Abstract: A piezoelectric vibrator having excellent shock resistance and high reliability is offered. The centers of first and second piezoelectric vibrating plates are supported by pillars on a main surface of an enclosure and nearly or substantially parallel to the main surface of the enclosure. Spacers having a Young's modulus of less than 2 GPa are mounted on both end sides of the second piezoelectric vibrating plate to prevent contact between the vibrating plates, thus preventing damage. Other spacers are mounted on the main surface of the enclosure in positions corresponding to the first-mentioned spacers to prevent contact with the main surface of the enclosure, thus preventing damage to the second piezoelectric vibrating plate.

Abstract: An apparatus for conversion of mechanical energy to electrical energy having a piezo transducer (1), which is formed from two or more layers, and having a mass/spring system (2, 3, 4), which can oscillate, in a holder (5), which is caused (6) to oscillate mechanically when stimulated, which oscillations periodically deform the piezo transducer such that an alternating voltage occurs on the connecting wires (7) of the transducer.

Abstract: A piezoelectric/electrostrictive including a pair of mutually opposing vibration plates, each having a first portion and a second portion, a fixation section joined to the first portion of each of the vibration plates, and at least one piezoelectric/electrostrictive element arranged on at least one of the vibration plates. A surface of the device between the fixation section and the second portion of at least one of the vibration plates is curved.

Abstract: A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract: The present invention presents a system for a compound actuator. The system includes first and second electrode layers each including two electrode sections, an intermediate electrode layer between the first and second electrode layers, and first and second electrostrictive materials that change length in an applied electrical field. The first electrostrictive material is positioned between the first and intermediate electrode layers. The second electrostrictive material is positioned between the intermediate and second electrode layers. The first electrostrictive material has a first length adjoining the first electrode section and a second length adjoining the second electrode section. The second electrostrictive material has a third length adjoining the fourth electrode section and a fourth length adjoining the fifth electrode section.

Abstract: An actuator, comprising a beam (2) including a laminated structure which has piezoelectric layers (30, 31, 32) and electrode layers (20, 21, 22, 23), a holding mechanism to hold the beam, a feeding terminal (10) to supply an exciting power to the electrode layers of the beam, and a contact mechanism provided in the holding mechanism, the holding mechanism comprising a case (1) including a space (5) to house the beam (2) and a holding part to hold at least one of an end and a central portion of the beam (2), the contact mechanism being configured to contact with a part of the beam (2) and prevent the beam from excessively deflecting when a great impact is added to the beam.

Abstract: A thin film piezoelectric element has a laminate including a piezoelectric film and a pair of electrode films placed so as to sandwich the piezoelectric film in between, a resin film formed so as to cover the laminate, and an electrode formed on the resin film and electrically connected to the electrode film. The resin film is formed so that a thickness of a region where the electrode is formed is larger than a thickness of a region corresponding to a displaced portion of the laminate.

Abstract: A piezoelectric vibrator having excellent shock resistance and high reliability is offered. The centers of first and second piezoelectric vibrating plates are supported by pillars on a main surface of an enclosure and nearly or substantially parallel to the main surface of the enclosure. Spacers having a Young's modulus of less than 2 GPa are mounted on both end sides of the second piezoelectric vibrating plate to prevent contact between the vibrating plates, thus preventing damage. Other spacers are mounted on the main surface of the enclosure in positions corresponding to the first-mentioned spacers to prevent contact with the main surface of the enclosure, thus preventing damage to the second piezoelectric vibrating plate.

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.

Abstract: An equivalent to the spatial separation either side of a nominal median plane that is inherent in a bimorph (with one piezoelectric layer on one side, and the second on the other side of the plane) is attained by structurally shaping the cross-section of a simple, single piezoelectric layer (11) such that it has a multiplicity of piezoelectric portions arranged in two generally-planar groups one either side of a median plane, so that any dimension change undergone by a portion on one side of that plane will tend to bend the whole device in the opposite direction to the same sense dimension change undergone by a portion on the other side of that plane. The simple, single layer acts as though it were a bimorph if elongate and beam-like, bending along its length, one end moving up/down, or back/forth, relative to the other but with any need for an internal, electrode.

Abstract: Electro-active actuators (310) and methods of manufacturing such actuators are described with such actuators (310) having a plurality of electro-active segments (311) arranged along a curved line with each segment (311) being essentially planar and coupled to adjacent segments (311) through joint sections (312) placed at opposite corners of the segment (311). The actuators (310) exhibit a displacement in a different direction than the direction of displacement of a segment when seen in isolation. They can be made from a continuous tape of material, preferably by die punching.

Abstract: In a vibrator support structure, a vibrator is supported on a substrate through support pins, substrate connection portions of the support pins and pin connection portions of the substrate are joined through conductive adhesive which is made of a resin including conductive filler and has a pencil hardness of about 4H or less, and the conductive adhesive has a thickness which can buffer vibrations and impacts propagated through the support pins.

Abstract: A self-powered switching system using electromechanical generators generates power for activation of a latching relay, switch, solenoid or latch pin. The electromechanical generators comprise electroactive elements that may be mechanically actuated to generate electrical power. The associated signal generation circuitry may be coupled to a transmitter for sending RF signals to a receiver which actuates the latching relay. The use of mechanically activated membrane switches on the deflector or on a keypad allows multiple code sequences to be generated for activating electrical appliances or an electromechanical locking system.

Abstract: The present invention combines bending mode mechanical (frm) and electrical (fre) resonances, whereby a relatively good efficiency can be achieved within a relatively broad frequency range (?f3). An electrical resonance (frc) or mechanical resonance is designed to be situated in the same order of magnitude as another mechanical resonance (frm), but separated therefrom. Preferably, the separation (?f2) is smaller than 2f1/Q1, where f1 is the resonance frequency for the resonance having lowest quality value, and Q1 is the corresponding quality value of the mechanical resonance. An electromechanical motor comprising a driving element and electrical resonance circuit according to the above ideas may comprise a double bimorph driving element having one single actuating point influencing a body to be moved. The double bimorph driving element is excited in bending vibrations perpendicular to a main displacement direction, whereby both tangential and perpendicular motions are created by bending mode vibrations.

Abstract: A motor includes a resonator and a vibration source coupled to the resonator. The vibration source can be a piezoelectric vibration source. A drive shaft is coupled to the resonator via a linkage. The vibration source(s) impart a vibration along the resonator such that a lateral displacement of the resonator is focused at a location coupled to the linkage. The lateral displacement is coupled to the drive shaft to provide rotational motion of the drive shaft.

Abstract: An actuator includes a movable beam supported on a substrate by a supporting portion, and having a first movable end and a second movable end. The second movable end is opposite to the first movable end with respect to the supporting portion. A first drive beam is connected to the movable beam at around the second movable end. The first drive beam is fixed on the substrate at an end portion of the first drive beam. A second drive beam is connected to the movable beam at a location between the supporting portion and the first movable end. The second drive beam is fixed on the substrate at another end portion of the second drive beam.

Abstract: A piezoelectric element includes a first electrode; a piezoelectric layered film composed of a first piezoelectric film formed on the first electrode film and a second piezoelectric film that is formed on the first piezoelectric film and is controlled in crystal orientation thereof by the first piezoelectric film; and a second electrode film formed on the second piezoelectric film. Each of the first and second piezoelectric films is an aggregate of columnar grains grown unidirectionally along a thickness direction of the piezoelectric layered film. A columnar grain of the second piezoelectric film has a larger cross-sectional diameter than a columnar grain of the first piezoelectric film. A ratio l/d of the thickness l of the piezoelectric layered film to the cross-sectional diameter d of the second piezoelectric film is not less than 20 and not more than 60.

Abstract: A micromanipulator for positioning/localization of an operating instrument coupled therewith. The micromanipulator controls movement of the operating instrument in a single- or multi-axial system of coordinates with one or more electrical actuators. The electrical actuators are especially for providing a substantially elongated structure for the micromanipulator. The one or more actuators including a piezoelectric bender enable the positioning/localization of the operating instrument for providing at least one desired direction of motion.

Abstract: The present invention provides a piezo-electric/electrostrictive device including a pair of thin plate sections in an opposed relation to each other, a fixing section for supporting the thin plate sections, and at least one pair of piezo-electric/electrostrictive elements are provided to the pair of thin plate sections. The thin plate sections include movable sections having end surfaces in an opposed relation. Recesses are formed between the thin plate sections and the fixing section and/or the movable sections.

Abstract: A compact, high-sensitivity acceleration sensor that is prevented from being affected by factors other than acceleration, such as a change in temperature, has a bimorph acceleration-sensor element including first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end of the acceleration-sensor element is fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane in response to the acceleration, the central bending plane being positioned at a central portion of the base plate with respect to the application direction of acceleration.

Abstract: An actuator element has a plate member, a piezoelectric/electrostrictive body disposed in facing relation to the plate member, and a beam disposed between the plate member and the piezoelectric/electrostrictive body and fixing the piezoelectric/electrostrictive body to the plate member. The piezoelectric/electrostrictive body has a piezoelectric/electrostrictive layer, an upper electrode formed on a surface of the piezoelectric/electrostrictive layer which faces the plate member, and a lower electrode formed on a surface of the piezoelectric/electrostrictive layer which is opposite to the surface thereof facing the plate member. When an electric field is applied to the upper electrode and the lower electrode, a portion of the piezoelectric/electrostrictive body is displaced toward or away from the plate member.

Abstract: A micro switch having a dielectric layer having a movement region formed on a substrate, a conductive layer formed on a predetermined portion of the movement region, a dielectric film formed on the conductive layer, first and second electric conductors formed a predetermined distance above the dielectric film, one or two lower electrodes formed on the movement region, and one or two upper electrodes formed a predetermined distance above the two lower electrodes, the one or two upper electrodes moving the conductive layer and the dielectric film upwards when an electrostatic force occurs between the upper and lower electrodes, and capacitively coupled with the first and second electric conductors to allow a current to flow between the first and second electric conductors. Such a micro switch has a high on/off ratio and isolation degree and a simple structure, and can be fabricated in a very easy process.

Abstract: A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.

Abstract: A piezoelectric device includes a first electrode film, a second electrode film, and a piezoelectric thin film enclosed by the first electrode film and second electrode film, in which the piezoelectric thin film is an oxide piezoelectric thin film having an oxygen deficiency amount of more than 0% and not more than 10% of the stoichiometric composition. The piezoelectric device composed of the piezoelectric thin film having such oxygen deficiency has a greater piezoelectric performance as compared with the oxide piezoelectric thin film in an oxidized state of stoichiometric composition, and by manufacturing under such a condition, the film forming speed is increased, so that the mass producibility can be improved.

Abstract: A piezoelectric switch for tunable electronic components comprises piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

Abstract: A piezoelectric thick film element array includes at least one piezoelectric element structure having a thickness between 10 ?m to 100 ?m formed by a deposition process. The at least one piezoelectric element is patterned during the deposition process, and includes a first electrode deposited on a first surface of the piezoelectric elements structure, and a second electrode deposited on a second surface of the piezoelectric element structure. In a further embodiment, several devices are provided using a piezoelectric element or an array having a piezoelectric element structure with a thickness of between 10 ?m to 100 ?m formed by a deposition process. These devices include microfluidic ejectors, transducer arrays and catheters.

Abstract: The present invention is a piezoelectrically actuated relay that latches. The relay operates by means of the longitudinal displacement of a piezoelectric element in extension mode. The piezoelectric element displaces a liquid metal drop and causing it to wet between at least one set of contact pads and at least one other set of contact pads. Positioning of the liquid metal causes the optical path to be blocked. The same motion that causes the liquid metal drop to change position can cause the optical path to be unblocked between the fixed pad and a contact pad on the piezoelectric element or substrate close to it. The motion of the piezoelectric element is rapid and causes the imparted momentum of the liquid metal drop to overcome the surface tension forces that would hold the bulk of the liquid metal drop in contact with the contact pad or pads near the actuating piezoelectric element. The switch latches by means of surface tension and the liquid metal wetting to the contact pads.

Abstract: A first counter electrode and a second counter electrode, for electrically coupling a first piezoelectric element unit and a second piezoelectric element unit, for composing a thin film piezoelectric element are common floating electrodes. A first principal electrode film and a second principal electrode film of each piezoelectric element unit are connected, and a voltage is applied between the two piezoelectric element units. As a result, by the wiring of two terminals only without using grounding electrode wiring, the first piezoelectric element unit and second piezoelectric element unit can be driven, so that the wiring process may be substantially simplified.

Abstract: There is disclosed a piezoelectric/electrostrictive film device which has a flexural displacement and durability equal to or more than those of a related-art piezoelectric/electrostrictive film device and which has a remarkably high resonance frequency and which is superior in high-speed response. The piezoelectric/electrostrictive film device comprises: a substrate formed of ceramic; and a piezoelectric/electrostrictive operation portion including a lower electrode, piezoelectric/electrostrictive layer, and upper electrode which are successively stacked on the substrate and including a projecting end of the piezoelectric/electrostrictive layer with which an upper surface of the lower electrode and a lower surface of the upper electrode are coated, and a projecting portion of the piezoelectric/electrostrictive layer is a coupling member constituted of a hybrid material in which inorganic particles are scattered in a matrix of a polymer compound, and is coupled to the substrate.

Abstract: Provided is an actuator manufactured using a material obtained by mixing a film material featuring stable motion and high speed of response and used for ion conductive polymer actuators with conductive fine particles. According to the present invention, an actuator which is light in weight, produces low operating noise, and can be used safely and stably, and at the same time, produces expansion/contraction motion, and has speed of response comparable to that of a natural muscle can be obtained.

Abstract: A piezoelectric type electroacoustic transducer includes a piezoelectric vibrating plate including a plurality of piezoelectric ceramic layers laminated to each other with an internal electrode being interposed between the piezoelectric ceramic layers, and main surface electrodes disposed on the main surfaces on the front and back sides of the piezoelectric vibrating plate, whereby the piezoelectric vibrating plate is surface-flexural-vibrated in the thickness direction thereof with an AC signal applied between the main surface electrodes and the internal electrode, and a box having supporting portions on which the outer peripheral portions on the back side of the piezoelectric vibrating plate is supported, the piezoelectric vibrating plate having a protecting film substantially on the entire surface on the back-side only or on the front and back sides of the piezoelectric vibrating plate, and the protecting film being formed by applying a resin in a film-shape and hardening the resin, or by bonding an adhesi

Abstract: A transducer is designed and fabricated using stretched rolled electroactive polymers. The invention includes the design, fabrication, and integration of a stretched rolled actuator system with corresponding sensing, control and power subsystems. The invention presented is based on the improved performance of electroactive polymer transducers that can be achieve by prestretching the polymeric material. In this invention, the preferred stretch is maintained in a rolled configuration by introducing structural elements to the transducer. The structural elements facilitate fabrication of the transducer as well as provide a compact and efficient means of maintaining stretch and the desired boundary conditions on the electroactive polymer during operation. These conditions together are used to improve and tailor the strain response of the transducer.

Abstract: A piezoelectric/electrostrictive device includes a base having a pair of right and left movable parts and a fixing part disposed at one end thereof, and piezoelectric/electrostrictive elements disposed on the sides of the movable parts of the base. Accordingly, the piezoelectric/electrostrictive device is fabricated to have a construction with fewer components. The piezoelectric/electrostrictive device having a construction with fewer components is provided by adopting a base having an integral structure formed by bending an original plate stamped into a shape that delineates a plane development of the base.

Abstract: A flexural actuator is fitted with an actuator means, the flexural actuator being fitted at its functional section with a sensor means for determination of the longitudinal stretch. This sensor means is placed at a position, and/or is placed in the longitudinal direction symmetrically on either side of such position, at which there is a constant longitudinal stretch independent from the setting force when the functional section is thrusting against a resistance.

Abstract: A piezoelectric/electrostrictive film device is provided, including a ceramic substrate, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate. The piezoelectric/electrostrictive layer covers an upper surface of the lower electrode and a lower surface of the upper electrode and protrudes over edges thereof. The protruded portions of the piezoelectric/electrostrictive layer are coupled to the substrate via a coupling member.

Abstract: There is provided a piezoelectric/electrostrictive film type device comprising: a substrate formed of a ceramic, at least one piezoelectric/electrostrictive portion formed of a piezoelectric/electrostrictive porcelain composition on the substrate, and at least one pair of electrodes on the substrate, electrically connected to the piezoelectric/electrostrictive portion and including a positive electrode and a negative electrode. The piezoelectric/electrostrictive porcelain composition contains a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary solid solution system composition as a major component, and contains 0.05 to 3.0 wt % of NiO, and contains 2.0 to 22.0 mol % of Si with respect to the total number of moles of Mg and Ni. The piezoelectric/electrostrictive portion is solidly attached onto the substrate directly or via the positive electrode or the negative electrode.

Abstract: An electroactive device comprises at least two layers of material, wherein at least one layer is an electroactive material and wherein at least one layer is of non-uniform thickness. The device can be produced in various sizes, ranging from large structural actuators to microscale or nanoscale devices. The applied voltage to the device in combination with the non-uniform thickness of at least one of the layers (electroactive and/or non-electroactive) controls the contour of the actuated device. The effective electric field is a mathematical function of the local layer thickness. Therefore, the local strain and the local bending/torsion curvature are also a mathematical function of the local thickness. Hence the thinnest portion of the actuator offers the largest bending and/or torsion response. Tailoring of the layer thicknesses can enable complex motions to be achieved.

Abstract: A piezoelectric/electrostrictive device includes a ceramic substrate having a pair of mutually opposing thin plate sections, a fixed section for supporting the thin plate sections, and movable sections disposed at ends of the pair of thin plate sections. The piezoelectric/electrostrictive device has a portion of each movable section opposed to the fixed section, the portion being formed in a stepped form so that respective attachment surfaces are provided with steps. Cutouts (cutaways) are formed at portions of an inner wall of the fixed section near the thin plate sections. Further, steps are provided on inner walls of the cutouts disposed on the sides of the thin plate sections.

Abstract: First internal electrode layers and second internal electrode layers are alternately laminated in a substrate while sandwiching piezoelectric material layer therebetween. The first internal electrode layers are exposed to a first end face of the substrate, and the second internal electrode layers are exposed to a second end face of the substrate which is opposite to the first end face. A first external electrode layer is formed on the first end face and a third end face connecting the first end face and the second end face. A second external electrode layer is formed on the second end face and the third end face. The second external electrode layer is electrically independent from the first external electrode layer. The first external electrode layer and the first internal electrode layers are to be divided by slits extending from the first end face to form a plurality of piezoelectric elements arrayed in a first direction.

Abstract: A construction of benders is disclosed in which benders of single and double lengths are conjoined in a particular manner, which results in constructions in which objects can be rotated but not translated. Three constructions are detailed, one in which an object is rotated over two unit angles alpha, whereas a second construction is disclosed whereby an object is rotated over four unit angles alpha, while a third construction is disclosed in which an object is rotated over eight unit angles alpha. An example is disclosed in which the repeated application of identical units will result in larger rotation angles, still without causing translation.

Abstract: A bimorphic polymeric photomechanical actuator, in one embodiment using polyvinylidene fluoride (PVDF) as a photosensitive body, transmitting light over fiber optic cables, and controlling the shape and pulse duration of the light pulse to control movement of the actuator. Multiple light beams are utilized to generate different ranges of motion for the actuator from a single photomechanical body and alternative designs use multiple light beams and multiple photomechanical bodies to provide controlled movement. Actuator movement using one or more ranges of motion is utilized to control motion to position an actuating element in three dimensional space.

Abstract: A ceramic device has an actuator element which includes a shape-retaining layer, an upper electrode formed on an upper portion of the shape-retaining layer, and a lower electrode formed on a lower portion of the shape-retaining layer. A vibrating section of ceramics supports the actuator element and a fixed section of ceramics vibratingly supports the vibrating section. An electrode material of the lower electrode contacting the vibrating section contains an additive in an amount of 0.01% by weight to 20% by weight. The electrode material contains platinum as a major component, for example. The additive to the electrode material is preferably zirconium oxide, cerium oxide, or titanium oxide.

Abstract: A pair of opposing thin plate sections, movable sections, and fixed sections for supporting the thin plate sections and the movable sections are provided on a ceramic substrate. After a wiring pattern and a gap or an insulating layer of cermet layer for filling the gap are formed on a ceramic substrate, these are sintered. After that, piezoelectric/electrostrictive layers and cermet electrode layers including a piezoelectric/electrostrictive material and a conductive material are alternately stacked in a comb like structure on the ceramic substrate. Accordingly, a piezoelectric/electrostrictive device having the piezoelectric/electrostrictive element in multilayer structure is obtained.

Abstract: A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure interposed between a piezoelectric material element and a chamber diaphragm. The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm.

Abstract: A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure interposed between a piezoelectric material element and a chamber diaphragm. The mesa structure may further comprise a series of mesa openings at least partially filled with adhesive and mesa grooves. The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm.

Abstract: An electromechanical motor (1) has a driving element (30) comprising two electromechanical sections (32, 34) extended substantially parallel to a driving surface (14) of a body (10) to be moved. The electromechanical sections (32, 34) are rigidly supported by a backbone portion (22) of a stator (20) at a first end (38). An link member (40) having a single actuating portion (42), which by its interaction with the driving surface (14) of the body (10) moves the body (10), is attached between respective second ends (36) of the electromechanical sections (32, 34). The electromechanical sections (32, 34) are excitable in a vibration mode having strokes substantially perpendicular to the direction of motion (12). A portion of the link (40) or the joints (46, 54) between the link member (40) and the electromechanical sections (32, 34) have a bending stiffness in the direction of the strokes that is significantly lower than the bending stiffness of the electromechanical sections (32, 34) themselves.

Abstract: Bender devices are demonstrated by developing non-uniform fields within a homogeneous, non-planar single slab active member material of non-uniform thickness through geometrical constraints and electrode placement. Single slab actuators are demonstrated for semiconductor designs including MEMS applications. Single slab bender periodic designs are demonstrated to be well suited for MEMS fabrication. Shaped actuators having a topological pattern formed across at least one portion are demonstrated to induced strain at the patterned portion of the actuator, causing the patterned portion to flare into open and close positions upon application of an external field. Voltage transformers, spark generators, power sources, and sensors are developed using the non-planar, homogeneous, single slab active member material of non-uniform thickness. Last, semiconductor process design techniques are demonstrated for periodic and other non-planar single slab actuators.

Abstract: A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

Abstract: A fetal heart monitoring system preferably comprising a backing plate having a generally concave front surface and a generally convex back surface, and at least one sensor element attached to the concave front surface for acquiring acoustic fetal heart signals produced by a fetus within a body. The sensor element has a shape that conforms to the generally concave back surface of the backing plate. In one embodiment, the at least one sensor element comprises an inner sensor, and a plurality of outer sensors surrounding the inner sensor. The fetal heart monitoring system can further comprise a web belt, and a web belt guide movably attached to the web belt. The web belt guide being is to the convex back surface of the backing plate.