With More Than One Donor Layer (epo) Patents (Class 257/E29.25)
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Patent number: 11798990Abstract: The semiconductor device has the main surface, the semiconductor substrate having the first impurity region formed on the main surface, the first electrode formed on the main surface having the first impurity region, the insulating film formed on the main surface such that surround the first electrode, the second electrode formed on the insulating film such that spaced apart from the first electrode and annularly surround the first electrode, and the semi-insulating film. The first electrode has the outer peripheral edge portion. The semi-insulating film is continuously formed from on the outer peripheral edge portion to on the second electrode. The outer peripheral edge portion includes the first corner portion. The second electrode has the second corner portion facing the first corner portion. The semi-insulating film on the insulating film is removed between the first corner and the second corner portion.Type: GrantFiled: November 1, 2021Date of Patent: October 24, 2023Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Kodai Ozawa, Sho Nakanishi
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Patent number: 8907378Abstract: A device includes a source and a drain for transmitting and receiving an electronic charge. The device also includes a first stack and a second stack for providing at least part of a conduction path between the source and the drain, wherein the first stack includes a first gallium nitride (GaN) layer of a first polarity, and the second stack includes a second gallium nitride (GaN) layer of the second polarity, and wherein the first polarity is different from the second polarity. At least one gate operatively connected to at least the first stack for controlling a conduction of the electronic charge, such that, during an operation of the device, the conduction path includes a first two-dimensional electron gas (2DEG) channel formed in the first GaN layer and a second 2DEG channel formed in the second GaN layer.Type: GrantFiled: March 15, 2013Date of Patent: December 9, 2014Assignee: Mitsubishi Electric Research Laboratories, Inc.Inventors: Koon Hoo Teo, Peijie Feng, Rui Ma
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Patent number: 8860088Abstract: A semiconductor structure includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer and different from the first III-V compound layer in composition. A carrier channel is located between the first III-V compound layer and the second III-V compound layer. A source feature and a drain feature are disposed on the second III-V compound layer. A gate electrode is disposed over the second III-V compound layer between the source feature and the drain feature. Two slanted field plates are disposed on the two side walls of the combined opening of the opening in a protection layer and the opening in a dielectric cap layer disposed on the second III-V compound layer.Type: GrantFiled: February 23, 2012Date of Patent: October 14, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Ju Yu, Fu-Wei Yao, Chun-Wei Hsu, Jiun-Lei Jerry Yu, Fu-Chih Yang, Chih-Wen Hsiung
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Patent number: 8673733Abstract: Methods of transferring a layer of semiconductor material from a first donor structure to a second structure include forming a generally planar weakened zone within the first donor structure defined by implanted ions therein. At least one of a concentration of the implanted ions and an elemental composition of the implanted ions may be formed to vary laterally across the generally planar weakened zone. The first donor structure may be bonded to a second structure, and the first donor structure may be fractured along the generally planar weakened zone, leaving the layer of semiconductor material bonded to the second structure. Semiconductor devices may be fabricated by forming active device structures on the transferred layer of semiconductor material. Semiconductor structures are fabricated using the described methods.Type: GrantFiled: September 27, 2011Date of Patent: March 18, 2014Assignee: SoitecInventors: Mariam Sadaka, Ionut Radu
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Patent number: 8664697Abstract: To provide a transistor device, which is composed of a compound semiconductor, having a multilayer structure in which a high electron mobility transistor (HEMT) and a heterojunction bipolar transistor (HBT) are overlapped on the same substrate and epitaxial-grown thereon, wherein a band gap energy of an indium gallium phosphide layer (InGaP) included in an epitaxial layer, is set to 1.91 eV or more.Type: GrantFiled: July 6, 2012Date of Patent: March 4, 2014Assignee: Hitachi Cable, Ltd.Inventors: Takeshi Meguro, Jiro Wada, Yoshihiko Moriya
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Patent number: 8633518Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: December 21, 2012Date of Patent: January 21, 2014Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 8525231Abstract: There is provided a semiconductor device and a method of manufacturing the same.Type: GrantFiled: December 10, 2010Date of Patent: September 3, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Ki Yeol Park, Woo Chul Jeon, Young Hwan Park, Jung Hee Lee
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Patent number: 8507329Abstract: A compound semiconductor device is provided with a substrate, an AlN layer formed over the substrate, an AlGaN layer formed over the AlN layer and larger in electron affinity than the AlN layer, another AlGaN layer formed over the AlGaN layer and smaller in electron affinity than the AlGaN layer. Furthermore, there are provided an i-GaN layer formed over the latter AlGaN layer, and an i-AlGaN layer and an n-AlGaN layer formed over the i-GaN layer.Type: GrantFiled: August 22, 2012Date of Patent: August 13, 2013Assignee: Fujitsu LimitedInventors: Toshihide Kikkawa, Kenji Imanishi
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Patent number: 8384130Abstract: Provided is a nitride semiconductor device including: a nitride semiconductor layer over a substrate wherein the nitride semiconductor has a two-dimensional electron gas (2DEG) channel inside; a drain electrode in ohmic contact with the nitride semiconductor layer; a source electrode spaced apart from the drain electrode, in Schottky contact with the nitride semiconductor layer, and having an ohmic pattern in ohmic contact with the nitride semiconductor layer inside; a dielectric layer formed on the nitride semiconductor layer between the drain electrode and the source electrode and on at least a portion of the source electrode; and a gate electrode disposed on the dielectric layer to be spaced apart from the drain electrode, wherein a portion of the gate electrode is formed over a drain-side edge portion of the source electrode with the dielectric layer interposed therebetween, and a manufacturing method thereof.Type: GrantFiled: August 3, 2011Date of Patent: February 26, 2013Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Woo Chul Jeon, Ki Yeol Park, Young Hwan Park
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Patent number: 8344424Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: February 28, 2012Date of Patent: January 1, 2013Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 8207556Abstract: A group III nitride semiconductor device having a gallium nitride based semiconductor film with an excellent surface morphology is provided. A group III nitride optical semiconductor device includes a group III nitride semiconductor supporting base, a GaN based semiconductor region, an active layer, and a GaN semiconductor region. The primary surface of the group III nitride semiconductor supporting base is not any polar plane, and forms a finite angle with a reference plane that is orthogonal to a reference axis extending in the direction of a c-axis of the group III nitride semiconductor. The GaN based semiconductor region, grown on the semipolar primary surface, includes a semiconductor layer of, for example, an n-type GaN based semiconductor doped with silicon. A GaN based semiconductor layer of an oxygen concentration of 5×1016 cm?3 or more provides an active layer, grown on the primary surface, with an excellent crystal quality.Type: GrantFiled: September 23, 2011Date of Patent: June 26, 2012Assignee: Sumitomo Electric Industries, Ltd.Inventors: Takashi Kyono, Yusuke Yoshizumi, Yohei Enya, Katsushi Akita, Masaki Ueno, Takamichi Sumitomo, Takao Nakamura
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Patent number: 8193562Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: February 1, 2011Date of Patent: June 5, 2012Assignee: Tansphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 7915643Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: September 17, 2007Date of Patent: March 29, 2011Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 7915608Abstract: A quantum well device and a method for manufacturing the same are disclosed. In one aspect, the device includes a quantum well region overlying a substrate, a gate region overlying a portion of the quantum well region, a source and drain region adjacent to the gate region. The quantum well region includes a buffer structure overlying the substrate and including semiconductor material having a first band gap, a channel structure overlying the buffer structure including a semiconductor material having a second band gap, and a barrier layer overlying the channel structure and including an un-doped semiconductor material having a third band gap. The first and third band gap are wider than the second band gap. Each of the source and drain region is self-aligned to the gate region and includes a semiconductor material having a doped region and a fourth band gap wider than the second band gap.Type: GrantFiled: May 8, 2009Date of Patent: March 29, 2011Assignees: IMEC, Katholieke Universiteit LeuvenInventors: Geert Hellings, Geert Eneman, Marc Meuris
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Publication number: 20110018034Abstract: A transistor heterogeneously integrating a power amplifier or switch with a low-noise amplifier having a substrate wafer selected from a group consisting of Gallium Arsenide (GaAs), Indium Phosphate (InP) and Gallium Antimonide (GaSb), the substrate having a first end and a second end, a conducting layer above the first end of the substrate, an isolation implant providing lateral isolation in the conducting layer, a first active layer deposited above the conducting layer and configured for the low-noise amplifier, and a buffer layer deposited above the conducting layer and configured for the low-noise amplifier.Type: ApplicationFiled: August 31, 2010Publication date: January 27, 2011Inventors: Berinder Brar, Joshua I. Bergman, Amal Ikhlassi, Gabor Nagy, Gerard J. Sullivan
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Patent number: 7825434Abstract: A nitride semiconductor device includes: a first semiconductor layer made of first nitride semiconductor; a second semiconductor layer formed on a principal surface of the first semiconductor layer and made of second nitride semiconductor having a bandgap wider than that of the first nitride semiconductor; a control layer selectively formed on, or above, an upper portion of the second semiconductor layer and made of third nitride semiconductor having a p-type conductivity; source and drain electrodes formed on the second semiconductor layer at respective sides of the control layer; a gate electrode formed on the control layer; and a fourth semiconductor layer formed on a surface of the first semiconductor layer opposite to the principal surface, having a potential barrier in a valence band with respect to the first nitride semiconductor and made of fourth nitride semiconductor containing aluminum.Type: GrantFiled: December 29, 2006Date of Patent: November 2, 2010Assignee: Panasonic CorporationInventors: Hiroaki Ueno, Manabu Yanagihara, Tetsuzo Ueda, Yasuhiro Uemoto, Tsuyoshi Tanaka, Daisuke Ueda
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Patent number: 7777254Abstract: After creating an electron transit layer on a substrate, a baffle is formed on midpart of the surface of the electron transit layer, the surface having a pair of spaced-apart parts left on both sides of the baffle. A semiconducting material different from that of the electron transit layer is deposited on its surface thereby conjointly fabricating an electron supply layer grown continuously on the pair of spaced-apart parts of the electron transit layer surface, and a discontinuous growth layer on the baffle in the midpart of the electron transit layer surface. When no voltage is being impressed to the gate electrode on the discontinuous growth layer, this layer creates a hiatus in the two-dimensional electron gas layer generated along the heterojunction between the electron supply layer and electron transit layer. The hiatus is closed upon voltage application to the gate electrode.Type: GrantFiled: June 9, 2008Date of Patent: August 17, 2010Assignee: Sanken Electric Co., Ltd.Inventor: Ken Sato
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Patent number: 7700975Abstract: Metal-Semiconductor-Metal (“MSM”) photodetectors and methods to fabricate thereof are described. The MSM photodetector includes a thin heavily doped (“delta doped”) layer deposited at an interface between metal contacts and a semiconductor layer to reduce a dark current of the MSM photodetector. In one embodiment, the semiconductor layer is an intrinsic semiconductor layer. In one embodiment, the thickness of the delta doped layer is less than 100 nanometers. In one embodiment, the delta doped layer has a dopant concentration of at least 1×1018 cm?3. A delta doped layer is formed on portions of a semiconductor layer over a substrate. Metal contacts are formed on the delta doped layer. A buffer layer may be formed between the substrate and the semiconductor layer. In one embodiment, the substrate includes silicon, and the semiconductor layer includes germanium.Type: GrantFiled: March 31, 2006Date of Patent: April 20, 2010Assignee: Intel CorporationInventors: Titash Rakshit, Miriam Reshotko
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Patent number: 7696535Abstract: A gallium nitride high electron mobility transistor, in which an inner field-plate is disposed between the gate and drain of the high electron mobility transistor, so that an electric field is distributed between gate and drain regions to reduce a peak value and to reduce gate leakage current while maintaining high frequency performance, thus obtaining a high breakdown voltage, reducing the capacitance between the gate and the drain attributable to a shielding effect, and improving linearity and high power and high frequency characteristics through variation in the input voltage of the inner field-plate.Type: GrantFiled: July 1, 2009Date of Patent: April 13, 2010Assignee: Korea Advanced Institute of Science and TechnologyInventors: Kyounghoon Yang, Sungsik Lee, Kiwon Lee, Kwangui Ko
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Patent number: 7652311Abstract: A III-nitride based field effect transistor obtains improved performance characteristics through manipulation of the relationship between the in-plane lattice constant of the interface of material layers. A high mobility two dimensional electron gas generated at the interface of the III-nitride materials permits high current conduction with low ON resistance, and is controllable through the manipulation of spontaneous polarization fields obtained according to the characteristics of the III-nitride material. The field effect transistor produced can be made to be a nominally on device where the in-plane lattice constants of the material forming the interface match. A nominally off device may be produced where one of the material layers has an in-plane lattice constant that is larger than that of the other layer material. The layer materials are preferably InAlGaN/GaN layers that are particularly tailored to the characteristics of the present invention.Type: GrantFiled: October 4, 2007Date of Patent: January 26, 2010Assignee: International Rectifier CorporationInventor: Robert Beach
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Patent number: 7508014Abstract: A field effect transistor including an i-type first semiconductor layer and a second semiconductor layer formed on the first semiconductor layer and having a band gap energy higher in magnitude than that of the first semiconductor layer. The first semiconductor layer and second semiconductor layer are each made of a gallium nitride-based compound semiconductor layer. A gate electrode is formed on the second semiconductor layer and a second electrode is formed on the first semiconductor layer. Thus, the field effect transistor is constructed in such a manner as the first semiconductor layer and second semiconductor layer are interposed between the gate electrode and the second electrode. Thus field effect transistor is able to discharge the holes that are accumulated in the channel from the elemental structure and to improve the withstand voltage of the field effect transistor.Type: GrantFiled: November 16, 2005Date of Patent: March 24, 2009Assignee: Nichia CorporationInventor: Masashi Tanimoto
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Patent number: 7445975Abstract: A semiconductor component, particularly a pHEMT, having a T-shaped gate electrode deposited in a double-recess structure, is produced with a method with self-adjusting alignment of the recesses and of the T-shaped gate electrode.Type: GrantFiled: May 7, 2007Date of Patent: November 4, 2008Assignee: United Monolithic Semiconductors GmbHInventor: Dag Behammer
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Patent number: 7432538Abstract: A field-effect transistor includes a channel layer having a channel and a carrier supply layer, disposed on the channel layer, containing a semiconductor represented by the formula AlxGa1-xN, wherein x is greater than 0.04 and less than 0.45. The channel is formed near the interface between the channel layer and the carrier supply layer or depleted, the carrier supply layer has a band gap energy greater than that of the channel layer, and x in the formula AlxGa1-xN decreases monotonically with an increase in the distance from the interface. The channel layer may be crystalline of gallium nitride. The channel layer may be undoped. X of the formula AlxGa1-xN of the carrier supply layer is greater than or equal to 0.15 and less than or equal to 0.40 at the interface.Type: GrantFiled: September 19, 2006Date of Patent: October 7, 2008Assignee: Toyoda Gosei Co., Ltd.Inventors: Masayoshi Kosaki, Koji Hirata