Abstract: An ultrasonic transducer arrangement for inspecting a pipe to fitting weld with restricted scanning access. A TOFD ultrasonic send transducer is mounted adjacent one end of a frame. A TOFD ultrasonic receive transducer is mounted on the frame and spaced linearly apart from and aligned with the TOFD send transducer. The TOFD send and receive transducers are each positioned at an angle that matches the external radius of curvature of the pipe. A phased array curved, wedge, send/receive transducer is mounted on the frame and spaced radially apart from the TOFD transducers.

Abstract: The present invention relates to a miniature robot using a plurality of piezo legs capable of deforming in two degrees of freedom by supplying input voltage signals, and an integrated artificial neural network behavior controller capable of modeling complex behavioral patterns and gait patterns by a simple structure. The miniature robot with multiple legs includes: a main body; a plurality of piezo legs constituted by bimorph piezoelectric elements and connected to the main body to generate motion through morphological deformation in two degrees of freedom by applied voltage signals, thereby resulting in movement on the ground; and a control part including an artificial neural network behavior controller, which controls motion patterns by feeding back information with respect to the environment transmitted from external sensors and to electrical signals transmitted when the piezo legs contact the surface of the ground, to control the voltage applied to each of the piezo legs.

Abstract: An induction generator (100) for a remote switch which comprises a U-shaped magnetic diverter (102) with first and second limbs as well as a coil core (104) with an induction coil (106) arranged between the limbs. A movable magnetic element (110) is provided for switching the induction generator (100). When the magnetic element (110) is in its first position, the magnetic element (110) is connected with the first limb and the coil core (104) and, when the magnetic element (110) is in its second position, the magnetic element (110) is connected with the coil core (104) and the second limb.

Abstract: Provided is radiation detection equipment including: a semiconductor radiation detector which has a semiconductor crystal made of thallium bromide; a capacitor which applies a voltage to the semiconductor radiation detector; and at least one DC power source which accumulates positive charges and negative charges in either of electrodes of the capacitor. Herein, a cathode and an anode in the semiconductor radiation detector are formed of at least one kind of a metal selected from gold, platinum and palladium. Further, the DC power source periodically reverses a voltage of accumulating the positive charges and a voltage of accumulating the negative charges in either of the electrodes of the capacitor per interval shorter than 10 min, thereby to apply the resulting voltage thereto.

Abstract: A sound dampening system having at least two acoustic deflection pads separated by a distance and an actuator operable to alter the distance in response to a stimulus. In some embodiments, the actuator is a shape memory alloy wire. The system is capable of alternating between a compact mode and a superior sound blocking mode. A door of an automotive vehicle incorporating such a system and a method of fabricating such a system.

Abstract: A resonator includes an interdigital transducer electrode, a resonance part, a supporting part, and two beam parts. The interdigital transducer electrode is disposed on a piezoelectric thin film. The resonance part is held on a substrate through an air gap. The supporting part supports the resonance part. The two beam parts connect the resonance part to the supporting part at both ends of the resonance part. The air gap forms a level difference at the supporting part or level differences at the respective two beam parts.

Abstract: An apparatus to be conveyed into a wellbore. The apparatus includes a housing configured to be conveyed downhole and a drive member located in the housing. The apparatus further includes a drive unit configured to actuate movement of the drive member by selectively coupling to the drive member, wherein the coupling of the device to the drive member is controlled by applying an energy to a selected material in the device.

Abstract: A multi-layer piezoelectric element includes a stacked body in which piezoelectric layers and internal electrode layers are alternately laminated and a stress relaxing layer is disposed at part of portions between the piezoelectric layers, and an external electrode that is bonded to a side face of the stacked body so as to make electrical connection with the internal electrode layers, the internal electrode layers being not exposed on the side face of the stacked body, but the stress relaxing layer being exposed on the side face of the stacked body.

Abstract: A center of a multi-layer piezoelectric element is an active region and deforms to a greater degree than ends thereof which is an inactive region during driving operation, and is therefore more susceptible to stress concentration and crack development. To address this problem, a multi-layer piezoelectric element includes a columnar stacked body in which piezoelectric layers and internal electrode layers are alternately laminated, and a pair of external electrodes configured to bond to side faces of the columnar stacked body, wherein a side face of the columnar stacked body is configured so that a surface roughness of a center of the side face in a stacked direction of the columnar stacked body is greater than those of ends of the side face in the stacked direction of the columnar stacked body. This makes it possible to relax the stress exerted on the side face of the columnar stacked body, and thereby enhance the durability of the multi-layer piezoelectric element.

Abstract: A compact micromanipulator system has a micromanipulator element that cause movement of a tool attached to the micromanipulator element. The micromanipulator element is attached to a support structure, which in turn is attached to a sliding base in a hinged manner to allow sliding and/or tipping of the micromanipulator element away from the normal operating position of the micromanipulator element.

Abstract: A linear resonant actuator includes: (a) an electromechanical polymer (EMP) actuator; (b) a substrate having a first surface and a second surface, the EMP actuator being mounted on the first surface of the substrate; (c) clamping structure provided on two sides of the substrate so as to allow the substrate to vibrate freely between the two sides of the substrate, in response to an electrical stimulation of the EMP actuator; and (d) an inertial mass element having a contact surface for attaching to the substrate at the second surface of the substrate. The inertial mass element may include contact structures provided to attach to the substrate along thin parallel lines. In one embodiment, the inertial mass element may have a “T” shape, or any suitable shape for stability.

Abstract: A sealed piezoelectric transducer having a single, uniform, electrically insulating, heat-conducting layer of a soft, rubbery material filled with a fine, homogeneously-dispersed powder having high thermal conductivity. The material is placed in contact with the surfaces of the transducer and conducts the heat from the surfaces to an external heat sink. Since the thermally conductive powder is fully encapsulated in the rubbery material, its abrasive properties are neutralized. The softness of the material ensures that the vibration of the transducer does not transmit significant acoustic energy into the material, thereby avoiding the generation of parasitic heat. In addition, the layer fills the entire gap between the transducer and the heat sink, thereby removing any possibility of moisture-related arcing.

Abstract: A piezoelectric motor including a rotor and a piezoelectric actuator positioned relative to the rotor in such manner that a working end of the actuator is in linear, frictional, resilient and forced contact with a working surface of the rotor. The actuator includes a piezoelectric a longitudinal prism shaped resonator with a trapezoidal cross-section and the working end of the actuator is a flat pusher insert set at an angle to the plane of the resonator base. An electronic generator is connected to electrodes of the piezoelectric actuator to excite periodic mechanical oscillations in the actuator wherein the electrodes are applied onto the longitudinal lateral trapezoidal surfaces of the resonator and the piezoelectric resonator is polarized across its width and the electronic generator outputs an alternating electrical voltage signal at a frequency matching the frequency of the first-order natural longitudinal mode of mechanical oscillation along the length of the resonator.

Abstract: A foot pad device includes a foot pad, force sensors that provide force data, sensor electronics coupled to the force sensors, and a processor. The foot pad includes a ball region configured to be located under a ball of the foot of the user or a heel region configured to be located under a heel of the foot of the user. At least a portion of the force sensors is located in the ball region or the heel region of the foot pad. The sensor electronics include a flexible circuit with force sensor connection paths adapted to transmit force data from the force sensors and are configured to condition the force data to be within a conditioned force data range. The processor is configured to calculate a weight value based on the conditioned force data, a gain value, and an offset value.

Abstract: A method of the invention includes reducing stiction of a MEMS device by providing a conductive path for electric charge collected on a bump stop formed on a substrate. The bump stop is formed by depositing and patterning a dielectric material on the substrate, and the conductive path is provided by a conductive layer deposited on the bump stop. The conductive layer can also be roughened to reduce stiction.

Abstract: A piezoelectric actuator of the invention includes a piezoelectric element, a base body having an upper face on which a lower end of the piezoelectric element abuts, and a case having an inner face on which an upper end of the piezoelectric element abuts, the case being configured to enclose the piezoelectric element, wherein the case includes a flange portion configured to be joined to the base body, and at least two bent portions are present on an inner face that is formed from a lower face of the flange portion of the case to the upper face of the base body on an enclosure space side of a junction between the case and the base body.

Abstract: A stacked piezoelectric actuator has a laminate structure including piezoelectric layers and cover parts such that when an external electrode is applied with drive voltage, the piezoelectric layers become distorted and the entire stacked piezoelectric actuator deforms, and at that time, the cover parts become displaced, wherein the distortion difference occurring between the piezoelectric layers and the cover parts reduces, thereby inhibiting the development of cracks. Moreover, the surface area of the active region of the piezoelectric layers is the same as the surface area of the active region of the cover parts, and therefore the loss of the displacement transfer, which is produced by the piezoelectric layers, at the cover parts is reliably reduced.

Abstract: In a method for calibration, a piezo-actuator (1) is actuated in a motor vehicle by a control circuit and an output stage. The piezo actuator is, in particular, part of the injection valve. The piezo-actuator (1) is subjected to an electric calibration pulse that is in the high-level signal range thereof when the control circuit and the output stage are in operation, the frequency thereof being modified over time. The associated electric impendence curve over the frequency is determined and evaluated during the calibration pulse. The output stage is controlled by the control circuit in such a manner that the calibration pulse is generated.

Abstract: A piezoelectric rotary drive for a shaft, is disclosed which can include a piezoelectric actuator and a coupling portion for driving the shaft as a stick-slip drive. To transmit greater contact forces between the frame and the shaft, at least one piezoelectric actuator and an adjustable and/or deformable frame with at least one coupling portion can be coupled to the shaft in a force-locked manner so as to accomplish a stick-slip drive, wherein the frame translates a piezoelectric deformation of the actuator mechanically such that the coupling portion rotates about the axis of the shaft over at least a part of the circumference of the shaft.

Abstract: A linear electro-polymer motor includes a fixed member, a linear shaft having an axis, a polymer actuator, and a bias member. The polymer actuator includes a first end fixedly connected to the linear shaft and a second end fixedly connected to the fixed member. The bias member includes a first end fixedly connected to the linear shaft and a second end fixedly connected to the fixed member. The polymer actuator changes length after receipt of voltage to linearly move the linear shaft along the axis.

Abstract: A semiconductor fabrication is described, wherein a MOS device and a MEMS device is fabricated simultaneously in the BEOL process. A silicon layer is deposited and etched to form a silicon film for a MOS device and a lower silicon sacrificial film for a MEMS device. A conductive layer is deposited atop the silicon layer and etched to form a metal gate and a first upper electrode. A dielectric layer is deposited atop the conductive layer and vias are formed in the dielectric layer. Another conductive layer is deposited atop the dielectric layer and etched to form a second upper electrode and three metal electrodes for the MOS device. Another silicon layer is deposited atop the other conductive layer and etched to form an upper silicon sacrificial film for the MEMS device. The upper and lower silicon sacrificial films are then removed via venting holes.

Abstract: A process for producing an actuator configured to generate powerful ultrasonic waves and that includes a stack of alternating intermediate electrode layers and piezoelectric material layers. The method includes: forming an initial stack of alternating intermediate electrode layers and piezoelectric material layers, each end of the stack being a piezoelectric material layer or an intermediate electrode layer; firmly attaching adjacent layers to one another; cutting the initial stack into elementary blocks; and connecting the intermediate electrode layers together, in each elementary block.

Abstract: A laminated piezoelectric element includes a base part that is configured from a piezoelectric layer, and a laminate configured by a first internal electrode and a second internal electrode, which are alternately laminated with the piezoelectric layer interposed therebetween, and that includes a displacement part extending from the base part in a laminating direction of the first internal electrode and the second internal electrode.

Abstract: A thin film bulk acoustic resonator (FBAR) includes a first electrode, a first piezoelectric layer having a first c-axis orientation and on the first electrode, a second piezoelectric layer having a second c-axis orientation over the first piezoelectric layer, and a second electrode on the second piezoelectric layer. The first and second piezoelectric layers are made of respective different piezoelectric materials. The FBAR can be set to have different resonance frequencies by selecting the first and second c-axis orientations to be respectively the same or different. The high and low frequency range of the FBAR can thus be extended.

Abstract: A semiconductor light emission device includes a substrate, and semiconductor light emission elements mounted on the substrate and each including an anode connection pad and a cathode connection pad. At least one of the anode connection pad and the cathode connection pad has a fine shaped portion. An image formation apparatus and an image display apparatus are described using the semiconductor light emission device.

Abstract: Improving wafer-to-wafer bonding alignment. Determining planar distortions of the bonding surface of a host wafer. Mounting a donor wafer on a bonding chuck by a plurality of fixation points, the bonding chuck including multiple zones capable of movement relative to each other. Distorting the bonding surface of the donor wafer by moving the zones of the bonding chuck relative to each other to cause distortions of the bonding surface of the donor wafer such that the distortions of the donor wafer bonding surface correspond to the determined planar distortions of the host wafer bonding surface.

Abstract: Embodiments of the disclosure include an apparatus and methods for using a piezoelectric device, that includes an outer flextensional casing, a first cell and a last cell serially coupled to each other and coupled to the outer flextensional casing such that each cell having a flextensional cell structure and each cell receives an input force and provides an output force that is amplified based on the input force. The apparatus further includes a piezoelectric stack coupled to each cell such that the piezoelectric stack of each cell provides piezoelectric energy based on the output force for each cell. Further, the last cell receives an input force that is the output force from the first cell and the last cell provides an output apparatus force In addition, the piezoelectric energy harvested is based on the output apparatus force. Moreover, the apparatus provides displacement based on the output apparatus force.

Abstract: A driving apparatus comprises a piezoelectric element (12) expanding and contracting in accordance with a driving pulse signal (40, 42), a supporting shaft (14) connected to said piezoelectric element, a movable body (20) frictionally engaged with said supporting shaft and capable of moving along said supporting shaft, and a driving portion (30) applying said driving pulse signal having a voltage value that corresponds to a driving voltage value (VD) to said piezoelectric element in order to cause relative movement of said movable body to said supporting shaft, wherein a driving voltage waveform (50) showing a time-varying of said driving voltage value has a first dropping portion (55) where said driving voltage value sharply drops from a first value (V1) to a second value (V2), a second dropping portion (56) where said driving voltage value slowly drops from said second value (V2) to a third value (V3) compared with said first dropping portion, and a third dropping portion (57) where said driving voltage val

Abstract: In one example, a piezoelectric actuator includes a piezoelectric material, a first conductor on a first part of the piezoelectric material, and a membrane bonded to the first conductor with an adhesive. The first conductor has a root mean square surface roughness of at least 10 nm at the bonding interface with the membrane.

Abstract: A piezoelectric actuator array comprising a substrate plate (10) with a number of signal leads (14) and at least one common lead (18) formed on at least one surface (12) thereof, and a number of piezoelectric bodies (30, 32) arranged in a row (34) on one surface (12) of the substrate plate and formed by dividing a common piezoelectric block, said piezoelectric bodies comprising a number of active bodies (30) each of which has, on a first side of said row (34), a signal electrode (38) in contact with one of said signal leads (14) and, on an opposite second side of the row, a common electrode (40) in contact with said common lead (18), said substrate plate (10) having at least one connector lead (16) disposed on the first side of the row (34) and electrically connected to the common lead (18) on the second side of the row, wherein said piezoelectric bodies comprise at least one piezoelectric body (32) with a conductive outer surface layer (42) that establishes an electrically conductive path from the connector

Abstract: A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film that is provided on the lower electrode and includes at least two layers; an upper electrode that is provided on the piezoelectric film and has a region sandwiching the piezoelectric film with the lower electrode and facing the lower electrode; and an insulating film that is provided in a region in which the lower electrode and the upper electrode face each other and between each of the at least two layers, wherein an upper face of the insulating film is flatter than a lower face of the insulating film.

Abstract: A switching apparatus comprising a contact point section including a first contact point; an actuator including a first piezoelectric film that expands and contracts according to a first drive voltage and a second piezoelectric film provided in parallel with the first piezoelectric film and expands and contracts according to a second drive voltage, and a control section that controls the first drive voltage and the second drive voltage is provided. The actuator moves a second contact point to contact or move away from the first contact point according to the contraction and expansion of the first piezoelectric film and the second piezoelectric film. When switching from a contact state to a separated state, the control section stops supplying the first drive voltage and applies the second drive voltage causing the second piezoelectric film to contract to the second piezoelectric film, such that the actuator is biased to return.

Abstract: A multi-layer piezoelectric element includes a stacked body including piezoelectric layers and internal electrode layers, which are alternately stacked; an external electrode layer attached to a side surface of the stacked body, the external electrode layer being elongated in a stacking direction of the stacked body and electrically connected with ends of the internal electrode layers which are exposed on the side surface; and an external electrode plate bonded to the external electrode layer therealong by an electrically conducting bonding material. The external electrode plate is provided with slits which extend from opposite long sides toward a center thereof in such a manner that tips of the respective slits overlap each other when viewed in the stacking direction of the stacked body, and a portion thereof where the tips of the respective slits overlap each other is provided with a hole extending along an extension direction of the slit.

Abstract: An actuator includes an electrolytic layer, a first electrode layer, and a second electrode layer. The electrolytic layer includes a polymer and an ionic liquid included in the polymer. When a voltage that makes the first electrode layer a positive side is applied, the actuator deforms to be in a drive state, thereby driving a protruding member. In a period other than a drive period in which the protruding member is driven, a reverse voltage that makes the first electrode layer a negative side is applied, thereby rectifying the tendency of the actuator to bow or the like.

Abstract: Methods, systems, and devices for providing cooling for a mobile device using piezoelectric active cooling devices. Some embodiments utilize piezoelectric actuators that oscillate a planar element within an air channel to fan air within or at an outlet of the air channel. The air channel may be defined by at least one heat dissipation surface in thermal contact with components of the mobile device that generate excess waste heat. For example, the air channel may include a surface that is in thermal contact with a processor of the mobile computing device. In embodiments, the piezoelectric active cooling device may be used in an air gap between stacked packages in a package on package (PoP) processor package. The described embodiments provide active cooling using low power, can be controlled to provide variable cooling, use highly reliable elements, and can be implemented at low cost.

Abstract: A strain amplification structure has a frame with a hexagonal structure incorporating a plurality of rigid beams that are connected to opposing end beams by a plurality of flexible joints. A piezoceramic actuator assembly is connected to the opposing end beams having a collar including an opening. A shaft providing an output is connected to the plurality of rigid beams with flexible joints and passes through the opening in the collar for non-interfering motion orthogonal to the actuator assembly.

Abstract: Switchable micromachined transducer arrays are described where one or more switches, or relays, are monolithically integrated with transducer elements in a piezoelectric micromachined transducer array (pMUT). In embodiments, a MEMS switch is implemented on the same substrate as the transducer array for switching operational modes of the transducer array. In embodiments, a plurality of transducers are interconnected in parallel through MEMS switch(es) in a first operational mode (e.g., a drive mode) during a first time period, and are then interconnected through the MEMS switch(es) with at least some of the transducers in series in a second operational mode (e.g., a sense mode) during a second time period.

Abstract: A flexible display device includes a display panel having pliability and a dielectric elastomer unit on the display panel. The dielectric elastomer unit is reversibly deformable by an applied voltage to provide stiffness to the display panel.

Abstract: A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.

Abstract: Described is a proximity sensor used by an operation robot that may measure a proximity distance to an object using an ultrasonic wave in a device such as an operation robot, an endoscope, and the like, and a method of operating the proximity sensor which may be used by an operation robot. The proximity sensor used by the operation robot may include an inner wall provided in a circular structure to secure a cavity within the circular structure, a piezoelectric polymer film disposed outside the inner wall to generate an ultrasonic signal, and to sense the ultrasonic signal, and an outer wall disposed outside the piezoelectric polymer film to propagate the ultrasonic signal via an open window, thereby preventing a collision between devices or an unnecessary contact, and providing a more stable operation environment.

Abstract: A piezoelectric actuator includes a stacked body composed of internal electrodes and piezoelectric layers which are stacked on each other; and a surface electrode disposed on at least one of main surfaces of the stacked body so as to be electrically connected to the internal electrodes. The internal electrodes each includes a first electrode and a second electrode. The stacked body has an active section in which the first electrodes and the second electrodes of the internal electrodes are arranged so as to overlap each other in a stacking direction thereof, and an inactive section which is every section of the stacked body other than the active section. An internal electrode placed on a one-main-surface side of the internal electrodes is configured so that its end part situated near a boundary between the active section and the inactive section is curved toward the other main surface.

Abstract: A method and apparatus for a piezoelectric resonator having combined thickness and width vibrational modes are disclosed. A piezoelectric resonator may include a piezoelectric substrate and a first electrode coupled to a first surface of the piezoelectric substrate. The piezoelectric resonator may further include a second electrode coupled to a second surface of the piezoelectric substrate, where the first surface and the second surface are substantially parallel and define a thickness dimension of the piezoelectric substrate. Furthermore, the thickness dimension and the width dimension of the piezoelectric substrate are configured to produce a resonance from a coherent combination of a thickness vibrational mode and a width vibrational mode when an excitation signal is applied to the electrodes.

Abstract: An electromechanical transducer element includes a substrate; a first electrode formed on the substrate as a common electrode; an electromechanical transducer membrane formed on the first electrode; a second electrode formed on the electromechanical transducer membrane as an individual electrode; a first insulation protection membrane formed on the first and the second electrode; a third electrode electrically connected to the first electrode; a fourth electrode electrically connected to the second electrode; a second insulation protection membrane including a common electrode pad formed on the third electrode and plural individual electrode pads formed on the fourth electrode; and a fifth electrode formed so as to surround a vicinity of at least one of the individual electrode pads disposed at end parts. Further, the fifth electrode is formed on the first insulation protection membrane and is electrically connected to the first electrode.

Abstract: A positioning system comprising a mounting assembly arranged to move a positioning device via a magnetic coupling interaction between the mounting assembly and the positioning device. The positioning device is configured to limit the spread of flux away from the device.

Abstract: Provided is an actuator apparatus including: an actuator that is provided with a driving voltage at one end and a reference potential at the other end to enable driving; a first setting section that is connected to the one end of the actuator and sets an operating speed of the actuator; a second setting section that is provided between the one end of the actuator and the reference potential, and sets the driving voltage of the actuator.

Abstract: A piezoelectric device has a first electrode film, a piezoelectric film provided on the first electrode film, and a second electrode film provided on the piezoelectric film. At least one of the pair of electrode films is composed of an alloy, and a major component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn.

Abstract: A method for forming an acoustical stack for an ultrasound probe comprises partly dicing a single crystal piezoelectric material to form single crystal pieces that are partly separated by a plurality of kerfs. The single crystal piezoelectric material comprises a carrier layer. The kerfs are filled with a kerf filling material to form a single crystal composite and the carrier layer is removed. At least one matching layer is attached to the single crystal composite, and dicing within the kerfs is accomplished to form separate acoustical stacks from the single crystal composite.

Abstract: Described herein are transducers and their fabrication. The transducers convert between mechanical and electrical energy. Some transducers of the present invention include a pre-strained polymer. The pre-strain improves the conversion between electrical and mechanical energy. The present invention provides methods for fabricating electromechanical devices including one or more electroactive polymers.

Abstract: In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.

Abstract: A piezoelectric valve has a body with an input passage and an output passage each configured to connect to a fluid flow system, a flow control member movable with respect to the valve seat between a fully open position and a closed position and a piezoelectric motor directly connected to the flow control member. The piezoelectric motor has a piezoelectric resonator in which two orthogonal vibrational modes across a length and a width of the piezoelectric resonator are excited, a working element and one or more contact sites providing frictional contact between the working element and the piezoelectric resonator. One of the working element and the piezoelectric resonator is connected to the flow control member and configured to move relative to the other of the working element and the piezoelectric resonator due to the frictional contact, thereby moving the flow control member.