Abstract: An apparatus for supporting a load includes pneumatic units and couplers coupled to opposite sides of the load. The couplers move the load parallel to a first axis responsive to actuation of the pneumatic units. At least one of the couplers rotate the load about a second axis orthogonal to the first axis. The load is compliant along the first axis and about the second axis At least one of the pneumatic units provides compliance along the first axis and about the second axis.

Abstract: One embodiment is a probe head for contacting microelectronic devices substantially lying in a test plane, the probe head including: (a) one or more substrate tiles having one or more probe tips disposed on a top surface thereof; and (b) a registration-alignment apparatus that holds the one or more substrate tiles: (i) in position so that the one or more probe tips are held in the test plane, and (ii) aligned so that the one or more probe tips are substantially coplanar to the test plane, which registration-alignment apparatus includes: (i) one or more capture elements affixed, directly or indirectly, to a frame; (ii) three or more posts mechanically supporting each of the one or more substrate tiles; and (iii) alignment actuators affixed, directly or indirectly, to the frame and the posts, which alignment actuators may be actuated to enable the posts to move in response to forces applied thereto from the one or more substrate tiles, and may be actuated to prevent the posts from moving.

Abstract: Wafer cassette systems and methods of using wafer cassette systems. A wafer cassette system can include a base and a probe card assembly. The base and the probe card assembly can each include complementary interlocking alignment elements. The alignment elements can constrain relative movement of the base and probe card assembly in directions parallel to a wafer receiving surface of the base, while permitting relative movement in a direction perpendicular to the receiving surface.

Abstract: Devices under test (DUTs) can be tested in a test system that includes an aligner and test cells. A DUT can be moved into and clamped in an aligned position on a carrier in the aligner. In the align position, electrically conductive terminals of the DUT can be in a predetermined position with respect to carrier alignment features of the carrier. The DUT/carrier combination can then be moved from the aligner into one of the test cells, where alignment features of the carrier are mechanically coupled with alignment features of a contactor in the test cell. The mechanical coupling automatically aligns terminals of the DUT with probes of the contactor. The probes thus contact and make electrical connections with the terminals of the DUT. The DUT is then tested. The aligner and each of the test cells can be separate and independent devices so that a DUT can be aligned in the aligner while other DUTs, having previously been aligned to a carrier in the aligner, are tested in a test cell.

Abstract: A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.

Abstract: The present invention relates to a location-adjusting inspecting apparatus and method for a solar battery panel inspecting system. The inspecting apparatus includes an image-fetching device and a set of rotatable probe devices. A transport platen of the inspecting system transports a solar battery panel to an inspecting region. The image-fetching device fetches an image of electrode lines on the battery panel, and calculates an offset data by comparing the fetched image with a correct data representing the position and angle of electrode lines. Finally, the probe devices are controlled to generate a corrective rotation based on the calculated offset data. In this way, when pressing the solar battery panel, the probes of the probe devices can be aligned with and contact the electrode lines of the solar battery panel correctly, thereby increasing the accuracy in the inspection of the solar battery panel.

Abstract: A prober for testing devices in a repeat structure on a substrate is provided with a probe holder plate, probe holders mounted on the plate, and a test probe associated with each holder. Each test probe is displaceable via a manipulator connected to a probe holder, and a substrate carrier fixedly supports the substrate. Testing of devices, which are situated in a repeat structure on a substrate, in sequence without a substrate movement and avoiding individual manipulation of the test probes in relation to the contact islands on the devices, is achieved in that the probe holders are fastened on a shared probe holder plate and the probe holder plate is moved in relation to the test substrate.

Abstract: A compensation tool and process is provided for calibrating each test position located at a plurality of test modules of an electronic testing machine to a standardized value. Each test module is located on an angularly spaced radial line extending from an associated central axis and has a plurality of contacts for testing electronic components. The compensation tool can include a body having an axis of rotation coaxially alignable with the central axis for rotation to different angular positions and a component-support member operably associated with the body for indexing movement to selectively align a pocket with different contacts associated with each test position located at each of the plurality of test modules. The pocket of the component-support member receives an electronic component with terminated ends extending outwardly to allow electrical contact and testing of each test position located at each the plurality of test modules.

Abstract: A device for measuring or inspecting substrates of the semiconductor industry, including a base frame and a module detachably mounted thereon via a module frame, wherein the module frame is detachably connected to the base frame via at least two self-aligning coupling elements and at least one alignment element, wherein the base frame and the module frame are in exactly defined spatial alignment with each other, when the module frame is detachably connected to the base frame.

Abstract: A method and apparatus is provided to facilitate testing of integrated circuits using an interposer to be utilized in conjunction with an automated test equipment (ATE) system that includes a device handler and a device tester. The interposer may be utilized to convert overall device under test (DUT) board pitches to accommodate various device handler pitch orientations, or conversely, the interposer may be utilized in conjunction with a single DUT board to convert the footprint of the DUT board to accommodate multiple device package footprints. The interposer may also be used to convert a DUT board exhibiting a first single/multi-site orientation to a converted DUT board that exhibits a second single/multi-site orientation. The interposer may be composed of an elastomeric material having multiple conductive columns distributed throughout the elastomeric material or may be composed of a more rigid material such as a Pogo® pin array or printed circuit board.

Abstract: An apparatus for adjusting a differential probe includes a regulator arranged therein capable of adjusting a distance between two tips of the probe. The probe is supported on the apparatus. The apparatus includes a rotatable shaft and a rotatable disk. The rotatable shaft engages with the regulator of the probe. The rotatable disk is mounted surrounding the rotatable shaft and rotatable together with the rotatable shaft. An angular ruler or a radian ruler is described on an outer surface of the rotatable disk to indicate a rotation angle or a rotation radian of the rotatable shaft, therefore the distance between the two tips of the probe are accurately adjusted.

Abstract: A measuring system for testing and measuring a wireless communication apparatus includes a plurality of first probes, a plurality of second probes, and a control module. The first probes are arranged to face toward a first side of the wireless communication apparatus for testing and measuring a plurality of first test points provided on the first side of the wireless communication apparatus. The second probes are arranged to face toward an opposite second side of the wireless communication apparatus for testing and measuring a plurality of second test points provided on the second side of the wireless communication apparatus. The first and second probes detect wireless signals of the wireless communication apparatus via the first and second test points, respectively. The control module is electrically connected to the first probes and the second probes for receiving a plurality of measuring signals transmitted from the first and the second probes.

Abstract: A system and method of probing work pieces is described. A first and second arm each having a pivot point and a guide end are pivotally coupled together at the respective pivot points. A probe tip holder is coupled to at least one of the first arm or the second arm. A guide means guides movement of the guide ends of the pivotally coupled arms, such that movement of the guide end of the first arm and the second arm move the probe tip holder in a plane parallel to the work piece surface.