Abstract: An optical sensor for measuring at least one of a range, a position, and a profile of an object that is to be measured, the measured object emitting electromagnetic radiation due to the temperature of the object to be measured, and the sensor having a light source for illuminating the surface of the measured object and a detector for detecting the illuminating light reflected at the object to be measured, wherein with respect to the measurability even on the bodies that emit electromagnetic radiation, the light generated by the light source has a wavelength below the peak of the Planck radiation spectrum of the object that is to be measured. A corresponding method is specified.

Abstract: An oven wall three-dimensional profile data (701) representing concave and convex amounts on all over oven walls (14R, 14L) at a right side and left side of a coking chamber (11) is generated by using image signals obtained by a wall surface observation apparatus (200). A resistance index “k” in which a resistance received by pushed coke (15) resulting from a rising gradient existing on the oven wall (14) is indexed is asked by using the oven wall three-dimensional profile data (701). It can be verified that there is a correlation between this resistance index “k” and a pushing load. Accordingly, it is possible to quantitatively evaluate a state of the oven wall (14) affecting on the pushing load.

Abstract: A testing and analysis system for a pressure-sensitive device (42) that includes a testing stage (10) comprising a platform having a groove situated on an upper surface, an endless support gasket located in the endless groove, a pressure port located on the upper surface and interior to the endless groove, and a means for securing a substrate above the upper surface. The substrate (40) supports a pressure-sensitive device (42) to form a pressure chamber between the substrate (40) and the upper surface. A pressure source (32) is operatively connected to the pressure port to modify a pressure inside the pressure chamber and deflect the pressure-sensitive device (42). A surface profile measurement apparatus (104) is included for measuring a surface profile of the deflected pressure-sensitive device (42).

Abstract: A method of obtaining information indicative of the topography of a surface of a flexible substrate, the method including directing a beam of radiation at the surface of the flexible substrate; and detecting changes in intensity distribution, or angle of reflection, of the beam of radiation after the beam of radiation has been reflected from the surface of the substrate to obtain information indicative of the topography of the surface of the flexible substrate.

Abstract: A motion control apparatus for measuring and scanning an object. The motion control apparatus includes a base. The motion control apparatus also includes an object support assembly that is coupled to the base. The object support assembly receives the object to be scanned and measured. The motion control apparatus includes a scanner track that extends above from the base. The scanner and object are moveable about multiple axes to position to the scanner with respect to the object for viewing the object by the scanner for obtaining measurements of the object.

Abstract: A device and method can optically detect a defect of a round wire rod to be tested, and particularly, remotely detect the defect without contact in real-time. The device includes a lighting device for emitting circular surface light to the round wire rod; an optical sensor for generating an optical signal by receiving the light reflected from the round wire rod, which is being transported, and converting the optical signal into an image signal; and a signal-processing unit for acquiring surface information of the round wire rod by receiving the image signal from the optical sensor.

Abstract: The present invention releases a method of producing a metal separator for a solid polymer fuel cell by stainless steel, titanium, or titanium alloy during which securing lower cost and mass producibility by using a material having a high workability to form a complicated shape by a high productivity, then using an inexpensive blast process to drive a conductive substance into the surface of the metal separator member, that is, provides a stainless steel, titanium, or titanium alloy solid polymer fuel cell separator comprised of stainless steel, titanium, or titanium alloy in the surface of which a low ion release conductive substance is buried, having an arithmetic mean roughness (Ra) of the separator surface of 0.5 to 5.0 ?m, having a 10-point mean roughness (Rz) of 3 to 20 ?m, having an average spacing of surface relief shapes (Sm) of 300 ?m or less, having values of a warp rate and twist rate of a separator of 0.

Abstract: A system for structural analysis of an object, including a device for generating an input light beam arranged so as to cause the input beam generated to interact with at least one portion of the object, and a device for receiving the output light beam resulting from the interaction between the input beam and the object. In this system, the receiving device include a wavefront analyzer arranged so as to measure the electromagnetic field of the wave of the output beam received, and the generating device has a spatial coherence adapted to that of the receiving device. A structural analysis method implementing such a system is presented.

Abstract: An optical apparatus and method for simultaneously scanning the profile of at least two adjacent surfaces of an article such as a wooden board moving along a travel path axis passing through an inspection area located at a central plane transverse to the travel path axis, involve first and second scanning zones sufficiently spaced one with another along the travel path axis to substantially prevent mutual scanning interference between the profile sensors used, while providing a compact arrangement of profile sensors. For so doing, one the first sensing field and the first laser beam of the first profile sensor is crossing the central plane toward the other one of the first sensing field and the first laser beam, and one the second sensing field and the second laser beam of the second profile sensor is crossing the central plane toward the other one of the second sensing field and the second laser beam.

Abstract: Disclosed is a shape measurement device which scans a surface of a work by a probe in a noncontact manner and measures a surface shape of the work. The probe includes: a light irradiation unit which irradiates linear light onto the work; and an imaging unit which images reflected light of the light irradiated from the light irradiation unit, the reflected light being reflected by the work. The imaging unit includes: an imaging element which images an image of the work; an image-forming lens which forms the image of the reflected light being reflected by the work on an imaging plane of the imaging element; and a lens exchange unit which makes the image-forming lens exchangeable.

Abstract: At least one geometric characteristic for each of a number of pieces of lumber is determined. Each of the pieces of lumber may then be logically associated with at least one of a log or a cant from which the piece of lumber was sawn.

Abstract: An exemplary system and method for analyzing rolling stock wheels helps allow a wheel to be analyzed at speed, reducing any need for manual inspections or other related delays. An exemplary system may include one or more strobe lights and one or more high-speed cameras to capture images of the rolling stock wheel(s) at speed. The images may include one or more markers to assist in analyzing various parameters of the rolling stock wheel. The exemplary system may include one or more backface illumination plates to assist in illuminating the rolling stock wheel(s) and/or the one or more marker(s).

Abstract: An instrument and method for measuring the time history of recession of an ablating surface of a test article during testing in a high enthalpy thermal test facility, such as an arcjet. The method advances prior art by providing time-history data over the full ablating surface without targets and without any modifications to the test article. The method is non-intrusive, simple to implement, requires no external light source, and does not interfere with normal operations of the arcjet facility.

Abstract: Provided is a method for determining profile parameters of a sample structure on a workpiece using an optical metrology system optimized to achieve one or more accuracy targets, the optical metrology system including an optical metrology tool, an optical metrology tool model, a profile model of the sample structure, and a parameter extraction algorithm, the method comprising: setting one or more accuracy targets for profile parameter determination for the sample structure; selecting a number of rays and beam propagation parameters to be used to model the optical metrology tool, measuring a diffraction signal off the sample structure using the optical metrology tool, generating a metrology output signal, determining an adjusted metrology output signal using the metrology output signal and calibration data, concurrently optimizing the optical metrology tool model and the profile model using the adjusted metrology output signal and the parameter extraction algorithm.

Abstract: A method and configuration to estimate the dimensions of a cuboid. The configuration includes two image acquisition units offset from each other with at least one of the units positioned at a defined acquisition height above a background surface. Image processing techniques are used to extract a perimeter of a top surface of the cuboid, placed on the background surface, from pairs of acquired images. A height estimation technique is used to calculate an absolute height of the cuboid. The absolute height of the cuboid is used, along with the extracted perimeter of the top surface of the cuboid, to calculate an absolute length and an absolute width of the cuboid. The height, length, and width may be used to calculate an estimated volume of the cuboid.

Abstract: The present invention aims to provide an intra-oral measurement device and an intra-oral measurement system capable of measuring an inside of an oral cavity at high accuracy without increasing a size of the device, and includes a light projecting unit for irradiating a measuring object including at least a tooth within an oral cavity with light, a lens system unit for collecting light reflected by the measuring object, a focal position varying mechanism for changing a focal position of the light collected by the lens system unit, and an imaging unit for imaging light passed through the lens system unit.

Abstract: There is provided a nondestructive analysis for a periodic structure. In the method, a virtual periodic structure is set and divided into a plurality of layers. By utilizing the Lippmann-Schwinger equation with an M-th order interpolation, physical properties related to reflectivity or transmittance of the virtual periodic structure are calculated. An M-th order interpolation formula employed in discretization of the Lippmann-Schwinger equation leads to an accurate and rapid calculation of the physical properties of the periodic structure.

Abstract: One aspect of the present disclosure provides a probing apparatus with on-probe device-mapping function. A probing apparatus according to this aspect of the present disclosure comprises a housing, at least one probe stage positioned on the housing and configured to retain at least one probe, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, and an inspection module having a predetermined field of view configured to capture an image showing at least the semiconductor device, wherein the probe stage includes a driving unit configured to move the probe out of focus of the inspection module in a mapping phase while keeping the device under test in the field of view of the optical inspection module.

Abstract: A method of determining a structure parameter of a target. Illuminating a first region of the target with a first beam and measuring a diffraction pattern. Shifting the position between the target and the projection system to offset a second region to be illuminated from the first region. Illuminating the second region and measuring a diffraction pattern. Retrieving phase information from the measured first and second diffraction patterns. Modeling the target using an estimated structure parameter to calculate a modeled diffraction pattern and modeled phase information. Determining the structure parameter of the target by comparing the measured diffraction patterns and the retrieved phase to the calculated modeled diffraction intensity pattern and the modeled phase information.

Abstract: An apparatus for observing the appearance of a surface of a sample of semitransparent material, the apparatus comprising a light source for illuminating at least a region of interest of the surface of the sample from a predetermined direction and means for observing a response to the illumination of the region of interest, wherein the illuminated region comprises the region of interest and a region surrounding the region of interest. In this way the influence of emitted scattered light on the accuracy of the observation of the appearance of the sample is minimized.

Abstract: Laser scanning microscope and method for the operation thereof having at least two detection channels which has at least one beamsplitter with a splitting of the sample light deviating from the 50:50 split and/or, with 50:50 split in the detection channels, has detectors with differently adjusted gain, or in at least one detection channel with equal light splitting has an additional light attenuator.

Abstract: This invention relates to a pattern shape inspection method and an apparatus thereof for conducting a first step of irradiating wideband illuminating light which contains far ultraviolet light to a sample from a perpendicular direction, inspecting a shape of the pattern based on a spectral waveform of reflecting light detected from the sample, and detecting an edge roughness of the pattern based on the spectral waveform of the reflecting light detected from the sample, and a second step of irradiating a laser beam to the sample from an oblique direction, and detecting the edge roughness of the pattern based on scattered light detected from the sample.

Abstract: A device and method for three-dimensional (3-D) imaging using a defocusing technique is disclosed. The device comprises a lens having a substantially oblong aperture, a sensor operable for capturing light transmitted from an object through the lens and the substantially oblong aperture, and a processor communicatively connected with the sensor for processing the sensor information and producing a 3-D image of the object. The aperture may have an asymmetrical shape for distinguishing objects in front of versus in back of the focal plane. The aperture may also be rotatable, where the orientation of the observed pattern relative to the oblong aperture is varied with time thereby removing the ambiguity generated by image overlap. The disclosed device further comprises a light projection system configured to project a predetermined pattern onto a surface of the desired object thereby allowing for mapping of unmarked surfaces in three dimensions.

Abstract: Systems and methods for selecting a mask system for a patient are provided. Certain example embodiments include generating 3D contours of patients and selecting mask systems based at least on these contours. These contours may be generated by using, for example, a cushion of translatable pins, a nasal cannular scanning device, and/or a shadow stereopsis sensor. Certain other example embodiments allow images and/or videos to be captured and optionally synchronized. Then, images of various mask systems may be overlaid to determine how well a mask system fits. In still other embodiments, a user can hold a transparency corresponding to a mask design in front of the patient's face to determine how well a mask system fits.

Abstract: A method for determining the positions of structures (3) on a mask (2) is disclosed. The method is implemented in a metrology tool (1) comprising a measurement table (20) which is movable in X-coordinate direction and Y-coordinate direction. A first intensity profile (IX) is recorded along a first measurement direction (MRX), which is parallel to the X-coordinate direction. A second intensity profile (IY) is recorded along a second measurement direction (MRY), which is parallel to the Y-coordinate direction. A two-dimensional position of a centre of gravity (S) with respect to the coordinate system of the metrology tool (1) is determined from the first intensity profile (IX) and the second intensity profile (IY).

Abstract: An object detecting device for detecting the existence and general placement of an object residing upon a surface. A preferred embodiment of the invention uses at least one laser measuring scanner operated positioned by a servo motor to allow the laser measuring scanner to generate signals related to the placement of an object on a surface. Those placement signals are then processed by a computer to make a two or three dimensional determination of the object in coordinates that show the object's location in relation to another device such as a robotic depalletizer that can then be moved into position near the object to allow removal of the object by the robotic depalletizer.

Abstract: A method for measuring the roundness profiles moved forward in longitudinal direction inside a rolling mill, using two laser scanners, respectively provided with a light-sensitive sensor and a laser. At least three shadow edges that fit against the round profile to be measured and enclose the round profile to form a polygon are generated and measured and the corresponding tangents are computed.

Abstract: A method of optically imaging an object includes the determination of a source point and a destination point within the object. Planar boundaries are selected that approximate a geometrical shape of the object, and virtual sources are found using a reflection of the original source through the boundaries. Subsequent reflections of the added sources may be used to find higher order sources. Contributions to an optical transfer function from each of the added sources are added to determine a cumulative optical transfer function until a convergence limit is reached. The resulting optical transfer function is more accurate than the original in that it takes boundary phenomena into consideration.

Abstract: A non-contact scanning system is disclosed for three dimensional non-contact scanning of a work piece for use in various applications including reverse engineering, metrology, dimensional verification and inspection The scanning system includes a scanner assembly, a gantry assembly and a fixture assembly. The gantry assembly and the fixture assembly are carried by a table or base. The scanner assembly is carried by the gantry assembly. The fixture assembly is rotatable about two (2) orthogonal axes axis under the control of a control system. The fixture assembly optionally allows the height of the fixture assembly to be adjusted relative to the plane of the table by way of rectilinear movement. The scanning system provides a spherically shaped scanning envelope which facilitates three dimensional modeling of a work piece.

Abstract: The invention relates to the devices for contactlessly measuring surface profiles and can be used for person identification in security systems. The inventive device for contactlessly controlling surface profile comprises a pulse illumination unit which is provided with a transparency and forms a transparency image on an object surface, and image recording unit and a computer. Said device also comprises a control unit which is connected to the image recording unit in the form of a TV camera with field interlacing, the pulse illumination unit and to the computer for synchronizing the illumination of the object surface by said pulse illumination unit with the TV camera field and for synchronizing the image processing by the computer with the TV interlacing.

Abstract: A method for measuring deformation of a shaft by a device includes illuminating a pattern applied on the shaft before the deformation is applied; and detecting a first reference position by detecting the radiation reflected by the pattern, after the deformation is applied illuminating the pattern and detecting a second reference position by detecting the radiation reflected by the pattern. Based on the distance between the first and the second reference positions, the shaft circumferential deformation and/or torque is determined.

Abstract: A computerized system for displaying and making measurements based upon captured oblique images. The system includes a computer system executing image display and analysis software. The software reads a plurality of captured oblique images having corresponding geo-location data and a data table storing ground plane data that approximates at least a portion of the terrain depicted within the captured oblique images. The executed software causes the computer system to receive a starting point selected by a user, receive an end point selected by the user and calculate a desired measurement between the starting and end points dependent upon the geo-location data and ground plane data. The desired measurement is selected from a group consisting of a distance measuring mode, a height measuring mode, and a relative elevation measuring mode.

Abstract: A calibrating jig comprises a reference sphere, and a reflecting plate configured to support the reference sphere from a lower side thereof and mirror-reflect light in a case that the reference sphere is illuminated from an upper side thereof.

Abstract: An optical assembly for a system for inspecting or measuring of an object is provided that is configured to move as a unit with a system, as the system is pointed at a target, and eliminates the need for a large scanning (pointing) mirror that is moveable relative to other parts of the system. The optical assembly comprises catadioptric optics configured to fold the optical path of the pointing beam and measurement beam that are being directed through the outlet of the system, to compress the size of the optical assembly.

Abstract: A method for irradiating a medium includes irradiating the medium with an electromagnetic wave which is scattered in the medium and modulated in frequency at a position in the medium; obtaining information corresponding to an interference pattern generated by interference between the modulated electromagnetic wave and a reference wave; and generating a phase conjugate wave, based on the obtained information, which irradiates the medium.

Abstract: A beam splitter splits a laser beam emitted from a laser light source into a first laser beam that travels toward an object and a second laser beam. The second laser beam is received by a second photodetector. The second photodetector is positioned such that the light quantity of the second laser beam incident on the second photodetector is equal to that of the first laser beam incident on a first photodetector. A position calculator calculates displacement of the object relative to the laser light source on the basis of the difference between an output of the first photodetector and an output of the second photodetector.

Abstract: A measuring method for topography of moving specimen and a measuring apparatus thereof is disclosed, providing a measuring module that moves along with a testing specimen to narrow relative velocity of the testing specimen and the measuring module so that the measuring module is able to have enough luminous intensity signal at the same position in time, to measure the topography or the thickness of the testing specimen.

Abstract: The present invention relates to a method and an apparatus for determining the amount of light scattered in an object in a machine vision system comprising: a light source illuminating said object with incident light having a limited extension in at least one direction; and, an imaging sensor detecting light emanating from said object, wherein said emanated light is reflected light (R) on the surface of said object and light scattered (S) in said object, said detected light is resulting in at least one intensity distribution curve on said imaging sensor having a peak where said reflected light (R) is detected on said imaging sensor. A width (w) of said at least one intensity distribution curve around said peak is measured, whereby said measured width (w) indicates the amount of light scattered (S) in said object.

Abstract: In laser welding, the welding area is depicted coaxially in relation to the laser beam (3) through the laser optics (4), wherein not only a triangulation line and a grey or color image of the solidified weld is recorded but also the process radiation of the welding process. From these three image elements, an optimum quality assessment of the welding process and of the weld can be made.

Abstract: Provided is a shape measuring method in which fitting is performed accurately between measured data of a surface to be measured which is formed based on a design shape having multiple periodical design level differences and a design shape. A level difference region and a level difference height are specified from a measured point sequence of the surface to be measured (S3). A point sequence is moved by a level difference height (S4). In other words, a process for eliminating the level difference is performed, and fitting target data without a level difference is obtained (S5). On the other hand, a reference shape without multiple design level differences is obtained from the design shape (S6 and S7). Fitting between the fitting target data and the reference shape is performed by the least square method or the like (S8).

Abstract: A computerized system having a computer system storing a database of captured oblique images having corresponding geo-location data. The computerized system also has a data table storing ground plane data that approximates at least a portion of the terrain depicted within the captured oblique images. The computer system further has computer executable logic that when executed by a processor causes the computer system to receive a selection of a geographic point from a user, search the database to find images that contain the selected point, and make the images available to the user.

Abstract: A measurement system comprising a light source unit, a projection unit and an optics unit is disclosed. The light source unit is configured to generate a plurality of modulated phase shifted light beams. The projection unit is configured to reflect the modulated phase shifted light beams onto an object surface. The optics unit is configured to capture the modulated phase shifted light beams from the object surface. The measurement system further comprises a photodetector and a processor. The photodetector is configured to receive the modulated phase shifted light beams from the optics unit to generate electrical signals. The processor is configured to retrieve position information of the object surface based on the electrical signals from the photodetector. A measurement method is also presented.

Abstract: A white light optical profilometer having a measurement head that is separated from the base unit by means of a fiber optic bundle. The measurement head contains a Michelson objective, whose reference path is folded so that the measurement head may be compact. The measurement head also contains a tilting mirror, which directs light from the surface of interest to the objective, and may be adjusted to allow the measurement head to scan complex surfaces. The base unit contains the other elements of the profilometer, such as an image detector and illuminator.

Abstract: An apparatus for measuring a three-dimensional shape of a target object by analyzing an optical pattern projected onto the target object has an optical pattern projecting device that projects the optical pattern onto a portion of a measurement surface on which the target object is placed, the optical pattern having brightness changing periodically according to a position, a first line sensor that images an optical pattern-emitted region onto which the optical pattern is projected, a second line sensor that images an optical pattern-non-emitted region onto which the optical pattern is not projected, and a processing device that calculates a phase of the optical pattern at a pixel included in an image obtained by removing background information from images taken by the first and second line sensors based on a brightness value of the pixel and a neighboring pixel in the image, and calculates height information based on the calculated phase.

Abstract: In a method for optically scanning and measuring an object by a laser scanner by a procedure in which a emission light beam modulated with a target frequency is emitted by means of a light emitter, a reception light beam reflected or otherwise scattered in some way from an object in the surroundings of the laser scanner is received, with a measuring clock, as a multiplicity of samples by means of a light receiver and in each case at least the distance from the object is determined from the phase angles of the multiplicity of samples for a plurality of measuring points by means of a control and evaluation device, for determining the distances, a phase shift caused by a distance difference of temporal adjacent samples is corrected in order to correct the distances.

Abstract: A device for analyzing the topography of a surface (2) of a substrate (1) travelling on a substantially planar course with axes X, Y and Z defining an orthonormal frame of reference of the space. The surface (2) is substantially parallel to the plane XY. A device (10) for structured lighting of the surface (2) engages with a device (20) for measuring light backscattered by the surface (2) in order to analyze topography of the surface(2) during travel of the substrate (1). The lighting device (10) projecting a light beam (F) with an angle of incidence ‘a’ onto the surface (2), to form a plurality ‘n’ of luminous streaks (S1, S2, . . . Sn) thereon. Each luminous streak (S) forms an angle ‘b’ with the axis X1. The measurement device (20) includes a linear camera located in a plane P secant to the plane XY and the plane XZ, the intersection of the plane P with the plane XY forming angles.

Abstract: A thread form measurement device for measuring a threaded object includes two grip arms adjustably spaced apart from each other by a holding gap for holding the threaded object, and a support frame disposed to be movable uprightly relative to the grip arms and carry an illuminating unit and an image capturing unit that are spaced apart from each other such that a light path of a beam emitted from the illuminating unit is in alignment with the holding gap. The contour of an image captured in the image capturing unit is formed by a non-light-exposed area projected by a profile of the threaded object. By processing of a processing unit of a controller, quantitative information of the thread form of the threaded object can be obtained.

Abstract: A reflecting member has: a first reflecting surface, which extends in a second direction that includes a first direction component; a second reflecting surface, which extends in a third direction that includes the first direction component, that is substantially symmetric to the first reflecting surface; and a third reflecting surface, which extends in a fourth direction, that is substantially orthogonal to the first direction.

Abstract: Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including: but not limited to, critical dimension and overlay misregistration; defects and thin film characteristics; critical dimension and defects; critical dimension and thin film characteristics; critical dimension, thin film characteristics and defects; macro defects and micro defects; flatness, thin film characteristics and defects; overlay misregistration and flatness; an implant characteristic and defects; and adhesion and thickness.

Abstract: A hard disk inspection apparatus comprises a disk holding device which holds a hard disk; a light source which generates a light that illuminates an inspection region portion of a hard disk that is held by the disk holding device; a light guide which has a branched shape and guides a light from the light source to a plurality of light projecting parts; and an image pickup device which takes an image by receiving reflected light from the inspection region portion; wherein an illumination light is shone onto the inspection region from plural courses by shining the illumination light that is guided by the light guide onto the inspection region front the plurality of light projecting parts.