Characterized By Shape, Relative Sizes Or Dispositions Of Semiconductor Regions Or Junctions Between Regions (epo) Patents (Class 257/E29.024)
E Subclasses
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Patent number: 12183808Abstract: A semiconductor device includes a plurality of nanostructures. The nanostructures each contain a semiconductive material. A plurality of first spacers circumferentially wrap around the nanostructures. A plurality of second spacers circumferentially wrap around the first spacers. A plurality of third spacers is disposed between the second spacers vertically. A gate structure surrounds the second spacers and the third spacers.Type: GrantFiled: July 19, 2023Date of Patent: December 31, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Ching, Chih-Hao Wang, Shi Ning Ju, Kuan-Lun Cheng
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Patent number: 11923413Abstract: Semiconductor structures are provided. The semiconductor structure includes a substrate and nanostructures formed over the substrate. The semiconductor structure further includes a gate structure surrounding the nanostructures and a source/drain structure attached to the nanostructures. The semiconductor structure further includes a contact formed over the source/drain structure and extending into the source/drain structure.Type: GrantFiled: February 7, 2022Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon-Jhy Liaw, Chao-Ching Cheng, Hung-Li Chiang, Shih-Syuan Huang, Tzu-Chiang Chen, I-Sheng Chen, Sai-Hooi Yeong
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Patent number: 11764286Abstract: A semiconductor device includes a plurality of nanostructures. The nanostructures each contain a semiconductive material. A plurality of first spacers circumferentially wrap around the nanostructures. A plurality of second spacers circumferentially wrap around the first spacers. A plurality of third spacers is disposed between the second spacers vertically. A gate structure surrounds the second spacers and the third spacers.Type: GrantFiled: July 19, 2021Date of Patent: September 19, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Kuo-Cheng Ching, Chih-Hao Wang, Shi Ning Ju, Kuan-Lun Cheng
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Patent number: 11569170Abstract: A semiconductor device is provided, the semiconductor device comprising a substrate having merged cavities in the substrate. An active region is over the merged cavities in the substrate. A thermally conductive layer is in the merged cavities in the substrate, whereby the thermally conductive layer at least partially fills up the merged cavities in the substrate. A first contact pillar connects the thermally conductive layer in the merged cavities in the substrate with a metallization layer above the active region.Type: GrantFiled: October 7, 2020Date of Patent: January 31, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Siva P. Adusumilli, Mark David Levy, Ramsey Hazbun, Alvin Joseph, Steven Bentley
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Patent number: 9029861Abstract: Thin film transistors having a high current drive capability and a suitable threshold voltage are provided. The thin film transistor includes a gate electrode, an insulating layer formed on the gate electrode, a semiconductor layer formed on the insulating layer, and source/drain electrodes formed on the semiconductor layer. The semiconductor layer includes a plurality of regions separated from each other in a longitudinal direction of the source/drain electrodes.Type: GrantFiled: May 20, 2011Date of Patent: May 12, 2015Assignee: Sharp Kabushiki KaishaInventors: Tetsuo Kikuchi, Yoshiharu Kataoka, Shinya Tanaka, Junya Shimada, Chikao Yamasaki
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Patent number: 8987028Abstract: Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.Type: GrantFiled: June 24, 2014Date of Patent: March 24, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Anthony J. Lochtefeld, Matthew T. Currie, Zhiyuan Cheng, James Fiorenza, Glyn Braithwaite, Thomas A. Langdo
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Patent number: 8927319Abstract: There is disclosed methods of making photosensitive devices, such as flexible photovoltaic (PV) devices, through the use of epitaxial liftoff. Also described herein are methods of preparing flexible PV devices comprising a structure having a growth substrate, wherein the selective etching of protective layers yields a smooth growth substrate that us suitable for reuse.Type: GrantFiled: January 25, 2013Date of Patent: January 6, 2015Assignee: The Regents of the University of MichiganInventors: Stephen R. Forrest, Jeramy Zimmerman, Kyusang Lee, Kuen-Ting Shiu
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Patent number: 8890213Abstract: There is provided a semiconductor wafer including a base wafer that has an impurity region in which an impurity atom has been introduced into silicon, a plurality of seed bodies provided in contact with the impurity region, and a plurality of compound semiconductors each provided in contact with the corresponding seed bodies and lattice-matched or pseudo-lattice-matched to the corresponding seed bodies. The semiconductor wafer can further include an inhibitor provided on the base wafer and in which a plurality of apertures exposing at least a part of the impurity region are provided.Type: GrantFiled: November 21, 2011Date of Patent: November 18, 2014Assignee: Sumitomo Chemical Company, LimitedInventors: Sadanori Yamanaka, Masahiko Hata, Noboru Fukuhara
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Patent number: 8878259Abstract: Segmented semiconductor nanowires are manufactured by removal of material from a layered structure of two or more semiconductor materials in the absence of a template. The removal takes place at some locations on the surface of the layered structure and continues preferentially along the direction of a crystallographic axis, such that nanowires with a segmented structure remain at locations where little or no removal occurs. The interface between different segments can be perpendicular to or at angle with the longitudinal direction of the nanowire.Type: GrantFiled: July 23, 2012Date of Patent: November 4, 2014Assignee: International Business Machines CorporationInventors: Harold J. Hovel, Qiang Huang, Xiaoyan Shao, James Vichiconti, George F. Walker
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Patent number: 8860041Abstract: Disclosed herein is a method for producing nanowires. The method comprises the steps of providing a porous template with a plurality of holes in the form of tubes, filling the tubes with nanoparticles or nanoparticle precursors, and forming the filled nanoparticles or nanoparticle precursors into nanowires. According to the method, highly rectilinear and well-ordered nanowires can be produced in a simple manner.Type: GrantFiled: May 3, 2011Date of Patent: October 14, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Byoung Lyong Choi, Jong Min Kim, Eun Kyung Lee
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Patent number: 8847279Abstract: Lattice-mismatched epitaxial films formed proximate non-crystalline sidewalls. Embodiments of the invention include formation of facets that direct dislocations in the films to the sidewalls.Type: GrantFiled: April 13, 2012Date of Patent: September 30, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jie Bai, Ji-Soo Park, Anthony J. Lochtefeld
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Patent number: 8829485Abstract: Another aspect of the present disclosure relates to a device including a substrate, having a top surface and a bottom surface; an array of nanowires having a base and a top surface, the base contacting the top surface of the substrate; a contacting structure including the same material as the substrate having a non-nanostructured surface of a dimension suitable for forming an electrical contact, located on the same side of the substrate as the array of silicon nanowires; wherein the contacting structure is doped with a greater impurity concentration than the nanowire array, thereby forming a selective emitter.Type: GrantFiled: January 18, 2012Date of Patent: September 9, 2014Assignee: Bandgap Engineering, Inc.Inventors: Faris Modawar, Marcie R. Black, Brian Murphy, Jeff Miller, Mike Jura
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Patent number: 8796734Abstract: Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.Type: GrantFiled: December 12, 2013Date of Patent: August 5, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Anthony J. Lochtefeld, Matthew T. Currie, Zhiyuan Cheng, James Fiorenza, Glyn Braithwaite, Thomas A. Langdo
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Patent number: 8710489Abstract: To provide an epitaxial substrate for electronic devices, in which current flows in a lateral direction, which enables accurate measurement of the sheet resistance of HEMTs without contact, and to provide a method of efficiently producing the epitaxial substrate for electronic devices, the method characteristically includes the steps of forming a barrier layer against impurity diffusion on one surface of a high-resistance Si-single crystal substrate, forming a buffer as an insulating layer on the other surface of the high-resistance Si-single crystal substrate, producing an epitaxial substrate by epitaxially growing a plurality of III-nitride layers on the buffer to form a main laminate, and measuring resistance of the main laminate of the epitaxial substrate without contact.Type: GrantFiled: July 13, 2010Date of Patent: April 29, 2014Assignee: Dowa Electronics Materials Co., Ltd.Inventors: Tetsuya Ikuta, Daisuke Hino, Ryo Sakamoto, Tomohiko Shibata
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Patent number: 8704307Abstract: Disclosed herein is a device for electrostatic discharge protection. According to the present invention, the device for electrostatic discharge protection comprises a semiconductor substrate, a plurality of element isolation films formed in predetermined regions on the semiconductor substrate, a gate formed in a predetermined region on the semiconductor substrate between the element isolation films, a well pick-up region formed in a predetermined region on the semiconductor substrate between the element isolation films, a source formed in a predetermined region on the semiconductor substrate between the element isolation film and the gate, and drains of a triple structure, which are formed in a predetermined region on the semiconductor substrate between the gate and the element isolation film. Furthermore, the gate, the well pick-up region and the source are connected to a ground line, and the drain is connected to a power line. Accordingly, a stable and good ESD protection performance can be implemented.Type: GrantFiled: June 23, 2005Date of Patent: April 22, 2014Assignee: MagnaChip Semiconductor, Ltd.Inventor: Kil Ho Kim
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Publication number: 20140061582Abstract: A mandrel having vertical planar surfaces is formed on a single crystalline semiconductor layer. An epitaxial semiconductor layer is formed on the single crystalline semiconductor layer by selective epitaxy. A first spacer is formed around an upper portion of the mandrel. The epitaxial semiconductor layer is vertically recessed employing the first spacers as an etch mask. A second spacer is formed on sidewalls of the first spacer and vertical portions of the epitaxial semiconductor layer. Horizontal bottom portions of the epitaxial semiconductor layer are etched from underneath the vertical portions of the epitaxial semiconductor layer to form a suspended ring-shaped semiconductor fin that is attached to the mandrel. A center portion of the mandrel is etched employing a patterned mask layer that covers two end portions of the mandrel. A suspended semiconductor fin is provided, which is suspended by a pair of support structures.Type: ApplicationFiled: August 31, 2012Publication date: March 6, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Kangguo Cheng, James J. Demarest, Balasubramanian S. Haran
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Patent number: 8664699Abstract: The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.Type: GrantFiled: March 13, 2013Date of Patent: March 4, 2014Assignee: The Board of Trustees of the University of IllinoisInventors: Ralph G. Nuzzo, John A. Rogers, Etienne Menard, Keon Jae Lee, Dahl-Young Khang, Yugang Sun, Matthew Meitl, Zhengtao Zhu
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Patent number: 8629477Abstract: Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.Type: GrantFiled: May 28, 2013Date of Patent: January 14, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Anthony J. Lochtefeld, Matthew T. Currie, Zhiyuan Cheng, James Fiorenza, Glyn Braithwaite, Thomas A. Langdo
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Patent number: 8569796Abstract: A semiconductor wafer includes a multilayered film having a structure in which nondoped first nitride semiconductor layers and nondoped second nitride semiconductor layers with a larger lattice constant than the first nitride semiconductor layer are laminated alternately, and a nondoped third nitride semiconductor layer which is located on the multilayered film and has a larger lattice constant than the first nitride semiconductor layer, wherein the semiconductor wafer has conductivity in a film-thickness direction.Type: GrantFiled: December 8, 2011Date of Patent: October 29, 2013Assignee: Sanken Electric Co., Ltd.Inventor: Tetsuji Matsuo
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Patent number: 8530884Abstract: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.Type: GrantFiled: June 15, 2011Date of Patent: September 10, 2013Assignee: Intel CorporationInventors: Suman Datta, Jack T. Kavalieros, Been-Yih Jin
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Patent number: 8525151Abstract: Embodiments of an apparatus and methods of providing a quantum well device for improved parallel conduction are generally described herein. Other embodiments may be described and claimed.Type: GrantFiled: July 10, 2012Date of Patent: September 3, 2013Assignee: Intel CorporationInventors: Ravi Pillarisetty, Mantu Hudait, Been-Yih Jin, Benjamin Chu-Kung, Robert Chau
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Patent number: 8519436Abstract: Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.Type: GrantFiled: November 19, 2012Date of Patent: August 27, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Anthony J. Lochtefeld, Matthew T. Currie, Zhiyuan Cheng, James Fiorenza, Glyn Braithwaite, Thomas A. Langdo
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Patent number: 8487355Abstract: A compact semiconductor structure including at least one FET located upon and within a surface of a semiconductor substrate in which the at least one FET includes a long channel length and/or a wide channel width and a method of fabricating the same are provided. In some embodiments, the ordered, nanosized pattern is oriented in a direction that is perpendicular to the current flow. In such an embodiment, the FET has a long channel length. In other embodiments, the ordered, nanosized pattern is oriented in a direction that is parallel to that of the current flow. In such an embodiment, the FET has a wide channel width. In yet another embodiment, one ordered, nanosized pattern is oriented in a direction perpendicular to the current flow, while another ordered, nanosized pattern is oriented in a direction parallel to the current flow. In such an embodiment, a FET having a long channel length and wide channel width is provided.Type: GrantFiled: September 1, 2011Date of Patent: July 16, 2013Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Carl J. Radens, Anthony K. Stamper
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Patent number: 8450813Abstract: There is provided a fin transistor structure and a method of fabricating the same. The fin transistor structure comprises a fin formed on a semiconductor substrate, wherein a bulk semiconductor material is formed between a portion of the fin serving as the channel region of the transistor structure and the substrate, and an insulation material is formed between remaining portions of the fin and the substrate. Thereby, it is possible to reduce the current leakage while maintaining the advantages of body-tied structures.Type: GrantFiled: June 25, 2010Date of Patent: May 28, 2013Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Zhijiong Luo, Haizhou Yin, Huilong Zhu
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Patent number: 8445973Abstract: There is provided a fin transistor structure and a method of fabricating the same. The fin transistor structure comprises a fin formed on a semiconductor substrate, wherein an insulation material is formed between a portion of the fin serving as the channel region of the transistor structure and the substrate, and a bulk semiconductor material is formed between remaining portions of the fin and the substrate. Thereby, it is possible to reduce the current leakage while maintaining the advantages such as low cost and high heat transfer.Type: GrantFiled: June 24, 2010Date of Patent: May 21, 2013Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Zhijiong Luo, Huilong Zhu, Haizhou Yin
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Publication number: 20130119405Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor substrate. The semiconductor device includes a gate that is disposed over the substrate. The substrate has a recess. The semiconductor device includes a trench liner that is coated along the recess. The trench liner contains a semiconductor crystal material. The trench liner directly abuts the source/drain stressor device. The semiconductor device also includes a dielectric trench component that is disposed on the trench liner and filling the recess. The semiconductor device includes a source/drain stressor device that is disposed in the substrate. The source/drain stressor device is disposed between the gate and the trench liner.Type: ApplicationFiled: November 14, 2011Publication date: May 16, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
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Publication number: 20130112939Abstract: A circuit structure includes a substrate and a patterned dielectric layer over the substrate. The patterned dielectric layer includes a plurality of vias; and a number of group-III group-V (III-V) compound semiconductor layer. The III-V compound semiconductor layers include a first layer in the vias, a second layer over the first layer and the dielectric layer, and a bulk layer over the second layer.Type: ApplicationFiled: November 7, 2011Publication date: May 9, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chi-Ming CHEN, Po-Chun LIU, Hung-Ta LIN, Chin-Cheng CHANG, Chung-Yi YU, Chia-Shiung TSAI, Ho-Yung David HWANG
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Patent number: 8426926Abstract: A semiconductor device includes a device isolation pattern, a gate line, and an epitaxial pattern. The device isolation pattern is disposed in a semiconductor substrate to define an active area. The gate line intersects the active area. The epitaxial pattern fills a recess region in the active area at one side of the gate line and includes a different constituent semiconductor element than the semiconductor substrate. The recess region includes a first inner sidewall that is adjacent to the device isolation pattern and extends in the lengthwise direction of the gate, and a second inner sidewall that extends in the direction perpendicular to the lengthwise direction of the gate line. The active area forms the first inner sidewall of the recess, while the device isolation layer forms at least a portion of the second inner sidewall of the recess. The epitaxial pattern contacts the first inner sidewall and the second inner sidewall of the recess region.Type: GrantFiled: April 1, 2011Date of Patent: April 23, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Dongsuk Shin, Dong Hyuk Kim, Myungsun Kim, YongJoo Lee, Hoi Sung Chung
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Patent number: 8421059Abstract: A method to form a strain-inducing semiconductor region is described. In one embodiment, formation of a strain-inducing semiconductor region laterally adjacent to a crystalline substrate results in a uniaxial strain imparted to the crystalline substrate, providing a strained crystalline substrate. In another embodiment, a semiconductor region with a crystalline lattice of one or more species of charge-neutral lattice-forming atoms imparts a strain to a crystalline substrate, wherein the lattice constant of the semiconductor region is different from that of the crystalline substrate, and wherein all species of charge-neutral lattice-forming atoms of the semiconductor region are contained in the crystalline substrate.Type: GrantFiled: October 5, 2010Date of Patent: April 16, 2013Assignee: Intel CorporationInventors: Suman Datta, Jack T. Kavalieros, Been-Yih Jin
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Patent number: 8410544Abstract: A method of fabricating and a structure of a merged multi-fin finFET. The method includes forming single-crystal silicon fins from the silicon layer of an SOI substrate having a very thin buried oxide layer and merging the end regions of the fins by growing vertical epitaxial silicon from the substrate and horizontal epitaxial silicon from ends of the fins such that vertical epitaxial silicon growth predominates.Type: GrantFiled: September 9, 2011Date of Patent: April 2, 2013Assignee: International Business Machines CorporationInventors: Kevin K. Chan, Thomas Safron Kanarsky, Jinghong Li, Christine Qiqing Ouyang, Dae-Gyu Park, Zhibin Ren, Xinhui Wang, Haizhou Yin
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Patent number: 8399339Abstract: Electrical devices comprised of nanowires are described, along with methods of their manufacture and use. The nanowires can be nanotubes and nanowires. The surface of the nanowires may be selectively functionalized Nanodetector devices are described.Type: GrantFiled: April 11, 2011Date of Patent: March 19, 2013Assignee: President and Fellows of Harvard CollegeInventors: Charles M. Lieber, Hongkun Park, Qingqiao Wei, Yi Cui, Wenjie Liang
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Publication number: 20130062594Abstract: A method is provided. The method includes forming a plurality of nanowires on a top surface of a substrate and forming an oxide layer adjacent to a bottom surface of each of the plurality of nanowires, wherein the oxide layer is to isolate each of the plurality of nanowires from the substrate.Type: ApplicationFiled: November 8, 2011Publication date: March 14, 2013Inventors: Benjamin Chu-Kung, Uday Shah, Ravi Pillarisetty, Been-Yih Jin, Marko Radosavljevic, Willy Rachmady
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Publication number: 20130062591Abstract: A case including a case main body, a matrix including a semiconductor nanocrystal, the matrix disposed in the case main body, and a sealant disposed on the case main body, wherein the sealant has a gas permeability of about 1 cubic centimeter at standard temperature and pressure per centimeter per meter squared per day per atmosphere or less and a tensile strength of about 5 megaPascals or more, and wherein the semiconductor nanocrystal is a Group II-VI compound, a Group III-V compound, a Group IV-VI compound, a Group IV element, a Group IV element, a Group IV compound, or a combination thereof.Type: ApplicationFiled: May 9, 2012Publication date: March 14, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Shin Ae JUN, Eun Joo JANG, In-Taek HAN, Hyun A. KANG, Hyo Sook JANG, Sang Eui LEE, Soo-Kyung KWON
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Publication number: 20130049171Abstract: A method for producing semiconductor components on a substrate including photolithographic patterning steps, in which method, on the substrate, a first layer to be patterned is applied and a second layer serving as a mask layer for the first layer to be patterned is applied, wherein a third layer serving as a mask for the second layer is applied, and wherein at least two photolithographic patterning processes are carried out successively for the second layer, wherein, during one of the patterning processes, after the production of a structure made from a photosensitive layer for the provision of a mask layer for a patterning process at the third layer, positive ramp angles ? are produced at the patterning edges of the third layer, as a result of which the structures remaining free, given a thickness h of the third layer, decrease in size by a value D=2*h/tan ?.Type: ApplicationFiled: August 24, 2012Publication date: February 28, 2013Applicant: ESPROS Photonics AGInventors: Martin POPP, Beat De Coi, Marco Annese
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Patent number: 8384122Abstract: Several embodiments of a tunneling transistor are disclosed. In one embodiment, a tunneling transistor includes a semiconductor substrate, a source region formed in the semiconductor substrate, a drain region formed in the semiconductor substrate, a gate stack including a metallic gate electrode and a gate dielectric, and a tunneling junction that is substantially parallel to an interface between the metallic gate electrode and the gate dielectric. As a result of the tunneling junction that is substantially parallel with the interface between the metallic gate electrode and the gate dielectric, an on-current of the tunneling transistor is substantially improved as compared to that of a conventional tunneling transistor. In another embodiment, a tunneling transistor includes a heterostructure that reduces a turn-on voltage of the tunneling transistor.Type: GrantFiled: April 17, 2009Date of Patent: February 26, 2013Assignee: The Regents of the University of CaliforniaInventors: Chenming Hu, Anupama Bowonder, Pratik Patel, Daniel Chou, Prashant Majhi
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Publication number: 20130043458Abstract: An embodiment of the present invention improves the fabrication and operational characteristics of a type-II superlattice material. Layers of indium arsenide and gallium antimonide comprise the bulk of the superlattice structure. One or more layers of indium antimonide are added to unit cells of the superlattice to provide a further degree of freedom in the design for adjusting the effective bandgap energy of the superlattice. One or more layers of gallium arsenide antimonide are added to unit cells of the superlattice to counterbalance the crystal lattice strain forces introduced by the aforementioned indium antimonide layers.Type: ApplicationFiled: August 17, 2012Publication date: February 21, 2013Applicant: SVT Associates, Inc.Inventors: Yiqiao Chen, Peter Chow
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Patent number: 8378445Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity, an epitaxial layer of a second conductivity on the substrate and a buried layer of the second conductivity interposed between the substrate and the epitaxial layer. A first trench structure extends through the epitaxial layer and the buried layer to the substrate and includes sidewall insulation and conductive material in electrical contact with the substrate at a bottom of the first trench structure. A second trench structure extends through the epitaxial layer to the buried layer and includes sidewall insulation and conductive material in electrical contact with the buried layer at a bottom of the second trench structure. A region of insulating material laterally extends from the conductive material of the first trench structure to the conductive material of the second trench structure and longitudinally extends to a substantial depth of the second trench structure.Type: GrantFiled: August 31, 2010Date of Patent: February 19, 2013Assignee: Infineon Technologies AGInventors: Brahim Elattari, Franz Hirler
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Publication number: 20130037778Abstract: A method of making a device comprises forming a layer comprising quantum dots over a substrate including a first electrode, fixing the layer comprising quantum dots formed over the substrate, and exposing at least a portion of, and preferably all, exposed surfaces of the fixed layer comprising quantum dots to small molecules. Also disclosed is a method of making a device, the method comprising forming a layer comprising quantum dots over a substrate including a first electrode, exposing the layer comprising quantum dots to small molecules and light flux. A method of making a film including a layer comprising quantum dots, and a method of preparing a device component including a layer comprising quantum dots are also disclosed. Devices, device components, and films are also disclosed.Type: ApplicationFiled: May 10, 2012Publication date: February 14, 2013Inventors: PETER T. KAZLAS, John Spencer Morris, Robert J. Nick, Zoran Popovic, Matthew Stevenson, Jonathan S. Steckel
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Publication number: 20130032783Abstract: Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.Type: ApplicationFiled: October 9, 2012Publication date: February 7, 2013Inventors: Ravi Pillarisetty, Jack T. Kavalieros, Willy Rachmady, Uday Shah, Benjamin Chu-Kung, Mark Radosavljevic, Niloy Mukherjee, Gilbert Dewey, Been Y. Jin, Robert S. Chau
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Publication number: 20130020549Abstract: The present invention relates, in some aspects, to systems and methods for fabricating longitudinally-shaped structures such as nanobelt semiconductor structures. In some embodiments, the method comprises: a) providing a substrate selected to promote epitaxial growth thereon a selected growth orientation, b) depositing a crystalline sacrificial layer on the substrate for epitaxially growing along the selected growth orientation, c) forming a film over the sacrificial layer, the film having a crystal lattice structure grown substantially along the selected growth orientation, and d) removing at least part of the sacrificial layer, thereby producing the longitudinally shaped structures from the film by strain redistribution through the crystal lattice structure of the film to crack the film along a selected in-plane axis of the selected growth orientation.Type: ApplicationFiled: June 25, 2012Publication date: January 24, 2013Applicant: Agency for Science, Technology and ResearchInventors: Hongfei Liu, Wei Liu, Soo Jin Chua, Chew Beng Soh
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Patent number: 8357990Abstract: A width of a region where each of the N wells is in contact with the buried P well is not more than 2 ?m. A ground voltage and a power supply voltage are applied to the P well and the N well, respectively. A decoupling capacitor is formed between the N well and the buried P well.Type: GrantFiled: July 1, 2009Date of Patent: January 22, 2013Assignee: Renesas Electronics CorporationInventors: Masayuki Furumiya, Hiroaki Ohkubo, Yasutaka Nakashiba
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Publication number: 20130009128Abstract: A nanoscale switching device has an active region containing a switching material. The switching device has a first electrode and a second electrode with nanoscale widths, and the active region is disposed between the first and second electrodes. A protective cladding layer surrounds the active region. The protective cladding layer is formed of a cladding material unreactive to the switching material. An interlayer isolation layer formed of a dielectric material is disposed between the first and second electrodes and outside the protective cladding layer.Type: ApplicationFiled: March 31, 2010Publication date: January 10, 2013Inventors: Gilberto Ribeiro, Janice H Nickel, Jianhua YA Yang
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Publication number: 20130001507Abstract: A semiconductor device and a method of manufacturing the device is disclosed. In one aspect, a method includes providing a substrate, providing a first epitaxial semiconducting layer on top of the substrate, and forming a one- or two-dimensional repetitive pattern, each part of the pattern having an aspect ratio in the range of about 0.1 to 50.Type: ApplicationFiled: April 3, 2012Publication date: January 3, 2013Applicant: IMECInventors: Kai CHENG, Matty Caymax
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Patent number: 8344416Abstract: An integrated circuit includes at least one transistor over a substrate. A first guard ring is disposed around the at least one transistor. The first guard ring has a first type dopant. A second guard ring is disposed around the first guard ring. The second guard ring has a second type dopant. A first doped region is disposed adjacent to the first guard ring. The first doped region has the second type dopant. A second doped region is disposed adjacent to the second guard ring. The second doped region has the first type dopant. The first guard ring, the second guard ring, the first doped region, and the second doped region are capable of being operable as a first silicon controlled rectifier (SCR) to substantially release an electrostatic discharge (ESD).Type: GrantFiled: May 11, 2010Date of Patent: January 1, 2013Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Song Sheu, Jian-Hsing Lee, Yu-Chang Jong, Chun-Chien Tsai
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Publication number: 20120320668Abstract: Methods and apparatuses are provided for storing a quantum bit. One apparatus includes a first phase qubit, a second phase qubit, and a common bias circuit configured to provide a first bias to the first phase qubit and a second bias to the second phase qubit, such that noise within the first bias is anti-correlated to noise within the second bias.Type: ApplicationFiled: June 17, 2011Publication date: December 20, 2012Inventors: Rupert M. Lewis, Ofer Naaman
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Publication number: 20120305886Abstract: In one embodiment, a method of providing a nanowire semiconductor device is provided, in which the gate structure to the nanowire semiconductor device has a trapezoid shape. The method may include forming a trapezoid gate structure surrounding at least a portion of a circumference of a nanowire. The first portion of the trapezoid gate structure that is in direct contact with an upper surface of the nanowire has a first width and a second portion of the trapezoid gate structure that is in direct contact with a lower surface of the nanowire has a second width. The second width of the trapezoid gate structure is greater than the first width of the trapezoid gate structure. The exposed portions of the nanowire that are adjacent to the portion of the nanowire that the trapezoid gate structure is surrounding are then doped to provide source and drain regions.Type: ApplicationFiled: August 10, 2012Publication date: December 6, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jeffrey W. Sleight, Sarunya Bangsaruntip, Sebastian U. Engelmann, Ying Zhang
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Patent number: 8324660Abstract: Fabrication of monolithic lattice-mismatched semiconductor heterostructures with limited area regions having upper portions substantially exhausted of threading dislocations, as well as fabrication of semiconductor devices based on such lattice-mismatched heterostructures.Type: GrantFiled: July 28, 2010Date of Patent: December 4, 2012Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Anthony J. Lochtefeld, Matthew T. Currie, Zhiyuan Cheng, James Fiorenza, Glyn Braithwaite, Thomas A. Langdo
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Publication number: 20120292664Abstract: Field Effect Transistors (FETs), Integrated Circuit (IC) chips including the FETs, and a method of forming the FETs on ICs. FET locations are defined on a layered semiconductor wafer, preferably a Silicon On Insulator (SOI) wafer. One or more FET locations are defined as silicon gate locations and remaining as Replacement Metal Gate (RMG) FET locations with at least one of each on the IC. Polysilicon gates are formed in all FET locations. Gates in silicon gate locations are tailored, e.g., doped and silicided. Remaining polysilicon gates are replaced with metal in RMG FET locations. FETs are connected together into circuits with RMG FETs being connected to silicon gate FETs.Type: ApplicationFiled: May 16, 2011Publication date: November 22, 2012Applicant: International Business Machines CorporationInventor: Narasimhulu Kanike
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Publication number: 20120286236Abstract: Segmented semiconductor nanowires are manufactured by removal of material from a layered structure of two or more semiconductor materials in the absence of a template. The removal takes place at some locations on the surface of the layered structure and continues preferentially along the direction of a crystallographic axis, such that nanowires with a segmented structure remain at locations where little or no removal occurs. The interface between different segments can be perpendicular to or at angle with the longitudinal direction of the nanowire.Type: ApplicationFiled: July 23, 2012Publication date: November 15, 2012Applicant: International Business Machines CorporationInventors: Harold J. HOVEL, Qiang Huang, Xiaoyan Shao, James Vichiconti, George F. Walker
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Publication number: 20120286828Abstract: An apparatus including a first electrode portion configured to inject charge carriers; a second electrode portion configured to collect charge carriers and provide an output signal; a third electrode portion configured to collect charge carriers and provide an output signal; a monolithic semiconductor, providing a first channel for the transport of injected charge carriers between the first electrode portion and the second electrode portion and providing a second channel for the transport of injected charge carriers between the first electrode portion and the third electrode portion, wherein the first channel is configured such that a charge carrier injected at the first electrode portion will reach the second electrode portion via the first channel after a first transport time and the second channel is configured such that a charge carrier injected at the first electrode portion will reach the third electrode portion via the second channel after a second transport time greater than the first transport time;Type: ApplicationFiled: May 13, 2011Publication date: November 15, 2012Inventors: Vladimir Alexsandrovich Ermolov, Meri Sari Helle, Pirjo Marjaana Pasanen, Markku Anttoni Oksanen, Eira Tuulia Seppala