Photodiode Array Or Mos Imager (epo) Patents (Class 257/E27.133)
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Patent number: 8436407Abstract: A photoelectric conversion device includes photoelectric conversion elements and element isolation regions, both of which are arranged on a semiconductor substrate. The photoelectric conversion device further includes a plurality of interlayer insulation layers including a first interlayer insulation layer arranged nearest to the semiconductor substrate, and a second interlayer insulation layer arranged to cover the first interlayer insulation layer. Gaps extending from at least the second interlayer insulation layer to the first interlayer insulation layer are arranged in first and second interlayer insulation layer regions corresponding to the element isolation regions.Type: GrantFiled: July 7, 2008Date of Patent: May 7, 2013Assignee: Canon Kabushiki KaishaInventors: Aiko Furuichi, Shigeru Nishimura
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Patent number: 8436443Abstract: A backside illuminated image sensor is provided which includes a substrate having a front side and a backside, a sensor formed in the substrate at the front side, the sensor including at least a photodiode, and a depletion region formed in the substrate at the backside, a depth of the depletion region is less than 20% of a thickness of the substrate.Type: GrantFiled: April 22, 2008Date of Patent: May 7, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Hsuan Hsu, Han-Chi Liu, Ching-Chun Wang
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Patent number: 8431975Abstract: A back side illumination (BSI) image sensor includes at least one pixel. The pixel area includes a photo diode and a transfer transistor. The transfer transistor has a control electrode made of a gate poly and a gate oxide for receiving a control instruction, a first electrode coupled to the photo diode, and a second electrode, wherein an induced conduction channel of the transfer transistor partially surrounds a recessed space which is filled with the gate poly and the gate oxide of the transfer transistor.Type: GrantFiled: January 31, 2011Date of Patent: April 30, 2013Assignee: Himax Imaging, Inc.Inventors: Chih-Wei Hsiung, Fang-Ming Huang, Chung-Wei Chang
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Patent number: 8420517Abstract: A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front substrate surface. The method further includes depositing an ink on the front substrate surface in a ink pattern, the ink comprising a set of silicon-containing particles and a set of solvents. The method also includes heating the substrate in a baking ambient to a first temperature and for a first time period in order to create a densified film ink pattern.Type: GrantFiled: February 12, 2010Date of Patent: April 16, 2013Assignee: Innovalight, Inc.Inventors: Giuseppe Scardera, Shihai Kan, Maxim Kelman, Dmitry Poplavskyy
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Patent number: 8420434Abstract: A solid state imaging device having a back-illuminated type structure in which a lens is formed on the back side of a silicon layer with a light-receiving sensor portion being formed thereon. Insulating layers are buried into the silicon layer around an image pickup region, with the insulating layer being buried around a contact layer that connects an electrode layer of a pad portion and an interconnection layer of the surface side. A method of manufacturing such a solid-state imaging device is also provided.Type: GrantFiled: March 9, 2011Date of Patent: April 16, 2013Assignee: Sony CorporationInventors: Yuichi Yamamoto, Hayato Iwamoto
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Patent number: 8420433Abstract: A method is provided of forming a light sensing arrangement for use in a light sensor. The method comprises tiling a plurality of individual light sensing elements on a carrier, each element having a notch formed in an edge thereof, the notch being adapted to provide space, when the elements are tiled together, for an electrical connection to be made between the carrier and a surface of the element arranged to faced away from the carrier. Each element may comprise Silicon Photomultiplier (SPM) circuitry.Type: GrantFiled: July 30, 2008Date of Patent: April 16, 2013Assignee: SensL Technologies, Ltd.Inventors: John Carlton Jackson, Padraig Joseph Hughes, Peter John Ward
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Publication number: 20130087838Abstract: A photoelectric conversion device includes a film that covers the photoelectric conversion part and a transfer gate electrode, wherein a first region having a refractive index lower than refractive indices of the film and the photoelectric conversion part, is provided between the film and the photoelectric conversion part, and a second region having a refractive index lower than the refractive indices of the transfer gate electrode and the film, is provided between the film and the top surface of the transfer gate electrode, and wherein T1<T2<?/2?T1 is satisfied, where an optical thickness of the first region is T1, an optical thickness of the second region is T2, and a wavelength of a light incident on the photoelectric conversion part is ?.Type: ApplicationFiled: October 1, 2012Publication date: April 11, 2013Applicant: CANON KABUSHIKI KAISHAInventor: CANON KABUSHIKI KAISHA
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Patent number: 8415725Abstract: A solid-state imaging device including: a substrate; a light-receiving part; a second-conductivity-type isolation layer; a detection transistor; and a reset transistor.Type: GrantFiled: May 21, 2008Date of Patent: April 9, 2013Assignee: Sony CorporationInventor: Isao Hirota
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Publication number: 20130082312Abstract: Transistors, methods of manufacturing thereof, and image sensor circuits with reduced random telegraph signal (RTS) noise are disclosed. In one embodiment, a transistor includes a channel disposed between two isolation regions in a workpiece. The channel has edge regions proximate the isolation regions and a central region between the edge regions. The transistor includes a gate dielectric disposed over the channel, and a gate disposed over the gate dielectric. The transistor includes a voltage threshold modification feature proximate the edge regions configured to increase a voltage threshold of the transistor proximate edge regions relative to the central region of the channel.Type: ApplicationFiled: September 30, 2011Publication date: April 4, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: FENG-CHI HUNG, JHY-JYI SZE, SHOU-GWO WUU
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Patent number: 8409908Abstract: An apparatus for reducing photodiode thermal gain coefficient includes a bulk semiconductor material having a light-illumination side. The bulk semiconductor material includes a minority charge carrier diffusion length property configured to substantially match a predetermined hole diffusion length value and a thickness configured to substantially match a predetermined photodiode layer thickness. The apparatus also includes a dead layer coupled to the light-illumination side of the bulk semiconductor material, the dead layer having a thickness configured to substantially match a predetermined thickness value and wherein an absolute value of a thermal coefficient of gain due to the minority carrier diffusion length property of the bulk semiconductor material is configured to substantially match an absolute value of a thermal coefficient of gain due to the thickness of the dead layer.Type: GrantFiled: July 30, 2009Date of Patent: April 2, 2013Assignee: General Electric CompanyInventors: Wen Li, Jonathan D. Short, George E. Possin
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Patent number: 8410569Abstract: A solid-state imaging device includes a first substrate including a light-sensing portion configured to perform photoelectric conversion of incident light and a wiring portion provided on a light-incident side; an optically transparent second substrate provided on a wiring portion side of the first substrate at a certain distance; a through-hole provided in the first substrate; a through-via provided in the through-hole; a front-surface-side electrode connected to the through-via and provided on a front surface of the first substrate; a back-surface-side electrode connected to the through-via and provided on a back surface of the first substrate; and a stopper electrode provided on the front-surface-side electrode and filling a space between the front-surface-side electrode and the second substrate.Type: GrantFiled: July 23, 2010Date of Patent: April 2, 2013Assignee: Sony CorporationInventors: Ikuo Yoshihara, Masaya Nagata, Naoto Sasaki, Taku Umebayashi, Hiroshi Takahashi, Yoichi Otsuka, Isaya Kitamura, Tokihisa Kaneguchi, Keishi Inoue, Toshihiko Hayashi, Hiroyasu Matsugai, Mayoshi Aonuma, Hiroshi Yoshioka
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Patent number: 8410532Abstract: The present invention provides a solid-state imaging device comprising: a semiconductor substrate having a pixel region and a peripheral circuit region; a multilayer wiring layer including layers of wiring and an interlayer film interposed therebetween, and disposed above the semiconductor substrate to cover the pixel region and the peripheral circuit region except areas above the photoelectric conversion elements; a waveguide member filling the areas above the photoelectric conversion elements (waveguides) and covering the multilayer wiring layer at least within the pixel region; and an optical structure (composed of a color filter material and a lens material) disposed above the waveguide member within the pixel region, wherein a groove is formed by removing a portion of the waveguide member from an area within the pixel region that is in a border between the pixel region and the peripheral circuit region.Type: GrantFiled: June 16, 2011Date of Patent: April 2, 2013Assignee: Panasonic CorporaitonInventors: Shoichiro Tsuji, Kazuhiro Yamashita
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Patent number: 8404510Abstract: A method for forming a CMOS image sensing pixel, which is configured to determine a color, includes providing an n-type substrate that includes a first thickness and a first width. The method also includes forming a p-type layer, the p-type layer overlaying the n-type substrate. The p-type layer includes a second thickness and a second width. The second thickness and the second width are associated with a light characteristic. The method additionally includes forming an n-type layer, the n-type layer overlaying the p-type layer. The n-type layer includes a third thickness and a third width. In addition, the method includes forming a pn junction between the p-type layer and the n-type layer. The pn junction includes a fourth width. The method also includes providing a control circuit. The control circuit is electrically coupled to the n-type substrate.Type: GrantFiled: November 23, 2010Date of Patent: March 26, 2013Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Hong Zhu, Jim Yang
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Patent number: 8405182Abstract: Provided is an image sensor device. The image sensor device includes a substrate having a front side and a back side opposite the first side. The substrate has a pixel region and a periphery region. The image sensor device includes a plurality of radiation-sensing regions disposed in the pixel region of the substrate. Each of the radiation-sensing regions is operable to sense radiation projected toward the radiation-sensing region through the back side. The image sensor device includes a reference pixel disposed in the periphery region. The image sensor device includes an interconnect structure that is coupled to the front side of the substrate. The interconnect structure includes a plurality of interconnect layers. The image sensor device includes a film formed over the back side of the substrate. The film causes the substrate to experience a tensile stress. The image sensor device includes a radiation-blocking device disposed over the film.Type: GrantFiled: May 2, 2011Date of Patent: March 26, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Keng-Yu Chou, Dun-Nian Yaung, Jen-Cheng Liu, Pao-Tung Cheng, Wen-De Wang, Chun-Chieh Chuang, Min-Feng Kao
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Publication number: 20130063631Abstract: Disclosed herein is a solid-state imaging apparatus including a pixel cell separated by a device separation layer from a group of adjacent pixel cells by taking one pixel cell or a plurality of pixel cells as a unit wherein: the pixel cell has a first-conduction well, and a second-conduction well; the first-conduction well receives light and has an opto-electrical conversion function of carrying out an opto-electrical conversion process to convert the received light into electric charge as well as an electric-charge accumulation function for accumulating the electric charge; in the second-conduction well, a transistor is created to serve as a transistor used for detecting the electric charge accumulated in the first-conduction well and provided with a threshold modulation function.Type: ApplicationFiled: March 2, 2012Publication date: March 14, 2013Applicant: SONY CORPORATIONInventors: Isao Hirota, Hirano Fujiki
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Publication number: 20130062673Abstract: In a solid-state imaging device, a pixel has a first island-shaped semiconductor (P11) formed on a substrate (1) and a drive output circuit has second island-shaped semiconductors (4a to 4c) formed on the substrate at the same height as that of the first island-shaped semiconductor (P11). The first island-shaped semiconductor (P11) has a first gate insulating layer (6b) formed on an outer periphery thereof and a first gate conductor layer (105a) surrounding the first gate insulating layer (6b). The second island-shaped semiconductors (4a to 4c) have a second gate insulating layer (6a) formed on an outer periphery thereof and a second gate conductor layer (7a) surrounding the second gate insulating layer (6a). The first gate conductor layer (105a) and the second gate conductor layer (7a) have bottom portions located on the same plane.Type: ApplicationFiled: September 7, 2012Publication date: March 14, 2013Applicant: Unisantis Electronics Singapore Pte. Ltd.Inventors: Fujio MASUOKA, Nozomu HARADA
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Publication number: 20130049157Abstract: According to one embodiment, a solid-state imaging device includes a semiconductor substrate of a first conductive type having a diffusion layer region provided on a surface thereof, a diffusion layer of the first conductive type for a pixel separation whose bottom portion is formed at the deepest position of the diffusion layer region in a pixel region, and a first deep diffusion layer of the first conductive type provided at the deepest position of the diffusion layer region in a first peripheral logic region for electrically connecting the semiconductor substrate and the first peripheral logic region and having a first concentration gradient equal to that of the diffusion layer for pixel separation.Type: ApplicationFiled: October 24, 2012Publication date: February 28, 2013Inventor: Hidetoshi KOIKE
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Publication number: 20130049083Abstract: A solid-state imaging device including is provided. The solid-state imaging device includes: pixels arrayed; a photoelectric conversion element in each of the pixels; a read transistor for reading electric charges photoelectrically-converted in the photoelectric conversion elements to a floating diffusion portion; a shallow trench element isolation region bordering the floating diffusion portion; and an impurity diffusion isolation region for other element isolation regions than the shallow trench element isolation region.Type: ApplicationFiled: October 24, 2012Publication date: February 28, 2013Applicant: SONY CORPORATIONInventor: Sony Corporation
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Publication number: 20130050552Abstract: A solid-state imaging apparatus includes: photoelectric conversion sections that generate signal charge corresponding to an amount of received light; and a plurality of pixel transistors that read the signal charge generated in the photoelectric conversion sections, and include amplification transistors each being formed of an amplification gate electrode which is formed on a substrate, a high-concentration impurity region which is formed in a substrate region on a drain side of the amplification gate electrode, and a low-concentration impurity region which is formed to have an impurity concentration lower than that of the high-concentration impurity region and is formed on a substrate region on a source side of the amplification gate electrode.Type: ApplicationFiled: August 3, 2012Publication date: February 28, 2013Applicant: Sony CorporationInventor: Tetsuya Oishi
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Publication number: 20130049155Abstract: A photosite is formed in a semiconductor substrate and includes a photodiode confined in a direction orthogonal to the surface of the substrate. The photodiode includes a semiconductor zone for storing charge that is formed in an upper semiconductor region having a first conductivity type and includes a main well of a second conductivity type opposite the first conductivity type and laterally pinned in a first direction parallel to the surface of the substrate. The photodiode further includes an additional semiconductor zone including an additional well having the second conductivity type that is buried under and makes contact with the main well.Type: ApplicationFiled: June 21, 2012Publication date: February 28, 2013Applicants: STMICROELECTRONICS (CROLLES 2) SAS, STMICROELECTRONICS S.A.Inventors: Francois Roy, Julien Michelot
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Patent number: 8383448Abstract: A method of fabricating an MOS device is provided. First, gates and source/drain regions of transistors are formed on a substrate. A photodiode doped region and a floating node doped region are formed in the substrate. Thereafter, a spacer stacked layer including a bottom layer, an inter-layer and a top layer is formed to cover each gate of the transistors. Afterwards, a first mask layer having an opening exposing at least the photodiode doped region is formed on the substrate, and then the top layer exposed by the opening is removed. Next, the first mask layer is removed, and then a second mask layer is formed on a region correspondingly exposed by the opening. A portion of the top layer and the inter-layer exposed by the second mask layer is removed to form spacers on sidewalls of the gates.Type: GrantFiled: January 5, 2012Date of Patent: February 26, 2013Assignee: United Microelectronics Corp.Inventor: Ching-Hung Kao
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Patent number: 8378398Abstract: Shallow trench isolation regions are disposed in an n-type silicon semiconductor layer laterally adjacent to a collection region of a photodetector and laterally adjacent to a charge-to-voltage conversion region. The shallow trench isolation regions each include a trench disposed in the silicon semiconductor layer and a first dielectric structure disposed along an interior bottom and sidewalls of each trench. A second dielectric structure is disposed over the pinning layer. The dielectric structures include a silicon nitride layer disposed over an oxide layer. An n-type isolation layer is disposed along only a portion of the exterior bottom of the trench and the exterior sidewall of the trench immediately adjacent to the photodetector. The n-type isolation layer is not disposed along the remaining portion of the bottom or the opposing exterior sidewall of the trench.Type: GrantFiled: December 13, 2010Date of Patent: February 19, 2013Assignee: OmniVision Technologies, Inc.Inventors: Hung Q. Doan, Eric G. Stevens, Robert M. Guidash
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Patent number: 8378400Abstract: An island-shaped semiconductor constituting a pixel includes a first semiconductor N+-region formed on a substrate, a second semiconductor P-region formed on the region, third semiconductor N-regions formed on upper lateral sides of the region, insulating layers formed on the outer periphery of the regions and lower lateral sides of the region, gate conductive layers formed on the outer periphery of the insulating layers and functioning as gate electrodes forming a channel in a lower area of the region, light-reflection conductive layers formed on the outer periphery of the N regions and a portion of the insulating layers where the gate conductive layers are not formed, a fifth semiconductor P+-region formed on the region and the regions, and a microlens formed on the region and whose focal point is located near the upper surface of the region.Type: GrantFiled: August 9, 2011Date of Patent: February 19, 2013Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Nozomu Harada
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Patent number: 8378396Abstract: A photoelectric conversion device has pixel comprised of a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type disposed in the first semiconductor region. A first diffusion region of the first conductivity type is held at a predetermined potential, covers entirely the first semiconductor region, and covers only a part of an upper portion of the second semiconductor region. A second diffusion region of the second conductivity type covers a part of the upper portion of the second semiconductor region except for the part of the upper portion of the second semiconductor region covered by the first diffusion region. A thick oxide film covers entirely the first diffusion region and covers the upper portion of the second semiconductor region except for the part of the upper portion of the second semiconductor region covered by the second diffusion region.Type: GrantFiled: October 28, 2005Date of Patent: February 19, 2013Assignee: Seiko Instruments Inc.Inventor: Toshihiko Omi
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Publication number: 20130032920Abstract: An image sensor device includes a semiconductor substrate having a front side and a backside. A first dielectric layer is on the front side of the semiconductor substrate. A metal pad is in the first dielectric layer. A second dielectric layer is over the first dielectric layer and on the front side of the semiconductor substrate. An opening penetrates through the semiconductor substrate from the backside of the semiconductor substrate, wherein the opening includes a first portion extending to expose a portion of the metal pad and a second portion extending to expose a portion of the second dielectric layer. A metal layer is formed in the first portion and the second portion of the opening.Type: ApplicationFiled: August 4, 2011Publication date: February 7, 2013Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jeng-Shyan Lin, Dun-Nian Yaung, Jen-Cheng Liu, Wen-De Wang, Shuang-Ji Tsai, Yueh-Chiou Lin
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Patent number: 8368157Abstract: Image sensors with backside illumination image pixel arrays are provided. An image pixel array may have image pixels that are formed on a silicon substrate having front and back surfaces. The pixel array may have photodiodes formed in the front surface. A dielectric stack may be formed on the front surface. The dielectric stack may include interconnect structures and reflective light guides. A color filter array may be formed on the back surface of the substrate. Microlenses may be formed on the color filter array from the side facing the back surface. The pixel array may receive incoming light through the microlenses. The incoming light may enter the substrate through the back surface. The incoming light may penetrate the substrate and may be reflected by a light reflector in the reflective light guide back towards the photodiode. The image pixel array may exhibit improved quantum efficiency, sensitivity, and image contrast.Type: GrantFiled: April 6, 2010Date of Patent: February 5, 2013Assignee: Aptina Imaging CoporationInventor: Victor Lenchenkov
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Patent number: 8368160Abstract: An image sensing device is disclosed, including an epitaxy layer having the a conductivity type, including a first pixel area corresponding to a first incident light, a second pixel area corresponding to a second incident light, and a third pixel area corresponding to a third incident light, wherein the wavelength of the first incident light is longer than that of the second incident light and the wavelength of the second incident light is longer than that of the third incident light. A photodiode is disposed in an upper portion of the epitaxy layer, and a first deep well for reducing pixel-to-pixel talk of the image sensing device is disposed in a lower portion of the epitaxy layer in the second pixel area and the third pixel area, wherein at least a portion of the epitaxy layer in first pixel area does not include the first deep well.Type: GrantFiled: October 5, 2010Date of Patent: February 5, 2013Assignee: Himax Imaging, Inc.Inventors: Chung-Wei Chang, Fang-Ming Huang, Chi-Shao Lin, Yu-Ping Hu
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Patent number: 8362532Abstract: A pixel of an image sensor, the pixel includes a floating diffusion node to sense photo-generated charge, a reset diode to reset the floating diffusion node in response to a reset signal, and a set diode to set the floating diffusion node.Type: GrantFiled: April 15, 2011Date of Patent: January 29, 2013Assignee: Intellectual Ventures II LLCInventor: Jaroslav Hynecek
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Publication number: 20130015513Abstract: A solid-state imaging device includes: a first photodiode made up of a first first-electroconductive-type semiconductor region formed on a first principal face side of a semiconductor substrate, and a first second-electroconductive-type semiconductor region formed within the semiconductor substrate adjacent to the first first-electroconductive-type semiconductor region; a second photodiode made up of a second first-electroconductive-type semiconductor region formed on a second principal face side of the semiconductor substrate, and a second second-electroconductive-type semiconductor region formed within the semiconductor substrate adjacent to the second first-electroconductive-type semiconductor region; and a gate electrode formed on the first principal face side of the semiconductor substrate; with impurity concentration of a connection face between the second first-electroconductive-type semiconductor region and the second second-electroconductive-type semiconductor region being equal to or greater than imType: ApplicationFiled: July 3, 2012Publication date: January 17, 2013Applicant: SONY CORPORATIONInventors: Hideo Kido, Takayuki Enomoto, Hideaki Togashi
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Publication number: 20130015326Abstract: The semiconductor device includes a plurality of pixels arranged in rows and columns, and first transistors fewer than the number of the plurality of pixels. The plurality of pixels each includes a photodiode and an amplifier circuit. The amplifier circuit holds the accumulated charge and includes at least a second transistor electrically connected to a cathode of the photodiode. The cathode of the photodiode in the pixel in an n-th row and the cathode of the photodiode in the pixel in an (n+1)-th row are electrically connected to the first transistor. The number n is a natural number. The pixel in the n-th row and the pixel in the (n+1)-th row are in an identical column.Type: ApplicationFiled: July 6, 2012Publication date: January 17, 2013Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventor: Hikaru TAMURA
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Patent number: 8354700Abstract: An image sensor and a method for manufacturing an image sensor are described in which the image sensor includes at least one substrate having a plurality of light-sensitive elements forming a sensor field and first microfilter elements for wavelength-selective filtering of incident light. The first microfilter elements are attached to a transparent carrier made of glass or a transparent film, for example. A first microfilter element is situated in front of a portion of the light-sensitive elements for wavelength-selective filtering of light striking the light-sensitive element. No microfilter element is situated in front of a further portion of the light-sensitive elements.Type: GrantFiled: November 2, 2009Date of Patent: January 15, 2013Assignee: Robert Bosch GmbHInventors: Ulrich Seger, Roland Schmid, Uwe Apel, Gerald Franz, Andreas Reppich
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Patent number: 8354699Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of less than about 0.4 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.Type: GrantFiled: March 21, 2011Date of Patent: January 15, 2013Assignee: Round Rock Research, LLCInventor: Howard E. Rhodes
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Patent number: 8350305Abstract: A solid-state imaging device is provided. The solid-state imaging device includes: pixels arrayed; a photoelectric conversion element in each of the pixels; a read transistor for reading electric charges photoelectrically-converted in the photoelectric conversion elements to a floating diffusion portion; a shallow trench element isolation region bordering the floating diffusion portion; and an impurity diffusion isolation region for element isolation regions other than the shallow trench element isolation region.Type: GrantFiled: January 4, 2008Date of Patent: January 8, 2013Assignee: Sony CorporationInventors: Kazuichiro Itonaga, Yu Oya
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High Fill-Factor Laser-Treated Semiconductor Device on Bulk Material with Single Side Contact Scheme
Publication number: 20130001729Abstract: The present disclosure provides systems and methods for configuring and constructing a single photo detector or array of photo detectors with all fabrications circuitry on a single side of the device. Both the anode and the cathode contacts of the diode are placed on a single side, while a layer of laser treated semiconductor is placed on the opposite side for enhanced cost-effectiveness, photon detection, and fill factor.Type: ApplicationFiled: July 2, 2012Publication date: January 3, 2013Applicant: SiOnyx, Inc.Inventors: Neal T. Kurfiss, James E. Carey, Xia Li -
Publication number: 20120326008Abstract: Transistor pixel devices, imagers, and associated methods are provided. In one aspect, a transistor pixel device includes a photodiode coupled to a floating diffusion region (FD), a storage node (SN), and a power supply, wherein the FD is coupled between the photodiode and the power supply. The device also includes a first global transfer transistor coupled between the photodiode and the FD for gating between the photodiode and the FD and a second global transfer transistor coupled between the FD and the SN for gating between the FD and the SN. A global reset select transistor is coupled between the FD and the power supply, wherein an open state of the global reset select transistor prevents accumulation of electrical charge at the photodiodes. A source follower transistor is coupled to the FD and to the power supply, where the source follower is operable to receive electrical signal from the FD.Type: ApplicationFiled: December 21, 2011Publication date: December 27, 2012Applicant: SiOnyx, Inc.Inventors: Jeffrey McKee, Jutao Jiang
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Patent number: 8330195Abstract: An image sensor pixel includes a substrate, a first epitaxial layer, a collector layer, a second epitaxial layer and a light collection region. The substrate is doped to have a first conductivity type. The first epitaxial layer is disposed over the substrate and doped to have the first conductivity type as well. The collector layer is selectively disposed over at least a portion of the first epitaxial layer and doped to have a second conductivity type. The second epitaxial layer is disposed over the collector layer and doped to have the first conductivity type. The light collection region collects photo-generated charge carriers and is disposed within the second epitaxial layer. The light collection region is also doped to have the second conductivity type.Type: GrantFiled: December 14, 2010Date of Patent: December 11, 2012Assignee: OmniVision Technologies, Inc.Inventors: Vincent Venezia, Ashish Shah, Rongsheng Yang, Duli Mao, Yin Qian, Hsin-Chih Tai, Howard E. Rhodes
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Patent number: 8330089Abstract: It is intended to provide a CMOS image sensor with a high degree of pixel integration. A solid-state imaging device comprises a signal line formed on a Si substrate, an island-shaped semiconductor formed on the signal line, and a pixel selection line. The island-shaped semiconductor includes: a first semiconductor layer connected to the signal line; a second semiconductor layer located above and adjacent to the first semiconductor layer; a gate connected to the second semiconductor layer through an insulating film; and a charge storage section comprised of a third semiconductor layer connected to the second semiconductor layer and adapted, in response to receiving light, to undergo a change in amount of electric charges therein; a fourth semiconductor layer located above and adjacent to the second and third semiconductor layers. The pixel selection line is connected to the fourth semiconductor layer formed as a top portion of the island-shaped semiconductor.Type: GrantFiled: February 4, 2010Date of Patent: December 11, 2012Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Hiroki Nakamura
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Patent number: 8313977Abstract: Provided are an image sensor and a method for manufacturing the same. The image sensor comprises a semiconductor substrate, an interconnection and an interlayer dielectric, a lower electrode layer, an image sensing device, a first via hole, a barrier pattern, a second via hole, and a metal contact. The semiconductor substrate comprises a readout circuitry. The interconnection and the interlayer dielectric are formed on the semiconductor substrate. The lower electrode layer is disposed over the interlayer dielectric. The image sensing device is disposed on the lower electrode layer. The first via hole is formed through the image sensing device. The barrier pattern is formed on a sidewall of the first via hole. The second via hole is formed through the lower electrode layer and the interlayer dielectric under the first via hole. The metal contact is formed in the first and second via holes.Type: GrantFiled: November 24, 2009Date of Patent: November 20, 2012Assignee: Dongbu Hitek Co., Ltd.Inventor: Tae Gyu Kim
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Patent number: 8309997Abstract: An object of the present invention is to provide a photoelectric conversion device, wherein improvement of charge transfer properties when charge is output from a charge storage region and suppression of dark current generation during charge storage are compatible with each other. This object is achieved by forming a depletion voltage of a charge storage region in the range from zero to one half of a power source voltage (V), forming a gate voltage of a transfer MOS transistor during a charge transfer period in the range from one half of the power source voltage to the power source voltage (V) and forming a gate voltage of the transfer MOS transistor during a charge storage period in the range from minus one half of the power source voltage to zero (V).Type: GrantFiled: June 30, 2011Date of Patent: November 13, 2012Assignee: Canon Kabushiki KaishaInventors: Hiroshi Yuzurihara, Seiichi Tamura, Ryuichi Mishima
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Patent number: 8309994Abstract: Embodiments of the present invention are directed to light sensors that primarily respond to visible light while suppressing infrared light. Such sensors are especially useful as ambient light sensors because such sensors can be used to provide a spectral response similar to that of a human eye. Embodiments of the present invention are also directed to methods of providing such light sensors, and methods for using such light sensors.Type: GrantFiled: May 5, 2011Date of Patent: November 13, 2012Assignee: Intersil Americas Inc.Inventors: Alexander Kalnitsky, Dong Zheng, Joy Jones, Xijian Lin, Gregory Cestra
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Patent number: 8309433Abstract: A method of manufacturing an optical sensor includes the steps of providing a semiconductor wafer having a plurality of pixel areas; forming a grid-like rib enclosing each pixel area on the semiconductor wafer, the grid-like rib having a predetermined width and being formed from a fixing member; providing a light-transmissive substrate having a gap portion on a main surface thereof, the gap portion having at least one of a groove having a width smaller than the grid-like rib and a plurality of through-holes; fixing the semiconductor wafer and the light-transmissive substrate such that the grid-like rib and the gap portion face each other; and cutting the fixed semiconductor wafer and light-transmissive substrate into pieces such that each piece includes one pixel area.Type: GrantFiled: August 16, 2011Date of Patent: November 13, 2012Assignee: Canon Kabushiki KaishaInventors: Yasuhiro Matsuki, Takanori Suzuki, Koji Tsuduki, Shin Hasegawa, Tadashi Kosaka, Akiya Nakayama
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Patent number: 8309996Abstract: Complementary metal-oxide semiconductor (CMOS) image sensors (CIS) and methods of manufacturing the same are provided, the sensors include an epitaxial layer on a substrate in which a first, second, third and fourth region are defined. A photodiode may be formed at an upper portion of the epitaxial layer in the first region. A plurality of gate structures may be formed on the epitaxial layer in the second, third and fourth regions. A first blocking layer may be formed on the gate structures and the epitaxial layer in the first and second regions. A first impurity layer may be formed at an upper portion of the epitaxial layer adjacent to the gate structures in the second region, and a second impurity layer at upper portions of the epitaxial layer adjacent to the gate structures in the third and fourth regions. A color filter layer may be formed over the photodiode. A microlens may be formed on the color filter layer.Type: GrantFiled: March 16, 2011Date of Patent: November 13, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Ui-Sik Kim, Young-Hoon Park, Won-Je Park, Dae-Cheol Seong, Yeo-Ju Yoon, Bo-Bae Kang
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Publication number: 20120280295Abstract: An image pickup device includes pixels, each including a photoelectric conversion unit and a transfer unit. The photoelectric conversion unit includes a first-conductivity-type first semiconductor region and a second-conductivity-type second semiconductor region. A second-conductivity-type third semiconductor region is formed on at least a part of a gap between a photoelectric conversion unit of a first pixel and a photoelectric conversion unit of a second pixel adjacent to the first pixel. A first-conductivity-type fourth semiconductor region having an impurity concentration higher than an impurity concentration of the first semiconductor region is formed between the photoelectric conversion unit and the third semiconductor region. A first-conductivity-type fifth semiconductor region having an impurity concentration higher than the first semiconductor region is arranged between the photoelectric conversion unit and the third semiconductor region and is arranged deeper than fourth semiconductor region.Type: ApplicationFiled: May 23, 2012Publication date: November 8, 2012Applicant: CANON KABUSHIKI KAISHAInventors: Toru Koizumi, Seiichiro Sakai, Masanori Ogura
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Publication number: 20120280109Abstract: Techniques for promoting conductivity in a substrate for a pixel array. In an embodiment, an isolation region and a dopant well are disposed within an epitaxial layer adjoining the substrate, where a portion of the dopant well is between the substrate and a portion of the isolation well. In another embodiment, a contact is further disposed within the epitaxial layer, where a portion of the isolation region surrounds a portion of the contact.Type: ApplicationFiled: May 5, 2011Publication date: November 8, 2012Applicant: OMNIVISION TECHNOLOGIES, INC.Inventors: Duli Mao, Hsin-Chih Tai, Vincent Venezia, Keh-Chiang Ku, Rongsheng Yang
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Patent number: 8304770Abstract: An active device array substrate including a first patterned conductive layer, a dielectric layer, a second patterned conductive layer, a passivation layer and pixel electrodes is provided. The first patterned conductive layer includes scan lines, common lines, gates and strip floating shielding patterns. The dielectric layer covering the first patterned conductive layer has first contact holes which expose a portion of the common lines, respectively. The second patterned conductive layer includes data lines, sources, drains and strip capacitance electrodes. Each strip capacitance electrode is electrically connected to one of the common lines through one of the first contact holes. A gap is formed between each data line and one strip capacitance electrode, and the strip floating shielding patterns are disposed under the data lines, the gap and the strip capacitance electrodes. Each pixel electrode is electrically connected to one of the drains through one of the second contact holes.Type: GrantFiled: September 15, 2009Date of Patent: November 6, 2012Assignee: Au Optronics CorporationInventors: Chu-Yu Liu, Ming-Hung Shih, Chou-Chin Wu, I-Chun Chen
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Publication number: 20120273855Abstract: A unit pixel of a CMOS image sensor include a photodiode that transforms light to an electric charge, and accumulates the electric charge, and a plurality of transistors that generate an electric signal based on the accumulated electric charge. The photodiode has a slope shape based on incident angle of the light in a semiconductor substrate.Type: ApplicationFiled: July 3, 2012Publication date: November 1, 2012Inventors: Kyung-Ho Lee, Dong-Yoon Jang, Jung-Chak Ahn, Moo-Sup Lim
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Patent number: 8298854Abstract: The objective of this invention is to provide a type of photodiode and the method of manufacturing the photodiode characterized by the fact that it has a higher photoelectric conversion efficiency (sensitivity) than that in the prior art. PIN photodiode 100 has a p-type silicon substrate, p-type silicon layer 112, n-type silicon layer 114 formed on p-type silicon layer 112 and having a junction plane with silicon layer 112, n-type low-resistance silicon region 116 that is formed to a prescribed depth from the surface of silicon layer 114 and has an impurity concentration higher than that of silicon layer 114, silicon oxide film 120 formed on silicon region 116, and silicon nitride film 122 formed on silicon oxide film 120.Type: GrantFiled: July 8, 2008Date of Patent: October 30, 2012Assignee: Texas Instruments IncorporatedInventors: Hiroyuki Tomomatsu, Akihiro Sugihara, Motoaki Kusamaki, Tohru Kato
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Patent number: 8299513Abstract: An image sensor includes a photosensitive element, a reset circuit, an amplifier transistor, and a current source. The photosensitive element is coupled to generate an image charge in response to incident light and transfer the image charge to a circuit node. The reset circuit is coupled to selectively reset a voltage at the circuit node. The amplifier transistor includes a gate terminal responsive to the voltage at the circuit node. A current source is coupled between a high level power rail and a second terminal of the amplifier transistor.Type: GrantFiled: April 30, 2008Date of Patent: October 30, 2012Assignee: OmniVision Technologies, Inc.Inventor: Tiejun Dai
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Publication number: 20120267511Abstract: An image sensor architecture provides an SNR in excess of 100 dB, without requiring the use of a mechanical shutter. The circuit components for an active pixel sensor array are separated and arranged vertically in at least two different layers in a hybrid chip structure. The top layer is preferably manufactured using a low-noise PMOS manufacturing process, and includes the photodiode and amplifier circuitry for each pixel. A bottom layer is preferably manufactured using a standard CMOS process, and includes the NMOS pixel circuit components and any digital circuitry required for signal processing. By forming the top layer in a PMOS process to optimized for forming low-noise pixels, the pixel performance can be greatly improved, compared to using CMOS. In addition, since the digital circuitry is now separated from the imaging circuitry, it can be formed using a standard CMOS process, which has been optimized for circuit speed and manufacturing cost.Type: ApplicationFiled: April 19, 2011Publication date: October 25, 2012Inventor: Lester Kozlowski
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Publication number: 20120267694Abstract: An integrated circuit arrangement is provided, including a transistor including a gate region; and a wavelength conversion element, wherein the wavelength conversion element may include the same material or same materials as the gate region of the transistor.Type: ApplicationFiled: April 19, 2011Publication date: October 25, 2012Applicant: INFINEON TECHNOLOGIES AGInventors: Dieter Kaiser, Dirk Meinhold, Thoralf Kautzsch, Georg Holfeld