Abstract: One or more on-chip VNCAP or MIMCAP capacitors utilize a variable MOS capacitor to improve the uniform capacitance value of the capacitors. This permits the production of silicon semiconductor chips on which are mounted capacitors having capacitive values that are precisely adjusted to be within a range of between about 1% and 5% of their design value. This optimization can be achieved by the use of a back-to-back connection between a pair of the variable MOS capacitors for DC decoupling. It involves the parallelization of on-chip BEOL capacitance of VNCAP and/or MIMCAP capacitors by the insertion in the FEOL of pairs of back-to-back variable MOS capacitors.

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract: According to an example embodiment, an apparatus is provided that produces a small-step switchable capacitor, which can have steps that are smaller in value than the smallest capacitor used in the system. In one embodiment, an input signal is connected to a switchable capacitor system that includes at least one and/or a plurality of small-step, switchable capacitors. In an example embodiment, a capacitor system may be provided that includes a first capacitance block coupled in series with a second capacitance block. In an example embodiment, the second capacitance block may include one or more switchable capacitors to provide a step in capacitance for the capacitor system between a first setting and a second setting using the one or more switchable capacitors. Also, in an example embodiment, the step in capacitance of the capacitor system may be determined based, at least in part, on a ratio of the capacitance of the second capacitance block to the capacitance of the first capacitance block.

Abstract: An array variable capacitor apparatus includes a line unit including a ground line and a signal line which operates as a lower electrode; and a plurality of plates which are engaged with the line unit to generate capacitance and which operate as upper electrodes, the plurality of plates being arranged in an array pattern and having different degrees of stiffness.

Abstract: A first electrode is integral to a beam having two ends securedly affixed to a support fixed onto a substrate. Residual stresses cause buckling of the beam so that the arch of the beam is close to at least one second electrode. The support can be formed by a ring fixed to the substrate by means of two fixing bases arranged on each side of the ring on a fixing axis passing through the centre of the ring, the beam being arranged on a diameter of the ring perpendicular to the fixing axis. The ring comprises at least one layer tensile stressed along the fixing axis. The beam can comprise at least one layer stressed in compression along a longitudinal axis of the beam. The second electrode can be integral to an additional support, the beam being arranged between the substrate and the second electrode.

Abstract: The devices presented herein are capacitive sensors with single crystal silicon on all key stress points. Isolating trenches are formed by trench and refill forming dielectrically isolated conductive silicon electrodes for drive, sense and guards. For pressure sensing devices according to the invention, the pressure port is opposed to the electrical wire bond pads for ease of packaging. Dual-axis accelerometers measuring in plane acceleration and out of plane acceleration are also described. A third axis in plane is easy to achieve by duplicating and rotating the accelerometer 90 degrees about its out of plane axis Creating resonant structures, angular rate sensors, bolometers, and many other structures are possible with this process technology. Key advantages are hermeticity, vertical vias, vertical and horizontal gap capability, single crystal materials, wafer level packaging, small size, high performance and low cost.

Abstract: The invention relates to a variable capacitance circuit which achieves reduction in both of distortion and current consumption and furthermore achieves requirements of high power handling capability, cost reduction, and downsizing of the circuit.

Abstract: A variable capacitance element of the invention includes: a columnar vibrator formed inside a cylindrical hole of a supporting wall; a first circular driving electrode disposed above the columnar vibrator; a first circular capacitive electrode disposed in the middle of the columnar vibrator; a second circular driving electrode disposed on the periphery of the cylindrical hole of the supporting wall; and a second circular capacitive electrode disposed on an inner side surface of the supporting wall. An electrostatic force is increased or decreased sequentially in the circumferential direction of the second driving electrode that is divided into four parts by sequentially increasing or decreasing the driving voltage in the circumferential direction of the second driving electrode. As a result, the columnar vibrator is rotated to change the electrostatic capacitance between the first capacitive electrode and the second capacitive electrode.

Abstract: A position indicator (100) has a variable capacitor 200, a resonant circuit (36) configured with a position indicating coil (13) and a resonant capacitor (15a), and a rod (11). The variable capacitor (200) has a flat disc-shaped dielectric (1) having two mutually opposite surfaces (1a, 1b), an electrode (2) provided on one surface (1a) of the dielectric (1), a hole (1c) extending between the two mutually opposite surfaces of the dielectric, a conductive portion electrically connecting both ends of the hole, and a conductive elastic member (3) provided near the other surface (1b) of the dielectric (1). The conductive elastic member (3) is arranged on one end of the rod (11).

Abstract: The variable capacitance (1) according to the invention is based on a novel principle: a dielectric fluid (20) is placed in the air gap constituted by two capacitor electrodes (12, 14), the fluid being able to be displaced in a direction and outside the cavity (10) formed between said two electrodes (12, 14). Advantageously, the dielectric fluid (20) is displaced according to the principle of communicating vessels, with the presence of a second cavity (30) in fluidic relation with the first cavity. Actuation electrodes (46, 48) in the second cavity (30) induce the deflection of a membrane (44) in order to modify the relative heights of fluidic liquid in the two cavities (10, 30).

Abstract: A method for manufacturing a semiconductor physical quantity sensor including a support substrate, a movable electrode, a fixed electrode is provided. The method includes the steps of: preparing a multi-layered substrate; forming a compression stress layer on a part of a surface of the semiconductor layer; forming a trench in the semiconductor layer; and releasing the movable electrode from the substrate by removing the insulation film. In the step of releasing, the part of the semiconductor layer, on which the compression stress layer is disposed, is cambered by the compression stress toward a direction apart from the substrate.

Abstract: A micro-electro-mechanical system varactor. The varactor includes a substrate, a lower bias conductor partially overlaying the substrate, a first signal conductor partially overlaying the substrate, a dielectric layer at least partially overlaying the first signal conductor, a support structure coupled to the substrate, and a flexible structure coupled to the support structure. The flexible structure is suspended over the substrate, includes an upper bias conductor overlaying at least part of the lower bias conductor and a top conductor overlaying at least part of the first signal conductor, configured to deflect in response to a bias voltage applied between the upper bias conductor and the lower bias conductor, and configured for separation between the top conductor and the dielectric layer by a varying separation distance dependent upon the bias voltage.

Abstract: Electronic component comprising at least one micro-electromechanical capacitor with adjustable capacitance comprising two electrodes free to move with respect to each other, and a control circuit (30) comprising measurement means (32) to measure the capacitance of the capacitor, means (35) of determining a capacitance difference between the measured capacitance of the capacitor and a set capacitance value, means (35 to 38) for injecting an electrical charge in a control electrode so as to create an electrostatic force capable of moving one of the two electrodes with respect to the other electrode and thus adjusting the capacitance of the capacitor, the injected electrical charge being determined as a function of the capacitance difference. This component is suitable for making an adjustable delay line, an adjustable quarter wave impedance transformer or for measuring the voltage, the power or the average intensity of an electrical signal.

Abstract: An RF MEMS tuneable arrangement, e.g. variable capacitor, having two or more tunable devices, e.g. variable capacitances, a coupling circuit arranged to couple the tunable devices together to provide a combined output, e.g. a combined capacitance, that is variable according to a tuning signal. The coupling circuit is reconfigurable to alter a response of the arrangement to changes in the tuning signal, to enable a broader range of applications, manufacturing cost reductions and more flexibility in design. The device can have a pivoted beam (30), actuable by a control signal, the beam having electrodes (40, 60) at either side of the pivot, and corresponding fixed electrodes (50, 70) facing the electrodes on the beam to provide a two or more variable devices such as switches or variable capacitors, arranged such that a given movement of the beam causes electrode separation in the same direction for the two or more switches or capacitors.

Abstract: A method of forming an actuator and a relay using a micro-electromechanical (MEMS)-based process is disclosed. The method first forms the lower sections of a square copper coil, and then forms a magnetic core member. The magnetic core member, which lies directly over the lower coil sections, is electrically isolated from the lower coil sections. The method next forms the side and upper sections of the coil, followed by the formation of an overlying cantilevered magnetic flexible member. Switch electrodes, which are separated by a switch gap, can be formed on the magnetic core member and the magnetic flexible member, and closed and opened in response to the electromagnetic field that arises in response to a current in the coil.

Abstract: A capacitor structure with variable capacitance, has at least one capacitor. More specifically, the structure has a capacitor electrode, a capacitor counter-electrode arranged opposite said capacitor electrodes at a variable capacitor electrode distance in relation hereto and at least one actuator for varying the capacitor electrode distance, and an actuator electrode for electrically controlling the actuator by which the variation in the capacitor electrode distance is effected. The the actuator electrode and one of the capacitor electrodes of the capacitor are arranged next to one another on a common carrier. Advantageously, the actuator electrode and the capacitor electrode arranged next to said actuator electrode are electrically isolated from one another. By this, the control circuit and function circuit are decoupled. Advantageously, the actuator is a piezoceramic bending transducer. The capacitor structure is deployed for example in a voltage-controlled oscillator (VCO).

Abstract: In an embodiment of the present invention is provided a varactor comprising a substrate, a bottom electrode positioned on a surface of the substrate, a tunable dielectric material positioned adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode, and an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

Abstract: Disclosed are apparatus and methodology for providing a precision laser adjustable (e.g., trimmable) thin film capacitor array. A plurality of individual capacitors are formed on a common substrate and connected together in parallel by way of fusible links. The individual capacitors are provided as laddered capacitance value capacitors such that a plurality of lower valued capacitors corresponding to the lower steps of the ladder, and lesser numbers of capacitors, including a single capacitor, for successive steps of the ladder, are provided. Precision capacitance values can be achieved by either of fusing or ablating selected of the fusible links so as to remove the selected subcomponents from the parallel connection. In-situ live-trimming of selected fusible links may be performed after placement of the capacitor array on a hosting printed circuit board.

Abstract: A micro-electromechanical variable capacitor with first and second capacitor plates spaced apart to define a gap therebetween. The first plate has two control electrodes and an active electrode. The second plate is movable relative to first plate when a voltage is applied to produce a potential difference across the control electrode and the second capacitor plate. This has the effect of varying the capacitance of the capacitor. The facing surface of at least one of the plates is formed in such a way that it has a roughened surface. The degree of roughness is sufficient to prevent the facing surfaces adhering together through stiction.

Abstract: There is provided a variable device circuit according to the present invention, including: a substrate; at least one movable switch device formed on a first principal surface of the substrate; at least one fixed capacitor device formed on the first principal surface of the substrate; at least one variable capacitor device formed on the first principal surface of the substrate; at least one variable inductor device formed on the first principal surface of the substrate; and wiring lines for electrically connecting the devices to one another, the wiring lines being formed on the first principal surface of the substrate; wherein electrical connections among the devices can be selected by operation of the movable switch device, whereby achieving stable, low-loss circuit characteristics with lower manufacturing cost.

Abstract: An embodiment of the present invention provides a device, comprising a multilayered tunable dielectric capacitor, wherein said multilayers of tunable dielectric are adapted to be DC biased to reduce the dielectric constant; and wherein the DC bias is arranged so that the number of layers of tunable dielectric biased positively is equal to the number of layers of tunable dielectric biased negatively.

Abstract: An embodiment of the present invention provides a method of modeling electrostrictive effects and acoustic resonances in a tunable capacitor, comprising adjusting empirically the characteristic impedances and complex propagation constants to account for actual process variations in manufacturing of said tunable capacitor; adjusting empirically the characteristic impedances and complex propagation constants to account for end-effects in the directions transversal to the wave direction; and modeling the electrostrictive effect by dividing a BST layer of said tunable capacitor into thin layers or slices with each slice's thickness representing a small fraction of an acoustic wavelength and injecting at each junction between slices, an acoustic “current” proportional to the electrical current through said voltage tunable capacitor.

Abstract: A capacitive device comprising at least one first and one second comb, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb including a face opposite a face of a finger of the second comb wherein the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction of displacement of the combs, the plane being defined by the second and third directions perpendicular to the direction, and perpendicular to each other.

Abstract: A charge storage device having a capacitance that is variable by alteration of the relative permittivity of the dielectric positioned between conductive electrodes within the device. The device consists of two conductive plates sandwiching a conductive grid, typically embedded within a dielectric material. Charging the grid with a negative or positive potential changes the value of the dielectric constant (the relative permittivity) and thereby changes the capacitance of the device.

Abstract: A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.

Abstract: A method of driving a parallel-plate variable micro-electromechanical capacitor includes establishing a first charge differential across first and second conductive plates of a variable capacitor in which the first and second conductive plates are separated by a variable gap distance, isolating the first and second plates for a first duration, decreasing the charge differential to a second charge differential which is less than the first charge differential and in which the second charge differential corresponds to a second value of the variable gap distance.

Abstract: A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

Abstract: In a first aspect, a first method of adjusting capacitance of a semiconductor device is provided. The first method includes the steps of (1) providing a transistor including a dielectric material having a dielectric constant of about 3.9 to about 25, wherein the transistor is adapted to operate in a first mode to provide a capacitance and further adapted to operate in a second mode to change a threshold voltage of the transistor from an original threshold voltage to a changed threshold voltage such that the changed threshold voltage affects a capacitance provided by the transistor when operated in the first mode; and (2) employing the transistor in a circuit. Numerous other aspects are provided.

Abstract: A high precision microelectromechanical capacitor with programmable voltage source includes a monolithic MEMS device having a capacitance actuator, a trim capacitor, and a high precision, programmable voltage source. The trim capacitor has a variable capacitance value, preferably for making fine adjustments in capacitance. The capacitance actuator is preferably mechanically coupled to and electrically isolated from the trim capacitor and is used to control the capacitance value of the trim capacitor. The capacitance adjustment of the trim capacitor is non-destructive and may be repeated indefinitely. The trim capacitor may be adjusted by mechanically changing the distance between its electrodes. The programmable voltage source provides a highly accurate and stable output voltage potential corresponding to control signals for controlling the capacitance actuator.

Abstract: According to one aspect, the subject matter described herein includes a MEMS fixed capacitor and a method for fabricating the MEMS fixed capacitor. The MEMS fixed capacitor can include a first stationary, capacitive plate on a substrate. Further, the MEMS fixed capacitor can include a non-conductive, stationary beam suspended above the substrate. The MEMS fixed capacitor can also include a second stationary, capacitive plate spaced a predetermined distance from the first stationary, capacitive plate for producing a predetermined capacitance between the capacitive plates.

Abstract: A variable IC capacitor includes a semiconductor layer doped to contain mobile charge carriers. Capacitor electrodes C1 and C2 are disposed adjacent to each other on the layer's surface, gate electrodes G1 and G2 are disposed on opposite sides of C1 and C2, and source and sink electrodes are disposed on opposite sides of G1 and G2. Potentials are applied to the electrodes as needed to inject and then confine a finite charge into the region under C1 and C2. A drive voltage V applied between C1 and C2 causes the charge packet to move back and forth beneath them, such that the effective capacitance C seen by drive voltage V is given by C=Q/V, where Q is the magnitude of the charge packet.

Abstract: A composite electroactive material having a plurality of particle cores, each particle core surrounded by a polymer covering having one or more strands of an electroactive polymer. In one embodiment, the particle cores have a relatively small size, e.g., between about 10 and 50 nm, and include a material having a relatively large dielectric constant, e.g., greater than about 30. Each polymer strand includes an electroactive elastomer that is bonded to the surface of the corresponding particle core by a linker. Representative examples of the particle core material, elastomer, and linker are titanium dioxide, polybutadiene, and a phosphonate group, respectively.

Abstract: A variable capacitor includes a supporting substrate and a plurality of variable capacitance elements, and bias lines. The plurality of variable capacitance elements is formed on the supporting substrate, each of which is composed of a lower-laid first electrode layer, an upper-laid second electrode layer, and a dielectric layer sandwiched therebetween whose dielectric constant changes with direct current bias voltage. In the variable capacitance elements which are adjacent to each other, the second electrode layer of a first variable capacitance element and the first electrode layer of a second variable capacitance element are electrically connected in series with each other. The bias lines each include at least one of resistance component and inductance component for applying the direct current bias voltage. The variable capacitance elements are each connected to the bias lines.

Abstract: A tunable capacitor using an electrowetting phenomenon includes a first electrode; a second electrode which is spaced apart from the first electrode and faces the first electrode; a fluidic channel which is disposed between the first electrode and the second electrode; a first insulating layer which is disposed between the first electrode and the fluidic channel; and a conductive fluid which is disposed in the fluidic channel and moves along the fluidic channel when a direct current (DC) potential difference occurs between the first and second electrodes. Accordingly, it is possible to fabricate the tunable capacitor with the simplified fabrication process, good reliability and durability, and no restriction on the tuning range.

Abstract: An exemplary embodiment of the present invention described and shown in the specification and drawings is a transceiver with a receiver, a transmitter, a local oscillator (LO) generator, a controller, and a self-testing unit. All of these components can be packaged for integration into a single IC including components such as filters and inductors. The controller for adaptive programming and calibration of the receiver, transmitter and LO generator. The self-testing unit generates is used to determine the gain, frequency characteristics, selectivity, noise floor, and distortion behavior of the receiver, transmitter and LO generator. It is emphasized that this abstract is provided to comply with the rules requiring an abstract which will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or the meaning of the claims.

Abstract: A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate to the one side of the wafer using an adhesive bonding agent, the substrate overlying the patterned layer of material; selectively removing portions of the wafer from the side opposite the one side to define stationary and movable MEMS elements; and selectively removing the adhesive bonding agent to release the movable MEMS element, at least a portion of the layer of material being disposed so as to be attached to the movable MEMS element.

Abstract: A method is provided of continuously varying the capacitance of a MEMS varactor having a cantilever assembly mounted on a base portion, the cantilever assembly having a first capacitance plate and a dielectric element mounted thereon, and the base portion having a second capacitance plate mounted thereon. The method includes applying a first actuation voltage to deform the cantilever assembly until the dielectric element contacts the second capacitance plate leaving a gap therebetween, and applying a second actuation voltage larger than the first actuation voltage to further deform the cantilever assembly to reduce the gap between the dielectric element and the second capacitance plate.

Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.

Abstract: According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes.

Abstract: A capacitive pressure sensor includes: a conductive silicon substrate having a diaphragm; an insulating substrate having a fixed electrode, the insulating substrate overlapping the conductive silicon substrate so as to be bonded thereto; and a sealed chamber formed between the diaphragm and the fixed electrode. A conductive silicon member is buried in a part of the insulating substrate, a portion of the conductive silicon member is exposed toward a surface of the insulating substrate facing the sealed chamber so as to form the fixed electrode, and another portion of the conductive silicon member is exposed toward the other surface of the insulating substrate not facing the sealed chamber so as to form a lead electrode of the fixed electrode.

Abstract: A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal is filtered by a digital isolation technique so that the signal reaches the tunable elements with very low noise. The low noise digital signals are then converted to analog control voltages. The direct D/A conversion is accomplished by a special D/A converter which is manufactured as an integral part of a substrate. This D/A converter in accordance with the invention may consist of a resistor ladder or a directly digitally controlled capacitor. The direct digitally controlled capacitor may be a cantilevered type capacitor having multiple separate electrodes or sub-plates representing binary bits that may be used to control the capacitor.

Abstract: A laminated variable capacitor including: input-output terminals for inputting an alternating-current signal and outputting an output signal; and controlling terminals for controlling a capacitance value for voltage of the input alternating-current signal; wherein a total area of external electrodes for input and output connected to said input-output terminals is larger than a total area of external electrodes for control connected to said controlling terminals, or the external electrodes for input and output connected to said input-output terminals are different in structure from the external electrodes for control connected to said controlling terminals.

Abstract: A digital variable capacitor package is provided as having a ground plane disposed on predetermined portion of the top surface of a substrate. An elongated signal electrode may also be disposed on the substrate and including a first end defining an input and a second end extending to a substantially central region of the top surface of the substrate. This elongated signal electrode is disposed to be electrically isolated from the ground plane. A number of elongated cantilevers are disposed on the substrate and each include first ends coupled to the second end of the signal electrode and each further include second ends suspended over different predetermined portions of the ground plane. In operation, one or more of the cantilevers may be actuated to move portion thereof into close proximity to the ground plane for providing one or more discrete capacitance values.

Abstract: A tunable element in the microwave frequency range is described that may include one or more tunable elements that are directly digitally controlled by a digital bus connecting a digital control circuit to each controlled element. In particular, each digital signal is filtered by a digital isolation technique so that the signal reaches the tunable elements with very low noise. The low noise digital signals are then converted to analog control voltages. The direct D/A conversion is accomplished by a special D/A converter which is manufactured as an integral part of a substrate. This D/A converter in accordance with the invention may consist of a resistor ladder or a directly digitally controlled capacitor. The direct digitally controlled capacitor may be a cantilevered type capacitor having multiple separate electrodes or sub-plates representing binary bits that may be used to control the capacitor.

Abstract: A capacitor array may include a bottom electrode, a plurality of top electrodes, at least one dielectric medium and a plurality of switching mechanisms. Each switching mechanism may separably electronically connect two or more top electrodes. The at least one dielectric medium may include a plurality of discrete capacitors each in contact with a top electrode and the bottom electrode.

Abstract: Capacitors 10, 20, 40, 50, 70, 80) having a fluid dielectric material that is transported or undergoes a phase change are disclosed. The dielectric medium change results in a change in the total dielectric constant of the material between the electrodes (12, 14, 72, 74, 81, 82), thus changing the capacitance of the capacitors. Transporting or phase changing the dielectric fluids into and out of a the electric field of the capacitor, changes the effective dielectric constant and the capacitance of the capacitor.

Abstract: A capacitive sensor having a first and a second polymeric conductor are embedded within a non conducting body, wherein the body maintains a fixed separation distance between the first and the second polymeric conductor. The body can include a non conducting web, wherein the web substantially precludes variation in the spacing of the polymeric conductors during use in the intended operating environment.

Abstract: A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

Abstract: An adjustable capacitor has a tubular housing including a first insulating section and a second section having a conductive portion at the exterior surface thereof forming an external terminal. An external terminal conductor is joined to an exterior terminal portion of the capacitor housing, for connecting the terminal to an external circuit. The external terminal conductor has a thickness, over its length, not less than a thickness of the housing. The external terminal conductor can have a width greater than the width of the housing, and a thickness not appreciably less than the average thickness of the housing. The external terminal conductor can be press-fitted onto the housing to form a secure electrical connection, attached by another suitable means, or integrally formed therewith.

Abstract: A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.