Abstract: Disclosed is a technique for detecting a road surface property. More specifically, the technique includes a reflectivity table that stores a degree of reflectivity of a rainy road relative to a reference reflectivity and a degree of reflectivity of a snowy road relative to the reference reflectivity. A reflection measurement unit measures a reflection which is the amount of a laser beam that is emitted through a light emitting unit of a laser sensor, reflected from the road surface, and received by a light receiving unit, and a reflectivity calculation unit calculates a degree of reflectivity for the road in front of the vehicle via a ratio of the measured reflection and the reference reflectivity. A road surface property determination unit then detects the corresponding road surface property based on the reflectivity table.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Abstract: Methods, apparatus, and assemblies are provided for an adapter insert including an adapter frame including a support rail adapted to support one or more substrates in a substrate carrier, a frame extension coupled to, or integral with, the adapter frame, and a mapping feature formed on the frame extension and disposed to be detected by a sensor for determining whether an adapter insert is present or absent in a substrate carrier. Numerous additional features are disclosed.

Abstract: Scatterometry measurement systems, illumination configurations and respective methods are provided, which comprise illumination beams that have vertical projections on a target plane comprising both a parallel component and a perpendicular component, with respect to a target measurement direction. The illumination beams propagate at an angle to the plane defined by the measurement direction and a normal to the targets surface and generate diffraction images which are off-center at the imaging pupil plane. The eccentric diffraction images are spatially arranged to avoid overlaps and to correspond to measurement requirements such as spot sizes, number of required diffraction orders and so forth. The illumination beams may be implemented using illumination pupil masks, which provide a simple way to increase scatterometry measurements throughput.

Abstract: Thread parameters for a threaded object are determined. Spatial reference systems (X, Y, Z) and (X?, Y?, Z?) are respectively identified for a position sensor and the threaded object. A transformation matrix describing a quadratic form representing the threaded object in (X, Y, Z) may be determined to relate the reference systems. For example, a sensor trajectory on the threaded object may be determined, along with measurement points on the threaded object. The measurement points may be selected so the matrix, evaluated on these values, has maximum rank. Position data at measurement points in the second reference system may be transformed into the first reference system, yielding first results. After coating the threaded object, position data at the measurement points may be acquired again and transformed into the first reference system, yielding second results. Comparisons between the first and second results may provide thickness of the coating and quality verification.

Abstract: A measurement assembly (12) for measuring a feature (14A) on a surface (16) includes a metrology system (18), a mover assembly (19), a pointer (22), and a control system (24). The metrology system (18) generates a measurement beam (26), and the mover assembly (19) selectively adjusts the direction of the measurement beam (26). The pointer (22) is handheld and generates a pointer beam (34) that can be selectively directed at the surface (16) to form a pointer spot (36) on the surface (16). Further, the control system (24) controls the mover assembly (19) to move the direction of the measurement beam (26) until the measurement beam (26) is approximately directed at the pointer spot (36).

Abstract: A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided.

Abstract: The present invention provides high-resolution wavefront measurement systems and methods for real-time inspection of optical and geometrical properties of specular and transparent objects, the systems of the invention comprising at least one illumination apparatus, at least one imaging apparatus constructed and configured to image the object onto an image plane, at least one gradient element disposed at one of the aperture stops of the imaging apparatus; and a sensor placed in the image plane of the imaging apparatus, wherein the sensor is capable of differentiating between different areas of the gradient element thereby being adapted to provide real-time optical and geometrical data of the object.

Abstract: A three-dimensional scanner according to one aspect of the embodiments includes an irradiation unit, an imaging unit, a position detecting unit, and a scanning-region determining unit. The irradiation unit emits a slit-shaped light beam while changing an irradiation position with respect to a measuring object. The imaging unit sequentially captures images of the measuring object irradiated with the light beam. The position detecting unit detects a position of the light beam in an image captured by the imaging unit by scanning the image. The scanning-region determining unit determines a scanning region in an image as a scanning target by the position detecting unit based on a position of the light beam in an image captured by the imaging unit before the image as a scanning target.

Abstract: Working equipment includes a tool configured to work a structure at a working location thereon, with the structure having an applied marking at a known location with a known relationship with the working location. A computer system is configured to determine placement of the structure, and accordingly position the tool into at least partial alignment with the working location, and which in at least one instance, the tool is aligned with a second, offset location. A camera is configured to capture an image of the structure and including the marking, and further including the second location with which the tool is aligned. And the computer system is configured to process the image to locate the working location, reposition the tool from the second location and into greater alignment with the located working location, and control the repositioned tool to work the structure at the located working location.

Abstract: In one embodiment, a semiconductor target for detecting overlay error between two or more successive layers of a substrate or between two or more separately generated patterns on a single layer of a substrate is disclosed. The target comprises at least a plurality of a plurality of first grating structures having a course pitch that is resolvable by an inspection tool and a plurality of second grating structures positioned relative to the first grating structures. The second grating structures have a fine pitch that is smaller than the course pitch, and the first and second grating structures are both formed in two or more successive layers of a substrate or between two or more separately generated patterns on a single layer of a substrate. The first and second gratings have feature dimensions that all comply with a predefined design rules specification.

Abstract: A measuring device that measures a measurement object includes a two-dimensional measuring unit that outputs two-dimensional image data by performing image pickup on the measurement object, a three-dimensional measuring unit that outputs three-dimensional data by three-dimensionally measuring the measurement object; and an obtaining unit that detects a temporary edge of the measurement object using the three-dimensional data, sets an edge detection range in a two-dimensional image using the detected temporary edge, and detects an edge of the measurement object in the edge detection range using the two-dimensional image data to obtain shape information of the measurement object.

Abstract: The present invention provides systems and methods for obtaining a three-dimensional (3D) representation of one or more light sources inside a sample, such as a mammal. Mammalian tissue is a turbid medium, meaning that photons are both absorbed and scattered as they propagate through tissue. In the case where scattering is large compared with absorption, such as red to near-infrared light passing through tissue, the transport of light within the sample is described by diffusion theory. Using imaging data and computer-implemented photon diffusion models, embodiments of the present invention produce a 3D representation of the light sources inside a sample, such as a 3D location, size, and brightness of such light sources.

Abstract: The present invention provides a method for measuring an end portion shape of a threaded pipe or tube P, the method including: a thread axis detection step; a laser light positioning step; a laser light image capture step; and a shape calculation step. In the laser light positioning step, the light source 1 and the image capture device 2 are moved together so that: the optical axis LA of the light source is located so as to pass through a measurement point D (X1, Y1, Z1) on the thread axis A, the measurement point being located in the measurement target region within a plane NP including the thread axis; and the laser light L extends in a slit-like form within the plane.

Abstract: A high-speed, 3-D method and system for optically measuring a geometric dimension of manufactured parts such as cartridge cases are provided. The method includes consecutively transferring the parts so that the parts travel along a path which extends to a vision station at which each part has a predetermined position and orientation for optical measuring. A line of radiation having a predetermined orientation is projected onto spaced apart end surfaces of the part to obtain reflected line segments of radiation from the end surfaces of the part. The reflected line segments of radiation are detected at one or more image planes to obtain electrical signals and the electrical signals are processed to determine the geometric dimension such as primer pocket depth.

Abstract: An integrated optical assembly is provided, with enhancements that are particularly useful when the integrated optical assembly forms part of a laser radar system. The integrated optical assembly produces a reference beam that is related to the optical characteristics of a scanning reflector, or to changes in position or orientation of the scanning reflector relative to a source. Thus, if the scanning reflector orientation were to shift from its intended orientation (due e.g. to thermal expansion) or if characteristics of the scanning reflector (e.g. the index of refraction of the scanning reflector) were to change on account of temperature changes, the reference beam can be used to provide data that can be used to account for such changes. In addition, if the scanning reflector were to be positioned in an orientation other than the orientation desired, the reference beam can be used in identifying and correcting that positioning.

Abstract: An apparatus and a method for determining at least one parameter relating to the shape of the sausage, which is transported on a transport device, in particular between two circulating means of transport. A measuring device has at least one distance sensor, which is disposed in such a way that said sensor can detect a distance c to a sausage that is being transported. Furthermore, an evaluation device is provided, which determines at least one parameter relating to the sausage as a function of the distance.

Abstract: A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Abstract: The invention provides a shape measuring device, a shape measuring method, and a shape measuring program capable of accurately and easily positioning a measuring object at a focus of a light receiving unit when measuring the shape of the measuring object. An image of a measuring object captured by a light receiving unit is displayed on a display section, and an arbitrary position on the image of the measuring object is specified by a user. A relative distance between the light receiving unit and a stage is changed so that the specified position coincides with a focus of the light receiving unit. The light emitted from a light projecting unit is reflected by the measuring object and received by the light receiving unit. Stereoscopic shape data of the measuring object is generated by a triangular distance measuring method based on a light receiving signal output by the light receiving unit.

Abstract: Laser scanning microscope and method for the operation thereof having at least two detection channels which has at least one beamsplitter with a splitting of the sample light deviating from the 50:50 split and/or, with 50:50 split in the detection channels, has detectors with differently adjusted gain, or in at least one detection channel with equal light splitting has an additional light attenuator.

Abstract: A surface profiler comprises at least one front support wheel and at least one rear support wheel for travelling along the surface of a profile to be measured, the rotational axes of said wheels being longitudinally spaced, and the wheels contacting the surface being profiled in a collinear manner. A frame carried on the wheels carries at least one inclinometer and at least two vertical distance measuring apparatus such as lasers, and may also carry an optical encoder. The lasers are collinear with each other and with the wheels. Incremental to measurements of inclination angles provided by the inclinometer, together with incremental measurements of distance to the surface being measured provided by the lasers, produce a continuous, high resolution mathematical series of elevations representing the surface profile, including reproduction of surface features that are smaller than the distance between the wheels.

Abstract: The specification discloses a pulsed time-of-flight laser range finding system used to obtain vehicle classification information. The sensor determines a distance range to portions of a vehicle traveling within a sensing zone of the sensor. A scanning mechanism made of a four facet cube, having reflective surfaces, is used to collimate and direct the laser toward traveling vehicles. A processing system processes the respective distance range data and angle range data for determining the three-dimensional shape of the vehicle.

Abstract: An optical metrology apparatus for measuring nanoimprint structures using Vacuum Ultra-Violet (VUV) light is described. Focusing optics focus light onto the sample and collect the light reflected from the sample so as to record an optical response from nanoimprint structures on the sample, wherein the nanoimprint structures have an orientation that varies over a surface of the sample. A sample stage is configured to support the sample. At least one computer is connected to the metrology instrument and the sample stage and is configured to run a computer program which causes the sample stage to rotate the sample so as to present multiple different locations on the sample to the optical metrology instrument such that the orientation of the nanoimprint structures at the multiple different locations remains fixed with respect to a plane of the focusing optics of the metrology instrument in order to eliminate polarization effects.

Abstract: A method of determining optical properties of textured surfaces by irradiation of the surface to be investigated. At least part of the radiation irradiated onto the surface and reflected by the latter is detected by a detector device which permits a location-resolved evaluation of the radiation striking it. A first characteristic value from the radiation detected, characteristic of a texture of the surface is detected. A second characteristic value from the radiation detected, characteristic of a further optical property of the surface is detected. And, a result value is determined on the basis of the first characteristic value and the second characteristic value.

Abstract: The invention is directed to a method and an apparatus for air-borne or space-borne radiometric measurement of object points present in an object scene on the surface of an astronomical body which are assigned to rows and columns of an object matrix during a scanning progressing systematically in a first scanning direction and a second scanning direction, wherein the object matrix points are imaged on a detector in an image plane generated by optics, and the image inside the image plane is recorded by at least one radiation-sensitive detector element of the detector.

Abstract: Various metrology systems and methods for high aspect ratio and large lateral dimension structures are provided. One method includes directing light to one or more structures formed on a wafer. The light includes ultraviolet light, visible light, and infrared light. The one or more structures include at least one high aspect ratio structure or at least one large lateral dimension structure. The method also includes generating output responsive to light from the one or more structures due to the light directed to the one or more structures. In addition, the method includes determining one or more characteristics of the one or more structures using the output.

Abstract: A system for simultaneous real-time three-dimensional geometry and color texture acquisition. The system includes a system processor for generating at least three phase shifted black and white fringe patterns with a phase shift of 2 ?/3, a light projector adapted to project the fringe patterns onto an object, the projector being electrically connected with the system processor, and a color camera for capturing the fringe patterns to generate at least three raw fringe images. The fringe images are used to calculate a black and white texture image which is further converted to a color image by employing a demosaicing algorithm. The fringe images are also used to calculate a wrapped phase map that is further processed to generate a continuous unwrapped phase map by employing a phase unwrapping algorithm and the unwrapped phase map is converted to co-ordinates using calibrated system parameters for point-by-point three-dimensional shape measurement.

Abstract: A system for configuring a monitored zone of an optoelectronic monitoring device has an optical reception device for detecting an optical sequence generated by a sequence generation unit. A first memory device is used to store an association between the optical sequences selectable at the sequence generation unit and shape elements. A second memory device stores a shape of the monitored zone, and an evaluation unit determines the shape of the monitored zone from the detected optical sequences and the shape elements.

Abstract: A glass molding system and a method of making glass articles using the glass molding system are disclosed. The glass molding system includes an indexing table, a plurality of enclosures arranged along the indexing table, and a plurality of stations defined on the indexing table such that each of the stations is selectively indexable with any one of the enclosures. At least one radiant heater is arranged in at least one of the enclosures. A radiation reflector surface and a radiation emitter body are arranged in the at least one of the enclosures. The radiation emitter body is between the at least one radiant heater and the radiation reflector surface and has a first surface in opposing relation to the at least one radiant heater and a second surface in opposing relation to the radiation reflector surface.

Abstract: A surface measurement apparatus having at least one sensor and a reference point with pre-determined relative position relative to the sensor measures a distance between the sensor and a point on a surface over which the surface measurement apparatus is configured to travel. A receiver receives data related to a position of the reference point a calculated distance between the reference point and a position measurement station; and a processor calculates an absolute position of the point on the surface based on (a) the measured distance between the at least one sensor and the point, (b) the pre-determined relative position difference between the reference point and the at least one sensor, and (c) the position of the reference point or the calculated distance between the position measurement station and the reference point.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for determining a location relative to an object and a type of a light source that illuminated the object when the image was captured, are described. A method performed by a process executing on a computer system includes identifying an object of interest in a digital image. The method further includes projecting at least a portion of the digital image corresponding to the object of interest onto a three dimensional (3D) model that includes a polygon-mesh corresponding to the object's shape. The method further includes determining one or more properties of a light source that illuminated the object in the digital image at an instant that the image was captured based at least in part on a characteristic of one or more polygons in the 3D model onto which the digital image portion was projected.

Abstract: Methods and systems for multi-modal three-dimensional (3D) scanning of objects are described. An example method may include receiving, from a scanning system, 3D information associated with an object having a first resolution. A region of interest of the object may be determined by a processor based on the 3D information associated with the object. Additionally, instructions for operating the scanning system to determine additional information associated with the region of interest of the object may be determined. The additional information associated with the region of interest may have a second resolution that is higher than the first resolution. The instructions may be provided to the scanning system to determine the additional information associated with the region of interest of the object.

Abstract: A magnifying imaging optical unit has at least four mirrors to image an object field in an object plane into an image field in an image plane. An absolute value of the Petzval radius of the image field is greater than 500 mm. The imaging optical unit can be used to inspect with sufficient imaging quality relatively large mask sections of lithography masks used during projection exposure to produce large scale integrated semiconductor components.

Abstract: A component, such as a cyclonic steam separator baseplate of a steam generator, includes a surface subject to degradation during operation of the system in which the component is disposed. A profile is acquired of the surface of the component using an optical surface profilometry system concurrent with an image of the surface. A condition, such as degradation of the component is classified based on the acquired profile and image of the surface of the component. Component conditions may be monitored over time, trended, and classified as requiring maintenance, repair, or replacement.

Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce light; and an optical element configured to linearly spread the light from the light source and generate the line laser, the optical element being constructed rotatably around an optical axis of the line laser; and an imaging part configured to image the line laser reflected by the work.

Abstract: A system, method, and device for measuring camber in a film is disclosed. The system generally includes: a flat surface with a longitudinal axis, at least three sensors spaced apart along the longitudinal axis, and a computing device operatively connected to each sensor. When the film is positioned in relationship to the sensors, the computing device computes the camber of the film. The flat surface may be a table with a film holder. At least one of the sensors may be a LED sensor. The computing device may have an output means, such as a monitor, a printer, or both. The computing device defines a straight line between the first and third sensor based on the position of the film, and the camber is a deviation of the film, measured by the second sensor, from the straight line.

Abstract: A device for measuring a surface (2) comprises a light source (3), a light directing device (4-6), a detector arrangement (10) and an evaluation circuit (15). The light source (3) generates a sequence of light pulses with a repetition rate. The light directing device (4-6) is controllable to direct the sequence of light pulses onto a surface area (25) of the surface (2). The surface area may be selected from plural surface areas (25, 27). The detector arrangement is configured to receive at least one light signal (21-24) scattered and/or reflected by the surface area (25). The evaluation circuit (15) is coupled to the detector arrangement (10) and is configured to determine a phase difference between a reference signal (19) derived from the sequence of light pulses and a signal component of the at least one light signal (21-24), in order to determine a position of the surface area (25).

Abstract: A shape measurement apparatus includes a distance measurement meter configured to emit and receive the beam in relation to the object; a beam deflection mechanism configured to deflect the beam from the distance measurement meter; and a control unit configured to determine at least one of a maximum beam deflection angle due to the beam deflection mechanism and the distance between a detected surface and the beam deflection mechanism when the beam is incident perpendicularly to the detected surface of the object, so that an error of a first measurement error that depends on a change in a spot diameter of the beam on the detected surface and a second measurement error that depends on an incidence angle on the detected surface of the beam is no more than a threshold value of a permitted error.

Abstract: A measurement apparatus includes a pedestal, a supporting tray, a first movable base, a first measuring assembly, a second movable base, a second measuring assembly, a third movable base, a third measuring assembly, and a console. The supporting tray is rotationally fixed in the pedestal and can be rotated to position a workpiece at different angles to ensure that images of all portions and surfaces needing to be measured can be captured.

Abstract: An apparatus, system and method for measuring straightness of components of rotating assemblies are described. A digital mapping system for measuring the straightness of a shaft of an electric submersible pump comprises a light emitting micrometer. A method for measuring the straightness of components of rotating assemblies comprises providing a controller with acceptable deviation parameters for a component to be measured, surface mapping the component using a light emitting micrometer, electronically identifying bent locations on the component that exceed the acceptable deviation parameters, and measuring circumferentially at the bent locations with the light emitting micrometer to determine the magnitude of the bend. An apparatus for measuring a component of a rotating assembly comprises a light emitting micrometer configured to map the surface of a component and a range finder coupled to the micrometer for determining the location of the micrometer during measurement.

Abstract: The invention generally relates to apparatuses and methods for imaging inside a vessel. In certain aspects, the invention provides an apparatus that includes an imaging device configured to image an inside of a vessel, and a sensing device configured to detect a conformational shape of the apparatus.

Abstract: A height-measuring device (100) in which the focal position of an image-forming optical system (20) is moved in relative fashion in the direction of an optical axis with respect to an object (10) to be measured; scanning is performed; images of the object (10) to be measured, which are formed by the image-forming optical system (20), are obtained in order; and the focal position for individual pixels of the images is found, thereby yielding a relative height value of the object to be measured (10) at positions corresponding to the pixels; wherein a second function (g) is defined on the basis of a first function (f) fitted to a numerical value sequence comprising a coordinate value on the optical axis and a light intensity value for the pixels of a plurality of the images obtained by the scanning, or the coordinate value and a numerical value obtained by processing the light intensity value; and positions on the optical axis at which a correlation value between the numerical value sequence and the second funct

Abstract: The present invention provides for an apparatus for measuring a curvature of a surface of a wafer in a multi-wafer epitaxial reactor.

Abstract: Depth values in a scene are measured by projecting sets of patterns on the scene, wherein each set of patterns is structured with different spatial frequency using different encoding functions. Sets of images of the scene is acquired, wherein there is one image for each pattern in each set. Depth values are determining for each pixel at corresponding locations in the sets of images. The depth values of each pixel are analyzed, and the depth value is returned if the depth values at the corresponding locations are similar. Otherwise, the depth value is marked as having an error.

Abstract: Disclosed is a surface sensing apparatus, one embodiment having a source of coherent radiation capable of outputting wavelength emissions to create a first illumination state to illuminate a surface and create a first speckle pattern, an emission deviation facility capable of influencing the emission to illuminate the surface and create a second illumination state and a second speckle pattern, and a sensor capable of sensing a representation of the first and a second speckle intensity from the first and second speckle pattern. Also disclosed are methods of sensing properties of the surface, one embodiment comprising the steps of illuminating the surface having a first surface state with the source of coherent radiation emission, sensing a first speckle intensity from the surface, influencing a relationship of the surface to the emission to create a second surface state and sensing a second speckle intensity from the surface at the second surface state.

Abstract: A method for imaging an object using a microscope includes obtaining axial response data, the axial response data representative of a relationship between a separation between a top surface of the object and an objective lens of the microscope and an intensity of light reflected by the top surface of the object; positioning the object at a distance from the objective lens that is within a linear region of the axial response data; sequentially illuminating the object with a plurality of periodic patterns; obtaining a plurality of images of the object, each image resulting from the illumination of the object with a corresponding one of the plurality of periodic patterns; determining a reconstructed image of the object based on the plurality of images of the object; and, based on variations in the intensity of the reconstructed image, determining a topographic profile of the top surface of the object.

Abstract: 3D imager including at least one pixel, each pixel including a photodetector for detecting photon incidence and a time-to-digital converter system configured for referencing the photon incidence to a reference clock, and further including a reference clock generator provided for generating the reference clock, wherein the reference clock generator is configured for adjusting the frequency of the reference clock on the basis of an estimated time up to a subsequent photon incidence.

Abstract: A first thread feature is measured by detecting with an optical sensor 2 light that reaches from a light source 21 located on the opposite side of a pipe axis and runs substantially in parallel to thread grooves A4. A contact probe 31 of a contact sensor 3 is contacted with a thread flank surface A8 to detect the space coordinates of the contact probe 31 at the time of contact, so that a second thread feature is measured. The first and second thread features thus detected are combined with each other by a processor 4, and thread features of the thread provided as a measurement object are thereby calculated.

Abstract: An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.

Abstract: An inner surface shape measuring apparatus that measures an inner surface shape of a tested object by using a light-section method includes: a projection section which includes an outer peripheral section having a tubular shape and having a slit that light is capable of penetrating and that is provided in a circumferential direction, and a light source unit having a light-emitting element and arranged in the outer peripheral section, the projection section projecting a luminous flux that has a predetermined thickness from the slit onto the tested object; and an imaging section which images the inner surface of the tested object with the luminous flux projected thereon.