Characterized By Configuration Of Gate Stack Of Thin Film Fets (epo) Patents (Class 257/E29.137)
  • Patent number: 8120039
    Abstract: In a semiconductor device, typically an active matrix display device, the structure of TFTs arranged in the respective circuits are made suitable in accordance with the function of the circuit, and along with improving the operating characteristics and the reliability of the semiconductor device, the manufacturing cost is reduced and the yield is increased by reducing the number of process steps.
    Type: Grant
    Filed: July 13, 2009
    Date of Patent: February 21, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Koji Ono, Hideomi Suzawa, Tatsuya Arao
  • Patent number: 8093585
    Abstract: Each TFT for driving each of a plurality of pixels arranged in a matrix-like configuration is configured using a stagger-type polycrystalline-Si TFT. A gate electrode, which is composed of a high-heat-resistant material capable of resisting high temperature at the time of polycrystalline-Si film formation, is disposed at a lower layer as compared with the polycrystalline-Si layer that forms a channel of each TFT. A gate line, which is composed of a low-resistance material, is disposed at an upper layer as compared with the polycrystalline-Si layer. The gate electrode and the gate line are connected to each other via a through-hole bored in a gate insulation film. Respective configuration components of each organic electro-luminescent element are partially co-used at the time of the line formation, thereby suppressing an increase in the steps, processes, and configuration components.
    Type: Grant
    Filed: November 21, 2008
    Date of Patent: January 10, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Etsuko Nishimura, Masatoshi Wakagi, Kenichi Onisawa, Mieko Matsumura
  • Patent number: 8049218
    Abstract: A TFT LCD array substrate and a manufacturing method thereof. The TFT LCD array substrate comprises a substrate. A gate line and a gate electrode that is formed integrally with the gate line are formed on the substrate. A first insulating layer and a semiconductor layer are formed sequentially on the gate line and the gate electrode. A second insulting layer covers sidewalls of the gate line and the gate electrode, the first insulating layer, and the semiconductor layer. An etching stop layer is formed on the semiconductor layer and exposes a part of the semiconductor layer on both sides of the etching stop layer. The TFT LCD of the present invention can be manufactured with a four-mask process.
    Type: Grant
    Filed: July 6, 2010
    Date of Patent: November 1, 2011
    Assignee: Beijing Boe Optoelectronics Technology Co., Ltd.
    Inventors: Zhangtao Wang, Haijun Qiu, Tae Yup Min, Seung Moo Rim
  • Patent number: 8049275
    Abstract: There is provided a thin film transistor having improved reliability. A gate electrode includes a first gate electrode having a taper portion and a second gate electrode with a width narrower than the first gate electrode. A semiconductor layer is doped with phosphorus of a low concentration through the first gate electrode. In the semiconductor layer, two kinds of n?-type impurity regions are formed between a channel formation region and n+-type impurity regions. Some of the n?-type impurity regions overlap with a gate electrode, and the other n?-type impurity regions do not overlap with the gate electrode. Since the two kinds of n?-type impurity regions are formed, an off current can be reduced, and deterioration of characteristics can be suppressed.
    Type: Grant
    Filed: October 31, 2005
    Date of Patent: November 1, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 8021935
    Abstract: A fabrication process for a device such as a backplane for a flat panel display includes depositing thin film layers on a substrate, forming a 3D template overlying the thin film layers, and etching the 3D template and the thin film layers to form gate lines and transistors from the thin film layers. An insulating or passivation layer can then be deposited on the gate lines and the transistors, so that column or data lines can be formed on the insulating layer.
    Type: Grant
    Filed: October 1, 2008
    Date of Patent: September 20, 2011
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Ping Mei, Hao Luo, Albert Hua Jeans, Angeles Marcia Almanza-Workman, Robert A. Garcia, Warren Jackson, Carl P. Taussig, Craig M. Perlov
  • Patent number: 8013327
    Abstract: A thin-film transistor includes an insulating substrate, a source electrode, and a drain electrode, disposed over the top of the insulating substrate, a semiconductor layer electrically continuous with the source electrode, and the drain electrode, respectively, a gate dielectric film formed over the top of at least the semiconductor layer; and a gate electrode disposed over the top of the gate dielectric film so as to overlap the semiconductor layer. Further, a first bank insulator is formed so as to overlie the source electrode, a second bank insulator is formed so as to overlie the drain electrode, and the semiconductor layer, the gate dielectric film, and the gate electrode are embedded in a region between the first bank insulator, and the second bank insulator.
    Type: Grant
    Filed: April 24, 2009
    Date of Patent: September 6, 2011
    Assignee: Hitachi, Ltd.
    Inventors: Masahiro Kawasaki, Masaaki Fujimori, Takeo Shiba, Shuji Imazeki, Tadashi Arai
  • Patent number: 7999321
    Abstract: A field-effect transistor comprising a movable gate electrode that suppresses a leakage current from the gate electrode, and has a large current drivability and a low leakage current between a source and a drain. The field-effect transistor comprises: an insulating substrate; a semiconductor layer of triangle cross-sectional shape formed on the insulating substrate, having a gate insulation film on a surface, and forming a channel in a lateral direction; fixed electrodes that are arranged adjacent to both sides of the semiconductor layer and in parallel to the semiconductor layer, each of the electrodes having an insulation film on a surface; a source/drain formed at the end part of the semiconductor layer; and the movable gate electrode formed above the semiconductor layer and the fixed electrodes with a gap.
    Type: Grant
    Filed: May 9, 2008
    Date of Patent: August 16, 2011
    Assignee: National Institute of Advanced Industrial Science and Technology
    Inventors: Yongxun Liu, Takashi Matsukawa, Meishoku Masahara, Kazuhiko Endo, Shinichi Ouchi
  • Patent number: 7989898
    Abstract: A dual workfunction semiconductor device and a device made thereof is disclosed. In one aspect, the device includes a first gate stack in a first region and a second gate stack in a second region. The first gate stack has a first effective workfunction, and the second gate stack has a second effective workfunction different from the first effective workfunction. The first gate stack includes a first gate dielectric capping layer, a gate dielectric host layer, a first metal gate electrode layer, a barrier metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode. The second gate stack includes a gate dielectric host layer, a first metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode.
    Type: Grant
    Filed: April 22, 2009
    Date of Patent: August 2, 2011
    Assignees: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shou-Zen Chang, HongYu Yu
  • Patent number: 7977174
    Abstract: Methods for fabricating FinFET structures with stress-inducing source/drain-forming spacers and FinFET structures having such spacers are provided herein. In one embodiment, a method for fabricating a FinFET structure comprises fabricating a plurality of parallel fins overlying a semiconductor substrate. Each of the fins has sidewalls. A gate structure is fabricated overlying a portion of each of the fins. The gate structure has sidewalls and overlies channels within the fins. Stress-inducing sidewall spacers are formed about the sidewalls of the fins and the sidewalls of the gate structure. The stress-inducing sidewall spacers induce a stress within the channels. First conductivity-determining ions are implanted into the fins using the stress-inducing sidewall spacers and the gate structure as an implantation mask to form source and drain regions within the fins.
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: July 12, 2011
    Assignee: Globalfoundries Inc.
    Inventors: Scott Luning, Frank Scott Johnson, Michael J. Hargrove
  • Patent number: 7964459
    Abstract: A method for creating a non-volatile memory array includes implanting pocket implants in a substrate at least between mask columns of a given width and at least through an ONO layer covering the substrate, generating increased-width polysilicon columns from the mask columns, generating bit lines in the substrate at least between the increased-width polysilicon columns and depositing oxide at least between the polysilicon columns.
    Type: Grant
    Filed: December 10, 2009
    Date of Patent: June 21, 2011
    Assignee: Spansion Israel Ltd.
    Inventors: Eli Lusky, Assaf Shappir, Rustom Irani, Boaz Eitan
  • Patent number: 7928013
    Abstract: A rework method of a gate insulating layer of a thin film transistor includes the following steps. First, a substrate including a silicon nitride layer, which serves as a gate insulating layer, disposed thereon. Subsequently, a first film removal process is performed to remove the silicon nitride layer. The first film removal process includes an inductively coupled plasma (ICP) etching process. The ICP etching process is carried out by introducing gases including sulfur hexafluoride and oxygen. The ICP etching process has an etching selectivity ratio of the silicon nitride layer to the substrate, which is substantially between 18 and 30.
    Type: Grant
    Filed: December 1, 2009
    Date of Patent: April 19, 2011
    Assignee: AU Optronics Corp.
    Inventors: Chia-Hsu Chang, Pei-Yu Chen
  • Patent number: 7915101
    Abstract: Thin film transistors and organic light emitting displays using the same are provided. The thin film transistor may include a substrate, a semiconductor layer, a gate electrode, and source/drain electrodes on the substrate. The semiconductor layer is composed of a P-type semiconductor layer obtained by diffusing phosphorus into a zinc oxide semiconductor. The phosphorus is doped in the semiconductor layer to a concentration ranging from about 1×1014 to about 1×1018 cm?3.
    Type: Grant
    Filed: May 9, 2008
    Date of Patent: March 29, 2011
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventors: Jae-kyeong Jeong, Yeon-gon Mo, Jin-seong Park, Hyun-soo Shin, Hun-jung Lee, Jong-han Jeong
  • Patent number: 7906814
    Abstract: Provided is a fin field effect transistor (FinFET) having low leakage current and a method of manufacturing the same. The FinFET includes: a bulk silicon substrate; a fence-shaped body formed by patterning the substrate; an insulating layer formed on a surface of the substrate to a first height of the fence-shaped body; a gate insulating layer formed at side walls and an upper surface of the fence-shaped body at which the insulating layer is not formed; a gate electrode formed on the gate insulating layer; source/drain formed at regions of the fence-shaped body where the gate electrode is not formed. The gate electrode includes first and second gate electrodes which are in contact with each other and have different work functions. Particularly, the second gate electrode having a low work function is disposed to be close to the drain.
    Type: Grant
    Filed: August 27, 2007
    Date of Patent: March 15, 2011
    Assignee: SNU R&DB Foundation
    Inventor: Jong Ho Lee
  • Patent number: 7902002
    Abstract: When a semi-conductor film is irradiated with conventional pulsed laser light, unevenness, which is called as ridge, is caused on the surface of the semiconductor film. In the case of a top-gate type TFT, element characteristics are changed depending on the ridge. In particular, there is a problem in that variation in the plural thin film transistors electrically connected in parallel with one another. According to the present invention, in manufacturing a circuit including plural thin film transistors, the width LP of a region (not including a microcrystal region) that is melted by irradiating a semiconductor film with light of a continuous wave laser is enlarged, and active layers of a plurality of thin film transistors (that are electrically connected in parallel with one another) are arranged in one region.
    Type: Grant
    Filed: July 25, 2005
    Date of Patent: March 8, 2011
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Koichiro Tanaka
  • Patent number: 7888169
    Abstract: A low-cost and efficient process producing improved organic electronic devices such as transistors that may be used in a variety of applications is described. The applications may include radio frequency identification (RFID) devices, displays and the like. In one embodiment, the improved process is implemented by flash annealing a substrate with an energy having wavelengths ranging from about 250 nm to about 1100 nm or higher. In this flash annealing process energy having wavelengths from about 250 nm to about 350 nm or higher is substantially prevented from irradiating the substrate.
    Type: Grant
    Filed: December 26, 2007
    Date of Patent: February 15, 2011
    Assignee: Organicid, Inc.
    Inventors: Siddharth Mohapatra, Robert P. Wenz
  • Patent number: 7855380
    Abstract: The invention primarily provides gate electrodes and gate wirings permitting large-sized screens for active matrix-type display devices, wherein, in order to achieve this object, the construction of the invention is a semiconductor device having, on the same substrate, a pixel TFT provided in a display region and a driver circuit TFT provided around the display region, wherein the gate electrodes of the pixel TFT and the driver circuit TFT are formed from a first conductive layer, the gate electrodes are in electrical contact through connectors with gate wirings formed from a second conductive layer, and the connectors are provided outside the channel-forming regions of the pixel TFT and the driver circuit TFT.
    Type: Grant
    Filed: July 14, 2006
    Date of Patent: December 21, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama, Toru Takayama, Toshiji Hamatani
  • Patent number: 7847367
    Abstract: An integrated circuit device includes an integrated circuit substrate and a first gate pattern on the substrate. A non-conductive barrier layer pattern is on the first gate pattern. The barrier layer pattern has openings at selected locations therein extending to the first gate pattern. A second gate pattern is on the barrier layer pattern and extends into the opening in the barrier layer pattern to electrically connect the second gate pattern to the first gate pattern.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: December 7, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Dae-Ik Kim
  • Patent number: 7834417
    Abstract: An antifuse element (102, 152, 252, 302, 352, 402, 602, 652, 702) includes a substrate material (101) having an active area (106) formed in an upper surface, a gate electrode (104) having at least a portion positioned above the active area (106), and a gate oxide layer (110) disposed between the gate electrode (104) and the active area (106). The gate oxide layer (110) includes one of a gate oxide dip (128) or a gate oxide undercut (614). During operation a voltage applied between the gate electrode (104) and the active area (106) creates a current path through the gate oxide layer (110) and a rupture of the gate oxide layer (110) in a rupture region (130). The rupture region (130) is defined by the oxide structure and the gate oxide dip (128) or the gate oxide undercut (614).
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: November 16, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Won Gi Min, Robert W. Baird, Gordon P. Lee, Jiang-Kai Zuo
  • Patent number: 7834358
    Abstract: Basic logic gates are formed in a small area, and a highly integrated and microscopic structure is provided. In an nMOSFET and a pMOSFET, gate electrodes are formed facing each other and sandwiching a semiconductor region via gate insulting layers. Respective drain regions of the nMOSFET and the pMOSFET are connected to each other. A high potential is applied to a source region of the pMOSFET while an intermediate potential between the high and a low potential is applied to a source region of the nMOSFET. As a result, a NAND gate is provided. The intermediate potential between the high and the low potential is applied to the source region of the pMOSFET. The low potential is applied to the source region of the nMOSFET. As a result, a NOR gate is provided.
    Type: Grant
    Filed: January 7, 2009
    Date of Patent: November 16, 2010
    Assignee: Kabushik Kaisha Toshiba
    Inventor: Kazuya Matsuzawa
  • Patent number: 7791076
    Abstract: A thin film transistor and a liquid crystal display, in which a gate electrode is formed to include at least one portion extending in a direction perpendicular to a gain growing direction in order to make electrical charge mobility of TFTs uniform without increasing the size of the driving circuit. A thin film transistor according to the present invention includes a semiconductor pattern a thin film of poly-crystalline silicon containing grown grains on the insulating substrate. The semiconductor pattern includes a channel region and source and drain regions opposite with respect to the channel region. A gate insulating layer covers the semiconductor pattern. On the gate insulating layer, a gate electrode including at least one portion extending in a direction crossing the growing direction of the grains and overlapping the channel region is formed.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: September 7, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Myung-Koo Kang, Hyun-Jae Kim, Sook-Young Kang, Woo-Suk Chung
  • Patent number: 7763490
    Abstract: A stagger type thin film transistor substrate in which each of a source and a drain of a thin film transistor has a laminated structure including a silicon semiconductor layer, a silicon semiconductor layer containing impurities, and a metal layer formed in that order and in which a gate insulator of the thin film transistor is formed on the source and the drain. A pixel electrode is connected to the source via a contact hole made in the gate insulator on the source. Additionally, a gate electrode of the thin film transistor formed on the gate insulator has a laminated structure including two layers of different electrode materials. Finally, the pixel electrode connected to the source is made of an electrode material used in a lower layer of the gate electrode.
    Type: Grant
    Filed: July 10, 2007
    Date of Patent: July 27, 2010
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Yoshio Dejima
  • Patent number: 7745824
    Abstract: In a semiconductor device and a method of manufacturing the semiconductor device, the source wires 126 of a pixel portion 205 are formed of material having low resistance (representatively, aluminum, silver, copper). The source wires of a driving circuit are formed in the same process as the gate wires 162 of the pixel portion and a pixel electrode 163.
    Type: Grant
    Filed: December 27, 2006
    Date of Patent: June 29, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama
  • Patent number: 7714367
    Abstract: A semiconductor device of which manufacturing steps can be simplified by doping impurities at a time, and a manufacturing method thereof.
    Type: Grant
    Filed: March 30, 2007
    Date of Patent: May 11, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Saishi Fujikawa, Etsuko Asano, Tatsuya Arao, Takashi Yokoshima, Takuya Matsuo, Hidehito Kitakado
  • Patent number: 7709886
    Abstract: A fabricating method of a TFT includes first forming a source on a substrate. Then, a first insulation pattern layer is formed to cover parts of the source and the substrate. The first insulation pattern layer has an opening exposing a part of the source. Thereafter, a gate pattern layer is formed on the first insulation pattern layer. Then, the gate pattern layer and a second insulation pattern layer formed thereon surround the opening. Moreover, a second lateral protection wall is formed on an edge of the gate pattern layer in the opening. Afterwards, a channel layer is formed in the opening and covers the second lateral protection wall and the source. Then, a passivation layer with a contact window is formed on the channel layer and the second insulation pattern layer to expose a portion of the channel layer. Thereafter, a drain is formed on the exposed channel layer.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: May 4, 2010
    Assignee: Au Optronics Corporation
    Inventors: Wei-Hsiang Lo, Hao-Chieh Lee
  • Patent number: 7709303
    Abstract: A process for forming an electronic device can include forming a semiconductor fin of a first height for a fin-type structure and removing a portion of the semiconductor fin such that the semiconductor fin is shortened to a second height. In accordance with specific embodiment a second semiconductor fin can be formed, each of the first and the second semiconductor fins having a different height representing a channel width. In accordance with another specific embodiment a second and a third semiconductor fin can be formed, each of the first, the second and the third semiconductor fins having a different height representing a channel width.
    Type: Grant
    Filed: January 10, 2006
    Date of Patent: May 4, 2010
    Assignee: Freescale Semiconductor, Inc.
    Inventors: James D. Burnett, Leo Mathew, Byoung W. Min
  • Patent number: 7696038
    Abstract: Methods for fabricating flash memory devices are provided. In accordance with an exemplary embodiment of the invention, a method for fabricating a memory device comprises forming a first gate stack and a second gate stack overlying a substrate. A trench is etched into the substrate between the first gate stack and the second gate stack. A first impurity doped region is formed within the substrate underlying the trench.
    Type: Grant
    Filed: April 26, 2006
    Date of Patent: April 13, 2010
    Assignee: Spansion LLC
    Inventors: Ning Cheng, Kuo-Tung Chang, Hiroyuki Kinoshita, Timothy Thurgate, Wei Zheng, Ashot Melik-Martirosian, Angela Hui, Chih-Yuh Yang
  • Patent number: 7692246
    Abstract: The present invention provides a FinFET transistor arrangement produced using a method with the steps: providing a substrate (106, 108); forming an active region (1) on the substrate a fin-like channel region (113b?; 113b?). Formation of the fin-like channel region (113b?; 113b?) has the following steps: forming a hard mask (S1-S4) on the active region (1); anisotropic etching of the active region (1) using the hard mask (S1-S4) forming STI trenches (G1-G5) having an STI oxide filling (9); polishing-back of the STI oxide filling (9); etching-back of the polished-back STI oxide filling (9); selective removal of components of the hard mask forming a modified hard mask (S1?-S4?); anisotropic etching of the active region (1) using the modified hard mask (S1?-S4?) forming widened STI trenches (G1?-G5?), the fin-like channel regions (113b?; 113b?) of the active region (1) remaining for each individual FinFET transistor.
    Type: Grant
    Filed: January 4, 2007
    Date of Patent: April 6, 2010
    Assignee: Infineon Technologies AG
    Inventors: Lars Dreeskornfeld, Franz Hofmann, Johannes Richard Luyken, Michael Specht
  • Patent number: 7638850
    Abstract: A method for creating a non-volatile memory array includes implanting pocket implants in a substrate at least between mask columns of a given width and at least through an ONO layer covering the substrate, generating increased-width polysilicon columns from the mask columns, generating bit lines in the substrate at least between the increased-width polysilicon columns and depositing oxide at least between the polysilicon columns.
    Type: Grant
    Filed: May 24, 2006
    Date of Patent: December 29, 2009
    Assignee: Saifun Semiconductors Ltd.
    Inventors: Eli Lusky, Assaf Shappir, Rustom Irani, Boaz Eitan
  • Patent number: 7635867
    Abstract: A nanotube array and a method for producing a nanotube array. The nanotube array has a substrate, a catalyst layer, which includes one or more subregions, on the surface of the substrate and at least one nanotube arranged on the surface of the catalyst layer, parallel to the surface of the substrate. The at least one nanotube being arranged parallel to the surface of the substrate results in a planar arrangement of at least one nanotube. Therefore, the nanotube array of the invention is suitable for coupling to conventional silicon microelectronics. Therefore, according to the invention it is possible for a nanotube array to be electronically coupled to macroscopic semiconductor electronics. Furthermore, the nanotube array according to the invention may have an electrically insulating layer between the substrate and the catalyst layer.
    Type: Grant
    Filed: May 16, 2002
    Date of Patent: December 22, 2009
    Assignee: Infineon Technologies AG
    Inventors: Andrew Graham, Franz Hofmann, Johannes Kretz, Franz Kreupl, Richard Luyken, Wolfgang Rösner
  • Publication number: 20090256469
    Abstract: A thin film transistor, a method of fabricating the same, and an OLED display device having the same. The thin film transistor includes a substrate, a semiconductor layer disposed on the substrate and having a channel region, source and drain regions, and a body contact region, a gate insulating layer disposed on the semiconductor layer to expose the body contact region, a silicon layer disposed on the gate insulating layer and contacting the body contact region exposed by the gate insulating layer, a gate electrode disposed on the silicon layer, an interlayer insulating layer disposed on the gate electrode, and source and drain electrodes disposed on the interlayer insulating layer and electrically connected with the source and drain regions, wherein the body contact region is formed in an edge region of the semiconductor layer.
    Type: Application
    Filed: March 17, 2009
    Publication date: October 15, 2009
    Applicant: Samsung Mobile Display Co., Ltd.
    Inventors: Byoung-Keon Park, Jin-Wook Seo, Tae-Hoon Yang, Kil-Won Lee, Dong-Hyun Lee
  • Publication number: 20090242985
    Abstract: A design structure is embodied in a machine readable medium for designing, manufacturing, or testing a design. The design structure includes a high-leakage dielectric formed between a gate electrode and an outer portion of an active region of a FET. Also provided is a structure having a high-leakage dielectric formed between the gate electrode and the active region of the FET and a method of manufacturing such structure.
    Type: Application
    Filed: March 26, 2008
    Publication date: October 1, 2009
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Publication number: 20090200609
    Abstract: The invention provides, as an aspect thereof, a semiconductor device that includes: a substrate; an underlying insulation film that is formed over the substrate; and a plurality of thin-film transistors that is formed over the underlying insulation film, each of the plurality of thin-film transistors having a semiconductor film, wherein the underlying insulation film is formed in separate areas each of which includes, when viewed in plan, at least one of the plurality of semiconductor films.
    Type: Application
    Filed: December 11, 2008
    Publication date: August 13, 2009
    Applicant: SEIKO EPSON CORPORATION
    Inventors: Mitsutoshi MIYASAKA, Atsushi MIYAZAKI
  • Patent number: 7566904
    Abstract: A thin film transistor has a semiconductor thin film including zinc oxide, a protection film formed on entirely the upper surface of the semiconductor thin film, a gate insulating film formed on the protection film, a gate electrode formed on the gate insulating film above the semiconductor thin film, and a source electrode and drain electrode formed under the semiconductor thin film so as to be electrically connected to the semiconductor thin film.
    Type: Grant
    Filed: June 7, 2006
    Date of Patent: July 28, 2009
    Assignee: Casio Computer Co., Ltd.
    Inventor: Hiromitsu Ishii
  • Patent number: 7564059
    Abstract: In order to realize a higher reliability TFT and a high reliability semiconductor device, an NTFT of the present invention has a channel forming region, n-type first, second, and third impurity regions in a semiconductor layer. The second impurity region is a low concentration impurity region that overlaps a tapered potion of a gate electrode with a gate insulating film interposed therebetween, and the impurity concentration of the second impurity region increases gradually from the channel forming region to the first impurity region. And, the third impurity region is a low concentration impurity region that does not overlap the gate electrode. Moreover, a plurality of NTFTs on the same substrate should have different second impurity region lengths, respectively, according to difference of the operating voltages.
    Type: Grant
    Filed: September 26, 2005
    Date of Patent: July 21, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Shunpei Yamazaki
  • Patent number: 7560734
    Abstract: In a semiconductor device, typically an active matrix display device, the structure of TFTs arranged in the respective circuits are made suitable in accordance with the function of the circuit, and along with improving the operating characteristics and the reliability of the semiconductor device, the manufacturing cost is reduced and the yield is increased by reducing the number of process steps.
    Type: Grant
    Filed: December 19, 2005
    Date of Patent: July 14, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Koji Ono, Hideomi Suzawa, Tatsuya Arao
  • Patent number: 7554140
    Abstract: Provided is a NAND-type nonvolatile memory device and method of forming the same. In the method, a plurality of cell layers are stacked on a semiconductor substrate. Seed contact holes for forming a semiconductor pattern included in a stacked cell are formed at regular distance. At this time, the seed contact holes are arranged such that a bit line plug or a source line pattern is disposed at a center between one pair of seed contact holes adjacent to each other.
    Type: Grant
    Filed: January 10, 2007
    Date of Patent: June 30, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hoo-Sung Cho, Soon-Moon Jung, Won-Seok Cho, Jong-Hyuk Kim, Jae-Hun Jeong, Jae-Hoon Jang
  • Patent number: 7537985
    Abstract: A double-gated fin-type field effect transistor (FinFET) structure has electrically isolated gates. In a method for manufacturing the FinFET structure, a fin, having a gate dielectric on each sidewall corresponding to the central channel region, is formed over a buried oxide (BOX) layer on a substrate. Independent first and second gate conductors on either sidewall of the fin are formed and include symmetric multiple layers of conductive material. An insulator is formed above the fin by either oxidizing conductive material deposited on the fin or by removing conductive material deposited on the fin and filling in the resulting space with an insulating material. An insulating layer is deposited over the gate conductors and the insulator. A first gate contact opening is etched in the insulating layer above the first gate. A second gate contact opening is etched in the BOX layer below the second gate.
    Type: Grant
    Filed: July 31, 2007
    Date of Patent: May 26, 2009
    Assignee: International Business Machines Corporation
    Inventors: Brent A. Anderson, Edward J. Nowak
  • Patent number: 7535024
    Abstract: The present invention provides a fabrication method of a display device which aims at the reduction of fabricating man-hours.
    Type: Grant
    Filed: November 16, 2006
    Date of Patent: May 19, 2009
    Assignee: Hitachi Displays, Ltd.
    Inventors: Eiji Oue, Toshihiko Itoga, Toshiki Kaneko, Daisuke Sonoda, Takeshi Kuriyagawa
  • Patent number: 7521717
    Abstract: A thin film transistor, a flat panel display device including the same, and a method of fabricating the same. An uneven structure is formed at a part of a polycrystalline silicon layer pattern corresponding to a channel region to form a channel length at the edge of the channel region longer than a main channel length, so that a resistance at the edge of the channel region increases to cause an amount of current flowing through the edge of the channel region to decrease, thereby enhancing the reliability of a circuit at low voltage driving.
    Type: Grant
    Filed: March 29, 2006
    Date of Patent: April 21, 2009
    Assignee: Samsung Mobile Display Co., Ltd.
    Inventor: Eui-Hoon Hwang
  • Publication number: 20090057746
    Abstract: A semiconductor device having a passive element whose characteristic is adjustable even after manufacture by applying back bias voltage is provided. Formed on a main surface of a SOI substrate comprising a supporting substrate, a BOX layer, and an SOI layer is a MOS varactor comprising a gate dielectric formed on a surface of the SOI layer, a gate electrode formed on the gate dielectric, and a n+ type semiconductor region formed in the SOI layer located on both sides of the gate electrode. The MOS varactor, is configured so that capacitance formed by the SOI layer, gate dielectric, and gate electrode is varied by applying bias voltage to the supporting substrate (p type well) under the gate electrode.
    Type: Application
    Filed: August 7, 2008
    Publication date: March 5, 2009
    Inventors: Nobuyuki Sugll, Ryuta Tsuchiya, Shinichiro Kimura
  • Patent number: 7482663
    Abstract: A semiconductor circuit arrangement includes at least one first and a second field effect transistor, where the field effect respectively have at least two active regions with, respectively, a source region, a drain region and an intermediate channel region, the surface of the channel regions having a gate formed on it, insulated by a gate dielectric, for actuating the channeel regions. At least one active region of the second field effect transistor is arranged between the at least two active regions of the first field effect transistor, which results in a reduced mismatch between the two transistors, caused by temperature and local distances.
    Type: Grant
    Filed: January 16, 2007
    Date of Patent: January 27, 2009
    Assignee: Infineon Technologies AG
    Inventors: Gerhard Knoblinger, Klaus Von Arnim
  • Patent number: 7474002
    Abstract: In the semiconductor device having a structure in which a plurality of layers are built-up by layers made of different materials or layers including various formed patterns, it is an object to provide a method which smoothing surface can be achieved without a polishing treatment by CMP method or a smoothing process by depositing a SOG film, a substrate material is not chosen, and the smoothing is simple and easy. In the semiconductor device in which a plurality of different layers are formed, smoothing surface can be achieved without the polishing treatment by the CMP method or the smoothing process by depositing the SOG film to a dielectric film formed on a dielectric film and a wring (electrode) or a semiconductor layer in a manner that an aperture portion is formed in the dielectric film, the wring (electrode) or the semiconductor layer is formed in the aperture portion.
    Type: Grant
    Filed: October 17, 2002
    Date of Patent: January 6, 2009
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Akira Ishikawa
  • Patent number: 7470572
    Abstract: A manufacturing method and the structure of a thin film transistor liquid crystal display (TFT-LCD) are disclosed. The TFT-LCD uses metal electrodes as a mask to thoroughly remove the unwanted semiconductor layer during the etching process for forming the source and drain electrodes. This manufacturing method can reduce the problems caused by the unwanted semiconductor layer, hence improving the quality of the TFT.
    Type: Grant
    Filed: April 29, 2008
    Date of Patent: December 30, 2008
    Assignee: Au Optronics Corporation
    Inventor: Jia-Fam Wong
  • Patent number: 7456055
    Abstract: An electronic device can include a base layer, a semiconductor layer, and a first semiconductor fin spaced apart from and overlying a semiconductor layer. In a particular embodiment, a second semiconductor fin can include a portion of the semiconductor layer. In another aspect, a process of forming an electronic device can include providing a workpiece that includes a base layer, a first semiconductor layer that overlies and is spaced apart from a base layer, a second semiconductor layer that overlies, and an insulating layer lying between the first semiconductor layer and the second semiconductor layer. The process can also include removing a portion of the second semiconductor layer to form a first semiconductor fin, and forming a conductive member overlying the first semiconductor fin.
    Type: Grant
    Filed: March 15, 2006
    Date of Patent: November 25, 2008
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Marius K. Orlowski, Suresh Venkatesan
  • Patent number: 7453088
    Abstract: A semiconductor device that uses a high reliability TFT structure is provided. The gate electrode of an n-channel type TFT is formed by a first gate electrode and a second gate electrode that covers the first gate electrode. LDD regions have portions that overlap the second gate electrode through a gate insulating film, and portions that do not overlap. As a result, the TFT can be prevented from degradation in an ON state, and it is possible to reduce the leak current in an OFF state.
    Type: Grant
    Filed: January 18, 2007
    Date of Patent: November 18, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hisashi Ohtani, Setsuo Nakajima
  • Patent number: 7445970
    Abstract: An exemplary photomask (150) has a slit. The slit has at least one turning region (D1) and at least one other regions, and the slit at the at least one turning region has a narrower width than the slit at the at least one other regions. An exemplary method for manufacturing a thin film transistor (TFT) using the photomask is also provided.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: November 4, 2008
    Assignee: Innolux Display Corp.
    Inventor: Chien-Ting Lai
  • Patent number: 7439107
    Abstract: When the laser light is irradiated with high output in the manufacturing process for a semiconductor device, an attenuator is heated and cause a deformation due to the laser light scattered in the attenuator. As a result, the attenuation ratio of the attenuator fluctuates, and it is difficult to process the substrate with the homogeneous irradiation energy. It is a problem of the present invention to provide a laser irradiation apparatus, a method of irradiating laser light and a method of manufacturing a semiconductor device, which can perform the laser irradiation effectively and homogeneously. In the present invention, the thermal energy generated in an attenuator is absorbed by means of cooling in order to keep the temperature of the attenuator constant. By cooling the attenuator so as to prevent the change of the attenuation ratio, the function of the attenuator is protected. In addition, the energy fluctuation of the laser light irradiated on the substrate is also prevented.
    Type: Grant
    Filed: December 24, 2003
    Date of Patent: October 21, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Hidekazu Miyairi, Akihisa Shimomura, Koichiro Tanaka, Koji Dairiki
  • Publication number: 20080246090
    Abstract: A double-gate transistor having front (upper) and back gates that are aligned laterally is provided. The double-gate transistor includes a back gate thermal oxide layer below a device layer; a back gate electrode below a back gate thermal oxide layer; a front gate thermal oxide above the device layer; a front gate electrode layer above the front gate thermal oxide and vertically aligned with the back gate electrode; and a transistor body disposed above the back gate thermal oxide layer, symmetric with the first gate. The back gate electrode has a layer of oxide formed below the transistor body and on either side of a central portion of the back gate electrode, thereby positioning the back gate self-aligned with the front gate. The transistor also includes source and drain electrodes on opposite sides of said transistor body.
    Type: Application
    Filed: May 13, 2008
    Publication date: October 9, 2008
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Omer H. Dokumaci, Bruce B. Doris, Kathryn W. Guarini, Suryanarayan G. Hegde, MeiKei Ieong, Erin Catherine Jones
  • Patent number: 7417252
    Abstract: The present invention discloses a high-speed flat panel display with a long lifetime, wherein thin film transistors in a pixel array portion in which a plurality of pixels are arranged and a driving circuit portion for driving the pixels of the pixel array portion, have different resistance values than each other or have different geometric structures than each other. The flat panel display comprises a pixel array portion where a plurality of pixels are arranged, and a driving circuit portion for driving the pixels of the pixel array portion. The thin film transistors in the pixel array portion and the driving circuit portion have different resistance values in their gate regions or drain regions than each other, or have different geometric structures than each other. One of the thin film transistors in the pixel array portion and the thin film transistors in the driving circuit has zigzag shape in its gate region or drain region or has an offset region.
    Type: Grant
    Filed: April 14, 2004
    Date of Patent: August 26, 2008
    Assignee: Samsung SDI Co., Ltd.
    Inventors: Jae-Bon Koo, Ji-Yong Park, Sang-Il Park, Ki-Yong Lee, Ul-Ho Lee
  • Patent number: RE41363
    Abstract: A TFT substrate includes a gate electrode and gate pad on a transparent substrate, an insulating layer on the gate electrode and exposing a portion of the gate pad, a semiconductor film on the insulating layer and the gate electrode, an impurity doped semiconductor film on the semiconductor film, the impurity doped semiconductor film contacting a top surface of the semiconductor film over the gate electrode, source and drain electrodes and a data line on a portion of the impurity doped semiconductor film, a protection film on the source and drain electrodes and the insulating layer in a gate pad area, the protection film having a contact hole over the drain electrode exposing a top surface of the gate pad, a first pixel electrode electrically connected to the drain electrode on the protection film, and a second pixel electrode directly connected to the exposed top surface of the gate pad.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: June 1, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jueng-gil Lee, Jung-ho Lee, Hyo-rak Nam