By Deposition Over Sacrificial Masking Layer, E.g., Lift-off (epo) Patents (Class 257/E21.587)
  • Patent number: 7320900
    Abstract: Before cutting a gang-printed substrate having a multiplicity of liquid crystal display panel regions provided thereon into individual liquid crystal display panels, a voltage is applied to all of the multiplicity of liquid crystal display panel regions to inspect display defects, polymerize a monomer in the liquid crystal component, and control alignment of the liquid crystal, which allows the time required for a voltage applying step to be reduced and allows a reduction in the manufacturing cost. A dispenser injection process is used to allow a liquid crystal to be injected between mother boards that have not been cut into individual display panels, and a voltage is applied after the pair of glass substrates are combined and before they are cut into individual display panels to perform a test on display defects (dynamic operating test), pretilt control, and an aligning process.
    Type: Grant
    Filed: February 19, 2003
    Date of Patent: January 22, 2008
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Yoshinori Tanaka, Yoshiaki Maruyama
  • Patent number: 7309649
    Abstract: A method to form a closed air gap interconnect structure is described. A starting structure made of regions of a permanent support dielectric under the interconnect lines and surrounding interconnect vias with one or more sacrificial dielectrics present in the remaining portions of the interconnect structure, is capped with a dielectric barrier which is perforated using a stencil with a regular array of holes. The sacrificial dielectrics are then extracted through the holes in the dielectric barrier layer such that the interconnect lines are substantially surrounded by air except for the regions of the support dielectric under the lines. The holes in the cap layer are closed off by depositing a second barrier dielectric so that a closed air gap is formed. Several embodiments of this method and the resulting structures are described.
    Type: Grant
    Filed: April 17, 2006
    Date of Patent: December 18, 2007
    Assignee: International Business Machines Corporation
    Inventors: Matthew E Colburn, Timothy J Dalton, Elbert Huang, Anna Karecki, legal representative, Satya V Nitta, Sampath Purushothaman, Katherine L Saenger, Maheswaran Surendra, Simon M Karecki, deceased
  • Publication number: 20070238285
    Abstract: The present invention provides a method of forming interconnects in a photovoltaic module. According to one aspect, a method according to the invention includes processing steps that are similar to those performed in conventional integrated circuit fabrication. For example, the method can include masks and etches to form isolation grooves between cells, and additional etches to form a conductive step adjacent to the grooves that can be used to form interconnects between cells. According to another aspect the method for forming the conductive step can be self-aligned, such as by positioning a mirror above the module and exposing photoresist from underneath the substrate at an angle one or more times, and etching to expose the conductive step. According to another aspect, the process can include steps to form grid lines in the module to improve current transport in the structure.
    Type: Application
    Filed: March 31, 2006
    Publication date: October 11, 2007
    Inventor: Peter Borden
  • Patent number: 7229873
    Abstract: The present invention provides a method of forming a dual work function metal gate microelectronics device 200. In one aspect, the method includes forming nMOS and pMOS stacked gate structures 315a and 315b. The nMOS and pMOS stacked gate structures 315a and 315b each comprise a gate dielectric 205, a first metal layer, 305 located over the gate dielectric 205 and a sacrificial gate layer 310 located over the first metal layer 305. The method further includes removing the sacrificial gate layer 310 in at least one of the nMOS or pMOS stacked gate structures, thereby forming a gate opening 825 and modifying the first metal layer 305 within the gate opening 825 to form a gate electrode with a desired work function.
    Type: Grant
    Filed: August 10, 2005
    Date of Patent: June 12, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Luigi Colombo, James J. Chambers, Mark R. Visokay
  • Patent number: 7214603
    Abstract: Methods to form interconnect structures utilizing sacrificial filling material layers are described herein. Utilizing the sacrificial filling material makes it possible to reduce damage to interlayer dielectric layers that result in enhanced device performance and/or increased reliability.
    Type: Grant
    Filed: June 1, 2005
    Date of Patent: May 8, 2007
    Assignee: International Business Machines Corporation
    Inventors: Ronald Dellaguardia, Elbert Huang, Qinghuang Lin, Robert Miller