With Field Relief Electrode (field Plate) (epo) Patents (Class 257/E29.009)
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Patent number: 9041064Abstract: A multiple field plate transistor includes an active region, with a source, drain, and gate. A first spacer layer is between the source and the gate and a second spacer layer between the drain and the gate. A first field plate on the first spacer layer and a second field plate on the second spacer layer are connected to the gate. A third field plate connected to the source is on a third spacer layer, which is on the gate and the first and second field plates and spacer layers. The transistor exhibits a blocking voltage of at least 600 Volts while supporting current of at least 2 or 3 Amps with on resistance of no more than 5.0 or 5.3 m?-cm2, respectively, and at least 900 Volts while supporting current of at least 2 or 3 Amps with on resistance of no more than 6.6 or 7.0 m?-cm2, respectively.Type: GrantFiled: April 12, 2012Date of Patent: May 26, 2015Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra
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Patent number: 8999769Abstract: A method of forming a device is disclosed. A substrate defined with a device region is provided. A gate having an upper and a lower portion is formed in a trench in the substrate in the device region. The upper portion forms a gate electrode and the lower portion forms a gate field plate. First and second surface doped regions are formed adjacent to the gate. The gate field plate introduces vertical reduced surface (RESURF) effect in a drift region of the device.Type: GrantFiled: July 18, 2012Date of Patent: April 7, 2015Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Purakh Raj Verma, Liang Yi, Yemin Dong
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Patent number: 8994141Abstract: A semiconductor includes an N-type impurity region provided in a substrate. A P-type RESURF layer is provided at a top face of the substrate in the N-type impurity region. A P-well has an impurity concentration higher than that of the P-type RESURF layer, and makes contact with the P-type RESURF layer at the top face of the substrate in the N-type impurity region. A first high-voltage-side plate is electrically connected to the N-type impurity region, and a low-voltage-side plate is electrically connected to a P-type impurity region. A lower field plate is capable of generating a lower capacitive coupling with the substrate. An upper field plate is located at a position farther from the substrate than the lower field plate, and is capable of generating an upper capacitive coupling with the lower field plate whose capacitance is greater than the capacitance of the lower capacitive coupling.Type: GrantFiled: January 11, 2010Date of Patent: March 31, 2015Assignee: Mitsubishi Electric CorporationInventors: Tetsuo Takahashi, Takami Otsuki
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Patent number: 8928127Abstract: A device includes a substrate having a front surface and a back surface; an integrated circuit device at the front surface of the substrate; and a metal plate on the back surface of the substrate, wherein the metal plate overlaps substantially an entirety of the integrated circuit device. A guard ring extends into the substrate and encircles the integrated circuit device. The guard ring is formed of a conductive material. A through substrate via (TSV) penetrates through the substrate and electrically couples to the metal plate.Type: GrantFiled: September 24, 2010Date of Patent: January 6, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Chung Chen, Chewn-Pu Jou, Sally Liu
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Patent number: 8921824Abstract: A three-dimensional graphene structure, and methods of manufacturing and transferring the same including forming at least one layer of graphene having a periodically repeated three-dimensional shape. The three-dimensional graphene structure is formed by forming a pattern having a three-dimensional shape on a surface of a substrate, and forming the three-dimensional graphene structure having the three-dimensional shape of the pattern by growing graphene on the substrate on which the pattern is formed. The three-dimensional graphene structure is transferred by injecting a gas between the three-dimensional graphene structure and the substrate, separating the three-dimensional graphene structure from the substrate by bonding the three-dimensional graphene structure to an adhesive support, combining the three-dimensional graphene structure with an insulating substrate, and removing the adhesive support.Type: GrantFiled: April 2, 2012Date of Patent: December 30, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Hyeon-jin Shin, Jae-young Choi, Ji-hoon Park, Joung-real Ahn
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Patent number: 8754468Abstract: A lateral power semiconductor component has a front side, a rear side and a lateral edge. The component further includes a drift zone of a first conductivity type, a source zone of the first conductivity type, a body zone of a second conductivity type opposite the first conductivity type, and a drain zone of the first conductivity type. A gate forms a MOS structure with the drift zone, the source zone and the body zone. A horizontally extending field plate above each semiconductor region of the power semiconductor component forms a plate capacitor structure with an edge plate lying under the field plate. The edge plate includes a highly doped semiconductor material and is electrically connected to one of a source potential and a drain potential of the power semiconductor component.Type: GrantFiled: December 8, 2010Date of Patent: June 17, 2014Inventors: Uwe Wahl, Armin Willmeroth
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Patent number: 8698274Abstract: A semiconductor device includes a plurality of high-voltage insulated-gate field-effect transistors arranged in a matrix form on the main surface of a semiconductor substrate and each having a gate electrode, a gate electrode contact formed on the gate electrode, and a wiring layer which is formed on the gate electrode contacts adjacent in a gate-width direction to electrically connect the gate electrodes arranged in the gate-width direction. And the device includes shielding gates provided on portions of an element isolation region which lie between the transistors adjacent in the gate-width direction and gate-length direction and used to apply reference potential or potential of a polarity different from that of potential applied to the gate of the transistor to turn on the current path of the transistor to the element isolation region.Type: GrantFiled: June 3, 2013Date of Patent: April 15, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Hiroyuki Kutsukake, Kikuko Sugimae, Takeshi Kamigaichi
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Patent number: 8669639Abstract: A semiconductor element, a manufacturing method thereof and an operating method thereof are provided. The semiconductor element includes a substrate, a first well, a second well, a third well, a fourth well, a bottom layer, a first heavily doping region, a second heavily doping region, a third heavily doping region and a field plane. The first well, the bottom layer and the second well surround the third well for floating the third well and the substrate. The first, the second and the third heavily doping regions are disposed in the first, the second and the third wells respectively. The field plate is disposed above a junction between the first well and the fourth well.Type: GrantFiled: June 11, 2012Date of Patent: March 11, 2014Assignee: Macronix International Co., Ltd.Inventors: Chih-Ling Hung, Chien-Wen Chu, Hsin-Liang Chen, Wing-Chor Chan
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Patent number: 8648439Abstract: The present invention provides a thin and bendable semiconductor device utilizing an advantage of a flexible substrate used in the semiconductor device, and a method of manufacturing the semiconductor device. The semiconductor device has at least one surface covered by an insulating layer which serves as a substrate for protection. In the semiconductor device, the insulating layer is formed over a conductive layer serving as an antenna such that the value in the thickness ratio of the insulating layer in a portion not covering the conductive layer to the conductive layer is at least 1.2, and the value in the thickness ratio of the insulating layer formed over the conductive layer to the conductive layer is at least 0.2. Further, not the conductive layer but the insulating layer is exposed in the side face of the semiconductor device, and the insulating layer covers a TFT and the conductive layer.Type: GrantFiled: April 18, 2013Date of Patent: February 11, 2014Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yoshitaka Dozen, Tomoyuki Aoki, Hidekazu Takahashi, Daiki Yamada, Eiji Sugiyama, Kaori Ogita, Naoto Kusumoto
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Patent number: 8629513Abstract: A device includes a first and a second heavily doped region in a semiconductor substrate. An insulation region has at least a portion in the semiconductor substrate, wherein the insulation region is adjacent to the first and the second heavily doped regions. A gate dielectric is formed over the semiconductor substrate and having a portion over a portion of the insulation region. A gate is formed over the gate dielectric. A floating conductor is over and vertically overlapping the insulation region. A metal line includes a portion over and vertically overlapping the floating conductor, wherein the metal line is coupled to, and carries a voltage of, the second heavily doped region.Type: GrantFiled: January 14, 2011Date of Patent: January 14, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ru-Yi Su, Fu-Chih Yang, Chun-Lin Tsai, Ker Hsiao Huo, Chih-Chang Cheng, Ruey-Hsin Liu
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Patent number: 8629505Abstract: A semiconductor device includes: a drain layer; a drift layer provided on the drain layer; a base region provided on the drift layer; a source region selectively provided on a surface of the base region; a first gate; a field-plate; a second gate; a drain electrode; and a source electrode. The first gate electrode is provided in each of a plurality of first trenches via a first insulating film. The first trenches penetrate from a surface of the source region through the base region and contact the drift layer. The field-plate electrode is provided in the first trench under the first gate electrode via a second insulating film. The second gate electrode is provided in a second trench via a third insulating film. The second trench penetrates from the surface of the source region through the base region and contacts the drift layer between the first trenches.Type: GrantFiled: March 21, 2011Date of Patent: January 14, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Tatsuya Nishiwaki
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Publication number: 20130320462Abstract: In one embodiment, a semiconductor device can include a substrate including a first type dopant. The semiconductor device can also include an epitaxial layer located above the substrate and including a lower concentration of the first type dopant than the substrate. In addition, the semiconductor device can include a junction extension region located within the epitaxial layer and including a second type dopant. Furthermore, the semiconductor device can include a set of field rings in physical contact with the junction extension region and including a higher concentration of the second type dopant than the junction extension region. Moreover, the semiconductor device can include an edge termination structure in physical contact with the set of field rings.Type: ApplicationFiled: May 30, 2012Publication date: December 5, 2013Applicant: VISHAY-SILICONIXInventors: Naveen Tipirneni, Deva N. Pattanayak
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Patent number: 8592867Abstract: A HEMT comprising a plurality of active semiconductor layers formed on a substrate. Source electrode, drain electrode, and gate are formed in electrical contact with the plurality of active layers. A spacer layer is formed on at least a portion of a surface of said plurality of active layers and covering the gate. A field plate is formed on the spacer layer and electrically connected to the source electrode, wherein the field plate reduces the peak operating electric field in the HEMT.Type: GrantFiled: March 25, 2011Date of Patent: November 26, 2013Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra, Marcia Moore
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Patent number: 8581341Abstract: Semiconductor power devices, and related methods, wherein a recessed contact makes lateral ohmic contact to the source diffusion, but is insulated from the underlying recessed field plate (RFP). Such an insulated RFP is here referred to as an embedded recessed field plate (ERFP).Type: GrantFiled: April 19, 2011Date of Patent: November 12, 2013Assignee: MaxPower Semiconductor, Inc.Inventors: Mohamed N. Darwish, Jun Zeng, Shih-Tzung Su, Richard A. Blanchard
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Patent number: 8558342Abstract: A reverse blocking IGBT according to the invention can include a reverse breakdown withstanding region, p-type outer field limiting rings formed in a reverse breakdown withstanding region and an outer field plate connected to the outer field limiting rings, the outer field plate including a first outer field plate in contact with outer field limiting rings nearest to the active region and second outer field plates in contact with other outer field limiting rings. The first outer field plate having an active region side edge portion projecting toward the active region and second outer field plate having an edge area side edge portion projecting toward the edge area. The reverse blocking IGBT according to the invention can facilitate improving the withstand voltages thereof and reducing the area thereof.Type: GrantFiled: September 28, 2010Date of Patent: October 15, 2013Assignee: Fuji Electric Co., Ltd.Inventors: Koh Yoshikawa, Motoyoshi Kubouchi
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Patent number: 8552496Abstract: A high-voltage transistor includes a drain, a source, and one or more drift regions extending from the drain toward the source. A field plate member laterally surrounds the drift regions and is insulated from the drift regions by a dielectric layer. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: August 26, 2010Date of Patent: October 8, 2013Assignee: Power Integrations, Inc.Inventor: Donald Ray Disney
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Patent number: 8482095Abstract: A semiconductor device includes a plurality of high-voltage insulated-gate field-effect transistors arranged in a matrix form on the main surface of a semiconductor substrate and each having a gate electrode, a gate electrode contact formed on the gate electrode, and a wiring layer which is formed on the gate electrode contacts adjacent in a gate-width direction to electrically connect the gate electrodes arranged in the gate-width direction. And the device includes shielding gates provided on portions of an element isolation region which lie between the transistors adjacent in the gate-width direction and gate-length direction and used to apply reference potential or potential of a polarity different from that of potential applied to the gate of the transistor to turn on the current path of the transistor to the element isolation region.Type: GrantFiled: April 14, 2011Date of Patent: July 9, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Hiroyuki Kutsukake, Kikuko Sugimae, Takeshi Kamigaichi
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Publication number: 20130154030Abstract: A semiconductor device includes a drift region of a first doping type, a junction between the drift region and a device region, a compensation region of a second doping type, and at least one field electrode structure arranged between the drift region and the compensation region. The at least one field electrode includes a field electrode and a field electrode dielectric adjoining the field electrode. The field electrode dielectric is arranged between the field electrode and the drift region and between the field electrode and the compensation. The field electrode dielectric includes a first opening through which the field electrode is coupled to drift region and a second opening through which the field electrode is coupled to the compensation region.Type: ApplicationFiled: December 20, 2011Publication date: June 20, 2013Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventor: Hans Weber
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Patent number: 8466492Abstract: A semiconductor device includes a semiconductor body including a first surface, an inner region and an edge region, a first doped device region of a first doping type in the inner region and the edge region, a second device region forming a device junction in the inner region with the first device region, and a plurality of at least two dielectric regions extending from the first surface into the semiconductor body. Two dielectric regions that are adjacent in a lateral direction of the semiconductor body are separated by a semiconductor mesa region. The semiconductor device further includes a resistive layer connected to the second device region and connected to at least one semiconductor mesa region.Type: GrantFiled: January 31, 2012Date of Patent: June 18, 2013Assignee: Infineon Technologies Austria AGInventors: Anton Mauder, Hans-Joachim Schulze, Franz Hirler
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Publication number: 20130105933Abstract: A semiconductor apparatus includes a semiconductor substrate. The semiconductor substrate includes an active region in which a semiconductor device is formed, and a peripheral region which is located between the active region and an edge surface of the semiconductor substrate. A first insulating layer including conductive particles is formed above at least a part of the peripheral region. By constructing the semiconductor apparatus in this manner, generation of a high electric field in the peripheral region can be suppressed. Therefore, voltage endurance characteristics of the semiconductor apparatus can be improved.Type: ApplicationFiled: July 18, 2012Publication date: May 2, 2013Applicant: TOYOTA JIDOSHA KABUSHIKI KAIHSAInventor: Keigo SATO
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Patent number: 8432018Abstract: The present invention provides a thin and bendable semiconductor device utilizing an advantage of a flexible substrate used in the semiconductor device, and a method of manufacturing the semiconductor device. The semiconductor device has at least one surface covered by an insulating layer which serves as a substrate for protection. In the semiconductor device, the insulating layer is formed over a conductive layer serving as an antenna such that the value in the thickness ratio of the insulating layer in a portion not covering the conductive layer to the conductive layer is at least 1.2, and the value in the thickness ratio of the insulating layer formed over the conductive layer to the conductive layer is at least 0.2. Further, not the conductive layer but the insulating layer is exposed in the side face of the semiconductor device, and the insulating layer covers a TFT and the conductive layer.Type: GrantFiled: October 12, 2011Date of Patent: April 30, 2013Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yoshitaka Dozen, Tomoyuki Aoki, Hidekazu Takahashi, Daiki Yamada, Eiji Sugiyama, Kaori Ogita, Naoto Kusumoto
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Publication number: 20130099280Abstract: An overvoltage protection devices operable to provide protection against overvoltage events of positive and negative polarity, comprising: an N P N semiconductor structure defining: a first N-type region; a first P-type region; and a second N-type region; wherein one of the first or second N-type regions is connected to a terminal, conductor or node that is to be protected against an overvoltage event, and the other one of the first or second N-type regions is connected to a reference, and wherein a field plate is in electrical contact with the first P-type region, and the field plate overlaps with but is isolated from portions of the first and second N type regions.Type: ApplicationFiled: October 21, 2011Publication date: April 25, 2013Applicant: ANALOG DEVICES, INC.Inventor: Edward Coyne
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Patent number: 8357985Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: GrantFiled: January 13, 2012Date of Patent: January 22, 2013Assignee: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8314471Abstract: In one embodiment, the present invention includes a semiconductor power device. The semiconductor power device comprises a trenched gate and a trenched field region. The trenched gate is disposed vertically within a trench in a semiconductor substrate. The trenched field region is disposed vertically within the trench and below the trenched gate. A lower portion of the trenched field region tapers to disperse an electric field.Type: GrantFiled: November 17, 2009Date of Patent: November 20, 2012Assignee: Diodes IncorporatedInventors: Chiao-Shun Chuang, Tony Huang
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Patent number: 8268693Abstract: A “tabbed” MOS device provides radiation hardness while supporting reduced gate width requirements. The “tabbed” MOS device also utilizes a body tie ring, which reduces field threshold leakage. In one implementation the “tabbed” MOS device is designed such that a width of the tab is based on at least a channel length of the MOS device such that a radiation-induced parasitic conduction path between the source and drain region of the device has a resistance that is higher than the device channel resistance.Type: GrantFiled: August 25, 2010Date of Patent: September 18, 2012Assignee: Intersil Americas Inc.Inventors: Stephen Joseph Gaul, Michael D. Church, Brent R. Doyle
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Patent number: 8269282Abstract: A semiconductor component includes at least one field effect transistor disposed along a trench in a semiconductor region and has at least one locally delimited dopant region in the semiconductor region. The at least one locally delimited dopant region extends from or over a pn junction between the source region and the body region of the transistor or between the drain region and the body region of the transistor into the body region as far as the gate electrode, such that a gap between the pn junction and the gate electrode in the body region is bridged by the locally delimited dopant region.Type: GrantFiled: December 15, 2010Date of Patent: September 18, 2012Assignee: Infineon Technologies AGInventors: Andrew Wood, Rudolf Zelsacher, Markus Zundel
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Patent number: 8258573Abstract: A semiconductor component includes a body with a drift zone, a source zone, a body zone, and a drain zone. A gate forms a MOS structure with the drift zone, with the source zone and with the body zone. An edge termination between the lateral edge and the MOS structure includes a plurality of field rings which enclose the MOS structure. The lateral edge is at the same potential as the drift zone, and the edge termination reduces voltage between the lateral edge and the source zone. A horizontally extending edge plate is disposed at the front side between the lateral edge and the edge termination. The edge plate is at the same potential as the drift zone and forms a plate capacitor structure including a field plate lying above the edge plate.Type: GrantFiled: December 8, 2010Date of Patent: September 4, 2012Assignee: Infineon Technologies AGInventors: Uwe Wahl, Armin Willmeroth
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Publication number: 20120193749Abstract: In a semiconductor device having a pn-junction diode structure that includes anode diffusion region including edge area, anode electrode on anode diffusion region, and insulator film on edge area of anode diffusion region, the area of anode electrode above anode diffusion region with insulator film interposed between anode electrode and anode diffusion region is narrower than the area of insulator film on edge area of anode diffusion region.Type: ApplicationFiled: April 16, 2012Publication date: August 2, 2012Applicant: Fuji Electric Device Technology Co., Ltd.Inventors: Ryouichi KAWANO, Tomoyuki Yamazaki, Michio Nemoto, Mituhiro Kakefu
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Patent number: 8227868Abstract: A semiconductor device according to the present invention includes a semiconductor substrate of a first conductivity type having a top surface and a rear surface, a semiconductor layer of a second conductivity type formed on the top surface of the semiconductor substrate, having a top surface and a rear surface, and having the rear surface in contact with the top surface of the semiconductor substrate, a body region of the first conductivity type formed in a top layer portion of the semiconductor layer, a first impurity region of the second conductivity type formed in a top layer portion of the semiconductor layer and spaced apart from the body region, a second impurity region of the second conductivity type formed in a top layer portion of the body region and spaced apart from a peripheral edge of the body region, a gate electrode formed on the semiconductor layer and opposed to a portion between the peripheral edge of the body region and a peripheral edge of the second impurity region, a field insulating fiType: GrantFiled: January 31, 2011Date of Patent: July 24, 2012Assignee: Rohm Co., Ltd.Inventor: Daisuke Ichikawa
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Publication number: 20120119318Abstract: In a semiconductor device in which a first electrode and a second electrode are disposed on a surface of a first conductivity-type semiconductor layer of a semiconductor substrate and a lateral element is formed to cause an electric current between the first electrode and the second electrode, a scroll-shaped resistive field plate is disposed on the semiconductor layer across an insulation film. The resistive field plate extends toward the second electrode while surrounding a periphery of the first electrode in a scroll shape. A resistance value of a total resistance of the resistive field plate is in a range between 90 k? and 90 M?.Type: ApplicationFiled: November 14, 2011Publication date: May 17, 2012Applicant: DENSO CORPORATIONInventors: Norihito TOKURA, Takao Yamamoto, Hisato Kato, Kouji Senda, Akio Nakagawa
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Publication number: 20120112307Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: ApplicationFiled: January 13, 2012Publication date: May 10, 2012Applicant: ANALOG DEVICES, INC.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuinness, Bernard Patrick Stenson
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Patent number: 8169005Abstract: A multiple field plate transistor includes an active region, with a source, a drain, and a gate. A first spacer layer is over the active region between the source and the gate and a second spacer layer over the active region between the drain and the gate. A first field plate on the first spacer layer is connected to the gate. A second field plate on the second spacer layer is connected to the gate. A third spacer layer is on the first spacer layer, the second spacer layer, the first field plate, the gate, and the second field plate, with a third field plate on the third spacer layer and connected to the source. The transistor exhibits a blocking voltage of at least 600 Volts while supporting a current of at least 2 Amps with an on resistance of no more than 5.0 m?-cm2, of at least 600 Volts while supporting a current of at least 3 Amps with an on resistance of no more than 5.3 m?-cm2, of at least 900 Volts while supporting a current of at least 2 Amps with an on resistance of no more than 6.Type: GrantFiled: January 26, 2011Date of Patent: May 1, 2012Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra
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Patent number: 8143679Abstract: A semiconductor power device includes an active region configured to conduct current when the semiconductor device is biased in a conducting state, and a termination region along a periphery of the active region. The termination region includes a first silicon region of a first conductivity type extending to a first depth within a second silicon region of a second conductivity type, the first and second silicon regions forming a PN junction therebetween. The second silicon region has a recessed portion extending below the first depth and out to an edge of a die housing the semiconductor power device. The recessed portion forms a vertical wall at which the first silicon region terminates. A first conductive electrode extends into the recessed portion and is insulated from the second silicon region.Type: GrantFiled: June 8, 2009Date of Patent: March 27, 2012Assignee: Fairchild Semiconductor CorporationInventor: Christopher Boguslaw Kocon
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Publication number: 20120043638Abstract: A semiconductor device includes: a first insulating layer; a semiconductor layer provided on the first insulating layer; a first semiconductor region selectively provided in the semiconductor layer; a second semiconductor region selectively provided in the semiconductor layer and spaced from the first semiconductor region; a first main electrode provided in contact with the first semiconductor region; a second main electrode provided in contact with the second semiconductor region; a second insulating layer provided on the semiconductor layer; a first conductive material provided in the second insulating layer above a portion of the semiconductor layer located between the first semiconductor region and the second semiconductor region; and a second conductive material provided in a trench provided in a portion of the semiconductor layer opposed to the first conductive material, being in contact with the first conductive material, and reaching the first insulating layer.Type: ApplicationFiled: November 2, 2011Publication date: February 23, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Mitsuhiko Kitagawa
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Patent number: 8110888Abstract: High voltage semiconductor devices with high-voltage termination structures are constructed on lightly doped substrates. Lightly doped p-type substrates are particularly prone to depletion and inversion from positive charges, degrading the ability of associated termination structures to block high voltages. To improve the efficiency and stability of termination structures, second termination regions of the same dopant type as the substrate, more heavily doped than the substrate but more lightly doped than first termination regions, are positioned adjoining the first termination regions. The second termination regions raise the field threshold voltage where the surface is vulnerable and render the termination structure substantially insensitive to positive charges at the surface. The use of higher dopant concentration in the gap region without causing premature avalanche is facilitated by only creating second termination regions for regions lacking field plate protection.Type: GrantFiled: September 9, 2008Date of Patent: February 7, 2012Assignee: Microsemi CorporationInventors: Jinshu Zhang, Dumitru Sdrulla, Dah Wen Tsang
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Publication number: 20120007176Abstract: A bipolar transistor structure includes an epitaxial layer on a semiconductor substrate, a bipolar transistor device formed in the epitaxial layer and a trench structure formed in the epitaxial layer adjacent at least two opposing lateral sides of the bipolar transistor device. The trench structure includes a field plate spaced apart from the epitaxial layer by an insulating material. The bipolar transistor structure further includes a base contact connected to a base of the bipolar transistor device, an emitter contact connected to an emitter of the bipolar transistor device and isolated from the base contact and an electrical connection between the emitter contact and the field plate.Type: ApplicationFiled: July 9, 2010Publication date: January 12, 2012Applicant: INFINEON TECHNOLOGIES AGInventors: Christoph KADOW, Thorsten MEYER, Norbert KRISCHKE
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Publication number: 20110221011Abstract: The invention relates to a transistor, in which the electric field is reduced in critical areas using field plates, thus permitting the electric field to be more uniformly distributed along the component. The aim of the invention is to provide a transistor and a production method therefor, wherein the electric field in the active region is smoothed (and field peaks are reduced), thus allowing the component to be made more simply and cost-effectively. The semiconductor component according to the invention has a substrate (20) which is provided with an active layer structure, a source contact (30) and a drain contact (28) being located on said active layer structure (24, 26). The source contact (30) and the drain contact (28) are mutually spaced and at least one part of a gate contact (32) is provided on the active layer structure (24, 26) in the region between the source contact (30) and the drain contact (28), a gate field plate (34) being electrically connected to the gate contact (32).Type: ApplicationFiled: February 21, 2008Publication date: September 15, 2011Inventors: Eldat Bahat-Treidel, Victor Sidorov, Joachim Wuerfl
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Patent number: 8004022Abstract: A field effect transistor includes a GaN epitaxial substrate, a gate electrode formed on an electron channel layer of the substrate, and source and drain electrodes arranged spaced apart by a prescribed distance on opposite sides of the gate electrode. The source and drain electrodes are in ohmic contact with the substrate. At an upper portion of the gate electrode, a field plate is formed protruding like a visor to the side of drain electrode. Between the electron channel layer of the epitaxial substrate and the field plate, a dielectric film is formed. The dielectric film is partially removed at a region immediately below the field plate, to be flush with a terminal end surface of the field plate. The dielectric film extends from a lower end of the removed portion to the drain electrode, to be overlapped on the drain electrode.Type: GrantFiled: January 6, 2009Date of Patent: August 23, 2011Assignee: Sharp Kabushiki KaishaInventors: Norimasa Yafune, John Kevin Twynam
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Patent number: 7994006Abstract: A semiconductor device including a drift layer of a first conductivity type formed on a surface of a semiconductor substrate. A surface of the drift layer has a second area positioned on an outer periphery of a first area. A cell portion formed in the first area includes a first base layer of a second conductivity type, a source layer and a control electrode formed in the first base layer and the source layer. The device also includes a terminating portion formed in the drift layer including a second base layer of a second conductivity type, an impurity diffused layer of a second conductivity type, and a metallic compound whose end surface on the terminating portion side is positioned on the cell portion side away from the end surface of the impurity diffused layer on the terminal portion side.Type: GrantFiled: November 14, 2008Date of Patent: August 9, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Satoshi Aida, Shigeo Kouzuki, Masaru Izumisawa, Hironori Yoshioka
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Publication number: 20110101486Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: ApplicationFiled: November 2, 2009Publication date: May 5, 2011Applicant: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, Bernard Patrick Stenson
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Publication number: 20110084354Abstract: In a semiconductor device according to the present invention, an electrode layer and a recessed part are formed on a surface of a semiconductor substrate. Further, in the semiconductor substrate, a RESURF layer that is in contact with a bottom surface of the recessed part and the electrode layer is formed. In addition, an insulating film is formed on an upper surface of the semiconductor substrate so as to fill the recessed part. Moreover, a field plate electrode is formed on the insulating film above the recessed part.Type: ApplicationFiled: July 28, 2010Publication date: April 14, 2011Applicant: MITSUBISHI ELECTRIC CORPORATIONInventors: Shigeto Honda, Atsushi Narazaki, Kaoru Motonami
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Patent number: 7915644Abstract: A HEMT comprising an active region comprising a plurality of active semiconductor layers formed on a substrate. Source electrode, drain electrode, and gate are formed in electrical contact with the active region. A spacer layer is formed on at least a portion of a surface of said active region and covering the gate. A field plate is formed on the spacer layer and electrically connected to the source electrode, wherein the field plate reduces the peak operating electric field in the HEMT.Type: GrantFiled: May 7, 2009Date of Patent: March 29, 2011Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra, Marcia Moore
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Patent number: 7893500Abstract: A multiple field plate transistor includes an active region, with a source, a drain, and a gate. A first spacer layer is over the active region between the source and the gate and a second spacer layer over the active region between the drain and the gate. A first field plate on the first spacer layer is connected to the gate. A second field plate on the second spacer layer is connected to the gate. A third spacer layer is on the first spacer layer, the second spacer layer, the first field plate, the gate, and the second field plate, with a third field plate on the third spacer layer and connected to the source. The transistor exhibits a blocking voltage of at least 600 Volts while supporting a current of at least 2 Amps with an on resistance of no more than 5.0 m?-cm2, of at least 600 Volts while supporting a current of at least 3 Amps with an on resistance of no more than 5.3 m?-cm2, of at least 900 Volts while supporting a current of at least 2 Amps with an on resistance of no more than 6.Type: GrantFiled: December 11, 2009Date of Patent: February 22, 2011Assignee: Cree, Inc.Inventors: Yifeng Wu, Primit Parikh, Umesh Mishra
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Patent number: 7872300Abstract: A power semiconductor component (1) contains a weakly doped drift zone (9), a drain zone (10) and a MOS structure (12) situated at the front side (2) of the power semiconductor component (1). An edge plate (6) of the first conductivity type is provided at its edge (8) above the drift zone (9). The edge plate (6) is doped more highly than the drift zone (9). Situated above the edge plate (6) is an insulation layer (24) with an overlying field plate (7) made of polysilicon. The field plate (7) forms together with the edge plate (6) a plate capacitor structure which increases the drain-source output capacitance of the power semiconductor component (1), so that fewer radiofrequency interference disturbances are caused by the power semiconductor component (1) during switching.Type: GrantFiled: May 11, 2006Date of Patent: January 18, 2011Assignee: Infineon Technologies AGInventors: Uwe Wahl, Armin Willmeroth
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Patent number: 7868418Abstract: A first main electrode is provided on one surface thereof. On the other surface thereof, a second semiconductor layer of the first conduction type and a third semiconductor layer of the second conduction type are arranged alternately along the surface. A fourth semiconductor layer of the second conduction type and a fifth semiconductor layer of the first conduction type are stacked on the surfaces of the second and third semiconductor layers. The semiconductor device further comprises a control electrode formed in a trench with an insulator interposed therebetween. The trench passes through the fourth and fifth semiconductor layers and reaches the second semiconductor layer. A sixth semiconductor layer of the first conduction type is diffused from the bottom of the trench. A second main electrode is connected to the fourth and fifth semiconductor layers.Type: GrantFiled: March 18, 2008Date of Patent: January 11, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Akio Nakagawa
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Patent number: 7851886Abstract: The present invention provides a thin and bendable semiconductor device utilizing an advantage of a flexible substrate used in the semiconductor device, and a method of manufacturing the semiconductor device. The semiconductor device has at least one surface covered by an insulating layer which serves as a substrate for protection. In the semiconductor device, the insulating layer is formed over a conductive layer serving as an antenna such that the value in the thickness ratio of the insulating layer in a portion not covering the conductive layer to the conductive layer is at least 1.2, and the value in the thickness ratio of the insulating layer formed over the conductive layer to the conductive layer is at least 0.2. Further, not the conductive layer but the insulating layer is exposed in the side face of the semiconductor device, and the insulating layer covers a TFT and the conductive layer.Type: GrantFiled: June 21, 2007Date of Patent: December 14, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yoshitaka Dozen, Tomoyuki Aoki, Hidekazu Takahashi, Daiki Yamada, Eiji Sugiyama, Kaori Ogita, Naoto Kusumoto
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Patent number: 7825466Abstract: The present invention provides a super-junction semiconductor element having a high voltage resistance and a low resistivity, while being successfully reduced in the size thereof, which comprises a semiconductor substrate 3; a pair of electrodes 1, 2 provided respectively on a top surface 12 and a back surface 13 of the semiconductor substrate 3; a parallel pn layer provided between the top surface 12 and the back surface 13 of said semiconductor substrate, having n-type semiconductor layers 4 allowing current flow under the ON state but being depleted under the OFF state, and p-type semiconductor layers 5 alternately arranged therein; and an insulating film 6 formed so as to surround the parallel pn layer; wherein the insulating film 6 is formed at a predetermined position.Type: GrantFiled: March 22, 2005Date of Patent: November 2, 2010Assignee: NEC Electronics CorporationInventors: Yoshinao Miura, Hitoshi Ninomiya
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Patent number: 7800176Abstract: An electronic circuit and a method for controlling a power field effect transistor. The electronic circuit includes a power field effect transistor having a semiconductor body, which has a drain zone, a drift zone, a source zone and a bulk zone. The power field effect transistor further includes a gate and a field plate. The field plate is placed adjacent to the drift zone and is isolated from the drift zone. A switch circuitry is provided for electrically connecting the field plate depending on the drain-source voltage such that the field plate is electrically connected to the drain zone, if |UDS|>UT, where UT is a predetermined voltage, and if |UDS|>UT, the field plate is connected to an electrode having an electrode-source voltage UES.Type: GrantFiled: October 27, 2008Date of Patent: September 21, 2010Assignee: Infineon Technologies Austria AGInventor: Wolfgang Werner
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Patent number: 7791132Abstract: A high-voltage transistor includes first and second trenches that define a mesa in a semiconductor substrate. First and second field plate members are respectively disposed in the first and second trenches, with each of the first and second field plate members being separated from the mesa by a dielectric layer. The mesa includes a plurality of sections, each section having a substantially constant doping concentration gradient, the gradient of one section being at least 10% greater than the gradient of another section. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.Type: GrantFiled: January 4, 2010Date of Patent: September 7, 2010Assignee: Power Integrations, Inc.Inventors: Sujit Banerjee, Donald Ray Disney
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Patent number: 7786533Abstract: A high-voltage transistor includes a drain, a source, and one or more drift regions extending from the drain toward the source. A field plate member laterally surrounds the drift regions and is insulated from the drift regions by a dielectric layer. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR 1.72(b).Type: GrantFiled: February 3, 2005Date of Patent: August 31, 2010Assignee: Power Integrations, Inc.Inventor: Donald Ray Disney