Abstract: An electronic component has a structure which prevents corrosion caused by moisture intrusion through an electrode pattern extending inwardly from an edge connecting a side and one of main surfaces of a substrate and, therefore, deterioration of a characteristic rarely occurs over time. The electronic component includes, on the first main surface of the substrate, the first electrode pattern extending inwardly from an edge connecting the side of the substrate and the first main surface of the substrate, the second electrode pattern that is opposite to the end of the first electrode pattern through the gap, and the third electrode pattern that is disposed on the first electrode pattern and the second electrode pattern such that it covers the gap. The third electrode pattern is formed from a metal film that is highly resistant to corrosion, the corrosion resistance of which is superior to that of metal films forming the first electrode pattern and the second electrode pattern.

Abstract: A multilayer piezoelectric device has a laminated body having piezoelectric layers laminated in the direction of a given axis “A” and positive and negative internal electrode layers are alternatively disposed between neighboring piezoelectric layers. The device further has a underlying layer disposed on a side of the laminated body and electrically connected to one of the internal electrode layers, a first conductive reinforcing layer joined to the underlying layer, a second conductive reinforcing layer joined to the first conductive reinforcing layer, and a conductive joining material joining the underlying layer to the first conductive reinforcing layer. The second conductive reinforcing layer is not directly joined to the underlying layer by means of the conductive joining material.

Abstract: There are provided a piezoelectric device, in which piezoelectric element surfaces are prevented from cracking and warping by reducing tensile stress generated within the piezoelectric element by an external force, and a piezoelectric switch utilizing the same. The piezoelectric device comprises a piezoelectric element having a plate-like shape including a piezoelectric body having a plate-like shape and polarized in a thickness direction thereof and a pair of electrodes formed on both main surfaces of the piezoelectric body, and a pair of elastic conductive members fixed to the both main surfaces of the piezoelectric element, wherein when an external force is applied, the piezoelectric body is deformed to generate electricity.

Abstract: In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film sandwiched between a pair of electrodes. The piezoelectric film is overlapped with the pair of electrodes in plan view. The additional film is disposed on one of the piezoelectric film and the electrodes so as to extend along at least a portion of the periphery of the vibration unit. When x (MN·second/m3) denotes an acoustic impedance of the additional film defined by the square root of the product of the density and Young's modulus, A denotes the product of the density and the thickness of the additional film, B denotes the product of the densities and the thicknesses of the electrodes, and y=A/B, the following conditional expressions are satisfied: In the range of 9.0?x<44.0, 0.0092·x+0.88?y<0.067·x+0.60??(1a) In the range of 44.

Abstract: A stacked piezoelectric element obtained by alternately stacking a piezoelectric ceramic layer and an electrode layer, wherein said electrode layer mainly comprises an electrically conducting base metal electrode material, and the region held between the electrode layer positioned at the top of each ceramic layer and the electrode layer positioned at the bottom of each ceramic layer contains a material having no piezoelectricity, in which a constituent element of said material having no piezoelectricity is uniformly dispersed so as not to have local distribution of a distributed strength exceeding 2 times the distributed strength which is distributed in a largest number of places and is not 0.

Abstract: To provide a quartz crystal vibrator, an oscillator and an electronic apparatus capable of preventing a bonding electrode from being corroded and easily maintaining soundness of the bonding electrode over a long period of time, a quartz crystal vibrator is provided with a quartz crystal vibrating plate formed by surrounding a quartz crystal vibrating piece by a frame-like portion, a hermetically closed vessel including a lid member and a base member in a plate-like shape for interposing the quartz crystal vibrating plate in a thickness direction, bonding electrodes provided between the lid member and the quartz crystal vibrating plate and between the base member and the quartz crystal vibrating plate and electrically connected to an inner electrode, and a protecting film for protecting the bonding electrode, provided with a recess portion recessed to an inner side of the hermetically closed vessel from an outer edge portion between the lid member and the quartz crystal vibrating plate and an outer edge portio

Abstract: An electric power generator includes a first conductive layer, a plurality of semiconducting piezoelectric nanostructures, a second conductive layer and a plurality of conductive nanostructures. The first conductive layer has a first surface from which the semiconducting piezoelectric nanostructures extend. The second conductive layer has a second surface and is parallel to the first conductive layer so that the second surface faces the first surface of the first conductive layer. The conductive nanostructures depend downwardly therefrom.

Abstract: [Problem] To provide a piezoelectric device with which it is possible to prevent a brazing material from attaching to a vibrating area, prevent solder eating, and to thereby obtain excellent vibration characteristics.

Abstract: Provided is an electronic component capable of securely soldering an external terminal such as a lead wire to each terminal electrode, while preventing overflow of solder from the area on the terminal electrode. In the electronic component as a multilayer piezoelectric device, on the occasion of soldering a lead wire 24 to a terminal electrode 17, the lead wire 24 can be placed on a second region R2 higher in height than a first region R1 from a surface 7a of a piezoelectric layer 7. This makes a molten solder 25 more likely to flow from the second region R2 to the first region R1 during the soldering. For this reason, the solder 25 is prevented from overflowing from the area on the terminal electrode 17 even if the amount of the solder for soldering the lead wire 24 to the terminal electrode 17 is increased in order to improve certainty of connection between terminal electrode 17 and lead wire 24.

Abstract: An electro-acoustic resonator (1, 8, 17) of the membrane or FBAR type (1) or the solidly-mounted or SBAR type (8), with electrodes comprising a single conducting layer or multiple conducting layers, i.e. sandwich construction (17) with an optimum coupling factor kr and thus an improved filter bandwidth. The optimum coupling factor kr is achieved by the arrangement that the top electrode (6, 15, 25) is thinner than the bottom electrode (4, 13, 23). The coupling factor is independent of the resonator's layout defined by the mask.

Abstract: The piezoelectric device includes a substrate, a first electrode deposited on the substrate, a piezoelectric film deposited on top of at least a part of the first electrode by vapor phase deposition, a second electrode deposited on the piezoelectric film and having a water vapor transmission rate of not more than 1 g/m2/day, and at least one protective film that covers at least peripheries of the second electrode and the piezoelectric film and which has an opening in a position corresponding to the piezoelectric film except the periphery thereof. The piezoelectric device has satisfactory moisture resistance and is capable of effectively preventing the ingress of moisture into the piezoelectric film.

Abstract: A self-poling piezoelectric based MEMS device is configured for piezoelectric actuation in response to application of a device operating voltage. The MEMS device comprises a beam, a first electrode disposed on the beam, a layer of piezoelectric material having a self-poling thickness disposed overlying a portion of the first electrode, and a second electrode overlying the layer of piezoelectric material. The layer of piezoelectric material is self-poled in response to application of the device operating voltage across the first and second electrodes. In addition, the self-poled piezoelectric material has a poling direction established according to a polarity orientation of the device operating voltage as applied across the first and second electrodes.

Abstract: A piezoelectric actuator includes individual inner-electrodes arranged between stacked ceramic sheets, individual surface-electrodes arranged in a row in a row-direction on a top surface of the stacked ceramic sheets, and connection electrodes connecting the individual inner-electrodes and the individual surface-electrodes respectively. The connection electrodes each have a size enough to cover one of the individual surface-electrodes respectively. The individual surface-electrodes and the connection electrodes are connected to each other via inner conduction electrodes filled through holes which are located at mutually different positions in a direction orthogonal to the row-direction of the individual surface-electrodes. With this, it is possible to make the contour of the piezoelectric actuator to be small, and to suppress the arching deformation or warpage of the piezoelectric actuator.

Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion. The inactive portions are provided with a metal oxide layer made of a material having a melting point higher than a sintering temperature of the piezoelectric bodies and being soluble in the piezoelectric bodies.

Abstract: A sensor comprises a transducer substrate formed of a photo-acoustically sensitive material and having a receiving surface and an absorptive layer coupled to the transducer substrate receiving surface that detects broadband electromagnetic (EM) radiation.

Abstract: According to an exemplary embodiment, a method of forming a multi-layer electrode for growing a piezoelectric layer thereon includes a step of forming a high conductivity metal layer over a substrate. The method further includes a step of forming a seed layer over the high conductivity metal layer. The method further includes a step of forming a high density metal layer over the seed layer. The method further includes a step of forming a piezoelectric layer over the high density metal layer. The high conductivity metal layer, the seed layer, and the high density metal layer form the multi-layer electrode on which the piezoelectric layer is grown.

Abstract: According to an exemplary embodiment, a bulk acoustic wave structure includes a lower electrode situated over a substrate. The bulk acoustic wave structure further includes a piezoelectric layer situated over the lower electrode, where the piezoelectric layer comprises aluminum copper nitride. The bulk acoustic wave structure further includes an upper electrode situated over the lower electrode. The bulk acoustic wave structure can further include a bond pad connected to the upper electrode, where the bond pad comprises aluminum copper. The lower electrode can include a high density metal situated adjacent to the piezoelectric layer and a high conductivity metal layer underlying the high density metal layer.

Abstract: An actuator for a deformable optical component includes a stack of ferroelectric layers, a plurality of electrodes for applying a voltage across each layer; every other electrode extending to an associated first conductor path and interstitial electrodes extending to an associated second conductor path the first conductor path or receiving a first conductor lead, the second conductor path for receiving a second conductor lead to contact the respective electrodes.

Abstract: A design and a manufacturing method of ultrasound transducers based on films of ferro-electric ceramic material is presented, the transducers being particularly useful for operating at frequencies above 10 MHz. The manufacturing technique can involve tape-casting of the ceramic films, deposition of the ceramic films onto a substrate with thick film printing, sol-gel, or other deposition techniques, where manufacturing methods for load matching layers and composite ceramic layers are described. The designs also involve acoustic load matching layers that provide particularly wide bandwidth of the transducers, and also multi-band operation of the transducers. The basic designs can be used for elements in a transducer array, that provides the frequency characteristics of the single element transducers, for array steering of the focus and possibly also direction of a pulsed ultrasound beam at high frequencies and multi-band frequencies.

Abstract: An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.

Abstract: A piezoelectric thin film resonator has a substrate and a piezoelectric layered structure including a lower electrode, piezoelectric aluminum nitride thin film with c-axis orientation and upper electrode formed on the substrate in this order. The lower electrode are made of a metal thin film including a layer containing ruthenium as a major component having a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of ruthenium of 3.0° or less. The piezoelectric aluminum nitride thin film formed on the lower electrode has a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of 2.0° or less.

Abstract: A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (KaNa1-a)xNbO3, “a” and “x” in the compositional formula being respectively 0.1<a<1 and 1?x?1.2.

Abstract: A piezoelectric actuator 3 includes a metallic vibration plate 30, an insulating layer 31, a plurality of individual electrodes 32, a piezoelectric layer 33 and a common electrode 34. The insulating layer 31 is formed on the top surface of the vibration plate 30. The individual electrodes 32 are formed on the top surface of the insulating layer 31. The piezoelectric layer 33 is formed on the top surfaces of the individual electrodes 32. The common electrode 34 is formed on the top surface of the piezoelectric layer 33 over the individual electrodes 32. A plurality of terminals 36 and a plurality of wirings 35 are formed on the top surface of the insulating layer 31. Each of the terminals 36 is associated with one of the individual electrodes 32. Each of the wirings 35 connects one of the individual electrodes 32 and the associated terminal 36.

Abstract: A piezoelectric component includes at least one monolithic piezo element, having at least a first electrode layer, at least a second electrode layer and at least one piezoceramic layer located between the electrode layers. The piezoelectric component is characterized in that at least between one of the electrode layers and the piezoceramic layer is provided an uncoupling layer which is in direct contact with at least one of the layers for mechanically uncoupling the electrode layer and the piezoceramic layer. A method for producing such a piezoelectric component is disclosed. The piezoelectric component is used in automotive technique for controlling an internal combustion engine injection valve.

Abstract: A method for manufacturing a capacitor includes the steps of: forming a lanthanum nickelate layer above a base substrate; forming a dielectric layer above the lanthanum nickelate layer; forming a conductive layer above the dielectric layer; and patterning at least the dielectric layer until the lanthanum nickelate layer is exposed.

Abstract: A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.

Abstract: A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.

Abstract: There is provided with a piezoelectric transformer which does not require a marking operation, is easy to manufacture, and is capable of reducing costs. After the piezoelectric transformer is manufactured, a shape of secondary side electrodes on the outer end is made so that a polarization direction can be recognized at the time of printing the secondary side electrodes without marking by a separate step to recognize the polarity on the primary side.

Abstract: A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A piezoelectric element is formed on the bottom electrode. A second dielectric film surrounds the piezoelectric element. A conformal insulating film is formed on the sidewall of the opening. A conformal conductive film is formed in contact with the bottom electrode and on the sidewall of the opening, wherein an open cavity is maintained in the opening. A top electrode is formed in contact with the piezoelectric element.

Abstract: A laminated-type piezoelectric element 1 is provided, which comprises a first external electrode layer 33, which is located at a side area of the laminated-type piezoelectric element 1, is electrically continuous to internal electrode layers 21, and comprises plural expansible and contractible opening portions 33a in a stacking direction of the laminated-type piezoelectric element 1. As the first external electrode layer 33 is connected to the laminated-type piezoelectric element 1 with an electrically conductive adhesive member 32 and the electrically conductive adhesive member 32 is narrower than the first external electrode layer 33, the electrically conductive adhesive member 32 penetrates into the opening portions 33a of the first external electrode layer 33 to form connections in a shape of an anchor. Therefore, the first external electrode layer 33 is firmly connected to the laminated-type piezoelectric element 1.

Abstract: The multi-layer piezoelectric element comprises a stack having an active portion constituted from at least one piezoelectric layer and a plurality of internal electrodes consisting of first and second internal electrodes placed one on another, the active portion being subjected to expansion and contraction in response to a voltage applied across the first internal electrode and the second internal electrode, and external electrodes formed on two side faces of the stack with one thereof being connected to the first internal electrode and the other connected to the second internal electrode, wherein each of the external electrodes is constituted from three or more layers including a first layer formed in contact with the side face of the stack and a second layer formed on the first layer, to provide a multi-layer piezoelectric element having high durability.

Abstract: A multilayer piezoelectric element has a pair of outer electrodes and a multilayer ceramic body composed of piezoelectric layers and inner electrode layers which are alternately stacked. The outer electrodes are formed on a pair of electrode connecting surfaces in the outer circumference surfaces of the multilayer ceramic body. Each outer electrode electrically connected to the inner electrode layers through connecting material is composed of a fixed part, a free part having plural expandable-openings, and a rigid part. The fixed part is electrically contacted with the connection material. A sectional area of the rigid part is rather than that of each of the fixed part and the free part in a width direction of the outer electrode. Each outer electrode has at least one part where the fixed part, the free part and the rigid part are arranged in order in the width direction.

Abstract: A multilayer piezoelectric device including a body having internal electrode layers and piezoelectric ceramic layers alternately stacked. The internal electrode layers contain Cu as a major component, the piezoelectric ceramic layers contain a compound oxide represented by Pb(Ti, Zr)O3 as a major component, and a metal oxide (Nb2O5, Sb2O5, Ta2O5, or WO3) containing Nb, Sb, Ta, or W, which is at least one of a pentavalent metal element and a hexavalent metal element, is incorporated in the piezoelectric ceramic layers such that the concentration of the metal oxide decreases with distance from the internal electrode layers. Thereby, even in a case where internal electrodes contain Cu as a major component, it is possible to provide a multilayer piezoelectric device which can be obtained by low-temperature firing while ensuring a sufficient piezoelectric constant.

Abstract: The invention is a method for producing a piezo actuator starting with the assembly of a plurality of actuator layers made of a ceramic material and a plurality of metallic layer electrodes disposed between the actuator layers to form a green member. The metallic layer electrodes are alternately electrically connected a respective terminal electrode via which a voltage can be applied to the layer electrodes. The terminal electrode extends within the piezo actuator through respective longitudinal bores. The piezo actuator has an end face and an opposing base. According to the inventive production method, the terminal electrode protrudes from the end face of the green member. The green member is heated until the sintering process has been completed, during which the end of the terminal electrode that protrudes from the end face is supported such that the green member is not deformed during the sintering process.

Abstract: A piezoelectric device includes a substrate; and a laminated film formed above the substrate. The laminated film includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order, and the lower electrode layer is a metal electrode layer containing as one or more main components one or more nonnoble metals and/or one or more nonnoble alloys. Preferably, the one or more main components are one or more of the metals Cr, W, Ti, Al, Fe, Mo, In, Sn, Ni, Cu, Co, and Ta, and alloys of the metals.

Abstract: A surface acoustic wave device includes at least one interdigital transducer having electrodes of a double-layered structure in which an upper film and an underlying film are laminated. The upper film has a main component of Al and a first metal of Ti added to the main component. The underlying film has a main component of Ti.

Abstract: A piezoelectric resonator element includes: a base in a predetermined length, the base being made of a piezoelectric material; a plurality of resonating arms extending from a first end of the base; a joining part connected to a second end apart from the first end of the base by a predetermined distance; a connecting part connected to the joining part and extending in a width direction of the piezoelectric resonator element; a supporting arm connected to the connecting part and extending in a same direction as the resonating arm at an outer side of the plurality of resonating arms. A ratio L3/h is 40% or less where h is a length dimension from the first end of the base to the second end opposite to the resonating arms of the piezoelectric resonator element, and L3 is a width dimension of the connecting part connecting the supporting arm to the base through the joining part.

Abstract: In a manufacturing method for a SAW apparatus a first insulating layer is formed on the entire surface of a piezoelectric LiTaO3 substrate. By using a resist pattern used for forming an IDT electrode, the first insulating layer in which the IDT electrode is to be formed is removed. An electrode film made of a metal having a density higher than Al or an alloy primarily including such a metal is disposed in the area in which the first insulating layer is removed so as to form the IDT electrode. The resist pattern remaining on the first insulating layer is removed. A second insulating layer is formed to cover the first insulating layer and the IDT electrode.

Abstract: A thickness shear mode (TSM) resonator is described, comprising a diamond layer. The diamond layer is preferably a high quality diamond layer with at least 90% sp3 bonding or diamond bonding. A method for manufacturing such a resonator is also described. The thickness shear mode resonator according to embodiments described herein may advantageously be used in biosensor application and in electrochemistry applications.

Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body is provided with a metal oxide layer formed of a material with a melting point higher than a sintering temperature of the piezoelectric bodies. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion.

Abstract: A multilayer piezoelectric element is provided with a multilayer body, a first external electrode on a side face of the multilayer body, and a second external electrode outside the first external electrode. The multilayer body consists of an alternate stack of a plurality of piezoelectric members and a plurality of internal electrodes. The first external electrode is electrically connected to predetermined internal electrodes. The second external electrode extends in a wave pattern along a stack direction of the multilayer body and is of flat plate shape. The first external electrode and the second external electrode are electrically and physically connected through a plurality of connections.

Abstract: A piezoelectric ceramic composition includes a top-layer, a bottom-layer and at least one intermediate-layer ceramic sheets stacked to each other for sintering. An alloy layer of silver and palladium is interposed between every two ceramic sheets, and a sliver layer is coated on each exposed surface of the top-layer and the bottom-layer ceramic sheets, so as to form a positive and a negative electrode circuit therein. The piezoelectric ceramic composition with the silver layer is attached to at least one surface of a metal plate to make a piezoelectric element which is used to make a piezoelectric actuator, loudspeaker or buzzer.

Abstract: The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.

Abstract: A multilayer piezoelectric element has a laminate body in which a plurality of piezoelectric bodies and a plurality of internal electrodes are alternately laminated and sintered. The plurality of internal electrodes comprise a first electrode and a second electrode. The laminate body has an active portion in which the first electrode and the second electrode are arranged to overlap in a laminate direction of the laminate body, and inactive portions in which the first electrode and the second electrode are arranged not to overlap in the laminate direction of the laminate body. The inactive portions are provided on both sides of the active portion. The inactive portions are provided with a metal oxide layer made of a material having a melting point higher than a sintering temperature of the piezoelectric bodies and being soluble in the piezoelectric bodies.

Abstract: A surface mount type piezoelectric vibrator comprises a piezoelectric vibrator piece having an electrode, an airtight container made of glass or a ceramic material for encapsulating the piezoelectric vibrator piece, and an external terminal formed on an exterior surface of the airtight container and connected to the electrode of the piezoelectric vibrator piece. The external terminal comprises a metal alloy of Ni and Cr. A film of Au is formed on a surface of the metal alloy of Ni and Cr.

Abstract: A surface acoustic wave element includes a thin film electrode composed of monocrystal aluminum disposed on a piezoelectric substrate. At least one metal of Cu, Ta, W, and Ti is segregated in the thin film electrode composed of monocrystal aluminum. In this surface acoustic wave element, segregation of Cu or the like occurs in the thin film electrode. Such segregation is effective to reduce the occurrence of cracks on the piezoelectric substrate during ultrasonic wave connection for flip chip mounting. That is, because the occurrence of cracks on the piezoelectric substrate is reduced, tolerance against the ultrasonic vibration is advantageously improved in the surface acoustic wave element.

Abstract: For a component operating with acoustic waves, it is proposed to arrange the electrode structure over a mechanically stable adaptation layer that serves to dissipate the electromechanical stresses. Further improvements of the output compatibility are achieved with additional intermediate layers and passivation layers applied on the sides or the entire surface over the electrode structure.

Abstract: A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.

Abstract: Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.

Abstract: Multiple layer elements for a transducer array are provided. Each element comprises two or more layers of transducer material. Various of the elements include one or more of: (1) multiple-layer, multiple-dimensional arrays where the layers are polymericly bonded together and electrically connected through asperity contact, (2) multiple layer array of elements where air or gas separates at least two elements, (3) an even number of layers where each layer is electrically connected through asperity contact, (4) multiple-layers where each layer comprises transducer material and electrodes in a substantially same configuration, and (5) electrically isolating electrodes on layers by kerfing or cutting after bonding the layers together.