With Vertical Doping Variation (epo) Patents (Class 257/E29.055)
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Patent number: 12199146Abstract: A power semiconductor device having a barrier region is provided. A power unit cell of the power semiconductor device has at least two trenches that may both extend into the barrier region. The at least two trenches may both have a respective trench electrode coupled to a control terminal of the power semiconductor device. For example, the trench electrodes are structured to reduce the total gate charge of the power semiconductor device. The barrier region may be p-doped and vertically confined, i.e., in and against the extension direction, by the drift region. The barrier region can be electrically floating.Type: GrantFiled: June 1, 2023Date of Patent: January 14, 2025Assignee: Infineon Technologies AGInventors: Alexander Philippou, Roman Baburske, Christian Jaeger, Johannes Georg Laven, Helmut Maeckel
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Patent number: 12112984Abstract: A semiconductor device includes a conductive feature, a dielectric layer disposed over the conductive feature, and a contact feature extending through the dielectric layer. The contact feature has an upper portion and a lower portion. The upper portion is spaced apart from the dielectric layer with a spacer layer. The lower portion is electrically coupled to the conductive feature and in contact with the dielectric layer.Type: GrantFiled: March 4, 2021Date of Patent: October 8, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventors: Tsui-Ling Yen, Chien-Hung Chen
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Patent number: 11990474Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: January 9, 2023Date of Patent: May 21, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 11552076Abstract: A method of fabricating a semiconductor device includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method further includes forming a first source/drain feature between the gate structure and the first edge structure. The method further includes forming a second source/drain feature between the gate structure and the second edge structure, wherein a distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature. The method further includes implanting a buried channel in the semiconductor strip, wherein the buried channel is entirely below a top-most surface of the semiconductor strip, a maximum depth of the buried channel is less than a maximum depth of the first source/drain feature, and a dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: July 24, 2020Date of Patent: January 10, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 10741553Abstract: A method includes forming a gate structure, a first edge structure and a second edge structure on a semiconductor strip. The method includes forming a first source/drain feature between the gate structure and the first edge structure; and a second source/drain feature between the gate structure and the second edge structure. A distance between the gate structure and the first source/drain feature is from about 1.5 to about 4.5 times greater than a distance between the gate structure and the second source/drain feature. The method includes implanting a buried channel in the semiconductor strip. A top surface of the buried channel is spaced from a top surface of the semiconductor strip. A bottom surface of the buried channel is closer to the top surface of the semiconductor strip than a bottom surface of the first source/drain feature. A dopant concentration of the buried channel is highest under the gate structure.Type: GrantFiled: September 27, 2019Date of Patent: August 11, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 10431582Abstract: A semiconductor device includes a fin extending from a substrate, a first source/drain feature, a second source/drain feature, and a gate structure on the fin. A distance between the gate structure and the first source/drain feature is different from a distance between the gate structure and the second source/drain feature.Type: GrantFiled: September 2, 2016Date of Patent: October 1, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shu Fang Fu, Chi-Feng Huang, Chia-Chung Chen, Victor Chiang Liang, Fu-Huan Tsai
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Patent number: 8916937Abstract: Multiple transistor types are formed in a common epitaxial layer by differential out-diffusion from a doped underlayer. Differential out-diffusion affects the thickness of a FET channel, the doping concentration in the FET channel, and distance between the gate dielectric layer and the doped underlayer. Differential out-diffusion may be achieved by differentially applying a dopant migration suppressor such as carbon; differentially doping the underlayer with two or more dopants having the same conductivity type but different diffusivities; and/or differentially applying thermal energy.Type: GrantFiled: February 14, 2014Date of Patent: December 23, 2014Assignee: SuVOLTA, Inc.Inventors: Thomas Hoffmann, Pushkar Ranade, Lucian Shifren, Scott E. Thompson
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Patent number: 8907420Abstract: A power semiconductor device includes: a first semiconductor layer of a first conductivity type; a second semiconductor layer of the first conductivity type and a third semiconductor layer of a second conductivity type formed on the first semiconductor layer and alternately arranged along at least one direction parallel to a surface of the first semiconductor layer; a first main electrode; a fourth semiconductor layer of the second conductivity type selectively formed in a surface of the second semiconductor layer and a surface of the third semiconductor layer; a fifth semiconductor layer of the first conductivity type selectively formed in a surface of the fourth semiconductor layer; a second main electrode; and a control electrode. At least one of the second and the third semiconductor layers has a dopant concentration profile along the one direction, the dopant concentration profile having a local minimum at a position except both ends thereof.Type: GrantFiled: May 27, 2010Date of Patent: December 9, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Wataru Saito, Syotaro Ono, Masakatsu Takashita, Yasuto Sumi, Masaru Izumisawa, Hiroshi Ohta
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Patent number: 8753941Abstract: An integrated circuit with a LV transistor and a high performance asymmetric transistor. A power amplifier integrated circuit with a core transistor and a high performance asymmetric transistor. A method of forming an integrated circuit with a core transistor and a high performance asymmetric transistor. A method of forming a power amplifier integrated circuit with an nmos core transistor and an nmos high performance asymmetric transistor, a resistor, and an inductor.Type: GrantFiled: February 13, 2013Date of Patent: June 17, 2014Assignee: Texas Instruments IncorporatedInventors: Kamel Benaissa, Vijay K. Reddy, Samuel Martin, T Krishnaswamy
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Patent number: 8653604Abstract: Multiple transistor types are formed in a common epitaxial layer by differential out-diffusion from a doped underlayer. Differential out-diffusion affects the thickness of a FET channel, the doping concentration in the FET channel, and distance between the gate dielectric layer and the doped underlayer. Differential out-diffusion may be achieved by differentially applying a dopant migration suppressor such as carbon; differentially doping the underlayer with two or more dopants having the same conductivity type but different diffusivities; and/or differentially applying thermal energy.Type: GrantFiled: September 21, 2012Date of Patent: February 18, 2014Assignee: SuVolta, Inc.Inventors: Thomas Hoffmann, Pushkar Ranade, Lucian Shifren, Scott E. Thompson
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Patent number: 8207579Abstract: A semiconductor device where a plurality of DMOS transistors formed in a distributed manner on a semiconductor substrate can operate without being destroyed and a method of manufacturing the same. The on/off threshold voltage of a DMOS transistor at the innermost position from among three or more DMOS transistors formed in a distributed manner on a semiconductor is greater than the on/off threshold voltage of a DMOS transistor at the outermost position.Type: GrantFiled: January 19, 2010Date of Patent: June 26, 2012Assignee: Lapis Semiconductor Co., Ltd.Inventor: Shinobu Takehiro
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Patent number: 8169039Abstract: A disclosed semiconductor device includes an MOS transistor having an N-type low-concentration drain region, a source region, an ohmic drain region, a P-type channel region, an ohmic channel region, a gate isolation film, and a gate electrode. The N-type low-concentration drain region includes two low-concentration drain layers in which the N-type impurity concentration of the upper layer is higher than that of the lower layer; the P-type channel region includes two channel layers in which the P-type impurity concentration of the upper layer is lower than that of the lower layer; and the gate electrode is formed on the P-type channel region and the N-type low-concentration drain region and disposed to be separated from the ohmic drain region when viewed from the top.Type: GrantFiled: August 2, 2010Date of Patent: May 1, 2012Assignee: Ricoh Company, Ltd.Inventor: Takaaki Negoro
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Patent number: 7999309Abstract: In a semiconductor device and associated methods, the semiconductor device includes a substrate, an insulation layer on the substrate, a conductive structure on the insulation layer, the conductive structure including at least one metal silicide film pattern, a semiconductor pattern on the conductive structure, the semiconductor pattern protruding upwardly from the conductive structure, a gate electrode at least partially enclosing the semiconductor pattern, the gate electrode being spaced apart from the conductive structure, a first impurity region at a lower portion of the semiconductor pattern, and a second impurity region at an upper portion of the semiconductor pattern.Type: GrantFiled: April 8, 2009Date of Patent: August 16, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jae-Man Yoon, Yong-Chul Oh, Hui-Jung Kim, Hyun-Woo Chung, Hyun-Gi Kim, Kang-Uk Kim
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Patent number: 7892927Abstract: A transistor including a germanium-rich channel. The germanium-rich channel is produced by oxidation of the silicon contained in the silicon-germanium intermediate layer starting from the lower surface of the said intermediate layer. The germanium atoms are therefore caused to migrate towards the upper surface of the silicon-germanium intermediate layer, and are stopped by the gate insulating layer. The migration of the atoms during the oxidation step is thus less prejudicial to the performance of the transistor, since the gate insulator of the transistor has already been produced and is not modified during this step. The migration of the germanium atoms towards the gate insulator, which is immobile, leads to a limitation of the surface defects between the channel and the insulator.Type: GrantFiled: March 16, 2007Date of Patent: February 22, 2011Assignees: STMicroelectronics SA, STMicroelectronics (Crolles 2) SASInventors: Stephane Monfray, Thomas Skotnicki, Didier Dutartre, Alexandre Talbot
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Patent number: 7671384Abstract: An integrated circuit device comprises a memory cell well formed with a flash memory device, first and second well of opposite conductivity types for formation of high voltage transistors, and third and fourth wells of opposite conductivity types for low voltage transistors, wherein at least one of the first and second wells and at least one of the third and fourth wells have an impurity distribution profile steeper than the memory cell well.Type: GrantFiled: August 24, 2005Date of Patent: March 2, 2010Assignee: Fujitsu Microelectronics LimitedInventors: Taiji Ema, Hideyuki Kojima, Toru Anezaki
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Patent number: 7598146Abstract: A semiconductor structure comprises a silicon substrate of a first conductivity type including wells of a second conductivity type formed on a surface thereof. The wells may be laterally isolated by shallow trench isolation. Transistors are formed in the wells by first forming several chemically distinct layers. Anisotropic etching then forms openings in a top one of the layers. A blanket dielectric layer is formed in the openings and on the layers. Anisotropic etching removes portions of the blanket dielectric layer from planar surfaces of the substrate but not from sidewalls of the openings to form dielectric spacers separated by gaps within the openings. Gate oxides are formed by oxidation of exposed areas of the substrate. Ion implantation forms channels beneath the gate oxides. Polysilicon deposition followed by chemical-mechanical polishing defines gates in the gaps. The chemically distinct layers are then stripped without removing the dielectric spacers.Type: GrantFiled: August 31, 2006Date of Patent: October 6, 2009Assignee: STMicroelectronics, Inc.Inventor: Robert Louis Hodges