Abstract: A piezoelectric electroacoustic transducer includes a substantially rectangular piezoelectric diaphragm, a case having supports to support the four corners of the bottom surface of the piezoelectric diaphragm, terminals fixed to the case, each including an inner connection portion exposed near the supports, a first elastic adhesive disposed between the periphery of the piezoelectric diaphragm and the terminals, a conductive adhesive disposed between electrodes of the piezoelectric diaphragm and the terminals across the top surface of the first elastic adhesive, a second elastic adhesive filling and sealing a gap between the periphery of the piezoelectric diaphragm and an inner portion of the case, and an overamplitude-preventing receiver provided on a bottom wall of the case to limit the amplitude of vibration of the piezoelectric diaphragm to a predetermined range. The overamplitude-preventing receiver is disposed closer to the center of the piezoelectric diaphragm than the supports.

Abstract: A broad band energy harvesting system to harvest energy from a structure and associated methods are provided. The system includes a structure carrying a plurality of environmentally produced vibration frequencies extending over a frequency range and an energy harvesting apparatus positioned in vibration receiving communication with the structure to harvest energy from the structure. Each energy harvesting apparatus includes broadly tuned energy harvesting generators having relatively low quality factor and corresponding relatively wide bandwidth. The energy harvesting generators collectively provide energy harvesting over multiple modes to thereby provide energy harvesting over a substantial portion of the frequency range. Each energy harvesting generator can include a cantilevered beam connected to a common backbone comprised of a resilient material configured to transfer energy between adjacent generators to further enhance energy harvesting.

Abstract: A mechanical energy generating apparatus is provided. The apparatus includes a shape changing flexure beam connected at opposing distal ends to first lever arms of a pair of opposing tilt connectors. The apparatus additionally includes a bias beam connected at opposing ends to second lever of the tilt connectors. The tilt connectors are pivotally connected to an adjustable length base such that a distance between the tilt connectors can be adjusted to flex the bias beam and exert a force on the second lever arms of the tilt connectors. The force exerted by the bias beam is transferred to the first lever arms and flexes the flexure beam to approximately a critical buckling stress point of the flexure beam.

Abstract: A piezoelectric oscillator includes: a piezoelectric substrate having at least a vibrating part and a base part; an excitation electrode formed on the vibrating part; and an oscillation circuit formed on the base part. In the piezoelectric oscillator, the oscillation circuit includes a thin film transistor made of one of polysilicon and monocrystalline silicon and is coupled to the excitation electrode.

Abstract: A driving device, small in size and light in weight, is to stabilize the position of a surface-deforming element while reducing the effect of gravity thus enabling stable transfer and positioning. The driving device is structured to hold a movable member integrated with a piezoelectric vibrator and a lens by a shaft provided at a tip of a spring extended from an inner surface to center of a passageway. The shaft extends through an opening formed in a protrusion of the movable member. By a tensile force of the spring, the movable member at its outer periphery is pulled radially and held. When applying a voltage with a waveform changing sharply to the piezoelectric vibrator, the movable member flexes maximally upward or downward to have a reduced diameter and an increasing acceleration thereby making a movement. Then, when a frictional force increases, the protrusion is held at a point where the movable member moves.

Abstract: An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The actuating assembly comprises a membrane overlying a circuit to be tuned, a conductive element connected with the membrane, and a piezoelectric arrangement. Changes in shape of the piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element. In the process, a membrane and a piezoelectric structure are formed on a substrate.

Abstract: A voice coil motor device for positioning is disclosed. The voice coil motor device for positioning includes a fixed element, a moving element and a connector. The moving element is movably disposed on the fixed element. One end of the connector is connected with the fixed element and the other end of the connector is connected with the moving element. A piezoelectric element is disposed on the connector or deposed between the moving element and the fixed element. The piezoelectric element can be deformed with the movement of the moving element to generate a displacement signal of a moving element. The positioning of the voice coil motor can be achieved precisely basing on the judgment on the displacement signal of the moving element generated with the movement of the moving element by the piezoelectric element.

Abstract: A high-output energy converter of an output-improving thermionic generator, thermally connected to other generators without moving parts that utilise the residual energy from the thermionic generator. The thermionic generator comprises a r?ultilayered vacuum diode, the layers of which are very thin and the gaps between the layers are also thin and kept at a distance from one another by selectively flexible spacer elements. Piezo elements or heating elements can precisely adjust the height of the gaps.

Abstract: A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.

Abstract: In one embodiment, an actuator device includes a first electroactive polymer layer, including an active electroactive polymer layer portion. In one embodiment, the active electroactive polymer layer portion is controllably shiftable between a substantially neutral state and a buckled state.

Abstract: A bending transducer device for generating electrical energy includes at least one elastically deformable support structure, one piezoelectric element, and a bearing device. The piezoelectric element is configured and situated on the support structure in such a way that the piezoelectric element is deformable due to a deformation of the support structure caused by vibration, and the support structure is supported vibration-capably in at least one bearing of the bearing device, the bearing being configured as an articulated receptacle, e.g., a hinge.

Abstract: Methods and apparatus relating to use and/or provision of a rake piezo actuator are described. In one embodiment, a piezo patch may be coupled to a plurality of blades (e.g., to cause the blades to oscillate and provide air flow between fins of one or more heat sinks). Other embodiments are also described.

Abstract: An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and an upper electrode provided on the piezoelectric body. The lower electrode, the piezoelectric body and the upper electrode form a vibration section. The support section for supporting the vibration section is shaped such that at least one portion of a vertical cross-section thereof has a curvature.

Abstract: It is made possible to provide a piezoelectric driven MEMS device having the distance between the action end and the fixed electrode which is kept constant regardless of whether the residual strain is large or small and having a mechanism which is excellent in reproducibility and reliability. Two piezoelectric driven actuators each having a folded beam structure are disposed in parallel and in a line-symmetric manner, and connected to each other in the vicinity of an action end.

Abstract: Microfluidic shunt valves are disclosed having a deflectable element capable of being held in a closed position to occlude the passage of fluid between an inlet and outlet and, when not held in the closed position, the deflectable element is adapted to oscillate in response to fluid pressure pulses and thereby facilitate fluid passage through the valve. Controls for activating the deflectable element to permit fluid passage are also included.

Abstract: An optical element module includes an optical element, and a plurality of actuator elements. In the module, each actuator element has an ion conductive polymer film and electrodes arranged on both sides of the film, and a whole of the actuator element is bent in a direction of thickness by applying a voltage between the electrodes, and the direction of the thickness of the actuator elements is a direction of an optical axis of the optical element, the actuator elements are arranged at equal intervals around the optical axis on a plane perpendicular to the optical axis, and a displacement due to the bend of one end part of at least one actuator element acts on one of a side surface and a bottom surface of the optical element to effect one of tilting and movement in the direction of the optical axis of the optical element.

Abstract: Described herein are compliant electroactive polymer transducers for use in acoustic applications. A compliant electroactive polymer transducer includes a compliant electroactive polymer at least two electrodes. For sound production, circuitry in electrical communication with the transducer electrodes is configured to apply a driving signal that causes the electroactive polymer to deflect in the acoustic range.

Abstract: A piezoelectric actuator includes a piezoelectric layer, a vibration plate, a supporting member which has an relief portion. A thin wall portion is provided in a first area, of one of the piezoelectric layer and vibration plate, facing one end portion in a longitudinal direction of the relief portion. A thickness of the thin wall portion is smaller than a thickness of areas, of one of the piezoelectric layer and vibration plate, facing the central portion and one end portion in a width direction of a pressure chamber, respectively. This makes it possible to provide a piezoelectric actuator which is capable of increasing an amount of displacement of the vibration plate.

Abstract: An ion conducting actuator includes a substrate which is made of a polymer material, and facing electrodes for generating an electric field. In the ion conducting actuator, a shape of the substrate is deformed to a desired shape by distributing unevenly ions and/or polar molecules in the substrate by applying a voltage between the facing electrodes. A deformation state is formed by a shape-maintained time t2 for which the shape of the substrate is maintained substantially, and a deformation-start time t1 which is before the shape-maintained time t2, and during which, the shape of the substrate is deformed from an arbitrary shape to a desired shape. A drive voltage V applied to the ion conducting actuator differs during the shape-maintained time t2, and during the deformation-start time t1.

Abstract: Adhesive properties between an electrically conductive polymer membrane and a solid electrolyte membrane to each other are improved, and thus the operation of an electrically conductive polymer actuator which effects a bending motion is ensured. An electrically conductive polymer actuator having a laminated structure including: a solid electrolyte membrane constituted with a mixture of an ionic liquid, and an organic polymer that contains at least one or more of a vinylidene fluoride/hexafluoropropylene copolymer [P(VDF/HFP)], polyvinylidene fluoride (PVDF), a perfluorosulfonic acid/PTFE copolymer, polymethyl methacrylate (PMMA), polyethylene oxide (PEO) and polyacrylonitrile (PAN); and an electrically conductive polymer membrane constituted with a mixture of polystyrene sulfonic acid (PSS) and polyethylenedioxythiophene (PEDOT) on at least one face of the solid electrolyte membrane, characterized in that polyethylene glycol is included in the electrically conductive polymer membrane.

Abstract: A piezoelectric/electrostrictive device which exhibits an excellent piezoelectric characteristic and which has only a small dependence on a temperature is provided. The piezoelectric/electrostrictive device includes a piezoelectric/electrostrictive portion made of a piezoelectric ceramic, and electrodes electrically connected to the piezoelectric/electrostrictive portion. The piezoelectric ceramic reversibly transits to a tetragonal phase and an orthorhombic phase at a phase transition point as a boundary. The piezoelectric/electrostrictive portion is formed by a polarization treatment performed under the conditions that a treatment temperature ranges from a first temperature which exceeds the phase transition point of the piezoelectric ceramic to a second temperature which is 50° C. higher than the first temperature.

Abstract: A drug delivery pump which uses a piezoelectric drive system to advance a small syringe piston to deliver a liquid drug and a method thereof are disclosed. The present invention has a cost and size advantage compared to traditional pumps and is a very compact and potentially disposable pump device design.

Abstract: A suspended film bulk acoustic micro-resonator that includes a beam made of a piezoelectric material fixed to a support and sandwiched between excitation electrodes. The resonator also includes a mechanism modifying limiting conditions of the resonator composed of the excited beam to modify the micro-resonator resonant frequency.

Abstract: A micro electromechanical switch has a movable portion positioned to form an electrical connection between a first electrical contact and a second electrical contact. A piezoelectric electrode is formed on the movable portion. The piezoelectric electrode causes the movable portion to move in response to a driver voltage. A piezo element is formed on the movable portion of the switch. The piezo element is for detecting movement of the movable portion between an open position and a closed position. The piezo element is also used to detect switch bouncing when the switch transitions from the open position to the closed position. In one embodiment, the piezo element is a piezoelectric element and in another embodiment the piezo element is a piezo-resistive element.

Abstract: There is a need for a piezoelectric element capable of improving a productivity and a yield without impairing the piezoelectric characteristic and a method for manufacturing the same. A piezoelectric element is provided with a substrate, a first electrode film disposed on the substrate, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. The piezoelectric film has a laminated structure composed of a plurality of crystallized piezoelectric thin films. The piezoelectric film having a predetermined thickness is formed by repeated cycles of a film formation step of forming a piezoelectric thin film and a crystallization heat treatment step of heat-treating the piezoelectric thin film to effect crystallization. In this manner, a piezoelectric film exhibiting uniform crystallinity in the film thickness direction may be produced.

Abstract: A vibration device comprising; a vibrator which generates bending vibration on a predetermined member, a controller which controls a driver to drive the vibrator, wherein; the vibrator comprises a plurality of driving electrodes electrically insulated respectively, the controller controls the driver to make phases of driving signals respectively output to the plurality of driving electrodes changeable relatively and adjust an order of the bending vibration.

Abstract: An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.

Abstract: A monomorph type piezoelectric/electrostrictive device includes a piezoelectric/electrostrictive body, which is composed of a non-lead based piezoelectric/electrostrictive crystalline body containing at least Nb, Ta, and one or more types of alkali metal element, which has a cubic crystal structure at a temperature higher than the phase transition point and at least any one of tetragonal and orthorhombic crystal structures at a temperature lower than the phase transition point, and which is curved to a large extent by a polarization treatment to take on a curved shape at a temperature lower than the phase transition point without application of a voltage after the polarization treatment. In the polarization treatment, an electric field is increased at a speed of from 0.1 (kV/mm)/sec or more to 5 (kV/mm)/sec or less, with applying the maximum electric field of from 2 kV/mm or more to 1.0 kV/mm or less.

Abstract: A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

Abstract: A piezoelectric/electrostrictive device is provided including a substrate section and an operation section disposed on the substrate section. The operation section includes a piezoelectric/electrostrictive film and an electrode film, and the device operates by displacement of the operation section. The piezoelectric/electrostrictive films and electrode films are alternately laminated so that uppermost and lowermost layers form the electrode films. The operation section and the substrate section are integrally fired, and the substrate section is ceramic material containing a titanium element.

Abstract: Methods for integrating quartz-based resonators with electronics on a large area wafer through direct pick-and-place and flip-chip bonding or wafer-to-wafer boding using handle wafers are described. The resulting combination of quartz-based resonators and large area electronics wafer solves the problem of the quartz-electronics substrate diameter mismatch and enables the integration of arrays of quartz devices of different frequencies with the same electronics.

Abstract: A piezoelectric fan includes a piezoelectric actuator patch (110, 210, 310) and a blade (120, 220, 320) attached to the piezoelectric actuator patch. The blade has a hole (121, 127, 221) in it, and a door (122, 128, 222) is adjacent to the hole and attached to the blade (as with a hinge (123, 129, 223)) such that the door is capable of opening and closing.

Abstract: A piezoelectric Micro Electro Mechanical System (MEMS) switch includes a substrate, first and second fixed signal lines symmetrically formed in a spaced-apart relation to each other on the substrate to have a predetermined gap therebetween, a piezoelectric actuator disposed in alignment with the first and the second fixed signal lines in the predetermined gap, and having a first end supported on the substrate to allow the piezoelectric actuator to be movable up and down, and a movable signal line having a first end connected to one of the first and the second fixed signal lines, and a second end configured to be in contact with, or separate from the other of the first and second fixed signal lines, the movable signal line at least one side thereof being connected to an upper surface of the piezoelectric actuator.

Abstract: A piezoelectric RF micro electro mechanical system (MEMS) device and a method of fabricating the same are provided, in which the RF MEMS device is driven upward at a low voltage based on a piezoelectric effect. The piezoelectric RF MEMS device includes an upper substrate provided with an RF output signal line, a piezoelectric actuator positioned below the RF output signal line, and a lower substrate provided with a cavity so that one end of the piezoelectric actuator is fixed to the lower substrate and its other end is movably spaced apart from the upper and lower substrates, wherein the piezoelectric actuator is provided with an RF input signal line thereon, and a contact pad is provided to connect the RF output signal line with the RF input signal line when the piezoelectric actuator is driven upward.

Abstract: Disclosed is a piezoelectric/electrostrictive membrane sensor 20 wherein the main component of terminal electrodes 18, 19 is contained in the vicinity of the surface of a piezoelectric/electrostrictive body 5. The membrane sensor 20 is hardly electrostatically charged and thus prevented from electrostatic discharge damage and attraction of dust, dirt or the like.

Abstract: A piezoelectric material, characterized in that a main component of the piezoelectric substance is PZT, which has perovskite type structure expressed in Pb(ZrxTi1-x)O3 (x expresses an element ratio Zr/(Zr+Ti) of Zr and Ti in the formula), an element ratio Pb/(Zr+Ti) of Pb, Zr and Ti of the piezoelectric substance is 1.05 or more, and an element ratio Zr/(Zr+Ti) of Zr and Ti is 0.5 to 0.8 inclusive, and the piezoelectric substance has at least a perovskite type structure of monoclinic system.

Abstract: Electroactive polymer constructions that convert electrical energy to mechanical energy and vice versa are disclosed. The subject transducers (actuators, generators, sensors or combinations thereof) share the requirement of a frame or fixture element used in preloading elastomeric film electrodes and dielectric polymer in a desired configuration. The structures are either integrally biased in a push-pull arrangement or preloaded/biased by another element.

Abstract: Actuator comprising: a) a support beam b) a first means for placing said support beam in compression without causing flexure of said support beam; c) a first layer of material adhered to a first surface of said support beam and d) a second means for causing movement of said first layer of material to cause a flexure of said layer of material and said support beam, wherein said first layer of material evidences a thermal coefficient of expansion that is different than a thermal coefficient of expansion of said support beam, wherein the actuator is designed to operate at a first working temperature whilst the first layer of material is structurally connected to the support beam at a second temperature wherein the second temperature is higher than the first temperature so as to cause that at the first temperature the said support beam is in compression without causing flexure thereof.

Abstract: Disclosed is a piezoelectric/electrostrictive membrane type sensor 20 provided with a ceramic base body 1 and a piezoelectric/electrostrictive element 12. The ceramic base body is provided with a thin diaphragm portion 3, a thick portion 2 and a cavity 10 formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body 1 and includes a piezoelectric/electrostrictive body 5, and an upper electrode 6 and a lower electrode 4 sandwiching the piezoelectric/electrostrictive body 5. In the piezoelectric/electrostrictive membrane type sensor 20, the piezoelectric/electrostrictive body 5 contains an alkaline metal or an alkaline earth metal, and the upper electrode 6 and the lower electrode 4 contain gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents continuation of low-quality measurement.

Abstract: The piezoelectric device includes a piezoelectric film that expands or contracts according to variations in voltage applied, a first electrode provided on a first side of the film, and a second electrode provided on a second side of the film. The film is formed on the second electrode by a vapor phase deposition and mainly composed of PbxByOz. An element at site B is at least one element selected from the group consisting of Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Sc, Co, Cu, In, Sn, Ga, Zn, Cd, Fe, and Ni, and 0<x?1, 0<y?1, and 2.5<z?3. A first value of x/y in a first area of the film 100 nm apart from a surface of contact with the second electrode toward the first electrode ranges from 0.8 to 1.6 or is 0.7 times or more but not greater than 1.5 times a second value of x/y in a center area of the film, or the first area has a ratio of perovskite peaks to pyrochlore peaks as measured by XRD of 0.2 or more.

Abstract: A perovskite type oxide that is represented by Formula (P) shown below is provided: (Pb1?x+?Mx) (ZryTi1?y)Oz ??(P) wherein M represents at least one kind of element selected from the group consisting of Bi and lanthanide elements, x represents a number satisfying the condition of 0.05?x?0.4, and y represents a number satisfying the condition of 0<y?0.7, the standard composition being such that ?=0, and z=3, with the proviso that the value of ? and the value of z may deviate from the standard values of 0 and 3, respectively, within a range such that the perovskite structure is capable of being attained.

Abstract: A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.

Abstract: A piezoelectric element driving circuit includes: a transformer; a switch circuit; a reactance element connected in parallel with the piezoelectric element on one of the primary side and the secondary side of the transformer, the reactance element forming a resonant circuit that performs parallel resonance at the driving frequency with a capacitance component in an equivalent circuit of the piezoelectric element and an inductance component of the transformer; a pulse generating circuit for generating a driving pulse for the switch circuit; and a duty ratio controlling circuit for being supplied with the driving pulse, limiting a duty ratio of the driving pulse such that a value of the driving voltage falls within a range equal to or lower than the specification voltage value on the load side, and outputting the driving pulse whose duty ratio is limited to the switch circuit.

Abstract: Electroactive polymer transducers are disclosed. They are biased in a manner that provides for increased force and/or stroke output, thereby offering improved work potential and power output capacity. The biasing may offer additional or alternate functional advantage in terms of matching transducer performance with a given application such as a normally-closed valve. The improved biasing (including increased output biasing) may utilize negative spring rate biasing and/or a combination of negative or zero-rate biasing with positive rate biasing to achieve the desired ends.

Abstract: In a piezoelectric device, a first electrode, a first piezoelectric film, a second piezoelectric film, and a second electrode are formed in this order on a first electrode formed above a surface of the substrate, and an intermediate electrode is arranged between the first and second piezoelectric films. Each of the first and second piezoelectric films has a thickness of 10 micrometers or smaller, and has a first surface facing toward the substrate and a second surface opposite to the first surface. At least one of the first and second surfaces has an arithmetic average surface roughness (Ra) of 0.5 micrometers or smaller.

Abstract: A MEMS includes an actuator, first and second electrodes, and a fixed shaft. The actuator is provided above a substrate. The actuator has one end and the other end. The one end of the actuator is coupled relative to the substrate. The first electrode is arranged at a position facing the second electrode. The second electrode has one end and the other end. The one end of the second electrode is coupled to the other end of the actuator. The other end of the second electrode is a free end. The fixed shaft is connected to the second electrode between the one end thereof and the other end thereof. The first electrode faces the second electrode at a portion between the fixed shaft and the other end of the second electrode.

Abstract: There is provided a bimorph element including a silicon oxide layer, a high expansion coefficient layer that is formed on the silicon oxide layer and has a thermal expansion coefficient higher than a thermal expansion coefficient of the silicon oxide layer, and a deformation preventing film that covers a surface of the silicon oxide layer and prevents the silicon oxide layer from being deformed over time. The deformation preventing film has a transmission factor of moisture and oxygen lower than that of the silicon oxide layer. The deformation preventing film is a silicon oxide film that is formed with energy higher than that used in a case that forms the silicon oxide layer. The deformation preventing film is a silicon nitride film or a metallic film.

Abstract: Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.

Abstract: In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.

Abstract: A bimorph switch electrically connecting a traveling contact and a fixed contact. The switch comprises a substrate having a front face, a rear face, and a through hole penetrating from the front face to the rear face; a fixed contact extending from an edge portion of the aperture of the through hole towards the inside of the aperture; and a bimorph section holding the traveling contact at a position facing the aperture and driving the traveling contact. One end of the bimorph section may be formed on a silicon oxide layer formed on a front face of the substrate.