Body Region Structure Of Igfet's With Channel Containing Layer (dmosfet Or Igbt) (epo) Patents (Class 257/E29.066)
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Patent number: 12255540Abstract: A fly-back converter and method of operating is provided to eliminate cross-conduction between a power-switch (PS) on a primary side of a transformer and a synchronous-rectifier (SR) on a secondary side when operating in continuous conduction mode. Generally, the method includes turning on the SR when a drain voltage of the SR drops to a negative voltage followed by a rise in the SR-drain-voltage at a first slope as a current is drawn from the secondary side of the transformer through the SR. When the PS is turned on before the transformer is completely discharged cross-conduction causes a change in the rise of the drain voltage to a second slope greater than the first slope. By turning off the SR within 50 ns of the change in the rise of the drain voltage, cross-conduction is minimized or eliminated without receiving turn-on information from a controller operating the PS.Type: GrantFiled: March 20, 2023Date of Patent: March 18, 2025Assignee: Cypress Semiconductor CorporationInventors: Viral Kishorkumar Brahmbhatt, Arun Khamesra
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Patent number: 12256563Abstract: A superjunction semiconductor device having a reduced source area and a method of manufacturing the same and, more particularly, to a semiconductor device and a method of manufacturing the same, in which the semiconductor device realizes a reduction in the area of a source in a body region to reduce the current during a short circuit fault, thus delaying a temperature increase and increasing the time before temperature-related device destruction.Type: GrantFiled: February 14, 2022Date of Patent: March 18, 2025Assignee: DB HiTek Co., Ltd.Inventors: Ji Eun Lee, Myeong Bum Pyun, Yong Sin Han
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Patent number: 12243939Abstract: Described examples include an integrated circuit having a transistor with a first gate on a first gate insulating layer. The transistor also has second gate separated from the first gate by a gate gap. The integrated circuit also includes a channel well at the gate gap extending under the first gate and the second gate. The transistor has a first source in the channel adjacent to an edge of the first gate. The transistor having a second source formed in the channel adjacent to an edge of the second gate separated from the first source by a channel gap. The transistor has at least one back-gate contact, the at least one back-gate contact separated from the first gate by a first back-gate contact gap and separated from the second gate by a second back-gate contact gap.Type: GrantFiled: October 31, 2021Date of Patent: March 4, 2025Assignee: Texas Instruments IncorporatedInventors: Gang Xue, Pushpa Mahalingam, Alexei Sadovnikov
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Patent number: 12211935Abstract: A semiconductor structure is disclosed. The semiconductor structure includes: a substrate of a first conductivity; a first region of the first conductivity formed in the substrate; a second region of the first conductivity formed in the first region, wherein the second region has a higher doping density than the first region; a source region of a second conductivity formed in the second region; a drain region of the second conductivity formed in the substrate; a pickup region of the first conductivity formed in the second region and adjacent to the source region; and a resist protective oxide (RPO) layer formed on a top surface of the second region. An associated fabricating method is also disclosed.Type: GrantFiled: November 20, 2022Date of Patent: January 28, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chen-Liang Chu, Ta-Yuan Kung, Ker-Hsiao Huo, Yi-Huan Chen
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Patent number: 12206016Abstract: A semiconductor device includes a first region in which a drift, base, and accumulation regions are stacked. Transistor cells are each provided partially in the first region and include at least one trench extending into the drift region. A second region includes a well region provided on an edge termination region side surrounding the first region. A third region of a predetermined width is between the first and second regions, inside of which the transistor cells are partially provided. A bottom region is provided in the first region, adjacent to a bottom of the trench, and between the accumulation and drift regions, the bottom region not extending into the third region, its upper surface located below the base region's lower surface; and first and second electrodes configured to flow current therebetween. The bottom region is spaced apart from the base region by the accumulation region in the depth direction.Type: GrantFiled: December 27, 2023Date of Patent: January 21, 2025Assignee: FUJI ELECTRIC CO., LTD.Inventor: Tatsuya Naito
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Patent number: 12183576Abstract: Disclosed is a preparation method for a semiconductor structure. The semiconductor structure includes: a substrate; an epitaxial layer and an epitaxial structure that are stacked on the substrate in sequence. The epitaxial layer is doped with a doping element. In the forming process, a sacrificial layer is formed on the epitaxial layer, and the sacrificial layer is repeatedly etched, such that a concentration of the doping element in the epitaxial layer is lower than a preset value. In this application, the sacrificial layer is formed on the epitaxial layer, and the sacrificial layer is repeatedly etched, such that the concentration of the doping element in the epitaxial layer is lower than the preset value, so as to prevent the doping element in the epitaxial layer from being precipitated upward into an upper-layer structure, ensure the mobility of electrons in a channel layer, and improve the performance of a device.Type: GrantFiled: October 19, 2022Date of Patent: December 31, 2024Assignee: ENKRIS SEMICONDUCTOR, INC.Inventors: Peng Xiang, Kai Cheng
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Patent number: 12183782Abstract: A semiconductor device includes a semiconductor part, first and second electrodes and a control electrode. The semiconductor part is provided between the first and second electrode. The semiconductor part includes first and third layers of a first conductivity type, and second, fourth and fifth layers of a second conductivity type. The first layer extends between the first and second electrodes. The second layer is provided between the first layer and the second electrode. The third semiconductor layer is provided between the second layer and the second electrode. The fourth layer is provided between the first layer and the first electrode. The semiconductor part includes an active region and a termination region. The active region includes the control electrode, the second layer, and the third layer. The termination region surrounds the active region. The fifth layer is provided in the first layer in the termination region.Type: GrantFiled: January 24, 2022Date of Patent: December 31, 2024Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage CorporationInventors: Takako Motai, Tomoko Matsudai, Yoko Iwakaji, Hiroko Itokazu, Kaori Fuse, Keiko Kawamura, Kohei Oasa
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Patent number: 12166080Abstract: The application relates to a semiconductor transistor device, having a source region, a body region including a channel region extending in a vertical direction, a drain region, a gate region arranged aside the channel region in a lateral direction, and a body contact region made of an electrically conductive material, wherein the body contact region forms a body contact area, the body contact region being in an electrical contact with the body region via the body contact area, and wherein the body contact area is tilted with respect to the vertical direction and the lateral direction.Type: GrantFiled: April 5, 2023Date of Patent: December 10, 2024Assignee: Infineon Technologies Austria AGInventors: Li Juin Yip, Oliver Blank, Heimo Hofer, Michael Hutzler, Thomas Ralf Siemieniec
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Patent number: 12159868Abstract: Semiconductor structures and methods for forming same are disclosed. In one form, a structure includes: a base, including a first device region and a second device region, where the first device region includes a channel region, and preset regions located on two sides of the channel region, and a well pick-up region surrounding the channel region and the preset regions; a first isolation structure, located in the base between the preset regions and the well pick-up region and between the well pick-up region and the adjacent second device region; a poly gate, covering the channel region; a first source/drain doping region, located in the preset regions on two sides of the poly gate; a metal gate, located on the base in the second device region; a support structure, located on the top of the first isolation structure; and an interlayer dielectric layer, covering side walls of the poly gate, the metal gate, and the support structure.Type: GrantFiled: March 10, 2022Date of Patent: December 3, 2024Assignee: Semiconductor Manufacturing North China (Beijing) CorporationInventors: Cai Qiaoming, Ma Lisha
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Patent number: 12150258Abstract: A power module is provided with a substrate, power devices, and a housing. The power devices are mounted on device pads of the substrate and arranged to provide a power circuit having a first input, a second input, and at least one output. First and second power terminals provide first and second inputs for the power circuit. At least one output power terminal provides at least one output. The housing encompasses the substrate, the power devices, and portions of the first and second input power terminals as well as the at least one output power terminal.Type: GrantFiled: May 4, 2022Date of Patent: November 19, 2024Assignee: WOLFSPEED, INC.Inventors: Brice McPherson, Shashwat Singh, Roberto M. Schupbach
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Patent number: 12136647Abstract: The present invention provides a power device with super junction structure (or referred to as super junction power device) and a method of making the same. A floating island of a second conductivity type of a cell region, a floating island of the second conductivity type of a termination region, a pillar of the second conductivity type of the cell region and a pillar of the second conductivity type of the termination region may be formed through adding a super junction mask (or reticle) after forming the epitaxial layer of a first conductivity type, through a well mask (or reticle) before or after forming a well of the second conductivity type, and through a contact mask (or reticle) before or after forming a contact structure. Therefore, the process is simple, the cost is low and yield and reliability are high.Type: GrantFiled: June 11, 2021Date of Patent: November 5, 2024Assignee: SiEn (QingDao) Integrated Circuits Co., Ltd.Inventors: Min-Hwa Chi, Conghui Liu, Huan Wang, Longkang Yang, Richard Ru-Gin Chang
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Patent number: 12136648Abstract: The present application discloses a super junction device, comprising: an N-type redundant epitaxial layer and an N-type buffer layer sequentially formed on an N-type semiconductor substrate; wherein a trench-filling super junction structure is formed on the N-type buffer layer; a backside structure of the super junction device comprises a drain region; the N-type semiconductor substrate is removed in a backside thinning process, and the N-type redundant epitaxial layer is completely or partially removed in the backside thinning process; the resistivity of the N-type semiconductor substrate is 0.1-10 times the resistivity of a top epitaxial layer; the resistivity of the N-type redundant epitaxial layer is 0.1-10 times the resistivity of the N-type semiconductor substrate, and the resistivity of the N-type redundant epitaxial layer is lower than the resistivity of the N-type buffer layer. The present application further discloses a method for manufacturing a super junction device.Type: GrantFiled: January 14, 2022Date of Patent: November 5, 2024Assignee: Shenzhen Sanrise-Tech Co., LTDInventors: Shengan Xiao, Dajie Zeng
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Patent number: 12119385Abstract: A semiconductor device includes a first electrode, a second electrode, a semiconductor layer that includes a first semiconductor region, a second semiconductor region, and a third semiconductor region, a third electrode, a first insulating region, a second insulating region, a fourth electrode that has a plurality of portions consecutive in a first direction, the plurality of portions including a first portion that has a first width in a second direction, a second portion that is located closer to the second electrode than the first portion in the first direction and has a second width smaller than the first width in the second direction, and a third portion that is adjacent to the second portion, located closer to the second electrode than the second portion in the first direction, and has a third width larger than the second width in the second direction, and a third insulating region.Type: GrantFiled: February 8, 2022Date of Patent: October 15, 2024Assignee: Kabushiki Kaisha ToshibaInventors: Hiro Gangi, Yasunori Taguchi, Tomoaki Inokuchi, Yusuke Kobayashi, Hiroki Nemoto
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Patent number: 12094970Abstract: An electrostatic discharge (ESD) protection structure that provides snapback protections to one or more high voltage circuit components. The ESD protection structure can be integrated along a peripheral region of a high voltage circuit, such as a high side gate driver of a driver circuit. The ESD protection structure includes a p-channel device and an n-channel device. The p-channel device includes an n-type barrier region circumscribing a p-type drain region with an n-type body region. The p-channel device may be positioned adjacent to the n-channel device and a high voltage junction diode.Type: GrantFiled: February 11, 2021Date of Patent: September 17, 2024Assignee: Texas Instruments IncorporatedInventors: Sunglyong Kim, Seetharaman Sridhar, Sameer Pendharkar, David LaFonteese
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Patent number: 12094713Abstract: A semiconductor device includes a doped substrate, a barrier layer, a channel layer, and a doped semiconductor structure. The barrier layer is disposed on the doped substrate. The channel layer is disposed between the doped substrate and the barrier layer, in which a bandgap of the barrier layer is greater than a bandgap of the channel layer. The doped semiconductor structure is embedded in the doped substrate and at a position lower than the channel layer, in which the doped substrate and the doped semiconductor structure have different polarities, so as to form a diode therebetween.Type: GrantFiled: April 1, 2022Date of Patent: September 17, 2024Assignee: INNOSCIENCE (ZHUHAI) TECHNOLOGY CO., LTD.Inventors: Qiyue Zhao, Chuan He
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Patent number: 12051662Abstract: An electronic component includes a substrate having a first main surface on one side and a second main surface on the other side, a chip having a first chip main surface on one side and a second chip main surface on the other side, and a plurality of electrodes formed on the first chip main surface and/or the second chip main surface, the chip being arranged on the first main surface of the substrate, a sealing insulation layer that seals the chip on the first main surface of the substrate such that the second main surface of the substrate is exposed, the sealing insulation layer having a sealing main surface that opposes the first main surface of the substrate, and a plurality of external terminals formed to penetrate through the sealing insulation layer so as to be exposed from the sealing main surface of the sealing insulation layer, the external terminals being respectively electrically connected to the plurality of electrodes of the chip.Type: GrantFiled: December 17, 2021Date of Patent: July 30, 2024Assignee: ROHM CO., LTD.Inventor: Masatoshi Aketa
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Patent number: 12027617Abstract: A voltage withstanding structure disposed in an edge termination region is a spatial modulation junction termination extension (JTE) structure formed by a combination of a JTE structure and a field limiting ring (FLR) structure. All FLRs configuring the FLR structure are surrounded by an innermost one of p??-type regions configuring the JTE structure. An innermost one of the FLRs is disposed overlapping a p+-type extension and the innermost one of the p??-type regions, at a position overlapping a border between the p+-type extension and the innermost one of the p??-type regions. The FLRs are formed concurrently with p++-type contact regions in an active region and have an impurity concentration substantially equal to an impurity concentration of the p++-type contact regions. An n+-type channel stopper region is formed concurrently with n+-type source regions in the active region and has an impurity concentration substantially equal to an impurity concentration the n+-type source regions.Type: GrantFiled: November 1, 2021Date of Patent: July 2, 2024Assignee: FUJI ELECTRIC CO., LTD.Inventor: Akimasa Kinoshita
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Patent number: 12009399Abstract: A semiconductor device includes a fin structure, first and second gate structures, a source/drain region, a source/drain contact layer and a separation layer. The fin structure protrudes from an isolation insulating layer disposed over a substrate and extends in a first direction. The first and second gate structures are formed over the fin structure and extend in a second direction crossing the first direction. The source/drain region is disposed between the first and second gate structures. The interlayer insulating layer is disposed over the fin structure, the first and second gate structures and the source/drain region. The first source/drain contact layer is disposed on the first source/drain region. The separation layer is disposed adjacent to the first source/drain contact layer. Ends of the first and second gate structures and an end of the source drain contact layer are in contact with a same face of the separation layer.Type: GrantFiled: April 5, 2021Date of Patent: June 11, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-Jyun Huang, Tung-Heng Hsieh, Bao-Ru Young
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Patent number: 12002847Abstract: A power semiconductor device includes an epitaxial layer of a first conductivity type, a first doped region of a second conductivity type, a second doped region of the first conductivity type, a contact metal layer, a device electrode, a first termination electrode, and a second termination electrode. The epitaxial layer includes an active region and a termination region. The device electrode is located in a device trench in the active region, and is electrically isolated from the epitaxial layer and the contact metal layer. The first termination electrode is located in a first termination trench in the termination region and is electrically isolated from the epitaxial layer. The second termination electrode is located at a bottom of the first termination trench and is electrically isolated from the first termination electrode and the epitaxial layer. Both the first termination electrode and the second termination electrode are capable of being selectively floating.Type: GrantFiled: July 13, 2021Date of Patent: June 4, 2024Assignee: Invinci Semiconductor CorporationInventors: Li-Ming Chang, Mei-Ling Chen, Hsu-Heng Lee
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Patent number: 11978793Abstract: Provided is a semiconductor device in which a snubber-circuit is incorporated and can realize downsizing of a power conversion circuit into which the semiconductor device is assembled, and is flexibly applicable to various electric equipment. A semiconductor device includes a semiconductor substrate, a source electrode, a drain electrode, a plurality of trenches, a plurality of first electrodes disposed in a plurality of trenches by way of gate insulation films formed on side walls of the plurality of respective trenches, a plurality of second electrodes disposed above the plurality of first electrodes in a state where the second electrodes are spaced apart from the first electrodes, a plurality of first insulation regions, and a plurality of second insulation regions. The trenches, the first electrodes and the second electrodes are formed in stripes as viewed in a plan view. At least one of the plurality of second electrodes is connected to the drain electrode.Type: GrantFiled: July 8, 2021Date of Patent: May 7, 2024Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.Inventor: Kinya Ohtani
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Patent number: 11973108Abstract: A semiconductor device includes: a drift region that is arranged on a main surface of a substrate, and has a higher impurity concentration than the substrate; a first well region that is connected to the drift region; and a second well region that is arranged adjacent to the first well region and faces the drift region. The second well region has a higher impurity concentration than the first well region. A distance between the source region that faces the drift region via the first well region and the drift region is greater than a distance between the second well region and the drift region, in a direction parallel to the main surface of the substrate. A depletion layer extending from the second well region reaches the drift region.Type: GrantFiled: December 1, 2020Date of Patent: April 30, 2024Assignees: NISSAN MOTOR CO., LTD., RENAULT S.A.S.Inventors: Wei Ni, Tetsuya Hayashi, Keiichiro Numakura, Toshiharu Marui, Ryouta Tanaka, Yuichi Iwasaki
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Patent number: 11973114Abstract: A semiconductor device includes at least a first lateral MOSFET formed on a semiconductor substrate. The first lateral MOSFET has an interface defined by a plurality of trenches along which the current flow can be modulated by a perpendicular electric field. The portion of the interface lies on a plane substantially perpendicular to the plane of the substrate. The interface is configured such that at least a portion of the current flow along the portion of the interface that lies on a plane substantially perpendicular to the plane of the substrate is in a direction substantially parallel to the plane of the substrate.Type: GrantFiled: October 12, 2021Date of Patent: April 30, 2024Assignee: Purdue Research FoundationInventor: James A. Cooper
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Patent number: 11961903Abstract: A power semiconductor device includes a semiconductor layer of silicon carbide (SiC), at least one trench that extends in one direction, a gate insulating layer disposed on at least an inner wall of the at least one trench, at least one gate electrode layer disposed on the gate insulating layer, a drift region disposed in the semiconductor layer at least on one side of the at least one gate electrode layer, a well region disposed in the semiconductor layer to be deeper than the at least one gate electrode layer, a source region disposed in the well region, and at least one channel region disposed in the semiconductor layer of one side of the at least one gate electrode layer between the drift region and the source region.Type: GrantFiled: May 25, 2021Date of Patent: April 16, 2024Assignee: HYUNDAI MOBIS CO., LTD.Inventors: Jeong Mok Ha, Hyuk Woo, Sin A Kim, Tae Youp Kim, Ju Hwan Lee, Min Gi Kang, Tae Yang Kim
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Patent number: 11949023Abstract: A device includes a diode. The anode of the diode includes first, second, and third areas. The first area partially covers the second area and has a first doping level greater than a second doping level of the second area. The second area partially covers the third area and has the second doping level greater than a third doping level of the third area. A first insulating layer partially overlaps the first and second areas.Type: GrantFiled: December 20, 2021Date of Patent: April 2, 2024Assignee: STMicroelectronics (Tours) SASInventors: Arnaud Yvon, Lionel Jaouen
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Patent number: 11923451Abstract: A semiconductor device includes an output-stage element and a detection element, each of the output-stage element and the detection element including: a channel-formation region deposited at an upper part of a drift region; a main electrode region deposited at an upper part of the channel-formation region; and a gate electrode buried via a gate insulating film in one or more first trenches in contact with the main electrode region, the channel-formation region, and the drift region, wherein the first trenches used in common with the detection element and the output-stage element extend in a planar pattern, and a plurality of second trenches extending in parallel to each other in a direction perpendicular to the first trenches interpose the detection element so as to separate the channel-formation region of the output-stage element and the channel-formation region of the detection element from each other.Type: GrantFiled: May 27, 2021Date of Patent: March 5, 2024Assignee: FUJI ELECTRIC CO., LTD.Inventor: Yoshiaki Toyoda
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Patent number: 11908912Abstract: A semiconductor device includes: a first electrode; a first semiconductor layer; a first insulating film extending downward from an upper surface of the first semiconductor layer, the first insulating film being columnar; a second electrode located in the first insulating film, the second electrode extending in a vertical direction, the second electrode being columnar; a second semiconductor layer partially provided in an upper layer portion of the first semiconductor layer, the second semiconductor layer being next to the first insulating film with the first semiconductor layer interposed; a third semiconductor layer partially provided in an upper layer portion of the second semiconductor layer; and a third electrode located higher than the upper surface of the first semiconductor layer, the third electrode overlapping a portion of the first insulating film, a portion of the first semiconductor layer, and a portion of the second semiconductor layer when viewed from above.Type: GrantFiled: February 17, 2022Date of Patent: February 20, 2024Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventors: Tatsuya Nishiwaki, Tsuyoshi Kachi, Shuhei Tokuyama
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Patent number: 11901444Abstract: Examples of a semiconductor device includes a transistor region formed in a semiconductor substrate having a first conductivity type drift layer, and a diode region formed to be adjacent to the transistor region in the semiconductor substrate, wherein the diode region has a second conductivity type anode layer formed on the drift layer and a first conductivity type cathode layer formed on the lower side of the drift layer, and the cathode layer has an adjacent region contacting the transistor region, the adjacent region having a depth, from a lower surface of the semiconductor substrate, which becomes shallower toward the transistor region and having first conductivity type impurity concentration which decreases toward the transistor region.Type: GrantFiled: May 3, 2022Date of Patent: February 13, 2024Assignee: Mitsubishi Electric CorporationInventors: Ryu Kamibaba, Tetsuo Takahashi, Akihiko Furukawa
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Patent number: 11869962Abstract: Examples of a semiconductor device includes a transistor region formed in a semiconductor substrate having a first conductivity type drift layer, and a diode region formed to be adjacent to the transistor region in the semiconductor substrate, wherein the diode region has a second conductivity type anode layer formed on the drift layer and a first conductivity type cathode layer formed on the lower side of the drift layer, and the cathode layer has an adjacent region contacting the transistor region, the adjacent region having a depth, from a lower surface of the semiconductor substrate, which becomes shallower toward the transistor region and having first conductivity type impurity concentration which decreases toward the transistor region.Type: GrantFiled: May 3, 2022Date of Patent: January 9, 2024Assignee: Mitsubishi Electric CorporationInventors: Ryu Kamibaba, Tetsuo Takahashi, Akihiko Furukawa
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Patent number: 11869985Abstract: A diode is proposed. The diode includes a semiconductor body having a first main surface and a second main surface opposite to the first main surface. The diode further includes an anode region and a cathode region. The anode region is arranged between the first main surface and the cathode region. An anode pad area is electrically connected to the anode region. The diode further includes a plurality of trenches extending into the semiconductor body from the first main surface. A first group of the plurality of trenches includes a first trench electrode. A second group of the plurality of trenches includes a second trench electrode. The first trench electrode is electrically coupled to the anode pad area via an anode wiring line and the second trench electrode.Type: GrantFiled: July 30, 2021Date of Patent: January 9, 2024Assignee: Infineon Technologies Austria AGInventors: Christian Philipp Sandow, Matteo Dainese, Viktoryia Lapidus
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Patent number: 11855157Abstract: A semiconductor device includes a semiconductor part, a first electrode at a back surface of the semiconductor part; a second electrode at a front surface of the semiconductor part; third and fourth electrodes provided between the semiconductor part and the second electrode. The third and fourth electrodes are arranged in a first direction along the front surface of the semiconductor part. The third electrode is electrically insulated from the semiconductor part by a first insulating film. The third electrode is electrically insulated from the second electrode by a second insulating film. The fourth electrode is electrically insulated from the semiconductor part by a third insulating film. The fourth electrode is electrically isolated from the third electrode. the third and fourth electrodes extend into the semiconductor part. The fourth electrode includes a material having a larger thermal conductivity than a thermal conductivity of a material of the third electrode.Type: GrantFiled: December 14, 2022Date of Patent: December 26, 2023Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventors: Takeshi Suwa, Tomoko Matsudai, Yoko Iwakaji
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Patent number: 11830943Abstract: A Field Effect Transistor (FET) may include a semiconductor substrate having a first conductivity type, a semiconductor layer of the first conductivity type formed over the substrate, and a pair of doped bodies of a second conductivity type opposite the first conductivity type formed in the semiconductor layer. A trench filled with a trench dielectric is formed within a region between the doped bodies. The FET may be a Vertical Metal-Oxide-Semiconductor FET (VMOSFET) including a gate dielectric disposed over the region between the doped bodies and the trench, and a gate electrode disposed over the gate dielectric, wherein the trench operates to prevent breakdown of the gate dielectric, or the FET may be a Junction FET. The FET may be designed to operate at radio frequencies or under heavy-ion bombardment. The semiconductor substrate and the semiconductor layer may comprise a wide band-gap semiconductor such as silicon carbide.Type: GrantFiled: July 26, 2021Date of Patent: November 28, 2023Assignee: ANALOG POWER CONVERSION LLCInventors: Dumitru Gheorge Sdrulla, Amaury Gendron-Hansen
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Patent number: 11823905Abstract: Self-aligned FET devices and associated fabrication methods are disclosed herein. A disclosed process for forming a FET includes forming a first mask, implanting a deep well region in a drift region using the first mask, forming a spacer in contact with the first mask, and implanting a shallow well region in the drift region using the first mask and the spacer. A disclosed FET includes a drift region, a shallow well region, a deep well region located between the shallow well region and the drift region, and a junction field effect region: in contact with the shallow well region, the drift region, and the deep well region; and having a junction field effect doping concentration of the first conductivity type. The FETs can include a hybrid channel formed by a portion of the junction field effect region, as influenced by the deep well region, and the shallow well region.Type: GrantFiled: February 28, 2022Date of Patent: November 21, 2023Assignee: SCDevice LLCInventors: Sudarsan Uppili, David Lee Snyder, Scott Joseph Alberhasky
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Patent number: 11824113Abstract: A semiconductor device has an impurity region covering a bottom of a gate trench and a column region. A bottom of the column region is deeper than a bottom of the gate trench. The impurity region is arranged between the gate trench and the column region. This structure can improve the characteristics of the semiconductor device.Type: GrantFiled: September 1, 2022Date of Patent: November 21, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Machiko Sato, Akihiro Shimomura
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Patent number: 11798938Abstract: A SiC integrated circuit structure which allows multiple power MOSFETs or LDMOSs to exist in the same piece of semiconductor substrate and still function as individual devices which form the components of a given circuit architecture, for example, and not by limitation, in a half-bridge module. In one example, a deep isolation trench is etched into the silicon carbide substrate surrounding each individual LDMOS device. The trench is filled with an insulating material. The depth of the trench may be deeper than the thickness of an epitaxial layer to ensure electrical isolation between the individual epitaxial layer regions housing the individual LDMOSs. The width of the trench may be selected to withstand the potential difference between the bias levels of the body regions of neighboring power LDMOS devices.Type: GrantFiled: November 23, 2021Date of Patent: October 24, 2023Assignee: CoolCAD Electronics, LLCInventors: Neil Goldsman, Akin Akturk, Zeynep Dilli, Mitchell Adrian Gross, Usama Khalid, Christopher James Darmody
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Patent number: 11776997Abstract: In a general aspect, a semiconductor device can include a semiconductor region of a first conductivity type and a well region of a second conductivity type. The well region can be disposed in the semiconductor region. An interface between the well region and the semiconductor region can define a diode junction at a depth below an upper surface of the semiconductor region. The semiconductor device can further include at least one dielectric region disposed in the semiconductor region. A dielectric region of the at least one dielectric region can have an upper surface that is disposed in the well region at a depth in the semiconductor region that is above the depth of the diode junction; and a lower surface that is disposed in the semiconductor region at a depth in the semiconductor region that is the same depth as the diode junction or below the depth of the diode junction.Type: GrantFiled: August 27, 2021Date of Patent: October 3, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Shengling Deng, Dean E. Probst, Zia Hossain
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Patent number: 11777020Abstract: Provided is a semiconductor device including: a semiconductor substrate; an active portion provided on the semiconductor substrate; a first well region and a second well region arranged sandwiching the active portion in a top view, provided on the semiconductor substrate; an emitter electrode arranged above the active portion; and a pad arranged above the first well region, away from the emitter electrode, wherein the emitter electrode is provided above the second well region. The provided semiconductor device further includes a peripheral well region arranged enclosing the active portion in a top view, wherein the first well region and the second well region may protrude to the center side of the active portion rather than the peripheral well region.Type: GrantFiled: January 26, 2021Date of Patent: October 3, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventors: Atsushi Shoji, Soichi Yoshida
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Patent number: 11776953Abstract: Provided is an n-channel BiMOS semiconductor device having a trench gate structure, the n-channel BiMOS semiconductor device including: an n+ drain layer; a parallel pn layer including n? drift and p pillar layers joined alternately; a composite layer including a p base layer and an n+ source layer, the n+ drain layer, the parallel pn layer, and the composite layer being provided in order; a high-resistance layer provided between a portion of the p base layer above the p pillar layer and the n+ source layer; and a high-resistance layer provided between the p pillar layer and the p base layer, the p pillar layer having an impurity concentration lower than that of the n? drift layer.Type: GrantFiled: February 14, 2022Date of Patent: October 3, 2023Assignee: HONDA MOTOR CO., LTD.Inventors: Yasuhiro Maeda, Yoshinari Tsukada, Shinya Maita, Genki Nakamura, Yuki Negoro
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Patent number: 11769828Abstract: A power semiconductor device comprises a semiconductor layer structure comprising a drift region that comprises a wide band-gap semiconductor material and has a first conductivity type, a first gate structure and an adjacent second gate structure in an upper portion of the semiconductor layer structure, a deep shielding region in the drift region, and a connection region protruding upwardly from the deep shielding region and separating the first gate structure and the second gate structure from each other. The deep shielding region extends from underneath the first gate structure to underneath the second gate structure, and the deep shielding region has a second conductivity type that is different from the first conductivity type.Type: GrantFiled: February 10, 2021Date of Patent: September 26, 2023Assignee: Wolfspeed, Inc.Inventors: Thomas E. Harrington, III, Sei-Hyung Ryu
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Patent number: 11769665Abstract: Exemplary semiconductor processing methods may include forming a p-type silicon-containing material on a substrate including a first n-type silicon-containing material defining one or more features. The p-type silicon-containing material may extend along at least a portion of the one or more features defined in the first n-type silicon-containing material. The methods may include removing a portion of the p-type silicon-containing material. The portion of the p-type silicon-containing material may be removed from a bottom of the one or more features. The methods may include providing a silicon-containing material. The methods may include depositing a second n-type silicon-containing material on the substrate. The second n-type silicon-containing material may fill the one or more features formed in the first n-type silicon-containing material and may separate regions of remaining p-type silicon-containing material.Type: GrantFiled: January 11, 2022Date of Patent: September 26, 2023Assignee: Applied Materials, Inc.Inventors: Amirhasan Nourbakhsh, Raman Gaire, Tyler Sherwood, Lan Yu, Roger Quon, Siddarth Krishnan
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Patent number: 11756792Abstract: Transistors having a control gate isolated from a first region of semiconductor material having a first conductivity type, first and second source/drain regions having a second conductivity type different than the first conductivity type and formed in the first region of semiconductor material, and a second region of semiconductor material having the first conductivity type in contact with the first region of semiconductor material, wherein the first region of semiconductor material is between the control gate and the second region of semiconductor material, wherein the first region of semiconductor material has a first width, and wherein the second region of semiconductor material has a second width, less than or equal to the first width, as well as memory containing such transistors.Type: GrantFiled: June 12, 2020Date of Patent: September 12, 2023Assignee: Micron Technology, Inc.Inventors: Michael Violette, Vladimir Mikhalev
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Patent number: 11749675Abstract: Between a source electrode (25) of a main device (24) and a current sensing electrode (22) of a current detection device (21), a resistor for detecting current is connected. Dielectric withstand voltage of gate insulator (36) is larger than a product of the resistor and maximal current flowing through the current detection device (21) with reverse bias. A diffusion length of a p-body region (32) of the main device (24) is shorter than that of a p-body (31) of the current detection device (21). A curvature radius at an end portion of the p-body region (32) of the main device (24) is smaller than that of the p-body (31) of the current detection device (21). As a result, at the inverse bias, electric field at the end portion of the p-body region (32) of the main device (24) becomes stronger than that of the p-body region (31) of the current detection device (21). Consequently, avalanche breakdown tends to occur earlier in the main device 24 than the current detection device (21).Type: GrantFiled: January 7, 2021Date of Patent: September 5, 2023Assignees: FUJI ELECTRIC CO., LTD., DENSO CORPORATIONInventors: Seiji Momota, Hitoshi Abe, Takashi Shiigi, Takeshi Fujii, Koh Yoshikawa, Tetsutaro Imagawa, Masaki Koyama, Makoto Asai
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Patent number: 11742206Abstract: A laterally diffused metal oxide semiconductor device can include: a well region having a second doping type; a reduced surface field effect layer of a first doping type formed by an implantation process in a predetermined region of the well region, where a length of the reduced surface field effect layer is less than a length of the well region; a body region of the first doping type extending from a top surface of the well region into the well region; a drain portion of the second doping type extending from the top surface of the well region into the well region; and an insulating structure located between the body region and the drain portion, at least a portion of the insulating structure is located on the top surface of the well region.Type: GrantFiled: March 5, 2021Date of Patent: August 29, 2023Assignee: Silergy Semiconductor Technology (Hangzhou) LTDInventors: Budong You, Hui Yu, Meng Wang, Yicheng Du, Chuan Peng, Xunyi Song
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Patent number: 11728422Abstract: A power MOSFET device includes an active area accommodating a first body region and a second body region having a first and, respectively, a second conductivity value. The second value is higher than the first value. A first channel region is disposed in the first body region between a first source region and a drain region, and the first channel region has and having a first channel length. A second channel region is disposed in the second body region between a second source region and the drain region, and the second channel region has and having a second channel length smaller than the first channel length. A first device portion, having a first threshold voltage, includes the first channel region, and a second device portion, having a second threshold voltage higher than the first threshold voltage, includes the second channel region.Type: GrantFiled: November 12, 2020Date of Patent: August 15, 2023Assignee: STMicroelectronics S.r.l.Inventors: Angelo Magri', Stefania Fortuna
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Patent number: 11699764Abstract: A semiconductor device includes: a semiconductor layer of a first conductivity-type; a well region of a second conductivity-type provided at an upper part of the semiconductor layer; a base region of the second conductivity-type provided at an upper part of the well region; a carrier supply region of the first conductivity-type provided at an upper part of the base region; a drift region of the first conductivity-type provided separately from the base region; a carrier reception region of the first conductivity-type provided at an upper part of the drift region; a gate electrode provided on a top surface of the well region interposed between the base region and the drift region via a gate insulating film; and a punch-through prevention region of the second conductivity-type provided at the upper part of the well region and having an impurity concentration different from the impurity concentration of the base region.Type: GrantFiled: January 31, 2022Date of Patent: July 11, 2023Assignee: FUJI ELECTRIC CO., LTD.Inventors: Kazumi Takagiwa, Hitoshi Sumida
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Patent number: 11688765Abstract: According to one embodiment, a semiconductor device includes first and second electrodes, first to fifth semiconductor regions, and a gate electrode. The first semiconductor region is provided on the first electrode, and electrically connected to the first electrode. The second semiconductor region is provided on a part of the first semiconductor region. The third semiconductor region is provided on another part of the first semiconductor region. The third semiconductor region includes first and second regions. The fourth semiconductor region is provided on the second semiconductor region. The fifth semiconductor region is provided on a part of the fourth semiconductor region. The gate electrode faces the fourth semiconductor region with a gate insulating layer interposed between the gate electrode and the fourth semiconductor region. The second electrode is provided on the fourth and fifth semiconductor regions. The second electrode is electrically connected to the fourth and fifth semiconductor regions.Type: GrantFiled: March 11, 2021Date of Patent: June 27, 2023Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventor: Yuhki Fujino
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Patent number: 11670634Abstract: There are provided a transistor including a first semiconductor layer of a first conductivity type, a second semiconductor layer thereabove, a first impurity region of a second conductivity type provided in an upper layer part of the second semiconductor layer, a second impurity region of a first conductivity type provided in an upper layer part of the first impurity region, a gate electrode facing the first impurity region and the second semiconductor layer with a gate insulating film interposed in between, and first and second main electrodes; a parasitic transistor with the second impurity region as a collector, the first and the second semiconductor layers as an emitter, and the first impurity region as a base; a parasitic diode with the first impurity region as an anode, and the first and the second semiconductor layers as a cathode; and a pn junction diode with the first impurity region as an anode, and the second impurity region as a cathode.Type: GrantFiled: January 7, 2020Date of Patent: June 6, 2023Assignee: Mitsubishi Electric CorporationInventor: Tomohide Terashima
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Patent number: 11652167Abstract: A power semiconductor device may include a junction termination region, bounded by a side edge of a semiconductor substrate. The junction termination region may include a substrate layer of a first dopant type, a well layer of a second dopant type, a conductive trench assembly having a first set of conductive trenches, in the junction termination region, and extending from above the substrate layer through the well layer; and a metal layer, electrically connecting the conductive trench assembly to the well layer. The metal layer may include a set of inner metal contacts, electrically connecting a set of inner regions of the well layer to a first set of trenches of the conductive trench assembly; and an outer metal contact, electrically connecting an outer region of the well layer to a second set of conductive trenches of the conductive trench assembly, wherein the outer region borders the side edge.Type: GrantFiled: February 24, 2022Date of Patent: May 16, 2023Assignee: Littelfuse, Inc.Inventor: Kyoung Wook Seok
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Patent number: 11652137Abstract: A semiconductor device includes transistor cells formed along a first surface at a front side of a semiconductor body and having body regions of a first conductivity type, a drift region of a second conductivity type that is opposite from the first conductivity type and is disposed between the body regions and a second surface of the semiconductor body that is opposite from the first surface, and an emitter layer of the second conductivity type that is disposed between the drift region and a second surface of the semiconductor body, the emitter layer having a higher dopant concentration than the drift region, a metal drain electrode directly adjoining the emitter layer. The metal drain electrode comprises spikes extending into the emitter layer.Type: GrantFiled: August 20, 2020Date of Patent: May 16, 2023Assignee: Infineon Technologies Austria AGInventors: Enrique Vecino Vazquez, Franz Hirler, Manfred Pippan, Daniel Pobig, Patrick Schindler
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Patent number: 11652138Abstract: A method for producing a semiconductor device includes forming transistor cells in a semiconductor body, each cell including a drift region separated from a source region by a body region, a gate electrode dielectrically insulated from the body region, and a compensation region of a doping type complementary to the doping type of the drift region and extending from a respective body region into the drift region in a vertical direction. Forming the drift and compensation regions includes performing a first implantation step, thereby implanting first and second type dopant atoms into the semiconductor body, wherein an implantation dose of at least one of the first type dopant atoms and the second type dopant atoms for each of at least two sections of the semiconductor body differs from the implantation dose of the corresponding type of dopant atoms of at least one other section of the at least two sections.Type: GrantFiled: May 26, 2021Date of Patent: May 16, 2023Assignee: Infineon Technologies Austria AGInventors: Ingo Muri, Felix Schubert, Daniel Tutuc, Hans Weber
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Patent number: 11610779Abstract: An ion implanted region is formed by implanting Mg ions into a predetermined region of the surface of the first p-type layer. Subsequently, a second n-type layer is formed on the first p-type layer and the ion implanted region. A trench is formed by dry etching a predetermined region of the surface of the second n-type layer until reaching the first n-type layer. Next, heat treatment is performed to diffuse Mg. Thus, a p-type impurity region is formed in a region with a predetermined depth from the surface of the first n-type layer below the ion implanted region. Since the trench is formed before the heat treatment, Mg is not diffused laterally beyond the trench. Therefore, the width of the p-type impurity region is almost the same as the width of the first p-type layer divided by the trench.Type: GrantFiled: January 26, 2021Date of Patent: March 21, 2023Assignee: TOYODA GOSEI CO., LTD.Inventors: Kota Yasunishi, Yukihisa Ueno