Transistor With Vertical Current Flow (epo) Patents (Class 257/E29.198)
E Subclasses
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Patent number: 12262553Abstract: A field stop insulated gate bipolar transistor (IGBT) fabricated without back-side laser dopant activation or any process temperatures over 450° C. after fabrication of front-side IGBT structures provides activated injection regions with controlled dopant concentrations. Injection regions may be formed on or in a substrate by epitaxial growth or ion implants and diffusion before growth of N field stop and drift layers and front-side fabrication of IGBT active cells. Back-side material removal can expose the injection region(s) for electrical connection to back-side metal. Alternatively, after front-side fabrication of IGBT active cells, back-side material removal can expose the field stop layer (or injection regions) and sputtering using a silicon target with a well-controlled doping concentration can form hole or electron injection regions with well-controlled doping concentration.Type: GrantFiled: October 12, 2023Date of Patent: March 25, 2025Assignee: IPOWER SEMICONDUCTORInventor: Hamza Yilmaz
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Patent number: 12243933Abstract: A semiconductor device with an active transistor cell comprising a p-type first and second base layers, surrounding an n-type source region, the device further comprising a plurality of first gate electrodes embedded in trench recesses, has additional gate runners formed adjacent to the first base layer, outside the active cell, and contacting the first gate electrodes at the cross points thereof. The additional gate runners do not affect the active cell design in terms of cell pitch i.e., the design rules for cell spacing, hole drainage between the cells, or gate-collector capacitance, hence resulting in optimum low conduction and switching losses. The transistor cell and layout designs offer a range of advantages both in terms of performance and manufacturability, with the potential of applying additional layers or structures.Type: GrantFiled: January 6, 2022Date of Patent: March 4, 2025Assignee: mqSemi AGInventors: Munaf Rahimo, Iulian Nistor
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Patent number: 12224319Abstract: A semiconductor device includes a first-conductivity-type drift region provided in a semiconductor substrate; a trench portion provided from an upper surface of the semiconductor substrate to an inside of the semiconductor substrate, and extending in a predetermined extending direction in a plane of the upper surface of the semiconductor substrate; a mesa portion provided in contact with the trench portion in an array direction orthogonal to the extending direction; a second-conductivity-type base region provided in the mesa portion above the drift region and in contact with the trench portion; and a second-conductivity-type floating region provided in the mesa portion below the base region, in contact with the trench portion, and provided in at least a part of the mesa portion in the array direction.Type: GrantFiled: September 20, 2023Date of Patent: February 11, 2025Assignee: FUJI ELECTRIC CO., LTD.Inventor: Tatsuya Naito
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Patent number: 12199141Abstract: A semiconductor device a first semiconductor layer of a first conductivity type at a first main side of a semiconductor wafer and a second semiconductor layer of a second conductivity type at second main side. The second semiconductor layer forms a pn junction with the first semiconductor layer. A first electrode is in ohmic contact with the first semiconductor layer and a second electrode layer is in ohmic contact with the second semiconductor layer. A first semiconductor region of the first conductivity type completely embedded in the second semiconductor layer and a second semiconductor region of the first conductivity type completely embedded in the second semiconductor layer.Type: GrantFiled: March 12, 2021Date of Patent: January 14, 2025Assignee: Hitachi Energy LtdInventors: Wolfgang Amadeus Vitale, Luca De-Michielis, Boni Kofi Boksteen, Elizabeth Buitrago, Maxi Andenna
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Patent number: 12183789Abstract: Provided is a semiconductor device which includes a semiconductor substrate including a transistor portion and a diode portion. The transistor portion includes an injection suppression region that suppresses injection of a carrier of a second conductivity type at an end portion on the diode portion side in a top view of the semiconductor substrate. The diode portion includes a lifetime control region including a lifetime killer. Both the transistor portion and the diode portion include a base region of a second conductivity type on a surface of the semiconductor substrate, the transistor portion further includes an emitter region of a first conductivity type and an extraction region of a second conductivity type having a higher doping concentration than the base region on the surface of the semiconductor substrate, and the injection suppression region is not provided with the emitter region and the extraction region.Type: GrantFiled: December 26, 2021Date of Patent: December 31, 2024Assignee: FUJI ELECTRIC CO., LTD.Inventors: Daisuke Ozaki, Tohru Shirakawa, Yasunori Agata
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Patent number: 12184268Abstract: A gate drive circuit for a power semiconductor device, a low-side switching circuit, a high-side switching circuit, and a drive method are disclosed. When a first gate driver receives a control signal which is at a first level, the first gate driver connects a first gate to a first voltage, so that the first gate controls a channel region. When the transistor operates on a Miller plateau, the area of an overlapping region between the first gate and a drain inside the transistor is relatively small, so the Miller capacitance of the transistor is relatively small, thereby improving the switching speed of the transistor. A second gate is connected to a second voltage after a first duration, so that the second gate controls a drift region of the transistor to form an accumulation layer, and the accumulation layer has a relatively high carrier concentration.Type: GrantFiled: July 26, 2023Date of Patent: December 31, 2024Assignee: Innovision Semiconductor Inc.Inventors: Feng Han, Xuening Li, Wanke Tao
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Patent number: 12094961Abstract: A power semiconductor device includes a semiconductor layer, first trenches recessed into the semiconductor layer from a surface of the semiconductor layer, a drift region, having a first conductivity type, disposed in the semiconductor layer to extend from a lower side the first trenches to between the first trenches such that a vertical charge transport path is provided, a well region disposed in the semiconductor layer on the drift region between the first trenches and having a second conductivity type, an emitter region disposed on the well region and having the first conductivity type, a floating electrode layer disposed in each of the first trenches, a second trench extending through the well region to be in contact with the drift region, and a gate electrode layer disposed in the second trench.Type: GrantFiled: December 10, 2021Date of Patent: September 17, 2024Assignee: HYUNDAI MOBIS CO., LTD.Inventor: Ju Hwan Lee
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Patent number: 12051688Abstract: A semiconductor device manufacturing method includes: forming a first groove having depth H in a semiconductor layer; filling the first groove with an oxide film and forming a surface oxide film having thickness a on an upper surface of the semiconductor layer to equalize the oxide film and the surface oxide film in height; forming a second groove having depth h greater than thickness a, from an uppermost surface of a third oxide film; forming gate trenches deeper than depth H, in the semiconductor layer; depositing polysilicon until at least the gate trenches and the second groove are filled with polysilicon; forming a peripheral element by injecting an impurity into polysilicon deposited in the second groove; and making a thickness of the peripheral element equal to depth h by concurrently removing polysilicon deposited in the gate trenches and polysilicon deposited in the second groove until they become equal in height.Type: GrantFiled: September 27, 2022Date of Patent: July 30, 2024Assignee: NUVOTON TECHNOLOGY CORPORATION JAPANInventors: Kazumi Tsutsumida, Katsuyoshi Jokyu, Keiichi Murayama
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Patent number: 12021118Abstract: Included are a semiconductor substrate, an emitter electrode formed on the semiconductor substrate, a gate electrode formed on the semiconductor substrate, a source layer of a first conductivity type formed on the semiconductor substrate, a base layer of a second conductivity type formed on the semiconductor substrate, a collector electrode formed under the semiconductor substrate, a plurality of active trench gates formed on a top-surface side of the semiconductor substrate and connected to the gate electrode, and a plurality of dummy trench gates formed on the top-surface side of the semiconductor substrate and not connected to the gate electrode. First structures, each including three or more of the active trench gates arranged side by side, and second structures, each including three or more of the dummy trench gates arranged side by side, are alternately provided.Type: GrantFiled: August 26, 2015Date of Patent: June 25, 2024Assignee: Mitsubishi Electric CorporationInventors: Kazuya Konishi, Yusuke Fukada, Ryu Kamibaba, Mariko Umeyama, Atsushi Narazaki, Masayoshi Tarutani
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Patent number: 11978794Abstract: In a SiC power MISFET having a lateral surface of a trench formed in an upper surface of a SiC epitaxial substrate as a channel region, a silicon carbide semiconductor device having low resistance, high performance, and high reliability is realized. As a means therefor, a SiC power MISFET is formed as an island-shaped unit cell on an upper surface of an n-type SiC epitaxial substrate that is provided with a drain region on a bottom surface thereof, the SiC power MISFET including: an n-type current diffusion region that surrounds a p-type body layer contact region and an n-type source region in the indicated order in a plan view; a p-type body layer and an n-type JFET region; a trench that is formed on the body layer so as to span between the source region and the current diffusion region adjacent each other in a first direction and extends in the first direction; and a gate electrode embedded in the trench with a gate insulating film therebetween.Type: GrantFiled: October 24, 2019Date of Patent: May 7, 2024Assignee: HITACHI, LTD.Inventors: Takeru Suto, Naoki Tega, Naoki Watanabe, Yuki Mori, Digh Hisamoto
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Patent number: 11923832Abstract: A gate driver system includes a transistor configured to be driven between switching states, the transistor including a control terminal controlled by a control voltage that has a maximum rated limit; and a gate driver coupled to the control terminal by a turn-on current path, the gate driver being configured to control the control voltage in order to drive the transistor between the switching states. The turn-on current path includes a resistor and a Zener diode connected in series, with an anode of the Zener diode connected to the control terminal and a cathode of the Zener diode connected to the resistor. The turn-on current path is configured to provide an on-current to increase the control voltage above a switching threshold. While the transistor is turned on, the Zener diode is configured to limit the control voltage to a voltage level limit that is less than the maximum rated limit.Type: GrantFiled: September 19, 2022Date of Patent: March 5, 2024Assignee: Infineon Technologies Austria AGInventors: Kuiwei Xu, Weiwei Cao
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Patent number: 11876127Abstract: An IGBT capable of handling high-speed switching while reducing a leakage current of a semiconductor device including the IGBT is provided. The semiconductor device according to one embodiment includes an IGBT including a p-type collector layer on a back surface of a silicon substrate and a dislocation suppressing layer for forming a hetero junction with silicon in the p-type collector layer. The dislocation suppressing layer includes a silicon germanium (SiGe) layer.Type: GrantFiled: August 18, 2021Date of Patent: January 16, 2024Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Tomohiro Imai, Yoshito Nakazawa, Katsumi Eikyu
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Patent number: 11869961Abstract: A plug electrode is subject to etch back to remain in a contact hole and expose a barrier metal on a top surface of an interlayer insulating film. The barrier metal is subject to etch back, exposing the top surface of the interlayer insulating film. Remaining element structures are formed. After lifetime is controlled by irradiation of helium or an electron beam, hydrogen annealing is performed. During the hydrogen annealing, the barrier metal is not present on the interlayer insulating film covering a gate electrode, enabling hydrogen atoms to reach a mesa part, whereby lattice defects generated in the mesa part by the irradiation of helium or an electron beam are recovered, recovering the gate threshold voltage. Thus, predetermined characteristics of a semiconductor device having a structure where a plug electrode is provided in a contact hole, via barrier metal are easily and stably obtained when lifetime control is performed.Type: GrantFiled: January 19, 2022Date of Patent: January 9, 2024Assignee: FUJI ELECTRIC CO., LTD.Inventors: Hiroshi Miyata, Seiji Noguchi, Souichi Yoshida, Hiromitsu Tanabe, Kenji Kouno, Yasushi Okura
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Patent number: 11848377Abstract: A semiconductor component includes a semiconductor body having opposing first surface and second surfaces, and a side surface surrounding the semiconductor body. The semiconductor component also includes an active region including a first semiconductor region of a first conductivity type, which is electrically contacted via the first surface, and a second semiconductor region of a second conductivity type, which is electrically contacted via the second surface. The semiconductor component further includes an edge termination region arranged in a lateral direction between the first semiconductor region of the active region and the side surface, and includes a first edge termination structure and a second edge termination structure. The second edge termination structure is arranged in the lateral direction between the first edge termination structure and the side surface and extends from the first surface in a vertical direction more deeply into the semiconductor body than the first edge termination structure.Type: GrantFiled: May 4, 2021Date of Patent: December 19, 2023Assignee: Infineon Technologies AGInventors: Anton Mauder, Hans-Joachim Schulze, Matteo Dainese, Elmar Falck, Franz-Josef Niedernostheide, Manfred Pfaffenlehner
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Patent number: 11830939Abstract: An IGBT capable of handling high-speed switching while reducing a leakage current of a semiconductor device including the IGBT is provided. The semiconductor device according to one embodiment includes an IGBT including a p-type collector layer on a back surface of a silicon substrate and a dislocation suppressing layer for forming a hetero junction with silicon in the p-type collector layer. The dislocation suppressing layer includes a silicon germanium (SiGe) layer.Type: GrantFiled: August 18, 2021Date of Patent: November 28, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Tomohiro Imai, Yoshito Nakazawa, Katsumi Eikyu
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Patent number: 11824111Abstract: According to one embodiment, a semiconductor device includes first to third electrodes, a conductive member, a semiconductor member, and an insulating member. The second electrode includes a conductive portion. The conductive portion is between the third electrode and the conductive member. The conductive member is electrically connected with the second electrode. The semiconductor member includes first to third semiconductor regions. The second semiconductor region is between the third semiconductor region and a portion of the first semiconductor region. The second semiconductor region is between the third electrode and the conductive member. The conductive portion is electrically connected with the second and third semiconductor regions. The first electrode is electrically connected with the first semiconductor region. At least a portion of the first insulating member is between the semiconductor member and the third electrode and between the semiconductor member and the first conductive member.Type: GrantFiled: August 5, 2021Date of Patent: November 21, 2023Assignee: KABUSHIKI KAISHA TOSHIBAInventors: Hiro Gangi, Tomoaki Inokuchi, Yusuke Kobayashi, Hiroki Nemoto
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Patent number: 11824523Abstract: Semiconductor device with multiple independent gates. A gate-controlled semiconductor device includes a first plurality of cells of the semiconductor device configured to be controlled by a primary gate, and a second plurality of cells of the semiconductor device configured to be controlled by an auxiliary gate. The primary gate is electrically isolated from the auxiliary gate, and sources and drains of the semiconductor device are electrically coupled in parallel. The first and second pluralities of cells may be substantially identical in structure.Type: GrantFiled: December 23, 2021Date of Patent: November 21, 2023Assignee: Vishay-Siliconix, LLCInventors: Sanjay Havanur, M. Ayman Shibib
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Patent number: 11810974Abstract: A semiconductor structure includes: a U-metal-oxide-semiconductor field-effect transistor (UMOS) structure; and a trench junction barrier Schottky (TJBS) diode, wherein an insulating layer of a sidewall of the TJBS diode does not have a side gate.Type: GrantFiled: June 25, 2021Date of Patent: November 7, 2023Assignee: NATIONAL TSING HUA UNIVERSITYInventors: Chih-Fang Huang, Jia-Wei Hu, You-An Lin, Yong-Shiang Jan
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Patent number: 11798994Abstract: An embodiment relates to a n-type planar gate DMOSFET comprising a Silicon Carbide (SiC) substrate. The SiC substrate includes a N+ substrate, a N? drift layer, a P-well region and a first N+ source region within each P-well region. A second N+ source region is formed between the P-well region and a source metal via a silicide layer. During third quadrant operation of the DMOSFET, the second N+ source region starts depleting when a source terminal is positively biased with respect to a drain terminal. The second N+ source region impacts turn-on voltage of body diode regions of the DMOSFET by establishing short-circuitry between the P-well region and the source metal when the second N+ source region is completely depleted.Type: GrantFiled: April 12, 2021Date of Patent: October 24, 2023Assignee: GeneSiC Semiconductor Inc.Inventors: Siddarth Sundaresan, Ranbir Singh, Jaehoon Park
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Patent number: 11776955Abstract: A semiconductor device includes a semiconductor substrate having first and second surfaces, an insulated gate bipolar transistor (IGBT) and a diode formed on the semiconductor substrate, wherein the diode comprises a drift layer of a first conductivity type formed so as to have a first region on the first surface of the semiconductor substrate, a first body layer of a second conductivity type formed so as to have a second region adjacent to the first region at an upper portion of the drift layer, a first floating layer of the second conductivity type formed so as to have a third region adjacent to the first region at an upper portion of the drift layer, a first trench electrode formed in a region adjacent to the first floating layer at an upper portion of the drift layer, and a first control gate formed on top of the first region.Type: GrantFiled: April 15, 2021Date of Patent: October 3, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Nao Nagata
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Patent number: 11742207Abstract: A semiconductor device includes substrate, a first gate structure, a second gate structure, and an epitaxy layer. The first gate structure and the second gate structure are over the substrate, in which the first gate structure and the second gate structure each comprises a shielding electrode, a gate electrode over the shielding electrode, and a first gate dielectric layer vertically separating the shielding electrode from the gate electrode. The epitaxy layer is over the substrate and cups an underside of the first gate structure and the second gate structure, in which the epitaxy layer comprises a doped region laterally between the first gate dielectric layer of the first gate structure and the first gate dielectric layer of the second gate structure, a dopant concentration of the doped region being non-uniform along a lateral direction.Type: GrantFiled: February 7, 2022Date of Patent: August 29, 2023Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY LIMITEDInventor: Zheng-Long Chen
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Patent number: 11728396Abstract: A semiconductor device includes a semiconductor part including a first surface, a second surface, a first region provided between the first surface and the second surface, and a second region provided between the first surface and the second surface; a common electrode provided at the second surface; a first electrode provided on the first surface at the first region; a second electrode provided on the first surface at the second region and separated from the first electrode; a first control electrode provided in the first region; and a second control electrode provided in the second region. A first trench is provided in the common electrode.Type: GrantFiled: September 9, 2020Date of Patent: August 15, 2023Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage CorporationInventor: Akihiro Tanaka
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Patent number: 11695069Abstract: According to an embodiment of a semiconductor device, the semiconductor device includes: a first active cell area comprising a first plurality of parallel gate trenches; a second active cell area comprising a second plurality of parallel gate trenches; and a metallization layer above the first and the second active cell areas. The metallization layer includes: a first part contacting a semiconductor mesa region between the plurality of parallel gate trenches in the first and the second active cell areas; and a second part surrounding the first part. The second part of the metallization layer contacts the first plurality of gate trenches along a first direction and the second plurality of gate trenches along a second direction different from the first direction.Type: GrantFiled: May 10, 2021Date of Patent: July 4, 2023Assignee: Infineon Technologies AGInventors: Markus Zundel, Stefan Mieslinger, Thomas Ostermann, Andrew Christopher Graeme Wood
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Patent number: 11631763Abstract: A semiconductor device includes a substrate having opposed first and second major surface, an active area, and a termination area. Insulated trenches extend from the first major surface toward the second major surface, each of the insulated trenches including a conductive field plate and a gate electrode overlying the conductive field plate, the gate electrode being separated from the field plate by a gate-field plate insulator. The field plate extends longitudinally in both of the active and termination areas and the gate electrode is absent in the termination area. A body region of a first conductivity type extends laterally between pairs of the insulated trenches. First and second spacer regions of a second conductivity type extend laterally between the pairs of the insulated trenches at the termination area to produce segments of the first conductivity type between the first and second spacer regions that are isolated from the body region.Type: GrantFiled: April 4, 2022Date of Patent: April 18, 2023Assignee: NXP USA, Inc.Inventors: Tanuj Saxena, Vishnu Khemka, Bernhard Grote, Ganming Qin, Moaniss Zitouni
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Patent number: 11610992Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type. A well region that is a second conductivity type well region is formed on a surface layer portion of the semiconductor layer and has a channel region defined therein. A source region that is a first conductivity type source region is formed on a surface layer portion of the well region. A gate insulating film is formed on the semiconductor layer and has a multilayer structure. A gate electrode is opposed to the channel region of the well region where a channel is formed through the gate insulating film.Type: GrantFiled: May 24, 2021Date of Patent: March 21, 2023Assignee: ROHM CO., LTD.Inventors: Shuhei Mitani, Yuki Nakano, Heiji Watanabe, Takayoshi Shimura, Takuji Hosoi, Takashi Kirino
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Patent number: 11605725Abstract: An insulated gate bipolar transistor and a fabrication method therefor, wherein the fabrication method for the insulated gate bipolar transistor comprises the following steps: implanting hydrogen ions, arsenic ions, or nitrogen ions into a substrate from a back surface of the insulated gate bipolar transistor so as to form an n-type heavily doped layer (202) of a reverse conduction diode, the reverse conduction diode being a reverse conduction diode built into the insulated gate bipolar transistor. The described fabrication method and the obtained insulated gate bipolar transistor from a recombination center in an n+ junction of the reverse conduction diode, thereby accelerating the reverse recovery speed of the built-in reverse conduction diode, shortening the reverse recovery time thereof, and improving the performance of the insulated gate bipolar transistor.Type: GrantFiled: May 17, 2019Date of Patent: March 14, 2023Assignee: ADVANCED SEMICONDUCTOR MANUFACTURING CORPORATION., LTD.Inventors: Xueliang Wang, Jianhua Liu, Jinrong Lang, Yaneng Min
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Patent number: 11588042Abstract: A semiconductor device includes a semiconductor substrate, an insulating film disposed above the semiconductor substrate, a temperature detecting element disposed on the insulating film, and an anode side region and a cathode side region respectively located on an anode side and a cathode side of the temperature detecting element. The anode side region or the cathode side region includes one or more capacitance elements, and a sum of capacitance values of the capacitance elements is larger than a capacitance value of the temperature detecting element.Type: GrantFiled: December 22, 2020Date of Patent: February 21, 2023Assignee: DENSO CORPORATIONInventors: Shunsuke Harada, Takashi Nomura
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Patent number: 11581428Abstract: A power semiconductor device includes an active cell region with a drift region of a first conductivity type, a plurality of IGBT cells arranged within the active cell region, each of the IGBT cells includes at least one trench that extends into the drift, an edge termination region surrounding the active cell region, a transition region arranged between the active cell region and the edge termination region, at least some of the IGBT cells are arranged within or extend into the transition region, a barrier region of a second conductivity type, the barrier region is arranged within the active cell region and in contact with at least some of the trenches of the IGBT cells and does not extend into the transition region, and a first load terminal and a second load terminal, the power semiconductor device is configured to conduct a load current along a vertical direction between.Type: GrantFiled: October 23, 2020Date of Patent: February 14, 2023Assignee: Infineon Technologies AGInventors: Alexander Philippou, Markus Beninger-Bina, Matteo Dainese, Christian Jaeger, Johannes Georg Laven, Francisco Javier Santos Rodriguez, Antonio Vellei, Caspar Leendertz, Christian Philipp Sandow
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Patent number: 11574998Abstract: A semiconductor device includes: a semiconductor substrate including a front surface, a back surface that is opposite to the front surface, and a drift layer of a first conductive type disposed between the front surface and the back surface; a first diffusion layer of a second conductive type provided between the drift layer and the front surface; a second diffusion layer provided between the drift layer and the back surface; a first buffer layer of the first conductive type provided between the drift layer and the second diffusion layer, having a concentration higher than that of the drift layer, and into which a proton is injected; and a second buffer layer of the first conductive type provided between the first buffer layer and the second diffusion layer and having a concentration higher than that of the drift layer, wherein a peak concentration of the second buffer layer is higher than a peak concentration of the first buffer layer, an impurity concentration of the first buffer layer gradually decreases tType: GrantFiled: June 17, 2021Date of Patent: February 7, 2023Assignee: Mitsubishi Electric CorporationInventors: Koji Tanaka, Koichi Nishi, Ze Chen
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Patent number: 11569371Abstract: We disclose herein a gate controlled bipolar semiconductor device comprising: a collector region of a first conductivity type; a drift region of a second conductivity type located over the collector region; a body region of a first conductivity type located over the drift region; a plurality of first contact regions of a second conductivity type located above the body region and having a higher doping concentration than the body region; a second contact region of a first conductivity type located laterally adjacent to the plurality of first contact regions, the second contact region having a higher doping concentration than the body region; at least two active trenches each extending from a surface into the drift region; an emitter trench extending from the surface into the drift region; wherein each first contact region adjoins an active trench so that, in use, a channel is formed along said each active trench and within the body region; wherein the second contact region adjoins the emitter trench; and whereType: GrantFiled: May 25, 2017Date of Patent: January 31, 2023Assignees: DYNEX SEMICONDUCTOR LIMITED, ZHUZHOU CRRC TIMES ELECTRIC CO. LTD.Inventors: Ian Deviny, Luther-King Ngwendson, John Hutchings
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Patent number: 11563094Abstract: A semiconductor device includes a semiconductor part, a first electrode at a back surface of the semiconductor part; a second electrode at a front surface of the semiconductor part; third and fourth electrodes provided between the semiconductor part and the second electrode. The third and fourth electrodes are arranged in a first direction along the front surface of the semiconductor part. The third electrode is electrically insulated from the semiconductor part by a first insulating film. The third electrode is electrically insulated from the second electrode by a second insulating film. The fourth electrode is electrically insulated from the semiconductor part by a third insulating film. The fourth electrode is electrically isolated from the third electrode. the third and fourth electrodes extend into the semiconductor part. The fourth electrode includes a material having a larger thermal conductivity than a thermal conductivity of a material of the third electrode.Type: GrantFiled: March 9, 2020Date of Patent: January 24, 2023Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATIONInventors: Takeshi Suwa, Tomoko Matsudai, Yoko Iwakaji
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Patent number: 11552190Abstract: A modified structure of an n-channel lateral double-diffused metal oxide semiconductor (LDMOS) transistor is provided to suppress the rupturing of the gate-oxide which can occur during the operation of the LDMOS transistor. The LDMOS transistor comprises a dielectric isolation structure which physically isolates the region comprising a parasitic NPN transistor from the region generating a hole current due to weak-impact ionization, e.g., the extended drain region of the LDMOS transistor. According to an embodiment of the disclosure, this can be achieved using a vertical trench between the two regions. Further embodiments are also proposed to enable a reduction in the gain of the parasitic NPN transistor and in the backgate resistance in order to further improve the robustness of the LDMOS transistor.Type: GrantFiled: November 19, 2020Date of Patent: January 10, 2023Assignee: Analog Devices International Unlimited CompanyInventors: Edward John Coyne, Alan Brannick, John P. Meskell
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Patent number: 11538804Abstract: Disclosed herein are integrated circuit (IC) structures, packages, and devices that include thin-film transistors (TFTs) integrated on the same substrate/die/chip as III-N transistors. One example IC structure includes an III-N transistor in a first layer over a support structure (e.g., a substrate) and a TFT in a second layer over the support structure, where the first layer is between the support structure and the second layer. Another example IC structure includes a III-N semiconductor material and a TFT, where at least a portion of a channel material of the TFT is over at least a portion of the III-N semiconductor material.Type: GrantFiled: January 9, 2019Date of Patent: December 27, 2022Assignee: Intel CorporationInventors: Han Wui Then, Marko Radosavljevic, Sansaptak Dasgupta, Paul B. Fischer, Walid M. Hafez
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Patent number: 11522047Abstract: A thin non-punch-through semiconductor device with a patterned collector layer on the collector side is proposed. The thin NPT RC-IGBT semiconductor device has a collector layer with a pattern of p/n shorts, an emitter side structured as a functional MOS cell, a base layer arranged between the emitter and the collector sides, but without the use of a buffer/field-stop layer. A low doped bipolar gain control layer having a thickness of less than 10 ?m may be used in combination with a short pattern of the collector to reduce the bipolar gain and achieve thinner devices with lower losses and high operating temperature capability. The doping concentration of the base layer and a thickness of the base layer are adapted such that the distance from the end of the electric field region to the patterned collector, at breakdown voltage, is less than 15% of the total device thickness.Type: GrantFiled: June 10, 2020Date of Patent: December 6, 2022Assignee: MQSEMI AGInventors: Munaf Rahimo, Iulian Nistor
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Patent number: 11495663Abstract: A predetermined relational expression holds where a first distance along the in-plane direction from a channel of the first semiconductor layer to a third semiconductor layer that is the other of the collector layer and the cathode layer is designated as W, a second distance from the channel of the first semiconductor layer to the second semiconductor layer is designated as S, and a diffusion coefficient and a lifetime of a part of the semiconductor substrate between the channel of the first semiconductor layer and the third semiconductor layer are designated as D and ?, respectively.Type: GrantFiled: March 15, 2021Date of Patent: November 8, 2022Assignee: Mitsubishi Electric CorporationInventors: Kakeru Otsuka, Hirofumi Oki, Kohei Sako
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Patent number: 11469316Abstract: A semiconductor device includes a collector layer of a first conductive type, a drift layer of a second conductive type, an accumulation region of the second conductive type, a base region of the first conductive type, emitter regions of the second conductive type, a first gate electrode in contact with the emitter regions via first gate insulating film, a second gate electrode facing the first gate electrode via the base region, and being in contact with the emitter regions via second gate insulating film, a first resistive section electrically connected to the first gate electrode, a second resistive section having a larger resistance than does the first resistive section, and electrically connected to the second gate electrode, and a gate electrode pad electrically connected to the first and second resistive sections.Type: GrantFiled: April 21, 2020Date of Patent: October 11, 2022Assignee: FUJI ELECTRIC CO., LTD.Inventor: Yoshihiro Ikura
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Patent number: 11462634Abstract: An object of the present invention is to provide a semiconductor device capable of reducing the on-voltage and a manufacturing method thereof. According to the present invention, a semiconductor device includes a Si substrate, a p-type anode layer provided on the front surface of the Si substrate, an anode electrode provided on the p-type anode layer, an n-type cathode layer and a p-type cathode layer provided adjacent to each other on a back surface of the Si substrate, an Al alloy layer provided on the n-type cathode layer and containing Si, and an Al alloy layer provided on the p-type cathode layer and containing Si, in which impurity concentration in the n-type cathode layer is 1E19 cm?3 or higher and impurity concentration in the p-type cathode layer is 10% or lower of the impurity concentration in the n-type cathode layer.Type: GrantFiled: August 11, 2020Date of Patent: October 4, 2022Assignee: Mitsubishi Electric CorporationInventors: Koji Tanaka, Ryuji Ueno, Masahiro Ujike
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Patent number: 11456376Abstract: A semiconductor device includes an IGBT region and a diode region provided to be adjacent to each other in a semiconductor substrate further includes: a boundary trench having, in a position in which the IGBT region and the diode region are adjacent to each other in plan view, a bottom surface positioned in a drift layer to be deeper than an active trench or a dummy trench, and one side wall and another side wall that face each other; and a boundary trench gate electrode, which faces a base layer, an anode layer, and the drift layer via a boundary trench insulating film and is provided from the one side wall to the other side wall of the boundary trench across a region that faces the drift layer in the boundary trench.Type: GrantFiled: March 17, 2021Date of Patent: September 27, 2022Assignee: Mitsubishi Electric CorporationInventors: Kohei Sako, Tetsuo Takahashi, Hidenori Fujii
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Patent number: 11444155Abstract: A silicon carbide semiconductor device includes a first load electrode disposed on a first surface of a silicon carbide semiconductor body, a first doped region disposed in the silicon carbide semiconductor body and electrically connected to the first load electrode, and an insulated gate field effect transistor electrically connected in series with the first doped region, the insulated gate field effect transistor including a source region and a body region, the body region being electrically connected to the first load electrode, wherein a geometry and dopant concentration of the first doped region is such that a resistance of the first doped region increases by at least a factor of two as load current in the insulated gate field effect transistor rises.Type: GrantFiled: May 10, 2021Date of Patent: September 13, 2022Assignee: Infineon Technologies AGInventors: Andreas Huerner, Dethard Peters
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Patent number: 11404563Abstract: Embodiments of the disclosure provide an insulated-gate bipolar transistor (IGBT), including: a substrate with a first type of doping; a drift region including a first semiconductor material and a second semiconductor material having dissimilar band gaps, the drift region having a second type of doping; and a base region with the first type of doping, wherein the drift region is disposed between the substrate and the base region; wherein a stoichiometry ratio of the first and second semiconductor materials of the drift region varies as a function of distance within the drift region to provide a built-in electric field via band gap modulation. The built-in electric field reduces a band gap barrier for minority charge carriers and increases a drift velocity of the minority charge carriers in the drift region, increasing a frequency response of the IGBT.Type: GrantFiled: December 27, 2019Date of Patent: August 2, 2022Assignee: GlobalFoundries U.S. Inc.Inventor: Viorel C. Ontalus
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Patent number: 9041050Abstract: In a method of further enhancing the performance of a narrow active cell IE type trench gate IGBT having the width of active cells narrower than that of inactive cells, it is effective to shrink the cells so that the IE effects are enhanced. However, when the cells are shrunk simply, the switching speed is reduced due to increased gate capacitance. A cell formation area of the IE type trench gate IGBT is basically composed of first linear unit cell areas having linear active cell areas, second linear unit cell areas having linear hole collector areas and linear inactive cell areas disposed therebetween.Type: GrantFiled: January 3, 2013Date of Patent: May 26, 2015Assignee: Renesas Electronics CorporationInventor: Hitoshi Matsuura
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Patent number: 9000478Abstract: A semiconductor apparatus includes a substrate having a device region and a peripheral region located around the device region. A first semiconductor region is formed within the device region, is of a first conductivity type, and is exposed at an upper surface of the substrate. Second-fourth semiconductor regions are formed within the peripheral region. The second semiconductor region is of the first conductivity type, has a lower concentration of the first conductivity type of impurities, is exposed at the upper surface, and is consecutive with the first semiconductor region directly or indirectly. The third semiconductor region is of a second conductivity type, is in contact with the second semiconductor region from an underside, and is an epitaxial layer. The fourth semiconductor region is of the second conductivity type, has a lower concentration of the second conductivity type of impurities, and is in contact with the third semiconductor region from an underside.Type: GrantFiled: May 24, 2012Date of Patent: April 7, 2015Assignee: Toyota Jidosha Kabushiki KaishaInventor: Masaru Senoo
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Patent number: 8994066Abstract: A semiconductor device includes a first-conductivity-type semiconductor layer including an active region in which a transistor having impurity regions is formed and a marginal region surrounding the active region, a second-conductivity-type channel layer formed between the active region and the marginal region and forming a front surface of the semiconductor layer, at least one gate trench formed in the active region to extend from the front surface of the semiconductor layer through the channel layer, a gate insulation film formed on an inner surface of the gate trench, a gate electrode formed inside the gate insulation film in the gate trench, and at least one isolation trench arranged between the active region and the marginal region to surround the active region and extending from the front surface of the semiconductor layer through the channel layer, the isolation trench having a depth equal to that of the gate trench.Type: GrantFiled: October 17, 2014Date of Patent: March 31, 2015Assignee: Rohm Co., Ltd.Inventor: Kenichi Yoshimochi
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Patent number: 8952553Abstract: The present teaching provides a semiconductor device capable of relaxing stress transferred to a contact region during wire bonding and improving reliability of wire bonding. A semiconductor device comprises contact regions, an interlayer insulating film, an emitter electrode, and a stress relaxation portion. The contact regions are provided at a certain interval in areas exposing at a surface of a semiconductor substrate. The interlayer insulating film is provided on the surface of the semiconductor substrate between adjacent contact regions. The emitter electrode is provided on an upper side of the semiconductor substrate and electrically connected to each of the contact regions. The stress relaxation portion is provided on an upper surface of the emitter electrode in an area only above the contact regions. The stress relaxation portion is formed of a conductive material.Type: GrantFiled: February 16, 2009Date of Patent: February 10, 2015Assignee: Toyota Jidosha Kabushiki KaishaInventors: Masaru Senoo, Tomohiko Sato
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Patent number: 8946002Abstract: In one embodiment, a semiconductor device includes an isolated trench-electrode structure. The semiconductor device is formed using a modified photolithographic process to produce alternating regions of thick and thin dielectric layers that separate the trench electrode from regions of the semiconductor device. The thin dielectric layers can be configured to control the formation channel regions, and the thick dielectric layers can be configured to reduce switching losses.Type: GrantFiled: July 24, 2012Date of Patent: February 3, 2015Assignee: Semiconductor Components Industries, LLCInventors: Marian Kuruc, Juraj Vavro
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Patent number: 8933483Abstract: Provided is a semiconductor device capable of reducing a temperature-dependent variation of a current sense ratio and accurately detecting current In the semiconductor device, at least one of an impurity concentration and a thickness of each semiconductor layer is adjusted such that a value calculated by a following equation is less than a predetermined value: [ ? i = 1 n ? ( R Mi × k Mi ) - ? i = 1 n ? ( R Si × k Si ) ] / ? i = 1 n ? ( R Mi × k Mi ) where a temperature-dependent resistance changing rate of an i-th semiconductor layer (i=1 to n) of the main element domain is RMi; a resistance ratio of the i-th semiconductor layer of the main element domain relative to the entire main element domain is kMi; a temperature-dependent resistance changing rate of the i-th semiconductor layer of the sense element domain is RSi; and a resistance ratio of the i-th semiconductor layer of the sense element domain to the entire sense element domain is kSi.Type: GrantFiled: November 7, 2013Date of Patent: January 13, 2015Assignee: Toyota Jidosha Kabushiki KaishaInventors: Hidefumi Takaya, Kimimori Hamada, Yuji Nishibe
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Patent number: 8928031Abstract: Semiconductor devices are formed using a thin epitaxial layer (nanotube) formed on sidewalls of dielectric-filled trenches. In one embodiment, a semiconductor device is formed in a second semiconductor layer disposed on a first semiconductor layer of opposite conductivity type and having trenches formed therein where the trenches extend from the top surface to the bottom surface of the second semiconductor layer. The semiconductor device includes a first epitaxial layer formed on sidewalls of the trenches where the first epitaxial layer is substantially charge balanced with adjacent semiconductor regions. The semiconductor device further includes a first dielectric layer formed in the trenches adjacent the first epitaxial layer and a gate electrode disposed in an upper portion of at least some of the trenches above the first dielectric layer and insulated from the sidewalls of the trenches by a gate dielectric layer.Type: GrantFiled: April 2, 2014Date of Patent: January 6, 2015Assignee: Alpha and Omega Semiconductor IncorporatedInventors: Hamza Yilmaz, Xiaobin Wang, Anup Bhalla, John Chen, Hong Chang
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Patent number: 8866262Abstract: A silicon carbide substrate includes: an n type drift layer having a first surface and a second surface opposite to each other; a p type body region provided in the first surface of the n type drift layer; and an n type emitter region provided on the p type body region and separated from the n type drift layer by the p type body region. A gate insulating film is provided on the p type body region so as to connect the n type drift layer and the n type emitter region to each other. A p type Si collector layer is directly provided on the silicon carbide substrate to face the second surface of the n type drift layer.Type: GrantFiled: November 16, 2012Date of Patent: October 21, 2014Assignee: Sumitomo Electric Industries, Ltd.Inventors: Keiji Wada, Toru Hiyoshi
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Patent number: 8866263Abstract: Integrated circuits (ICs) utilize bipolar transistors in electro-static discharge (ESD) protection circuits to shunt discharge currents during ESD events to protect the components in the ICs. Bipolar transistors are subject to non-uniform current crowding across the emitter-base junction during ESD events, which results in less protection for the IC components and degradation of the bipolar transistor. This invention comprises multiple contact islands (126) on the emitter (116) of a bipolar transistor, which act to spread current uniformly across the emitter-base junction. Also included in this invention is segmentation of the emitter diffused region to further improve current uniformity and biasing of the transistor. This invention can be combined with drift region ballasting or back-end ballasting to optimize an ESD protection circuit.Type: GrantFiled: September 28, 2007Date of Patent: October 21, 2014Assignee: Texas Instruments IncorporatedInventor: Marie Denison
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Patent number: 8860025Abstract: A semiconductor device includes a semiconductor diode. The semiconductor diode includes a drift region and a first semiconductor region of a first conductivity type formed in or on the drift region. The first semiconductor region is electrically coupled to a first terminal via a first surface of a semiconductor body. The semiconductor diode includes a channel region of a second conductivity type electrically coupled to the first terminal, wherein a bottom of the channel region adjoins the first semiconductor region. A first side of the channel region adjoins the first semiconductor region.Type: GrantFiled: September 7, 2011Date of Patent: October 14, 2014Assignee: Infineon Technologies AGInventors: Anton Mauder, Franz Hirler, Hans-Peter Felsl, Hans-Joachim Schulze