Abstract: A humidity-sensitive cutoff fuse RFID tag is provided with a bimorph element and thin conductive bridges positioned on an RFID tag substrate that can react to all changes in storage humidity conditions. The bimorph element is configured and positioned so that when it bends in response to one or more predetermined humidity levels, the bimorph element will break one of the conductive bridges and cause an open circuit that can be detected when the RFID tag is interrogated by a sensor. The humidity-sensitive cutoff fuse RFID tag can provide humidity information about numerous stored objects such as food, medicine, chemicals, batteries, explosives and munitions. Multiple humidity conductive bridge cutoff fuse RFID tag arrangements and methods for notifying the user when a predetermined storage humidity limit has been reached with a passive humidity-sensitive cutoff fuse RFID tag are provided. Since it does not require power to operate, the cutoff fuse is suitable for monitoring a long-term storage condition.

Abstract: Tunable vibration energy scavengers and methods of operating the same are disclosed. The disclosed energy scavengers comprise a beam with a main body, wherein the beam comprises at least one flap and means for changing a shape of the at least one flap, wherein the at least one flap is physically attached to the main body along a longitudinal side of the main body. The disclosed methods comprise tuning the shape of the at least one flap, thereby tuning the stiffness of the structure.

Abstract: A piezoelectric power generator that includes a piezoelectric laminate in which a plurality of rectangular-shaped piezoelectric elements each having electrodes formed on a substrate are connected at both ends thereof to each other, and in which a portion other than connection portions is capable of vibrating. In the piezoelectric laminate, a portion of the element at the uppermost layer is a fixed portion, and a weight is mounted to the element (free end) at the lowermost layer. Each piezoelectric element is decreased in rigidity from the element at the uppermost layer toward the element at the lowermost layer.

Abstract: A MEMS vertical displacement device for vertically displacing and tilting a vertically displaceable platform. The vertically displaceable platform may be displaced using a plurality of recurve actuators configured to provide vertical displacement without horizontal movement. The vertically displaceable platform may be tilted about two axes to yield tilting that is advantageous in numerous applications. The recurve actuators may be thermal, piezoelectric or formed from other appropriate materials.

Abstract: A method for manufacturing a switching element which has enough resistance to repeat switching operations and which can be miniaturized and have low power consumption, and a display device including the switching element are provided. The switching element includes a first electrode to which a constant potential is applied, a second electrode adjacent to the first electrode, and a third electrode over the first electrode with a spacer layer formed of a piezoelectric material interposed therebetween and provided across the second electrode such that there is a gap between the second electrode and the third electrode. A potential which is different from or approximately the same as a potential of the first electrode is applied to the third electrode to expand and contract the spacer layer, so that a contact state or a noncontact state between the second electrode and the third electrode can be selected.

Abstract: In a piezoelectric electroacoustic transducing device which is to be incorporated in an electronic apparatus such as a portable telephone, and which is used as a sound source, the sound pressure of the low-frequency range is improved, the productivity is improved, and acoustic characteristics are stabilized. A piezoelectric electroacoustic transducing device 10 has: a frame 15; a piezoelectric vibrator 11 in which piezoelectric elements 12A, 12B are bonded to a metal plate 13; and a plate- and ring-like support member 14 which supports a peripheral portion of the piezoelectric vibrator 11 on the frame 15. A step 14C corresponding to the thickness of the metal plate 13 is disposed in the support member 14, and the metal plate 13 is adhered to the inside of the step 14C in an embedded manner.

Abstract: A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract: A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract: An electronic control device for a piezo-ceramic bending transducer designed as a trimorph, wherein a first voltage divider consisting of two resistor branches and powered by a first voltage source (Ust1) is provided, whose first resistor branch connects the first piezo-ceramic plate of the trimorph to its spacer layer. In addition, a second voltage divider is provided that consists of two resistor branches and the first resistor branch thereof connects the second piezo-ceramic plate of the trimorph to its spacer layer. The second resistor branch of the first voltage divider also forms the second resistor branch of the second voltage divider. Thus, by means of one voltage source, the one piezo-ceramic plate has an applied tensile stress and the other piezo-ceramic plate has an applied compressive stress, so that the flexural motion is reinforced by the two piezo-ceramic plates and thus only a small voltage has to be applied.

Abstract: Oscillators (101a and 101b) are attached to a spring material (100) whose both ends (105a and 105b) are held, and piezoelectric elements (103a, 103b, and 106) are attached to the spring material or the oscillators. Assuming that an axis parallel to an axis connecting the both ends of the spring material is a Y-axis, an axis parallel to a plane including the Y-axis and the oscillators and orthogonal to the Y-axis is an X-axis, and an axis orthogonal to the Y-axis and the X-axis is a Z-axis, the oscillators are asymmetric with respect to a plane including the Y-axis and the Z-axis. Consequently, when acceleration is applied, torsional vibrations act on the spring material. When the torsional rigidity of the spring material is set to be low, the resonant frequency of the torsional vibrations can be reduced. Since the both ends of the spring material are held, the spring material is bent in a small amount.

Abstract: Methods of making an energy harvesting device are described. A case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.

Abstract: An electromechanical actuator comprises a bimorph element (10) of an electromechanical material. The bimorph element (10) is controllably bendable in a first direction (15) by application of three voltage potentials to electrodes (41, 42, 43) of the bimorph element (10). The electromechanical actuator further comprises three conductive film areas (55, 56, 57) provided at a first side (51) of the bimorph element (10), which first side (51) is parallel to the first direction (15). The three conductive film areas (55, 56, 57) are electrically decoupled from each other. Furthermore, each of the three conductive film areas (55, 56, 57) is connected to at least one respective one of the electrodes (41, 42, 43). A method for manufacturing such an electromechanical actuator is also disclosed.

Abstract: To provide a piezoelectric actuator that is small in size, large in displacement, high in rigidity, excellent in controllability, and excellent in stability, the present invention provides a piezoelectric actuator, including: a first piezoelectric member that is bent and displaced in a thickness direction; and a second piezoelectric member that is bent and displaced in a direction opposite to the first piezoelectric member. In the piezoelectric actuator, the first piezoelectric member and the second piezoelectric member are stacked on each other in the thickness direction of the first piezoelectric member and the second piezoelectric member, and the center portion in the longitudinal direction of the first piezoelectric member and the center portion in the longitudinal direction of the second piezoelectric member, or both ends of the first piezoelectric member and both ends of the second piezoelectric member are fixed to each other.

Abstract: An integrated sensory actuator (10) which uses an electroactive polymer is provided. The sensory actuator is comprised of an actuating member (12) made of an ionic polymer-metal composite; a sensing member (14) made of a piezoelectric material; and an insulating member (16) interposed between the actuating member and the sensing member. The sensory actuator may further include a compensation circuit adapted to receive a sensed signal from the sensing member and an actuation signal from the actuating member and compensate the sensed signal for feedthrough coupling between the actuating member and the sensing member.

Abstract: An orthotic device comprises a flexible support structure comprising at least one surface for contacting a body part of a user, a plurality of pressure sensors configured for coupling to a microcontroller, and a plurality of displacement regions. Each region defines a portion of said flexible support structure, wherein each portion includes at least one sensor disposed on or below the at least one surface and at least one electrically deformable unit. Each unit comprises at least one electroactive material and is configured for coupling to the microcontroller and to a power source. The device is dynamically adjustable to change its shape and support properties, when an electrical voltage is applied to the electroactive material under the control of a microcontroller.

Abstract: A humidity-sensitive cutoff fuse RFID tag is provided with a bimorph element and thin conductive bridges positioned on an RFID tag substrate that can react to all changes in storage humidity conditions. The bimorph element is configured and positioned so that when it bends in response to one or more predetermined humidity levels, the bimorph element will break one of the conductive bridges and cause an open circuit that can be detected when the RFID tag is interrogated by a sensor. The humidity-sensitive cutoff fuse RFID tag can provide humidity information about numerous stored objects such as food, medicine, chemicals, batteries, explosives and munitions. Multiple humidity conductive bridge cutoff fuse RFID tag arrangements and methods for notifying the user when a predetermined storage humidity limit has been reached with a passive humidity-sensitive cutoff fuse RFID tag are provided. Since it does not require power to operate, the cutoff fuse is suitable for monitoring e long-term storage condition.

Abstract: An actuator device includes a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode that are displaceably provided in sequence on a substrate. The lower electrode includes a flat center portion and an inclined end portion that descends toward the substrate. The piezoelectric layer is disposed above the lower electrode and the substrate, and includes a first, second, and third piezoelectric layer portion constituted by a plurality of columnar crystals. The columnar crystals of the first and second piezoelectric layer portions are orthogonal to the flat portion of the lower electrode and surface of the substrate, while the columnar crystals of the third piezoelectric layer portion extend orthogonally from a surface of the inclined portion and bend to be orthogonal to the surface of the upper electrode, giving the grains of the columnar crystals of the third piezoelectric layer portion larger widths and increased stress resistance.

Abstract: A cladding (22) for a wall (12) includes a barrier layer (24) that can be deformed by the action of a polymer actuator (14). According to the invention, a contact surface (A) of the cladding lies completely against the wall, at least in the non-deformed state, stabilizing the intrinsically elastic wall cladding. For example, the wall cladding can be fixed to the wall (12) in the form of lamellae (22), at respective points, in such a way that the activation of the polymer actuator (14) causes the lamellae (22) to bend, thus permitting, for example, a layer (25) of ice to be detached from the cladding. Alternatively, the cladding can also be configured from a membrane actuator, which is fixed at points, or by its entire surface to the wall (12).

Abstract: A method for packaging micro electromechanical systems (MEMS) microphone has steps of providing a base, arranging and mounting multiple microphone component assemblies on the base, providing a frame, mounting the frame on the base, forming multiple microphone units, providing a cover; mounting the microphone units on the cover and forming multiple MEMS microphones. Therefore, the MEMS microphones can be produced once in large quantities to save production time and costs.

Abstract: An actuator includes a piezoelectric bimorph including a pair of piezoelectric elements and an intermediate electrode provided between the piezoelectric elements, a conductive fastening member for fastening fixed ends of the piezoelectric elements to a base having a ground potential, and a contact member to which a predetermined voltage is applied. The contact member is in contact with the intermediate electrode.

Abstract: A Micro Electro Mechanical System (MEMS) switch includes a substrate, a fixed signal line formed on the substrate, a movable signal line spaced apart from one of an upper surface and a lower surface of the fixed signal line, and at least one piezoelectric actuator connected to a first end of the movable signal line so as to bring or separate the movable signal line in contact with or from the fixed signal line. The piezoelectric actuator includes a first electrode, a piezoelectric layer formed on the first electrode, a second electrode formed on the piezoelectric layer, and a connecting layer formed on the second electrode and connected with the movable signal line.

Abstract: A piezoelectric/electrostrictive element having a double-layer structure in which a lower layer electrode film, a lower layer piezoelectric/electrostrictive film, an inner layer electrode film, an upper layer piezoelectric/electrostrictive film and an upper layer electrode film are laminated in this order on a thin portion of a substrate. In the piezoelectric/electrostrictive element, a driving signal is applied between an outer layer electrode film and the inner layer electrode film, whereby the thin portion and a laminate can be subjected to bending vibration. The piezoelectric/electrostrictive film has film thickness distribution in which a film thickness becomes larger in a continuous manner from a center portion of a bending vibration region which is an antinode of a bending first mode toward an edge portion of the bending vibration region which is a node of the bending first mode, along a short side direction of the bending vibration region.

Abstract: A method for forming a vertical coupling structure for non-adjacent resonators is provided to have a first and a second resonators, a dielectric material layer, a first and a second high-frequency transmission lines and at least one via pole. The first and the second resonators respectively have a first and a second opposite metal surfaces. The dielectric material layer is disposed between the opposite second metal surfaces of the first and the second resonators. The first and the second transmission lines are respectively arranged at sides of the first metal surfaces of the first resonator and the second resonator. The first high-frequency transmission line is vertically connected to the second high-frequency transmission line by the via pole.

Abstract: A movement detector which is rotatably installed on a base member includes a rotating member which has a body portion, and a connecting portion which rotatably connects the body portion to the base member, a piezoelectric layer which is formed on the connecting portion, and a plurality of electrodes which are provided on the piezoelectric layer, to be arranged in a direction of a rotation axis of the body portion, and which detect a voltage generated in the piezoelectric layer corresponding to a deformation of the connecting portion when the body portion has displaced with respect to the base member. Since the piezoelectric layer and the plurality of electrodes are provided to the connecting portion which rotatably connects the body portion to the base member, it is possible to detect a plurality of types of movements of the body portion by the piezoelectric layer and the plurality of electrodes.

Abstract: In one embodiment a device comprises a composite structure that includes a piezoelectric flexure and a length-constraining element. The length-constraining element provides the piezoelectric flexure with a bowed shape. The piezoelectric flexure has a first stable bowed position and a second stable bowed position. The length-constraining element is one from the group consisting of a planar sheet and a columnar rod. In another embodiment a device comprises a piezoelectric flexure having a bowl shape. The piezoelectric flexure has a first stable bowl-shaped position and a second stable bowl-shaped position.

Abstract: A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.

Abstract: A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.

Abstract: It is made possible to provide a MEMS device that has a low operation voltage, a large contact pressure force, and a large separation force. A MEMS device includes: a substrate; a supporting unit that is provided on the substrate; a fixed electrode that is provided on the substrate; an actuator that includes a first electrode, a first piezoelectric film formed on the first electrode, and a second electrode formed on the first piezoelectric film, one end of the actuator being fixed onto the substrate with the supporting unit, the actuator extending in a direction connecting the supporting unit and the fixed electrode, the first electrode being located to face the fixed electrode; and a stopper unit that is located above a straight line connecting the supporting unit and the fixed electrode, and is located on the substrate so as to face the first electrode.

Abstract: A piezoelectric drive motor especially well adapted for use with flow control systems on commercial aircraft, military aircraft and spacecraft. In one embodiment, the apparatus includes a support structure that supports a piezoelectric beam. A biasing element, for example a coil spring, is coupled between a free end of the piezoelectric beam and the support structure. The spring exerts a compressive force on the beam and serves to amplify its displacement when electric signals applied to piezoelectric layers on the beam cause deflection of the beam between two stable positions. The drive motor operates over a wider band of drive frequencies than conventional piezoelectric beams and is also suitable for use as a sensor and in a wide variety of actuator applications.

Abstract: A self-poling piezoelectric based MEMS device is configured for piezoelectric actuation in response to application of a device operating voltage. The MEMS device comprises a beam, a first electrode disposed on the beam, a layer of piezoelectric material having a self-poling thickness disposed overlying a portion of the first electrode, and a second electrode overlying the layer of piezoelectric material. The layer of piezoelectric material is self-poled in response to application of the device operating voltage across the first and second electrodes. In addition, the self-poled piezoelectric material has a poling direction established according to a polarity orientation of the device operating voltage as applied across the first and second electrodes.

Abstract: A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Abstract: A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.

Abstract: A novel full piezoelectric multilayer stacked hybrid actuation/transduction system. The system demonstrates significantly-enhanced electromechanical performance by utilizing the cooperative contributions of the electromechanical responses of multilayer stacked negative and positive strain components. Both experimental and theoretical studies indicate that for this system, the displacement is over three times that of a same-sized conventional flextensional actuator/transducer. The system consists of at least 2 layers which include electromechanically active components. The layers are arranged such that when electric power is applied, one layer contracts in a transverse direction while the second layer expands in a transverse direction which is perpendicular to the transverse direction of the first layer. An alternate embodiment includes a third layer.

Abstract: Co-fabricating of vertical piezoelectric MEMS actuators that achieve large positive and negative displacements through operating electric fields in excess of the coercive field includes forming a large negative displacement vertical piezoelectric MEMS actuator, forming a bottom structural dielectric layer above a substrate layer; forming a bottom electrode layer above the structural dielectric layer; forming an active piezoelectric layer above the bottom electrode layer; forming a top electrode layer above the active piezoelectric layer; forming a top structural layer above the top electrode layer, wherein the x-y neutral plane of the negative displacement vertical piezoelectric MEMS actuator is above the mid-plane of the active piezoelectric layer, wherein the negative displacement vertical piezoelectric MEMS actuator is partially released from the substrate to allow free motion of the actuator; and combining the large negative displacement vertical piezoelectric MEMS actuator and a large positive displaceme

Abstract: A piezoelectric oscillator includes: a piezoelectric substrate having at least a vibrating part and a base part; an excitation electrode formed on the vibrating part; and an oscillation circuit formed on the base part. In the piezoelectric oscillator, the oscillation circuit includes a thin film transistor made of one of polysilicon and monocrystalline silicon and is coupled to the excitation electrode.

Abstract: An actuating assembly for tuning a circuit and a process for forming a carrier substrate containing a membrane, a conductive layer, and piezoelectric actuators are disclosed. The actuating assembly comprises a membrane overlying a circuit to be tuned, a conductive element connected with the membrane, and a piezoelectric arrangement. Changes in shape of the piezoelectric arrangement allow a deflection of the membrane and a corresponding controllable upward or downward movement of the conductive element. In the process, a membrane and a piezoelectric structure are formed on a substrate.

Abstract: A piezoelectric package comprises an upper and lower piezoelectric plates, each having opposing electrodes. The piezoelectric package further comprises an electrically insulative structure encapsulating the piezoelectric plates. The piezoelectric package further comprises first and second external connectors mounted to the insulative structure. The connectors respectively have connector terminals that are electrically coupled to the electrodes in different orders, and have geometric arrangements that are identical, such that a single interface device can be selectively mated to either of the connectors. The piezoelectric package may be incorporated into a system that comprises electronic circuitry configured for operating the piezoelectric package, and a single interface device electrically coupled between the electronic circuitry and either of the external connectors of the piezoelectric package to selectively configure the package between a unimorph and a bimorph.

Abstract: An electromechanical actuator comprises a bimorph element (10) of an electromechanical material. The bimorph element (10) is controllably bendable in a first direction (15) by application of three voltage potentials to electrodes (41, 42, 43) of the bimorph element (10). The electromechanical actuator further comprises three conductive film areas (55, 56, 57) provided at a first side (51) of the bimorph element (10), which first side (51) is parallel to the first direction (15). The three conductive film areas (55, 56, 57) are electrically decoupled from each other. Furthermore, each of the three conductive film areas (55, 56, 57) is connected to at least one respective one of the electrodes (41, 42, 43). A method for manufacturing such an electromechanical actuator is also disclosed.

Abstract: A method for fabricating a low frequency quartz resonator includes metalizing a top-side of a quartz wafer with a metal etch stop, depositing a first metal layer over the metal etch stop, patterning the first metal layer to form a top electrode, bonding the quartz wafer to a silicon handle, thinning the quartz wafer to a desired thickness, depositing on a bottom-side of the quartz wafer a hard etch mask, etching the quartz wafer to form a quartz area for the resonator and to form a via through the quartz wafer, removing the hard etch mask without removing the metal etch stop, forming on the bottom side of the quartz wafer a bottom electrode for the low frequency quartz resonator, depositing metal for a substrate bond pad onto a host substrate wafer, bonding the quartz resonator to the substrate bond pad, and removing the silicon handle.

Abstract: Methods and apparatus relating to use and/or provision of a rake piezo actuator are described. In one embodiment, a piezo patch may be coupled to a plurality of blades (e.g., to cause the blades to oscillate and provide air flow between fins of one or more heat sinks). Other embodiments are also described.

Abstract: In order to simultaneously realize both improvements of the acoustic performance of a bimorph piezoelectric electroacoustic transducing device and the productivity, in a bimorph piezoelectric vibrator 10 in which a disk-like first piezoelectric element 12 is bonded to a first principal surface 11a of a metal plate 11, and a disk-like second piezoelectric element 13 is bonded to a second principal surface 11b of the metal plate 11, the diameter R1 of the first piezoelectric element 12 is different from the diameter R2 of the second piezoelectric element 13. Furthermore, the diameter R2 of the second piezoelectric element 13 is made smaller than the diameter R1 of the first disk-like piezoelectric element 12, and a lead-wire soldering portion 14 is ensured on the second principal surface 11b of the metal plate 11 which is in the periphery of the second piezoelectric element 13.

Abstract: A sensing system, sensing method, and method of producing a sensing system capable of providing a cumulative measurement capability, such as in the form of a RFID tag capable of measuring cumulative heat and humidity for continuous monitoring of storage and shipping conditions of various goods. The system includes integrated circuitry and a plurality of sensing elements, preferably having cantilevered bimorph beams. Each sensing element is responsive to an environmental condition so as to deflect toward and away from open contacts in response to changes in the environmental condition. Each sensing element produces a digital output when it contacts and closes its open contacts. The integrated circuitry interfaces with the sensing elements so that the digital outputs of the sensing elements are processed to generate a system output of the sensing system.

Abstract: An optical element module includes an optical element, and a plurality of actuator elements. In the module, each actuator element has an ion conductive polymer film and electrodes arranged on both sides of the film, and a whole of the actuator element is bent in a direction of thickness by applying a voltage between the electrodes, and the direction of the thickness of the actuator elements is a direction of an optical axis of the optical element, the actuator elements are arranged at equal intervals around the optical axis on a plane perpendicular to the optical axis, and a displacement due to the bend of one end part of at least one actuator element acts on one of a side surface and a bottom surface of the optical element to effect one of tilting and movement in the direction of the optical axis of the optical element.

Abstract: A drug delivery pump which uses a piezoelectric drive system to advance a small syringe piston to deliver a liquid drug and a method thereof are disclosed. The present invention has a cost and size advantage compared to traditional pumps and is a very compact and potentially disposable pump device design.

Abstract: A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.

Abstract: A method for fabricating a quartz nanoresonator which can be integrated on a substrate, along with other electronics is disclosed. In this method a quartz substrate is bonded to a base substrate. The quartz substrate is metallized so that a bias voltage is applied to the resonator, thereby causing the quartz substrate to resonate at resonant frequency greater than 100 MHz. The quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency. The quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator. Additionally, a method for accurately thinning a quartz substrate of the resonator is provided. The method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned.

Abstract: A piezoelectric/electrostrictive device is provided including a substrate section and an operation section disposed on the substrate section. The operation section includes a piezoelectric/electrostrictive film and an electrode film, and the device operates by displacement of the operation section. The piezoelectric/electrostrictive films and electrode films are alternately laminated so that uppermost and lowermost layers form the electrode films. The operation section and the substrate section are integrally fired, and the substrate section is ceramic material containing a titanium element.

Abstract: An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [Ec], and a plurality of electrodes [E1-E4] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N?] to vibrate in one direction [V] normal to the physical plane of the electrodes [Ec, E1-E4] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S?] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E1-E4], respectively.