Abstract: The present invention describes a rewiring plate for components with connection grids of between approx. 100 nm and 10 ?m, which rewiring plate includes a base body and passages with carbon nanotubes, the lower end of the passages opening out into contact connection surfaces, and the carbon nanotubes forming an electrically conductive connection from the contact connection surfaces to the front surface of the base body.
Type:
Grant
Filed:
December 16, 2004
Date of Patent:
September 11, 2007
Assignee:
Infineon Technologies AG
Inventors:
Gottfried Beer, Jochen Dangelmaier, Alfred Haimerl, Manfred Mengel, Klaus Mueller, Klaus Pressel
Abstract: A thermal conductor is made of copper and carbon nanotubes powders that are compressed together and then cold rolled into sheets for aligning the carbon nanotubes for providing a composite matrix having a low coefficient of thermal expansion, high thermal conductivity, and high electrical conductivity, for preferred use as a conducting heat sink, such as a laser submount, for heat sinking dissipation and electrical grounding of high-power electrical components and circuits, such as a laser diode.
Abstract: A Ti film is pattern-formed on a desired portion on a silicon substrate, and a Co film is formed on the substrate so as to cover the Ti film. CNTs are formed only on a portion, under which the Ti film is formed, of the surface of the Co film at approximately 600° C. by a thermal CVD method. The length of the CNT can be controlled by adjusting the thickness of the Ti film.