Abstract: Actuator comprising: a) a support beam b) a first means for placing said support beam in compression without causing flexure of said support beam; c) a first layer of material adhered to a first surface of said support beam and d) a second means for causing movement of said first layer of material to cause a flexure of said layer of material and said support beam, wherein said first layer of material evidences a thermal coefficient of expansion that is different than a thermal coefficient of expansion of said support beam, wherein the actuator is designed to operate at a first working temperature whilst the first layer of material is structurally connected to the support beam at a second temperature wherein the second temperature is higher than the first temperature so as to cause that at the first temperature the said support beam is in compression without causing flexure thereof.

Abstract: Described herein are compliant electroactive polymer transducers for use in acoustic applications. A compliant electroactive polymer transducer includes a compliant electroactive polymer at least two electrodes. For sound production, circuitry in electrical communication with the transducer electrodes is configured to apply a driving signal that causes the electroactive polymer to deflect in the acoustic range.

Abstract: When an actuator is driven, a stationary element continuously generates a pressing force for spreading in a radial direction such that the stationary element is relatively retracted into movable elements positioned at both ends of the stationary element. As a result, a distance between the movable elements adjacent to each other is reduced, and a contracting operation is performed. When the actuator is not driven, only a relatively low frictional force is generated between the moving elements and the stationary element. Hence, the movable elements and the stationary element can change relative position by small external force.

Abstract: A method for forming a vertical coupling structure for non-adjacent resonators is provided to have a first and a second resonators, a dielectric material layer, a first and a second high-frequency transmission lines and at least one via pole. The first and the second resonators respectively have a first and a second opposite metal surfaces. The dielectric material layer is disposed between the opposite second metal surfaces of the first and the second resonators. The first and the second transmission lines are respectively arranged at sides of the first metal surfaces of the first resonator and the second resonator. The first high-frequency transmission line is vertically connected to the second high-frequency transmission line by the via pole.

Abstract: The invention is a device for influencing the vibration of a planar element having two opposite surfaces and a neutral fiber plane running between the two surfaces including at least one actuator and at least one sensor which each are provided with transducer materials and are connected to at least one electronic component or an electronic module. The at least one actuator and at least one sensor are completely integrated into the planar element so as to be spaced from the two surfaces as well as from the neutral fiber plane.

Abstract: A piezoelectric microelectromechanical systems (MEMS) actuator includes a silicon substrate; an actuator beam comprising a first end region connected to the silicon substrate and a second end region connected to a mechanically compliant spring assembly; a first electrode over the silicon substrate; a piezoelectric layer above the first electrode; a second electrode over the piezoelectric layer; a conductive top structural layer above the second electrode, wherein a center half of the actuator beam is configured as a positive deflection region, and wherein both the first electrode and the second electrode supply voltage to both positive and negative deflection regions of the actuator beam.

Abstract: The present invention provides systems, devices, and related methods, involving electrochemical actuation. In some cases, application of a voltage or current to a system or device of the invention may generate a volumetric or dimensional change, which may produce mechanical work. For example, at least a portion of the system may be constructed and arranged to be displaced from a first orientation to a second orientation. Systems such as these may be useful in various applications, including pumps (e.g., infusion pumps) and drug delivery devices, for example.

Abstract: An infusion device having a housing with a reusable control portion and an expendable reservoir portion includes a precise drive for an infusion pump. The drive includes a piezoelectric bender assembly, a limiter and at least one contact stop. The piezoelectric bender assembly includes a cantilevered piezoelectric bender having an member of predetermined thickness fixed to move with the second end. A limiter of dimensionally stable material including a gap and at least a first mounting hole extending to the gap. The member of predetermined thickness extends into the gap. A first contact stop is positioned in the gap to define a critical gap distance limiting movement of the member of predetermined thickness in the gap. A base has a mounting surface, a port through the base and extending to the mounting surface. The port includes a first length having a smaller diameter at the mounting surface and a second length displaced from the mounting surface and having a larger diameter.

Abstract: A piezoelectric assembly and portable electronic device having a piezoelectric assembly are described. The piezoelectric assembly comprises a first electrode for electrical communication to a current or voltage source, a second electrode for electrical communication to a reference source, a piezoelectric material in electrical communication with each one of the first and second electrodes and between the first and second electrodes, a signal electrical connector in electrical communication with the first electrode and configured to be connected to the current or voltage source, and a reference electrical connector in electrical communication with the second electrode and configured to be connected to the reference source so as to provide electrical communication between the second electrode and the reference source.

Abstract: To provide a piezoelectric thin film element capable of improving piezoelectric characteristics and realize a piezoelectric thin film device with high performance and high reliability, comprising: a substrate; and a piezoelectric thin film formed on the substrate by a sputtering method, with perovskite oxide expressed by (NaxKyLiz)NbO3 (0?x?1, 0?y?1, 0?z?0, 2, x+y+z=1) as a main phase, wherein an absolute value of an internal stress of the piezoelectric thin film is 1.6 GPa or less.

Abstract: The object is to provide a polymer actuator capable of being utilized for any of various drive sources, wherein the amount of deformation of the polymer actuator can particularly be used also for a valve or shaft-sealing device. The polymer actuator comprises a power driver deformed upon receiving electro stimuli and electrodes disposed on the upper and lower surface sides of the power driver in an opposite manner for applying positive and negative electro stimuli to the power driver in a planar fashion. The electrodes have different stimuli application regions to have different electrical field distributions for causing distribution of stress-generated in the power driver to be eccentrically located on one of positive and negative sides, thereby bending and deforming the power driver onto a side on which the opposite stimuli application regions do not exist.

Abstract: A microelectromechanical system (MEMS) structure and a fabricating method thereof are described. The MEMS structure includes a fixed part and a movable part. The fixed part is disposed on and connects with a substrate. The movable part including at least two first metal layers, a first protection ring and a first dielectric layer is suspended on the substrate. The first protection ring connects two adjacent first metal layers, so as to define a first enclosed space between the two adjacent first metal layers. The first dielectric layer is disposed in the enclosed space and connects the two adjacent first metal layers.

Abstract: A micro movable device includes a base substrate, a fixed portion bonded to the base substrate, a movable portion having a fixed end connected to the fixed portion and extending along the base substrate, and a piezoelectric drive provided on the movable portion and the fixed portion on a side opposite to the base substrate. The piezoelectric drive has a laminate structure provided by a first electrode film contacting the movable portion and the fixed portion, a second electrode film and a piezoelectric film between the first and the second electrode films. At least one of the movable portion and the fixed portion is provided with a groove extending along the piezoelectric drive.

Abstract: A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode and a lower electrode formed on both surfaces thereof, a plate-like resilient member in close contact with the piezoelectric substrate on the side of the lower electrode and a support for supporting a driving member in a cantilever manner, in which a thin-walled portion is formed to the vicinity of a base portion of the driving member supported by the support.

Abstract: Flexible and elastic mechanisms for extracting power from a moving fluid. Sheet-like material is deformed during fabrication through an applied force so as to create undulations in said material, whose stresses are maintained through restraining components, thereby maintaining the occurrence of said deformations in the material. When placed in moving fluid, the resulting pressure differentials cause the positions of the undulations within the material to travel along said material in the same direction as the moving fluid. Power is extracted in one of two principle ways. The first is via a mechanical coupling of the sheet-like material to a rotating mechanism, which turns an electro-magnetic dynamo or other output device. The second is via the utilization of a flexible material which exhibits an electrical response to mechanical strain, whereby the strains caused by the travel of undulations along the material create an electrical current which is extracted via two or more electrodes.

Abstract: A movement detector which is rotatably installed on a base member includes a rotating member which has a body portion, and a connecting portion which rotatably connects the body portion to the base member, a piezoelectric layer which is formed on the connecting portion, and a plurality of electrodes which are provided on the piezoelectric layer, to be arranged in a direction of a rotation axis of the body portion, and which detect a voltage generated in the piezoelectric layer corresponding to a deformation of the connecting portion when the body portion has displaced with respect to the base member. Since the piezoelectric layer and the plurality of electrodes are provided to the connecting portion which rotatably connects the body portion to the base member, it is possible to detect a plurality of types of movements of the body portion by the piezoelectric layer and the plurality of electrodes.

Abstract: A MEMS device uses both piezoelectric actuation and electrostatic actuation and also provides enough electrostatic force to enable very low voltage operation. As the electrostatic actuation uses DC and the piezoelectric actuation uses high frequency, the structure of the device minimizes the coupling of the two actuator structures to reduce noise. In addition, for some embodiments, the location of the physical structures of the piezoelectric actuator and electrostatic actuator generates higher contact force with lower voltage. For some embodiments, the piezoelectric actuator and electrostatic actuator of the device are connected at the contact shorting bar or capacitor plate location. This makes the contact shorting bar or capacitor plate the focal point of the forces generated by all of the actuators, thereby increasing the switch contact force.

Abstract: The invention relates to a device for actuating a sanitary appliances which comprises at least one sensor arranged in a housing and provided with a pressure-sensitive element and is actuatable by applying a force on the sensor sensitive area for deforming said element. The inventive device also comprises a control system which determines the deformation of the element and produces a signal by which the operation of the sanitary appliances is controllable. Coupling means extending perpendicularly to the operating direction of the sensor outside of the sensitive area thereof enable a force which is generated at a distance from said sensitive area to be transferable thereon.

Abstract: A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.

Abstract: A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer.

Abstract: A liquid ejecting head is equipped with a piezoelectric element. The piezoelectric element has a piezoelectric layer containing titanium (Ti) and, zirconium (Zr) and first and second electrodes provided on both faces of the piezoelectric layer. The composition ratio of Ti and Zr in the piezoelectric layer Ti/(Zr+Ti) is in the range of 0.50 to 0.60 both inclusive. The piezoelectric layer contains rhombohedral crystals at least in a portion thereof covering the first electrode.

Abstract: Described herein are several solutions that increase transducer lifetime by reducing or preventing tear propagation in a compliant electroactive polymer. One solution couples a compliant tear resistant treatment to a transducer proximate to an edge portion of the electroactive polymer. Another solution uses a tear resistant layer that couples to and covers a large surface area of the transducer. Another suitable tear resistant solution provides added material outside an active area; the added material reduces stress or strain variations in polymer material outside the active area when the electroactive polymer transducer is deflected or pre-strained.

Abstract: In an actuator including at least one active electrode disposed in an electrolyte and comprising at least two webs of an electrically conductive material with a plurality of geometrically anisotropic nanoparticles disposed thereon and oriented uni-directionally in a preferential direction with an electrically conductive connection between the nanoparticles and the webs and a potential difference with respect to ground can be applied to the active electrode by a voltage or current source, the nanoparticles are connected in each case to two webs and the connections are material-interlocking.

Abstract: A sensor or actuator includes a piezoelectric thin film device including a lower electrode, a piezoelectric thin film and an upper electrode, and a voltage detecting device connected between the lower and upper electrodes of the piezoelectric thin film device. The piezoelectric thin film is formed of an alkali niobium oxide-based perovskite material expressed by (K1-xNax)NbO3 (0<x<1), and a dependency of the piezoelectric constant d31 of the piezoelectric thin film on applied electric field [=|(d31 under 70 kV/cm)?(d31 under 7 kV/cm)|/|d31 under 70 kV/cm|] is 0.20 or less.

Abstract: The present invention provides an apparatus for enabling operation of a piezoelectric actuator, comprising a spring configured to provide a compressive force to a piezoelectric element of a piezoelectric actuator, wherein the compressive force varies with displacement of the piezoelectric element such that the compressive force is less at a first displacement than at a second displacement, and wherein the first displacement is greater than the second displacement.

Abstract: The invention relates to a miniaturizable motor (1) comprising a rotor (12) that is driven by a hollow cylindrical piezo oscillator (2). Said rotor is effectively connected to a frictional face (13) of the piezo oscillator while a main electrode or counter electrode (3) and excitation electrodes (4, 5, 6) are disposed on the surface of the hollow cylinder. The hollow cylindrical piezo oscillator is made of a monocrystalline material with a trigonal crystal system which is provided with three main electrical axes that are placed at a 120° angle relative to each other as well as an optical axis. Said optical axis encloses a 90° angle along with the point of intersection of the electrical axes while coinciding with the longitudinal axis of the hollow cylindrical piezo oscillator. Furthermore, the axial axis of symmetry of the respective excitation electrode intersects one of the main electrical axes while said axial axis of symmetry extends parallel to the optical axis.

Abstract: This invention relates to biomimetic electro-active paper actuators which are ultra lightweight, have a large deformation feature, are operated with low power consumption, are remotely driven by microwaves, and have suitable response speed, which are comprised of paper wherein micro fibrils of cellulose are arranged in a predetermined direction, electrodes which are deposited on both sides of the paper, a film rectenna which receives an electric field from outside and converts it into direct power, and a PAD logic circuit (power allocation & distribution) which receives a signal of direct power and converts/controls it into power force.

Abstract: The present invention provides a MEMS piezoelectric switch that has an articulated unimorph bridge attached to a substrate. The bridge includes a passive layer of zirconia and at least one silicon-based material, an active layer of a piezoelectric material that has a high piezoelectric coefficient, at least one pair of interdigitated electrodes, disposed on the top surface of the active layer and across which the bias voltage is applied, and a top contact electrode. A bottom contact electrode is provided on the substrate, and signals flow through the switch when the top and bottom contact electrodes contact one another.

Abstract: It is made possible to provide a MEMS device that has a low operation voltage, a large contact pressure force, and a large separation force. A MEMS device includes: a substrate; a supporting unit that is provided on the substrate; a fixed electrode that is provided on the substrate; an actuator that includes a first electrode, a first piezoelectric film formed on the first electrode, and a second electrode formed on the first piezoelectric film, one end of the actuator being fixed onto the substrate with the supporting unit, the actuator extending in a direction connecting the supporting unit and the fixed electrode, the first electrode being located to face the fixed electrode; and a stopper unit that is located above a straight line connecting the supporting unit and the fixed electrode, and is located on the substrate so as to face the first electrode.

Abstract: A piezoelectric pump includes a piezoelectric element, an intermediate plate, and a vibrating plate. The piezoelectric element has a substantially flat plate shape. The intermediate plate is bonded to a principal surface of the piezoelectric element and applies a residual stress in a compressive direction to the piezoelectric element. The vibrating plate is bonded to the intermediate plate such that the vibrating plate faces a principal surface of the piezoelectric element and receives a residual stress in a compressive direction from the intermediate plate. In addition, the vibrating plate defines a portion of a wall surface of a pump chamber having an open hole. A fluid passage is provided in the piezoelectric pump. The fluid passage communicates with the outside of the chamber at one end thereof, and communicates with the pump chamber through the open hole at the other end.

Abstract: A vibratory actuator is provided in which a movable body can be stably driven even when a groove is formed in an abutment body by the friction between the driver element and the abutment body. An ultrasonic actuator (2) includes an actuator body (4) which performs a longitudinal vibration and a bending vibration, and a driver element (8a, 8b) which is provided on one of side surfaces of the actuator body (4) which is a mounting surface (40a), and performs an orbital motion in accordance with the vibrations of the actuator body (4) to output a driving force. The driver element (8a, 8b) includes a first driver element (8a) and a second driver element (8b) which are provided on the mounting surface (40a) at different positions in a longitudinal direction of the actuator body (4). The first driver element (8a) and the second driver element (8b) are located at different positions in a thickness direction of the actuator body (4).

Abstract: A bistable electroactive polymer transducer is provided for electrically actuated deformation of rigid electroactive polymer members. The polymers have glass transition temperatures (Tg) above ambient conditions and turn into rubbery elastomers above Tg and have high dielectric breakdown strength in the rubbery state. They can be electrically deformed to various rigid shapes with maximum strain greater than 100% and as high as 400%. The actuation is made bistable by cooling below Tg to preserve the deformation. The dielectric actuation mechanism includes a pair of compliant electrodes in contact with a dielectric elastomer which deforms when a voltage bias is applied between the pair of electrodes. In some of the transducers of the present invention, the dielectric elastomer is also a shape memory polymer. The deformations of such bistable electroactive polymers can be repeated rapidly for numerous cycles.

Abstract: There is provided a piezoelectric actuator and the like capable of efficiently transmitting vibration between an object (e.g., a housing of an electronic device) and a piezoelectric ceramic vibrator. The piezoelectric actuator 50A includes a piezoelectric ceramic vibrator 15 and a holder 12 to hold an edge section thereof and functions as, for example, a vibrator by propagating deflective vibration of the vibrator 15 via the holder 12 to an elastic body 14 as the object. A subsidiary holder 13 is disposed between the vibrator 15 and the elastic body 14, and part of the deflective vibration of the vibrator 15 is propagated via the elastic body 14.

Abstract: A solid state actuator arrangement comprising an actuator which is configured as a solid state bending actuator and which has a first and a second end section opposite each other, a fastening device for fastening the first end section of the actuator in such a manner that it can still be adjusted, and connections for applying a driver signal to the actuator for adjusting the second end section by bending the actuator between at least two positions, an extension element being fastened to the free second end section of the actuator.

Abstract: A liquid ejection head includes: a pressure generating chamber communicating with a nozzle hole; a vibrating film placed on one side of the pressure generating chamber; and a pressure generating element including a piezoelectric layer formed between a first and a second electrodes placed on the vibrating film. The pressure generating element generates displacement when voltage is applied across the first and the second electrodes to make pressure in the pressure generating chamber change, while a neutral plane of stress made by the displacement is so configured as to exist in the first electrode, and a layer on the pressure generating chamber side relative to the first electrode includes a laminar film or an amorphous film.

Abstract: A piezoelectric drive motor especially well adapted for use with flow control systems on commercial aircraft, military aircraft and spacecraft. In one embodiment, the apparatus includes a support structure that supports a piezoelectric beam. A biasing element, for example a coil spring, is coupled between a free end of the piezoelectric beam and the support structure. The spring exerts a compressive force on the beam and serves to amplify its displacement when electric signals applied to piezoelectric layers on the beam cause deflection of the beam between two stable positions. The drive motor operates over a wider band of drive frequencies than conventional piezoelectric beams and is also suitable for use as a sensor and in a wide variety of actuator applications.

Abstract: To improve adhesive properties between an electrically conductive polymer membrane and a solid electrolyte membrane to each other, and thus to ensure the operation of an electrically conductive polymer actuator which effects a bending motion is aimed.

Abstract: A self-poling piezoelectric based MEMS device is configured for piezoelectric actuation in response to application of a device operating voltage. The MEMS device comprises a beam, a first electrode disposed on the beam, a layer of piezoelectric material having a self-poling thickness disposed overlying a portion of the first electrode, and a second electrode overlying the layer of piezoelectric material. The layer of piezoelectric material is self-poled in response to application of the device operating voltage across the first and second electrodes. In addition, the self-poled piezoelectric material has a poling direction established according to a polarity orientation of the device operating voltage as applied across the first and second electrodes.

Abstract: The invention relates to a high-lifting capacity piezoelectric actuator (1) comprising an piezoelectric layer (10) and a second layer (20) whose material gradient is directed to the thickness. An electric field produces different extension degrees in said piezoelectric layer (10) and in the second layer (30), thereby increasing the lifting capacity of the piezoelectric actuator (1) in combination with an impressed mechanical prestressing. The inventive piezoelectric actuator is used at a low voltage, for example, for bio and medical engineering (micropumps, microvalves), in industrial electronic engineering (pneumatic valves) and for microactuators and micromotors.

Abstract: The object of the present invention is to provide an actuator body and a throttle mechanism that are small and have a simple structure. The present invention comprises a polymer actuator 11 that bends and deforms by an electric driving source, an intermediate 12 that transmits the bending force of the polymer actuator, and an elastic body 13 to which the bending force is applied through the intermediate, wherein the dimension of a hole portion that is formed in the elastic body 13 changes when the bending force of the polymer actuator 11 is applied onto the elastic body 13 through the intermediate 12.

Abstract: A piezoelectric buzzer includes a housing unit, a buzzer unit, and first and second terminals. The housing unit includes first and second housings coupled together. The second housing includes a base plate and a pair of spaced apart insert seats, each of which protrudes inwardly from the base plate toward the first housing and is formed with an insert hole. The buzzer unit is disposed in the resonant chamber and includes a vibrating plate and a piezoelectric plate attached to the vibrating plate. The first and second terminals are inserted respectively into the insert holes of the insert seats, and have a respective connection section extending outwardly of the housing unit, and a respective extending section abutting against a respective one of the vibrating plate and the piezoelectric plate.

Abstract: A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part.

Abstract: A substrate has a first thermal expansion coefficient and a piezoelectric thin film has a second thermal expansion coefficient. The piezoelectric thin film is mainly composed of a potassium sodium niobate (K,Na)NbO3 with a perovskite structure. A curvature radius of a warping of the substrate provided with the piezoelectric thin film due to difference between the first and the second thermal expansion coefficients is 10 m or more at room temperature.

Abstract: A piezo-electric actuator comprising: piezo-electric element 1a having piezo-electric body 3a which is provided with at least two opposing surfaces, wherein the surfaces perform an expanding and contracting motion in accordance with the state of an electric field; a constraint member 21a for constraining piezo-electric element 1a on at least one of the two surfaces, a supporting member disposed around constraint member 21a, and a plurality of beam members 22a each having both ends fixed to constraint member 21a and supporting member 4a, respectively, wherein each beam member has a neutral axis for bending in a direction substantially parallel with the constrained surface, wherein the constraint member vibrates by vibration which is generated by the constraining effect between the constraint member and the piezo-electric element, and is amplified by the beam members.

Abstract: The piezoelectric actuator comprises: a supporting substrate; a thermal stress controlling layer which is formed on the supporting substrate; and a piezoelectric body which is formed as a film onto the thermal stress controlling layer on the supporting substrate at a higher temperature than room temperature, wherein the thermal stress controlling layer reduces a film stress induced by formation of the piezoelectric body.

Abstract: A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.

Abstract: One aspect of the present patent application is an energy harvesting device comprising a composite structure including a base spring and a piezoelectric structure. The base spring has a base spring surface having elevated portions separated by a recessed portion. The piezoelectric structure substantially crosses the recessed portion. In one aspect the piezoelectric structure includes a piezoelectric element that is bonded to the elevated portions. In another aspect, the base spring has a base spring stiffness. The piezoelectric element has a piezoelectric element stiffness. The base spring stiffness is less than the piezoelectric element stiffness. In another aspect, the composite structure has a natural frequency of vibration, and this natural frequency of vibration of the composite structure is automatically adjustable. In another aspect, the piezoelectric elements are stacked. In another aspect, the piezoelectric structure is located in the recessed portion.

Abstract: An electro-mechanical transducer, which provides dipole motion from its housing which is driven by a bender transducer attached to the housing at the outer edge and attached to an inertial mass at its center providing a lower resonance frequency, lower mechanical Q and enhanced motion and acoustical source level.

Abstract: An electrical connection structure for use in a micro piezoelectric pump is disclosed. The electrical connection structure includes a driving circuit board and a multilayered wiring structure. The electrical connection structure includes the driving circuit board, the wiring structure, and a piezoelectric element arranged from top to bottom. The driving circuit board is provided with a driving circuit for driving the piezoelectric element and at least an electrical contact, wherein the electrical contacts are electrically connected to the driving circuit. A first electrode contact region and a second electrode contact region electrically insulated from each other are defined on the same surface of the piezoelectric element. The wiring structure sends a signal from the electrical contacts to the first electrode contact region and the second electrode contact region.

Abstract: A piezoelectric micro electro-mechanical system switch (MEMS), an array of piezoelectric MEMS switches, and a method of fabricating the switch, which are capable of improving low voltage and switching characteristics while securing high signal isolation, are provided. The piezoelectric MEMS switch includes a semiconductor substrate including a groove, a support formed over the semiconductor substrate and the groove. An actuator including a piezoelectric layer is formed on the support. A switching member is formed on the support on one side of the actuator, wherein upward movement of the switching member changes by a deformation of the piezoelectric layer of the actuator. Radio frequency (RF) transfer lines are arranged at a predetermined distance on the switching member and are separated by a predetermined interval from each other. The actuator is formed to have at least two cantilevers each having one end such that the ends are connected to each other.