Characterized By Configuration Of Gate Stack Of Thin Film Fets (epo) Patents (Class 257/E29.137)
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Patent number: 8120039Abstract: In a semiconductor device, typically an active matrix display device, the structure of TFTs arranged in the respective circuits are made suitable in accordance with the function of the circuit, and along with improving the operating characteristics and the reliability of the semiconductor device, the manufacturing cost is reduced and the yield is increased by reducing the number of process steps.Type: GrantFiled: July 13, 2009Date of Patent: February 21, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Koji Ono, Hideomi Suzawa, Tatsuya Arao
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Patent number: 8093585Abstract: Each TFT for driving each of a plurality of pixels arranged in a matrix-like configuration is configured using a stagger-type polycrystalline-Si TFT. A gate electrode, which is composed of a high-heat-resistant material capable of resisting high temperature at the time of polycrystalline-Si film formation, is disposed at a lower layer as compared with the polycrystalline-Si layer that forms a channel of each TFT. A gate line, which is composed of a low-resistance material, is disposed at an upper layer as compared with the polycrystalline-Si layer. The gate electrode and the gate line are connected to each other via a through-hole bored in a gate insulation film. Respective configuration components of each organic electro-luminescent element are partially co-used at the time of the line formation, thereby suppressing an increase in the steps, processes, and configuration components.Type: GrantFiled: November 21, 2008Date of Patent: January 10, 2012Assignee: Hitachi, Ltd.Inventors: Etsuko Nishimura, Masatoshi Wakagi, Kenichi Onisawa, Mieko Matsumura
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Patent number: 8049218Abstract: A TFT LCD array substrate and a manufacturing method thereof. The TFT LCD array substrate comprises a substrate. A gate line and a gate electrode that is formed integrally with the gate line are formed on the substrate. A first insulating layer and a semiconductor layer are formed sequentially on the gate line and the gate electrode. A second insulting layer covers sidewalls of the gate line and the gate electrode, the first insulating layer, and the semiconductor layer. An etching stop layer is formed on the semiconductor layer and exposes a part of the semiconductor layer on both sides of the etching stop layer. The TFT LCD of the present invention can be manufactured with a four-mask process.Type: GrantFiled: July 6, 2010Date of Patent: November 1, 2011Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.Inventors: Zhangtao Wang, Haijun Qiu, Tae Yup Min, Seung Moo Rim
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Patent number: 8049275Abstract: There is provided a thin film transistor having improved reliability. A gate electrode includes a first gate electrode having a taper portion and a second gate electrode with a width narrower than the first gate electrode. A semiconductor layer is doped with phosphorus of a low concentration through the first gate electrode. In the semiconductor layer, two kinds of n?-type impurity regions are formed between a channel formation region and n+-type impurity regions. Some of the n?-type impurity regions overlap with a gate electrode, and the other n?-type impurity regions do not overlap with the gate electrode. Since the two kinds of n?-type impurity regions are formed, an off current can be reduced, and deterioration of characteristics can be suppressed.Type: GrantFiled: October 31, 2005Date of Patent: November 1, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8021935Abstract: A fabrication process for a device such as a backplane for a flat panel display includes depositing thin film layers on a substrate, forming a 3D template overlying the thin film layers, and etching the 3D template and the thin film layers to form gate lines and transistors from the thin film layers. An insulating or passivation layer can then be deposited on the gate lines and the transistors, so that column or data lines can be formed on the insulating layer.Type: GrantFiled: October 1, 2008Date of Patent: September 20, 2011Assignee: Hewlett-Packard Development Company, L.P.Inventors: Ping Mei, Hao Luo, Albert Hua Jeans, Angeles Marcia Almanza-Workman, Robert A. Garcia, Warren Jackson, Carl P. Taussig, Craig M. Perlov
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Patent number: 8013327Abstract: A thin-film transistor includes an insulating substrate, a source electrode, and a drain electrode, disposed over the top of the insulating substrate, a semiconductor layer electrically continuous with the source electrode, and the drain electrode, respectively, a gate dielectric film formed over the top of at least the semiconductor layer; and a gate electrode disposed over the top of the gate dielectric film so as to overlap the semiconductor layer. Further, a first bank insulator is formed so as to overlie the source electrode, a second bank insulator is formed so as to overlie the drain electrode, and the semiconductor layer, the gate dielectric film, and the gate electrode are embedded in a region between the first bank insulator, and the second bank insulator.Type: GrantFiled: April 24, 2009Date of Patent: September 6, 2011Assignee: Hitachi, Ltd.Inventors: Masahiro Kawasaki, Masaaki Fujimori, Takeo Shiba, Shuji Imazeki, Tadashi Arai
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Patent number: 7999321Abstract: A field-effect transistor comprising a movable gate electrode that suppresses a leakage current from the gate electrode, and has a large current drivability and a low leakage current between a source and a drain. The field-effect transistor comprises: an insulating substrate; a semiconductor layer of triangle cross-sectional shape formed on the insulating substrate, having a gate insulation film on a surface, and forming a channel in a lateral direction; fixed electrodes that are arranged adjacent to both sides of the semiconductor layer and in parallel to the semiconductor layer, each of the electrodes having an insulation film on a surface; a source/drain formed at the end part of the semiconductor layer; and the movable gate electrode formed above the semiconductor layer and the fixed electrodes with a gap.Type: GrantFiled: May 9, 2008Date of Patent: August 16, 2011Assignee: National Institute of Advanced Industrial Science and TechnologyInventors: Yongxun Liu, Takashi Matsukawa, Meishoku Masahara, Kazuhiko Endo, Shinichi Ouchi
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Patent number: 7989898Abstract: A dual workfunction semiconductor device and a device made thereof is disclosed. In one aspect, the device includes a first gate stack in a first region and a second gate stack in a second region. The first gate stack has a first effective workfunction, and the second gate stack has a second effective workfunction different from the first effective workfunction. The first gate stack includes a first gate dielectric capping layer, a gate dielectric host layer, a first metal gate electrode layer, a barrier metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode. The second gate stack includes a gate dielectric host layer, a first metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode.Type: GrantFiled: April 22, 2009Date of Patent: August 2, 2011Assignees: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shou-Zen Chang, HongYu Yu
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Patent number: 7977174Abstract: Methods for fabricating FinFET structures with stress-inducing source/drain-forming spacers and FinFET structures having such spacers are provided herein. In one embodiment, a method for fabricating a FinFET structure comprises fabricating a plurality of parallel fins overlying a semiconductor substrate. Each of the fins has sidewalls. A gate structure is fabricated overlying a portion of each of the fins. The gate structure has sidewalls and overlies channels within the fins. Stress-inducing sidewall spacers are formed about the sidewalls of the fins and the sidewalls of the gate structure. The stress-inducing sidewall spacers induce a stress within the channels. First conductivity-determining ions are implanted into the fins using the stress-inducing sidewall spacers and the gate structure as an implantation mask to form source and drain regions within the fins.Type: GrantFiled: June 8, 2009Date of Patent: July 12, 2011Assignee: Globalfoundries Inc.Inventors: Scott Luning, Frank Scott Johnson, Michael J. Hargrove
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Patent number: 7964459Abstract: A method for creating a non-volatile memory array includes implanting pocket implants in a substrate at least between mask columns of a given width and at least through an ONO layer covering the substrate, generating increased-width polysilicon columns from the mask columns, generating bit lines in the substrate at least between the increased-width polysilicon columns and depositing oxide at least between the polysilicon columns.Type: GrantFiled: December 10, 2009Date of Patent: June 21, 2011Assignee: Spansion Israel Ltd.Inventors: Eli Lusky, Assaf Shappir, Rustom Irani, Boaz Eitan
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Patent number: 7928013Abstract: A rework method of a gate insulating layer of a thin film transistor includes the following steps. First, a substrate including a silicon nitride layer, which serves as a gate insulating layer, disposed thereon. Subsequently, a first film removal process is performed to remove the silicon nitride layer. The first film removal process includes an inductively coupled plasma (ICP) etching process. The ICP etching process is carried out by introducing gases including sulfur hexafluoride and oxygen. The ICP etching process has an etching selectivity ratio of the silicon nitride layer to the substrate, which is substantially between 18 and 30.Type: GrantFiled: December 1, 2009Date of Patent: April 19, 2011Assignee: AU Optronics Corp.Inventors: Chia-Hsu Chang, Pei-Yu Chen
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Patent number: 7915101Abstract: Thin film transistors and organic light emitting displays using the same are provided. The thin film transistor may include a substrate, a semiconductor layer, a gate electrode, and source/drain electrodes on the substrate. The semiconductor layer is composed of a P-type semiconductor layer obtained by diffusing phosphorus into a zinc oxide semiconductor. The phosphorus is doped in the semiconductor layer to a concentration ranging from about 1×1014 to about 1×1018 cm?3.Type: GrantFiled: May 9, 2008Date of Patent: March 29, 2011Assignee: Samsung Mobile Display Co., Ltd.Inventors: Jae-kyeong Jeong, Yeon-gon Mo, Jin-seong Park, Hyun-soo Shin, Hun-jung Lee, Jong-han Jeong
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Patent number: 7906814Abstract: Provided is a fin field effect transistor (FinFET) having low leakage current and a method of manufacturing the same. The FinFET includes: a bulk silicon substrate; a fence-shaped body formed by patterning the substrate; an insulating layer formed on a surface of the substrate to a first height of the fence-shaped body; a gate insulating layer formed at side walls and an upper surface of the fence-shaped body at which the insulating layer is not formed; a gate electrode formed on the gate insulating layer; source/drain formed at regions of the fence-shaped body where the gate electrode is not formed. The gate electrode includes first and second gate electrodes which are in contact with each other and have different work functions. Particularly, the second gate electrode having a low work function is disposed to be close to the drain.Type: GrantFiled: August 27, 2007Date of Patent: March 15, 2011Assignee: SNU R&DB FoundationInventor: Jong Ho Lee
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Patent number: 7902002Abstract: When a semi-conductor film is irradiated with conventional pulsed laser light, unevenness, which is called as ridge, is caused on the surface of the semiconductor film. In the case of a top-gate type TFT, element characteristics are changed depending on the ridge. In particular, there is a problem in that variation in the plural thin film transistors electrically connected in parallel with one another. According to the present invention, in manufacturing a circuit including plural thin film transistors, the width LP of a region (not including a microcrystal region) that is melted by irradiating a semiconductor film with light of a continuous wave laser is enlarged, and active layers of a plurality of thin film transistors (that are electrically connected in parallel with one another) are arranged in one region.Type: GrantFiled: July 25, 2005Date of Patent: March 8, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Koichiro Tanaka
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Patent number: 7888169Abstract: A low-cost and efficient process producing improved organic electronic devices such as transistors that may be used in a variety of applications is described. The applications may include radio frequency identification (RFID) devices, displays and the like. In one embodiment, the improved process is implemented by flash annealing a substrate with an energy having wavelengths ranging from about 250 nm to about 1100 nm or higher. In this flash annealing process energy having wavelengths from about 250 nm to about 350 nm or higher is substantially prevented from irradiating the substrate.Type: GrantFiled: December 26, 2007Date of Patent: February 15, 2011Assignee: Organicid, Inc.Inventors: Siddharth Mohapatra, Robert P. Wenz
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Patent number: 7855380Abstract: The invention primarily provides gate electrodes and gate wirings permitting large-sized screens for active matrix-type display devices, wherein, in order to achieve this object, the construction of the invention is a semiconductor device having, on the same substrate, a pixel TFT provided in a display region and a driver circuit TFT provided around the display region, wherein the gate electrodes of the pixel TFT and the driver circuit TFT are formed from a first conductive layer, the gate electrodes are in electrical contact through connectors with gate wirings formed from a second conductive layer, and the connectors are provided outside the channel-forming regions of the pixel TFT and the driver circuit TFT.Type: GrantFiled: July 14, 2006Date of Patent: December 21, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama, Toru Takayama, Toshiji Hamatani
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Patent number: 7847367Abstract: An integrated circuit device includes an integrated circuit substrate and a first gate pattern on the substrate. A non-conductive barrier layer pattern is on the first gate pattern. The barrier layer pattern has openings at selected locations therein extending to the first gate pattern. A second gate pattern is on the barrier layer pattern and extends into the opening in the barrier layer pattern to electrically connect the second gate pattern to the first gate pattern.Type: GrantFiled: November 15, 2007Date of Patent: December 7, 2010Assignee: Samsung Electronics Co., Ltd.Inventor: Dae-Ik Kim
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Patent number: 7834417Abstract: An antifuse element (102, 152, 252, 302, 352, 402, 602, 652, 702) includes a substrate material (101) having an active area (106) formed in an upper surface, a gate electrode (104) having at least a portion positioned above the active area (106), and a gate oxide layer (110) disposed between the gate electrode (104) and the active area (106). The gate oxide layer (110) includes one of a gate oxide dip (128) or a gate oxide undercut (614). During operation a voltage applied between the gate electrode (104) and the active area (106) creates a current path through the gate oxide layer (110) and a rupture of the gate oxide layer (110) in a rupture region (130). The rupture region (130) is defined by the oxide structure and the gate oxide dip (128) or the gate oxide undercut (614).Type: GrantFiled: March 27, 2009Date of Patent: November 16, 2010Assignee: Freescale Semiconductor, Inc.Inventors: Won Gi Min, Robert W. Baird, Gordon P. Lee, Jiang-Kai Zuo
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Patent number: 7834358Abstract: Basic logic gates are formed in a small area, and a highly integrated and microscopic structure is provided. In an nMOSFET and a pMOSFET, gate electrodes are formed facing each other and sandwiching a semiconductor region via gate insulting layers. Respective drain regions of the nMOSFET and the pMOSFET are connected to each other. A high potential is applied to a source region of the pMOSFET while an intermediate potential between the high and a low potential is applied to a source region of the nMOSFET. As a result, a NAND gate is provided. The intermediate potential between the high and the low potential is applied to the source region of the pMOSFET. The low potential is applied to the source region of the nMOSFET. As a result, a NOR gate is provided.Type: GrantFiled: January 7, 2009Date of Patent: November 16, 2010Assignee: Kabushik Kaisha ToshibaInventor: Kazuya Matsuzawa
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Thin film transistor having a three-portion gate electrode and liquid crystal display using the same
Patent number: 7791076Abstract: A thin film transistor and a liquid crystal display, in which a gate electrode is formed to include at least one portion extending in a direction perpendicular to a gain growing direction in order to make electrical charge mobility of TFTs uniform without increasing the size of the driving circuit. A thin film transistor according to the present invention includes a semiconductor pattern a thin film of poly-crystalline silicon containing grown grains on the insulating substrate. The semiconductor pattern includes a channel region and source and drain regions opposite with respect to the channel region. A gate insulating layer covers the semiconductor pattern. On the gate insulating layer, a gate electrode including at least one portion extending in a direction crossing the growing direction of the grains and overlapping the channel region is formed.Type: GrantFiled: May 20, 2009Date of Patent: September 7, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Myung-Koo Kang, Hyun-Jae Kim, Sook-Young Kang, Woo-Suk Chung -
Patent number: 7763490Abstract: A stagger type thin film transistor substrate in which each of a source and a drain of a thin film transistor has a laminated structure including a silicon semiconductor layer, a silicon semiconductor layer containing impurities, and a metal layer formed in that order and in which a gate insulator of the thin film transistor is formed on the source and the drain. A pixel electrode is connected to the source via a contact hole made in the gate insulator on the source. Additionally, a gate electrode of the thin film transistor formed on the gate insulator has a laminated structure including two layers of different electrode materials. Finally, the pixel electrode connected to the source is made of an electrode material used in a lower layer of the gate electrode.Type: GrantFiled: July 10, 2007Date of Patent: July 27, 2010Assignee: Sharp Kabushiki KaishaInventor: Yoshio Dejima
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Patent number: 7745824Abstract: In a semiconductor device and a method of manufacturing the semiconductor device, the source wires 126 of a pixel portion 205 are formed of material having low resistance (representatively, aluminum, silver, copper). The source wires of a driving circuit are formed in the same process as the gate wires 162 of the pixel portion and a pixel electrode 163.Type: GrantFiled: December 27, 2006Date of Patent: June 29, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Jun Koyama
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Patent number: 7714367Abstract: A semiconductor device of which manufacturing steps can be simplified by doping impurities at a time, and a manufacturing method thereof.Type: GrantFiled: March 30, 2007Date of Patent: May 11, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Saishi Fujikawa, Etsuko Asano, Tatsuya Arao, Takashi Yokoshima, Takuya Matsuo, Hidehito Kitakado
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Patent number: 7709886Abstract: A fabricating method of a TFT includes first forming a source on a substrate. Then, a first insulation pattern layer is formed to cover parts of the source and the substrate. The first insulation pattern layer has an opening exposing a part of the source. Thereafter, a gate pattern layer is formed on the first insulation pattern layer. Then, the gate pattern layer and a second insulation pattern layer formed thereon surround the opening. Moreover, a second lateral protection wall is formed on an edge of the gate pattern layer in the opening. Afterwards, a channel layer is formed in the opening and covers the second lateral protection wall and the source. Then, a passivation layer with a contact window is formed on the channel layer and the second insulation pattern layer to expose a portion of the channel layer. Thereafter, a drain is formed on the exposed channel layer.Type: GrantFiled: December 4, 2007Date of Patent: May 4, 2010Assignee: Au Optronics CorporationInventors: Wei-Hsiang Lo, Hao-Chieh Lee
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Patent number: 7709303Abstract: A process for forming an electronic device can include forming a semiconductor fin of a first height for a fin-type structure and removing a portion of the semiconductor fin such that the semiconductor fin is shortened to a second height. In accordance with specific embodiment a second semiconductor fin can be formed, each of the first and the second semiconductor fins having a different height representing a channel width. In accordance with another specific embodiment a second and a third semiconductor fin can be formed, each of the first, the second and the third semiconductor fins having a different height representing a channel width.Type: GrantFiled: January 10, 2006Date of Patent: May 4, 2010Assignee: Freescale Semiconductor, Inc.Inventors: James D. Burnett, Leo Mathew, Byoung W. Min
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Patent number: 7696038Abstract: Methods for fabricating flash memory devices are provided. In accordance with an exemplary embodiment of the invention, a method for fabricating a memory device comprises forming a first gate stack and a second gate stack overlying a substrate. A trench is etched into the substrate between the first gate stack and the second gate stack. A first impurity doped region is formed within the substrate underlying the trench.Type: GrantFiled: April 26, 2006Date of Patent: April 13, 2010Assignee: Spansion LLCInventors: Ning Cheng, Kuo-Tung Chang, Hiroyuki Kinoshita, Timothy Thurgate, Wei Zheng, Ashot Melik-Martirosian, Angela Hui, Chih-Yuh Yang
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Patent number: 7692246Abstract: The present invention provides a FinFET transistor arrangement produced using a method with the steps: providing a substrate (106, 108); forming an active region (1) on the substrate a fin-like channel region (113b?; 113b?). Formation of the fin-like channel region (113b?; 113b?) has the following steps: forming a hard mask (S1-S4) on the active region (1); anisotropic etching of the active region (1) using the hard mask (S1-S4) forming STI trenches (G1-G5) having an STI oxide filling (9); polishing-back of the STI oxide filling (9); etching-back of the polished-back STI oxide filling (9); selective removal of components of the hard mask forming a modified hard mask (S1?-S4?); anisotropic etching of the active region (1) using the modified hard mask (S1?-S4?) forming widened STI trenches (G1?-G5?), the fin-like channel regions (113b?; 113b?) of the active region (1) remaining for each individual FinFET transistor.Type: GrantFiled: January 4, 2007Date of Patent: April 6, 2010Assignee: Infineon Technologies AGInventors: Lars Dreeskornfeld, Franz Hofmann, Johannes Richard Luyken, Michael Specht
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Patent number: 7638850Abstract: A method for creating a non-volatile memory array includes implanting pocket implants in a substrate at least between mask columns of a given width and at least through an ONO layer covering the substrate, generating increased-width polysilicon columns from the mask columns, generating bit lines in the substrate at least between the increased-width polysilicon columns and depositing oxide at least between the polysilicon columns.Type: GrantFiled: May 24, 2006Date of Patent: December 29, 2009Assignee: Saifun Semiconductors Ltd.Inventors: Eli Lusky, Assaf Shappir, Rustom Irani, Boaz Eitan
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Patent number: 7635867Abstract: A nanotube array and a method for producing a nanotube array. The nanotube array has a substrate, a catalyst layer, which includes one or more subregions, on the surface of the substrate and at least one nanotube arranged on the surface of the catalyst layer, parallel to the surface of the substrate. The at least one nanotube being arranged parallel to the surface of the substrate results in a planar arrangement of at least one nanotube. Therefore, the nanotube array of the invention is suitable for coupling to conventional silicon microelectronics. Therefore, according to the invention it is possible for a nanotube array to be electronically coupled to macroscopic semiconductor electronics. Furthermore, the nanotube array according to the invention may have an electrically insulating layer between the substrate and the catalyst layer.Type: GrantFiled: May 16, 2002Date of Patent: December 22, 2009Assignee: Infineon Technologies AGInventors: Andrew Graham, Franz Hofmann, Johannes Kretz, Franz Kreupl, Richard Luyken, Wolfgang Rösner
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Publication number: 20090256469Abstract: A thin film transistor, a method of fabricating the same, and an OLED display device having the same. The thin film transistor includes a substrate, a semiconductor layer disposed on the substrate and having a channel region, source and drain regions, and a body contact region, a gate insulating layer disposed on the semiconductor layer to expose the body contact region, a silicon layer disposed on the gate insulating layer and contacting the body contact region exposed by the gate insulating layer, a gate electrode disposed on the silicon layer, an interlayer insulating layer disposed on the gate electrode, and source and drain electrodes disposed on the interlayer insulating layer and electrically connected with the source and drain regions, wherein the body contact region is formed in an edge region of the semiconductor layer.Type: ApplicationFiled: March 17, 2009Publication date: October 15, 2009Applicant: Samsung Mobile Display Co., Ltd.Inventors: Byoung-Keon Park, Jin-Wook Seo, Tae-Hoon Yang, Kil-Won Lee, Dong-Hyun Lee
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Publication number: 20090242985Abstract: A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed between a gate electrode and an outer portion of an active region of a FET. Also provided is a structure having a high-leakage dielectric formed between the gate electrode and the active region of the FET and a method of manufacturing such structure.Type: ApplicationFiled: March 26, 2008Publication date: October 1, 2009Inventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20090200609Abstract: The invention provides, as an aspect thereof, a semiconductor device that includes: a substrate; an underlying insulation film that is formed over the substrate; and a plurality of thin-film transistors that is formed over the underlying insulation film, each of the plurality of thin-film transistors having a semiconductor film, wherein the underlying insulation film is formed in separate areas each of which includes, when viewed in plan, at least one of the plurality of semiconductor films.Type: ApplicationFiled: December 11, 2008Publication date: August 13, 2009Applicant: SEIKO EPSON CORPORATIONInventors: Mitsutoshi MIYASAKA, Atsushi MIYAZAKI
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Patent number: 7566904Abstract: A thin film transistor has a semiconductor thin film including zinc oxide, a protection film formed on entirely the upper surface of the semiconductor thin film, a gate insulating film formed on the protection film, a gate electrode formed on the gate insulating film above the semiconductor thin film, and a source electrode and drain electrode formed under the semiconductor thin film so as to be electrically connected to the semiconductor thin film.Type: GrantFiled: June 7, 2006Date of Patent: July 28, 2009Assignee: Casio Computer Co., Ltd.Inventor: Hiromitsu Ishii
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Patent number: 7564059Abstract: In order to realize a higher reliability TFT and a high reliability semiconductor device, an NTFT of the present invention has a channel forming region, n-type first, second, and third impurity regions in a semiconductor layer. The second impurity region is a low concentration impurity region that overlaps a tapered potion of a gate electrode with a gate insulating film interposed therebetween, and the impurity concentration of the second impurity region increases gradually from the channel forming region to the first impurity region. And, the third impurity region is a low concentration impurity region that does not overlap the gate electrode. Moreover, a plurality of NTFTs on the same substrate should have different second impurity region lengths, respectively, according to difference of the operating voltages.Type: GrantFiled: September 26, 2005Date of Patent: July 21, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 7560734Abstract: In a semiconductor device, typically an active matrix display device, the structure of TFTs arranged in the respective circuits are made suitable in accordance with the function of the circuit, and along with improving the operating characteristics and the reliability of the semiconductor device, the manufacturing cost is reduced and the yield is increased by reducing the number of process steps.Type: GrantFiled: December 19, 2005Date of Patent: July 14, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Koji Ono, Hideomi Suzawa, Tatsuya Arao
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Patent number: 7554140Abstract: Provided is a NAND-type nonvolatile memory device and method of forming the same. In the method, a plurality of cell layers are stacked on a semiconductor substrate. Seed contact holes for forming a semiconductor pattern included in a stacked cell are formed at regular distance. At this time, the seed contact holes are arranged such that a bit line plug or a source line pattern is disposed at a center between one pair of seed contact holes adjacent to each other.Type: GrantFiled: January 10, 2007Date of Patent: June 30, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Hoo-Sung Cho, Soon-Moon Jung, Won-Seok Cho, Jong-Hyuk Kim, Jae-Hun Jeong, Jae-Hoon Jang
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Patent number: 7537985Abstract: A double-gated fin-type field effect transistor (FinFET) structure has electrically isolated gates. In a method for manufacturing the FinFET structure, a fin, having a gate dielectric on each sidewall corresponding to the central channel region, is formed over a buried oxide (BOX) layer on a substrate. Independent first and second gate conductors on either sidewall of the fin are formed and include symmetric multiple layers of conductive material. An insulator is formed above the fin by either oxidizing conductive material deposited on the fin or by removing conductive material deposited on the fin and filling in the resulting space with an insulating material. An insulating layer is deposited over the gate conductors and the insulator. A first gate contact opening is etched in the insulating layer above the first gate. A second gate contact opening is etched in the BOX layer below the second gate.Type: GrantFiled: July 31, 2007Date of Patent: May 26, 2009Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Patent number: 7535024Abstract: The present invention provides a fabrication method of a display device which aims at the reduction of fabricating man-hours.Type: GrantFiled: November 16, 2006Date of Patent: May 19, 2009Assignee: Hitachi Displays, Ltd.Inventors: Eiji Oue, Toshihiko Itoga, Toshiki Kaneko, Daisuke Sonoda, Takeshi Kuriyagawa
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Patent number: 7521717Abstract: A thin film transistor, a flat panel display device including the same, and a method of fabricating the same. An uneven structure is formed at a part of a polycrystalline silicon layer pattern corresponding to a channel region to form a channel length at the edge of the channel region longer than a main channel length, so that a resistance at the edge of the channel region increases to cause an amount of current flowing through the edge of the channel region to decrease, thereby enhancing the reliability of a circuit at low voltage driving.Type: GrantFiled: March 29, 2006Date of Patent: April 21, 2009Assignee: Samsung Mobile Display Co., Ltd.Inventor: Eui-Hoon Hwang
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Publication number: 20090057746Abstract: A semiconductor device having a passive element whose characteristic is adjustable even after manufacture by applying back bias voltage is provided. Formed on a main surface of a SOI substrate comprising a supporting substrate, a BOX layer, and an SOI layer is a MOS varactor comprising a gate dielectric formed on a surface of the SOI layer, a gate electrode formed on the gate dielectric, and a n+ type semiconductor region formed in the SOI layer located on both sides of the gate electrode. The MOS varactor, is configured so that capacitance formed by the SOI layer, gate dielectric, and gate electrode is varied by applying bias voltage to the supporting substrate (p type well) under the gate electrode.Type: ApplicationFiled: August 7, 2008Publication date: March 5, 2009Inventors: Nobuyuki Sugll, Ryuta Tsuchiya, Shinichiro Kimura
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Patent number: 7482663Abstract: A semiconductor circuit arrangement includes at least one first and a second field effect transistor, where the field effect respectively have at least two active regions with, respectively, a source region, a drain region and an intermediate channel region, the surface of the channel regions having a gate formed on it, insulated by a gate dielectric, for actuating the channeel regions. At least one active region of the second field effect transistor is arranged between the at least two active regions of the first field effect transistor, which results in a reduced mismatch between the two transistors, caused by temperature and local distances.Type: GrantFiled: January 16, 2007Date of Patent: January 27, 2009Assignee: Infineon Technologies AGInventors: Gerhard Knoblinger, Klaus Von Arnim
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Patent number: 7474002Abstract: In the semiconductor device having a structure in which a plurality of layers are built-up by layers made of different materials or layers including various formed patterns, it is an object to provide a method which smoothing surface can be achieved without a polishing treatment by CMP method or a smoothing process by depositing a SOG film, a substrate material is not chosen, and the smoothing is simple and easy. In the semiconductor device in which a plurality of different layers are formed, smoothing surface can be achieved without the polishing treatment by the CMP method or the smoothing process by depositing the SOG film to a dielectric film formed on a dielectric film and a wring (electrode) or a semiconductor layer in a manner that an aperture portion is formed in the dielectric film, the wring (electrode) or the semiconductor layer is formed in the aperture portion.Type: GrantFiled: October 17, 2002Date of Patent: January 6, 2009Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Akira Ishikawa
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Patent number: 7470572Abstract: A manufacturing method and the structure of a thin film transistor liquid crystal display (TFT-LCD) are disclosed. The TFT-LCD uses metal electrodes as a mask to thoroughly remove the unwanted semiconductor layer during the etching process for forming the source and drain electrodes. This manufacturing method can reduce the problems caused by the unwanted semiconductor layer, hence improving the quality of the TFT.Type: GrantFiled: April 29, 2008Date of Patent: December 30, 2008Assignee: Au Optronics CorporationInventor: Jia-Fam Wong
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Patent number: 7456055Abstract: An electronic device can include a base layer, a semiconductor layer, and a first semiconductor fin spaced apart from and overlying a semiconductor layer. In a particular embodiment, a second semiconductor fin can include a portion of the semiconductor layer. In another aspect, a process of forming an electronic device can include providing a workpiece that includes a base layer, a first semiconductor layer that overlies and is spaced apart from a base layer, a second semiconductor layer that overlies, and an insulating layer lying between the first semiconductor layer and the second semiconductor layer. The process can also include removing a portion of the second semiconductor layer to form a first semiconductor fin, and forming a conductive member overlying the first semiconductor fin.Type: GrantFiled: March 15, 2006Date of Patent: November 25, 2008Assignee: Freescale Semiconductor, Inc.Inventors: Marius K. Orlowski, Suresh Venkatesan
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Patent number: 7453088Abstract: A semiconductor device that uses a high reliability TFT structure is provided. The gate electrode of an n-channel type TFT is formed by a first gate electrode and a second gate electrode that covers the first gate electrode. LDD regions have portions that overlap the second gate electrode through a gate insulating film, and portions that do not overlap. As a result, the TFT can be prevented from degradation in an ON state, and it is possible to reduce the leak current in an OFF state.Type: GrantFiled: January 18, 2007Date of Patent: November 18, 2008Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hisashi Ohtani, Setsuo Nakajima
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Patent number: 7445970Abstract: An exemplary photomask (150) has a slit. The slit has at least one turning region (D1) and at least one other regions, and the slit at the at least one turning region has a narrower width than the slit at the at least one other regions. An exemplary method for manufacturing a thin film transistor (TFT) using the photomask is also provided.Type: GrantFiled: October 12, 2006Date of Patent: November 4, 2008Assignee: Innolux Display Corp.Inventor: Chien-Ting Lai
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Patent number: 7439107Abstract: When the laser light is irradiated with high output in the manufacturing process for a semiconductor device, an attenuator is heated and cause a deformation due to the laser light scattered in the attenuator. As a result, the attenuation ratio of the attenuator fluctuates, and it is difficult to process the substrate with the homogeneous irradiation energy. It is a problem of the present invention to provide a laser irradiation apparatus, a method of irradiating laser light and a method of manufacturing a semiconductor device, which can perform the laser irradiation effectively and homogeneously. In the present invention, the thermal energy generated in an attenuator is absorbed by means of cooling in order to keep the temperature of the attenuator constant. By cooling the attenuator so as to prevent the change of the attenuation ratio, the function of the attenuator is protected. In addition, the energy fluctuation of the laser light irradiated on the substrate is also prevented.Type: GrantFiled: December 24, 2003Date of Patent: October 21, 2008Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hidekazu Miyairi, Akihisa Shimomura, Koichiro Tanaka, Koji Dairiki
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Publication number: 20080246090Abstract: A double-gate transistor having front (upper) and back gates that are aligned laterally is provided. The double-gate transistor includes a back gate thermal oxide layer below a device layer; a back gate electrode below a back gate thermal oxide layer; a front gate thermal oxide above the device layer; a front gate electrode layer above the front gate thermal oxide and vertically aligned with the back gate electrode; and a transistor body disposed above the back gate thermal oxide layer, symmetric with the first gate. The back gate electrode has a layer of oxide formed below the transistor body and on either side of a central portion of the back gate electrode, thereby positioning the back gate self-aligned with the front gate. The transistor also includes source and drain electrodes on opposite sides of said transistor body.Type: ApplicationFiled: May 13, 2008Publication date: October 9, 2008Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Omer H. Dokumaci, Bruce B. Doris, Kathryn W. Guarini, Suryanarayan G. Hegde, MeiKei Ieong, Erin Catherine Jones
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Patent number: 7417252Abstract: The present invention discloses a high-speed flat panel display with a long lifetime, wherein thin film transistors in a pixel array portion in which a plurality of pixels are arranged and a driving circuit portion for driving the pixels of the pixel array portion, have different resistance values than each other or have different geometric structures than each other. The flat panel display comprises a pixel array portion where a plurality of pixels are arranged, and a driving circuit portion for driving the pixels of the pixel array portion. The thin film transistors in the pixel array portion and the driving circuit portion have different resistance values in their gate regions or drain regions than each other, or have different geometric structures than each other. One of the thin film transistors in the pixel array portion and the thin film transistors in the driving circuit has zigzag shape in its gate region or drain region or has an offset region.Type: GrantFiled: April 14, 2004Date of Patent: August 26, 2008Assignee: Samsung SDI Co., Ltd.Inventors: Jae-Bon Koo, Ji-Yong Park, Sang-Il Park, Ki-Yong Lee, Ul-Ho Lee
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Patent number: RE41363Abstract: A TFT substrate includes a gate electrode and gate pad on a transparent substrate, an insulating layer on the gate electrode and exposing a portion of the gate pad, a semiconductor film on the insulating layer and the gate electrode, an impurity doped semiconductor film on the semiconductor film, the impurity doped semiconductor film contacting a top surface of the semiconductor film over the gate electrode, source and drain electrodes and a data line on a portion of the impurity doped semiconductor film, a protection film on the source and drain electrodes and the insulating layer in a gate pad area, the protection film having a contact hole over the drain electrode exposing a top surface of the gate pad, a first pixel electrode electrically connected to the drain electrode on the protection film, and a second pixel electrode directly connected to the exposed top surface of the gate pad.Type: GrantFiled: December 8, 2005Date of Patent: June 1, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Jueng-gil Lee, Jung-ho Lee, Hyo-rak Nam