Abstract: A piezoelectric/electrostrictive device has a piezoelectric/electrostrictive element which is formed on a ceramic substrate. The ceramic substrate includes a plate section, a movable section, and a fixed section. The piezoelectric/electrostrictive element has one electrode and the other electrode which are alternately stacked to give a comb-shaped cross section while the one electrode and the other electrode are superimposed with each other with piezoelectric/electrostrictive layers interposing therebetween. The first layer of the piezoelectric/electrostrictive layers includes a first portion of a first piezoelectric/electrostrictive material formed over a region ranging from a part of the thin plate section to a part of the fixed section, and a second portion of a second piezoelectric/electrostrictive material formed on another part of the fixed section.

Abstract: A piezoelectric/electrostrictive device includes a ceramic substrate having a pair of mutually opposing thin plate sections, a fixed section for supporting the thin plate sections, and movable sections disposed at ends of the pair of thin plate sections. The piezoelectric/electrostrictive device has a portion of each the movable sections opposed to the fixed section, the portion being formed in a stepped form so that respective attachment surfaces are provided with steps. Cutouts (cutaways) are formed at portions of an inner wall of the fixed section near the thin plate sections. Further, steps are provided on inner walls of the cutouts disposed on the sides of the thin plate sections.

Abstract: A piezoelectric/electrostrictive (P/E) device includes a pair of mutually opposing metal thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. One or more piezoelectric/electrostrictive elements are arranged on at least one thin plate section of the pair of thin plate sections. Any one of the movable section and the fixation section has mutually opposing end surfaces, and a distance between the end surfaces is not less than the axial length of the movable section.

Abstract: A piezoelectric actuator of multiple piezoelectric layers in an integrally bonded laminate structure. Alternating layers of electrically active ceramic material and conductive or non-conductive substrate material are stacked with layers of conductive or non-conductive thermally activated adhesive therebetween. The stacked layers are heated to flow the adhesive and subsequently cooled to effect an integral bonding of the layers and a doming of the stacked device. Conductive substrate materials and adhesive materials may be used, with every other substrate layer being reverse poled to create alternating positive and negative electrode substrate layers capable of applying an electric field to active ceramic layers therebetween. Alternatively, electrically active layers are provide with thin metal electrode layers on opposing surfaces which are capable of applying an electric field to active ceramic layers therebetween.

Abstract: A pressure generating chamber communicating with a nozzle orifice from which ink is to be ejected. A vibration plate constitutes at least a part of the pressure generating chamber. A piezoelectric element includes a lower electrode constituting at least a part of the vibration plate, a piezoelectric layer formed on the lower electrode, an upper electrode formed on the piezoelectric layer, and an active part for actuating the vibration plate to eject the ink from the nozzle orifice. A neutral plane of the actuation of the active part is located in the vibration plate.

Abstract: This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.

Abstract: This invention is a new type of relay that incorporates the functional combination of multimorph actuator elements with electrostatic state holding mechanisms in the development of a micromachined switching device. This combination of elements provides the benefits of high-force multimorph actuators with those of zero-power electrostatic capacitive latching in microfabricated relays with high reliability and low power consumption. The operation of the relay invention allows for several stable states for the device: a passive state using no power, an active state driving the multimorph actuator with some power, and a latched state electrostatically holding the switch state requiring essentially no power. Multimorph actuators covered by this invention include piezoelectric, thermal, and buckling multimorph actuation mechanisms. These devices use one or more sets of actuator armatures in cantilever or fixed-beam configurations, and use one or more sets of electrostatic latch electrodes for state holding.

Abstract: A piezoelectric acoustic component having excellent efficiencies of productivity and of acoustic conversion, a greatly miniaturized size, and excellent impact resistance properties, includes a unimorph type diaphragm. The unimorph type diaphragm is defined by adhering a substantially square piezoelectric element onto a substantially square metal plate, the shorter sides of the diaphragm are supported on the supporting portion provided within the two opposing side wall portions of the case, the clearance between the remaining two sides of the diaphragm, and the case is sealed with a resilient sealing agent. The case is adhered on the substrate having external electrodes, the metal plate is connected to the external electrode with a resilient conductive paste, and the surface electrode of the piezoelectric element is connected to the external electrode with a resilient conductive paste.

Abstract: The present invention provides a piezo-electric/electrostrictive device including a pair of thin plate sections 12a and 12b in an opposed relation to each other, a fixing section 14 for supporting the thin plate sections 12a and 12b, and piezo-electric/electrostrictive elements 18a and 18b are provided to the pair of thin plate sections 12a and 12b respectively. The movable sections 20a and 20b respectively have end surfaces 34a and 34b in an opposed relation. Recesses 20c and 20d filled with a filler are formed at the boundaries between the thin plate sections 12a and 12b, and the fixing section 14 and the movable sections 20a and 20b. As a result, the impact resistance of the device 10 is enhanced. The present invention also relates to the method for producing such a device.

Abstract: The present invention discloses motors using electromechanical, preferably piezoelectric, elements (30). The element (30) comprises at least two movable parts or displacement portions (32A, 32B) interconnected by a passive part (31). Each displacement section (32A, 32B) comprises at least one bimorph (33A, 33B), where the active volumes extend in parallel out from the passive part (31), and so are the electrodes (12) arranged between the electromechanical layers. The displacement portions (32A, 32B) are positioned in substantially the same plane and parallel to the body (20) to be moved. Contact portions are arranged at the central passive part (31) and at the displacement portions (32A, 32B). In one embodiment, the central contact portion is an actuating surface (34C) and the other are attaching portions (36A, 36B) for attachment to a stator (24). In another embodiment, the central contact portion is an attaching portion and the other are actuating surfaces.

Abstract: The present invention is actuator having a shaft delivering mechanical power to a load, a first active element adapted to be driven by an oscillating signal, and at least one mechanical diode operatively connected to the shaft in the act of development. A plurality of mechanical diodes may also be used. Mechanical diodes can be either rotary mechanical diodes or linear mechanical diodes. The mechanical diodes can also be bi-directional.

Abstract: A modular actuator assembly includes one or more plates or elements of electro-active material bonded to an electroded sheet, preferably by a structural polymer to form a card. The card is sealed, and may itself constitute a practical device, such as a vane, shaker, stirrer, lever, pusher or sonicator for direct contact with a solid or immersion in a fluid, or may be bonded by a stiff adhesive to make a surface-to-surface mechanical coupling with a solid workpiece,device, substrate, machine or sample. The structural polymer provides a bending stiffness such that the thin plate does not deform to its breaking point, and a mechanical stiffness such that shear forces are efficiently coupled from the plate to the workpiece. In further embodiments, the card may include active circuit elements for switching, powering or processing signals, and/or passive circuit elements for filtering, matching or damping signals, so that few or no connections to outside circuitry are required.

Abstract: A high power and high torque density piezoelectric motor is developed using torsional actuator tube (stator) directly coupled to the rotor via one or two one way clutches. A cylindrical torsional actuator is comprised of a plurality of tubular piezoelectric ceramic segments poled along their length, aligned in alternate polarity and bonded together with intervening electrodes. When an alternating electric field is applied to the electrodes across adjacent segments to actuate the segments in their shear resonance mode, an end of the cylindrical actuator moves in a direction perpendicular to the length of the cylindrical actuator in response to the applied electric field. In a half cycle torsional motor, the angular motion of the end of the cylindrical actuator is transmitted to a rotor via a one way roller clutch positioned at one end of the cylindrical actuator.

Abstract: A piezoelectric actuator includes a main driver electrode 4 and a sensor electrode 5. A feedback signal is generated from the sensor electrode 5 in order to eliminate a primary vibration mode due to a primary resonance frequency. The main driver electrode extends to a fixture portion of the actuator, the fixture portion being fitted into a support member 11. The extending portion of the main driver electrode eliminates the electromechanical coupling against a secondary vibration mode due to a second resonance frequency. Features of the piezoelectric actuator suppress the resonance phenomenon, thus improving the response characteristics of the actuator.

Abstract: A method for producing a piezoelectric actuator of multiple piezoelectric layers in an integrally bonded laminate structure. Alternating layers of electrically active ceramic material and conductive or non-conductive substrate material are stacked with layers of conductive or non-conductive thermally activated adhesive therebetween. The stacked layers are heated to flow the adhesive and subsequently cooled to effect an integral bonding of the layers and a doming of the stacked device. Conductive substrate materials and adhesive materials may be used, with every other substrate layer being reverse poled to create alternating positive and negative electrode substrate layers capable of applying an electric field to active ceramic layers therebetween. Alternatively, electrically active layers are provide with thin metal electrode layers on opposing surfaces which are capable of applying an electric field to active ceramic layers therebetween.

Abstract: A method of making a print head (100) includes forming a body (110) having a closed base (120) and independent fluid containment compartments (220) formed about the closed base (120). A substantially planar piezoelectric transducer (80) comprising a slab (60) of piezoelectric material provides a means of enclosing each of the independent fluid containment compartments (220). Each of the independent compartments has operably associated therewith one of a plurality of first electrodes (20) arranged on a first surface (62) of the slab (60) of piezoelectric material and a portion of a second electrode (22) arranged on an opposite second surface (64). By applying a voltage to the first and second surface electrodes (20, 22) in a predetermined manner induces an electric field in a portion of the slab (60) of piezoelectric material and thereby forces fluid composition through the independent fluid containment compartment (220).

Abstract: An acoustic resonator includes a ferromagnetic compensator which at least partially offsets temperature-induced effects introduced by an electrode-piezoelectric stack. The compensator has a positive temperature coefficient of frequency, while the stack has a negative temperature coefficient of frequency. By properly selecting the thickness of the compensator, temperature-induced effects on resonance may be neutralized. Alternatively, the thickness can be selected to provide a target positive or negative composite temperature coefficient of frequency. In the preferred embodiment, the compensator is formed of a nickel-iron alloy, with the most preferred embodiment being one in which the alloy is approximately 35% nickel and approximately 65% iron. In order to prevent undue electromagnetic losses in the ferromagnetic compensator, a metallic flashing layer may be added to at least partially enclose the compensator.

Abstract: A slider assembly for selectively altering a position of a transducing head with respect to a track of a rotatable disc having a plurality of concentric tracks includes a slider body having a main portion and a head portion separated by a gap. The head portion carries the transducing head. The slider body is arranged to be supported by a support structure over a surface of the rotatable disc. A pair of structural elements are disposed on opposite side surfaces of the slider body between the main portion and the head portion across the gap. At least one of the structural elements is a microactuator responsive to electrical control signals to selectively bend to alter the position of the head portion with respect to the main portion of the slider body. The structural elements may be complementary microactuators.

Abstract: A miniature electrical relay including a piezoelectric actuating element where the piezoelectric actuating element includes a piezoelectric thin-film material sandwiched in between two metal electrode layers that function as piezoelectric electrodes. The metal electrode layers are connected to a positive and negative terminal, respectively, of a power source, which results in actuation of the piezoelectric actuating element. The piezoelectric actuating element is affixed to a deformable metal contact through an insulating layer, such that when actuated, the piezoelectric actuating element selectively deforms the deformable metal contact to cause the contact to move into or out of electrical and mechanical connection with a fixed metal contact.

Abstract: A modification of the traditional unimorph flextensional actuator is provided by replacing the metal shim with an electrically conducting oxide. Comprised of lead zirconate titanate and zinc oxide that is co-sintered, the laminate composite obtains large axial displacements while maintaining moderate axial loads. The varistor properties of zinc oxide dictate that the conductance increases several orders of magnitude when a critical electric field is applied. The versatility of the processing over other actuator system facilitates miniaturization, while maintaining comparable performance characteristics. Functional gradients in the material properties are created in the green body by layering thin tape cast sheets. The unique PZT-zinc oxide composite not only controls the piezoelectric gradient, but permits control of the sintering kinetics leading to the processing of either flat or highly domed structures.

Abstract: A piezoelectric bending transducer comprises a flat, electrically conductive supporting body having piezoceramic coatings on both sides. Each coating has an inner contact area facing the supporting body and an outer contact area facing away from the supporting body. The piezoceramic coatings are omitted from one end of the supporting body, which is fixed in a connector base. Each of the two coatings and the supporting body are electrically connected to a plug-in contact that includes an electrically conductive elastomer in a cavity in the connecting body. The elastomer is partially elastically deformed by a contact pin inserted thereinto. As a result of the ease with which electrical connections can thus be made to the transducers, this arrangement is particulary adapted for incorporation into a transducer module with plural transducers secured adjacent to each other in a common connector base.

Abstract: A method for forming ferroelectric wafers is provided. A prestress layer is placed on the desired mold. A ferroelectric wafer is placed on top of the prestress layer. The layers are heated and then cooled, causing the ferroelectric wafer to become prestressed. The prestress layer may include reinforcing material and the ferroelectric wafer may include electrodes or electrode layers may be placed on either side of the ferroelectric layer. Wafers produced using this method have greatly improved output motion.

Abstract: A piezoelectric element has a first and a second stack containing a plurality of piezoelectric ceramic layers and has an intermediate layer disposed between the first and the second stacks. The intermediate layer is formed as a supporting body made of a fiber composite material or glass. Such a multimorphous piezoelectric element exhibits a high efficiency and a high mechanical stability and, in addition, can be operated with low voltages.

Abstract: The resonant circuit has at least one resonant body of a semiconductor material anchored on the surface of a semiconductor substrate, at least one first electrode being arranged at said semiconductor material, and at least one second electrode. The first and second electrode are arranged lying opposite one another. When an AC-superimposed DC voltage is applied between the first and the second electrode, the resonant body is excited to mechanical oscillation by the DC voltage. In particular, the resonant circuit can be monoically integrated in electronic circuits.

Abstract: A liquid jetting apparatus has a concave casing having an opened flat face, and a piezoelectric drive element for at least partly sealing the opened flat face to form a liquid reservoir to store a liquid, such as ink. The reservoir has a liquid injection port for injecting a liquid and a liquid jet port for jetting the stored liquid. The piezoelectric drive element is directly bonded to the open flat face.

Abstract: A method of controlling fluid flow in a microfluidic process includes the step of providing a piezoelectric pumping apparatus (100) in fluid communications with the microfluidic process such as an ink jet printer and the like. The piezoelectric pumping apparatus (100) has a piezoelectric transducer (80) with a functionally gradient piezoelectric element (60) arranged in a fluid containment chamber (120) which fluidically communicates with the microfluidic process. The functionally gradient piezoelectric element (60) responds to a voltage applied by a power source (240) by either expanding to expel fluid from the microfluidic process or contracting to permit fluid to enter the fluid containment chamber (120) and thus the microfluidic process.

Abstract: An acceleration sensor has a piezoelectric element which includes a piezoelectric member layer in which a plurality of piezoelectric members are stacked and electrodes which are disposed in major opposed surfaces of the piezoelectric member layer; and a support member for supporting the piezoelectric element, wherein some piezoelectric members of the piezoelectric member layer are polarized. The electrodes are disposed in both surfaces of the polarized piezoelectric members. Capacitors which are formed by the polarized piezoelectric members and the electrodes in both surfaces of the polarized piezoelectric members are connected parallel to each other.

Abstract: A piezoelectric element has a very small size, has a high coefficient of electromechanical coupling, and can easily be impedance-matched to a circuit. An interdigital electrode, including two comb-shaped electrodes, is provided on one surface of a plate-like piezoelectric member, and similarly, an interdigital electrode, including two comb-shaped electrodes, is provided on another surface of the plate-like piezoelectric member. The piezoelectric member is polarized by applying electrical fields between the two respective pairs of comb-shaped electrodes; and in addition, by applying an electrical field for excitation between a terminal connecting one of the comb-shaped electrodes to each interdigital electrode, and another terminal connecting the other comb-shaped electrodes to each interdigital electrode, longitudinal vibrations in a stiffened mode are excited, whereby the piezoelectric member expands and contracts in the longitudinal direction thereof.

Abstract: A vibrating gyro which includes a vibrator formed by joining two piezoelectric substrates, which are polarized in opposite directions, by a metal layer. Electrodes are formed on the main outer surfaces of the piezoelectric substrates. One of the electrode is split into six electrode portions. As the metal layer, a material having a melting point lower than the Curie point of the piezoelectric substrates is used. Cut portions are formed on the joining sides of the piezoelectric substrates, and high-temperature metal wires or the like are passed through the cut portions, thereby forming support members.

Abstract: A piezoelectric sensor has a piezoelectric element having a specific axis of sensitivity and a package for the piezoelectric element. The package has a rectangular parrallelopiped configuration with opposite longitudinal end surfaces having a height-to-width ratio of about 1:1. External lead electrodes are formed to cover at least the longitudinal end surfaces. A method and apparatus for detecting if the sensor is disposed in the proper posture is also disclosed.

Abstract: A vibrating mechanism comprised of piezoelectric elements which vibrate at a high frequency when a voltage is applied to them. The piezoelectric elements are mounted on a rib so that their free ends extend from the rib. When the piezoelectric elements are energized the free ends vibrate with a "wing-flapping" motion. Weights may be attached to the free ends of the piezoelectric element to increase the inertial component of vibration. In the preferred embodiment of the invention, the piezoelectric elements are prestressed. The invention will be an inexpensive substitute for other vibratory devices.

Abstract: A vibrating gyro which includes a vibrator formed by joining two piezoelectric substrates, which are polarized in opposite directions, by a metal layer. Electrodes are formed on the main outer surfaces of the piezoelectric substrates. One of the electrode is split into six electrode portions. As the metal layer, a material having a melting point lower than the Curie point of the piezoelectric substrates is used. Cut portions are formed on the joining sides of the piezoelectric substrates, and high-temperature metal wires or the like are passed through the cut portions, thereby forming support members.

Abstract: Rectangular piezoelectric substrates each of which has main surfaces opposed to each other, measures 50 .mu.m thick by 1 mm wide by 8 mm long, and is made of lithium niobate (LiNbO.sub.3), are directly bonded on the main surfaces so that their axes of polarization are set in directions reverse to each other, thereby composing a piezoelectric element. Electrodes which are 0.2 .mu.m thick and made of chromium-nickel are formed on the two main surfaces of the piezoelectric element opposed to each other, thereby resulting in a precision displacement control actuator of a bimorph type mechanical-electrical converter element. This configuration makes it possible to provide a compact precision displacement control actuator which has a large displacement and extremely small variations of characteristics such as displacement and resonance frequency.

Abstract: In a process for the detection of the limit level of liquids and bulk materials in containers and pipelines, the change in the oscillation behavior of a sensor which is excited to oscillation is detected electronically and used to trigger a switch command. As sensor there is used a parallel bimorph piezoelectric element (22) having a common central electrode (44) and two outer electrodes (46, 48). A first alternating voltage (U1) with an oscillator frequency (f1) is applied between the central electrode (44) and a first outer electrode (46), a second alternating voltage is measured as amplitude of oscillation (U2) with corresponding oscillation frequency (f2) between the central electrode (44) and the second outer electrode (48), and the measured amplitude of oscillation (U2) or oscillation frequency (f2) is converted into an output switch signal.

Abstract: A polyurethane elastomer actuator comprising a polyurethane elastomer 1 capable of deforming due to the orientation by an electric field, wherein the shrinkage displacement occurring at the time of the application of an electric field is transformed into other displacement. This polyurethane elastomer actuator does not require electrolyte and high voltage. Since it is not accompanied by chemical reactions and heat generation, its durability hardly deteriorates. This actuator deforms largely during driving.

Abstract: A process for producing a probe-driving mechanism. A laminate of a first and second insulating layer is placed on a support. Electrode layers and piezoelectric layers are successively laminated on the second insulating layer. Part of the support and second insulating layer is removed to form a cantilever.

Abstract: A stacked body is formed from alternating piezoelectric ceramic layers 40 and internal electrode layers 42, 44. At least a central portion of a stacked body is divided into a plurality of actuator portions 46a, 46b, and 46c by elongated holes 52 opened in the stacked direction. The portions are supported at their end portions by a piezoelectric non-active portion 48. Desired actuator portions can be driven independently by selectively applying voltage to the electrodes corresponding to the actuator portions 46a, 46b, and 46c.

Abstract: A ground fault interrupter circuit ("GFIC") device having as a switching device a flextensional electroactive transducer which, when energized, opens a supply conductor between a current source and a load. When a fault current is detected a voltage is induced in a coil; due to the condition that there is less current running through the conductor from the load than through the conductor from the power supply which both extend through the core of the coil. The voltage induced in the coil is amplified by a transistor which causes the transducer to piezoelectrically "snap" from a first neutral position to a second neutral position thereby cutting of current from the power supply to the load.

Abstract: A low-profile, axial-flow, single-blade piezoelectric fan is provided. The fan is in the form of a piezoelectric fan assembly (300) which contains a housing (302) defining an axial flow-through internal cavity. Inside the housing (302) is a single fan blade (314) which is attached at only one end to the housing (302). A piezoelectric element (318) is fixedly mounted to the single fan blade (314) and causes the single fan blade (314) to deflect when the piezoelectric element (318) is activated. This piezoelectric fan assembly (300) may be used to cool electronic components in applications where low-power and low-volume fanning is desired.

Abstract: The piezoelectric-acoustic transducer of the present invention has a hollow case provided with a sound hole. A piezoelectric actuator is disposed inside this case that has one end fixed to the case and that bends in the direction of the thickness of the case when voltage is applied. A diaphragm is secured to one portion of the piezoelectric actuator and is positioned at a distance from the piezoelectric acturator in the direction of the thickness of the case.

Abstract: The piezoelectric actuator consists of at least two disk-shaped congruent bending elements which each have a carrier plate made of a hard-elastic material with a layer of a piezoelectric material applied to one or both sides. Two bending elements respectively are connected with one another by way of at least two bending joints arranged on the circumference of the carrier plates.

Abstract: To provide a mounting arrangement of acceleration detecting elements capable of detecting acceleration over a wide range with as few elements as possible and having substantially the same detection sensitivity with regard to acceleration operating in any direction of orthogonal coordinate axes, two acceleration detecting elements are disposed on an element attaching surface defining x-y plane in an x-y-z orthogonal coordinate system, such that orientations of the two acceleration detecting elements are along the x axis and y axis on the element attaching surface, a maximum sensitivity direction of one of the two acceleration detecting elements being inclined from the y axis toward the z axis by 40.degree. to 50.degree. and a maximum sensitivity direction of the other of the acceleration detecting elements being inclined from the x axis to the z axis by 40.degree.to 50.degree..

Abstract: A power generator is provided and includes a piezoelectric transducer which generates electric power upon application of a strain. The power generator includes a vibrating arm having a sandwich structure wherein a support layer is held between at least two piezoelectric portions. The vibrating arm is wider on the support end than at a free end. The piezoelectric portions are extended to a root portion of the vibrating arm so that strain energy may efficiently be converted into electric energy. The piezoelectric portions each have a laminated structure so that piezoelectric power generator having the electromotive voltage and the capacitance optimum for charging may be realized.

Abstract: An electroacoustic transducer, which has a lead frame previously formed into a predetermined shape, an outer case formed integrally with the lead frame and a drive section including a coil arranged inside the outer case, comprises an opening formed in the outer case; lands formed by exposing a part of the lead frame through an outer surface of the outer case; and the coil having coil terminals led out of the outer case through the opening and connected to the lands.

Abstract: A device for use in vehicular rear view mirrors which comprises a mirror and a vibrator so arranged to propagate pressure waves or vibrations in the mirror primarily perpendicular to the plane of the mirror. The vibrations are of sufficient magnitude as to cause water droplets to leave the surface of the mirror by atomization of the fine droplets or by the running together of droplets and subsequent dripping off by gravity. The bonds between the mirror face and other solid deposits including ice are quickly broken allowing the debris to fall clear, thus enhancing the clarity of vision of the mirror. The vibrators are ceramic piezoelectric transducers mounted in a Bi-Morph configuration directly on the back of the mirror.

Abstract: A miniature grating drive device (216) for accurately and precisely positioning a grating (236) of a projection Moire topography measurement system where the Moire topography measurement system is included as part of a hand-held medical instrument for providing surface measurements of inaccessible living membranes. The drive device (216) includes two separate piezoelectric bimorph actuators (248, 256) for positioning the grating (236) at three precise locations. The first piezoelectric bimorph actuator (256) accurately positions the grating (236) at a first location, and the second piezoelectric bimorph (248) actuator accurately positions a base (232) on which the first piezoelectric actuator (256) is attached to move the grating (236) to a second location.

Abstract: A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.

Abstract: A modular actuator assembly includes one or more plates or elements of electro-active material bonded to an electroded sheet, preferably by a structural polymer to form a card. The card is sealed, and may itself constitute a practical device, such as a vane, shaker, stirrer, lever, pusher or sonicator for direct contact with a solid or immersion in a fluid, or may be bonded by a stiff adhesive to make a surface-to-surface mechanical coupling with a solid workpiece, device, substrate, machine or sample. The structural polymer provides a bending stiffness such that the thin plate does not deform to its breaking point, and a mechanical stiffness such that shear forces are efficiently coupled from the plate to the workpiece. In further embodiments, the card may include active circuit elements for switching, powering or processing signals, and/or passive circuit elements for filtering, matching or damping signals, so that few or no connections to outside circuitry are required.

Abstract: A transducer includes an elongated piezoelectric sensor having only a single integrated mass of piezoelectric material and a pair of relatively longer opposite edges and a pair of relatively narrower opposite edges. The transducer also includes a sensor support that imposes less constraint on one of the pairs of edges than on the other pair.A transducer has two piezoelectric sensors, and a support for supporting the two sensors back-to-back. Each of the sensors being held on opposite edges by a pair of opposite ledges, while two other opposite edges of the sensors are less constrained. The maximum displacement of the two less constrained edges of each sensor are limited by another pair of opposite ledges which are spaced away from the sensor when the sensor is in its normal position.A transducer has two piezoelectric sensors mounted back-to-back on a housing that includes a rib which supports an edge of each sensor.

Abstract: An electroacoustic transducer, which has a lead frame previously formed into a predetermined shape, an outer case formed integrally with the lead frame and a drive section including a coil arranged inside the outer case, comprises an opening formed in the outer case; lands formed by exposing a part of the lead frame through an outer surface of the outer case; and the coil having coil terminals led out of the outer case through the opening and connected to the lands.