Abstract: A damped micromechanical device comprising a substrate, a movable structure overlying the substrate and a flexural member having a first end portion coupled to the substrate and a second end portion coupled to the movable structure. The movable structure is movable at a resonant frequency between first and second positions relative to the substrate. A damping material is adhered to at least a portion of the flexural member for damping the movement of the movable structure at the resonant frequency. A method for making the micromechanical device is provided.

Abstract: One embodiment disclosed relates to a method for driving a micro electromechanical (MEM) device. The method includes generating a high-frequency AC drive signal that is substantially greater in frequency than a resonance frequency of a movable feature in the MEM device, and modulating the amplitude of the high-frequency AC drive signal. A DC-like displacement of the movable feature in the MEM device is achieved by driving the movable feature using the amplitude modulated high-frequency AC drive signal.

Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts.

Abstract: An optical cross-connect switch employing pallets of mirror assemblies configured as an array, wherein each mirror assembly includes a mirror that is rotatable in a two-axis system to steer a beam in 2-dimensional space. Each mirror assembly includes a mirror module that can be rotated in relation to a first axis as well as in relation to a second axis that is perpendicular to the first axis. The mirror modules are suspended by wires in a manner that allows the pitch and roll of the mirror module to be controlled. Coils and magnets are employed to generate magnetic fields which create a rotating torque in each of the two rotational axes. By controlling the magnetic fields that are generated, the degree of rotation can in turn be controlled. The configuration provides for a practical, area efficient, bidirectional, randomly addressable optical cross-connect switch design that can employ conventional materials and processes.

Abstract: Reconfigurable radiant energy reflectors (3) of very low areal densities are formed of a laminate of a thin layer of a shape memory alloy (17) and a thin film or membrane material (15). The outer surface of the membrane provides the energy reflecting surface (16) and a support member (11) is attached to the laminate for application in a system. In a preferred embodiment, the shape memory alloy (17) is compositionally graded (18, 19, 29, 21) and exhibits a two-way shape memory effect and a heater (5) serves as the actuator to the reflector.

Abstract: A digital micromirror device (“DMD”) is used to alter the shape of light that is projected onto a stage. The DMD selectively reflects some light, thereby shaping the light that is projected onto the stage. The control for the alteration is controlled by an image. That image can be processed, thereby carrying out image processing effects on the shape of the light that is displayed. One preferred application follows the shape of the performer and illuminates the performer using a shape that adaptively follows the performer's image. This results in a shadowless follow spot.

Abstract: An optical deflection element for splitting light rays in accordance with a wavelength of incident light, includes a photonic crystal having an entrance end face and an exit end face, and having a refractive index which periodically changes depending upon positions thereof. The optical deflection element includes a region in which a propagation angle &thgr;C of the incident light within the photonic crystal changes in accordance with the wavelength of the incident light having entered at an incident angle &thgr;IN into the entrance end face, and a relationship among a wavelength &lgr; of the incident light in vacuum, a lattice constant A of the photonic crystal, the incident angle &thgr;IN and the propagation angle &thgr;C satisfies (∂&thgr;C/∂(A/&lgr;))/(∂&thgr;C/∂&thgr;IN)>10.

Abstract: The micro-mechanical structure includes an anti-stiction layer formed by plasma enhanced chemical vapor deposition and plasma etching. The anti-stiction layer is selectively formed on only the area of a substrate other than the top of a movable structure and a part of an electrode that is subsequently bonded to a wire.

Abstract: A light-modulation element is constituted as a light-modulation element for constituting a GLV device and has the same constitution as the conventional light-modulation element except for differing in the structure of the combined light-reflective film and membrane-side electrode of a membrane. The combined light-reflective film and membrane-side electrode is composed of a two-layer metallic film forming a TiN film of 10 nm to 70 nm in thickness provided as a lower layer and an Al film of 50 nm to 150 nm in thickness provided thereon. In the combined light-reflective film and membrane-side electrode, the Al film has a smooth reflective surface and a high light-reflectance, so that the light-utilization efficiency of the light-modulation element is high.

Abstract: An optical arrangement having a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3) is configured, in the interest of flexible and reliable correction of aberrations occurring because of the deflection, in such a way that the correction device comprises an adaptive optical system (2). Also described is a method for the deflection of light beams (1) with a light source, preferably a laser, for generating a light beam (1); at least one acoustooptical deflection device (3) for the light beam (1); and a correction device for correcting beam aberrations produced by the deflection device (3), in which an adaptive optical system (2) is used as the correction device.

Abstract: A detunable Fabry-Perot interferometer, and method of tuning a Fabry-Perot interferometer are provided. The Fabry-Perot interferometer includes a first mirror, a second mirror oriented with respect to the first mirror so as to define a Fabry-Perot cavity therebetween, and an actuator configured to adjust a resonant wavelength of the Fabry-Perot cavity by varying a gap between the first and second mirrors, wherein the actuator is configured to selectively maintain the first and second mirrors in a substantially non-parallel relationship while the resonant wavelength of the Fabry-Perot interferometer is varied. The detunable Fabry-Perot interferometer can be employed in a multiplexer of a telecommunications system, as provided.

Abstract: The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices, that are more reliable, more cost effective, and/or exhibit better performance than prior art devices. In one embodiment, the complaint mechanism includes an island that is suspended from a frame using a compliant member that is attached to the frame and the island. Individual actuators and/or sensor elements may be placed on the island, so that each island may be individually actuated or sensed.

Abstract: An apparatus is provided for creating a pattern on a workpiece sensitive to radiation, such as a photomask, a display panel or a microoptical device. The apparatus includes a radiation source and a spatial modulator (SLM) having a multitude of modulating elements (pixels). It further includes an electronic data processing and delivery system feeding drive signals to the modulator, a precision mechanical system for moving said workpiece and an electronic control system coordinating the movement of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is stitched together from the partial images created by the sequence of partial patterns. The drive signals can set a modulating element to a number of states larger than two.

Abstract: A light modulator has one or more gratings and one or more MEMS actuators operable to move the gratings for selectively modulating light from an input light source. Certain embodiments have a plurality of blazed gratings arranged parallel to a plane and movable linearly parallel to the plane by MEMS actuators. Each of the gratings is individually blazed for light of a selected color such as red, green or blue. Associated with the gratings may be portions providing black and/or white outputs. An aperture spaced apart from the plane allows color(s) selected from an input white-light source to be directed to an output. An array of MEMS-actuated modulation devices provides a color spatial light modulator. Other embodiments have a grating adapted to be tilted by a MEMS actuator, either continuously through a range of angles or to a selected angle of a set of predetermined discrete angles, to direct selected wavelengths diffracted by the grating toward collection optics for a modulated light output.

Abstract: A method and apparatus for dynamically controlling variation in an attribute of a light beam employing materials with unusually high electrooptical coefficients that are subject to optical damage from the light beam being controlled. The method includes providing a transmission medium composed of a high sensitivity electrooptic material transparent to the light beam and having a nonzero electrooptic coefficient, where the medium is adapted to receive, propagate, and output the light beam. The medium is subjected to an electric field, the strength of which is controlled to determine the amount of variation of the light beam attribute. The field is generated by electrodes appropriately enclosing the medium and inducing a voltage across the electrodes. The medium is illuminated by a suppressing light source, the illumination being intense enough to significantly reduce charge distribution inhomogeneity within the medium.

Abstract: An array of MEMS devices having column lines and row lines, such as a light modulator array, is controlled in response to an input signal by providing a number of discrete voltages, multiplexing from the discrete voltages a selected voltage to be applied to each MEMS device of the array, and enabling application of the selected discrete voltage to each MEMS device of the array.

Abstract: A mirrored electronic message board having a display portion and a recognition system. The recognition system has a processor, an identity input, and a memory. The identity input receives identity information relating to the identity of a user in proximity to the mirrored electronic message board. The processor analyzes the identity information to determine the identity of the user. The processor then utilizes the determined identity to retrieve data associated with the identified. user from the memory. The retrieved data is then provided to the display portion of the mirrored electronic message board for review by the identified user.

Abstract: The snapped-down position of an optical element is defined by its contact with a plurality of kinematic supports on an associated platform, or on electrodes placed on that platform. Compliant flexures may be provided in association with one or more kinematic supports, such that fine adjustments of the optical element can be made by deflecting the optical element to cause compression of one or more flexures.

Abstract: The present invention discloses a tunable optical device. The tunable optical device includes a tuning cavity having a tuning means provided for alternately bonding to at least two different tunable optical cells each comprising a tuning membrane wherein the tuning cavity disposed near the tuning membrane for moving the tuning membrane for tuning one of the at least two tunable optical cells bonded thereon. In a preferred embodiment, the tuning cavity further includes a first electrode disposed on the tuning membrane and a second electrode disposed on a substrate supporting the tuning cavity for applying a voltage to move the tuning membrane. In a preferred embodiment, the optical device further includes an optical device control circuit connected to the tuning means for controlling and moving the tuning membrane.

Abstract: Optical devices comprising addressable pixels are tiled in an array configured for generating an image line. The addressable pixels are grouped into center pixels and addressable sub-pixels are grouped at the ends. The optical devices are tiled in staggered rows with addressable. sub-pixels and/or pixels overlapping along the array. To optimize the quality of the image, addressable sub-pixels are selectively operated and/or disabled to remove artifacts and maximize pixel density in the image line generated by the overlap regions. Arrays of optical devices, in accordance with the invention, are used generate image lines for display and print applications. The optical devices can be any light valve including MEM devices such as diffraction grating light valves and LCD devices.

Abstract: A micromirror actuator includes a substrate; two posts having predetermined heights and installed a predetermined distance apart on the substrate; a torsion bar ends of which are fixed to respective posts; a stopper extending from a portion of the torsion bar and contacting or coming apart from the surface of the substrate; a mirror connected to the middle portion of the torsion bar; parallel elements connected to the torsion bar being isolated from the mirror and causing the torsion bar to be distorted; and a magnet providing a rotation force to the parallel elements through being affected by an external magnetic field. Accordingly, the rotation characteristics of the mirror of the micromirror actuator of the present invention become insensitive to a change of the strength of the external magnetic field applied after the stopper contacts the surface, thereby uniformly maintaining the rotation angle of the mirror at a desired level.

Abstract: An apparatus having an improved, tunable gamma response is disclosed. The apparatus comprises a light modulator having a plurality of spaced-apart elements, composed of alternating active elements and passive elements lying in a single plane; a gamma controller; and a displacement controller. The gamma controller applies a gamma voltage to a substrate, displacing the plurality of spaced-apart elements to a bias plane, closer to the substrate. In a reflection mode, the plurality of spaced-apart elements function as a spectral mirror to an impinging light beam. In a diffraction mode, the displacement controller applies a displacement voltage to the active elements. The active elements are now moved to a second plane parallel to the bias plane so that the light beam impinging on the light modulator will be diffracted. The illumination intensity of a detected light signal is proportional to the displacement voltage raised to a power of between approximately 1.75 and 3.0, the gamma response.

Abstract: A projector has an illuminating optical system for irradiating white light, a color switching optical system for dividing the white light irradiated by the illuminating optical system into color lights in a time-division manner, a DMD™ for modulating the respective color lights in accordance with an image signal, a projection optical system for projecting the light beam modulated by the DMD, a light-composite optical system for getting the light beam not incident on the projection optical system to be incident again on the DMD and a device controller for controlling the operation of the projector, where the light beam irradiated by the DMD and not incident on the projection optical system is irradiated as a light beam of uniform illuminance distribution by the light-composite optical system and is again introduced on an illumination optical axis to be incident on the DMD, thus enhancing peak luminance of the projected image and achieving high contrast ratio.

Abstract: A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam (20) comprises a plurality of rotatable elements. Each of the rotatable elements (170) comprises a plurality of structures (300). The structures are spaced apart at sub-wavelength distances relative to the wavelength of the incident beam (20). Each of the plurality of structures (300) exhibits an interaction with the polarization state of the incident beam. An actuator is coupled to each of the rotatable elements. The actuator is capable of controllably positioning the rotatable element to any two positions, and each of the positions has a corresponding polarization state. A substrate (110) supports each plurality of rotatable elements and houses each actuator.

Abstract: A micromirror (110) includes a frame portion (112), a gimbal portion (114) and a mirror portion (116) formed from a single piece of material. A plurality of truss members (140/142) are disposed beneath the gimbal portion (114) and mirror portion (116), allowing the gimbal and mirror portions (114/116) to be made of a thinner material, reducing the mass and increasing the resonant frequency of the micromirror device (110).

Abstract: A programmable photonic device includes a plurality of optical functional elements and at least one programmable signal path coupled to at least one of the optical functional elements. The signal path is adapted to convey an optical signal along the signal path. The device also includes at least one directional element adapted to direct the optical signal to the signal path.

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract: An array of movable reflective elements provides wavelength independent performance in spectral equalizers and other optical devices. Each movable reflective element comprises a reflective plate that is suspended by rod-like supports that have a width of less than 2 microns and as small as about 0.25 to 0.35 microns. Semiconductor processing techniques are used to form the rod-like supports. An improved spectral equalizer incorporates the array of movable reflective elements, a controller, collimating/focusing optics and a diffraction element that optically communicate in a free-space optics arrangement.

Abstract: High speed optical scanner systems and methods using optical multiplexing of wavelengths and spatial codes. In one form, a wavelength multiplexed optical scanner (W-MOS) is disclosed, wherein tuning the wavelength or selection of wavelength accomplishes a high speed, no-moving, parts scanner coupled with a wavelength dispersive element, such as a grating or a thin-film interference filter. In another form, a W-MOS employs beam expansion optics and a freespace-coupled wavelength dispersive element. In another embodiment, the invention includes a fiber-based W-MOS using an optical fiber coupled with a fiber-based wavelength division multiplexer (WDM) device to form a spatially distributed scanner for wide angular coverage in three-dimensional beam scanning. The invention also includes a code multiplexed optical scanner (C-MOS) that uses the principle of holography and spatial code multiple access optical communications.

Abstract: An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.

Abstract: The present invention provides method of making mechanisms in which the relative locations of elements are maintained during manufacturing. The methods according to the present invention can be used to make a variety of devices, including tunable optical devices. The methods include displaceably attaching an island (support) to a frame with a non-rigid material.

Abstract: In an optical element, a propagation direction of incident light beam is largely changed and the direction-changed light beam is derived in a desirable direction without increasing a dimension and manufacturing cost thereof. The optical element includes photonic crystal having a refractive index which changes periodically depending on a location of the photonic crystal, wherein an angle defined between a first end face and a second end face thereof is determined in such a manner that a light beam incident upon the first end face at a predetermined incidence angle and having a predetermined wavelength is emitted from the second end face in a desirable direction.

Abstract: Improvements in an interferometric modulator that has a cavity defined by two walls.

Abstract: An optical switch includes two optical input terminals, two optical output terminals, two reflecting devices and a movable device. The optical input terminals are used to receive light rays. The two reflecting devices are positioned at fixed positions, and the movable device reflects light rays. When the position of the movable device moves, the light rays are reflected by one of the reflecting devices and are selectively output from the optical output terminals.

Abstract: The present invention provides a compliant mechanism that can be used to make a variety of devices, such as tunable optical devices that are more reliable, more cost effective and/or exhibit better performance than prior art devices.

Abstract: A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

Abstract: Endoscopes and other viewing devices that control the light that contacts a sample and/or that is detected emanating from a sample. The viewing devices are particularly well suited for in vivo imaging, although other uses are also included. The viewing devices, and methods related thereto, comprise a spatial light modulator in the illumination and/or detection light path so that light transmitted to the target via a bundle of light guides or optical system is transmitted substantially only into the cores of the light guide bundle and not into the cladding surrounding the light guides, filler between the light guides in the bundle, or undesired light guides. Also, methods and apparatus for mapping the pixels of the spatial light modulator to the cores of the light guides in the bundle (preferably at least 3 pixels (e.g., at least 3 mirrors for a digital micromirror device) for each core), as well as for mapping the light guides of one light guide bundle to another.

Abstract: In accordance with the present invention, an array of individually addressable micromachined light reflecting ribbons provide a high speed light valve action by employing a method in accordance with which the ribbons flex about their longer axis under the action of an applied electrostatic field. The ribbons are mounted on pedestals such that the resulting micromechanical structures are substantially symmetrical with respect to a plane along their long axis through the centers of the pedestals and normal to the substrate. This micromechanical arrangement ensures a structure with a high natural frequency, thereby allowing high light valve switching speeds. The particular mode of deformation also ensures a robust structure. The method may be applied in either “bright field” or “dark field” (Schlieren) mode. The particular combination of materials employed allows the method to be used in higher incident power applications such as those encountered in the printing industry.

Abstract: An electro-optic display comprises first and second substrates, and an adhesive layer and a layer of electro-optic material disposed between the first and second substrates. The adhesive layer has a volume resistivity in the range of about 109 to about 1011 ohm cm and comprises a mixture of an adhesive material having a volume resistivity of at least about 5×1011 ohm cm and a filler having a volume resistivity not less than about 107 ohm cm, the filler being present in the mixture in a proportion above its percolation threshold in the adhesive material.

Abstract: An image display system, e.g. for projection type displays, has an electrically addressed spatial light modulator or EASLM (1) and an optically addressed spatial light modulator or OASLM (5). An image formed on the EASLM (1) is transferred to a part of the OASLM (5) by an image transfer means (3) and the image produced by the OASLM (5) is formed from a plurality of successive images formed by the EASLM.

Abstract: Laser scanning optics for scanning a laser beam issuing from a laser in the main scanning direction while repeatedly steering it in the subscanning direction is disclosed. The laser scanning optics includes focusing optics for focusing the laser beam, a first deflector for steering the laser beam in the subscanning direction, and a second deflector for steering the laser beam in the main scanning direction. The focusing optics causes the laser beam to form an elliptical beam spot, which is elongate in the main scanning direction, in a scanning plane. The first deflector is driven such that the laser beam is scanned at a higher speed in the subscanning direction than in the main scanning direction. The first deflector is so controlled, based on a value input beforehand or data measured beforehand, as to correct the distortion of linearity in the main scanning direction by subscanning.

Abstract: The invention relates to a projection type display apparatus having an optical modulating device (3) controlling a light reflecting state by using a mirror array device, and a projecting optical system (4) projecting reflected light of light illuminated from the optical modulating device (3). In the apparatus, the mirror array device is illuminated by R, G and B color light components from different directions, and at least a part of the reflected light of the mirror array device is selectively guided to the projecting optical system (4) to project the light on to the screen or the like by controlling a tilt angle of the mirror array device.

Abstract: A beam deflector 1 for a beam of light 9 comprises: a first plate of electro-optical material disposed between a pair of electrode arrangements and a pair of plano-parallel mirrors, the refractive index of the electro-optical material being variable by the application of electric voltages, wherein a first mirror of the pair facing towards the incident light has a lower reflectivity than the second mirror, the first or second mirrors comprising a plurality of dielectric layers having refractive indices different from each other. Further, a switching system comprises: a plurality of terminals (53) for optical signals and beam deflectors (1) allocated to each other in pairs, each beam deflector being controllable such that it deflects the light beam (9) directed thereto into a selectable direction in order for the beam to enter at least one selected terminal end (55).

Abstract: A method and apparatus for configuring and tuning a crystal by selectively controlling a fluid supplied to a plurality of nodes within a substrate. The apparatus comprises a substrate having at least one node that can be selectively supplied with a liquid that will change the material property of the node. The node may be a spherical cavity in a three-dimensional structure, a cylindrical aperture in two-dimensional structure, or a cavity in a one-dimensional structure. The node or nodes in the substrate are coupled to a fluid distribution assembly that selectively alters the material property of the nodes. The material property may be changed by moving the fluid or material in a fluid, using electrohydrodynamic pumping, electroosmotic pumping, electrophoresis, thermocapillarity, electrowetting or electrocapillarity. The change in the material property in at least one of the nodes changes the electromagnetic radiation filtering or switching characteristics of the crystal.

Abstract: An apparatus and method of fabricating and operating a micro-electromechanical systems (MEMS) integrated optical structure is disclosed. Micro-optics is integrated with MEMS actuators to provide a building block for a micro-optical communication device. Such micro-optical communication device may realize a variety of optical communication systems including optical interconnects, laser communications, or fiber optic switches. In accordance with one aspect of the present invention, a micro-optical element such as a micro-lens is advantageously integrated with an actuator such as MEMS comb drive actuator to form a MEMS lens assembly. The MEMS lens assembly is further coupled to an optical source which may provide a MEMS integrated micro-optical communication device. This integration substantially obviates the generally needed external or manual positioning of the micro-optical element to align a light beam or an optical signal being emitted from the optical source.

Abstract: The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk.

Abstract: An optical device comprises a substrate having a plane surface. An optical path is disposed on the substrate and extends in a plane parallel to the surface of the substrate. A recess intercepts the optical path. An optical element is provided for modifying light incident thereon. The optical element is moveable within the recess between a first position in which the optical element is located in the path and a second position in which optical element is remote from the path. A cantilever suspends the optical element for movement within the recess between the second and first positions in a direction normal to the surface of the substrate.

Abstract: A window is mounted directly to an upper surface of a micromirror device chip. More particularly, the window is mounted above a micromirror device area on the upper surface of the micromirror device chip by a bead. The window in combination with the bead form a hermetic enclosure about the micromirror device area thus protecting the micromirror device area from moisture and contamination.

Abstract: A microelectromechanical system is disclosed that constrains the direction of a force acting on a first load, where the force originates from the interaction of the first load and a second load. In particular, the direction of a force acting on the first load is caused to be substantially parallel with a motion of the first load. This force direction constraint is achieved by a force isolator microstructure that contains no rubbing or contacting surfaces. Various embodiments of structures/methods to achieve this force direction constraint using a force isolator microstructure are disclosed.

Abstract: The invention relates to an optical scanning device for apparatuses for recording and/or reproducing information on optical recording media, which is suitable in particular for recording and/or reproducing information at high speed, such as, for example, the scanning of a DVD at a twelve-fold speed. According to the invention, the optical scanning device has a lens holder which is formed by a hollow body and whose side walls are arranged such that they run at an angle to a connecting point with its elastic support. The thus hexagonally formed lens holder has advantageous air chambers and an enlarged distance from the lens, and also an elastic support deviating from a parallel guide, which lead to a low degree of lens tilting, improved guidance properties and a natural resonance behaviour which is necessary for scanning at high speed. The field of application relates to the production of scanning devices for optical recording media which are provided for recording and/or reproducing information at high speed.