Abstract: A piezoelectric actuator includes a vibrating plate, a lower electrode provided on the vibrating plate, including a platinum film and a titanium oxide film formed on the platinum film, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film, in which the titanium oxide film is provided between the platinum film and the piezoelectric thin film.

Abstract: Disclosed herein is a method of manufacturing an inertial sensor using a polling method of a piezoelectric element performing a polling after packaging the piezoelectric element, the method of manufacturing an inertial sensor including: forming a driving electrode and a sensing electrode on a flexible substrate on which a piezoelectric material is deposited; electrically connection the driving electrode and the sensing electrode; packaging the flexible substrate; polling by applying voltage and heat to the driving electrode and the sensing electrode; and electrically separating the driving electrode from the sensing electrode by applying heat to the driving electrode and the sensing electrode.

Abstract: The vibration producing device includes a driving shaft being placed under slight rapid vibratory movements in its axial direction, a slight rapid vibratory movements producing member coupled with one end of the driving shaft for causing the driving shaft to be vibrated with the slight rapid vibratory movements, a casing for supporting at least either the driving shaft or the slight rapid vibratory movement producing member in such a manner that the driving shaft can be vibrated with the slight rapid vibratory movements in its axial direction, and a weight member to be coupled with the driving shaft in order to permit the weight member to move in its axial direction under the slight rapid vibratory movements of the driving shaft, wherein the casing is vibrated by allowing the weight member to be moved forwards and backwards alternately along the driving shaft in its axial direction.

Abstract: A transducer includes a preload adapter having a sleeve portion and an end and a housing including a seating portion and a shaft portion that extends from the seating portion. The transducer also includes a piezoelectric element contained at least partially within a chamber that is at least partially defined by the sleeve portion and shaft portion and a diaphragm coupled to an external side of the end such that motion of the piezoelectric element causes motion of the diaphragm.

Abstract: Manufacturing processes monitor forces or pressures within a machine. Metal within machines affect wireless communications within the machines for reporting monitored data. An embodiment of the present invention is a sensor that provides wireless communications unaffected by metals and with less electrical noise than slip rings. An embodiment can monitor manufacturing processes, such as by employing a piezoelectric transducer to measure forces or pressures in a machine and generate an electrical signal representing, for example, forces measured by the piezoelectric transducer. A threshold modulator circuit converts the electrical signal into a series of electrical pulses, which can be transmitted as a corresponding series of magnetic field pulses to a wireless receiver. The receiver reconstructs the original electrical signal, thereby enabling a receiver system to determine physical activities in the machine. The embodiment may be self-powered through use of power generated by the piezoelectric transducer.

Abstract: In a piezoelectric device, a first electrode and a second electrode are disposed to be opposed to each other on plate surfaces of the piezoelectric device, a first electrode plane of the piezoelectric device is fixedly bonded to a plate surface of a vibrating plate, a piezoelectric material forming the piezoelectric device is polarized in a direction parallel to the first electrode plane, the piezoelectric device is fixed to a base through a second electrode plane of the piezoelectric device, and the piezoelectric device generates a thickness-shear vibration with the fixed second electrode plane being a reference plane. The piezoelectric vibration generated by the piezoelectric device generates a flexural vibration in the vibrating plate, to thereby remove dust adhering to a surface of the vibrating plate.

Abstract: A piezoelectric ceramic contains a main component, Mn as a first auxiliary component, and a second auxiliary component containing at least one element selected from the group consisting of Cu, B, and Si. The main component contains a perovskite metal oxide having the following general formula (1): (Ba1-xCax)a(Ti1-yZry)O3(0.100?x?0.145,0.010?y?0.039)??(1) The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048?b?0.0400, the second auxiliary component content on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less per 100 parts by weight of the metal oxide, and the value a of the general formula (1) is in the range of 0.9925+b?a?1.0025+b.

Abstract: There is provided a vibration actuator including: a housing providing an internal space and including holes formed to allow the internal space to be in communication with the outside; a diaphragm disposed to separate the internal space into first and second chambers; a mass body coupled to the diaphragm; and a piezoelectric element coupled to one inner surface of the housing and disposed under the mass body.

Abstract: A method and deformation compensated flexural pivots structured for precision linear nanopositioning stages are provided. A deformation-compensated flexural linear guiding mechanism includes a basic parallel mechanism including a U-shaped member and a pair of parallel bars linked to respective pairs of I-link bars and each of the I-bars coupled by a respective pair of flexural pivots. The basic parallel mechanism includes substantially evenly distributed flexural pivots minimizing center shift dynamic errors.

Abstract: A piezoelectric actuator, a piezoelectric vibration apparatus and a portable terminal are disclosed. The actuator includes a piezoelectric element, a flexible substrate and a bonding layer. The piezoelectric element includes a laminate in which inner electrodes and piezoelectric layers are alternatively stacked; and surface electrodes on a first main surface of the laminate, each electrically connected to some of the inner electrodes, respectively. The flexible substrate includes a wiring conductor that is electrically connected to the surface electrodes. The bonding layer is located between a part of flexible substrate and the first main surface. At least a region, where the flexible substrate is bonded, of the first main surface has a flatness worse than a flatness of an second main surface which is opposed to the first main surface.

Abstract: Provided is a device capable of functionalizing a micro-motion of a polarizable microstructure. A structure includes a plurality of polarizable structures, each having an electrically polarizable conductive part on a surface thereof, and a connector body having one of mobility and deformability, for connecting the plurality of polarizable structures to each other.

Abstract: Provided are a vibrating body and a vibration wave actuator, which can suppress vibration attenuation along with a reduction in size with an inexpensive structure, to thereby improve vibration efficiency, and can output stable vibration energy. A vibrating body includes: a piezoelectric element including a piezoelectric layer and an electrode layer; a ceramic substrate to which the piezoelectric element is fixed; and a ceramic layer including the same main component as a main component of the ceramic substrate, which is provided between the piezoelectric element and the ceramic substrate, and the piezoelectric element is fixed to the ceramic substrate through intermediation of the ceramic layer.

Abstract: An electromechanical transducer includes a first electrode mounted on one of a substrate and a base film, an electromechanical transducer film mounted on the first electrode and made of a piezoelectric substance having a perovskite crystal structure, and a second electrode mounted on the electromechanical transducer film. The electromechanical transducer film includes a {100} plane preferentially oriented to be orthogonal to a thickness direction of the electromechanical transducer film and has a full width at half maximum corresponding to a {200} plane in an X-ray diffraction measurement curve in 2?-? scan that is measured by emitting an X-ray beam onto a surface of the electromechanical transducer film at an incident angle ?. The full width at half maximum is not greater than 10 degrees.

Abstract: The present invention relates to a piezoelectric device. A piezoelectric device in accordance with an embodiment of the present invention includes a piezoelectric member and a connection member which are coupled to each other, wherein the piezoelectric member includes a polycrystalline member made of a polycrystalline piezoelectric material, a single crystal member made of a single crystal piezoelectric material and coupled to the connection member, and a textured member provided between the polycrystalline member and the single crystal member and having intermediate properties of the polycrystalline piezoelectric material and the single crystal piezoelectric material.

Abstract: A drug delivery pump drive which uses a linear piezoelectric motor to advance a syringe piston to deliver a liquid drug and a method thereof are disclosed. The pump drive, provided in a drug delivery pump, provides silent operation and very low energy consumption compared to electric motor-based drives. The small size of the motor helps also to reduce overall size of the pump drive and the resulting drug delivery pump.

Abstract: A strain amplification structure has a frame with a hexagonal structure incorporating a plurality of rigid beams that are connected to opposing end beams by a plurality of flexible joints. A piezoceramic actuator assembly is connected to the opposing end beams having a collar including an opening. A shaft providing an output is connected to the plurality of rigid beams with flexible joints and passes through the opening in the collar for non-interfering motion orthogonal to the actuator assembly.

Abstract: Disclosed is a vibration generating method includes providing a vibration generating device which receives a driving power and generates a vibration, and controlling vibration of a vibrator of the vibration generating device, wherein the vibration of the vibrator is controlled by systematizing an inertia matrix and a stiffness matrix of the vibrator, and wherein the inertia matrix and the stiffness matrix simultaneously satisfy diagonalization. A vibration generating device using this method is also disclosed.

Abstract: Disclosed herein is a piezoelectric vibration module including a vibration plate that is surrounded by an upper case and a lower case, and includes a first stopper capable of preventing direct collision between a piezoelectric element and an internal constituent member, for example, an upper plate while vibrating linearly therein. In particular, the piezoelectric vibration module may further include a second stopper in the lower case.

Abstract: An actuator includes a base member and an electro-mechanical transducer element including a first electrode, an electro-mechanical transducer film, and a second electrode. Further, the base member includes a thin wall part having a concave shape, the electro-mechanical transducer film is formed in a manner such that a film thickness of the electro-mechanical transducer film is gradually reduced from a center part of the electro-mechanical transducer film to both end parts of the electro-mechanical transducer film in at least one direction crossing a film thickness direction of the electro-mechanical transducer film.

Abstract: Disclosed are a vibration generator, which can increase the vibration force of a vibration plate by additionally applying the mass of a mass body to the vibration plate, and an electronic device including the same. The vibration generator includes at least one piezoelectric element mounted inside the case and subjected to compression and expansion in response to input power, a vibration plate including a body elongated in a preset lengthwise direction and having the at least one piezoelectric element mounted thereon, and generating vibrations by the compression and expansion of the at least one piezoelectric element, and at least one mass part adding a preset magnitude of mass to the vibration plate.

Abstract: A method for manufacturing a piezoelectric element includes a process for forming a first conductive layer, a process for forming a piezoelectric layer having a region serving as an active region, a process for forming a second conductive layer, which overlaps with the region, a process for forming a third conductive layer, which overlaps with the region, on the second conductive layer, a process for forming an opening portion that divides the third conductive layer into a first portion and a second portion, a process for forming a resist layer that covers the opening portion and a peripheral portion at the side of the opening portion of the first portion and the second portion; a process for etching the third conductive layer to form a first conductive portion and a second conductive portion, and a process for etching the second conductive layer to form a third conductive portion.

Abstract: An electromechanical motor includes an actuator assembly and a body to be driven in a driving direction. The actuator assembly has an actuator backing, a first actuator and a second actuator. The actuators are mechanically attached by a respective single attachment to the actuator backing at a first end of the actuators. The actuators have a respective interaction portion constituting a second end opposite to the first end in an actuator direction transverse to the driving direction. The interaction portions are arranged for interaction with an interaction surface of the body by a respective contact area. The actuators include a respective unimorph member arranged for causing a movement of the respective contact area as a response of a respective electrical signal. The respective movements are transverse to the actuator direction, to the driving direction, and to each other.

Abstract: An apparatus for actuating a positioning device includes a housing; a piezoelectric element connected to the housing; a driven element configured to move relative to the housing; and a flexible element connected to the piezoelectric element and configured to transfer a motion of the piezoelectric element to the driven element.

Abstract: The present invention is a rotary actuator having segments, which are spaced apart and are connected by means of at least one support structure, and at least one actuator for exerting forces, characterized in that the support structure is substantially rotationally symmetrical about an axis and is composed of elements which are not oriented parallel to the axis or which are twisted through an angle in relation to the axis, and the elements can be changed by rotation about the axis and the actuator can exert forces to at least one of the segments and the support structure in the direction of the axis.

Abstract: A piezoelectric actuator includes a vibration plate which is joined to a flow passage unit to cover a pressure chamber formed in the flow passage unit, a piezoelectric layer arranged on the vibration plate, a first electrode arranged on the piezoelectric layer to face the pressure chamber, a second electrode arranged on the piezoelectric layer while being opposed to the first electrode, and a third area arranged in the remaining area of the piezoelectric layer opposed to the pressure chamber. A first portion of the piezoelectric layer interposed by the first and second electrodes is polarized in parallel to the thickness direction. A second portion of the piezoelectric layer disposed between the first and third electrodes in the plane direction, is polarized in parallel to the plane direction. Accordingly, there are provided the piezoelectric actuator having a high driving efficiency.

Abstract: A piezoelectric element includes an element layer, an electrode layer including one or more positive electrode layers and one or more negative electrode layers repeatedly stacked to alternate with each other on the element layers in a vertical direction, a primary positive electrode connection member connecting the positive electrode layers, a primary negative electrode connection member connecting the negative electrode layers, at least one secondary positive electrode connection member, at least one secondary negative electrode connection member, and a primary electrode connected to the primary positive electrode connection member and the primary negative electrode connection member and configured of a pair of electrodes, and at least one secondary electrode spaced apart from the primary electrode and configured of a pair of electrodes.

Abstract: A piezoelectric actuator that includes a fixed electrode in a base substrate, a dielectric layer on the surface of the base substrate, a lower electrode that is at least partially separated from the base substrate, a piezoelectric layer on the surface of the lower electrode, and an upper electrode on the side of the surface of the piezoelectric layer. At least a portion of the upper electrode or the lower electrode serves as a movable electrode, which can be moved by distortion of the piezoelectric layer caused by application of a piezoelectric drive voltage.

Abstract: Disclosed is a haptic feedback device. The device includes a first frame, a second frame connected with the first frame, a display mounted in the first frame, an actuator for driving the display to vibrate thereby generating sound, and a connecting unit for connecting the first frame and the second frame.

Abstract: A piezoelectric actuator includes a fixed body, a movable body arranged to face the fixed body, and a plurality of piezoelectric elements arranged between the fixed body and the movable body and operating in a shearing mode. Each piezoelectric element having one end fixed to the fixed body and another end contacting the movable body, wherein a direction of polarization of each of the plurality of piezoelectric elements is different from each other.

Abstract: Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.

Abstract: An actuator assembly includes a housing and an actuator arranged within the housing, the actuator including a first part and a second part movable relative to the first part. An insulating material is disposed within the housing, the insulating material encapsulating at least the movable part of the actuator.

Abstract: Disclosed is an apparatus used in an electronic device for providing haptic feedback. The apparatus includes a main board defining a mounting surface, a vibration unit mounted on the mounting surface of the main board, the vibration unit being capable of vibrating along a direction parallel to the mounting surface. At least two screws are provided to fix the vibration unit on the main board, and a pair of stop block is provided to restricting the position of the vibration unit.

Abstract: The oscillation actuator of the invention uses ultrasonic vibrations generated in a stator to rotate a rotor, and a pre-load member causes a 30 MPa contact pressure between the rotor and the stator. Furthermore, a supply body impregnated with oil is provided inside a recess section in the stator, such that the contact section between the rotor and the stator is lubricated by oil supplied from the supply body. As the oil with which the supply body is impregnated, a fluorine-based oil having a kinetic viscosity at 40° C. of VG 400 according to the ISO viscosity classification is selected.

Abstract: A piezoelectric multiplexer includes an actuator and multiple bimorph beams. The actuator includes an actuator conducting head and an actuator stem, and each bimorph beam includes a conducting beam contact head and a beam stem manufactured out of bimorph material. A control voltage is selectively applied to electrical contacts coupled to the beam stems to create a piezoelectric effect that bends the selected bimorph beam and creates an electrical connection between its contact head and the conducting head of the actuator. A control circuit with a controller signals which bimorph beam to connect to the actuator. This multi-bimorph-beam piezoelectric multiplexer can be affixed to the electrical terminals of different electrical components (e.g., a transistor) to create an electrical cell that can be manufactured on a semiconductor chip or in a microelectromechanical system (MEMS) device.

Abstract: An carbon nanotube based electrostrictive element includes two electrostrictive layers spaced with each other, an electrical connector, and two electrodes. The two electrostrictive layers are electrically connected to each other at a first side, and spaced and insulated from each other at a second side via the electrical connector. The two electrodes are located at the second side and electrically connected respectively to the two electrostrictive layers.

Abstract: A reconfigurable bi-stable device includes an elastically deformable panel laterally disposed between and connected to one or more mounting members directly or indirectly connected to opposing ends of the panel, with the panel maintained under compressive force along at least one vector extending between the opposing ends. The compressive force deforms the panel into a one of two stable deformed positions, with the device disposed such that the panel may be moved between each of the two stable deformed positions by application of manual force to one of two opposing faces of the panel. A first shape memory alloy (SMA) or piezo actuator member is connected to the panel, the actuator member being capable of moving the panel from a first one of the two stable deformed positions to a second one of the two stable deformed positions.

Abstract: A liquid discharge apparatus includes a flow passage structure in which a liquid flow passage including a nozzle for discharging a liquid and a pressure chamber communicated with the nozzle, and a liquid sealing layer for covering the pressure chamber are formed; and a piezoelectric actuator which is arranged to contact with the liquid sealing layer of the flow passage structure. The piezoelectric actuator includes: an actuator substrate, which is arranged on a surface of the liquid sealing layer on a side opposite to the pressure chamber and which has a vibration layer and a columnar portion arranged between the liquid sealing layer and the vibration layer; and a piezoelectric portion which is formed as a film on a surface of the vibration layer disposed on a side opposite to the columnar portion.

Abstract: In a composite substrate, a back surface of a piezoelectric substrate and a front surface of a support substrate are bonded to each other with an adhesive layer. The adhesive layer includes a swelling portion at an outer peripheral area thereof, and the piezoelectric substrate is bonded to the support substrate in an area excluding the swelling portion 16a. Accordingly, air bubbles do not easily enter between the swelling portion of the adhesive layer and the piezoelectric substrate, and separations caused by the air bubbles can be prevented. As a result, the support substrate and the piezoelectric substrate can be reliably bonded to each other with the adhesive layer including the swelling portion in the outer peripheral area thereof.

Abstract: The present invention provides a sensor system for measuring an elastic modulus and a shear modulus and a method for using the sensor system to evaluate a tissue by determining the presence of and/or characterizing abnormal growths. The method involves applying a set of forces of different magnitudes to one or more locations of tissue, detecting the corresponding displacements due to said applied forces, determining the forces acting on those locations of tissue which are a combination of forces from the applied voltages and the countering forces from tissue deformation, obtaining the elastic modulus and/or shear modulus for a plurality of locations, and determining abnormal growth invasiveness, malignancy or the presence of a tumor from said elastic and/or shear moduli.

Abstract: A synthetic jet apparatus including a series of generally parallel spaced-apart bimorph piezoelectric plates defining first and second sets of fluid chambers. The chambers of the second set of fluid chambers are interleaved with the chambers of the first set of fluid chambers. The first and second sets of fluid chambers are in fluid communication with sources of first and second fluids, respectively, the source of the first fluid being separate from the source of the second fluid. The bimorph plates are operable to alternately draw the first fluid from its source into the first set of fluid chambers while expelling the second fluid from the second set of fluid chambers, and then expel the first fluid from the first set of fluid chambers back into its source while drawing the second fluid from its source into the second set of fluid chambers.

Abstract: A liquid ejecting head includes a flow path formation substrate provided with a pressure generation chamber communicated with at least one nozzle opening through which liquid is ejected; and an actuator apparatus including a vibration plate provided at one face side of the flow path formation substrate and a plurality of piezoelectric elements being formed on the vibration plate. The actuator apparatus includes two first piezoelectric elements arranged at positions facing edge portions in at least one direction of the pressure generation chamber and a second piezoelectric element arranged between the two first piezoelectric elements.

Abstract: A piezoelectric device system has a first piezoelectric element, a proof mass, a second piezoelectric element, and a microstructure output portion. The first piezoelectric element is oscillated by a power source. The proof mass is disposed between the first piezoelectric element and the second piezoelectric element, and transmits the vibration from the first piezoelectric element to the second piezoelectric element so as to make the second piezoelectric element move and generate power. The microstructure output portion is disposed on the other side of the second piezoelectric element opposite to the proof mass for transmitting the power generated by the second piezoelectric element.

Abstract: An electroactive polymer device is described that includes at least one layer of a dielectric polymer that is a polymerized product of at least one ethylenically unsaturated nitrogen-containing monomer. Also disclosed is a transducer that includes the electroactive polymer as disclosed.

Abstract: A piezoelectric motor includes a piezoelectric element having a piezoelectric layer, and a first and a second electrodes, the first electrode provided on one surface side of the piezoelectric layer, and the second electrode provided on the other surface side of the piezoelectric layer; a piezoelectric actuator having a vibrating member anchored to the first electrode of the piezoelectric element; and a rotational shaft with which the vibrating member makes contact and is rotated thereby.

Abstract: A monolithic multilayer actuator made of a sintered stack of thin films of piezoceramio with embedded metallic internal electrodes. All metallic internal electrodes of one polarity are electrically connected in parallel by way of a base metallization applied to the stack and wherein an external electrode is connected in an electrically conducting manner to the base metallization for electrical contacting purposes. In order to provide that the external electrode can be applied to the base metallization using simple and cost-effective means so that said electrode is expandable such that it dissipates the cracks arising from cracking energy in the actuator without the external electrode disconnecting in the process that are sintered together, the layer being applied onto the base metallization.

Abstract: A solder material can be used for fastening an outer electrode on a piezoelectric component. The solder material contains tin as the main constituent and at least one addition from the group of cobalt, tungsten, osmium, titanium, vanadium, iron and rare earth metals. A piezoelectric component includes such a solder material. The solder material is applied by means of a base metallization.

Abstract: A manufacturing method of a piezoelectric element includes: forming a first conductive layer upon a substrate; forming a piezoelectric layer upon the first conductive layer; forming a second conductive layer upon the piezoelectric layer; forming a third conductive layer upon the second conductive layer; forming a first portion, a second portion, and an opening portion provided between the first portion and the second portion by patterning the third conductive layer; forming a resist layer that covers the opening portion and covers the edges of the first portion and the second portion that face the opening portion side; and forming a first conductive portion and a second conductive portion configured from the first portion and the second portion, and forming a third conductive portion configured from the second conductive layer, by dry-etching the second conductive layer using the first portion, the second portion, and the resist layer as a mask.

Abstract: A drive apparatus and a beam-steering apparatus fabricated from a MEMS process. The apparatus has a first layer, a second layer and a plurality of fluid-filled volumes defined there between. A plurality of flexible structures such as bellows structures are defined on the first layer and are configured whereby a predetermined pressure in each of the volumes results in a predetermined displacement of the flexible structures. Pressurization means selectively changes the pressures in each of the volumes to define the predetermined displacement of the flexible structures. An electromagnetically reflective or mirror element and a plurality of drive beams are affixed to the reflective element and to one of the plurality of flexible structures whereby selected pressurization of the fluid in the volumes causes a predetermined displacement of the flexible structure to displace the reflective element about the plane of its surface.

Abstract: A method for fabricating a piezoelectric multilayer are described. The method includes providing conductive layers. Alternating conductive layers are electrically connected. A first plurality of alternating conductive layers is electrically isolated from a second plurality of alternating conductive layers. Piezoelectric layers are interleaved with the conductive layers. Apertures are provided in the piezoelectric layers. A first conductive plug electrically connects the first plurality of alternating conductive layers, includes a first plurality of segments, and is in apertures in the piezoelectric layers. Each of the first plurality of segments extends through one of the piezoelectric layers. A second conductive plug electrically connects the second plurality of alternating conductive layers, includes a second plurality of segments, and is in a second portion of the plurality of apertures. Each of the second plurality of segments extends through one of the plurality of piezoelectric layers.

Abstract: There is provided an actuator that can deform as an electrolyte moves, wherein at least one of a pair of electrode layers contains polymer fibers, and the polymer fibers contain an electroconductive material and are porous.