With At Least Two Field Relief Electrodes Used In Combination And Not Electrically Interconnected (epo) Patents (Class 257/E29.01)
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Patent number: 8754496Abstract: Embodiments include but are not limited to apparatuses and systems including a field-effect transistor switch. A field-effect transistor switch may include a first field plate coupled with a gate electrode, the first field plate disposed substantially equidistant from a source electrode and a drain electrode. The field-effect transistor switch may also include a second field plate proximately disposed to the first field plate and disposed substantially equidistant from the source electrode and the drain electrode. The first and second field plates may be configured to reduce an electric field between the source electrode and the gate electrode and between the drain electrode and the gate electrode.Type: GrantFiled: April 14, 2009Date of Patent: June 17, 2014Assignee: TriQuint Semiconductor, Inc.Inventors: Hua-Quen Tserng, Deep C. Dumka, Martin E. Jones, Charles F. Campbell, Anthony M. Balistreri
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Patent number: 8716746Abstract: In a semiconductor device, an IGBT cell includes a trench passing through a base layer of a semiconductor substrate to a drift layer of the semiconductor substrate, a gate insulating film on an inner surface of the trench, a gate electrode on the gate insulating film, a first conductivity-type emitter region in a surface portion of the base layer, and a second conductivity-type first contact region in the surface portion of the base layer. The IGBT cell further includes a first conductivity-type floating layer disposed within the base layer to separate the base layer into a first portion including the emitter region and the first contact region and a second portion adjacent to the drift layer, and an interlayer insulating film disposed to cover an end of the gate electrode. A diode cell includes a second conductivity-type second contact region in the surface portion of the base layer.Type: GrantFiled: August 9, 2011Date of Patent: May 6, 2014Assignees: DENSO CORPORATION, Toyota Jidosha Kabushiki KaishaInventors: Masaki Koyama, Yasushi Ookura, Akitaka Soeno, Tatsuji Nagaoka, Takahide Sugiyama, Sachiko Aoi, Hiroko Iguchi
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Publication number: 20130175656Abstract: Disclosed is a Zener diode having a scalable reverse-bias breakdown voltage (Vb) as a function of the position of a cathode contact region relative to the interface between adjacent cathode and anode well regions. Specifically, cathode and anode contact regions are positioned adjacent to corresponding cathode and anode well regions and are further separated by an isolation region. However, while the anode contact region is contained entirely within the anode well region, one end of the cathode contact region extends laterally into the anode well region. The length of this end can be predetermined in order to selectively adjust the Vb of the diode (e.g., increasing the length reduces Vb of the diode and vice versa). Also disclosed are an integrated circuit, incorporating multiple instances of the diode with different reverse-bias breakdown voltages, a method of forming the diode and a design structure for the diode.Type: ApplicationFiled: January 9, 2012Publication date: July 11, 2013Applicant: International Business Machines CorporationInventors: Frederick G. Anderson, Natalie B. Feilchenfeld, David L. Harmon, Richard A. Phelps, Yun Shi, Michael J. Zierak
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Patent number: 8476736Abstract: A diode includes an anode of a first conductivity type; a first cathode of the first conductivity type; and a second cathode of a second conductivity type opposite the first conductivity type. A lightly-doped region of the first conductivity type is under and vertically overlaps the anode and the first and the second cathodes. The portion of the lightly-doped region directly under the second cathode is fully depleted at a state when no bias voltage is applied between the anode and the second cathode.Type: GrantFiled: February 18, 2011Date of Patent: July 2, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jam-Wem Lee, Yi-Feng Chang
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Patent number: 8384076Abstract: A transistor having a self-align top gate structure and methods of manufacturing the same are provided. The transistor includes an oxide semiconductor layer having a source region, a drain region, and a channel region between the source region and the drain region. The transistor further includes a gate insulating layer and a gate electrode, which are sequentially stacked on the channel region. Semiconductor devices including at least one transistor and methods of manufacturing the same are also provided.Type: GrantFiled: May 14, 2009Date of Patent: February 26, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jaechul Park, Keewon Kwon
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Publication number: 20130020671Abstract: This invention discloses a semiconductor power device disposed in a semiconductor substrate comprising a heavily doped region formed on a lightly doped region and having an active cell area and an edge termination area. The edge termination area comprises a plurality of termination trenches formed in the heavily doped region with the termination trenches lined with a dielectric layer and filled with a conductive material therein. The edge termination further includes a plurality of buried guard rings formed as doped regions in the lightly doped region of the semiconductor substrate immediately adjacent to the termination trenches.Type: ApplicationFiled: July 19, 2011Publication date: January 24, 2013Inventors: Yeehang Lee, Madhur Bobde, Yongping Ding, Jongoh Kim, Anup Bhalla
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Patent number: 8349668Abstract: Different approaches for FinFET performance enhancement based on surface/channel direction and type of strained capping layer are provided. In one relatively simple and inexpensive approach providing a performance boost, a single surface/channel direction orientation and a single strained capping layer can be used for both n-channel FinFETs (nFinFETs) and p-channel FinFETs (pFinFETs). In another approach including more process steps (thereby increasing manufacturing cost) but providing a significantly higher performance boost, different surface/channel direction orientations and different strained capping layers can be used for nFinFETs and pFinFETs.Type: GrantFiled: May 9, 2011Date of Patent: January 8, 2013Assignee: Synopsys, Inc.Inventors: Victor Moroz, Tsu-Jae King Liu
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Patent number: 8278715Abstract: An ESD protection structure is disclosed. A substrate comprises a first conductive type. A first diffusion region is formed in the substrate. A first doped region is formed in the first diffusion region. A second doped region is formed in the first diffusion region. A third doped region is formed in the substrate. A first isolation region is formed in the substrate, covers a portion of the first diffusion region and is located between the second and the third doped regions. A fourth doped region is formed in the substrate. When the first doped region is coupled to a first power line and the third and the fourth doped regions are coupled to a second power line, an ESD current can be released to the second power line from the first power line. During the release of the ESD current, the second doped region is not electrically connected to the first power line.Type: GrantFiled: February 2, 2011Date of Patent: October 2, 2012Assignee: Vanguard International Semiconductor CorporationInventors: Yeh-Ning Jou, Chia-Wei Hung, Hwa-Chyi Chiou, Yeh-Jen Huang, Shu-Ling Chang
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Publication number: 20120193748Abstract: Exemplary power semiconductor devices with features providing increased breakdown voltage and other benefits are disclosed.Type: ApplicationFiled: April 11, 2012Publication date: August 2, 2012Inventors: Joseph A. Yedinak, Daniel Calafut, Dean E. Probst
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Publication number: 20120153415Abstract: A mounting structure for mounting a chip type electric element on a flexible board includes: the flexible board having a first land, on which a first lead terminal of another electric element is soldered; and the chip type electric element having a long side. A whole of the long side of the chip type electric element faces a long side of the first land. A length of the long side of the first land is defined as IA, and a distance between one long side of the first land and one long side of the chip type electric element is defined as IB, the one long side of the first land facing the chip type electric element but opposite to the one long side of the chip type electric element. The length of IA is equal to or larger than the distance of IB.Type: ApplicationFiled: November 23, 2011Publication date: June 21, 2012Applicant: DENSO CORPORATIONInventors: Satoru Hiramoto, Koichiro Matsumoto, Yoshiyuki Kono, Akitoshi Mizutani
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Publication number: 20110204469Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.Type: ApplicationFiled: February 2, 2011Publication date: August 25, 2011Applicant: C/O FUJI ELECTRIC SYSTEMS CO., LTD.Inventor: Yasuhiko ONISHI
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Patent number: 7985977Abstract: Briefly, in accordance with one or more embodiments, a dielectric platform is at least partially formed in a semiconductor substrate and extending at least partially below a surface of a semiconductor substrate. The dielectric platform may include structural pillars formed by backfilling a first plurality of cavities etched in the substrate, and a second plurality of cavities formed by etching away sacrificial pillars disposed between the structural pillars. The second plurality of cavities may be capped to hermetically seal the second plurality of cavities to impart the dielectric constant of the material contained therein, for example air, to the characteristic dielectric constant of the dielectric platform. Alternatively, the second plurality of cavities may be backfilled with a material having a lower dielectric constant than the substrate, for example silicon dioxide where the substrate comprises silicon.Type: GrantFiled: December 9, 2008Date of Patent: July 26, 2011Assignee: HVVi Semiconductors, Inc.Inventors: Bishnu Prasanna Gogoi, David William Wolfert, Jr.
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Patent number: 7884396Abstract: Disclosed are embodiments of a semiconductor structure with a partially self-aligned contact in lower portion of the contact is enlarged to reduce resistance without impacting device yield. Additionally, the structure optionally incorporates a thick middle-of-the-line (MOL) nitride stress film to enhance carrier mobility. Embodiments of the method of forming the structure comprise forming a sacrificial section in the intended location of the contact. This section is patterned so that it is self-aligned to the gate electrodes and only occupies space that is intended for the future contact. Dielectric layer(s) (e.g., an optional stress layer followed by an interlayer dielectric) may be deposited once the sacrificial section is in place. Conventional contact lithography is used to etch a contact hole through the dielectric layer(s) to the sacrificial section. The sacrificial section is then selectively removed to form a cavity and the contact is formed in the cavity and contact hole.Type: GrantFiled: August 20, 2008Date of Patent: February 8, 2011Assignee: International Business Machines CorporationInventors: Gregory Costrini, David M. Fried
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Publication number: 20100259321Abstract: Embodiments include but are not limited to apparatuses and systems including a field-effect transistor switch. A field-effect transistor switch may include a first field plate coupled with a gate electrode, the first field plate disposed substantially equidistant from a source electrode and a drain electrode. The field-effect transistor switch may also include a second field plate proximately disposed to the first field plate and disposed substantially equidistant from the source electrode and the drain electrode. The first and second field plates may be configured to reduce an electric field between the source electrode and the gate electrode and between the drain electrode and the gate electrode.Type: ApplicationFiled: April 14, 2009Publication date: October 14, 2010Applicant: TRIQUINT SEMICONDUCTOR, INC.Inventors: Hua-Quen Tserng, Deep C. Dumka, Martin E. Jones, Charles F. Campbell, Anthony M. Balistreri
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Patent number: 7781809Abstract: In a high voltage junction field effect transistor, a first well (11) of a first conductivity type is formed in a substrate (10) of a second conductivity type. A source (14) and a drain (15) which are each of the first conductivity type are formed in the first well. A gate (16) of the second conductivity type is arranged in a second well (12) of the second conductivity type, wherein the second well is of the retrograde type. The source, gate and drain are spaced apart from one another by field oxide regions (13a to 13d). Field plates (17a, 17b) extend over the field oxide (13a, 13b) from the gate (16) in the direction of source and drain.Type: GrantFiled: April 6, 2005Date of Patent: August 24, 2010Assignee: Austriamicrosystems AGInventor: Martin Knaipp
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Patent number: 7750399Abstract: A MOS transistor having a recessed channel region is provided. A MOS transistor includes a source region and a drain region disposed in an active region of a semiconductor substrate and spaced apart from each other. A gate trench structure is disposed in the active region between the source and drain regions. A gate electrode is disposed in the gate trench structure. A gate dielectric layer is interposed between the gate trench structure and the gate electrode. A semiconductor region is disposed between the gate trench structure and the gate dielectric layer. The semiconductor region is formed of a different material from the active region. A method of fabricating the MOS transistor having a recessed channel region is also provided.Type: GrantFiled: December 17, 2007Date of Patent: July 6, 2010Assignee: Samsung Electronics Co., Ltd.Inventor: Jay-Bok Choi
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Patent number: 7723801Abstract: A semiconductor device including a semiconductor substrate having source/drain regions, a gate electrode formed on and/or over the semiconductor substrate, spacers formed against sidewalls of the gate electrode, an interlayer insulating layer formed over the semiconductor substrate and the gate electrode and having a plurality of contact holes formed therein, and contact plugs formed within the contact holes. The contact plugs can include a first contact plug and a second contact plug electrically connected to the gate electrode, and a third contact plug and a fourth contact plug electrically connected to the source/drain regions.Type: GrantFiled: December 14, 2007Date of Patent: May 25, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Jung-Ho Ahn
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Patent number: 7696535Abstract: A gallium nitride high electron mobility transistor, in which an inner field-plate is disposed between the gate and drain of the high electron mobility transistor, so that an electric field is distributed between gate and drain regions to reduce a peak value and to reduce gate leakage current while maintaining high frequency performance, thus obtaining a high breakdown voltage, reducing the capacitance between the gate and the drain attributable to a shielding effect, and improving linearity and high power and high frequency characteristics through variation in the input voltage of the inner field-plate.Type: GrantFiled: July 1, 2009Date of Patent: April 13, 2010Assignee: Korea Advanced Institute of Science and TechnologyInventors: Kyounghoon Yang, Sungsik Lee, Kiwon Lee, Kwangui Ko
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Patent number: 7663175Abstract: A semiconductor integrated circuit device provided with a plurality of power supply wire layers including a first potential power supply wire and a second potential power supply wire formed in different layers. At least one capacitor contact wire extends from one of the first and second potential power supply wires toward the other one of the first and second potential power supply wires so as to form a capacitor between each capacitor contact wire and its surrounding wires.Type: GrantFiled: May 30, 2006Date of Patent: February 16, 2010Assignee: Fujitsu Microelectronics LimitedInventors: Kazufumi Komura, Takayoshi Nakamura, Keiichi Fujimura, Masahito Hirose, Keigo Nakashima, Masaki Nagato
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Patent number: 7622742Abstract: The present invention relates to a III-nitride semiconductor light-emitting device having high external quantum efficiency, provides a III-nitride compound semiconductor light-emitting device including an active layer generating light by recombination of electrons and holes and containing gallium and nitrogen, an n-type Al(x)ln(y)Ga(1-x-y)N layer epitaxially grown before the active layer is grown, and an n-type electrode electrically contacting with the n-type Al(x)ln(y)Ga(1-x-y)N layer, in which the n-type Al(x)ln(y)Ga(1-x-y)N layer has a surface which is exposed by etching and includes a region for scribing and breaking the device and a region for contact with the n-type electrode, and the surface of the region for scribing and breaking the device is roughened, thereby it is possible to increase external quantum efficiency of the light-emitting device.Type: GrantFiled: July 2, 2004Date of Patent: November 24, 2009Assignee: Epivalley Co., Ltd.Inventors: Chang-Tae Kim, Keuk Kim, Soo-Kun Jeon, Pil-Guk Jang, Jong-Won Kim
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Patent number: 7598616Abstract: A structure. The structure includes: a core electrical conductor having a top surface, an opposite bottom surface and sides between the top and bottom surfaces; an electrically conductive liner in direct physical contact with and covering the bottom surface and the sides of the core electrical conductor, embedded portions of the electrically conductive liner in direct physical contact with and extending over the core electrical conductor in regions of the core electrical conductor adjacent to both the top surface and the sides of the core electrical conductor; and an electrically conductive cap in direct physical contact with the top surface of the core electrical conductor that is exposed between the embedded portions of the electrically conductive liner.Type: GrantFiled: June 17, 2008Date of Patent: October 6, 2009Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, Lawrence A. Clevenger, Andrew P. Cowley, Timothy J. Dalton, Meeyoung H. Yoon
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Publication number: 20090072340Abstract: High voltage semiconductor devices with high-voltage termination structures are constructed on lightly doped substrates. Lightly doped p-type substrates are particularly prone to depletion and inversion from positive charges, degrading the ability of associated termination structures to block high voltages. To improve the efficiency and stability of termination structures, second termination regions of the same dopant type as the substrate, more heavily doped than the substrate but more lightly doped than first termination regions, are positioned adjoining the first termination regions. The second termination regions raise the field threshold voltage where the surface is vulnerable and render the termination structure substantially insensitive to positive charges at the surface. The use of higher dopant concentration in the gap region without causing premature avalanche is facilitated by only creating second termination regions for regions lacking field plate protection.Type: ApplicationFiled: September 9, 2008Publication date: March 19, 2009Applicant: MICROSEMI CORPORATIONInventors: Jinshu Zhang, Dumitru Sdrulla, Dah Wen Tsang
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Publication number: 20080315343Abstract: A semiconductor device includes: a first insulating layer; a semiconductor layer provided on the first insulating layer; a first semiconductor region selectively provided in the semiconductor layer; a second semiconductor region selectively provided in the semiconductor layer and spaced from the first semiconductor region; a first main electrode provided in contact with the first semiconductor region; a second main electrode provided in contact with the second semiconductor region; a second insulating layer provided on the semiconductor layer; a first conductive material provided in the second insulating layer above a portion of the semiconductor layer located between the first semiconductor region and the second semiconductor region; and a second conductive material provided in a trench provided in a portion of the semiconductor layer opposed to the first conductive material, being in contact with the first conductive material, and reaching the first insulating layer.Type: ApplicationFiled: February 13, 2008Publication date: December 25, 2008Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Mitsuhiko Kitagawa
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Publication number: 20080296636Abstract: According to the present invention, semiconductor device breakdown voltage can be increased by embedding field shaping regions within a drift region of the semiconductor device. A controllable current path extends between two device terminals on the top surface of a planar substrate, and the controllable current path includes the drift region. Each field shaping region includes two or more electrically conductive regions that are electrically insulated from each other, and which are capacitively coupled to each other to form a voltage divider dividing a potential between the first and second terminals. One or more of the electrically conductive regions are isolated from any external electrical contact. Such field shaping regions can provide enhanced electric field uniformity in current-carrying parts of the drift region, thereby increasing device breakdown voltage.Type: ApplicationFiled: June 2, 2008Publication date: December 4, 2008Inventors: Mohamed N. Darwish, Richard A. Harris, Muhammed Ayman Shibib, Andrew J. Morrish, Robert Kuo-Chang Yang
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Patent number: 7413973Abstract: Provided is a method for manufacturing a nano-gap electrode device comprising the steps of: forming a first electrode on a substrate; forming a spacer on a sidewall of the first electrode; forming a second electrode on an exposed substrate at a side of the spacer; and forming a nano-gap between the first electrode and the second electrode by removing the spacer, whereby it is possible to control the nano-gap position, width, shape, and etc., reproducibly, and manufacture a plurality of nano-gap electrode devices at the same time.Type: GrantFiled: August 28, 2006Date of Patent: August 19, 2008Assignee: Electronics and Telecommunications Research InstituteInventors: Chan Woo Park, Sung Yool Choi, Sang Ouk Ryu, Han Young Yu, Ung Hwan Pi, Tae Hyoung Zyung
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Publication number: 20080169526Abstract: A power semiconductor device is provided having a field plate that employs a thick metal film in an edge termination structure and which permits edge termination structure width reduction even with large side etching or etching variation, which exhibits superior long-term forward blocking voltage capability reliability, and which allows minimal forward blocking voltage capability variation. The edge termination structure has multiple ring-like p-type guard rings, a first insulating film covering the guard rings, and ring-like field plates, provided via the first insulating film atop the guard rings. The field plates have a polysilicon film and a thicker metal film. The polysilicon film is provided on a first guard ring via first insulating film, and a dual field plate made of the polysilicon film and metal film is provided on a second guard ring. The dual field plate is stacked via a second insulating film. The first and second guard rings alternate.Type: ApplicationFiled: January 11, 2008Publication date: July 17, 2008Applicant: FUJI ELECTRIC DEVICE TECHNOLOGY CO., LTD.Inventors: Hiroki WAKIMOTO, Masahito OTSUKI, Takashi SHIIGI
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Patent number: 7179706Abstract: The present teachings describe a container capacitor that utilizes an etchant permeable lower electrode for the formation of single or double-sided capacitors without excessive etching back of the periphery of the use of sacrificial spacers. The present teachings further describe a method of forming at least one capacitor structure on a substrate. For example, the method comprises forming at least one recess in the substrate, depositing a first conductive layer on the substrate so as to overlie the at least one recess, and defining at least one lower electrode within the at least one recess formed in the substrate by removing at least a portion of the first conductive layer. The method further comprises diffusing an etchant through the at least one lower electrode so as to remove at least a portion of the substrate to thereby at least partially isolate the at least one lower electrode.Type: GrantFiled: June 24, 2004Date of Patent: February 20, 2007Assignee: Micron Technology, Inc.Inventors: Robert D. Patraw, Michael A. Walker
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Patent number: 7180087Abstract: A spin filtering device has: a spin filter (1) having an input region (3) for carrying an electron current, an output region (4) for carrying an electron current, and a three-dimensionally confined quantum region (2a) arranged to operate in the Coulomb blockade regime and separating the input and output regions (3 and 4) whereby electrons can only pass from the input region to the output region by tunnelling through the quantum region; and Zeeman splitting means (5) for causing Zeeman splitting in the spin filter, the quantum region (2a) and input and output regions (3 and 4) being formed such that the Zeeman splitting in the input and output regions (3 and 4) is less than the Fermi energy such that, in operation, the spin filter outputs a tunnelling current predominantly of one spin polarity. The direction of Zeeman splitting may be controlled to control the predominant spin polarity.Type: GrantFiled: September 6, 2000Date of Patent: February 20, 2007Assignee: ETeCH AGInventors: Daniel Loss, Patrik Recher, Eugene V Sukhorukov
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Patent number: 7109562Abstract: A high voltage laterally double-diffused metal oxide semiconductor (LDMOS) stricture is characterized as follows: the second source electrode metal layer connected to the first source electrode metal layer protrudes out of a certain length relative to the first source electrode metal layer of the source electrode region connected thereto. The second drain electrode metal layer connected to the first drain electrode metal layer protrudes out of a certain length relative to the first drain electrode metal layer of the drain electrode region. The protruded length overlaps more portions of the drift layer than the first source electrode metal layer and the first drain electrode metal layer disposed below, to reduce the electric field concentration of the gate electrode interface or the interface between the N+ type drain electrode layer and the N-type extended drift layer.Type: GrantFiled: February 7, 2005Date of Patent: September 19, 2006Assignee: Leadtrend Technology Corp.Inventor: Chi-Hsiang Lee
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Patent number: RE41866Abstract: There is disclosed a semiconductor device having an MOS gate for reducing variations in threshold voltage (Vth) with time wherein a surface protective film is not formed in a device area including channels but only in a device peripheral area, thereby reducing the amount of hydrogen atoms migrating to a silicon-silicon oxide interface in a cell area and, accordingly, reducing the number of Si—H chemical bonds at the interface.Type: GrantFiled: June 27, 2001Date of Patent: October 26, 2010Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Mitsuhiro Yano, Kouichi Mochizuki