Abstract: A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U.S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.

Abstract: A conformal retro-modulator optical apparatus. The apparatus includes an array of multiple quantum well devices disposed in a thin array. A plastic support element is bonded to the thin array, the plastic support element having a thickness greater that of the thin array. The plastic support element is preferably plastic at elevated temperatures above room temperature, thereby allowing the plastic support element and the thin array of multiple well device disposed therein to conform to a predetermined shape, yet being rigid at room temperature.

Abstract: Due to an ever growing shortage of conventional energy sources, there is an increasingly intense interest in harnessing solar energy. The instant invention can contribute to the goal of achieving environmentally clean solar energy to be competitive with conventional energy sources. Method and apparatus are presented for coupling to a transparent sheet with an embedded array of preformed or formable mirrored micro-balls for use in a solar energy concentrator, and functionally similar applications such as optical switches and solar rocket assist. Mirrored micro-balls and particulate formable mirrors in cells are covered with a thin spherical shell of lubricating liquid so that they are free to rotate in an almost frictionless encapsulation in the sheet. Induced polarization electric or magnetic dipoles in the mirrors provide a method of controlling the alignment of the mirrored balls. Electrophoretically and magnetophoretically forming mirrors in situ on a rigid surface in a rotatable cell are also disclosed.

Abstract: This application describes devices and techniques for using microwave or RF resonators to provide DC bias, DC blocking, and impedance matching to microwave or RF devices. Both planar and non-planar implementations may be used.

Abstract: A self-assembly structure of micro electromechanical optical switch utilizes residual stresses of three curved beams. The first curved beam pushes the base plate away from the substrate. The second curved beam lifts up the mirror slightly. Then, the third curved beam rotates the mirror vertical to the base plate and achieves self-assembly. In another embodiment, magnetic force and magnetic-activated elements are used.

Abstract: This invention deals with the broad general concept for dynamic reflection, illumination and direct image projection. A mini-optics reflection and focussing system is presented that ranges from interior illumination, to exterior illumination, to large scale space based illumination, to ordinary and to telescopic image formation. It can be used both as a source of illumination, and to project images, figures, and the written word. This system has broad applications such as dynamic full color displays. Its use of a novel induced dipole coupling for rotation of planar mirrors lets it operate with greater simplicity and efficiency than other display devices. Furthermore in its capacity as a high altitude active reflector of solar radiation, it can be utilized to supply illumination, energy, and provide climate control.

Abstract: A method passively locks and phases an array of fiber amplifiers in a fiber amplifier system that emits a beam, such as a laser beam. The method locks the fiber amplifiers so that the fiber amplifiers operate at same or similar frequencies. The method samples a small portion of the emitted beam in a far-field around a central lobe on an optical axis and then couples this portion of emitted beam back into the array of fiber amplifiers. The fiber amplifiers may be phased so that the emitted beam concentrates its energy around the central lobe in the far-field. Phasing may be achieved by using an aperture, for example, to restrict the portion of the emitted beam to be coupled back to a restricted region around the optical axis.

Abstract: A reconfigurable multifunctional optical device has an optical arrangement for receiving an optical signal, each having optical bands or channels, and a spatial light modulator for reflecting the at least one optical signal provided thereon. The optical arrangement features a free optics configuration with a light dispersion element for spreading each optical signal into one or more respective optical bands or channels for performing separate optical functions on each optical signal. The spatial light modulator includes a micro-mirror device with an array of micro-mirrors, and the respective optical bands or channels reflect off respective micro-mirrors. The free optics configuration includes a common set of optical components for performing each separate optical function on each optical signal. The separate optical functions reflect off separate non-overlapping areas on the spatial light modulator. The separate optical functions include optical switching, conditioning or monitoring functions.

Abstract: Apparatus and methods for removing jitter and stabilizing the feed back system of a torsional hinged device with minimal changes to the system. The stabilization is accomplished by introducing a selected amount of lateral motion (in addition to the rotational motion) by creating asymmetry in the oscillating device or the drive torque applied to the device.

Abstract: A light modulator assembly includes a substrate, a micro-electro mechanical semiconductor device (MEMS device) formed on the substrate, and a temperature control device coupled to the substrate and configured to maintain the MEMS device at or above an elevated threshold temperature.

Abstract: A light deflector comprises a first movable plate having a reflective surface, fixing portions, a pair of second movable plates located between the first movable plate and the fixing portions, a pair of first elastic members supporting the first movable plate so as to allow it to oscillate with respect to the second movable plates, a pair of second elastic members supporting the second movable plates so as to allow them to oscillate with respect to the fixing portions, and an actuator to oscillate the first movable plate. Oscillation axis of the first elastic members and oscillation axis of the second elastic members are located on the same axis. Stiffness of the second elastic members against oscillation is lower than stiffness of the first elastic members against oscillation.

Abstract: The invention relates to determining a matching between discrete optical elements, such as an SLM and a CCD, and continuous optical systems, subsystems and/or elements, such as Fourier lens and individual lenslet of lenslet arrays. Exemplary processing performed by such matched systems includes discrete transforms, such as the discrete Fourier transform, the discrete cosine transform and the discrete wavelet transform.

Abstract: An array of movable elements is arranged on a substrate. Each element has a cavity and a movable member to move through the cavity. The pressure resistance of the elements varies, allowing actuation signals to be manipulated to activate elements with different pressure resistance at different levels of the actuation signal.

Abstract: A display system (10) with reduced speckle has a light source (70) providing an illumination beam and a linear light modulator (85) having at least one linear array of light modulating devices for forming a modulated beam. The modulated beam has a plurality of orders of diffracted light. An obstructing element (82r,82g,82b) blocks a zeroeth order reflected light from the modulated beam. An angle-transforming optical assembly (30) anamorphically conditions the modulated beam. A scanning element (77) scans the modulated beam toward a display surface (90) for forming a two-dimensional image thereon.

Abstract: The interferometric modulator of the invention includes a transparent substrate (refractive index: n0) 12, an optical thin film (complex index of refraction: N1=n1?i·k1) 13 provided on the transparent substrate 12, and an absorber layer (complex index of refraction: Ns=ns?i·ks) 14 opposed to the optical thin film 13, the distance of a gap to the optical thin film 13 being variable, wherein the relation n1>n0, k1?0 and ns>n0 is satisfied.

Abstract: An image display apparatus is capable of recycling the “OFF” state light to increase the image brightness and contrast. The image display apparatus includes a light source, a spatial light modulator, a total internal reflection (TIR) prism, a projection lens set, and a reflector. The spatial light modulator selectively modulates a light beam from the light source to a first path to form a first path light beam or to a second path to form a second path light beam. The TIR prism disposed between the light source and the spatial light modulator is configured to allow the light beam to travel therethrough in a first direction and to be incident on the spatial light modulator. The projection lens set disposed between the modulator and a screen is configured to project the first path light beam to form an image on a screen. The reflector is configured to reflect the second path light beam to form a reflected light beam that is incident on the TIR prism in a second direction as a recaptured light beam.

Abstract: A miniaturized and highly integrated optical deflection apparatus is realized in which the number of electrodes for driving the optical deflection apparatus is reduced. The optical deflection apparatus implements a sheet member that is electrically floating and plural electrodes that are implemented on a substrate. The sheet member includes a member having a light reflection region and an electret member that is charged at a predetermined electric potential. The sheet member is tilted by applying an electric potential that is substantially equivalent to an electric potential of the electret member to one of the electrodes and applying a ground potential to another one of the electrodes.

Abstract: An electro-optic display comprises a layer (130) of a solid electro-optic material, at least one electrode disposed adjacent the layer (130) of electro-optic material, and a layer (180) of a lamination adhesive interposed between the layer (130) of electro-optic material and the electrode, the lamination adhesive (180) having a higher electrical conductivity in a direction perpendicular to the layer of lamination adhesive than in the plane of the layer.

Abstract: Disclosed herein a microelectromechanical device having first and second substrates that are bonded together with a gap formed therebetween. A plurality of functional members is disposed within the gap. The two substrates are bonded with a bonding agent that comprises an electrically conductive adhesive material.

Abstract: An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate and capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror capable of being selectively transitioned between an on-state position and an off-state position based at least in part on a bias voltage received by a conductive conduit. The apparatus also includes a conductive layer disposed inwardly from the at least one micro-mirror. In one particular embodiment, the conductive layer enables a conductive path for the bias voltage substantially inwardly from a periphery of the micro-mirror.

Abstract: A valve device formed of MEMS devices includes a generally-planar semiconductor substrate having one or more apertures to provide passages for fluids, gases, or light. Movable gate elements alternately cover or expose such apertures to either block or open such passages. Actuators in the form of miniature electromagnets repel or attract the gate elements to open or close the passages. The valve device may be used to control fluid delivery systems dispensing pressurized fluid, or in aspiration systems used to suction fluids. Alternatively, the gate elements may serve as light valves for selectively passing light from a light source through the substrate to a light-responsive surface.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: Disclosed herein are an electrostatic-type variable diffractive light modulator, which includes lower micromirrors that are provided on a glass substrate to be spaced apart from each other, and actuates upper micromirrors that are spaced apart from the substrate by an electrostatic actuating method, thus allowing the upper and lower micromirrors to diffract incident light entering a lower portion of the substrate, and a method of manufacturing the electrostatic-type variable diffractive light modulator.

Abstract: A product comprising a micromirror comprising a reflective layer and a treatment layer overlying the reflective layer, and wherein the treatment layer comprises Ti.

Abstract: A micromirror array lens includes a plurality of micromirrors, and reproduces a predetermined free surface by controlling rotation and/or translation of the micromirrors. The micromirror is controlled by control circuitry, upheld by a mechanical structure, and includes a reflective surface. The predetermined free surface of the lens is changed by controlling rotation and/or translation of the micromirrors. The micromirrors are arranged in one or more concentric circles to form the lens. The micromirror has a fan shape, a hexagonal shape, a rectangular shape, a square shape, or a triangle shape. The reflective surface of the micromirror is substantially flat. The control circuitry is constructed under the micromirrors by using semiconductor microelectronics technologies. The micromirrors are actuated by electrostatic and/or electromagnetic force. The reflective surface of the micromirror is made of materials with high reflectivity.

Abstract: An optical deflector includes a support, a frame-like outer movable plate positioned inside the support, two outer torsion bars connecting the support and outer movable plate, an inner movable plate positioned inside the outer movable plate, two inner torsion bars connecting the outer movable plate and inner movable plate, an outer driving coil on the outer movable plate, an outer movable plate driving magnetic field generator, an inner driving coil on the inner movable plate, an inner movable plate driving magnetic field generator, an outer driving coil wiring electrically connected to the outer driving coil, and an inner driving coil wiring electrically connected to the inner driving coil. The inner driving coil wiring extends on the outer movable plate so as to avoid a magnetic field generated by the outer movable plate driving magnetic field generator.

Abstract: A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.

Abstract: A micro-mirror array fabricated on one substrate is bonded to a second substrate that includes addressing electrodes and control circuitry. In one embodiment, the micro mirror array is fabricated from a substrate that is a single crystal material. There is enough area beneath the micro mirror array for electrodes and control circuitry, including memory buffers and a pulse width modulation array to be fabricated on the second substrate.

Abstract: A mirror assembly including an active lens and a reflective surface. The mirror assembly may change its refractive index when a voltage is applied to the active lens, thereby changing the field of view in the lens. Exemplary applications include a blind spot system in a motor vehicle, in which, upon sensing another vehicle in a driver's blind spot, the mirror assembly changes the driver's field of view to include the blind spot. Additional applications include a magnifying mirror for shaving or applying cosmetics.

Abstract: In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.

Abstract: An optical switching device contains an active stage coupled to a passive stage. The index of refraction in the active stage is variable to change the entry direction of a light beam into the passive stage, which has a fixed index of refraction. Because the light beam can enter the passive stage at different angles, the exit direction of the light beam from the passive stage can be changed. The resulting optical switch allows switching without any mechanical components.

Abstract: A movable mirror device comprises a deformable mirror; and a drive section for deforming the mirror into a concave shape and into a convex shape.

Abstract: An optically addressed extreme ultraviolet (EUV) modulator in which a spatial amplitude or phase pattern is provided to an EUV beam that is reflected from, or transmitted through the modulator. The modulator includes a modulator structure that includes a material with a high coefficient of thermal expansion. When a thermal impulse is incident on one part of the modulator, the resulting expansion changes the reflected phase or amplitude of the EUV beam from that part. A thermal pattern is imprinted on the modulator by absorption of a visible or ultraviolet pattern, resulting in a corresponding modulation of the EUV beam. A lithography system is based on the optically addressed EUV modulator.

Abstract: The present invention provides an optical scanning apparatus which has a light modulating element capable of changing the propagating state of light, an illuminating optical system for illuminating the light modulating element with light, and a scanning optical system for scanning the light from the light modulating element, the scanning optical system having a light deflector for selectively deflecting a beam of the light from the light modulating element which propagates in a predetermined direction, and which is made more compact than in the prior art.

Abstract: The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

Abstract: A compact and efficient optical illumination system featuring planar multi-layered LED light source arrays concentrating their polarized or un-polarized output within a limited angular range. The optical system manipulates light emitted by a planar light emitters such as electrically-interconnected LED chips. Each light emitting region in the array is surrounded by reflecting sidewalls whose output is processed by elevated prismatic films, polarization converting films, or both. The optical interaction between light emitters, reflecting sidewalls, and the elevated prismatic films create overlapping virtual images between emitting regions that contribute to the greater optical uniformity. Practical illumination applications of such uniform light source arrays include compact LCD or DMD video image projectors, as well as general lighting, automotive lighting, and LCD backlighting.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An electronic device of an embodiment of the invention is for at least partially displaying a pixel of a displayable image. The electronic device includes a first reflector and a second reflector that define an optical cavity therebetween, and which is selective of a visible wavelength at an intensity by optical interference. The electronic device also includes a charge-controlling mechanism to allow optical properties of the optical cavity to be varied by controlling a predetermined amount of charge stored on the first and the second reflectors. The visible wavelength and/or the intensity are thus variably selectable in correspondence with the pixel of the displayable image.

Abstract: An optical element comprising a periodic structure in which a refractive index is distributed periodically and a deforming portion, which mechanically deforms by an external action, wherein the deforming portion is integrally arranged with the periodic structure along the periodic direction of the periodic structure, and is constructed so as to change the periodicity of the periodic structure by deforming in the periodic direction of the periodic structure. A periodicity of the periodic structure (photonic band structure) in which the refractive index changes periodically can be controlled with a simple configuration.

Abstract: A new three-dimensional imaging device has been needed to overcome the problems of the prior arts that the used variable focal length lenses that are still slow, have small focal length variation and low focusing efficiency, and requires a complex mechanism to control it. The invented three-dimensional imaging system uses the variable focal length micromirror array lens. Since the micromirror array lens has lots of advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging device can get a real-time three-dimensional image with large depth range and high depth resolution.

Abstract: An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.

Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

Abstract: Subjects for the invention are to provide a light-modulating element having an elevated energy efficiency while preventing a decrease in contrast at low cost without using a display technique employing a waveguide or lightguide plate, and to provide a display element capable of producing high-quality display images and an exposure element capable of exposure treatment.

Abstract: A method for driving a light deflector the method includes turning over a direction of an electric field acting on the plate shape member, in an optional period. In the method, the light deflector deflects a beam incident on a light reflection area by displacing a plate shape member having the light reflection area with an electrostatic force. The light deflector includes a substrate, a plurality of control members, a fulcrum member, the plate shape member, and a plurality of electrodes.

Abstract: A reflection-type light modulating array element has: a substrate; a movable member provided with a beam body provided on the substrate through a first gap, a light reflector capable of rotational displacement by twisting of the beam body, and an electrically conducting part formed at least in a partial portion of the movable member; a lower electrode provided on a substrate side to face the movable member through the first gap, and an upper electrode provided on a side opposite to the lower electrode to face the movable member through a second gap, and thereby the movable member is between the lower electrode and the upper electrode, wherein a voltage is applied to the upper electrode, the lower electrode and the electrically conducting part to cause an rocking displacement of the light reflector and thereby deflect a reflection direction of a light.

Abstract: A digital micromirror device arrangement and devices using the arrangement are disclosed. The arrangement includes a digital micromirror device (DMD) having an active area, a cover plate disposed substantially adjacent to the DMD and having a thickness and a light blocking area having an aperture formed therein. The active area is adapted to receive incoming light and to reflect the incoming light as outgoing light. The light-blocking layer is offset from a plane of the active area by at least the thickness of the cover plate and is adapted to block light from passing therethrough. The aperture is dimensioned to produce a beam of outgoing light having desired dimensions.

Abstract: Disclosed is a light modulator having a digital micro blaze diffraction grating. In the light modulator, a fine protrusion is formed on an edge of a lower surface of a diffraction member so that a reflective surface inclines due to the fine protrusion when the diffraction member is drawn downward.

Abstract: Disclosed is a spatial light modulator using a near-field. The spatial light modulator includes a light permeable substrate which has a predetermined first refractive index and allows incident light passing through a side thereof from an external light source to permeate therethrough. A near-field forming member has a second refractive index smaller than the first refractive index, and is formed on the other side of the light permeable substrate to achieve total reflection of the incident light to form the near-field. Actuating elements each have a third refractive index larger than the second refractive index, and are formed on the other side of the light permeable substrate to be moved close to or away from the near-field, thereby transforming the near-field.

Abstract: Hydrogen cleave silicon process for light modulating mirror structure using single crystal silicon as the base cross-member. Existing processes use two critical alignment steps that can contribute to higher actuation voltages and result in lower manufacturing yields. The hydrogen cleave process simplifies the manufacturing process to one step: transferring a thin film of single crystal silicon to the CMOS substrate, resulting in minimal alignment error and providing large bonding area.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also an optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.