Abstract: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

Abstract: A variable semiconductor all-optical buffer and method of fabrication is provided where buffering is achieved by slowing down the optical signal using a control light source to vary the dispersion characteristic of the medium based on electromagnetically induced transparency (EIT). Photonic bandgap engineering in conjunction with strained quantum wells (QWs) and quantum dots (QDs) achieves room temperature operation of EIT. Photonic crystals are used to sharpen the spectral linewidths in a quantum well structure due to its density of states and in a quantum-dot structure caused by the inhomogeneity of the dot size, typically observed in state-of-the-art QD materials. The configuration facilitates monolithic integration of an optical buffer with an amplifier and control laser to provide advantages over other material systems as candidates for optical buffers.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus comprises a source for emitting electromagnetic radiation, a spatial modulator having multitude of modulating elements (pixels), adapted to being illuminated by said radiation, and a projection system creating an image of the modulator on the workpiece.

Abstract: A spatial light modulator apparatus for an optical microscope system including an optical head with a mounting flange for mounting the optical head to a port of the microscope, a DMD for generating a pattern image of light, a light source mount for receiving a source of illumination, and one or more optical elements for directing light from the source of illumination to the DMD and to direct the pattern image generated by the DMD to the microscope. A DMD controller has a digital input and is connected to the DMD for driving the individual micromirrors of the DMD to generate the pattern image. A pattern generation subsystem is configured to output pattern image data and a digital interface is connected between the digital input of the DMD controller and the pattern generation subsystem, the digital interface configured to provide a digital drive signal to the DMD controller corresponding to the pattern image data.

Abstract: An optical modulator is provided which can be manufactured by means of a simple process, and a display device, and a method of manufacturing same. The optical modulator comprises a first substrate having a movable reflective film that oscillates in accordance with the application of an electrostatic force; a light-transmitting second substrate disposed so as to oppose the first substrate and formed with a transparent electrode for applying the electrostatic force, in a position corresponding to the movable reflective film; and a cavity section, demarcated by the first substrate and the second substrate, for restricting the range of oscillation of the movable reflective film. By forming a movable reflective film by a portion of the substrate and determining the range of oscillation of the movable reflective film by the interval between the substrates, an optical modulator of high durability and high precision can be obtained.

Abstract: A plastically deformable element of a microelectromechanical device is strained so as to improve the lifetime of the microelectromechanical device. The element of the device can be strained by deforming the element into a deformed state and holding the element at the deformed state for a particular time period so as to acquire an amount of plastic deformation. The operation states of the device are calibrated according to the states before straining and the acquired plastic deformation. After then, the device is operated in the calibrated states.

Abstract: Disclosed herein is a micromirror package having a micromirror being attached to a supporting surface of a package substrate, and sealed between the package substrate and a package cover, whereas the micromirror array is placed offset the center of the supporting surface.

Abstract: A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.

Abstract: An optical modulation element is capable of forming a reflective diffraction grating in which heights of a plurality of elements each having a reflecting surface periodically change. The reflecting surfaces of at least one of the plurality of elements are driven in a direction of height by piezoelectric elements. The plurality of elements each having the surface as the reflecting surface are two-dimensionally arrayed by juxtaposing long sides. A rear surface side of an effective reflecting portion of each of the elements is fixed to the piezoelectric element.

Abstract: The present invention discloses a method and apparatus for removing the sacrificial materials in fabrications of microstructures using a vapor phase etchant recipe having a spontaneous vapor phase chemical etchant. The vapor phase etchant recipe has a mean-free-path corresponding to the minimum thickness of the sacrificial layers between the structural layers of the microstructure. This method is of particular importance in removing the sacrificial layers underneath the structural layers of the microstructure.

Abstract: The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.

Abstract: An electro-active lens is disclosed. The lens includes at least one electro-active cell to provide a lens having at least two focal lengths, the electro-active cell capable of adjusting its focal length based on voltages applied to the electro-active cell. The voltage is supplied by an alternating current source, including a flying capacitor circuit. The electro-active lenses reduce birefringence through the use of a single cholesteric liquid crystal electro-active cell.

Abstract: A MEMS scanning mirror device includes a scanning mirror, rotational comb teeth, stationary comb teeth, distributed serpentine springs, and anchors. The scanning mirror and the rotational comb teeth are driven by electrostatic force from stationary in-plane and/or out-of-plane teeth. The mirror is attached to the rotational comb structure by multiple support attachments. Multiple serpentine springs serve as the flexible hinges that link the movable structure to the stationary support structure.

Abstract: A system for and method of generating electromagnetic radiation in which the radiation has both a first and second utility. The electromagnetic radiation is modulated to produce electronically detectable variations to achieve the second utility, the variations not affecting the first utility. In one embodiment, the electromagnetic radiation is visible light. In this embodiment, the first utility is illumination and the second utility is the transmission of data. In another embodiment, the invention provides a lamp for generating visible light capable of providing illumination and transmitting data to a receiver. Any variations in the visible light resulting from the data transmission are imperceptible by a human eye regardless of the nature of the data being transmitted. In yet another embodiment, a power line carrier modem or wireless network may be used with the present invention to transmit information to the source.

Abstract: An optical device for discretionary treatment of channels of an optical beam, the optical device comprising: (a) a port for at least transmitting or receiving a first beam having a plurality of channels; (b) a wavelength discriminating device optically coupled to the port, the wavelength discriminating device adapted for at least one of receiving the first beam and diffracting the beam into a plurality of channel beams or receiving a plurality of channel beams and combining the channel beams into the first beam; and (c) an array of reflective elements, the reflective elements exceeding the number of channels, at least a portion of the reflective elements being optically coupled to the wavelength discriminating device to reflect the channel beams, at least two reflective elements of the portion corresponding to a particular channel beam, the at least two reflective elements being controllable to effect a desired output of the particular channel beam.

Abstract: An adaptive alignment technique provides precise control and active positioning in, preferably, two-dimensions of sub-millimeter-sized objects such as, in one application, spherical mircolenses through the application of electrophoretic forces in a microfluidic wells. A lithographically patterned microfluidic well and electrodes can be addressed to position or align a spherical microlens to a corresponding laser light beam. The motion of the microlens is preferably controlled using CMOS compatible voltages (3V–1 ?A) that are preferably applied to opposite electrodes in the microfluidic well, creating an electrical field in a well solution. By applying voltages to opposed electrode pairs, movement of spherical microlenses with sizes ranging from, most typically, 0.87 ?m to 40 ?m in directions parallel to the electrode surface is realized. Under a bias of 3 volts, the microspheres have electrophoretic velocities ranging from 13 to 16 ?m/s.

Abstract: An optical deflector includes a support, a frame-like outer movable plate positioned inside the support, two outer torsion bars connecting the support and outer movable plate, an inner movable plate positioned inside the outer movable plate, two inner torsion bars connecting the outer movable plate and inner movable plate, an outer driving coil on the outer movable plate, an outer movable plate driving magnetic field generator, an inner driving coil on the inner movable plate, an inner movable plate driving magnetic field generator, an outer driving coil wiring electrically connected to the outer driving coil, and an inner driving coil wiring electrically connected to the inner driving coil. The inner driving coil wiring extends on the outer movable plate so as to avoid a magnetic field generated by the outer movable plate driving magnetic field generator.

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.

Abstract: The micro grating structure is provided. The micro grating structure includes a substrate; a first supporting structure and a second supporting structure; a first structure post and a second structure post, wherein the first structure post and the second structure post are mounted on the substrate between the first supporting structure and the second supporting structure; and a grating mounted between the first structure post and the second structure post and comprising a first, a second, a third and a fourth torsion beams, wherein the first and the second torsion beams are connected to the first and the second supporting structures respectively, the third and the fourth torsion beams are connected to the first and the second structure posts respectively, and the first, the second, the third and the fourth torsion beams are twisted by an electrostatic force so as to enable the grating to be inclined at an angle with respect to the substrate.

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C.

Abstract: A method and apparatus are disclosed for increasing contrast in micromirror-based image display devices. As a result the displayed image is a more faithful reproduction of the original and is more pleasing to human perception than is possible with a low contrast display. The method and apparatus comprise a micromirror design and a modulation scheme for driving micromirrors with a combination of analog and digital techniques to achieve partial and full micromirror deflection. The analog techniques permit the mirrors to be deflected to positions intermediate between the resting position and the position of maximum deflection. These intermediate deflections appear as intermediate light levels in an image. Compared to digital modulation, the analog techniques provide an increase in the number of light levels that can be displayed by a system that is limited by its incoming data rate and maximum micromirror speed.

Abstract: A variable focal length lens comprising micromirrors with pure translation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with pure translation makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane by using Fresnel diffraction theory. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.

Abstract: Disclosed is a switch having a movable electrode to be separately driven downward and upward to secure signal transmission efficiency and insulation capability and operate for signal connection and disconnect at a high speed. The switch comprises a movable electrode, a fixed electrode positioned beneath the movable electrode, and a movable electrode driving fixed electrode positioned on both sides of the movable electrode with respect to a length wise direction thereof. Inside surfaces of the movable electrode, concave and convex parts are formed to arrange on both sides fixed electrodes having the corresponding concave and convex parts with a space.

Abstract: Apparatus for directing electromagnetic radiation (EMR) comprising an EMR source for producing discrete pulses of radiation, an EMR splitter, the EMR splitter providing a plurality of EMR transmission paths for received pulses, the EMR transmission paths terminating in an array, and optical means for receiving EMR emanating from the array and for directing said EMR.

Abstract: A projection display includes a light source, a spatial light modulator that receives a light from the light source, and an angle-selective coating disposed to receive the light beam from the spatial light modulator. The angle-selective coating is oriented at a non-zero inclination angle to the light beam. The angle-selective coating has a higher transmission for light that is incident upon the angle-selective coating at an incidence angle within an acceptance-angle deviation from a design incidence angle, than for light that is incident upon the angle-selective coating at an incidence angle greater than the acceptance-angle deviation from the design incidence angle. The projection display preferably includes a TIR (total internal reflection) prism disposed to reflect a light beam from the light source to the spatial light modulator, and to receive the light beam from the spatial light modulator. The angle-selective coating is preferably buried within the TIR prism.

Abstract: An image production apparatus, an image display apparatus and an image display method are disclosed which can reduce the ununiformity in luminance and color which appears on a display screen and can be formed compact. Also optical modulation device adjustment apparatus is disclosed which can detect and correct the ununiformity in modulation characteristic of a modulation device. The image display apparatus includes a light detection apparatus in addition to a light source section, an illumination optical system, an optical modulation section, a spatial filter, a light projection section and a screen. The light detection apparatus detects the dispersion of a modulation characteristic of each pixel element of GLV devices and the ununiformity in luminance and color displayed in accordance with an illumination condition. An optimum driving voltage for minimizing the ununiformity in color and luminance to be displayed is determined based on a signal detected by the light detection apparatus.

Abstract: Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

Abstract: Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each of which comprises a deflectable and reflective mirror plate. For enabling the deflection of the mirror plate, incisions are made within the area of the mirror plate with each incision being fully enclosed within the area of the mirror plate. The incisions collectively define a deformable hinge that is on the same plane as the mirror plate at the non-deflected state.

Abstract: An integrated driver for controlling operations of display systems having spatial light modulators that are operated in binary states is provided.

Abstract: In one aspect of the invention, an apparatus operable to provide optical signal processing includes an inner conductive layer including an at least substantially conductive material and a plurality of at least partially reflective mirror strips disposed outwardly from the inner conductive layer and operable to receive an input optical signal, wherein none of the plurality of strips has a width greater than 40 microns. At least some of the strips are operable to undergo a partial rotation in response to a control signal, the partial rotation resulting in a diffraction of the input optical signal wherein a majority of the diffracted input signal is communicated in one direction.

Abstract: A spatial light modulator apparatus for an optical microscope system including an optical head with a mounting flange for mounting the optical head to a port of the microscope, a DMD for generating a pattern image of light, a light source mount for receiving a source of illumination, and one or more optical elements for directing light from the source of illumination to the DMD and to direct the pattern image generated by the DMD to the microscope. A DMD controller has a digital input and is connected to the DMD for driving the individual micromirrors of the DMD to generate the pattern image. A pattern generation subsystem is configured to output pattern image data and a digital interface is connected between the digital input of the DMD controller and the pattern generation subsystem, the digital interface configured to provide a digital drive signal to the DMD controller corresponding to the pattern image data.

Abstract: A variable focal length lens comprising micromirrors with one degree of freedom rotation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with one degree of freedom rotation makes all lights scattered from one point of an object converge at one point of image plane by using rotation of micromirror. The micromirror has the same function as a mirror. Therefore, the reflective surface of the micromirror is made of metal, metal compound, multi-layered dielectric material, or other materials with high reflectivity. The actuating components control the rotational displacements of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known CMOS technologies can remove the loss in effective reflective area due to electrode pads and wires.

Abstract: A system and method 100 of using residual feedback in a control loop in a manner that substantially eliminates the steady state error in the predicted states that results from the mismatch in gain between the plant and the model. The control effort used by the estimator to predict the next position is modified to compensate for this difference in gain. By integrating the residual, and modifying the apparent control effort accordingly, the residual is driven to have a mean value of zero. When the residual goes to zero, by definition, the steady state error in the position state goes to zero; and to the extent that the model matches the plant, the velocity state also approaches zero such that the steady state error in the predicted states are substantially eliminated, allowing for improved control.

Abstract: In one embodiment, a delay circuit is configured to delay pixel information from an image source, such as a frame buffer. The delay circuit may be configured to delay the pixel information by an amount of time that would move a pixel projected on a surface by a distance less than a dimension of the pixel. A light modulator may modulate a light beam onto a surface, such as a display screen, based on the delayed pixel information. This advantageously allows for sub-pixel electronic alignment.

Abstract: A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.

Abstract: The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk.

Abstract: An electronically modulated prism, having a bulk crystal, a plurality of electrode pads formed on a top surface of the bulk crystal, and a common electrode formed on a bottom surface of the bulk crystal. The bulk crystal is optically isotropic with zero electric field applied thereto and optically anisotropic when subjected to a non-zero electric field. More specifically, the bulk crystal between each of the electrode pads and the common electrode has an index of fraction altered proportionally to the electric field applied thereto, such that an incident beam propagate through the crystal is modulated with an accumulated phase shift.

Abstract: A method and an apparatus for controlling exposure of a surface of a substrate in a process of structuring the substrate with light of a predetermined intensity are described, wherein the light is directed to the surface by means of a deflectable mirror. The intensity has a first maximum at a first deflection of the deflectable mirror, a first minimum at a second deflection of the deflectable mirror, a second maximum at a third deflection of the deflectable mirror, and a second minimum at a fourth deflection of the deflectable mirror. A signal representing the predetermined intensity, and a signal representing a threshold intensity are received, the threshold intensity being equal to or less than the intensity of the second maximum. It is determined whether the predetermined intensity is greater than the threshold intensity.

Abstract: A conformal retro-modulator optical apparatus. The apparatus includes an array of multiple quantum well devices disposed in a thin array. A plastic support element is bonded to the thin array, the plastic support element having a thickness greater that of the thin array. The plastic support element is preferably plastic at elevated temperatures above room temperature, thereby allowing the plastic support element and the thin array of multiple well device disposed therein to conform to a predetermined shape, yet being rigid at room temperature.

Abstract: A temporal optical correlator is disclosed. The example optical correlator includes a light source, a set of White cells and a micro-mirror array. The micro-mirror array and set of White cells cooperate to produce a correlated summed output signal. A method for processing signals using the example optical correlator is also disclosed.

Abstract: A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.

Abstract: A MEMS device is disclosed comprising: a substrate; a movable micromechanical element movable relative to the substrate; a connector and a hinge for allowing movement of the micromechanical element, wherein the connector is made of a material different than the hinge. In another embodiment of the invention, the connector has a conductivity greater than the hinge. In a further embodiment of the invention, the hinge provides at least 90% of the restoring force to the MEMS device, and the connector provides 10% or less of the restoring force. In a further embodiment of the invention, the connector and the hinge have different spring constants. In a still further embodiment of the invention, the connector experiences a lower strain at maximum deflection of the micromechanical element than the hinge.

Abstract: Compact systems with reduced insertion loss, and increased switch isolation and switching speed. The switching and/or routing devices utilize a separating sub-system, a switching and/or routing sub-system, and a recombining sub-system.

Abstract: In an optical switching apparatus having a mirror structure bonded to a substrate, the gap between the mirror structure and the substrate is controlled by mechanical standoffs placed between the mirror structure and the substrate. The mirror structure is bonded to the substrate using solder. The mechanical standoffs are formed from a material having a higher melting point than that of the solder. The mirror structure is bonded to the substrate under pressure at a temperature between the melting point of the solder and the melting point of the mechanical standoffs.

Abstract: A MEMS driver includes a digital control block receiving an external digital control word and generating digital control signals for use in controlling a reference current source. The reference current source generates a reference current to a high voltage output stage in response to the digital control signals. The high voltage output stage generates an output current to an integrator in response to the reference current. The integrator provides an output voltage to a drive electrode that electrostically controls the position of the MEMS structure.