-shaped channel regions with different widths can be incorporated into either multiple multi-gate field effect transistors (MUGFETs) or a single MUGFET.Type: ApplicationFiled: October 29, 2010Publication date: May 3, 2012Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak, Jed H. Rankin
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Publication number: 20120086082Abstract: A dual port static random access memory cell has pull-down transistors, pull-up transistors, and pass transistors. A first active region has a first pull-down transistor coupled to a true data node, a second pull-down transistor coupled to a complementary data node; a first pass transistor coupled to the true data node, and a second pass transistor coupled to the complementary data node. A second active region has the same size and shape as the first active region and has a third pull-down transistor coupled in parallel to the first-pull down transistor, a fourth pull-down transistor coupled in parallel to the second pull-down transistor; a third pass transistor coupled to the true data node, and a fourth pass transistor coupled to the complementary data node. A first pull-up transistor and a second pull-up transistor are located between the first and second active regions.Type: ApplicationFiled: October 7, 2010Publication date: April 12, 2012Inventors: PIERRE MALINGE, JACK M. HIGMAN, SANJAY R. PARIHAR
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Publication number: 20120045869Abstract: A low thermal conductivity material layer covers a peripheral portion of the bottom surface of the conductive plate of a chip bonder head. The center portion of the conductive plate is exposed or covered with another conductive plate laterally surrounded by the low thermal conductivity material layer. During bonding, the chip bonder head holds a first substrate upside down and heats the first substrate through the conductive plate. Heating of a fillet, i.e., the laterally extruding portion, of a pre-applied underfill material is reduced because the temperature at the exposed surfaces of the low thermal conductivity material layer is lower than the temperature at the bottom surface of the conductive plate. The longer curing time and the more uniform shape of the fillet in the bonded structure enhance the structural reliability of the bonded substrates.Type: ApplicationFiled: August 23, 2010Publication date: February 23, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Michael A. Gaynes, Jae-Woong Nah
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Patent number: 8120164Abstract: A semiconductor chip package and printed circuit board assembly including the same which have a variable mounting orientation include a semiconductor chip disposed on a first surface of an insulating substrate, connectors symmetrically disposed at respective first and opposite second sides of the insulating substrate, a plurality of input/output connecting leads and power connecting leads electrically connected by connecting members to a plurality of internal circuits of the semiconductor chip, at least two internal circuits of the plurality of internal circuits being substantially similar circuits, and a radiating pad disposed on a second opposite surface of the insulating substrate and which is electrically connected to the semiconductor chip.Type: GrantFiled: November 30, 2007Date of Patent: February 21, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Eun-woo Jeong, Yong-gwang Won
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Publication number: 20120032271Abstract: A novel semiconductor inverter is presented. The semiconductor structure is simple and has a reduced number of semiconductor junctions. It offers the advantage of being very small in area, very fast and very efficient. The current conductivity from either of the two main terminals to the output terminal is controlled by the gate voltage by means of depleting and enhancing the areas underneath the gate oxide. The signal isolation is obtained mainly by the carrier depletion of the channel region. Having a reduced number of semiconductor junctions, the intrinsic current leakage can be very small. This inverter is the elementary component for latches, memory and logic elements based on this technology.Type: ApplicationFiled: October 25, 2010Publication date: February 9, 2012Inventors: Fabio Alessio Marino, Paolo Menegoli
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Patent number: 8093085Abstract: A method of forming a suspension object on a monolithic substrate is provided. A silicon base layer of the monolithic substrate has a circuit layer composed of at least one wet etching region, at least one circuit region, and at least one microstructure region. The wet etching region is used to partition the circuit region and the microstructure region, and extends downwards to a surface of the silicon base layer, so as to form an etching path for etching the silicon base layer from above the substrate. Next, an upper surface and a lower surface of the silicon base layer are respectively etched through dry etching, such that the microstructure region is suspended.Type: GrantFiled: June 15, 2010Date of Patent: January 10, 2012Assignee: Memsor CorporationInventor: Siew Seong Tan
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Patent number: 8084310Abstract: Embodiments of the present invention pertain to methods of forming patterned features on a substrate having a reduced pitch in two dimensions as compared to what is possible using standard photolithography processing techniques using a single high-resolution photomask. A spacer layer is formed over a two-dimensional square grid of cores with a thickness chosen to leave a dimple at the center of four cores on the corners of a square. The spacer layer is etched back to reveal the substrate at the centers of the square. Removing the core material results in double the pattern density of the lithographically defined grid of cores. The regions of exposed substrate may be filled again with core material and the process repeated to quadruple the pattern density.Type: GrantFiled: October 21, 2009Date of Patent: December 27, 2011Assignee: Applied Materials, Inc.Inventors: Bencherki Mebarki, Li Yan Miao, Christopher Dennis Bencher, Jen Shu
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Patent number: 8084851Abstract: A module has at least two ICs connected to each other such that they lie in different planes and are arranged as a first stack of ICs, a third IC is connected to at least one of the at least two ICs, wherein the third IC is off plane from both of the at least two ICs.Type: GrantFiled: February 23, 2010Date of Patent: December 27, 2011Assignee: Cufer Asset Ltd. L.L.C.Inventor: John Trezza
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Publication number: 20110298114Abstract: A stacked leadframe assembly is disclosed. The stacked leadframe assembly includes a first die having a surface that defines a mounting plane, a first leadframe stacked over and attached to the first die, a second die stacked over and attached to the first leadframe; and a second leadframe stacked over and attached to the second die. The leadframes have die paddles with extended side panels that have attachment surfaces in the mounting plane.Type: ApplicationFiled: June 7, 2010Publication date: December 8, 2011Inventor: David Alan PRUITT
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Publication number: 20110300668Abstract: An assembly process properly positions and align a plurality of first die within a carrier substrate. The first die are positioned within cavities formed in the carrier substrate. The carrier substrate is then aligned with a second substrate having a plurality of second die fabricated therein. The first die and the second die are fabricated using different technologies. Aligning the carrier substrate and the second substrate aligns the first die with the second die. One or more first die can be aligned with each second die. Once aligned, a wafer bonding process is performed to bond the first die to the second die. In some cases, the carrier substrate is removed, leaving behind the first die bonded to the second die of the second substrate. In other cases, the carrier substrate is left in place as a cap. The second substrate is then cut to form die stacks.Type: ApplicationFiled: June 2, 2010Publication date: December 8, 2011Applicant: MAXIM INTEGRATED PRODUCTS, INC.Inventor: Pirooz Parvarandeh
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Publication number: 20110298058Abstract: FinFETs and methods of making. FinFETs are provided. The FinFET contains two or more fins over a semiconductor substrate; two or more epitaxial layers over side surfaces of the fins; and metal-semiconductor compounds over an upper surfaces of the epitaxial layers. The fin has side surfaces that are substantially vertical relative to the upper surface of the semiconductor substrate. The epitaxial layer has an upper surface that extends at an oblique angle with respect to the side surface of the fin. The FinFET can contain a contact over the metal-semiconductor compounds.Type: ApplicationFiled: June 4, 2010Publication date: December 8, 2011Applicant: TOSHIBA AMERICA ELECTRONIC COMPONENTS, INC.Inventors: Hirohisa Kawasaki, Chung-hsun Lin