Bending Type Patents (Class 310/330)
  • Publication number: 20120043856
    Abstract: A piezoelectric power generator having a first elastic body which deforms along a first direction when subject to a stress, and a power-generating element. The power-generating element includes a second elastic body and a piezoelectric element. The second elastic body includes a fixing portion and an abutting portion. The fixing portion is fixed to the first elastic body. The abutting portion is arranged on one side in a first direction with respect to the fixing portion. The abutting portion abuts against the first elastic body, but is not fixed to the first elastic body. At least one of the first elastic body and the second elastic body is provided with a slippage suppression mechanism that suppresses slipping of the abutting portion with respect to the first elastic body when the first elastic body is deformed.
    Type: Application
    Filed: October 3, 2011
    Publication date: February 23, 2012
    Inventors: Eitaro Kameda, Toshiaki Yamashita
  • Patent number: 8120232
    Abstract: A device has a substrate, a piezo polymer layer arranged adjacent the substrate, a first electrode in contact with a first side of the layer, and a second electrode arranged adjacent the first electrode, such that when the piezo layer flexes, the first and second electrodes are arranged to detect one of a change in voltage or resistance, wherein at least one of the piezo polymer layer or the electrodes are deposited by printing. A method including depositing a spacer layer onto a substrate, depositing a piezo polymer layer onto the substrate, patterning an array of first electrodes in contact with the piezo polymer layer, and patterning an array of second electrodes adjacent the array of first electrodes, wherein depositing includes one of printing and laminating and pattering includes one of printing and etching.
    Type: Grant
    Filed: January 20, 2009
    Date of Patent: February 21, 2012
    Assignee: Palo Alto Research Center Incorporated
    Inventors: Jurgen H. Daniel, Ana C. Arias, Robert A. Street
  • Publication number: 20120032559
    Abstract: An actuator includes a first bending portion having a first electrode layer, a first electrolyte layer on a first surface of the first electrode layer, and a second electrode layer in contact with the first electrolyte layer; and a second bending portion having the first electrode layer, a second electrolyte layer on a second surface of the first electrode layer, the second surface facing the first surface, and a third electrode layer in contact with the second electrolyte layer, in which the first surface of the first electrode layer includes a region where the first electrolyte layer is not arranged, the second surface of the first electrode layer includes a region where the second electrolyte layer is not arranged, the first bending portion is adjacent to the second bending portion, and the bending direction of the first bending portion is opposite to the bending direction of the second bending portion.
    Type: Application
    Filed: August 2, 2011
    Publication date: February 9, 2012
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Tetsuo Hino, Sotomitsu Ikeda
  • Publication number: 20120025671
    Abstract: The present invention provides devices and structures and methods of use thereof in electrochemical actuation. This invention provides electrochemical actuators, which are based, inter-alia, on an electric field-driven intercalation or alloying of high-modulus inorganic compounds, which can produce large and reversible volume changes, providing high actuation energy density, high actuation authority and large free strain.
    Type: Application
    Filed: March 4, 2011
    Publication date: February 2, 2012
    Applicant: Massachusetts Institute Of Technology
    Inventors: Yet-Ming Chiang, Steven R. Hall, Yukinori Koyama, Kyungyeol Song, Timothy E. Chin, Urs Rhyner, Dimitrios Sapnaras, Fernando Tubilla
  • Patent number: 8106567
    Abstract: A switched mode power supply is provided. The switched mode power supply includes a transformer, which includes at least one primary winding connected to a DC voltage via a switching element and a secondary winding connected to a load via a rectifier circuit including at least one diode, and at least one piezoelectric fan which generates an air flow at the transformer and/or at the switching element and/or at the diode. The air flow produced can be guided in a targeted manner onto the components to be cooled, with the air flow remaining low and therefore, no contamination by air particles arises.
    Type: Grant
    Filed: July 10, 2007
    Date of Patent: January 31, 2012
    Assignee: Siemens Aktiengesellschaft
    Inventors: Bernhard Eichhorner, Harald Schweigert
  • Patent number: 8107650
    Abstract: In a piezoelectric electroacoustic transducing device which is to be incorporated in an electronic apparatus such as a portable telephone, and which is used as a sound source, the sound pressure of the low-frequency range is improved, the productivity is improved, and acoustic characteristics are stabilized. A piezoelectric electroacoustic transducing device 10 has: a frame 15; a piezoelectric vibrator 11 in which piezoelectric elements 12A, 12B are bonded to a metal plate 13; and a plate- and ring-like support member 14 which supports a peripheral portion of the piezoelectric vibrator 11 on the frame 15. A step 14C corresponding to the thickness of the metal plate 13 is disposed in the support member 14, and the metal plate 13 is adhered to the inside of the step 14C in an embedded manner.
    Type: Grant
    Filed: July 26, 2007
    Date of Patent: January 31, 2012
    Assignee: Hosiden Corporation
    Inventors: Satoru Fujiwara, Yuka Nagata
  • Patent number: 8102098
    Abstract: A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
    Type: Grant
    Filed: October 14, 2009
    Date of Patent: January 24, 2012
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Michihiko Nishigaki, Toshihiko Nagano, Hiroshi Ono, Takashi Kawakubo
  • Patent number: 8099854
    Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: January 24, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Ayako Kato, Chienliu Chang
  • Patent number: 8102072
    Abstract: An aerodynamic vibration power-generation device is provided, including at least a brace, and at least a blade. The blade is attached to the brace at least with one side. The blade is an aerodynamic vibration element, with at least an embedded piezoelectric transducer. The piezoelectric transducer embedded in the blade includes related circuitry for electrically connecting to a load unit. When the airflow passes along the surfaces of the blade, the difference between the air speeds on both sides of the blade will generate a pressure difference on the surfaces of the blade, according to Bernoulli's Principle, and the pressure difference will cause the blade to deform and vibrate. The fluttering and the oscillation of the blade caused by the continuously changing airflow speeds will cause the embedded piezoelectric transducer to generate electricity.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: January 24, 2012
    Inventor: Kuei-Sheng Tsou
  • Patent number: 8097999
    Abstract: Piezoelectric actuators having a piezoelectric layer in which a cantilever portion is formed are disclosed. In one embodiment, an actuator includes a support layer and a piezoelectric layer. The piezoelectric layer may include a supported portion formed on the support layer and a cantilever portion which extends beyond the support layer.
    Type: Grant
    Filed: April 27, 2009
    Date of Patent: January 17, 2012
    Assignee: University of Seoul Industry Cooperation Foundation
    Inventor: Doyeol Ahn
  • Patent number: 8093781
    Abstract: The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example.
    Type: Grant
    Filed: December 3, 2010
    Date of Patent: January 10, 2012
    Assignee: Massachusetts Institute of Technology
    Inventors: Yet-Ming Chiang, Michael J. Cima, Timothy E. Chin
  • Patent number: 8093784
    Abstract: Provided is a relatively easy-to-fabricate piezoelectric power generating element capable of generating a large amount of electric power while comprising a bridge-type vibration beam that is resistant to damage from external vibration. This element comprises a support member, a strip-shaped vibration beam, a piezoelectric layer, and electrodes. The first and second ends of the vibration beam are fixed to the support member. The piezoelectric layer and the electrodes are provided on the surface of the vibration beam. The vibration beam extends in a plane when it is not vibrating. The vibration beam has a first portion that extends from the first end fixed to the support member, a second portion that extends from the second end fixed to the support member, and a third portion that connects the end of the first portion opposite to the first end and the end of the second portion opposite to the second end.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: January 10, 2012
    Assignee: Panasonic Corporation
    Inventors: Takakiyo Harigai, Michihito Ueda, Hideaki Adachi, Eiji Fujii
  • Publication number: 20120001520
    Abstract: An actuator device includes an actuator having one end as a fixed end and the other end as a free end, and bendable when a voltage is applied; and a base member having a fixed section that fixes the fixed end of the actuator. A projecting section is provided at the base member. In a state where the actuator is bent, when a force is applied and the free end is deformed toward a direction that is reverse to the bending direction, the actuator contacts the projecting section. The projecting section is a fulcrum of the displacement and a generating load is capable of being large by the principle of material mechanics without losing the displacement amount.
    Type: Application
    Filed: September 12, 2011
    Publication date: January 5, 2012
    Inventors: Isao Takahashi, Kenichi Mitsumori
  • Patent number: 8089198
    Abstract: A full range loudspeaker, comprising a frame with a membrane secured onto said frame and a piezoelectric actuator attached on said membrane and able to be driven over the full audible frequency range.
    Type: Grant
    Filed: April 4, 2007
    Date of Patent: January 3, 2012
    Assignee: Vibration-X, Inc.
    Inventor: Emanuele Bianchini
  • Patent number: 8087152
    Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: January 3, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Ayako Kato, Chienliu Chang
  • Patent number: 8087153
    Abstract: A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.
    Type: Grant
    Filed: June 22, 2009
    Date of Patent: January 3, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventors: Ayako Kato, Chienliu Chang
  • Publication number: 20110309721
    Abstract: A micro-scale, smart material actuator having an overall length smaller than 10 mm comprising a multilayer piezoelectric stack housed in a mechanical amplifier made up of a fixed supporting member, a movable supporting member connected to compliant links attached to one or more actuating arms such that, when a suitable electric current is applied to the piezoelectric stack, the resulting expansion is translated through the movable supporting member, thereby causing movement in the actuating arms A method of generating electricity from motion using such an actuator is also disclosed in which the actuating arms are connected to a source of mechanical motion and the piezoelectric stack is connected to an electrical load, whereby the mechanical motion causes the piezoelectric stack to generate electrical charge that is then discharged into the load.
    Type: Application
    Filed: July 9, 2010
    Publication date: December 22, 2011
    Applicant: Viking AT, LLC
    Inventor: Jeffery B. Moler
  • Patent number: 8072122
    Abstract: A self-powered impulse detecting system comprising a signal transmitter; an energy storage component; and an energy harvester comprising a top plate configured to receive a stress impulse by an external object on its top surface; a bottom plate positioned opposite to the top plate and leaving room in between the bottom plate and the top plate; an elastic element positioned in between the top plate and the bottom plate; a bendable substrate attached at a first end to the bottom surface of the top plate, the bendable substrate is configured to bend freely, colliding with the top plate and a stopper; a piezoelectric element positioned on the bendable substrate; a deadweight attached to a second end of the bendable substrate; wherein collisions between the bendable substrate, the top plate and the stopper cause the bendable substrate to bend along with the piezoelectric element to generate power.
    Type: Grant
    Filed: May 3, 2011
    Date of Patent: December 6, 2011
    Assignee: Hong Kong Applied Science and Technology Research Institute Company Limited
    Inventors: Ziyang Gao, Tung Ching Lui, Xiang Chen, Ngok Man Sze
  • Patent number: 8072121
    Abstract: Electroactive polymer transducers are disclosed. They are biased in a manner that provides for increased force and/or stroke output, thereby offering improved work potential and power output capacity. The biasing may offer additional or alternate functional advantage in terms of matching transducer performance with a given application such as a normally-closed valve. The improved biasing (including increased output biasing) may utilize negative spring rate biasing and/or a combination of negative or zero-rate biasing with positive rate biasing to achieve the desired ends.
    Type: Grant
    Filed: June 29, 2009
    Date of Patent: December 6, 2011
    Assignee: Bayer MaterialScience AG
    Inventors: Jonathan R. Heim, Randall Mark Feldman
  • Patent number: 8063535
    Abstract: A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.
    Type: Grant
    Filed: January 4, 2006
    Date of Patent: November 22, 2011
    Assignee: Trustees of Boston University
    Inventors: Pritiraj Mohanty, Alexei Gaidarzhy, Guiti Zolfagharkhani, Robert L. Badzey
  • Patent number: 8044556
    Abstract: A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: October 25, 2011
    Assignee: California Institute of Technology
    Inventors: Sotirios Konstantinos Masmanidis, Rassul Bulatovich Karabalin, Michael L. Roukes
  • Patent number: 8040023
    Abstract: A bending transducer device for generating electrical energy from deformations, and a circuit module which has such a bending transducer. The bending transducer includes at least one electrically deformable, vibration-capable, electrically conductive support structure, one piezoelectric element and a first contacting element, the conductive support structure having a first restraining area and a second restraining area for restraining the support structure, the piezoelectric element being designed and situated on the support structure in such a way that the piezoelectric element is deformable due to the deformation of the support structure caused by vibrations, and a first electrode for picking up the voltage generated by the deformation of the piezoelectric element is formed and contacted by the support structure, the first contacting element being connected electrically conductively to the support structure outside the first restraining area and the second restraining area.
    Type: Grant
    Filed: August 10, 2009
    Date of Patent: October 18, 2011
    Assignee: Robert Bosch GmbH
    Inventors: Franz Laermer, Thorsten Pannek, Ralf Reichenbach, Marian Keck
  • Patent number: 8020266
    Abstract: Methods of making an energy harvesting device are described. A case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.
    Type: Grant
    Filed: July 14, 2008
    Date of Patent: September 20, 2011
    Assignee: Robert Bosch Gmbh
    Inventors: Markus Ulm, Brian Stark, Matthias Metz
  • Patent number: 8022600
    Abstract: Oscillators (101a and 101b) are attached to a spring material (100) whose both ends (105a and 105b) are held, and piezoelectric elements (103a, 103b, and 106) are attached to the spring material or the oscillators. Assuming that an axis parallel to an axis connecting the both ends of the spring material is a Y-axis, an axis parallel to a plane including the Y-axis and the oscillators and orthogonal to the Y-axis is an X-axis, and an axis orthogonal to the Y-axis and the X-axis is a Z-axis, the oscillators are asymmetric with respect to a plane including the Y-axis and the Z-axis. Consequently, when acceleration is applied, torsional vibrations act on the spring material. When the torsional rigidity of the spring material is set to be low, the resonant frequency of the torsional vibrations can be reduced. Since the both ends of the spring material are held, the spring material is bent in a small amount.
    Type: Grant
    Filed: October 29, 2007
    Date of Patent: September 20, 2011
    Assignee: Panasonic Corporation
    Inventors: Taku Hirasawa, Jyunpei Matsuzaki
  • Patent number: 8022599
    Abstract: An actuator includes: a substrate; a fixed electrode provided on a major surface of the substrate; a first dielectric film provided on the fixed electrode, and made of crystalline material; a movable beam opposed to the major surface, and held above the substrate with a gap thereto; a movable electrode; and a second dielectric film. The movable electrode is provided on a surface of the movable beam facing the fixed electrode, and has an alternate voltage applied between the fixed electrode and the movable electrode. The second dielectric film is provided on a surface of the movable beam facing the fixed electrode, and is made of crystalline material.
    Type: Grant
    Filed: February 12, 2009
    Date of Patent: September 20, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Takashi Kawakubo, Toshihiko Nagano, Michihiko Nishigaki
  • Publication number: 20110204750
    Abstract: An actuator includes: a diaphragm having a thickness equal to or greater than 0.5 ?m and equal to or less than 20 ?m; a piezoelectric body layer which is provided on a first surface side of the diaphragm, and receives stress from the diaphragm; a pair of electrodes which is provided on the first surface side of the diaphragm together with the piezoelectric body layer, and is mutually opposing via the piezoelectric body layer; and a stress adjusting layer which is provided on a second surface side of the diaphragm on an opposite side to the first surface of the diaphragm, and receives stress from the diaphragm in a same direction as the stress that the piezoelectric body layer receives from the diaphragm.
    Type: Application
    Filed: February 22, 2011
    Publication date: August 25, 2011
    Inventors: Takamichi Fujii, Yasutoshi Hirabayashi
  • Patent number: 8004163
    Abstract: A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO3 with a perovskite structure. A curvature radius of a warping of the substrate provided with the piezoelectric thin film due to difference between the first and the second thermal expansion coefficients is 10 m or more at room temperature. The piezoelectric thin film has a thickness of 0.2 ?m to 10 ?m. The piezoelectric thin film is oriented in one of plane orientations (001), (110), and (111).
    Type: Grant
    Filed: February 22, 2010
    Date of Patent: August 23, 2011
    Assignee: Hitachi Cable, Ltd
    Inventors: Kenji Shibata, Fumihito Oka
  • Patent number: 7999441
    Abstract: The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by P?MAX; and a point located on a circumference of a reference-circle having P?MAX as a center and having a minimum difference in displacement from P?MAX is expressed by P?A, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining P?MAX and P?A, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.
    Type: Grant
    Filed: September 25, 2008
    Date of Patent: August 16, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventors: Katsumi Aoki, Kenichi Takeda, Toshihiro Ifuku, Takanori Matsuda, Tetsuro Fukui
  • Patent number: 7982375
    Abstract: An integrated sensory actuator (10) which uses an electroactive polymer is provided. The sensory actuator is comprised of an actuating member (12) made of an ionic polymer-metal composite; a sensing member (14) made of a piezoelectric material; and an insulating member (16) interposed between the actuating member and the sensing member. The sensory actuator may further include a compensation circuit adapted to receive a sensed signal from the sensing member and an actuation signal from the actuating member and compensate the sensed signal for feedthrough coupling between the actuating member and the sensing member.
    Type: Grant
    Filed: December 12, 2007
    Date of Patent: July 19, 2011
    Assignee: Board of Trustees of Michigan State University
    Inventors: Xiaobo Tan, Ning Xi, Zheng Chen, Yantao Shen
  • Patent number: 7982368
    Abstract: Provided is a polymer actuator including: an electrolyte layer; and a pair of electrodes provided on both surfaces of the electrolyte layer in the thickness direction, wherein the polymer actuator is deformed when a voltage is applied across the pair of electrodes, and wherein the polymer actuator includes a support portion and a deformation portion, and the gap between the electrodes in the support portion is larger than the gap between the electrodes in the deformation portion.
    Type: Grant
    Filed: December 20, 2010
    Date of Patent: July 19, 2011
    Assignee: Alps Electric Co., Ltd.
    Inventor: Isao Takahashi
  • Patent number: 7982371
    Abstract: Systems and methods of harvesting and converting naturally occurring energy are described that include exposing a material to an ambient condition and harvesting at least a portion of energy that is created. Energy harvesting from fluidic and flow environments or vibration can be accomplished using types of energy harvesters, such as flexible polymers. Active materials or Electro-Active Polymer (EAP)-metal composite thin films like Ionic Polymers, Piezoceramic materials, and electromagnetic systems may be used as mechanical to electrical energy transducers. One type of an ionic EAP is ionic polymer-metal composite (IPMC), which includes a base polymer membrane that may be coated with a metal to act as a surface electrode. The surface electrode may be silver (Ag) nanoparticles. The silver nanoparticle functionalized IPMC can be used to convert mechanical vibrations and fluidic flow to electrical energy to power wireless devices and microelectronic systems, for example.
    Type: Grant
    Filed: March 5, 2010
    Date of Patent: July 19, 2011
    Assignee: Indian Institute of Science
    Inventors: Sandeep Venkit Anand, Debiprosad Roy Mahapatra
  • Publication number: 20110168929
    Abstract: It is introduced a miniaturizable actuation device based on piezoelectric flexural transducer element, which can be fabricated easily and cost effective, for use in a fluid valve or other devices, the actuation device being suited to perform reproducible actuation deflections fast and precisely, uneffected by disturbing influences due to temperature changes and mechanical deformations of the housing. The actuation device according to the invention includes a fluid bearing 5 with a first surface 7, which is associated with the flexural transducer element 2, a second surface 8, which is associated with the housing 15, and a flowable power transmitting fluid 6 between the surfaces, to transmit the reaction forces and—moments resulting from the actuatro deflection from the flexural transducer element 2 to the housing 15.
    Type: Application
    Filed: July 19, 2010
    Publication date: July 14, 2011
    Applicant: EPAINTERS GBR
    Inventors: Burkhard Buestgens, Suheel Georges
  • Publication number: 20110156537
    Abstract: An actuator element includes: a piezoelectric body; a pair of electrodes mutually opposing to each other via the piezoelectric body; a diaphragm to which the piezoelectric body sandwiched between the pair of electrodes is bonded; and a base substrate arranged to oppose a movable part including the piezoelectric body and the diaphragm, the movable part being displaced in a direction toward the base substrate by application of a drive voltage to the pair of electrodes, wherein polarization (Pr)-electric field (E) hysteresis characteristics of the piezoelectric body are biased with respect to an electric field, and by application of a voltage in an opposite direction to the drive voltage, to the pair of electrodes, the movable part is displaced in a direction away from the base substrate.
    Type: Application
    Filed: December 21, 2010
    Publication date: June 30, 2011
    Inventor: Takamichi FUJII
  • Publication number: 20110148255
    Abstract: A piezoelectric MEMS switch includes: a base substrate; a diaphragm arranged to oppose the base substrate via a gap; a first piezoelectric drive section constituted by layering a first lower electrode, a first piezoelectric body and a first upper electrode on a first surface of the diaphragm, the first surface being across the diaphragm from the gap; a second piezoelectric drive section constituted by layering a second lower electrode, a second piezoelectric body and a second upper electrode on a second surface of the diaphragm, the second surface facing the gap; a fixed electrode provided on a gap side of the base substrate; and a movable electrode which is fixed to a second piezoelectric drive section side of the diaphragm and opposes the fixed electrode in such a manner that the movable electrode makes contact with and separates from the fixed electrode according to displacement of the diaphragm.
    Type: Application
    Filed: December 8, 2010
    Publication date: June 23, 2011
    Inventor: Yasukazu Nihei
  • Patent number: 7960900
    Abstract: The invention relates to a device consisting of an electromechanical microswitch comprising mobile beam (2). According to the invention, at least part (14) of the beam forms the piezoelectric element of a piezoelectric actuator.
    Type: Grant
    Filed: June 13, 2005
    Date of Patent: June 14, 2011
    Assignee: STMicroelectronics S.A.
    Inventors: Grégory Caruyer, Guillaume Bouche, Pascal Ancey
  • Patent number: 7948151
    Abstract: An artificial neuromuscular unit (ANMU) comprising: an electroactive polymer (EAP) actuator layer; an EAP logic layer coupled to the actuator layer; an EAP energy layer coupled to the logic layer such that the logic layer is interposed between the energy layer and the actuator layer, wherein the logic layer is configured to control energy transfer between the energy layer and the actuator layer; and a sensor element operatively coupled to the actuator layer and the logic layer, wherein the sensor element is configured to communicate deflections of the actuator layer to the logic layer.
    Type: Grant
    Filed: April 9, 2009
    Date of Patent: May 24, 2011
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Michael R. Blackburn, Wayne C. McGinnis
  • Patent number: 7946008
    Abstract: A method of manufacturing a piezoelectric vibrator comprises forming a gettering metal film on a surface of a piezoelectric vibrator piece and forming a frequency-adjusting weight, separate from the gettering metal film, on the piezoelectric vibrator piece. The piezoelectric vibrator piece is then placed in a hermetic container after which the hermetic container is hermetically sealed. A laser beam is irradiated on the metal film to heat the same to getter gas contained inside the hermetic container, and after completion of gettering, the laser beam is irradiated on the frequency-adjusting weight to adjust the frequency of vibration of the piezoelectric vibrator piece.
    Type: Grant
    Filed: April 27, 2007
    Date of Patent: May 24, 2011
    Assignee: Seiko Instruments Inc.
    Inventors: Satoshi Shimizu, Masaru Matsuyama
  • Patent number: 7944121
    Abstract: Co-fabricating of vertical piezoelectric MEMS actuators that achieve large positive and negative displacements through operating electric fields in excess of the coercive field includes forming a large negative displacement vertical piezoelectric MEMS actuator, forming a bottom structural dielectric layer above a substrate layer; forming a bottom electrode layer above the structural dielectric layer; forming an active piezoelectric layer above the bottom electrode layer; forming a top electrode layer above the active piezoelectric layer; forming a top structural layer above the top electrode layer, wherein the x-y neutral plane of the negative displacement vertical piezoelectric MEMS actuator is above the mid-plane of the active piezoelectric layer, wherein the negative displacement vertical piezoelectric MEMS actuator is partially released from the substrate to allow free motion of the actuator; and combining the large negative displacement vertical piezoelectric MEMS actuator and a large positive displaceme
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: May 17, 2011
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Jeffrey Spencer Pulskamp, Ronald G. Polcawich
  • Patent number: 7939993
    Abstract: The present invention relates to a micromechanical HF switching element, in which a freestanding movable element is situated above a metallic surface on a substrate in such way that it is drawn to the metallic surface, to which a dielectric layer is applied, by applying an electrical voltage between the metallic surface and the movable element. The present invention also relates to a method for producing micromechanical HF switching elements of this type, in which the dielectric layer is deposited on the metal surface. The present method is distinguished in that a piezoelectric AlN layer having a columnar, polycrystalline structure and a texture is deposited on the metallic surface as the dielectric layer. Significantly reduced charging of the dielectric material and increased long-term stability of the switching element are achieved by the present method and the HF switching element thus produced.
    Type: Grant
    Filed: May 27, 2005
    Date of Patent: May 10, 2011
    Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
    Inventors: Thomas Lisec, Christoph Huth
  • Patent number: 7934306
    Abstract: A method for packaging micro electromechanical systems (MEMS) microphone has steps of providing a base, arranging and mounting multiple microphone component assemblies on the base, providing a frame, mounting the frame on the base, forming multiple microphone units, providing a cover; mounting the microphone units on the cover and forming multiple MEMS microphones. Therefore, the MEMS microphones can be produced once in large quantities to save production time and costs.
    Type: Grant
    Filed: January 12, 2009
    Date of Patent: May 3, 2011
    Assignee: Tong Hsing Electric Industries, Ltd.
    Inventor: Kuo-Jung Wu
  • Publication number: 20110088438
    Abstract: A low-power-consumption actuator for battery-powered electronic lock includes assembled first and second cases, the second case being provided at a top with a through bore; a piezoceramic/steel sheet assembly consisting of superposed first and second piezoceramic/steel sheet sets, a first end portion of the second piezoceramic/steel sheet set being in a free state; a circuit board electrically connected to the piezoceramic/steel sheet assembly; and a pin unit being located between a top of the first end portion of the second piezoceramic/steel sheet set and the through bore. When the circuit board applies a voltage across the piezoceramic/steel sheet assembly, the first end portion of the second piezoceramic/steel sheet set upward flexes and thereby displaces to push against the pin unit for a pin thereof to protrude from the through bore and interfere with a latch bolt of the electronic lock, so as to actuate the latch bolt.
    Type: Application
    Filed: October 20, 2009
    Publication date: April 21, 2011
    Inventor: Ti CHEN
  • Publication number: 20110084572
    Abstract: The piezoelectric damping device is a passive piezoelectric vibration suppression and damping device for reducing amplitude of vibration in structures. The piezoelectric damping device includes a magnetic layer having opposed inner and outer faces, with the inner face thereof being adapted for releasable magnetic attachment to a vibrating structure, such as a metallic pipe, for example. A piezoelectric layer is secured to the outer face of the magnetic layer. Preferably, an electrically insulating layer is sandwiched between the magnetic layer and the piezoelectric layer. The electrically insulating layer is preferably an electrically insulating adhesive. An electrical shunting circuit is in electrical communication with the piezoelectric layer, such that vibration in the piezoelectric layer caused by the vibrating structure generates electrical energy, which is then dissipated by the electrical shunting circuit, thus damping vibration in the vibrating structure.
    Type: Application
    Filed: October 14, 2009
    Publication date: April 14, 2011
    Inventors: Muhammad A. Hawwa, Yagoub N. Al-Nassar, Hussain M. Al-Oahtani
  • Patent number: 7921541
    Abstract: The present invention provides electroactive polymers, transducers and devices that maintain pre-strain in one or more portions of an electroactive polymer. Electroactive polymers described herein may include a pre-strained portion and a stiffened portion configured to maintain pre-strain in the pre-strained portion. One fabrication technique applies pre-strain to a partially cured electroactive polymer. The partially cured polymer is then further cured to stiffen and maintain the pre-strain. In another fabrication technique, a support layer is coupled to the polymer that maintains pre-strain in a portion of an electroactive polymer. Another embodiment of the invention cures a polymer precursor to maintain pre-strain in an electroactive polymer.
    Type: Grant
    Filed: July 29, 2007
    Date of Patent: April 12, 2011
    Assignee: SRI International
    Inventors: Qibing Pei, Ronald E. Pelrine, Marcus Rosenthal
  • Patent number: 7923902
    Abstract: Electroactive polymer constructions that convert electrical energy to mechanical energy and vice versa are disclosed. The subject transducers (actuators, generators, sensors or combinations thereof) share the requirement of a frame or fixture element used in preloading elastomeric film electrodes and dielectric polymer in a desired configuration. The structures are either integrally biased in a push-pull arrangement or preloaded/biased by another element.
    Type: Grant
    Filed: March 13, 2009
    Date of Patent: April 12, 2011
    Assignee: Bayer MaterialScience AG
    Inventor: Jonathan R. Heim
  • Patent number: 7919905
    Abstract: An actuator includes a piezoelectric bimorph including a pair of piezoelectric elements and an intermediate electrode provided between the piezoelectric elements, a conductive fastening member for fastening fixed ends of the piezoelectric elements to a base having a ground potential, and a contact member to which a predetermined voltage is applied. The contact member is in contact with the intermediate electrode.
    Type: Grant
    Filed: March 7, 2007
    Date of Patent: April 5, 2011
    Assignee: Sony Corporation
    Inventor: Takayuki Abe
  • Patent number: 7919903
    Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.
    Type: Grant
    Filed: October 2, 2006
    Date of Patent: April 5, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young-tack Hong, Dong-kyun Kim, In-sang Song, Sang-hun Lee, Sang-wook Kwon, Jong-seok Kim, Che-heung Kim
  • Publication number: 20110074248
    Abstract: A piezoelectric drive type MEMS element includes: a first substrate including, in a portion thereof, a movable part which is driven by a piezoelectric drive section to be displaced in a convex shape, a movable electrode being provided on a surface of the movable part; and a second substrate which is bonded to the first substrate and supports a fixed electrode facing the movable electrode via a prescribed gap, wherein the piezoelectric drive section includes a piezoelectric film provided on a region of the first substrate which forms the movable part as a portion of the movable part, and a pair of electrodes disposed so as to sandwich the piezoelectric film.
    Type: Application
    Filed: September 15, 2010
    Publication date: March 31, 2011
    Inventor: Yoshikazu HISHINUMA
  • Patent number: 7917200
    Abstract: A polymer linear actuator for a micro electro mechanical system (MEMS) and a micro manipulator for a measurement device of cranial nerve signal using the same are provided. The polymer linear actuator has first and second bodies positioned spaced apart to a distance from each other, and one or more pairs of V-type moving units connecting the first and second bodies together, wherein the moving units in pair are opposed to each other to convert a rotation motion of the respective moving units into a linear motion, thereby causing the first and second bodies to move linearly.
    Type: Grant
    Filed: August 30, 2006
    Date of Patent: March 29, 2011
    Assignee: Korea Institute of Science and Technology
    Inventors: Suk-ho Park, Jin-seok Kim, Ju-hee Hong, Sung-wook Yang, Hee-sup Shin, Dong-won Lee, Suk-chan Lee, Hui-su Kim
  • Patent number: 7911115
    Abstract: The present invention relates to polymers, transducers and devices that convert between electrical and mechanical energy. When a voltage is applied to electrodes contacting an electroactive polymer, the polymer deflects. This deflection may be used to do mechanical work. Similarly, when the electroactive polymer deflects, an electric field is produced in the polymer. This electric field may be used to produce electrical energy. An active area is a portion of a polymer having sufficient electrostatic force to enable deflection of the portion and/or sufficient deflection to enable a change in electrostatic force. The present invention relates to transducers and devices including multiple active areas. The invention also relates to methods for actuating one or more active areas.
    Type: Grant
    Filed: July 12, 2007
    Date of Patent: March 22, 2011
    Assignee: SRI International
    Inventors: Ronald E. Pelrine, Roy D. Kornbluh, Qibing Pei, Joseph S. Eckerle
  • Patent number: 7898157
    Abstract: An energy harvesting system includes a composite structure that has a first spring, a piezoelectric structure, and a proof mass. The piezoelectric structure and the proof mass are mounted on the first spring. The composite structure has a natural frequency of vibration. The natural frequency of vibration of the composite structure is automatically adjustable.
    Type: Grant
    Filed: February 18, 2010
    Date of Patent: March 1, 2011
    Assignee: Microstrain, Inc.
    Inventors: David L. Churchill, Steven W. Arms