Abstract: A measuring apparatus includes a light projecting and receiving device configured to project and receive light, and measures an object based on the projected and received light. The measuring apparatus comprises a chamber configured to enclose a first space for accommodating the object; a partition configured to separate the first space from a second space which accommodates the light projecting and receiving device, and configured to transmit the light; a first regulator configured to regulate temperature of the first space to a first temperature by flowing a gas through the first space; and a second regulator configured to regulate temperature of the second space to a second temperature different from the first temperature by flowing a gas through the second space. The partition includes a plurality of partition walls disposed with a gap.

Abstract: The invention relates to a method for predicting kinking, breaking or fracturing of flexible medical instruments 100 such as guidewires. Fiber optic methods for determining curvature are known. However, according to this invention such optic methods can be utilized for determining bending of flexible medical instrument, for example by determining when the curvature of the flexible medical instruments becomes smaller than a given curvature threshold. The flexible medical instruments may kink, break or fracture due to material fatigue. To predict failure of the instrument due to fatigue, the bending actions on the instrument may be monitored during the entire lifetime or during several uses of the instrument for determining a warning of a possible risk of instrument failure.

Abstract: The present invention provides a quality inspection method of a glass plate, which can predict the shape of the glass based on three types of design shape data C1, C2 and C3 of a glass plate in a state that it is placed on a three-point supporting type actual measurement inspection stand and an actual measurement shape data Y1 of the glass plate. The virtual errors ?C2=C2?C1, ?C3=C3?C1 and ?Y1=Y1?C1 at four supporting points of the glass plate are calculated, the correction amount R=r(C3?C1) or the correction amount R=r(C2?C1) is subtracted from Y1?C1 to calculate a value corresponding to a difference Y2?A between a shape data Y2 of the glass on a desired actual measurement inspection stand and a design data A on the desired actual measurement inspection stand, and from the value corresponding to a difference Y2?A and a quality standard, the quality of the glass plate is judged.

Abstract: The present invention is directed to a method for measuring sandability of a coating or an article. This invention is particularly directed to a method for measuring sandability of a coating or an article quantitatively by measuring weight loss of said coating or article after being sanded. This invention is also directed to a system for measuring sandability of a coating or an article using said method.

Abstract: An inner surface shape measurement device for measuring a shape of an inner surface of a test target, and includes a light source, an optical system which converts light emitted by the light source into a disc-shaped light beam to cause the light beam to be emitted toward an inner surface of the test target, a photography unit which captures an image of a state in which the light beam is projected on the inner surface of the test target, and a wiring which supplies power for driving the light source. The optical system, the light source and the photography unit are disposed in this order along a same axis line, and the wiring extends from the light source toward the photography unit.

Abstract: A method and device for detecting a precision of a dish parabolic reflecting mirror are provided. Accurate coordinate values of positions on an X-axis and a Y-axis may be obtained by adjusting and controlling a double helix lifting mechanism, a 360-degree plane rotary mechanism, a telescoping mechanism, and an extension rod, and using a photoelectric position sensor with a high precision and the extension rod being measured. Then, the curved surface of the dish paraboloid reflecting mirror being detected is obtained by fitting sampling values of the coordinate values of spatial positions of the detecting points at various, and the precision error value by comparing the curved surface of the dish paraboloid reflecting mirror being detected to the theoretical curved surface, thereby realizing detection of the precision of the curved surface of the dish paraboloid reflecting mirror.

Abstract: An inspection device and an inspection method for boiler furnace water wall tubes. The inspection device includes a scanner including columns placed upright and fixed by magnets onto the surfaces of multiple water wall tubes extending in the up-down direction on the inner wall surfaces of the boiler furnace, a support frame fixed to the columns to support a displacement sensor producing laser light to be irradiated onto the surface of a water wall tube, and a moving mechanism for moving the displacement sensor in the axial direction of the water wall tube relative to the support frame. A signal processing unit calculates the amount of reduced wall thickness of the water wall tube from a difference between the cross-sectional surface shape of the water wall tube based on a signal from the displacement sensor and a reference shape without reduction in wall thickness.

Abstract: In one aspect, an apparatus for determining an internal profile of a measured device is provided, which method in one embodiment may include: a housing having a first axis, a measuring device configured to emit a light beam along a second axis offset from the first axis; a deflection device configured to direct the emitted light beam to an inner surface of the measured device; and a driver configured to rotate the measuring device about the first axis.

Abstract: Systems, apparatuses, methods, and computer program products for inspection of objects or items in a conveyance system. Presence (or absence) of an object/item or objects/items is detected sensed and also one or more characteristics of the object/item can be determined based image detection of characteristics of one or more laser lines projected on a conveyance surface of the conveyance system.

Abstract: A method and configuration to estimate the dimensions of a cuboid. The configuration includes two image acquisition units offset from each other with at least one of the units positioned at a defined acquisition height above a background surface. Image processing techniques are used to extract a perimeter of a top surface of the cuboid, placed on the background surface, from pairs of acquired images. A height estimation technique, which corrects for spatial drift of the configuration, is used to calculate an absolute height of the cuboid. The absolute height of the cuboid is used, along with the extracted perimeter of the top surface of the cuboid, to calculate an absolute length and an absolute width of the cuboid. The height, length, and width may be used to calculate an estimated volume of the cuboid.

Abstract: Exemplary embodiments include a sphere bar probe apparatus, including a holder, a retroreflector disposed in the holder, a member having a first end and a second end, wherein the first end is attached to the holder and an end plate attached to the second end of the member.

Abstract: A wrinkle detection device (100) includes: a light projector (110) which, while moving relative to a layered body (40) formed by stacking electrodes (50) and separators (60), projects slit light onto an outermost one of the separators (60); a camera (120) which shoots a shape of the slit light on the separator (60); and a control unit (130) which calculates a gradient of the separator (60) on the basis of the shot shape of the slit light, and determines the existence of a wrinkle on the basis of the calculated gradient.

Abstract: The present invention provides a measurement apparatus for measuring a shape of an object to be measured, comprising a measuring head configured to perform measurement in a first measurement mode and perform measurement in a second measurement mode having measurement accuracy higher than that of the first measurement mode, a detection unit configured to detect an occupancy region of the object to be measured, and a control unit configured to control the measuring head, wherein in the first measurement mode, the control unit moves, based on a detection result of the detection unit, the measuring head not to touch the object to be measured, and in the second measurement mode, the control unit moves, based on a measurement result in the first measurement mode, the measuring head to satisfy an allowable condition in the second measurement mode.

Abstract: A process monitoring device 11 includes a light source unit that outputs light; a light detection unit that detects an intensity of light; a first optical path 21 that guides the light outputted from the light source unit to a wafer W and guides reflection light from the wafer W to the light detection unit; a second optical path that has a light propagation characteristic equivalent to that of the first optical path 21 and guides the light outputted from the light source unit to the light detection unit without allowing the light to pass the wafer W; and a controller 17 that corrects intensity information of the light detected by the light detection unit via the first optical path 21 based on intensity information of the light detected by the light detection unit via the second optical path, and analyzes a structure of the wafer W.

Abstract: A high-speed, 3-D method and system for optically measuring a geometric dimension of manufactured parts such as cartridge cases are provided. The method includes consecutively transferring the parts so that the parts travel along a path which extends to a vision station at which each part has a predetermined position and orientation for optical measuring. A line of radiation having a predetermined orientation is projected onto spaced apart end surfaces of the part to obtain reflected line segments of radiation from the end surfaces of the part. The reflected line segments of radiation are detected at one or more image planes to obtain electrical signals and the electrical signals are processed to determine the geometric dimension such as primer pocket depth.

Abstract: A laser radar device includes: a pulse laser that outputs transmission light to a target; an transmission optical system that makes the transmission light at a predetermined beam spread angle; a light-receiving element array that receives scattered light from the target and converts the light to an electric signal; an electric circuit array that detects a reception intensity and a reception time from the electric signal; a range/three-dimensional shape output unit that measures a range to the target or a three-dimensional shape of the target on the basis of the reception time; a determination unit that determines whether the beam spread angle is changed or not on the basis of the reception intensity and the reception time; and a control unit that changes the beam spread angle on the basis of a determination result.

Abstract: A shape-measuring method accurately performs fitting between measured data of a surface to be measured, which is formed based on a design shape having multiple periodical design-level differences, and a design shape. A level-difference region and a level-difference height are specified from a measured point sequence of the surface to be measured. A point sequence is moved by a level-difference height. In other words, a process for eliminating the level difference is performed, and fitting target data without a level difference is obtained. On the other hand, a reference shape without multiple design-level differences is obtained from the design shape. Fitting between the fitting target data and the reference shape is performed by the least square method or the like.

Abstract: The disclosure relates to a scanning device for detecting the contour of an object. The scanning device has a light source for generating a light pattern on the surface area of the object, and a camera for detecting the light pattern on the surface area of the object. The disclosure describes that the one light source includes at least one incoherent spot light source, and that between the at least one spot light source and the object, a shadow caster defines the light pattern on the surface area of the object. The disclosure also relates to a method for detecting the contour of an object.

Abstract: The invention relates to a method for measuring structures on masks (1) for photolithography, wherein firstly the mask (1) is mounted on a spatially movable platform (2). The position of the platform (2) is controlled in this case. The structure on the mask (1) is illuminated with illumination light from an illumination light source which emits coherent light. The light coming from the mask (1) is imaged onto a detection device (6) by an imaging optical unit (4) and detected. The detected signals are evaluated in an evaluation device (7) and the positions and dimensions of the structures are determined. The invention also relates to an apparatus by which these method steps, in particular, can be carried out. In this case, the accuracy of the position and dimension determination is increased by the properties of the illumination light being coordinated with the structure to be measured.

Abstract: A device and a method for measuring at least one surface section of an object that is mounted on a carrier includes at least one reference object that can be fixed relative to the carrier, and a holder that can be moved relative to the reference object in at least one first direction and on which a reference body and a distance measuring device are arranged. The reference body and the distance measuring device are mounted in a rotatable manner relative to each other. The distance measuring device is designed to determine a first distance to a first point of the surface section of the object and a second distance to a second point of the reference body wherein the second point corresponds to the first point.

Abstract: Methods of characterizing semiconductor light-emitting devices (LEDs) based on product wafer characteristics are disclosed. The methods include measuring at least one product wafer characteristic, such curvature or device layer stress. The method also includes establishing a relationship between the at least one characteristic and the emission wavelengths of the LED dies formed from the product wafer. The relationship allows for predicting the emission wavelength of LED structures formed in the device layer of similarly formed product wafers. This in turn can be used to characterize the product wafers and in particular the LED structures formed thereon, and to perform process control in high-volume LED manufacturing.

Abstract: A method and system for measuring wear in the lining of a vessel in which undirected radiation signals are transmitted by at least two transmitters at known positions to a receiver at the device for measuring wear. The distances between the transmitters and receiver are determined based on the time of flight of the radiation between the transmitters and receiver. The location of the receiver at the measuring device is determined to be at a point on an arc of points at the distance calculated based on the time of flight of the signal from each of the transmitters to the receiver. The receiver is determined to be at the intersection of the two arcs of points at the distance calculated based on the time of flight of the signal from the each of the transmitters.

Abstract: Improved convergence in the volume-integral method (VIM) of calculating electromagnetic scattering properties of a structure is achieved by numerically solving a volume integral equation for a vector field, F, rather than the electric field, E. The electric field, E, is determined from the vector field, F, after solving of the volume integral equation. The vector field, F, may be related to the electric field, E, by a change of basis, and may be continuous at material boundaries where the electric field, E, has discontinuities. Convolutions of the vector field, F, are performed using convolution operators according to the finite Laurent rule, which allows for efficient matrix-vector products using Fast Fourier Transforms. An invertible convolution-and-change-of-basis operator, C, is configured to transform the vector field, F, to the electric field, E, by performing a change of basis according to material and geometric properties of the periodic structure.

Abstract: A method of inspecting a substrate is disclosed. The method of inspecting a substrate, comprises: obtaining phase data per projecting part with regard to a substrate, by projecting pattern beam onto the substrate having a target object formed thereon through a plurality of projecting parts in sequence; obtaining height data per projecting part with regard to the substrate by using the phase data per the projecting part; setting up a projecting part with highest reliability in the a plurality of projecting parts to be a reference projecting part; modifying height data of remaining projecting part, referenced by height data of the reference projecting part; and obtaining integrated height data by using the modified height data.

Abstract: An optical module, in particular for microlithography, with an optical element unit, a support device, a deformation device and a measuring device is disclosed. The support device is supported on the optical element unit, whereas for deforming an optical surface of the optical element unit, the deformation device engages a deformation section of the optical element unit comprising the optical surface. For determining the position and/or the orientation of the optical element unit with respect to an external reference in at least one degree of freedom, the measuring device comprises at least one measuring element, wherein the measuring element is arranged on a reference section of the optical element unit.

Abstract: In one example of the inventive concepts, a motion sensor array device includes a wafer and at least two motion sensors implemented on the wafer, each of the at least two motion sensors including a plurality of motion sensor pixels to sense a motion of an object and generate motion image data. The motion sensor array device further includes at least two lenses respectively arranged on the at least two motion sensors, wherein the motion sensor array is implemented in one of a chip and a package.

Abstract: Laser scanning systems and methods are disclosed herein that can provide quick and efficient measurement of extruded ceramic logs, particularly related to log shape, during manufacture. Two two-dimensional laser scans from respective laser scanners are performed and the resulting laser scan data is combined to form a three-dimensional surface shape measurement of the ceramic log. The systems and methods disclosed herein enable a non-contact measurement of the extruded ceramic log, which reduces the risk of physically damaging the log. The measurement results can be used to adjust the extrusion process of the extruder that forms the extruded ceramic logs.

Abstract: An observing apparatus includes a lighting device for irradiating a surface of a measuring target with light having a first light source distribution, and an imaging section for imaging the surface of the measuring target. Considering a first plane passing through a measurement point, the first light source distribution is set such that: (1) a radiance L11(?) changes in a continuous or stepwise manner according to an angle ?, and (2) the radiance L11(?) is not zero in a local region of a predetermined range of ±? having a point located at a predetermined angle ?c as a center on the first plane when viewed from the measurement point, and the following equation substantially holds for arbitrary a satisfying 0<a??; L11(?c?a)+L11(?c+a)=2×L11(?c).

Abstract: The present invention relates to a verification method for tracking and tracing tablets, particularly pharmaceutical tablets. It further relates to a visible secure marking or information that is a part of such tablet (10). The invention further relates to tablets suitable for such verification method, processes for manufacturing such tablets, and methods for reading the information.

Abstract: The present invention provides an electron beam writing apparatus and an image placement error correcting method each capable of calculating a high-accuracy correction amount relative to an image placement error in consideration of a difference in required unit area of height distribution data between the shape of a back surface of an EUV mask and the shape of a surface of a pin chuck. Of back surface shape data of the EUV mask necessary to perform an image placement error correction of each pattern, the back surface shape data of a position brought into contact with each pin of the pin chuck is extracted. The image placement error is calculated only from the extracted back surface shape data.

Abstract: A method and a configuration for the depth-resolved optical detection of a specimen, in which a specimen or a part of the specimen is scanned by means of preferably linear illumination. The illumination of the specimen is periodically structured in the focus in at least one spatial direction. Light coming from the specimen is detected and images of the specimen are generated. At least one optical sectional image and/or one image with enhanced resolution is calculated through the specimen. Images are repeatedly acquired and sectional images are repeatedly blended while changing the orientation of the linear illumination relative to the specimen and/or spatial intervals between lines exposed to detection light from the illuminated specimen region are generated for the line-by-line non-descanned detection on an area detector or a camera and/or, during a scan, light is further deflected upstream of the detector through the line in the direction of the scan of the specimen.

Abstract: A three-dimensional shape measuring apparatus measures by analyzing an optical pattern projected to the measurement target, and luminance of the optical pattern. The apparatus includes a mounting stage having a reference plane of a height of the measurement target, a measurement head that projects the optical pattern, to the measurement target and reference plane, to capture images of the optical patterns, and a displacement portion displaces the measurement head in a height direction. A phase computing portion computes a phase of the optical pattern in a certain pixel included in the captured image. A height computing portion computes a height of the measurement target based on the phase, and a feed amount computing portion computes a displacement amount based on the height. The height computing portion computes the height based on the phase and corrects the height based on the displacement amount, thereby computing the height of the measurement target.

Abstract: With a device for optically scanning and measuring an environment, which is designed as a laser scanner, with a light emitter, which emits an emission light beam, with a light receiver which receives a reception light beam which is reflected from an object in the environment of the laser scanner or scattered otherwise, and with a control and evaluation unit which, for a multitude of measuring points, determines at least the distance to the object, the laser scanner has a cooling device with a space between a carrying structure and a shell which serves as a housing, said space opening to the outside by means of an air inlet and otherwise being sealed with respect to the interior of the carrying structure and to the shell.

Abstract: An apparatus for determining surface topology of a portion of a three-dimensional structure is provided, that includes a probing member, an illumination unit, a light focusing optics, a translation mechanism, a detector and a processor.

Abstract: A system is provided for determining a volume of material milled, or a surface area milled, by a construction machine having a milling drum. The volume of material milled is determined as a function of a cross-sectional area of material to be milled in front of the milling drum and a distance traveled by the construction machine while actively milling. The cross-sectional area is determined in part by direct machine observation of one or more profile characteristics of a ground surface in front of the milling drum. The surface area milled is determined as a function of the width of the area to be milled in front of the milling drum and a distance traveled by the construction machine while actively milling.

Abstract: A probe device for use in a tissue inspection system is presented. The probe device comprises a probe body and a control unit at least partially incorporated in the probe body. The probe body carries at least a tissue characterization unit operable for providing sensing data indicative of at least one tissue property at measurement locations in the tissue portion being held by the probe.

Abstract: A measurement system is provided to measure a hole of a target, including a light source generation unit, a capturing unit and a processing unit. The light source generation unit generates a light source and focuses the light source on a plurality of different height planes. The capturing unit captures a plurality of images scattered from the plurality of different height planes. The processing unit obtains boundaries of the hole on the plurality of different height planes according to the plurality of images, samples image intensities of different azimuth angles on the boundaries of the hole on each of the plurality of different height planes to generate a plurality of sampling values, and develops a sidewall image of the hole according to the plurality of sampling values, the plurality of different height planes and the different azimuth angles.

Abstract: A system and a method may be provided. The system may include an illumination module arranged to illuminate an object by short pulses of light that form at least one spot on the object; a collection module that comprises a sensor that is arranged to generate detection signals representative of three dimensional information about the object: and a mechanical stage that is arranged to introduce a movement between the object and at least one of the collection module and the illumination module.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Abstract: An apparatus and method for measuring the engagement state of two mating work pieces, such as two parts of an electrical connector, includes a 2D scanning profile laser sensor. The laser sensor is located in a measurement position relative to the work pieces being scanned. The laser generates a two axis surface profile of the joined work pieces. The measured surface profile is compared by a controller with a reference surface profile to determine complete or non-complete engagement of the work pieces.

Abstract: The specification discloses a pulsed time-of-flight laser range finding system used to obtain vehicle classification information. The sensor determines a distance range to portions of a vehicle traveling within a sensing zone of the sensor. A scanning mechanism made of a four facet cube, having reflective surfaces, is used to collimate and direct the laser toward traveling vehicles. A processing system processes the respective distance range data and angle range data for determining the three-dimensional shape of the vehicle.

Abstract: A laser profiler includes: a laser diode mounted within a substantially cylindrical housing; a conical mirror positioned upstream from the laser diode within the cylindrical housing; and a transparent shroud positioned to surround the conical mirror. A beam produced by the laser diode is directed to the conical mirror and is reflected therefrom at 360° through the transparent shroud to produce a ring of light.

Abstract: Methods, systems, and apparatus for estimating physical parameters using three dimensional representations. In one aspect, predetermined light patterns are projected onto an object and light patterns resulting from an interaction of the projected light patterns and portions of the object are detected. Three dimensional locations of multiple light elements in the detected light pattern are determined, and physical parameters of the object, for example, weight, are estimated based on the locations.

Abstract: The invention relates to a system (21) for receiving a light beam, comprising an array of light sensors (26). The system also comprises a pixelated light switch array (24), in which each switch is adapted to receive at least one portion of the light beam and direct it to the array of light sensors (26), and the pixelated light switch array (24) comprises a higher number of switches than the number of light sensors comprised in the array of light sensors (26).

Abstract: A distance measuring apparatus according to the present invention includes an image input unit configured to input a plurality of viewpoint images obtained by capturing a subject from different viewpoints, an obtaining unit configured to obtain, regarding each of a plurality of distances of interest, a piece of calibration data corresponding to each of the plurality of distances of interest from a plurality of pieces of calibration data for matching two-dimensional coordinates of the viewpoint images and three-dimensional coordinates in a real space, an image correcting unit configured to correct, for each of the distances of interest, the plurality of viewpoint images based on each of the pieces of calibration data, a parallax calculation unit configured to calculate, for each of the distances of interest, a parallax between the plurality of corrected viewpoint images, a comparing unit configured to compare the corrected viewpoint images over the plurality of distances of interest to specify a piece of optim

Abstract: An offset amount calibrating method that obtains the offset amount between a contact-type detector and an image probe for a surface profile measuring machine is provided. The method includes: setting on a stage a calibration jig that has a surface being provided with a lattice pattern with a level difference; measuring the lattice pattern of the calibration jig by the contact-type detector to obtain a first reference position of the lattice pattern; capturing the image of the lattice pattern of the calibration jig by the image probe to obtain a second reference position of the lattice pattern; and obtaining the offset amount from a difference between the first and second reference positions.

Abstract: A chromatic confocal scanning apparatus comprises a light source for producing light rays comprising a plurality of wavelengths, a first screen having an open elongated slit which allows a strip of light rays produced from the light source to pass through the slit and a cylindrical objective lens both to converge the light rays onto an object surface that is to be measured, and to image light rays reflected from the object surface. An intermediate cylindrical lens set converges a strip of light rays imaged from the cylindrical objective lens to pass through an open elongated slit comprised in a second screen, and a color sensor receives light rays which have passed through the slit of the second screen for determining a plurality of wavelengths of the said strip of light rays, to thereby construct a height profile of at least a portion of the object surface.

Abstract: A chromatic confocal scanning apparatus comprises a light source for producing light rays comprising a plurality of wavelengths, a first screen having an open elongated slit which allows a strip of light rays produced from the light source to pass through the slit and a cylindrical objective lens both to converge the light rays onto an object surface that is to be measured, and to image light rays reflected from the object surface. An intermediate cylindrical lens set converges a strip of light rays imaged from the cylindrical objective lens to pass through an open elongated slit comprised in a second screen, and a color sensor receives light rays which have passed through the slit of the second screen for determining a plurality of wavelengths of the said strip of light rays, to thereby construct a height profile of at least a portion of the object surface.

Abstract: An apparatus which estimates an inside of an object, includes: a first obtaining unit which obtains light path models and a first light intensity distribution, based on an assumption that a first object includes no second object, distribution; a second obtaining unit which obtains a second light intensity distribution which is an intensity distribution of observed light; a voting value calculating unit which calculates a voting value for each of positions on a predetermined plane, based on a result of comparison in light intensity between the first and second light intensity distributions; a voting unit which votes the voting value to voting regions on a light path model along which light reaches each position; and an estimating unit which estimates whether the second object exists in each voting region, based on a result of the voting.

Abstract: Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.