Light Wave Directional Modulation (e.g., Deflection Or Scanning Is Representative Of The Modulating Signal) Patents (Class 359/298)
  • Patent number: 6622053
    Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.
    Type: Grant
    Filed: May 22, 2000
    Date of Patent: September 16, 2003
    Assignee: Light and Sound Design Ltd.
    Inventors: William Hewlett, Ian Clarke, Nigel Evans, Richard Parker, Mark A. Hunt, Michael Hughes
  • Patent number: 6618187
    Abstract: A light valve of deformable grating type and a method for light modulation using the light valves is provided. The light valve of deformable grating type, includes at least three beams, one beam of the at least three beams being of a substantially fixed-position, and at least two beams of the at least three beams being deformable by electrostatic force in a substantially staircase structure, each step of the staircase creating a predefined change in the phase of an impinging light beam, a first electrode and a second electrode, the electrodes transmitting electrostatic force to at least the deformable beams of the at least three beams. The beam of a substantially fixed-position may be deformable by electrostatic force.
    Type: Grant
    Filed: July 11, 2001
    Date of Patent: September 9, 2003
    Assignee: Creo IL. Ltd.
    Inventor: Nissim Pilossof
  • Patent number: 6618189
    Abstract: A combination RF and optical beam steerer comprising an optically transparent substrate having first and second major surfaces, the first surface having disposed thereon an array of conductive elements associated with a radio frequency beam steerer and the second surface thereof having an array of elements disposed thereon associated with an optical beam steerer. The spacing of the elements in the RF beam steerer are at least ten times the wavelength of the optical energy to be steered by the device so that the RF beam steerer appears to be essentially optically transparent to the optical energy whereas as the array associated with the optical beam steerer is sufficiently closely spaced so as to function as a ground plane for the RF beam steerer.
    Type: Grant
    Filed: April 10, 2001
    Date of Patent: September 9, 2003
    Assignee: HRL Laboratories, LLC
    Inventor: Gregory L. Tangonan
  • Patent number: 6618190
    Abstract: An optical element has of a set of a plurality of three-dimensional cells. A specific amplitude and a specific phase are defined in each individual cell. Each cell has a concave part formed by hollowing a part having an area corresponding to the specific amplitude by a depth corresponding to the specific phase. The individual cell has a specific optical property so that, when incident light is provided to the cell, emission light is obtained by changing an amplitude and a phase of the incident light in accordance with the specific amplitude and the specific phase defined in the cell.
    Type: Grant
    Filed: August 17, 2001
    Date of Patent: September 9, 2003
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Mitsuru Kitamura, Tomohisa Hamano
  • Publication number: 20030164997
    Abstract: An optical matrix switch station (1) is shown mounting a plurality of optical switch units (15, 17), each of which includes a mirror (29), moveable in two axes, for purpose of switching optical beams from one optical fiber to another. A mirror assembly (41) includes a single body of silicon comprising a frame portion (43), gimbals (45), mirror portion (47), and related hinges (55). Magnets (53, 54) and air coils (89) are utilized to position the central mirror surface (29) to a selected orientation. The moveable mirror and associated magnets along with control LED's (71) are hermetically packaged in a header (81) and mounted with the air coils on mounting bracket (85) to form a micromirror assembly package (99) mounted in each optical switch unit.
    Type: Application
    Filed: November 8, 2002
    Publication date: September 4, 2003
    Inventors: John W. Orcutt, Andrew S. Dewa, Herzel Laor, David I. Forehand, James A. Sisco
  • Patent number: 6614580
    Abstract: A display apparatus projects an image onto a display screen and includes a grating light valve, a focusing arrangement and a scanning device. The grating light valve is located near but not at a focal plane of a line illumination such that in operation the grating light valve produces real or virtual two dimensional images. The grating light valve is configured such that the modular members on the surface of the grating light valve are neither parallel nor perpendicular to the effective pixel are, thereby arranged diagonally across the pixel area in order to eliminate any imperfections or defects in the line illumination. A seal glass is coupled with the grating light valve and forms an air gap between itself and the grating light valve such that the line illumination must pass through the seal glass and the air gap before reaching the grating light valve.
    Type: Grant
    Filed: April 10, 2001
    Date of Patent: September 2, 2003
    Assignee: Silicon Light Machines
    Inventor: David T. Amm
  • Patent number: 6608712
    Abstract: The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.
    Type: Grant
    Filed: May 15, 2001
    Date of Patent: August 19, 2003
    Assignee: Network Photonics, Inc.
    Inventor: M. Adrian Michalicek
  • Patent number: 6606181
    Abstract: A controllable phase plate has numerous domains that are randomized as to the orientation of their birefringence and can be used in a power limiting control to produces an electrically controllable diffraction pattern having a portion, especially the zero mode axial spot of the pattern, that is directed onto an output aperture such as a pinhole or an optical fiber end. Controlling the phase plate produces an interference peak or null (or an intermediate level) of light, coupled into the output aperture. The phase plate preferably comprises a liquid crystal with controllable birefringence. The domains have paired orthogonal orientations, which is a condition that is met in randomized domains. The paired orthogonal orientations make the device polarization insensitive. In a controllable attenuating device, collimating lenses are placed before and after the phase plate along a beam path to focus a clear interference pattern on a screen containing the output aperture.
    Type: Grant
    Filed: November 27, 2001
    Date of Patent: August 12, 2003
    Assignee: Optellios, Inc.
    Inventors: Jayantilal S. Patel, Zhizhong Zhuang
  • Patent number: 6602432
    Abstract: A high-speed operation of an electroabsorption modulator is intended. A p-InGaAs contact layer 9 is formed not only in an optical modulation region MA but also in an optical coupling region CA, and an AlInAs oxide layer 7 is disposed in p-InP cladding layers 5 and 8 in a mesa MS portion of the optical coupling region CA.
    Type: Grant
    Filed: November 28, 2001
    Date of Patent: August 5, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Takayuki Matsuyama
  • Publication number: 20030142426
    Abstract: A device (21) comprises a movable structure (44) having a first movable portion (70) hinged to a frame portion (60) by a first pair of hinges (81, 82) spaced apart along a first axis (91). The first movable portion (70) has an edge (140) that is substantially parallel with and immediately adjacent to an edge (132) of the frame portion (60), and a first tolerance fit space (120) is defined therebetween. At least two projections (122) extend from one or both of the edges (132 and/or 140). The projections (122) are adapted to limit translational motion of the first movable portion (70) relative to the frame portion (60) within the plane. The projections (122) are substantially adjacent to each other and are on a same side of the first axis (91). The device (21) may also have a second movable portion (80) and a second pivot axis (112).
    Type: Application
    Filed: January 31, 2002
    Publication date: July 31, 2003
    Inventor: Arthur monroe Turner
  • Publication number: 20030142421
    Abstract: A temperature stabilized optical mirror is disclosed. A rotatable mirror for switching optical light signals between optical fibers is mounted on a support structure. One or more PTC (Positional Temperature Coefficient) resistors are mounted to the support structure to provide heat to the combination support structure and mirror so as to maintain the mirror and support structure above a lower limit of a selected temperature range. The PTC resistor is selected to have a switching temperature substantially equal to the lower limit of the select temperature range.
    Type: Application
    Filed: January 30, 2002
    Publication date: July 31, 2003
    Inventor: John W. Orcutt
  • Patent number: 6600591
    Abstract: A method and system are provided for operating an array of such optical micromirrors. Electrodes associated with each of a plurality of optical micromirrors within the array are sequentially actuated by applying a voltage to each such electrode for a fixed time. The voltage applied to each of the electrodes is selected so that the optical micromirror with which that electrode is associated is positioned in a certain tilted position. The step of sequentially actuating electrodes is repeated to maintain the tilted positions of the plurality of optical micromirrors.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: July 29, 2003
    Assignee: Network Photonics, Inc.
    Inventors: Robert Anderson, Bevan Staple, Richard Roth
  • Patent number: 6590695
    Abstract: A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam (20) comprises a plurality of rotatable elements. Each of the rotatable elements (170) comprises a plurality of structures (300). The structures are spaced apart at sub-wavelength distances relative to the wavelength of the incident beam (20). Each of the plurality of structures (300) exhibits an interaction with the polarization state of the incident beam. An actuator is coupled to each of the rotatable elements. The actuator is capable of controllably positioning the rotatable element to any two positions, and each of the positions has a corresponding polarization state. A substrate (110) supports each plurality of rotatable elements and houses each actuator.
    Type: Grant
    Filed: February 26, 2002
    Date of Patent: July 8, 2003
    Assignee: Eastman Kodak Company
    Inventors: Andrew F. Kurtz, Sujatha Ramanujan
  • Publication number: 20030123128
    Abstract: Micromirror in a cross-connect switch for an optical communication system, and method for fabricating the same, the micromirror including a rotatable mirror rotatable in an X-axis direction for reflecting an incident light at a predetermined angle, rotatable beams around the rotatable mirror each connected to the rotatable mirror for rotating in a Y-axis direction together with the rotatable mirror, supporting posts around the rotatable beams each connected to the rotatable beam for supporting the rotatable beams, and a driving part on a bottom of the rotatable mirror for rotating the rotatable mirror and/or the rotatable beams as a voltage is provided thereto.
    Type: Application
    Filed: December 18, 2002
    Publication date: July 3, 2003
    Applicant: LG Electronics Inc.
    Inventor: Jae Yeong Park
  • Publication number: 20030117690
    Abstract: An optical path control apparatus includes a first substrate. A second substrate is movably provided for the first substrate. A mirror section is provided on the second substrate. A driving section moves the second substrate such that a first optical path of input light to the mirror section is optically connected to one of a plurality of second optical paths.
    Type: Application
    Filed: December 21, 2001
    Publication date: June 26, 2003
    Inventors: Mikio Oda, Mitsuru Yamamoto, Hikaru Kouta, Yasuhiro Sasaki, Sakae Kitajo, Yuzo Shimada
  • Patent number: 6578974
    Abstract: A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.
    Type: Grant
    Filed: September 7, 2001
    Date of Patent: June 17, 2003
    Assignee: Calient Networks, Inc.
    Inventor: Roger Jonathan Helkey
  • Patent number: 6574032
    Abstract: An imaging apparatus (10) for forming images from digital data, typically for printing or projection, the apparatus employing a spatial light modulator (30). The spatial light modulator (30) has a mounting (70) that is flexible in at least one direction in the plane that contains the surface of the spatial light modulator (30). An actuator (80) moves the mounting (70) at a speed that is at least a multiple of the refresh rate of the spatial light modulator (30), causing the movement of the spatial light modulator (30) to effect dithering of output pixels. This enlarges the effective pixel size to improve fill factor and reduce pixelization anomalies.
    Type: Grant
    Filed: January 23, 2002
    Date of Patent: June 3, 2003
    Assignee: Eastman Kodak Company
    Inventors: James E. Roddy, Robert J. Zolla
  • Publication number: 20030099028
    Abstract: The micro-mechanical structure includes an anti-stiction layer formed by plasma enhanced chemical vapor deposition. The anti-stiction layer is formed on only the area of a substrate other than the top of a movable structure and a part of an electrode that is subsequently bonded to a wire.
    Type: Application
    Filed: May 21, 2002
    Publication date: May 29, 2003
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Chang-ho Cho, Hyung-jae Shin, Woon-bae Kim
  • Patent number: 6556338
    Abstract: The present invention discloses an optimized optical attenuator device. It includes the design of resonator formed by two identical mirrors, which are made by MEMS process. The structure realizes the minimum insertion loss. The two membranes are chosen to be with high reflection rate. Multiple layer or metal layer or mixture of them can produce membrane of high reflection rate. High reflection rate causes low tuning voltage for one certain attenuation range.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: April 29, 2003
    Assignee: Intpax, Inc.
    Inventors: Naiqian Han, Liji Huang
  • Patent number: 6549692
    Abstract: The position of a micro-mirror, for example, in an optical switch, may be monitored using an optical position control signals that are detected by a detector arrangement. The position of the micro-mirror may be adjusted by detecting the position of the beam spot and comparing the detected position to a desired position.
    Type: Grant
    Filed: February 13, 2001
    Date of Patent: April 15, 2003
    Assignee: Tellium, Inc.
    Inventors: Roey Harel, Nicolas H. Bonadeo, Igal Brener, James Walker
  • Patent number: 6549323
    Abstract: A first control optics assembly receives an incoming optical wavefront and adjusts that incoming optical wavefront. A second control optics assembly receives a driver optical wavefront and adjusts that driver optical wavefront. A combiner receives an output from the first control optics assembly and an output from the second control optics assembly. The combiner provides a combined, co-linear output wavefront having an initial beam size. Spatial light modulator (SLM) addressing optics receives the combined, co-linear output wavefront and produces a desired beam size for the combined, co-linear output wavefront. The SLM receives the output from the SLM addressing optics and provides localized phased shifting of the resulting wavefront. SLM egressing optics receives the output of the SLM and returns the beam size of the wavefront to the initial beam size. The output of the SLM egressing element has desired portions of its phase shifted relative to the incoming optical wavefront.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: April 15, 2003
    Assignee: The Boeing Company
    Inventor: Jeffrey H. Hunt
  • Patent number: 6542283
    Abstract: A sheet material for use in a gyricon display in which a rotatable element, which has a portion which is capable of being permanently magnetized may be oriented to experience either an attractive force or a repelling force between itself and another magnetized element. The attractive force between the element and the pad serve to latch the element in place and prevent unwanted display changes from taking place while the repellant force serves to trap the element in place for the same reasons. The element may be constructed to be either cylindrically or spherically shaped. Further, the sheet material may also contain soft magnetic material pads which may be arranged to provide multiple latching states as desired.
    Type: Grant
    Filed: November 25, 1998
    Date of Patent: April 1, 2003
    Assignee: Xerox Corporation
    Inventor: Nicholas K. Sheridon
  • Patent number: 6538802
    Abstract: A movable MEMS mirror system with a mirror position detection system, such as a capacitive sensor, is calibrated using a physical stop with a range of movement of the mirror structure. Thus, drift in the position detection system can be compensated without the need for a separate reference signal source as used in conventional systems.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: March 25, 2003
    Assignee: Axsun Technologies, Inc
    Inventors: Xiaomei Wang, Dale C. Flanders
  • Patent number: 6538800
    Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
    Type: Grant
    Filed: January 9, 2002
    Date of Patent: March 25, 2003
    Assignee: Reflectivity, Inc.
    Inventor: Andrew G. Huibers
  • Patent number: 6535318
    Abstract: Integrated optoelectronic devices include a substrate having an opening therein that extends at least partially therethrough and a ledge extending inwardly from a sidewall of the opening. A pop-up mirror is provided in the opening. The mirror has an underside edge that is supported by an upward facing portion of the ledge when the mirror is in a closed position. A hinge is also provided. The hinge mechanically couples the mirror to the substrate so that the mirror can be rotated from the closed position to an open position.
    Type: Grant
    Filed: February 23, 2000
    Date of Patent: March 18, 2003
    Assignee: JDS Uniphase Corporation
    Inventors: Robert L. Wood, Edward A. Hill
  • Patent number: 6529311
    Abstract: Method and apparatus for forming an array of reflective elements for spatial light modulation. The array includes a substrate supporting electronically addressable actuators, each associated with a corresponding reflective element, a coupling attaching each actuator to the corresponding reflective element to place each reflective element in a substantially planar surface. Each electronically addressable actuator responds to predetermined addressing from a processing circuit to reposition the corresponding reflective element out of the planar surface a predetermined distance identified in the predetermined electronic addressing.
    Type: Grant
    Filed: October 30, 2000
    Date of Patent: March 4, 2003
    Assignee: The Trustees of Boston University
    Inventors: Thomas Bifano, Mark Horenstein
  • Patent number: 6525889
    Abstract: The present invention includes time delay devices and time delay systems. The invention also includes machines and instruments using those aspects of the invention. The invention may also be used to upgrade, repair, or retrofit existing machines or instruments, using methods and components known in the art. The present invention comprises a true time device that falls into the free-space category but uses a multiple-pass optical cell with refocusing mirrors that has the advantage of avoiding beam-spreading problems. This approach differs from previous free-space approaches in that it uses only one optical switch or spatial light modulator instead of one or more switches for each bit. In one approach, a microwave signal for each antenna element may be modulated onto an optical beam. After the individual optical beams are delayed by the desired amount of time through the system, the signals may then be down-converted to microwave signals for further processing.
    Type: Grant
    Filed: October 16, 2000
    Date of Patent: February 25, 2003
    Assignee: The Ohio State University
    Inventors: Stuart A. Collins, Jr., Betty Lise Anderson
  • Patent number: 6522453
    Abstract: A projector device is disclosed which uses light that is spatially modulated by a DMD having mirrors which are moveable between Off and On positions in response to image information input to the DMD. Images formed at the DMD are projected onto a screen via a projection lens. Surfaces of the lens elements of the projection lens are designed with curvatures such that light that may be undesirably reflected back to the DMD will not be in a converged state at or near the surfaces of DMD mirrors. In this way, ghost light that is projected onto the screen is dispersed over a wider area, and thus is less noticeable and not troublesome.
    Type: Grant
    Filed: September 20, 2001
    Date of Patent: February 18, 2003
    Assignee: Fuji Photo Optical Co., Ltd.
    Inventor: Kazuya Yoneyama
  • Patent number: 6522452
    Abstract: Mounting systems for micro-electromechanical system (MEMS) structures are provided including a non-Newtonian fluid having a threshold viscosity that is positioned between a MEMS base member and the MEMS structure so as to position the MEMS structure relative to the base member. A MEMS actuator is coupled to the MEMS structure. The MEMS actuator is positioned to cause movement of the MEMS structure relative to the MEMS base member by generating a force sufficient to exceed the threshold viscosity of the non-Newtonian fluid when the MEMS actuator is actuated. The MEMS structure may be a MEMS mirror positioned for pivotal movement about a bearing member to control tilt of the MEMS mirror.
    Type: Grant
    Filed: April 26, 2001
    Date of Patent: February 18, 2003
    Assignee: JDS Uniphase Corporation
    Inventor: Robert L. Wood
  • Patent number: 6519074
    Abstract: A cost-effective tunable optical component uses entropic, rather than enthalpic, materials to provide a compliant member that supports the optical element and is driven by an electrostatic actuator. Entropic materials exhibit an entropic plateau region over a wide frequency range with a Young's modulus much lower than enthalpic materials, linear elastic behavior over a wide deformation range, and, in certain geometries, energy and stress behavior that tend to stabilize the optical element during deformation. The compliant member can be configured in a variety of geometries including compression, tension, tensile/compressive and shear and of a variety of materials including elastomers, aerogels or other long chained polymers.
    Type: Grant
    Filed: March 20, 2001
    Date of Patent: February 11, 2003
    Assignee: Parvenu, Inc.
    Inventors: Michael J. Little, Ravi J. Verma
  • Publication number: 20030026011
    Abstract: In an optical switch system for switching over plural input lights and plural output lights corresponding thereto through spatial optical connection therebetween, having: a first reflection mirror to be directed with an input light and being controllable in position thereof; a second reflection mirror disposed opposite to the first reflection mirror, for reflecting the light reflected on the first reflection mirror, so as to outputted it therefrom; means for controlling positions of the first and second reflection mirrors, respectively; and means for adjusting the position of the first and second mirrors, which are controller by the controlling means, wherein a reference light being substantially different from the input light in wavelength is generated; both the reference light and the input light reflect upon the first and second reflection mirrors; and (c) optical intensity of the reference light selectively diverged from the reflection light is detected, thereby controlling positions of the first and said
    Type: Application
    Filed: August 6, 2001
    Publication date: February 6, 2003
    Inventors: Tadaaki Ishikawa, Masaya Horino
  • Patent number: 6511191
    Abstract: In an optical switch system for switching over plural input lights and plural output lights corresponding thereto through spatial optical connection therebetween, having: a first reflection mirror to be directed with an input light and being controllable in position thereof; a second reflection mirror disposed opposite to the first reflection mirror, for reflecting the light reflected on the first reflection mirror, so as to outputted it therefrom; means for controlling positions of the first and second reflection mirrors, respectively; and means for adjusting the position of the first and second mirrors, which are controller by the controlling means, wherein a reference light being substantially different from the input light in wavelength is generated; both the reference light and the input light reflect upon the first and second reflection mirrors; and (c) optical intensity of the reference light selectively diverged from the reflection light is detected, thereby controlling positions of the first and said
    Type: Grant
    Filed: August 6, 2001
    Date of Patent: January 28, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Tadaaki Ishikawa, Masaya Horino
  • Patent number: 6505939
    Abstract: Projection system comprising at least two light sources, a projection lens and a spatial light modulator located between the light sources and the projection lens, which light modulator comprises a plurality of light-deflection devices each provided with an element which is tiltable about a tilt axis. The light sources are arranged with respect to the spatial light modulator in such a way that, in operation, the centers of the light beams coming from the light sources and projected on each element are located on a projection line which extends substantially parallel to the tilt axis of the element.
    Type: Grant
    Filed: April 19, 2000
    Date of Patent: January 14, 2003
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Serge Joel Armand Bierhuizen, Marten Sikkens, Anthonie Hendrik Bergman
  • Publication number: 20030007262
    Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
    Type: Application
    Filed: October 31, 2001
    Publication date: January 9, 2003
    Applicant: Fujitsu Limited
    Inventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
  • Patent number: 6504643
    Abstract: Optical cross-connect involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms attached to a substrate.
    Type: Grant
    Filed: September 28, 2000
    Date of Patent: January 7, 2003
    Assignee: Xerox Corporation
    Inventors: Eric Peeters, Michel A. Rosa, David K. Fork
  • Patent number: 6504644
    Abstract: An apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus includes a radiation source, a spatial modulator (SLM) having a multitude of modulating elements (pixels), a projection system, an electronic data processing and delivery system controlling said modulator, a precision mechanical system for moving said workpiece and an electronic control system. Specifically, the drive signals can set the pixels in a number of states larger than two, and intermediate modulation states are used for pixels along edges of pattern features. The design of the modulating elements and the exposure method create, for differently placed and/or differently oriented edges in the pattern, a symmetry in the aperture stop of the projection system.
    Type: Grant
    Filed: August 31, 2000
    Date of Patent: January 7, 2003
    Assignee: Micronic Laser Systems AB
    Inventor: Torbjorn Sandstrom
  • Patent number: 6500378
    Abstract: A method and apparatus for creating a three-dimensional object by generating a cross-sectional pattern of energy of an object to be formed at a selected surface of a medium capable of altering its physical state in response to the energy projected or transmitted onto the selected layer. By impinging radiation, particle bombardment, or chemical reaction by a method controlled by a spatial light modulator, successive adjacent cross-sections of the object are rapidly formed and integrated together to provide a step-wise laminar build-up of the desired object creating a three dimensional manifestation from bitmap images of a series of cross-sections of a computer generated model.
    Type: Grant
    Filed: July 13, 2000
    Date of Patent: December 31, 2002
    Assignee: EOM Technologies, L.L.C.
    Inventor: Jeffrey M. Smith
  • Patent number: 6501588
    Abstract: Optical cross-connect systems involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms attached to a silicon substrate.
    Type: Grant
    Filed: September 28, 2000
    Date of Patent: December 31, 2002
    Assignee: Xerox Corporation
    Inventors: Michel A. Rosa, Eric Peeters
  • Publication number: 20020186483
    Abstract: An optical mirror system with multi-axis rotational control is disclosed. The mirror system includes an optical surface assembly, and at least one leg assembly coupled to the optical surface assembly. The at least one leg assembly supports the optical surface above a substrate. A system and method in accordance with the present invention can operate with many different actuator mechanisms, including but not limited to, electrostatic, thermal, piezoelectric, and magnetic. An optical mirror system in accordance with the present invention accommodates large mirrors and rotation angles. Scanning mirrors can be made with this technique using standard surface-micromachining processes, or a deep RIE etch process. A device in accordance with the present invention meets the requirements for a directly scalable, high port count optical switch, utilizing a two mirror per optical I/O port configuration.
    Type: Application
    Filed: April 15, 2002
    Publication date: December 12, 2002
    Inventors: Paul Merritt Hagelin, John J. Fling
  • Patent number: 6491404
    Abstract: A micromechanical apparatus includes a microelectronic substrate and a tiltable body thereon. The tiltable body includes a plate configured to tilt about an axis parallel to the microelectronic substrate and a tilt stop engaging portion disposed axially adjacent the plate. A range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate. The microelectronic substrate may have an opening therein configured to receive the plate, and the tilt stop may include a surface of the microelectronic substrate adjacent the opening. An actuator, such as an electrostatic actuator, may tilt the tiltable body about the axis. Related operation and fabrication methods are also described.
    Type: Grant
    Filed: May 18, 2001
    Date of Patent: December 10, 2002
    Assignee: JDS Uniphase Corporation
    Inventor: Edward A. Hill
  • Publication number: 20020181110
    Abstract: A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.
    Type: Application
    Filed: June 5, 2001
    Publication date: December 5, 2002
    Inventors: John Eric Bower, Michal E. Gross, Sungho Jin, Hareesh Mavoori, Ainissa Ramirez
  • Patent number: 6490073
    Abstract: A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.
    Type: Grant
    Filed: April 27, 2001
    Date of Patent: December 3, 2002
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Yong-seop Yoon
  • Publication number: 20020176151
    Abstract: An dynamic optical filter 10 is provided to selectively attenuate or filter a wavelength band(s) of light (i.e., optical channel(s)) or a group(s) of wavelength bands of an optical WDM input signal 12. The optical filter is controllable or programmable to selectively provide a desired filter function. The optical filter 10 includes a spatial light modulator 36, which comprises an array of micromirrors 52 that effectively forms a two-dimensional diffraction grating mounted in a retro-reflecting configuration. Each optical channel 14 is dispersed separately or overlappingly onto the array of micro-mirrors 52 along a spectral axis or direction 55 such that each optical channel or group of optical channels are spread over a plurality of micromirrors to effectively pixelate each of the optical channels or input signal.
    Type: Application
    Filed: April 3, 2002
    Publication date: November 28, 2002
    Inventors: John Moon, Alan D. Kersey, James Sirkis, James Dunphy, Joseph Pinto, Paul Szczepanek, Michael Davis
  • Patent number: 6485599
    Abstract: A system using several wavelengths, preferably from the output of a single laser, is described for curing a dual cure glue seal that affixes two substrates to form a liquid crystal display panel. Here the liquid crystal is already in place before the glue seal is cured so that a high temperature bake to promote the sealant curing is not permissible . The multiple wavelengths from the single source of radiation result both from frequency doubling and mixing of the fundamental laser to achieve frequency tripling. Generally a UV wavelength is required for curing the photolytic component of the glue seal so that in the present invention the fundamental from a ˜1 micron (1000 nm) wavelength laser is frequency tripled. The UV is scanned along the entire peripheral region of the glue seal.
    Type: Grant
    Filed: July 11, 2000
    Date of Patent: November 26, 2002
    Assignee: International Business Machines Corporation
    Inventors: James H. Glownia, Robert J. von Gutfeld
  • Publication number: 20020167714
    Abstract: A method and apparatus for configuring and tuning a crystal by selectively controlling a fluid supplied to a plurality of nodes within a substrate. The apparatus comprises a substrate having at least one node that can be selectively supplied with a liquid that will change the material property of the node. The node may be a spherical cavity in a three-dimensional structure, a cylindrical aperture in two-dimensional structure, or a cavity in a one-dimensional structure. The node or nodes in the substrate are coupled to a fluid distribution assembly that selectively alters the material property of the nodes. The material property may be changed by moving the fluid or material in a fluid, using electrohydrodynamic pumping, electroosmotic pumping, electrophoresis, thermocapillarity, electrowetting or electrocapillarity. The change in the material property in at least one of the nodes changes the electromagnetic radiation filtering or switching characteristics of the crystal.
    Type: Application
    Filed: April 3, 2002
    Publication date: November 14, 2002
    Inventors: Sterling Eduard McBride, Peter J. Zanzucchi, Joseph Hy Abeles
  • Patent number: 6480324
    Abstract: An improved optical photolithography system and method provides predetermined light patterns generated by a direct write system without the use of photomasks. The Direct Write System provides predetermined light patterns projected on the surface of a substrate (e.g., a wafer) by using a computer controlled component for dynamically generating the predetermined light pattern, e.g., a spatial light modulator. Image patterns are stored in a computer and through electronic control of the spatial light modulator directly illuminate the wafer to define a portion of the polymer array, rather than being defined by a pattern on a photomask. Thus, in the Direct Write System each pixel is illuminated with an optical beam of suitable intensity and the imaging (printing) of an individual feature is determined by computer control of the spatial light modulator at each photolithographic step without the use of a photomask.
    Type: Grant
    Filed: June 14, 2001
    Date of Patent: November 12, 2002
    Assignee: Affymetrix, Inc.
    Inventors: Calvin F. Quate, David Stern
  • Patent number: 6480323
    Abstract: A device that includes a projection element positioned between first and second beam scanners configured in series and a two-dimensional display plane. An apparatus for controlling the first and second beam scanners is provided so that the angle of incidence and the point of incidence of a beam output from the series connected beam scanners onto the projection element are controlled. In that manner, each point on the projection element can be mapped to a line in the display plane. A method of mapping a point in the projection element to a line in the display plane is also disclosed.
    Type: Grant
    Filed: December 18, 1998
    Date of Patent: November 12, 2002
    Assignee: Carnegie Mellon University
    Inventors: William C. Messner, Daniel D. Stancil, Tuviah E. Schlesinger
  • Publication number: 20020158548
    Abstract: A micromirror driver for simultaneously and independently controlling a resonant frequency and an amplitude of a micromirror. A micromirror having a plurality of grooves is supported in rotation by an elastic body. Base electrodes having a comb shape are affixed to the grooves and along an edge of the micromirror. A plurality of driver electrodes also having a comb shape are respectively engaged with the base electrodes in a gear like arrangement to electrostatically interact with the micromirror in response to applied voltages. An amplitude and a frequency of the micromirror are controlled by varying a magnitude or a waveform of one or more electrode voltages or by varying a phase between voltages applied to at least two electrodes. Accordingly, greater driving forces, a larger rotation angle of the micromirror, and independent control of amplitude and resonant frequency of the micromirror are obtained.
    Type: Application
    Filed: March 4, 2002
    Publication date: October 31, 2002
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Young-hun Min, Hwan-young Choi, Hyung-jae Shin, Jeong-kwan Lee
  • Patent number: 6473221
    Abstract: A method of making a galvano-mirror is provided. It includes the following steps. First, a first material substrate formed with a plurality of mirror plate regions is prepared. The mirror plate regions correspond in arrangement to the mirror plate of the galvano-mirror. Then, a second material substrate formed with a plurality of driver plate regions is prepared. The driver plate regions correspond in arrangement to the driver plate of the galvano-mirror. Then, the first and the second material substrates are attached to each other so that each of the mirror plate regions faces a relevant one of the driver plate regions. Finally, the attached first and second material substrates are divided into individual gaslvano-mirrors.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: October 29, 2002
    Assignee: Fujitsu Limited
    Inventors: Satoshi Ueda, Ippei Sawaki, Yoshihiro Mizuno
  • Patent number: 6473246
    Abstract: A light beam deflector comprises an initial beam deflector that imparts a small initial deflection, and a beam deflection amplifier that increases the initial small deflection by a multiplication factor. The first of two initial beam deflector embodiments employs highly-electro-optic-sensitive materials and provides methods for reducing and eliminating their photorefractive effects, including the use of a suppressing light source, external electric fields, and temperature control. The second embodiment employs a multi-layer, iterative prism structure, increasing the aperture without increasing the supply voltage. The first of five embodiments of the beam deflection amplifier is a Keplerian telescope lens first stage and a negative lens system second stage. The second is a Galilean telescope lens first stage and a negative lens system second stage. The third is either a Keplerian or Galilean telescope lens alone. The fourth replaces the single second lens of the first stage with a compound lens system.
    Type: Grant
    Filed: March 19, 2001
    Date of Patent: October 29, 2002
    Assignee: Advanced Optical Technologies, Inc.
    Inventor: Yong-Sheng Chao