Abstract: Provided herein is an apparatus, including a photon detector array; and a processing means configured for processing photon-detector-array signals corresponding to a first set of photons scattered from surface features of an article focused in a first focal plane and a second set of photons scattered from surface features of an article focused in a second focal plane, wherein the processing means is further configured for distinguishing foreign surface features of the article from foreign native features of the article.

Abstract: There is provided a light detection system which is capable of determining in light embedded codes by detecting light in a scene which is illuminated by an illumination system (110) comprising one or more light sources (111,112,113) each providing a light contribution (I111, I112, I113) comprising an embedded code (ID#1, ID#2, ID#3) emitted as a temporal sequence of modulations in a characteristics of the light emitted. The light detection system comprises light detection means (220), which are arranged for acquiring at least one image of the scene, where the image is acquired a plurality of temporal shifted line instances. Each line of the acquired image comprises an instance of the temporal sequence of modulations of the first embedded code. The light detection system further comprises means (230) for determining embedded codes from the spatial pattern of modulations.

Abstract: A method for obtaining a refined pose for a 3D sensor for online 3D modeling of a surface geometry of an object, the pose encompassing six degrees of freedom (DOF) including three translation parameters and three orientation parameters, the method comprising: providing the 3D sensor, the 3D sensor being adapted to capture 3D point measurements of the surface of the object from a viewpoint; providing a geometry model of at least part of the surface; observing a portion of the surface of the object with the 3D sensor; measuring an initialization pose for the 3D sensor by at least one of positioning device pose measurement, predicted pose tracking and target observation; finding a best fit arrangement of the 3D point measurements in the geometry model using the initialization pose; generating the refined pose for the 3D sensor using the best fit arrangement.

Abstract: An apparatus for inspecting a turbomachine includes a plurality of horoscopes, a device to rotate the rotor of the turbomachine and a processor having reference measurements of the rotor blades and/or reference measurements between the rotor blades and the horoscopes. A boroscope is inserted in a casing aperture upstream of the blades to view the leading edge and a portion of one of the surfaces of each blade as the rotor is rotated. A boroscope is inserted in a casing aperture downstream of the blades to view the trailing edge and a portion of one of the surfaces of each blade as the rotor is rotated. The boroscopes supply the images of each of the blades to the processor. The processor analyzes the images of the blades and uses the reference measurements to determine the position and size of any defect on any of the rotor blades.

Abstract: The invention relates to a solvent-based separation method for the total material recycling of materials used in nonwoven, woven, and tufted wares into the individual material components thereof sorted by type. At least one of the materials contains a polyolefin wax. As a solvent and/or swelling agent, halogen-free, aliphatic hydrocarbons or aromatic hydrocarbons or a mixture of one or several of said solvents are used.

Abstract: Optical system for reading structurally distinct microbeads. The microbeads are encoded and provide output light signals onto a Fourier plane when illuminated by an incident light. The system includes an input light source configured to illuminate the structurally distinct microbeads thereby providing the output light signals. The output light signals are configured to be projected onto the Fourier plane in a readable manner. The system also includes a reading device that is positioned to detect the output light signals from the Fourier plane. The input light source and the reading device are configured to automatically illuminate the microbeads and detect the output light signals in a predetermined manner. The system also includes a processor configured to perform Fourier plane analysis of the output light signals to determine corresponding codes of the microbeads.

Abstract: A system for measuring a deflection has a base, a first laser directed downwardly toward an underlying surface at an acute angle, a second laser in spaced relation to the first laser and directed downwardly toward the underlying surface at an approximately vertical angle, a third laser affixed to the base in spaced relation to the second laser and directed downwardly toward the underlying surface at an acute angle in a direction toward the second laser, a camera directed toward the points of reflectance of the lasers with the underlying surface, and a processor cooperative with the camera so as to measure a distance between the points of reflectance of the first and second lasers and measuring the distance between the points of reflectance of the second and third lasers. The processor compares the measured distances so as to produce an angle of deflection of the underlying surface.

Abstract: A method of projecting a template on a workpiece provides a measurement system for determining a location of a workpiece and a laser projector for projecting a laser template. A feature on the workpiece having geometric significance is identified. A physical location of the feature in a three dimensional coordinate system is determined and compared to a theoretical location of the feature on computer model of the workpiece. A template correlated to the feature is selected. The projection of the template onto the workpiece relative to the feature is optimized by correlating alignment of the physical location of the feature with the computer model of the feature. The template is projected onto the workpiece based upon the optimized projection for directing work to be performed on the workpiece.

Abstract: A LiDAR system and method are disclosed, comprising a housing, a light source, a receiver, and a light deflection system comprising a light deflection element, rotatable and balanced about an axis, the element having at least three sides, at least two of the three sides having reflective surfaces, wherein at least a first side of the three sides is at a first angle in relation to the axis, and at least a second side of the three sides is at a second angle in relation to the axis, with the first angle being different from the second angle, such that light is deflectable from the reflective surface of the first and second sides out of the housing, whereby upon actuation of the light source and rotation of the light deflection element, the LiDAR system forms at least a first scan path and a second scan path.

Abstract: A system and method for auto-calibrating a barcode scanning tunnel to determine the orientation of one or more cameras with respect to a range finder and a conveyor belt comprises providing a scanning tunnel having a moveable surface, at least one range finder having an orientation, at least one camera having an orientation and at least one calibration object having at least one indicia disposed in a predetermined relationship to one or more features of the at least one calibration object, capturing at least one image of the at least one calibration object by the at least one camera, electronically detecting the at least one calibration object at least one indicia and the one or more object features and electronically calculating at least one component of the at least one camera orientation with respect to the moveable surface in response to information obtained from the image and the at least one calibration object at least one indicia.

Abstract: Systems and methods for conducting autonomous underwater inspections of subsea and other underwater structures using a 3D laser mounted on an underwater platform such as AUV, an ROV or a tripod. The systems and methods described herein can be used for scanning underwater structures to gain a better understanding of the underwater structures, such as for example, for the purpose of generating a 3D virtual model of the underwater structure. The 3D virtual model can be used for many purposes including, but not limited to, directing inspection, repair, and manipulation of the underwater structure, navigating around the underwater structure, and other purposes.

Abstract: Described is an apparatus, including computer program products, for adjusting the focus of an image capturing device. An apparatus for capturing a focused digital image of a scene includes a lens having an optical surface including a deformation that is asymmetric with respect to an optical axis of the lens, and an aperture component configured to adjust a position of the aperture stop of the lens on a plane that is substantially perpendicular to the optical axis of the lens. The apparatus includes an image sensor configured to capture a digital image of an optical image formed by the lens, the digital image being defocused based on the position of the aperture stop. The apparatus includes a digital image processor configured to generate a focused digital image based on the digital image captured by the image sensor.

Abstract: Apparatus and methods for performing wavefront-based and profile-based measurements of an aspheric surface are disclosed. The apparatus includes an interferometric wavefront measurement system that collects wavefront-based measurement data of the aspheric surface. The apparatus also includes a profile measurement system that performs at least one non-contact profile-based measurement of the aspheric surface to collect profile-based measurement data of the aspheric surface. The measurements are performed without removing the aspheric element from a rotatable base. The two measurements are then used to form a combined measurement of the aspheric surface.

Abstract: An apparatus comprises: extraction means for extracting an occluded region in which illumination irradiated onto the target object is occluded in an obtained two-dimensional image; projection means for projecting a line segment that constitutes a three-dimensional model onto the two-dimensional image based on approximate values of position/orientation of the target object; association means for associating a point that constitutes the projected line segment with a point that constitutes an edge in the two-dimensional image; determination means for determining whether the associated point that constitutes an edge in the two-dimensional image is present within the occluded region; and measurement means for measuring the position/orientation of the target object based on a distance on the two-dimensional image between the point that constitutes the projected line segment and the point that constitutes the edge, the points being associated as the pair, and a determination result.

Abstract: A test device and a rotation module thereof are provided. The rotation module includes a rotation body and a sleeve. The rotation body includes a shaft, a first tube element, and a second tube element. The shaft is pivoted in the housing, and has an annular protrusion. The first tube element and the second tube element are sleeved on the shaft respectively, and the second tube element is located between the first tube element and the annular protrusion. The sleeve is slidably disposed on the rotation body. When the sleeve moves between a first position and a second position back and forth, the second tube element is driven to rotate back and forth relative to the first tube element. The annular protrusion is respectively driven by second tube element and the sleeve drive the annular protrusion so that the shaft rotates relative to the first tube element.

Abstract: A wavefront aberration measuring method forms a plurality of spot images by causing light, which is transmitted through a test optical system, to be incident on a lenslet array, and measures positions of the spot images. Optical paths from the positions of the measured spot images toward a light source are calculated, parameters of the test optical system when light rays from the positions of the spot images converge at the light source are specified, and a wavefront aberration of the test optical system corresponding to the parameters of the test optical system is calculated.

Abstract: An apparatus and method for optical coherence tomography are provided. The apparatus includes a light source configured to generate a plurality of beams, a light coupler configured to split the plurality of beams into measurement beams and reference beams, transmit the measurement beams to a target object via a probe, and receive response beams from the probe, a detector configured to detect interference signals based on interference between the response beams and the reference beams, and an image processor configured to generate a first image of the target object based on any one of the interference signals and generate a second image of the target object having image characteristics different from those of the first image based on an other one of the interference signals.

Abstract: A circular shape characteristic measuring device includes a shape measuring device that obtains measured data by measuring a profile shape of a circular cross-section of an object to be measured having the circular cross-section, and a computation device that calculates a circular shape characteristic of the circular cross-section. The computation device includes: an input device configured to input one of three parameters including a cutoff value of the filtering process, a minimum number of samples, and a ratio of a radius of the circular cross-section to a radius of a gauge head; a parameter table that stores a relationship between the three parameters, and based on the input parameter, determines the other two parameters; and a sampler configured to perform sampling of the measured data based on the minimum number of samples.

Abstract: A structured illumination apparatus includes a light modulator being disposed in a light path of an exit light flux from a light source, and in which a sonic wave propagation path is arranged in a direction traversing the exit light flux; a driving unit generating a sonic standing wave in the sonic wave propagation path by giving a driving signal for vibrating a medium of the sonic wave propagation path to the light modulator; an illuminating optical system making at least three diffracted lights of the exit light flux passed through the sonic wave propagation path to be interfered with one another, and forming interference fringes of the diffracted lights on an observational object; and a controlling unit controlling a contrast of the interference fringes by modulating a phase of at least one diffracted light among the diffracted lights in a predetermined pitch.

Abstract: An inner surface shape measuring apparatus that measures an inner surface shape of a tested object by using a light-section method includes: a projection section which includes an outer peripheral section having a tubular shape and having a slit that light is capable of penetrating and that is provided in a circumferential direction, and a light source unit having a light-emitting element and arranged in the outer peripheral section, the projection section projecting a luminous flux that has a predetermined thickness from the slit onto the tested object; and an imaging section which images the inner surface of the tested object with the luminous flux projected thereon.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Abstract: A device for recording images of three-dimensional objects (10), in particular teeth, has a light source (22) and a camera (32) for recording images of the object (10), whereby in the beam path of the light source (22), at least one transparent vehicle (36, 37) is arranged with a pattern that is projected onto the object (10). The vehicle (36, 37) has sections that are offset with respect to one another in the direction of the beam path. As an alternative or in addition, at least two vehicles (36, 37) can be offset with respect to one another in the direction of the beam path.

Abstract: An apparatus for inspecting a board is shown. The board inspection apparatus includes at least one illuminating module, an imaging lens, a first beam splitter, a first camera, and a second camera. The illuminating module provides light to an inspection board and the imaging lens transmits a light reflected from the inspection board. The first beam splitter transmits a portion of the light transmitted from the imaging lens and reflects the rest of the transmitted light. The first camera image-captures by receiving the light that transmits the first beam, and the second camera image-captures by receiving the light reflected from the first beam splitter. Therefore, by using one imaging lens to inspect the inspection board, the decrease in accuracy caused by the different optical axis or magnification may be prevented.

Abstract: A method of compensating for sample misalignment in an optical measurement apparatus (40), comprises the steps of: determining an expected response from a detector (58) in said optical measurement apparatus given a particular set of parameters defining a path that light can take through the optical measurement apparatus from a source (42), via a sample (50), to the detector (58); measuring a response from the detector for the sample under test; and refining the set of parameters until the expected response and the measured response converge so as to determine the set of parameters giving rise to the measured response.

Abstract: A lithographic apparatus is disclosed. The lithographic apparatus includes a scatterometer configured to measure a property of the substrate. The scatterometer includes a radiation source configured to produce a radiated spot on a target on the substrate, where the radiated spot includes positions on the target. The scatterometer further includes a detector configured to generate measurement signals that correspond to respective ones of the positions of the radiated spot and a processor configured to output, based on the measurement signals, a single value that is representative of the property of the substrate.

Abstract: Surfaces for information security and protection of physical biometrics, such as a fingerprint, is described. Such biometric information recording surface includes a plurality of raised structures that can reproduce a biometric information when a body part containing the biometric information is applied to the biometric metric information recording surface. The reproduced biometric information can be completely removed by applying a liquid to the plurality of raised structures without need to apply an external physical contact.

Abstract: A system and method for shape sensing with optical fiber include collecting (610) shape data from a shape sensing optical fiber device. The shape data are tested (620) to determine data positions that exceed an acceptable threshold based on geometrical expectations of the shape data. The shape data corresponding to the data positions that exceed an acceptable threshold are rejected (640). Acceptable shape data are rendered (650) to provide a stable shape sensing data set.

Abstract: A measurement apparatus includes a body suit for a body that includes an appendage having a pivotable joint, the body suit comprising a sleeve to cover the appendage, wherein a first portion of the sleeve is configured to cover the pivotable joint. One or more multi-core optical fiber sensors is/are within or on the sleeve in a routing pattern that is substantially aligned with a longitudinal axis of the sleeve except within the first portion and that is at least partially transverse to the longitudinal axis within the first portion. An optical shape sensing system coupled to the one or more multi-core optical fiber sensors sends light into the one or more multi-core optical fiber sensors and determines a position of each of the multiple appendages based on reflected optical signal measurements detected from one or more multi-core optical fiber sensors.

Abstract: Of two pairs of biaxial goniometers and a uniaxial straight-ahead stage, one pair of biaxial goniometers and the uniaxial straight-ahead stage are subjected to fully-closed feedback control (follow-up control) under which output from a QPD is directly input into an axis drive motor, and the remaining pair of biaxial goniometers are subjected to semi-closed feedback control (constant-value control), encoder outputs on all the axes and QPD output are acquired simultaneously, measurement point coordinates and normal vectors derived from the encoder outputs are corrected with the QPD output, thereby eliminating influence of steady-state deviation in a goniometer control system.

Abstract: A method measures the flatness of a metal product and an associated device. The method applies to a metal product, in the form of either a strip or a plate from a metallurgical processing line. The product to be measured being, by default, free of external traction. The method contains the following steps: a) illuminating a portion of a face of the product under uniform intensity; b) capturing an image of a light line of the illuminated portion; c) relatively moving the illuminated portion and the light line in a defined direction in relation to the product; d) repeating steps a), b), c); and e) collecting the images of lines in a two-dimensional distribution of intensities and selecting a strand direction of the product in which, if at least one wave of intensities is detected, a local amplitude variation of the wave delivers a local strand flatness defect value.

Abstract: A method is disclosed of measuring a hollow object such as a pipe including temporarily attaching to that object a reference target support such as a stencil that supports a plurality of scannable reference targets. When scanning the object with a movable scanner, most conveniently a hand-held scanner, the reference targets provide a positional reference for the scanner. A reference support that is attachable to or movable along a hollow object has a display face presenting and supporting a plurality of scannable reference targets. The display face can stand up from a surface of the object or can lie against a surface of the object. The reference target support and the scanner can be movable together along a pipe as an internal inspection pig.

Abstract: To provide a probing device and a probing method for an electronic device capable of confirming whether or not an electrical inspection has been executed appropriately, with an electrode pad being made in contact with a probe with a predetermined pressure, by utilizing a change in external shapes to be formed on the electrode pad when the probe and the electrode pad are pressed onto each other.

Abstract: A display apparatus including a display panel for displaying image information and having edges, an edge-roll implementation unit at at least one edge of the display panel, the edge-roll implementation unit being configured to roll the at least one edge, a lighting unit at a surface of the at least one edge at which the edge-roll implementation unit is located, and a control unit for controlling the edge-roll implementation unit.

Abstract: The present invention aims to provide a highly reliable relief pattern detection device 1, including a slant FOP 3 having an input end surface 4 with which an object surface makes contact and an output end surface 5 substantially parallel to the input end surface 4, an irradiation light source 10 disposed on the output end surface 5 side of the slant FOP 3, for irradiating the output end surface 5 with light, and a CCD camera 11 disposed on the output end surface 5 side of the slant FOP 3, for detecting a relief pattern based on light emitted from the output end surface 5, in which optical axes Rf of optical fibers are inclined so as to create a first angle ? less than 90° in one direction from the output end surface 5 within a predetermined plane substantially perpendicular to the output end surface 5, the irradiation light source 10 irradiates the output end surface 5 with light in a direction to create a second angle ? less than 90° in the other direction from the output end surface 5 within the predetermi

Abstract: The rough bottom surface of a recessed feature partially obscured by an overlying structure is profiled interferometrically with acceptable precision using an objective with sufficiently large numerical aperture to illuminate the bottom under the obscuring structure. The light scattering produced by the roughness of the surface causes diffused light to return to the objective and yield reliable data fringes. Under such appropriate numerical-aperture and surface roughness conditions, the bottom surface of such recessed features can be profiled correctly simply by segmenting the correlograms produced by the scan and processing all fringes that correspond to the bottom surface elevation.

Abstract: A laser radar system includes: a scanner for transmitting a pulse toward a target while two-dimensionally scanning a transmitting beam, and outputting scan angle information; a lens of the receiver for receiving received light; a high aspect photo detector array for converting the received light into a received signal; a transimpedance amplifier array for amplifying the received signal; an adder circuit for adding the received signal from each element of the transimpedance amplifier array; a distance detecting circuit for measuring a light round-trip time to the target of an output signal from the adder circuit; and a signal processing unit for causing the scanner to perform a two-dimensional scanning operation in association with the scan angle information, to determine distances to multiple points on the target based on the light round-trip time and a speed of light and measure a three-dimensional shape of the target.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, a method for generating from a light source a light signal operating in a region of the light spectrum, modifying the light signal with a first polarization device having a first polarization state to generate a polarized light signal directed to a target, modifying a substantially specular reflection and a substantially diffused reflection of the polarized light signal generated from the target with a second polarization device having a second polarization state to generate mixed polarized light signals having a mixed polarization state, and adjusting the mixed polarization state to modify an observable range of subsurfaces of the target. Other embodiments are disclosed.

Abstract: A device for observation, by reflection, of the structural details of an object (2) that exhibits a behavior that is at least partially specular, located in an exposure area, which includes: at least one radiation source with an emission surface (6) possessing at least two distinct zones (26, 27) emitting streams of radiation, where at least one of the characteristics differs from one zone to the next; an optical projection system that is located in line with the radiation source in relation to the exposure zone, in the path of the radiation; an optical exposure system (18) designed to optically link the entry aperture (14) of the optical projection system and the emission surface (6); a projection surface (10) that is linked optically with the object in the exposure zone, and whose received radiation depends on the deflection on the object (2).

Abstract: In a method of determining the focus of a lithographic apparatus used in a lithographic process on a substrate, the lithographic process is used to form a structure on the substrate, the structure having at least one feature which has an asymmetry in the printed profile which varies as a function of the focus of the lithographic apparatus on the substrate. A first image of the periodic structure is formed and detected while illuminating the structure with a first beam of radiation. The first image is formed using a first part of non-zero order diffracted radiation. A second image of the periodic structure is formed and detected while illuminating the structure with a second beam of radiation. The second image is formed using a second part of the non-zero order diffracted radiation which is symmetrically opposite to the first part in a diffraction spectrum.

Abstract: An apparatus for inspecting warpage of a sheet-like member includes a conveyance device for conveying a glass substrate in a substantially horizontal attitude and a non-contact displacement meter for measuring a distance to a surface of the glass substrate. The apparatus is configured to preset an upper limit waveform and a lower limit waveform based on an ideal waveform of surface shape displacement of the glass substrate in a conveyance direction, which is determined based on a characteristic of the conveyance device; and determine whether or not an actual waveform of the surface shape displacement of the glass substrate in the conveyance direction during conveyance, which is obtained based on the distance measured by the non-contact displacement meter, falls within a range between the upper limit waveform and the lower limit waveform.

Abstract: A lasergrammetry system is disclosed, including: an aiming laser projector configured to direct a focused laser beam toward a designated point on a surface of an object thus producing a stationary laser light spot on the surface; and a sensing laser projector configured to scan, detect, and locate the laser light spot created by the aiming laser projector.

Abstract: A shape measurement method includes acquiring a plurality of partial measurement data sets of a measurement surface and inclination data corresponding to the partial measurement data sets; performing fitting of the partial measurement data sets so that differences between a reference equation and the partial measurement data sets are reduced, while the relative tilt between the partial measurement data sets is maintained less than or equal to a predetermined threshold; and obtaining the shape of the measurement surface by connecting the fitted partial measurement data sets.

Abstract: Coordinate measuring apparatus includes a probe having an optical system emitting light along a plane at a workpiece, an image capture apparatus having image capture elements arranged on an image capture plane and capturing an image of the workpiece from a position different from that of the predetermined plane, and a controller controlling the emitting optical system. The controller determines whether the image capture elements arranged in an image capture region on the image capture plane detect light incident on the workpiece due to the light from the emitting optical system, turns on the light emitted from the emitting optical system when the image capture elements arranged within the image capture region detect the incident light, and blinks the light emitted from the emitting optical system at a predetermined periodicity when the image capture elements arranged within the image capture region do not detect the incident light.

Abstract: A surface measurement module for 3-D triangulation-based image acquisition of a subject-under-inspection and under observation by at least one camera. The module having: (a) casing housing an optical system comprising a plurality of lens elements positioned between a fixed-pattern optic and a light source; (b) an output of said fixed-pattern optic comprising a multi-frequency pattern comprising a plurality of pixels representing at least a first and second superimposed sinusoid projected simultaneously, each of the sinusoids represented by the pixels having a unique temporal frequency and each of the pixels projected to satisfy I n p = A p + ? k = 1 K ? B k p ? cos ? ( 2 ? ? ? ? ? f k ? y p + 2 ? ? ? ? ? kn N ) Eq . ? ( 1.

Abstract: A method and device for detecting a precision of a dish parabolic reflecting mirror are provided. Accurate coordinate values of positions on an X-axis and a Y-axis may be obtained by adjusting and controlling a double helix lifting mechanism, a 360-degree plane rotary mechanism, a telescoping mechanism, and an extension rod, and using a photoelectric position sensor with a high precision and the extension rod being measured. Then, the curved surface of the dish paraboloid reflecting mirror being detected is obtained by fitting sampling values of the coordinate values of spatial positions of the detecting points at various, and the precision error value by comparing the curved surface of the dish paraboloid reflecting mirror being detected to the theoretical curved surface, thereby realizing detection of the precision of the curved surface of the dish paraboloid reflecting mirror.

Abstract: A device for optically scanning and measuring an environment is provided. The device includes a movable scanner having at least one first projector for producing at least one uncoded first pattern on an object in the environment. The scanner includes at least one camera for recording images of the object provided with the pattern and a controller coupled to the first projector and the camera. The device further includes at least one second projector which projects a stationary uncoded second pattern on the object while the scanner is moved. Wherein the controller has a processor configured to determine a set of three-dimensional coordinates of points on a surface of the object from a set of images acquired by the camera based at least in part on the first pattern. The controller is further configured to register the set of images relative based in part on the stationary second pattern.

Abstract: The subject of the present invention is a method and a system for measuring the geometric or optical structure of an optical component.

Abstract: On the basis of captured images at the time of projecting multiple-frequency slit-shaped light patterns having no overlapping edge positions onto an object, the edge portions of the slit-shaped light patterns are identified. When the edge portions overlap in the captured images of two or more slit-shaped light patterns, the reliability of the computed distance values of the positions corresponding to the edges is lowered.

Abstract: The present invention provides an apparatus for detecting the position and depth of a Device Under Test (DUT) having a surface and a method thereof. The apparatus comprises an electrically-controlled swing element whose swing angle is controlled by an electrically-driven actuator, a light source whose light beam is redirected to the surface by the electrically-controlled swing element to form a light point, an optical system configured to receive the projection information of the light point, a storage unit configured to store the default information of the light point projected onto a default plane (DP) and a computation unit for calculating the depth information of the DUT according to the projection information and the default information.

Abstract: The method includes: measuring a first wavefront of a reference light on a sensor by using the sensor; calculating a second wavefront of the reference light on the sensor by using a parameter of an optical system; changing an optical system parameter in calculation such that a difference between rotationally symmetric components of the first and second wavefronts becomes smaller; calculating, by using the changed parameter, a magnification distribution of rays of the reference light between on the sensor and on a sensor conjugate surface; measuring a first ray angle distribution of the reference light by using the sensor, and measuring a second ray angle distribution of a measurement light by using the light-receiving sensor. The method calculates the profile of the measurement object aspheric surface by using the profile of the reference aspheric surface, the first and second ray angle distributions and the magnification distribution.