Surface Layout Of Device (epo) Patents (Class 257/E29.026)
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Patent number: 12211910Abstract: Bipolar junction transistor (BJT) structures are provided. A BJT structure includes a semiconductor substrate, a collector region formed in the semiconductor substrate, a base region formed over the collector region, an emitter region formed over the collector region, a ring-shaped shallow trench isolation (STI) region formed in the collector region, and a base dielectric layer formed over the collector region and on opposite sides of the base region. The base dielectric layer is surrounded by an inner side wall of the ring-shaped STI region.Type: GrantFiled: August 30, 2021Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuan-Jung Chen, Chun-Ming Lin, Tsung-Lin Lee, Shiuan-Jeng Lin, Hung-Lin Chen
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Patent number: 11869957Abstract: A compound semiconductor device comprises a heterojunction bipolar transistor including a plurality of unit transistors, a capacitor electrically connected between a RF input wire and a base wire for each unit transistor of the unit transistors, and a bump electrically connected to emitters of the unit transistors. The unit transistors are arranged in a first direction. The bump is disposed above the emitters of the unit transistors while extending in the first direction. The transistors include first and second unit transistors, the respective emitters of the first and second unit transistors being disposed on first and second sides, respectively, of a second direction, perpendicular to the first direction, with respect to a center line of the bump extending in the first direction. The capacitor is not covered by the bump, and respective lengths of the respective base wires connected respectively to the first and second unit transistors are different.Type: GrantFiled: August 10, 2021Date of Patent: January 9, 2024Assignee: Murata Manufacturing Co., Ltd.Inventors: Kenji Sasaki, Kingo Kurotani, Takashi Kitahara, Shigeki Koya
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Patent number: 11688737Abstract: Integrated circuit devices including standard cells are provided. The standard cells may include a first vertical field effect transistor (VFET) including a first channel region and having a first conductivity type and a second VFET including a second channel region and having a second conductivity type that is different from the first conductivity type. Each of the first channel region and the second channel region may extend longitudinally in a first horizontal direction, and the first channel region may be spaced apart from the second channel region in a second horizontal direction that is perpendicular to the first horizontal direction.Type: GrantFiled: August 13, 2020Date of Patent: June 27, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Jung Ho Do, Seung Hyun Song
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Patent number: 11424360Abstract: A semiconductor device includes a substrate, a dielectric layer, a source region, a drain region, and a metal structure. The substrate has a trench therein, and the dielectric layer is conformally formed over the substrate and the trench. The source region and the least one drain region are in the substrate. The metal structure is filled in the trench and surrounded by the dielectric layer, and the metal structure is disposed between the source region and the drain region. Moreover, the metal structure has a first metal portion and a second metal portion which has a height greater than a height of the first metal portion, and the first metal portion is disposed between the drain region and the second metal portion.Type: GrantFiled: February 4, 2021Date of Patent: August 23, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventors: Yu-Ping Chen, Jhen-Yu Tsai
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Patent number: 8964441Abstract: A semiconductor memory device includes a plurality of first regions formed in a line-type and extending in a first direction, and a plurality of second regions and a plurality of third regions arranged between adjacent first regions in a zigzag manner.Type: GrantFiled: February 7, 2014Date of Patent: February 24, 2015Assignee: SK Hynix, Inc.Inventors: Seon Kwang Jeon, Sung Soo Ryu, Chang il Kim
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Patent number: 8907405Abstract: Semiconductor structures with dual trench regions and methods of manufacturing the semiconductor structures are provided herein. The method includes forming a gate structure on an active region and high-k dielectric material formed in one or more trenches adjacent to the active region. The method further includes forming a sacrificial material over the active region and portions of the high-k dielectric material adjacent sidewalls of the active region. The method further includes removing unprotected portions of the high-k dielectric material, leaving behind a liner of high-k dielectric material on the sidewalls of the active region. The method further includes removing the sacrificial material and forming a raised source and drain region adjacent to sidewalls of the gate structure.Type: GrantFiled: April 18, 2011Date of Patent: December 9, 2014Assignee: International Business Machines CorporationInventors: Reinaldo A. Vega, Hongwen Yan
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Patent number: 8847298Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: GrantFiled: December 13, 2013Date of Patent: September 30, 2014Assignee: Micron Technology, Inc.Inventor: Patrick Thomas
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Patent number: 8823113Abstract: A four transistor layout can include an isolation region that defines an active region, the active region extending along first and second different directions. A common source region of the four transistors extends from a center of the active region along both the first and second directions to define four quadrants of the active region that are outside the common source region. Four drain regions are provided, a respective one of which is in a respective one of the four quadrants and spaced apart from the common source region. Finally, four gate electrodes are provided, a respective one of which is in a respective one of the four quadrants between the common source region and a respective one of the four drain regions. A respective gate electrode includes a vertex and first and second extending portions, the first extending portions extending from the vertex along the first direction and the second extending portions extending from the vertex along the second direction.Type: GrantFiled: January 5, 2011Date of Patent: September 2, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Kyo-Suk Chae, Satoru Yamada, Sang-Yeon Han, Young-Jin Choi, Wook-Je Kim
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Patent number: 8772838Abstract: A semiconductor layout structure includes multiple active blocks which are disposed on a substrate, parallel with one another and extending along a first direction, multiple first shallow trench isolations which are disposed on a substrate, parallel with one another and respectively disposed on the multiple active blocks, and multiple second shallow trench isolations which are disposed on a substrate, cutting through multiple active blocks and extending along a second direction. The first direction has an angle about 1 degree to about 53 degrees to the second direction.Type: GrantFiled: March 15, 2013Date of Patent: July 8, 2014Assignee: Inotera Memories, Inc.Inventors: Tzung-Han Lee, Chung-Yuan Lee
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Patent number: 8759912Abstract: A high-voltage transistor device comprises a spiral resistive field plate over a first well region between a drain region and a source region of the high-voltage transistor device, wherein the spiral resistive field plate is separated from the first well region by a first isolation layer, and is coupled between the drain region and the source region. The high-voltage transistor device further comprises a plurality of first field plates over the spiral resistive field plate with each first field plate covering one or more segments of the spiral resistive field plate, wherein the plurality of first field plates are isolated from the spiral resistive field plate by a first dielectric layer, and wherein the plurality of first field plates are isolated from each other, and a starting first field plate is connected to the source region.Type: GrantFiled: August 1, 2011Date of Patent: June 24, 2014Assignee: Monolithic Power Systems, Inc.Inventors: Donald R. Disney, Ognjen Milic, Kun Yi
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Patent number: 8728892Abstract: A method of designing a standard cell includes determining a minimum fin pitch of semiconductor fins in the standard cell, wherein the semiconductor fins are portions of FinFETs; and determining a minimum metal pitch of metal lines in a bottom metal layer over the standard cell, wherein the minimum metal pitch is greater than the minimum fin pitch. The standard cell is placed in an integrated circuit and implemented on a semiconductor wafer.Type: GrantFiled: May 5, 2011Date of Patent: May 20, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tsong-Hua Ou, Shu-Min Chen, Pin-Dai Sue, Li-Chun Tien, Ru-Gun Liu
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Patent number: 8697506Abstract: A method of manufacturing a heterostructure device is provided that includes implantation of ions into a portion of a surface of a multi-layer structure. Iodine ions are implanted between a first region and a second region to form a third region. A charge is depleted from the two dimensional electron gas (2DEG) channel in the third region to form a reversibly electrically non-conductive pathway from the first region to the second region. On applying a voltage potential to a gate electrode proximate to the third region allows electrical current to flow from the first region to the second region.Type: GrantFiled: March 13, 2012Date of Patent: April 15, 2014Assignee: General Electric CompanyInventors: Vinayak Tilak, Alexei Vertiatchikh, Kevin Sean Matocha, Peter Micah Sandvik, Siddharth Rajan
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Patent number: 8680649Abstract: A multi-layer capacitor of staggered construction is formed of one or more layers having tapered sidewall(s). The edge(s) of the capacitor film(s) can be etched to have a gentle slope, which can improve adhesion of the overlying layers and provide more uniform film thickness. The multi-layer capacitor can be used in various applications such as filtering and decoupling.Type: GrantFiled: August 22, 2008Date of Patent: March 25, 2014Assignee: STMicroelectronics (Tours) SASInventor: Guillaume Guégan
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Patent number: 8664727Abstract: Provided is a semiconductor integrated circuit device capable of realizing an analog circuit required to have a high-precision relative ratio between adjacent transistors, which is reduced in size and cost. A single MOS transistor is provided within each of well regions. A plurality of the MOS transistors is combined to serve as an analog circuit block. Since distances between the well regions and channel regions may be made equal to one another, a high-precision semiconductor integrated circuit device can be obtained.Type: GrantFiled: November 5, 2009Date of Patent: March 4, 2014Assignee: Seiko Instruments Inc.Inventor: Hirofumi Harada
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Patent number: 8637912Abstract: A semiconductor device includes a substrate having a primary side. A first pillar extends vertically with respect to the primary side of the substrate, the first pillar defining first and second conductive regions and a channel region that is provided between the first and second conductive regions. A first gate is provided over the channel region of the first pillar. A buried word line extends along a first direction below the first pillar, the buried word line configured to provide a first control signal to the first gate. A first interposer is coupled with the buried word line and the first gate to enable the first control signal to be applied to the first gate via the buried word line.Type: GrantFiled: July 9, 2012Date of Patent: January 28, 2014Assignee: SK Hynix Inc.Inventor: Jinchul Park
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Patent number: 8629533Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: GrantFiled: November 6, 2012Date of Patent: January 14, 2014Assignee: Micron Technology, Inc.Inventor: Patrick Thomas
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Patent number: 8618608Abstract: A lateral silicon controlled rectifier structure includes a P-type substrate; an N-well region in the P-type substrate; a first P+ doped region in the N-well region and being connected to an anode; a P-well region in the P-type substrate and bordering upon the N-well region; a first N+ doped region formed in the P-well region and separated from the first P+ doped region by a spacing distance, the first N+ doped region being connected to a cathode; and a gate structure overlying a portion of the P-type substrate between the first P+ doped region and the first N+ doped region.Type: GrantFiled: December 31, 2008Date of Patent: December 31, 2013Assignee: United Microelectronics Corp.Inventors: Ta-Cheng Lin, Te-Chang Wu
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Patent number: 8471320Abstract: A memory array layout includes an active region array having a plurality of active regions, wherein the active regions are arranged alternatively along a second direction and parts of the side of the adjacent active regions are overlapped along a second direction; a plurality of first doped region, wherein each first doped region is disposed in a middle region; a plurality of second doped region, wherein each second doped region is disposed in a distal end region respectively; a plurality of recessed gate structures; a plurality of word lines electrically connected to each recessed gate structure respectively; a plurality of digit lines electrically connected to the first doped region respectively; and a plurality of capacitors electrically connected to each second doped region respectively.Type: GrantFiled: January 4, 2012Date of Patent: June 25, 2013Assignee: Inotera Memories, Inc.Inventors: Tzung-Han Lee, Chung-Lin Huang, Ron Fu Chu
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Patent number: 8330246Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: GrantFiled: September 7, 2011Date of Patent: December 11, 2012Assignee: Micron Technology, Inc.Inventor: Patrick Thomas
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Publication number: 20120273794Abstract: According to one embodiment, a semiconductor light emitting device includes a first semiconductor layer, an active layer, and a second semiconductor layer. The first layer has a first upper surface and a first side surface. The active layer has a first portion covering the first upper surface and having a second upper surface, and a second portion covering the first side surface and having a second side surface. The second layer has a third portion covering the second upper surface, and a fourth portion covering the second side surface. The first and second layers include a nitride semiconductor. The first portion along a stacking direction has a thickness thicker than the second portion along a direction from the first side surface toward the second side surface. The third portion along the stacking direction has a thickness thicker than the fourth portion along the direction.Type: ApplicationFiled: February 28, 2012Publication date: November 1, 2012Applicant: Kabushiki Kaisha ToshibaInventors: Shinji SAITO, Shinya Nunoue, Rei Hashimoto
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Publication number: 20120187546Abstract: A method and structure for transferring a lithographic pattern into a substrate includes forming a dielectric hardmask layer over a dielectric substrate. A metal hardmask layer is formed over the dielectric hardmask layer. A protective capping hardmask layer or capping film is formed over the metal hardmask layer, and a lithographic structure for pattern transfer is formed over the capping layer. A pattern is transferred into the dielectric substrate using the defined lithographic structure. The capping hardmask layer can be removed during subsequent processing.Type: ApplicationFiled: January 24, 2011Publication date: July 26, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Hakeem B.S. Akinmade-Yusuff, Samuel Sung Shik Choi, Edward R. Engbrecht, John A. Fitzsimmons
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Publication number: 20120175749Abstract: A structure comprises first and at least second fin structures are formed. Each of the first and at least second fin structures has a vertically oriented semiconductor body. The vertically oriented semiconductor body is comprised of vertical surfaces. A doped region in each of the first and at least second fin structures is comprised of a concentration of dopant ions present in the semiconductor body to form a first resistor and at least a second resistor, and a pair of merged fins formed on outer portions of the doped regions of the first and at least second fin structures. The pair of merged fins is electrically connected so that the first and at least second resistors are electrically connected in parallel with each other.Type: ApplicationFiled: January 6, 2011Publication date: July 12, 2012Applicant: International Business Machines CorporationInventors: Wilfried E. Haensch, Pranita Kulkarni, Tenko Yamashita
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Publication number: 20120068260Abstract: A semiconductor component includes a semiconductor body having a surface and a cutout in the semiconductor body. The cutout extends from the surface of the semiconductor body into the semiconductor body in a direction perpendicular to the surface. The cutout has a base and at least one sidewall. The component further includes a layer on the surface of the semiconductor body and in the cutout. The layer forms a well above the cutout. The well has a well base, a well edge and at least one well sidewall. The at least one well sidewall forms an angle ? in the range of 20° to 80° with respect to the surface of the semiconductor body. The layer has at least one edge which, proceeding from the well edge, extends in the direction of the surface of the semiconductor body.Type: ApplicationFiled: September 19, 2011Publication date: March 22, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventor: Martin Poelzl
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Publication number: 20120061793Abstract: A parasitic PNP bipolar transistor, wherein a base region includes a first and a second region; the first region is formed in an active area, has a depth larger than shallow trench field oxides, and has its bottom laterally extended into the bottom of the shallow trench field oxides on both sides of an active area; the second region is formed in an upper part of the first region and has a higher doping concentration; an N-type and a P-type pseudo buried layer is respectively formed at the bottom of the shallow trench field oxides; a deep hole contact is formed on top of the N-type pseudo buried layer to pick up the base; the P-type pseudo buried layer forms a collector region separated from the active area by a lateral distance; an emitter region is formed by a P-type SiGe epitaxial layer formed on top of the active area.Type: ApplicationFiled: September 8, 2011Publication date: March 15, 2012Inventors: Donghua Liu, Wensheng Qian
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Publication number: 20120043648Abstract: In order to solve the above problem, provided is an electronic component having an authentication pattern formed on an exposed surface, in which the authentication pattern includes a base section including a resin and colored particles having a hue that can be identified in the base section, and the colored particles are dispersed so as to form dotted pattern in the base section.Type: ApplicationFiled: August 1, 2011Publication date: February 23, 2012Applicant: Renesas Electronics CorporationInventors: Yasuhiro MATSUMARU, Kenta OGAWA
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Patent number: 8110462Abstract: The present invention relates to electrostatic discharge (ESD) protection circuitry. Multiple techniques are presented to adjust one or more ends of one or more fingers of an ESD protection device so that the ends of the fingers have a reduced initial trigger or breakdown voltage as compared to other portions of the fingers, and in particular to central portions of the fingers. In this manner, most, if not all, of the adjusted ends of the fingers are likely to trigger or fire before any of the respective fingers completely enters a snapback region and begins to conduct ESD current. Consequently, the ESD current is more likely to be distributed among all or substantially all of the plurality of fingers rather than be concentrated within one or merely a few fingers. As a result, potential harm to the ESD protection device (e.g., from current crowding) is mitigated and the effectiveness of the device is improved.Type: GrantFiled: February 16, 2006Date of Patent: February 7, 2012Assignee: Texas Instruments IncorporatedInventor: Robert Michael Steinhoff
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Publication number: 20110316125Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: ApplicationFiled: September 7, 2011Publication date: December 29, 2011Applicant: Micron Technology, Inc.Inventor: Patrick Thomas
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Publication number: 20110304028Abstract: A semiconductor device which forms a barrier layer formed of a doped polysilicon layer on a buried bit line to prevent the bit line conductive layer from being exposed during the etching process for forming a buried word line, thereby improving characteristics of the device, and a method of manufacturing the same, are provided. The semiconductor device includes a first pillar pattern and a second pillar pattern, including sidewall contacts, and a buried bit line including a bit line conductive layer disposed over a lower part of a trench between the first pillar pattern and the second pillar pattern, and a barrier layer stacked over the bit line conductive layer.Type: ApplicationFiled: December 30, 2010Publication date: December 15, 2011Applicant: Hynix Semiconductor Inc.Inventor: Seung Hwan KIM
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Publication number: 20110291244Abstract: A semiconductor device includes a wiring substrate having an insulating film formed on a surface thereof, a first semiconductor chip mounted on the wiring substrate, and a second semiconductor chip stacked and mounted on the first semiconductor chip so as to form an overhang portion. The insulating film is removed from an area of the wiring substrate that faces the overhang portion.Type: ApplicationFiled: June 1, 2011Publication date: December 1, 2011Inventor: Hidehiro TAKESHIMA
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Publication number: 20110272788Abstract: A stacked 3D integrated circuit structure is manufactured with a common image design for dies which allows diced master dies to cut from the common wafer and diced slave dies cut to be cut from a wafer which has the common image design. In an embodiment is stacked to form a wafer-to-wafer 3D stack before dicing. Master and slave elements which are used for only one kind of separated individual integrated circuit dies which are located along die edges and at die centers before dicing separation of individual integrated circuit chips. A master wafer is shifted ½ way across a die to make cutting along a kerf line effective to provide both master and slave dies. Multiple slaves can be stacked and coupled to a master die which acts as a bus master when attached to a bus to which only the master die is directly connected. The use of a common wafer design minimizes cost of manufacture of chips destined to be stacked as 3D integrated circuits.Type: ApplicationFiled: May 10, 2010Publication date: November 10, 2011Applicant: International Business Machines CorporationInventors: Kyu-hyoun Kim, Paul Coteus
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Patent number: 8026579Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: GrantFiled: May 19, 2010Date of Patent: September 27, 2011Assignee: Micron Technology, Inc.Inventor: Patrick Thomas
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Publication number: 20110186968Abstract: A semiconductor device may include, but is not limited to, a semiconductor substrate having a device isolation groove defining first to fourth device formation portions. The second device formation portion is separated from the first device formation portion. The third device formation portion extends from the first device formation portion. The third device formation portion is separated from the second device formation portion. The fourth device formation portion extends from the second device formation portion. The fourth device formation portion is separated from the first and third device formation portions. The third and fourth device formation portions are positioned between the first and second device formation portions.Type: ApplicationFiled: January 24, 2011Publication date: August 4, 2011Applicant: ELPIDA MEMORY, INC.Inventor: Takeshi KISHIDA
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Publication number: 20110169030Abstract: The surface morphology of an LED light emitting surface is changed by applying a reactive ion etch (RIE) process to the light emitting surface. High aspect ratio, submicron roughness is formed on the light emitting surface by transferring a thin film metal hard-mask having submicron patterns to the surface prior to applying a reactive ion etch process. The submicron patterns in the metal hard-mask can be formed using a low cost, commercially available nano-patterned template which is transferred to the surface with the mask. After subsequently binding the mask to the surface, the template is removed and the RIE process is applied for time duration sufficient to change the morphology of the surface. The modified surface contains non-symmetric, submicron structures having high aspect ratio which increase the efficiency of the device.Type: ApplicationFiled: March 10, 2011Publication date: July 14, 2011Inventor: Ting Li
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Patent number: 7968972Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.Type: GrantFiled: March 3, 2010Date of Patent: June 28, 2011Assignee: Infineon Technologies AGInventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schäfer
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Publication number: 20110127650Abstract: A method is disclosed for manufacturing a semiconductor device, including providing a substrate comprising a main surface with a non flat topography, the surface comprising at least one substantial topography variation, forming a first capping layer over the main surface such that, during formation of the first capping layer, local defects in the first capping layer are introduced, the local defects being positioned at locations corresponding to the substantial topography variations and the local defects being suitable for allowing a predetermined fluid to pass through. Associated membrane layers, capping layers, and microelectronic devices are also disclosed.Type: ApplicationFiled: November 29, 2010Publication date: June 2, 2011Applicants: IMEC, KATHOLIEKE UNIVERSITEIT LEUVEN, K.U. LEUVEN R&DInventors: Ann Witvrouw, Luc Haspeslagh, Bin Guo, Simone Severi, Gert Claes
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Publication number: 20110018133Abstract: A via connecting the front surface of a semiconductor substrate to its rear surface, this via having a rough lateral surface.Type: ApplicationFiled: July 20, 2010Publication date: January 27, 2011Inventors: HAMED CHAABOUNI, Lionel Cadix
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Patent number: 7863682Abstract: A semiconductor device having a junction barrier Schottky diode includes: a SiC substrate; a drift layer on the substrate; an insulation film on the drift layer having an opening in a cell region; a Schottky barrier diode having a Schottky electrode contacting the drift layer through the opening of the insulation film and an ohmic electrode on the substrate; a terminal structure having a RESURF layer surrounding the cell region; and multiple second conductive type layers on an inner side of the RESURF layer. The second conductive type layers and the drift layer provide a PN diode. The Schottky electrode includes a first Schottky electrode contacting the second conductive type layers with ohmic contact and a second Schottky electrode contacting the drift layer with Schottky contact.Type: GrantFiled: March 31, 2008Date of Patent: January 4, 2011Assignee: Denso CorporationInventors: Eiichi Okuno, Takeo Yamamoto
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Patent number: 7855419Abstract: An improved layout pattern for electrostatic discharge protection is disclosed. A first heavily doped region of a first type is formed in a well of said first type. A second heavily doped region of a second type is formed in a well of said second type. A battlement layout pattern of said first heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. A battlement layout pattern of said second heavily doped region is formed along the boundary of said first heavily doped region and said second heavily doped region. By adjusting a distance between the battlement layout pattern of a heavily doped region and a edge of well of said second type, i.e. n-well, a first distance will be shorter than what is typically required by the layout rules of internal circuit; and a second distance will be longer than the first distance to ensure that the I/O device have a better ESD protection capability.Type: GrantFiled: June 15, 2006Date of Patent: December 21, 2010Assignee: Himax Technologies LimitedInventor: Tung-Yang Chen
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Patent number: 7838931Abstract: High voltage semiconductor devices with Schottky diodes are presented. A high voltage semiconductor device includes an LDMOS device and a Schottky diode device. The LDMOS device includes a semiconductor substrate, a P-body region in a first region of the substrate, and an N-drift region in the second region of the substrate with a junction therebetween. A patterned isolation region defines an active region. An anode electrode is disposed on the P-body region. An N+-doped region is disposed in the N-drift region. A cathode electrode is disposed on the N+-doped region. The Schottky diode includes an N-drift region on the semiconductor substrate. The anode electrode is disposed on the N-drift region at the first region of the substrate. The N+-doped region is disposed on the N-drift region at the second region of the substrate. The cathode electrode is disposed on the N+-doped region.Type: GrantFiled: April 17, 2009Date of Patent: November 23, 2010Assignee: Vanguard International Semiconductor CorporationInventors: Shang-Hui Tu, Hung-Shern Tsai
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Publication number: 20100270656Abstract: A semiconductor wafer contains a plurality of semiconductor die each having a peripheral area around the die. A first insulating layer is formed over the die. A recessed region with angled sidewall is formed in the peripheral area. A first conductive layer is formed over the first insulating layer outside the recessed region and further into the recessed region. A conductive pillar is formed over the first conductive layer within the recessed region. A second insulating layer is formed over the first insulating layer, conductive pillar, and first conductive layer such that the conductive pillar is exposed from the second insulating layer. A dicing channel partially through the peripheral area. The semiconductor wafer undergoes backgrinding to the dicing channel to singulate the semiconductor wafer and separate the semiconductor die. The semiconductor die can be disposed in a semiconductor package with other components and electrically interconnected through the conductive pillar.Type: ApplicationFiled: July 8, 2010Publication date: October 28, 2010Applicant: STATS CHIPPAC, LTD.Inventors: Byung Tai Do, Reza A. Pagaila, Linda Pei Ee Chua
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Patent number: 7804135Abstract: An integrated semiconductor diode arrangement is provided. The arrangement includes an anode region and a cathode region that are formed in a semiconductor material region. The anode region has an arrangement of alternately occurring and directly adjacent first and second anode zones, which alternate in their conductivity type. The anode region furthermore has a first particular anode zone of the second conductivity type, the lateral extent of which is comparatively larger than that of the further anode zones of the same conductivity type.Type: GrantFiled: January 25, 2005Date of Patent: September 28, 2010Assignee: Infineon Technologies AGInventors: Nils Jensen, Andreas Meiser
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Publication number: 20100224967Abstract: In order to form a more stable silicon pillar which can be used for the formation of vertical transistors in DRAM cells, a multi-step masking process is used. In a preferred embodiment, an oxide layer and a nitride layer are used as masks to define trenches, pillars, and active areas in a substrate. Preferably, two substrate etch processes use the masks to form three levels of bulk silicon.Type: ApplicationFiled: May 19, 2010Publication date: September 9, 2010Applicant: MICRON TECHNOLOGY, INC.Inventor: Patrick Thomas
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Patent number: 7719088Abstract: A high-frequency bipolar transistor includes an emitter contact adjoining an emitter connection region, a base contact adjoining a base connection region, and a collector contact adjoining a collector connection region. A first insulation layer is disposed on the base connection region. The collector connection region contains a buried layer, which connects the collector contact to a collector zone. A silicide or salicide region is provided on the buried layer and connects the collector contact to the collector zone in a low-impedance manner. A second insulation layer is disposed on the collector connection region but not on the silicide region.Type: GrantFiled: October 20, 2005Date of Patent: May 18, 2010Assignee: Infineon Technologies AGInventors: Josef Böck, Thomas Meister, Reinhard Stengl, Herbert Schäfer
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Patent number: 7700935Abstract: A non-volatile memory device and a method of fabricating the same are provided. In the non-volatile memory device, at least one first semiconductor layer of a first conductivity type may be formed spaced apart from each other on a portion of a substrate. A plurality of first resistance variation storage layers may contact first sidewalls of each of the at least one first semiconductor layer. A plurality of second semiconductor layers of a second conductivity type, opposite to the first conductivity type, may be interposed between the first sidewalls of each of the at least one first semiconductor layer and the plurality of first resistance variation storage layers. A plurality of bit line electrodes may be connected to each of the plurality of first resistance variation storage layers.Type: GrantFiled: August 3, 2007Date of Patent: April 20, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Won-joo Kim, Suk-pil Kim, Yoon-dong Park, June-mo Koo
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Patent number: 7692268Abstract: An integrated circuit including a bipolar transistor is disclosed. One embodiment provides an insulation structure used to form a junction insulation, a collector structure formed inside a semiconductor zone having openings dividing the collector structure into collector zones. The collector zones are arranged in such a manner that a shortest lateral distance between an emitter zone and the insulation structure runs at least through one of the collector zones.Type: GrantFiled: July 27, 2007Date of Patent: April 6, 2010Assignee: Infineon Technologies AGInventors: Gerhard Prechtl, Marcel Kreuzberg
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Patent number: 7679166Abstract: Disclosed herein are embodiments of a semiconductor structure and an associated method of forming the semiconductor structure with shallow trench isolation structures having selectively adjusted reflectance and absorption characteristics in order to ensure uniform temperature changes across a wafer during a rapid thermal anneal and, thereby, limit variations in device performance. Also disclosed are embodiments of another semiconductor structure and an associated method of forming the semiconductor structure with devices having selectively adjusted reflectance and absorption characteristics in order to either selectively vary the performance of individual devices (e.g., to form devices with different threshold voltages (Vt) on the same wafer) and/or to selectively optimize the anneal temperature of individual devices (e.g., to ensure optimal activation temperatures for n-type and p-type dopants during anneals).Type: GrantFiled: February 26, 2007Date of Patent: March 16, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 7589361Abstract: In automatic placing and routing, a standard cell 101 is composed of a P-channel transistor region 102 and an N-channel transistor region 103. The P-channel transistor region 102 has a P-channel functional transistor forming region 104, and the N-channel transistor region 103 has an N-channel functional transistor forming region 105. In a space region of the N-channel transistor region 103 other than the N-channel functional transistor forming region 105, a power source capacitor forming region 106 is formed at a portion of the P-channel transistor region 102 opposing the P-channel functional transistor forming region 104. In this region, a power source capacitor is formed to suppress the IR-Drop of a power source wiring line.Type: GrantFiled: September 13, 2005Date of Patent: September 15, 2009Assignee: Panasonic CorporationInventor: Atsushi Takahata
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Patent number: 7473929Abstract: Ion implantation is carried out to form a p-well region and a source region in parts of a high resistance SiC layer on a SiC substrate, and a carbon film is deposited over the substrate. With the carbon film deposited over the substrate, annealing for activating the implanted dopant ions is performed, and then the carbon film is removed. Thus, a smooth surface having hardly any surface roughness caused by the annealing is obtained. Furthermore, if a channel layer is epitaxially grown, the surface roughness of the channel layer is smaller than that of the underlying layer. Since the channel layer having a smooth surface is provided, it is possible to obtain a MISFET with a high current drive capability.Type: GrantFiled: July 1, 2004Date of Patent: January 6, 2009Assignee: Panasonic CorporationInventors: Osamu Kusumoto, Makoto Kitabatake, Masao Uchida, Kunimasa Takahashi, Kenya Yamashita, Masahiro Hagio, Kazuyuki Sawada
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Patent number: 7462917Abstract: According to the present invention, there is provided a semiconductor device having: first and second fins formed on a semiconductor substrate to oppose each other, and made of a semiconductor layer; an active region which is formed on the semiconductor substrate so as to be connected to the first and second fins, and supplies a predetermined voltage to the first and second fins; and a gate electrode formed on an insulating film formed on the semiconductor substrate, in a position separated from the active region by a predetermined spacing, so as to cross the first and second fins, wherein in the active region, a predetermined portion between a first portion connected to the first fin and a second portion connected to the second fin is removed.Type: GrantFiled: April 27, 2006Date of Patent: December 9, 2008Assignee: Kabushiki Kaisha ToshibaInventor: Atsushi Yagishita
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Patent number: 7385254Abstract: A structure of protection of a first area of a semiconductor wafer including a substrate of a first conductivity type against high-frequency noise likely to be injected from components formed in the upper portion of a second area of the wafer, includes a very heavily-doped wall of the first conductivity type having substantially the depth of the upper portion. The wall is divided into three heavily-doped strips of the first conductivity type separated and surrounded by medium-doped intermediary strips of the first conductivity type. The distance between the heavily-doped strips being of the order of magnitude of the substrate thickness.Type: GrantFiled: February 4, 2002Date of Patent: June 10, 2008Assignee: STMicroelectronics S.A.Inventor: Didier Belot