By Doping Profile Or Shape Or Arrangement Of The Pn Junction, Or With Supplementary Regions (e.g., Guard Ring, Ldd, Drift Region) (epo) Patents (Class 257/E29.012)
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Patent number: 8390081Abstract: A MOS P-N junction diode device includes a substrate having a first conductivity type, a field oxide structure defining a trench structure, a gate structure formed in the trench structure and a doped region having a second conductivity type adjacent to the gate structure in the substrate. The method for manufacturing such diode device includes several ion-implanting steps. After the gate structure is formed by isotropic etching using a patterned photo-resist layer as a mask, an ion-implanting step is performed using the patterned photo-resist layer as a mask to form a deeper doped sub-region. Then, another ion-implanting step is performed using the gate structure as a mask to form a shallower doped sub-region between the gate structure and the deeper doped sub-region. The formed MOS P-N junction diode device has low forward voltage drop, low reverse leakage current, fast reverse recovery time and high reverse voltage tolerance.Type: GrantFiled: April 21, 2009Date of Patent: March 5, 2013Assignee: PFC Device Corp.Inventors: Kuo-Liang Chao, Hung-Hsin Kuo, Tse-Chuan Su
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Patent number: 8373247Abstract: According to one embodiment, a semiconductor device includes a first semiconductor region of a first conductivity type, a second semiconductor region of the first conductivity type, a first main electrode, a third semiconductor region of a second conductivity type, a second main electrode, and a plurality of embedded semiconductor regions of the second conductivity type. The second semiconductor region is formed on a first major surface of the first semiconductor region. The first main electrode is formed on a face side opposite to the first major surface of the first semiconductor region. The third semiconductor region is formed on a second major surface of the second semiconductor region on a side opposite to the first semiconductor region. The second main electrode is formed to bond to the third semiconductor region. The embedded semiconductor regions are provided in a termination region.Type: GrantFiled: February 17, 2011Date of Patent: February 12, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Syotaro Uno, Munehisa Yabuzaki, Shunji Taniuchi, Miho Watanabe
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Patent number: 8368140Abstract: In one embodiment the present invention includes a semiconductor device. The semiconductor device comprises a first semiconductor region, a second semiconductor region and a trench region. The first semiconductor region is of a first conductivity type and a first conductivity concentration. The trench region includes a metal layer in contact with the first semiconductor region to form a metal-semiconductor junction. The second semiconductor region is adjacent to the first semiconductor region that has a second conductivity type and a second conductivity concentration. The second semiconductor region forms a PN junction with the first semiconductor region, and the trench region has a depth such that the metal-semiconductor junction is proximate to the PN junction.Type: GrantFiled: December 3, 2009Date of Patent: February 5, 2013Assignee: Diodes IncorporatedInventor: Chiao-Shun Chuang
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Patent number: 8362558Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.Type: GrantFiled: May 4, 2011Date of Patent: January 29, 2013Assignee: MACRONIX International Co., Ltd.Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
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Patent number: 8349666Abstract: A method for forming a semiconductor structure includes forming a plurality of fuses over a semiconductor substrate; forming a plurality of interconnect layers over the semiconductor substrate and a plurality of interconnect pads at a top surface of the plurality of interconnect layers; and forming a seal ring, wherein the seal ring surrounds active circuitry formed in and on the semiconductor substrate, the plurality of interconnect pads, and the plurality of fuses, wherein each fuse of the plurality of fuses is electrically connected to a corresponding interconnect pad of the plurality of interconnect pads and the seal ring, and wherein when each fuse of the plurality of fuses is in a conductive state, the fuse electrically connects the corresponding interconnect pad to the seal ring.Type: GrantFiled: July 22, 2011Date of Patent: January 8, 2013Assignee: Freescale Semiconductor, Inc.Inventors: George R. Leal, Kevin J. Hess, Trent S. Uehling
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Patent number: 8350366Abstract: A power semiconductor component having a pn junction, a body with a first basic conductivity, a well-like region with a second conductivity which is arranged horizontally centrally in the body, has a first two-level doping profile and has a first penetration depth from the first main surface into the body. In addition, this power semiconductor component has an edge structure which is arranged between the well-like region and the edge of the power semiconductor component and which comprises a plurality of field rings with a single-level doping profile, a second conductivity and a second penetration depth, wherein the first penetration depth is no more than about 50% of the second penetration depth.Type: GrantFiled: June 20, 2011Date of Patent: January 8, 2013Assignee: Semikron Elektronik GmbH & Co., KGInventor: Bernhard Koenig
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Patent number: 8338907Abstract: A semiconductor device includes a first semiconductor region and a second semiconductor region provided on a main surface of a substrate, being apart from each other and having first conductivity; a third semiconductor region provided between the first semiconductor region and the second semiconductor region and having second conductivity opposite to the first conductivity; a fourth semiconductor region provided on a main surface of the substrate, connected to the third semiconductor region, manufactured together with the third semiconductor region in the same manufacturing process, and having the conductivity same as that of the third semiconductor region; and trenches made on the main surface of the fourth semiconductor region and having a depth smaller than a junction depth of the fourth semiconductor region.Type: GrantFiled: January 20, 2012Date of Patent: December 25, 2012Assignee: Sanken Electronic Co., Ltd.Inventor: Hironori Aoki
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Patent number: 8330213Abstract: Power devices using refilled trenches with permanent charge at or near their sidewalls. These trenches extend vertically into a drift region.Type: GrantFiled: April 13, 2010Date of Patent: December 11, 2012Assignee: MaxPower Semiconductor, Inc.Inventors: Mohamed N. Darwish, Jun Zeng, Richard A. Blanchard
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Patent number: 8330233Abstract: A semiconductor device 1 including a cell region 2 formed with a semiconductor element 6 and a periphery region 3 formed in the periphery of the cell region 2. The semiconductor region 1 is arranged with an n? type drift region 12 formed in the cell region 2 and periphery region 3, a plurality of p? type columnar regions formed in the n? drift region 12 of the cell region 2, a plurality of p? type columnar resistance improvement regions 23n formed in the n? type drift region 12 of the periphery region 3, and a plurality of electrical field buffer regions 24n formed in an upper part of the p? type columnar region 23n. An interval Sn between the electrical field buffer region 24n and an adjacent electrical field buffer region 24n is different between an interior side and an exterior side of the periphery region 3.Type: GrantFiled: July 15, 2010Date of Patent: December 11, 2012Assignee: Sanken Electric Co., Ltd.Inventor: Tomoyuki Omori
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Patent number: 8330192Abstract: In broad terms the present invention is a semiconductor junction comprising a first material (102) and a second material (104), in which a surface of one or both of the junction materials has a periodically repeating structure that causes electron wave interference resulting in a change in the way electron energy levels within the junction are distributed.Type: GrantFiled: January 24, 2006Date of Patent: December 11, 2012Assignee: Borealis Technical LimitedInventors: Avto Tavkhelidze, Amiran Bibilashvili, Rodney T. Cox
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Patent number: 8309423Abstract: A high voltage diode in which the n-type cathode is surrounded by an uncontacted heavily doped n-type ring to reflect injected holes back into the cathode region for recombination or collection is disclosed. The dopant density in the heavily doped n-type ring is preferably 100 to 10,000 times the dopant density in the cathode. The heavily doped n-type region will typically connect to an n-type buried layer under the cathode. The heavily doped n-type ring is optimally positioned at least one hole diffusion length from cathode contacts. The disclosed high voltage diode may be integrated into an integrated circuit without adding process steps.Type: GrantFiled: March 1, 2012Date of Patent: November 13, 2012Assignee: Texas Instruments IncorporatedInventors: Sameer P. Pendharkar, Binghua Hu
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Patent number: 8299548Abstract: According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The method can include simultaneously forming a first field insulating film and at least one second field insulating film on a front face side of a semiconductor layer. The at least one second field insulating film is separated from the first field insulating film and thinner than the first field insulating film. The method can include forming a drift region of a first conductivity type in a region of the semiconductor layer including the first field insulating film and the second field insulating film. The method can include forming a drain region of the first conductivity type in the front face of the semiconductor layer on a side of the first field insulating film. In addition, the method can include forming a source region of the first conductivity type in the front face of the semiconductor layer on a side of the second field insulating film.Type: GrantFiled: March 17, 2011Date of Patent: October 30, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Kanako Komatsu, Tsubasa Yamada, Jun Morioka, Koji Kimura
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Patent number: 8283727Abstract: A circuit with electrostatic discharge protection is described. In one case, the circuit includes trigger device configured to protect a component connected to a node of the circuit during an electrostatic discharge event, the trigger device includes an isolation structure interposed between a gate oxide layer and an extended drain region. A portion of the extended drain region proximate the isolation structure is substantially metal-free.Type: GrantFiled: December 11, 2009Date of Patent: October 9, 2012Assignee: Cypress Semiconductor CorporationInventors: Andrew Walker, Helmut Puchner, Sai Dhanraj, Kevin Jang
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Patent number: 8278711Abstract: A substrate having semiconductor material and a surface that supports a gate electrode and defines a surface normal direction is provided. The substrate can include a drift region including a first dopant type. A well region can be disposed adjacent to the drift region and proximal to the surface, and can include a second dopant type. A termination extension region can be disposed adjacent to the well region and extend away from the gate electrode, and can have an effective concentration of second dopant type that is generally less than that in the well region. An adjust region can be disposed between the surface and at least part of the termination extension region. An effective concentration of second dopant type may generally decrease when moving from the termination extension region into the adjust region along the surface normal direction.Type: GrantFiled: November 23, 2010Date of Patent: October 2, 2012Assignee: General Electric CompanyInventors: Ramakrishna Rao, Stephen Daley Arthur, Peter Almern Losee, Kevin Dean Matocha
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Publication number: 20120241899Abstract: A power semiconductor device includes a first semiconductor layer of a first conductivity type, a second semiconductor layer of the first conductivity type, a third semiconductor layer of a second conductivity type, and a fourth semiconductor layer of the second conductivity type. The second semiconductor layer is provided on the first semiconductor layer and has a lower concentration of first conductivity type impurity than the first semiconductor layer. The third semiconductor layer is provided on a surface of the second semiconductor layer. The fourth semiconductor layer is selectively provided on a surface of the third semiconductor layer and has a higher concentration of second conductivity type impurity than the third semiconductor layer. The third semiconductor layer includes a carrier lifetime reducing region adjacent to a bottom surface of the fourth semiconductor layer. The carrier lifetime reducing region is spaced from the second semiconductor layer.Type: ApplicationFiled: March 16, 2012Publication date: September 27, 2012Applicant: Kabushiki Kaisha ToshibaInventor: Masakazu KOBAYASHI
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Patent number: 8269276Abstract: The invention relates to a method for the production of both MOS transistors with extremely low leakage currents at the pn junctions and logic/switching transistors, whose gates are laterally defined by spacers in a p-substrate or a p-well in an n-substrate. The aim of the invention is to provide a method for the production of MOS transistors with extremely low leakage currents that allows for parallel logic/switching transistors.Type: GrantFiled: March 29, 2010Date of Patent: September 18, 2012Assignee: STMicroelectronics NVInventor: Stefan Guenther
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Patent number: 8264015Abstract: A semiconductor device in which a first insulated gate field effect transistor (1) is connected in series with a second field effect transistor, FET, (2), wherein the second field effect transistor (2) has a heavily doped source region (19A) which is electrically connected to a heavily doped drain contact region (191) of the first insulated gate field effect transistor, and further that the breakthrough voltage of the first insulated gate field effect transistor (1) is higher than the pinch voltage, Vp, of the second field effect transistor (2).Type: GrantFiled: April 3, 2009Date of Patent: September 11, 2012Inventor: Klas-Håkan Eklund
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Patent number: 8263982Abstract: A thin film transistor includes a gate electrode and a semiconductor layer. The semiconductor layer includes a channel region, a source region, a drain region, a low-concentration impurity region provided between the channel region and the source or drain region and a high-concentration impurity region. The high-concentration impurity region overlaps with the gate electrode.Type: GrantFiled: August 11, 2009Date of Patent: September 11, 2012Assignee: Seiko Epson CorporationInventor: Hidenori Kawata
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Patent number: 8247798Abstract: Circuits for processing radio frequency (“RF”) and microwave signals are fabricated using field effect transistors (“FETs”) that have one or more strained channel layers disposed on one or more planarized substrate layers. FETs having such a configuration exhibit improved values for, for example, transconductance and noise figure. RF circuits such as, for example, voltage controlled oscillators (“VCOs”), low noise amplifiers (“LNAs”), and phase locked loops (“PLLs”) built using these FETs also exhibit enhanced performance.Type: GrantFiled: January 31, 2011Date of Patent: August 21, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Glyn Braithwaite, Richard Hammond, Matthew T. Currie
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Patent number: 8212323Abstract: A seal ring structure for an integrated circuit includes a seal ring being disposed along a periphery of the integrated circuit and being divided into at least a first portion and a second portion, wherein the second portion is positioned facing an analog and/or RF circuit block and is different from the first portion in structure. A P+ region is provided in a P substrate and positioned under the second portion. A shallow trench isolation (STI) structure surrounds the P+ region and laterally extends underneath a conductive rampart of the second portion.Type: GrantFiled: August 5, 2010Date of Patent: July 3, 2012Assignee: Mediatek Inc.Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
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Publication number: 20120132954Abstract: A semiconductor device includes a semiconductor substrate with a first surface and a second surface. The semiconductor substrate has an element region including an IGBT region and a diode region located adjacent to the IGBT region. An IGBT element is formed in the IGBT region. A diode element is formed in the diode region. A heavily doped region of first conductivity type is located on the first surface side around the element region. An absorption region of first conductivity type is located on the second surface side around the element region. A third semiconductor region of second conductivity type is located on the second surface side around the element region.Type: ApplicationFiled: November 22, 2011Publication date: May 31, 2012Applicant: DENSO CORPORATIONInventors: Kenji KOUNO, Hiromitsu Tanabe, Yukio Tsuzuki
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Patent number: 8188578Abstract: A seal ring structure disposed along a periphery of an integrated circuit. The seal ring is divided into at least a first portion and a second portion. The second portion is positioned facing and shielding an analog and/or RF circuit block from a noise. A deep N well is disposed in a P substrate and is positioned under the second portion. The deep N well reduces the substrate noise coupling.Type: GrantFiled: November 19, 2008Date of Patent: May 29, 2012Assignee: Mediatek Inc.Inventors: Tung-Hsing Lee, Tien-Chang Chang, Yuan-Hung Chung
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Patent number: 8188521Abstract: A power semiconductor device has semiconductor layers, including: first layer of first type; second and third layers respectively of first and second types alternately on the first layer; fourth layers of second type on the third layers; fifth layers of first type on the fourth layer; sixth and seventh layers respectively of second and first types alternately on the second and third layers; a first electrode connected to the first layer; an insulation film on fourth, sixth, and seventh layers; a second electrode on fourth, sixth, and seventh layers via the insulation film; and a third electrode joined to fourth and fifth layers, wherein the sixth layers are connected to the fourth layers and one of the third layers between two fourth layers, and an impurity concentration of the third layers below the sixth layers is higher than that of the third layers under the fourth layers.Type: GrantFiled: March 22, 2010Date of Patent: May 29, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Syotaro Ono, Munehisa Yabuzaki, Nana Hatano, Miho Watanabe
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Publication number: 20120119319Abstract: A semiconductor device includes a first semiconductor region and a second semiconductor region provided on a main surface of a substrate, being apart from each other and having first conductivity; a third semiconductor region provided between the first semiconductor region and the second semiconductor region and having second conductivity opposite to the first conductivity; a fourth semiconductor region provided on a main surface of the substrate, connected to the third semiconductor region, manufactured together with the third semiconductor region in the same manufacturing process, and having the conductivity same as that of the third semiconductor region; and trenches made on the main surface of the fourth semiconductor region and having a depth smaller than a junction depth of the fourth semiconductor region.Type: ApplicationFiled: January 20, 2012Publication date: May 17, 2012Applicant: Sanken Electric Co., Ltd.Inventor: Hironori AOKI
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Patent number: 8159026Abstract: This invention provides a lateral high-voltage semiconductor device, which is a three-terminal one with two types of carriers for conduction and consists of a highest voltage region and a lowest voltage region referring to the substrate and a surface voltage-sustaining region between the highest voltage region and the lowest voltage region. The highest voltage region and the lowest region have an outer control terminal and an inner control terminal respectively, where one terminal is for controlling the flow of majorities of one conductivity type and another for controlling the flow of majorities of the other conductivity type. The potential of the inner control terminal is regulated by the voltage applied to the outer control terminal.Type: GrantFiled: April 2, 2010Date of Patent: April 17, 2012Assignee: University of Electronics Science and TechnologyInventor: Xingbi Chen
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Patent number: 8159033Abstract: A junction forming region is formed between a drain region of a MOS structure and a device isolation region which surrounds the MOS structure and is in contact with the drain region, to form a PN junction together with the drain region. As a consequence, it is possible to adjust a breakdown voltage of an ESD protection device which is fabricated in the same process as that for an internal device without varying basic performance of the internal device even at a final stage of an LSI manufacturing process.Type: GrantFiled: March 4, 2009Date of Patent: April 17, 2012Assignee: Lapis Semiconductor Co., Ltd.Inventor: Hirokazu Hayashi
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Patent number: 8154101Abstract: A high voltage diode in which the n-type cathode is surrounded by an uncontacted heavily doped n-type ring to reflect injected holes back into the cathode region for recombination or collection is disclosed. The dopant density in the heavily doped n-type ring is preferably 100 to 10,000 times the dopant density in the cathode. The heavily doped n-type region will typically connect to an n-type buried layer under the cathode. The heavily doped n-type ring is optimally positioned at least one hole diffusion length from cathode contacts. The disclosed high voltage diode may be integrated into an integrated circuit without adding process steps.Type: GrantFiled: August 7, 2009Date of Patent: April 10, 2012Assignee: Texas Instruments IncorporatedInventors: Sameer P. Pendharkar, Binghua Hu
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Patent number: 8143673Abstract: A circuit with electrostatic discharge protection is described. The circuit includes an output driver transistor with an extended drain contact region. The circuit also includes a distinct device configured to provide electrostatic discharge protection for the output driver transistor. The distinct device includes an electrostatic discharge protection transistor with an extended drain region.Type: GrantFiled: May 4, 2009Date of Patent: March 27, 2012Assignee: Cypress Semiconductor CorporationInventors: Andrew Walker, Helmut Puchner, Kevin Jang
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Patent number: 8129262Abstract: Fabrication of an insulated-gate field-effect transistor (110) entails separately introducing three body-material dopants, typically through an opening in a mask, into body material (50) of a semiconductor body so as to reach respective maximum dopant concentrations at three different vertical locations in the body material. A gate electrode (74) is subsequently defined after which a pair of source/drain zones (60 and 62), each having a main portion (60M or 80M) and a more lightly doped lateral extension (60E or 62E), are formed in the semiconductor body. An anneal is performed during or subsequent to introduction of semiconductor dopant that defines the source/drain zones. The body material is typically provided with at least one more heavily doped halo pocket portion (100 and 102) along the source/drain zones. The vertical dopant profile resulting from the body-material dopants alleviates punchthrough and reduces current leakage.Type: GrantFiled: October 27, 2009Date of Patent: March 6, 2012Assignee: National Semiconductor CorporationInventors: Constantin Bulucea, Fu-Cheng Wang, Prasad Chaparala
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Patent number: 8125031Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.Type: GrantFiled: May 4, 2011Date of Patent: February 28, 2012Assignee: MACRONIX International Co., Ltd.Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
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Patent number: 8110868Abstract: A semiconductor component having a semiconductor body is disclosed. In one embodiment, the semiconductor component includes a drift zone of a first conductivity type, a drift control zone composed of a semiconductor material which is arranged adjacent to the drift zone at least in places, a dielectric which is arranged between the drift zone and the drift control zone at least in places. A quotient of the net dopant charge of the drift control zone, in an area adjacent to the accumulation dielectric and the drift zone, divided by the area of the dielectric arranged between the drift control zone and the drift zone is less than the breakdown charge of the semiconductor material in the drift control zone.Type: GrantFiled: May 17, 2006Date of Patent: February 7, 2012Assignee: Infineon Technologies Austria AGInventors: Frank Dieter Pfirsch, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier
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Patent number: 8106454Abstract: A vertical power semiconductor device includes a first semiconductor layer of a first conductivity type formed in both a cell section and a termination section, the termination section surrounding the cell section, a second semiconductor layer of a second conductivity type formed on the first semiconductor layer in the cell section, a third semiconductor layer of the first conductivity type formed in part on the second semiconductor layer, and a guard ring layer of the second conductivity type formed on the first semiconductor layer in the termination section. Net impurity concentration in the guard ring layer is generally sloped so as to be relatively high on its lower side and relatively low on its upper side. Alternatively, the net impurity concentration in the guard ring layer is constant.Type: GrantFiled: November 6, 2008Date of Patent: January 31, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Miwako Akiyama, Yusuke Kawaguchi, Yoshihiro Yamaguchi
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Patent number: 8076695Abstract: A semiconductor device comprises a semiconductor substrate having a first semiconductor region of a first semiconductor type, a second semiconductor region of a second conductivity type extended in the first semiconductor region, and a mesa area forming a slope along an outer circumference of the semiconductor substrate; a first electrode provided on a first principal surface of the semiconductor substrate; and a second electrode provided on a second principal surface of the semiconductor substrate that is opposed to the first principal surface; wherein the second semiconductor region comprises a main region provided in the semiconductor substrate while being brought into contact with the first electrode, the main region including an annular portion and diffused portions arranged in a spread manner in an area surrounded by the annular portion; and wherein a portion of the first semiconductor region is interposed between the diffused portions and between the diffused portions and the annular portion; and the dType: GrantFiled: September 30, 2009Date of Patent: December 13, 2011Assignee: Panasonic CorporationInventor: Kenichi Nishimura
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Patent number: 8039898Abstract: An embodiment of a process for manufacturing a semiconductor power device envisages the steps of: providing a body made of semiconductor material having a first top surface; forming an active region with a first type of conductivity in the proximity of the first top surface and inside an active portion of the body; and forming an edge-termination structure. The edge-termination structure is formed by: a ring region having the first type of conductivity and a first doping level, set within a peripheral edge portion of the body and electrically coupled to the active region; and a guard region, having the first type of conductivity and a second doping level, higher than the first doping level, set in the proximity of the first top surface and connecting the active region to the ring region.Type: GrantFiled: June 28, 2007Date of Patent: October 18, 2011Assignee: STMicroelectronics, S.r.l.Inventors: Mario Giuseppe Saggio, Domenico Murabito, Ferruccio Frisina
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Publication number: 20110233728Abstract: A method for producing a semiconductor component is proposed. The method includes providing a semiconductor body having a first surface; forming a mask on the first surface, wherein the mask has openings for defining respective positions of trenches; producing the trenches in the semiconductor body using the mask, wherein mesa structures remain between adjacent trenches; introducing a first dopant of a first conduction type using the mask into the bottoms of the trenches; carrying out a first thermal step; introducing a second dopant of a second conduction type, which is complementary to the first conduction type, at least into the bottoms of the trenches; and carrying out a second thermal step.Type: ApplicationFiled: June 8, 2011Publication date: September 29, 2011Applicant: Infineon Technologies Austria AGInventors: Davide CHIOLA, Carsten SCHAEFFER
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Patent number: 8026160Abstract: In a semiconductor device using a SiC substrate, a Junction Termination Edge (JTE) layer is hardly affected by fixed charge so that a stable dielectric strength is obtained. A semiconductor device according to a first aspect of the present invention includes a SiC epi-layer having n type conductivity, an impurity region in a surface of the SiC epi-layer and having p type conductivity, and JTE layers adjacent to the impurity region, having p type conductivity, and having a lower impurity concentration than the impurity region. The JTE layers are spaced by a distance from an upper surface of the SiC epi-layer, and SiC regions having n type conductivity are present on the JTE layers.Type: GrantFiled: May 9, 2006Date of Patent: September 27, 2011Assignee: Mitsubishi Electric CorporationInventors: Yoichiro Tarui, Ken-ichi Ohtsuka, Masayuki Imaizumi
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Patent number: 8017486Abstract: A lateral-double diffused MOS device is provided. The device includes: a first well having a first conductive type and a second well having a second conductive type disposed in a substrate and adjacent to each other; a drain and a source regions having the first conductive type disposed in the first and the second wells, respectively; a field oxide layer (FOX) disposed on the first well between the source and the drain regions; a gate conductive layer disposed over the second well between the source and the drain regions extending to the FOX; a gate dielectric layer between the substrate and the gate conductive layer; a doped region having the first conductive type in the first well below a portion of the gate conductive layer and the FOX connecting to the drain region. A channel region is defined in the second well between the doped region and the source region.Type: GrantFiled: June 22, 2007Date of Patent: September 13, 2011Assignee: MACRONIX International Co., Ltd.Inventors: Hsueh-I Huang, Chien-Wen Chu, Cheng-Chi Lin, Shih-Chin Lien, Chin-Pen Yeh, Shyi-Yuan Wu
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Publication number: 20110204469Abstract: A semiconductor device is provided with a peripheral region that has a narrow width and exhibits good electric field relaxation and high robustness against induced charges. The device has an active region for main current flow and a peripheral region surrounding the active region on a principal surface of a semiconductor substrate of a first conductivity type. The peripheral region has a guard ring of a second conductivity type composed of straight sections and curved sections connecting the straight sections formed in a region of the principal surface surrounding the active region, and a pair of polysilicon field plates in a ring shape formed separately on inner and outer circumferential sides of the guard ring. The surface of the guard ring and the pair of polysilicon field plates of the inner circumferential side and the outer circumferential side are electrically connected with a metal film in the curved section.Type: ApplicationFiled: February 2, 2011Publication date: August 25, 2011Applicant: C/O FUJI ELECTRIC SYSTEMS CO., LTD.Inventor: Yasuhiko ONISHI
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Patent number: 7999324Abstract: A semiconductor device includes first, second, third, and fourth semiconductor regions, a gate electrode, and silicide layers. The first, second, and third semiconductor regions are formed in a semiconductor substrate while being spaced part from each other. The fourth semiconductor region is formed in the semiconductor substrate between the second semiconductor region and the third semiconductor region and has an electric resistance higher than the first, second, and third semiconductor regions. In a direction perpendicular to a direction to connect the first and second semiconductor regions, the fourth semiconductor region has a width smaller than that of the semiconductor substrate sandwiched between the first semiconductor region and the second semiconductor region. The gate electrode is formed above the semiconductor substrate between the first semiconductor region and the second semiconductor region.Type: GrantFiled: November 30, 2005Date of Patent: August 16, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Naoyuki Shigyo, Kentaro Watanabe
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Patent number: 7994040Abstract: A method for forming a semiconductor device is disclosed. A substrate including a gate dielectric layer and a gate electrode layer sequentially formed thereon is provided. An offset spacer is formed on sidewalls of the gate dielectric layer and the gate electrode layer. A carbon spacer is formed on a sidewall of the offset spacer, and the carbon spacer is then removed. The substrate is implanted to form a lightly doped region using the gate electrode layer and the offset spacer as a mask. The method may also include providing a substrate having a gate dielectric layer and a gate electrode layer sequentially formed thereon. A liner layer is formed on sidewalls of the gate electrode layer and on the substrate. A carbon spacer is formed on a portion of the liner layer adjacent the sidewall of the gate electrode layer. A main spacer is formed on a sidewall of the carbon spacer. The carbon spacer is removed to form an opening between the liner layer and the main spacer.Type: GrantFiled: April 13, 2007Date of Patent: August 9, 2011Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Min-Hwa Chi, Wen-Chuan Chiang, Mu-Chi Chiang, Chang-Ku Chen
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Patent number: 7989889Abstract: The present invention relates to integration of a lateral high-voltage metal oxide semiconductor field effect transistor (LHV-MOSFET) with other circuitry on a semiconductor wafer, which may be fabricated using low-voltage foundry technology, such as a low-voltage complementary metal oxide semiconductor (LV-CMOS) process. The other circuitry may include low-voltage devices, such as switching transistors used in logic circuits, computer circuitry, and the like, or other high-voltage devices, such as a microelectromechanical system (MEMS) switch. The source to drain voltage capability of the LHV-MOSFET may be increased by using an intrinsic material between the source and the drain. The gate voltage capability of the LHV-MOSFET may be increased by using an insulator material, such as a thick oxide, between the gate and the channel of the LHV-MOSFET.Type: GrantFiled: June 17, 2008Date of Patent: August 2, 2011Assignee: RF Micro Devices, Inc.Inventors: Daniel Charles Kerr, David C. Dening, Julio Costa
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Publication number: 20110180842Abstract: An integrated circuit containing an SCRMOS transistor. The SCRMOS transistor has one drain structure with a centralized drain diffused region and distributed SCR terminals, and a second drain structure with distributed drain diffused regions and SCR terminals. An MOS gate between the centralized drain diffused region and a source diffused region is shorted to the source diffused region. A process of forming the integrated circuit having the SCRMOS transistor is also disclosed.Type: ApplicationFiled: January 27, 2010Publication date: July 28, 2011Applicant: TEXAS INSTRUMENTS INCORPORATEDInventor: Sameer P. PENDHARKAR
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Patent number: 7982263Abstract: In a high frequency amplifying MOSFET having a drain offset region, the size is reduced and the on-resistance is decreased by providing conductor plugs 13 (P1) for leading out electrodes on a source region 10, a drain region 9 and leach-through layers 3 (4), to which a first layer wirings 11a, 11d (M1) are connected and, further, backing second layer wirings 12a to 12d are connected on the conductor plugs 13 (P1) to the first layer wirings 11s, 11d (M1).Type: GrantFiled: October 30, 2009Date of Patent: July 19, 2011Assignee: Renesas Electronics CorporationInventors: Yutaka Hoshino, Shuji Ikeda, Isao Yoshida, Shiro Kamohara, Megumi Kawakami, Tomoyuki Miyake, Masatoshi Morikawa
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Patent number: 7977743Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.Type: GrantFiled: February 25, 2009Date of Patent: July 12, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
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Patent number: 7977762Abstract: An integrated circuit (IC) is disclosed to include a central area of the IC that is partitioned into a first section containing at least one digital circuit and a second section containing at least one analog circuit; and a guard strip (or shield) that is within the central area and that is positioned within between the digital circuit and the analog circuit. The shield or guard strip comprises of n-well and p-tap regions that separate digital and analog circuits.Type: GrantFiled: December 9, 2008Date of Patent: July 12, 2011Assignee: Alvand Technologies, Inc.Inventors: Mansour Keramat, Mehrdad Heshami, Syed S. Islam
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Publication number: 20110156169Abstract: A semiconductor apparatus comprises a semiconductor substrate; a group of PMOS transistors formed on a predetermined portion of the semiconductor substrate; a group of NMOS transistors disposed adjacent to the group of PMOS transistors on the semiconductor substrate; a guard ring region formed between the group of PMOS transistors and the group of NMOS transistors; and a current detouring unit formed in the guard ring region and configured to discharge current produced by plasma ions towards the semiconductor substrate.Type: ApplicationFiled: July 26, 2010Publication date: June 30, 2011Applicant: Hynix Semiconductor Inc.Inventors: Won John CHOI, Nam Gyu Ryu
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Patent number: 7968936Abstract: Fashioning a quasi-vertical gated NPN-PNP (QVGNP) electrostatic discharge (ESD) protection device is disclosed. The QVGNP ESD protection device has a well having one conductivity type formed adjacent to a deep well having another conductivity type. The device has a desired holding voltage and a substantially homogenous current flow, and is thus highly robust. The device can be fashioned in a cost effective manner by being formed during a BiCMOS or Smart Power fabrication process.Type: GrantFiled: December 31, 2007Date of Patent: June 28, 2011Assignee: Texas Instruments IncorporatedInventors: Marie Denison, Pinghai Hao
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Patent number: 7947569Abstract: A method for producing a semiconductor including a material layer. In one embodiment a trench is produced having two opposite sidewalls and a bottom, in a semiconductor body. A foreign material layer is produced on a first one of the two sidewalls of the trench. The trench is filled by epitaxially depositing a semiconductor material onto the second one of the two sidewalls and the bottom of the trench.Type: GrantFiled: June 30, 2008Date of Patent: May 24, 2011Assignee: Infineon Technologies Austria AGInventors: Anton Mauder, Frank Pfirsch, Rudolf Berger, Stefan Sedlmaier, Wolfgang Lehnert, Raimund Foerg
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Publication number: 20110101486Abstract: A bipolar transistor comprising an emitter region, a base region and a collector region, and a guard region spaced from and surrounding the base. The guard region can be formed in the same steps that form the base, and can serve to spread out the depletion layer in operation.Type: ApplicationFiled: November 2, 2009Publication date: May 5, 2011Applicant: Analog Devices, Inc.Inventors: William Allan Lane, Andrew David Bain, Derek Frederick Bowers, Paul Malachy Daly, Anne Maria Deignan, Michael Thomas Dunbar, Patrick Martin McGuiness, Bernard Patrick Stenson
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Patent number: 7906776Abstract: Circuits for processing radio frequency (“RF”) and microwave signals are fabricated using field effect transistors (“FETs”) that have one or more strained channel layers disposed on one or more planarized substrate layers. FETs having such a configuration exhibit improved values for, for example, transconductance and noise figure. RF circuits such as, for example, voltage controlled oscillators (“VCOs”), low noise amplifiers (“LNAs”), and phase locked loops (“PLLs”) built using these FETs also exhibit enhanced performance.Type: GrantFiled: April 26, 2010Date of Patent: March 15, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Glyn Braithwaite, Richard Hammond, Matthew Currie