By Varying Effective Area Of Electrode Patents (Class 361/292)
  • Patent number: 9019687
    Abstract: The present subject matter relates to the use of current splitting and routing techniques to distribute current uniformly among the various layers of a device to achieve a high Q-factor. Such current splitting can allow the use of relatively narrow interconnects and feeds while maintaining a high Q. Specifically, for example a micro-electromechanical systems (MEMS) device can comprise a metal layer comprising a first portion and a second portion that is electrically separated from the first portion. A first terminus can be independently connected to each of the first portion and the second portion of the metal layer, wherein the first portion defines a first path between the metal layer and the first terminus, and the second portion defines a second path between the metal layer and the first terminus.
    Type: Grant
    Filed: June 7, 2012
    Date of Patent: April 28, 2015
    Assignee: Wispry, Inc.
    Inventors: Arthur S. Morris, III, Saravana Natarajan, Dana DeReus
  • Patent number: 9019686
    Abstract: A variable capacitor device is disclosed in which the capacitive tuning ratio and quality factor are increased to very high levels, and in which the capacitance value of the device is tuned and held to a desired value with a high level of accuracy and precision using a laser micromachining tuning process on suitably designed and fabricated capacitor devices. The tuning of the variable capacitor devices can be performed open-loop or closed-loop, depending on the precision of the eventual capacitor value needed or desired. Furthermore, the tuning to a pre-determined value can be performed before the variable capacitor device is connected to a circuit, or alternatively, the tuning to a desired value can be performed after the variable capacitor device has been connected into a circuit.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: April 28, 2015
    Assignee: Corporation for National Research Initiatives
    Inventors: Michael A. Huff, Mehmet Ozgur
  • Patent number: 9013857
    Abstract: Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.
    Type: Grant
    Filed: December 17, 2012
    Date of Patent: April 21, 2015
    Assignee: International Business Machines Corporation
    Inventors: Daniel C. Edelstein, Anthony K. Stamper
  • Patent number: 9007740
    Abstract: A rotary capacitor which changes electrostatic capacity by changing a mutually opposite area of a pair of electrodes which opposes each other, includes a rotary shaft which can rotate around a central axis, wherein the pair of electrodes includes a first electrode plate which protrudes from a circumferential surface of the rotary shaft, and a second electrode plate which may be separated in a direction along the central axis with respect to the first electrode plate and may be disposed so as to oppose the first electrode plate, and a notch which penetrates in a plate thickness direction may be formed on an edge portion of the first electrode plate.
    Type: Grant
    Filed: January 30, 2013
    Date of Patent: April 14, 2015
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventor: Yutaka Touchi
  • Patent number: 8988849
    Abstract: A varactor includes a first PTC region, which comprises a ceramic material with a positive temperature coefficient with respect to the resistance. The varactor also includes a capacitor region that includes a first electrode, a second electrode, and a first dielectric layer arranged between the first electrode and the second electrode. The first PTC region and the capacitor region are connected thermally conductively to one another. The capacitance of the capacitor region can be changed by applying a bias to the first PTC region, the capacitor region or to the first PTC region and the capacitor region.
    Type: Grant
    Filed: December 21, 2010
    Date of Patent: March 24, 2015
    Assignee: EPCOS AG
    Inventor: Andrea Testino
  • Patent number: 8891222
    Abstract: A capacitive transducer (1) comprises a polymer film (2) having a first surface and a second surface, a first electrically conductive layer (3) arranged on the first surface of the polymer film (2), and a second electrically conductive layer (3) arranged on the second surface of the polymer film (2). The polymer film (2) is at least partly made from a material having a molecular weight which is at least 21,000 g/mol. The inventors have surprisingly found that silicone polymer materials with high molecular weights, such as liquid silicone rubbers (LSR) or high temperature vulcanizing (HTV) elastomers, have high electrical breakdown strengths, even though technical data sheets from manufacturers state almost identical electrical breakdown strengths similar to that of RTV-2 elastomers. Using such materials in capacitive transducers allows high electrical fields to be applied to transducers without risking electrical breakdown, thereby increasing performance of transducers.
    Type: Grant
    Filed: February 14, 2012
    Date of Patent: November 18, 2014
    Assignee: Danfoss A/S
    Inventor: Mohamed Yahia Benslimane
  • Patent number: 8755166
    Abstract: A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. The fixed electrode is formed from a plurality of electrode members in a vacuum casing. The movable electrode is formed from a plurality of electrode members arranged in gaps formed between the electrode members of the fixed electrode in the vacuum casing. The movable electrode shaft supports the movable electrode. Capacitance appearing between the movable electrode and the fixed electrode is varied by rotation of the movable electrode shaft. The magnetic flux receiving unit rotates the movable electrode shaft in the vacuum casing. The magnetic flux generating unit is located outside the vacuum casing and rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: June 17, 2014
    Assignee: Meidensha Corporation
    Inventors: Eiichi Takahashi, Toshimasa Fukai, Toshinori Tatsumi, Yuichi Nishikiori, Kaoru Kitakizaki, Toru Tanimizu
  • Patent number: 8749946
    Abstract: A vacuum capacitor includes a fixed electrode, a movable electrode, a movable electrode shaft, a magnetic flux receiving unit, a magnetic flux generating unit and a capacitance control unit. A plurality of electrode members in a vacuum casing form the fixed electrode. The fixed electrode is divided into a plurality of fixed electrodes, and each fixed electrode is lead outside the vacuum casing and electrically connected to each other in series. A plurality of electrode members arranged in gaps between the electrode members of the fixed electrode form the movable electrode. Rotating the movable electrode shaft, which supports the movable electrode, varies capacitance between the movable electrode and the fixed electrode. The magnetic flux receiving unit rotates the movable electrode shaft. The magnetic flux generating unit, located outside the vacuum casing, rotates the magnetic flux receiving unit by magnetic attraction. The capacitance control unit rotates the magnetic flux generating unit.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: June 10, 2014
    Assignee: Meidensha Corporation
    Inventors: Eiichi Takahashi, Toshimasa Fukai, Toshinori Tatsumi, Yuichi Nishikiori, Kaoru Kitakizaki, Toru Tanimizu
  • Patent number: 8749947
    Abstract: The present invention can easily adjust capacitance of a vacuum capacitor while maintaining a vacuum state in a vacuum chamber of the vacuum capacitor. A fixed electrode 4 is formed by arranging a plurality of flat electrode members 5 in layers at a certain distance in an axial direction of a vacuum chamber 1b. A movable electrode 7 is formed by arranging a plurality of flat electrode members 8 in layers at a certain distance in the axial direction of the vacuum chamber 1b and fixing the electrode members 8 to a movable electrode shaft 9. By rotation of the movable electrode shaft 9, each electrode member 8 is inserted into and extracted from a gap between the electrode members 5 of the fixed electrode 4 in noncontact with the electrode members 5 of the fixed electrode 4. A magnetic flux receiving portion 106b is fixed to a seal member 102 side of a disk member 106a that is provided at the movable electrode shaft 9.
    Type: Grant
    Filed: March 28, 2011
    Date of Patent: June 10, 2014
    Assignee: Meidensha Corporation
    Inventors: Eiichi Takahashi, Toshimasa Fukai, Toshinori Tatsumi, Yuichi Nishikiori, Kaoru Kitakizaki
  • Patent number: 8665579
    Abstract: There is proved a variable capacitor that includes a substrate, a signal line disposed on a surface of the substrate for feeding a signal, a ground electrode disposed on the surface, and a movable electrode opposed the signal line and the ground electrode, the movable electrode operable to move toward and away from the signal line and the ground electrode. The movable electrode can be displaced by an electrostatic attraction between the movable electrode and the signal line and between the movable electrode and the signal line. An amount of displacement of the movable electrode varies according to an amount of the voltage which generates the electrostatic attraction.
    Type: Grant
    Filed: February 5, 2009
    Date of Patent: March 4, 2014
    Assignee: Fujitsu Limited
    Inventors: Takeaki Shimanouchi, Masahiko Imai, Xiaoyu Mi, Satoshi Ueda
  • Patent number: 8499464
    Abstract: Method for detecting an angle of rotation of an angle sensor arrangement including at least one first element and one second element, which are designed and arranged such that they can be rotated relative to one another, and at least one capacitor element whose capacitance changes on the basis of the angle of rotation, the angle of rotation being detected or determined directly or indirectly on the basis of this capacitance of the capacitor element, the capacitor element having at least one first band, and the angle of rotation being detected or determined at least on the basis of the positioning of the first band.
    Type: Grant
    Filed: July 8, 2009
    Date of Patent: August 6, 2013
    Assignee: Continental Teves AG & Co. oHG
    Inventors: Manfred Goll, Hilmar Müller, Udo Hilgenberg
  • Patent number: 8400752
    Abstract: An embodiment of a tunable capacitor can include a plurality of capacitors connected in series where at least two capacitors of the plurality of capacitors share a common electrode where the at least two capacitors are in lateral proximity and a bias that is capable of being applied to the at least two capacitors whereby the at least two capacitors vibrate in opposite phase to each other when the bias and an RF signal is applied to the at least two capacitors.
    Type: Grant
    Filed: March 23, 2011
    Date of Patent: March 19, 2013
    Assignee: Research In Motion RF, Inc.
    Inventors: James Oakes, James Martin
  • Patent number: 8385045
    Abstract: A variable capacitor and a control method thereof capable of responding to applications of electronic apparatuses including various electronic devices and communication mobile devices. The variable capacitor includes a pair of electrodes formed so as to sandwich a ferroelectric material layer, in which polarization processing higher than a coercive field in hysteresis characteristics of polarization has been performed to the ferroelectric material layer, and the capacitance can be varied in accordance with a control voltage applied to the electrodes.
    Type: Grant
    Filed: February 12, 2009
    Date of Patent: February 26, 2013
    Assignee: Sony Corporation
    Inventors: Kazutaka Habu, Masayoshi Kanno, Toshiaki Yokota, Makoto Watanabe
  • Patent number: 8379364
    Abstract: A construction system for a capacitive sensor comprises a source electrode (210), a screening element (220) with partition (221) which forms a first and a second screened chamber (220.a, 220.b), a field sensor (230), a circuit (250), a spacing member (260) with a through-duct, and a screw (270). The partition (221) is provided with a hole (224) and said spacing member (260) is positioned inside the first chamber (220.a) with the axis (260.y) of the duct arranged coaxial with the axis (224-y) of said hole (224). The same spacing member (260) is positioned between the proximal face (223) of the partition (221) and the distal face (232) of the field sensor (230) and said field sensor (230) is provided with a threaded hole (233). The head (271) of the screw (270) is arranged inside the second chamber (220.
    Type: Grant
    Filed: October 1, 2009
    Date of Patent: February 19, 2013
    Assignee: Green Seas Ventures, Ldt.
    Inventor: Lorenzo Peretto
  • Patent number: 8363379
    Abstract: Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.
    Type: Grant
    Filed: August 18, 2010
    Date of Patent: January 29, 2013
    Assignee: International Business Machines Corporation
    Inventors: Daniel C. Edelstein, Anthony K. Stamper
  • Patent number: 8339764
    Abstract: A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.
    Type: Grant
    Filed: May 7, 2009
    Date of Patent: December 25, 2012
    Assignee: NXP B.V.
    Inventors: Peter G. Steeneken, Hilco Suy, Martijn Goossens
  • Patent number: 8325460
    Abstract: Disclosed are a humidity sensor and a fabricating method thereof. The humidity sensor includes a substrate, an anodic aluminum oxide layer formed on the substrate and having a plurality of holes, and electrodes formed on the anodic aluminum oxide layer, in order to improve sensitivity and accuracy of the humidity sensor. Further, the fabricating method of a humidity sensor includes preparing an aluminum substrate, forming an anodic aluminum oxide layer by oxidizing the aluminum substrate, and forming electrodes on the anodic aluminum oxide layer.
    Type: Grant
    Filed: November 13, 2009
    Date of Patent: December 4, 2012
    Assignee: Postech Academy-Industry Foundation
    Inventors: Hyun-Chul Park, Hye-Jin Kim, Woon-Bong Hwang, Young-Deuk Kim, Kun-Hong Lee
  • Patent number: 8320100
    Abstract: A varactor element, includes: a dielectric layer; a pair of signal electrodes, each disposed on one face of the dielectric layer and facing each other; and a pair of control electrodes, each disposed on another face of the dielectric layer and facing each other parallel to a direction intersecting a direction of the pair of signal electrodes facing each other.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: November 27, 2012
    Assignee: Sony Corporation
    Inventors: Masayoshi Kanno, Kazutaka Habu, Noritaka Sato
  • Publication number: 20120293907
    Abstract: The present invention relates to a variable-area capacitor for a micromechanical sensor, a micromechanical comb grid capacitor accelerometer and a micromechanical comb grid capacitor gyroscope. Among them, the variable-area capacitor structure comprises of a movable and a fixed electrodes in each capacitor unit; a front surface of aforesaid movable electrode is parallel to that of aforesaid fixed electrode; the front surface of aforesaid movable electrode is in a rectangular shape, and the front surface of the fixed electrode is in a triangular or sawteeth shape or the front surface of the movable electrode is in a triangular or sawteeth shape, and the front surface of the fixed electrode is in a rectangular form; the triangular front surface is only overlapped with one long side of aforesaid rectangular front surface. Micromechanical sensors with variable-area capacitor structures of the invention can adjust elasticity coefficient as compared with present technology.
    Type: Application
    Filed: June 23, 2010
    Publication date: November 22, 2012
    Applicant: Zhejiang University
    Inventors: Zhonghe Jin, Shichang Hu, Xia Zhang, Huijie Zhu
  • Patent number: 8300383
    Abstract: A variable capacitor includes: a dielectric sheet disposed on a substrate and covering an electrode pattern on the substrate; a resilient conductive supporting seat mounted on the dielectric sheet for supporting an insulating operating cap on a central portion thereof; a conductive cover body covering the conductive supporting seat and permitting the operating cap to extend outward; and a biasing member for biasing the central portion of the conductive supporting seat to move away from the substrate. The cover body is connected electrically to the conductive supporting seat and a conductive contact on the substrate. When the operating cap is depressed, the operating cap forces a contact portion of the conductive supporting seat to deform such that a surface area of the deformed contact portion that contacts the dielectric sheet is increased, thereby changing the capacitance between the conductive supporting seat and the electrode pattern.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: October 30, 2012
    Inventor: Jung-Shih Tsai
  • Patent number: 8198538
    Abstract: A capacitive device is provided. The capacitive device includes a first electrode and a second electrode below the first electrode and spaced apart from the first electrode, wherein at least one of the first electrode and the second electrode includes a plurality of conductive step sections, the plurality of conductive step sections having different heights. The capacitive device also includes an insulating region between the first electrode and the second electrode; and at least one slot formed on one of the first electrode and the second electrode.
    Type: Grant
    Filed: February 25, 2009
    Date of Patent: June 12, 2012
    Assignee: Industrial Technology Research Institute
    Inventors: Chien-Min Hsu, Min-Lin Lee, Shinn-Juh Lai, Huey-Ru Chang, Ray-Fong Hong
  • Patent number: 8194386
    Abstract: A tuneable capacitor arrangement for RF use has two series coupled MEMS variable capacitors (C1,C2;C4,C5,C6,C7), varied according to a control signal. The series coupling enables the capacitor to withstand a higher voltage since this is shared by the individual capacitors in a series coupled arrangement. An increase in size of electrodes for each capacitor is compensated by a reduction in size of the springs supporting movable electrodes. These springs can have a larger stiffness value since the capacitance is larger. This means shorter springs, which can also result in a reduction in problems of stiction, resistance, and slow switching. The capacitances have a fixed and a movable electrode, with the RF signal coupled to the fixed electrode to avoid the springs needing to carry an RF signal. This can reduce the problems of inductance and resistance in the springs.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: June 5, 2012
    Assignee: EPCOS AG
    Inventors: Peter G. Steeneken, Kevin R. Boyle, Antonius J. M. De Graauw, Theodoor G. S. M. Rijks, Jozef T. M. Van Beek
  • Publication number: 20120062338
    Abstract: An electrostatic capacitance element includes: a dielectric layer; and a pair of electrodes or a plurality of pairs of electrodes having one electrode formed on one surface of the dielectric layer and the other electrode formed on the other surface of the dielectric layer by interposing the dielectric layer therebetween. The one electrode and the other electrode are arranged such that longitudinal directions of the electrodes intersect with each other. In addition, the one electrode and/or the other electrode have at least two electrode widths. In a case where the one electrode is formed to be relatively shifted with respect to the other electrode, an area of the electrodes overlapping in a thickness direction of the dielectric layer by interposing the dielectric layer can be changed in a continuous manner or a stepwise manner.
    Type: Application
    Filed: September 6, 2011
    Publication date: March 15, 2012
    Applicant: Sony Corporation
    Inventor: Masayoshi Kanno
  • Patent number: 8098476
    Abstract: One embodiment of the present invention relates to a variable capacitor that operates without moving mechanical parts. In this capacitor electrically conductive electrodes are separated by an enclosed chamber filled with an electrically conductive material. The electrically conductive material can freely vary its position within the chamber. The capacitance of the device will vary as position of the conductive material changes due to external mechanical motion (ex: rotation, vibration, etc.) of the device. Other embodiments of this device are also disclosed.
    Type: Grant
    Filed: September 14, 2010
    Date of Patent: January 17, 2012
    Assignee: Infineon Technologies AG
    Inventors: Markus Loehndorf, Terje Kvisteroey, Horst Theuss, Bjoern Blixhaven
  • Patent number: 8031459
    Abstract: A micro-device includes a movable part, a frame and a connecting part. The movable part has a main portion, a first capacitor electrode and a first driver electrode. The capacitor electrode and the driver electrode have electrode teeth extending from the main portion. The frame includes second capacitor and driver electrodes, where the second capacitor electrode has electrode teeth extending toward the first capacitor electrode, and the second driver electrode has electrode teeth extending toward the first driver electrode. The connecting part connects the movable part to the frame. The first and second capacitor electrodes have their electrode teeth overlapped in their initial position. The movable part is rotatable for varying the extent of the overlapping between the first and second driver electrodes.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: October 4, 2011
    Assignee: Fujitsu Limited
    Inventors: Xiaoyu Mi, Takeaki Shimanouchi, Masahiko Imai, Satoshi Ueda
  • Patent number: 8009406
    Abstract: A capacitance arrangement comprising at least one parallel-plate capacitor comprising a first electrode means, a dielectric layer and a second electrode means partly overlapping each other. A misalignment limit is given. Said first electrode means comprises a first and a second electrode arranged symmetrically with respect to a longitudinal axis, said first and second electrodes have a respective first edge, which face each other, are linear and parallel such that a gap is defined there between. Said second electrode means comprises a third electrode with a first section and a second section disposed on opposite sides of said gap interconnected by means of an intermediate section, which is delimited by a function depending on a first parameter and a second parameter. One of said two parameters is adapted to be selected hence allowing calculation of the other parameter to determine the shape and size of the second electrode means.
    Type: Grant
    Filed: October 12, 2006
    Date of Patent: August 30, 2011
    Assignee: Telefonaktiebolaget L M Ericsson (publ)
    Inventors: Spartak Gevorgyan, Anatoli Deleniv, Per Thomas Lewin
  • Publication number: 20110131821
    Abstract: Method for detecting an angle of rotation of an angle sensor arrangement including at least one first element and one second element, which are designed and arranged such that they can be rotated relative to one another, and at least one capacitor element whose capacitance changes on the basis of the angle of rotation, the angle of rotation being detected or determined directly or indirectly on the basis of this capacitance of the capacitor element, the capacitor element having at least one first band, and the angle of rotation being detected or determined at least on the basis of the positioning of the first band.
    Type: Application
    Filed: July 8, 2009
    Publication date: June 9, 2011
    Applicant: Continental Teves AG & Co. oHG
    Inventors: Manfred Goll, Hilmar Müller, Udo Hilgenberg
  • Patent number: 7936553
    Abstract: An embodiment of the present invention provides a device, comprising a multilayered tunable dielectric capacitor, wherein said multilayers of tunable dielectric are adapted to be DC biased to reduce the dielectric constant; and wherein the DC bias is arranged so that the number of layers of tunable dielectric biased positively is equal to the number of layers of tunable dielectric biased negatively.
    Type: Grant
    Filed: March 22, 2007
    Date of Patent: May 3, 2011
    Assignee: Paratek Microwave, Inc.
    Inventors: James Oakes, James Martin, Andrey Kozyrev, Alexandr Prudan
  • Patent number: 7911761
    Abstract: The present invention provides compliant/stretchable electroactive materials and devices made from those materials which exhibit fault-tolerant properties, i.e., self-healing/clearing properties. The present invention also provides systems, which incorporate the subject materials and/or devices, as well as methods of fabricating the subject materials and devices.
    Type: Grant
    Filed: December 13, 2007
    Date of Patent: March 22, 2011
    Assignee: Bayer MaterialScience AG
    Inventors: Silmon James Biggs, Matthew Kurt Senesky
  • Patent number: 7872851
    Abstract: One embodiment of the present invention relates to a variable capacitor that operates without moving mechanical parts. In this capacitor electrically conductive electrodes are separated by an enclosed chamber filled with an electrically conductive material. The electrically conductive material can freely vary its position within the chamber. The capacitance of the device will vary as position of the conductive material changes due to external mechanical motion (ex: rotation vibration, etc.) of the device. Other embodiments of this device are also disclosed.
    Type: Grant
    Filed: September 20, 2007
    Date of Patent: January 18, 2011
    Assignee: Infineon Technologies AG
    Inventors: Markus Löhndorf, Terje Kvisteroey, Horst Theuss, Bjoern Blixhavn
  • Patent number: 7864503
    Abstract: A capacitive type touch panel includes: a transparent substrate; an array of first conductors formed on a surface of the transparent substrate; an array of second conductors formed on the surface of the transparent substrate; a plurality of conductive first bridging lines, each of which interconnects two adjacent ones of the first conductors; a plurality of conductive second bridging lines, each of which interconnects two adjacent ones of the second conductors and each of which intersects insulatively a respective one of the first bridging lines; and a plurality of spaced apart insulators, each of which is disposed at an intersection of a respective one of the first bridging lines and a respective one of the second bridging lines to separate the respective first and second bridging lines.
    Type: Grant
    Filed: April 23, 2008
    Date of Patent: January 4, 2011
    Assignee: Sense Pad Tech Co., Ltd
    Inventor: Yu-Huei Chang
  • Patent number: 7864504
    Abstract: A capacitive transducer of multi-layer construction includes two rotor plates supported by flexible springs, the plates being spaced apart and rigidly connected by a stem. One rotor plate my be used as either a pickup electrode or a grounded target electrode for determining position, displacement, or load force. The second rotor plate may be used for electrostatic actuation without interfering with or destroying circuitry associated with the first rotor plate. A number of improvements are disclosed including a hollow rotor plate structure for reduced moving mass, buckling resistant features for the springs, improved spring anchor joint design for reduced creep and hysteresis, and material selection and matching for reduced thermal sensitivity.
    Type: Grant
    Filed: October 1, 2007
    Date of Patent: January 4, 2011
    Inventor: Wayne Allen Bonin
  • Patent number: 7808765
    Abstract: In an embodiment of the present invention is provided a varactor comprising a substrate, a bottom electrode positioned on a surface of the substrate, a tunable dielectric material positioned adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode, and an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: October 5, 2010
    Assignee: Paratek Microwave, Inc.
    Inventors: Xubai Zhang, Louise C. Sengupta, Jason Sun, Nicolaas DuToit
  • Patent number: 7808767
    Abstract: A control unit includes an input terminal and an output terminal for a signal to be controlled, a control input terminal and a control output terminal for a control signal, variable capacitors connected in a bridge configuration between the input terminal and control input terminal, between the input terminal and control output terminal, between the control input terminal and output terminal, and between the control output terminal and output terminal, capacitances thereof being changed by the control signal, and a differential signal-controlled power source in which the control signal is applied across the control input terminal and control output terminal in a differential mode with a pair of signals having the same absolute value and mutually opposing polarities. Voltage or current of the signal to be controlled is controlled by the control signal changing the capacitances of the variable capacitors in the bridge configuration.
    Type: Grant
    Filed: March 12, 2008
    Date of Patent: October 5, 2010
    Assignee: Sony Corporation
    Inventor: Masayoshi Kanno
  • Patent number: 7796372
    Abstract: A method is for fabricating an integrated circuit formed from a substrate and including several metallic interconnection levels in which, in a same plane parallel to the main plane of the substrate, is a plurality of thick horizontal metallic interconnection lines, as well as one or several MIM capacitors fitted with metallic electrodes that are orthogonal to the main plane of the substrate.
    Type: Grant
    Filed: April 2, 2008
    Date of Patent: September 14, 2010
    Assignee: STMicroelectronics SA
    Inventors: Sébastien Cremer, Jean-Christophe Giraudin, Emmanuelle Serret
  • Patent number: 7796371
    Abstract: A micro fluidic device and method for capacitive sensing. The device includes a fluid channel including an inlet at a first end and an outlet at a second end, a cavity region coupled to the fluid channel, and a polymer based membrane coupled between the fluid channel and the cavity region. Additionally, the device includes a first capacitor electrode coupled to the membrane, a second capacitor electrode coupled to the cavity region and physically separated from the first capacitor electrode by at least the cavity region, and an electrical power source coupled between the first capacitor electrode and the second capacitor electrode and causing an electric field at least within the cavity region. The polymer based membrane includes a polymer.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: September 14, 2010
    Assignee: California Institute of Technology
    Inventors: Jun Xie, Jason Shih, Yu-Chong Tai
  • Patent number: 7782594
    Abstract: One inventive aspect relates a variable capacitor comprising first and second electrically conductive electrodes, arranged above a support structure and spaced apart from each other and defining the capacitance of the capacitor. At least one of the electrodes comprises at least one bendable portion. The bendable portion(s) are actuated by a DC voltage difference which is applied over the electrodes to vary the capacitance. In preferred embodiments, the support structure comprises a layer of higher permittivity than the atmosphere surrounding the electrodes and the electrodes configure as an interdigitated structure upon actuation. Also disclosed is a 2-mask process for producing such capacitors.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: August 24, 2010
    Assignee: IMEC
    Inventor: Xavier Rottenberg
  • Patent number: 7710708
    Abstract: A two-axis geomagnetic sensor is disclosed. The two-axis geomagnetic sensor includes a first geomagnetic sensor part including a first wafer and a first geomagnetic sensor on a surface of the first wafer; and a second geomagnetic sensor part including a second wafer and a second geomagnetic sensor on a surface of the second wafer. The first and second geomagnetic sensor parts are bonded to each other, in which the first and second geomagnetic sensors positioned in an orthogonal relation to each other. Accordingly, an occupancy area of the geomagnetic sensor can be reduced. Further, the geomagnetic sensor on each axe can have the same magnetic material properties, and alignment deviation cannot be generated.
    Type: Grant
    Filed: December 13, 2006
    Date of Patent: May 4, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hae-seok Park, Joo-ho Lee, Hyung Choi, Kyoung-won Na
  • Patent number: 7667948
    Abstract: A digitally controlled capacitor includes a first set of N capacitors, wherein the first set has a first capacitance value and each of the M capacitors has a second capacitance value, and at least one second set of N capacitors. The second set has the first capacitance value and each of the N capacitors has a third capacitance value that is greater than the second capacitance value. M and N are integers greater than one and M is not equal to N.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: February 23, 2010
    Assignee: Marvell Israel (M.I.S.L.) Ltd.
    Inventors: Gil Asa, David Moshe, Ido Bourstein
  • Patent number: 7662694
    Abstract: The capacitance of a capacitor is adjusted by forming openings in one of a pair of electrodes of the capacitor, the openings having different sizes d1, d2, d3, . . . , wherein d1>d2>d3> . . . and being arranged in numbers n1, n2, n3, . . . , respectively; and sequentially filling a necessary number of the openings with an electroconductive material in descending order of the size so as to adjust the capacitance gradually with an increasing degree of precision. The resulting capacitor is mounted to a printed wiring board.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: February 16, 2010
    Assignee: Ibiden Co., Ltd.
    Inventors: Hajime Sakamoto, Takashi Kariya, Yasuhiko Mano
  • Patent number: 7646582
    Abstract: A micro-electromechanical device includes a semiconductor body, in which at least one first microstructure and one second microstructure of reference are integrated. The first microstructure and the second microstructure are arranged in the body so as to undergo equal strains as a result of thermal expansions of the body. Furthermore, the first microstructure is provided with movable parts and fixed parts with respect to the body, while the second microstructure has a shape that is substantially symmetrical to the first microstructure but is fixed with respect to the body. By subtracting the changes in electrical characteristics of the second microstructure from those of the first, variations in electrical characteristics of the first microstructure caused by thermal expansion can be compensated for.
    Type: Grant
    Filed: October 5, 2005
    Date of Patent: January 12, 2010
    Assignee: STMicroelectronics S.r.l.
    Inventors: Ernesto Lasalandra, Angelo Merassi, Sarah Zerbini
  • Patent number: 7616425
    Abstract: A heat-sensitive apparatus includes a substrate with a top surface, one or more bars being rotatably joined to the surface and having bimorph portions, and a plate rotatably joined to the surface and substantially rigidly joined to the one or more bars. Each bimorph portion bends in response to being heated. The one or more bars and the plate are configured to cause the plate to move farther away from the top surface in response to the one or more bimorph portions being heated.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: November 10, 2009
    Assignee: Alcatel-Lucent USA Inc.
    Inventors: Vladimir Anatolyevich Aksyuk, Maria Elina Simon, Richart Elliott Slusher
  • Patent number: 7566994
    Abstract: According to an example embodiment, an apparatus is provided that produces a small-step switchable capacitor, which can have steps that are smaller in value than the smallest capacitor used in the system. In one embodiment, an input signal is connected to a switchable capacitor system that includes at least one and/or a plurality of small-step, switchable capacitors. In an example embodiment, a capacitor system may be provided that includes a first capacitance block coupled in series with a second capacitance block. In an example embodiment, the second capacitance block may include one or more switchable capacitors to provide a step in capacitance for the capacitor system between a first setting and a second setting using the one or more switchable capacitors. Also, in an example embodiment, the step in capacitance of the capacitor system may be determined based, at least in part, on a ratio of the capacitance of the second capacitance block to the capacitance of the first capacitance block.
    Type: Grant
    Filed: January 31, 2006
    Date of Patent: July 28, 2009
    Assignee: Broadcom Corporation
    Inventors: Ali Medi, Hooman Darabi
  • Patent number: 7541816
    Abstract: In a capacitive sensor, a sensing electrode is positively charged, the sensing electrode and a sensing capacitor are charge-balanced, the sensing electrode is negatively charged, and then the sensing electrode and the sensing capacitor are again charge-balanced. The sensing electrode is positively and negatively charged in the same period when the capacitive sensor is sensed. So, the invention can not only effectively improve the high-frequency external interference but also effectively resist the interference when an external direct current electrical field approaches.
    Type: Grant
    Filed: August 27, 2008
    Date of Patent: June 2, 2009
    Assignee: Generalplus Technology Inc.
    Inventors: Tung-Tsai Liao, Li Sheng Lo
  • Patent number: 7539003
    Abstract: The devices presented herein are capacitive sensors with single crystal silicon on all key stress points. Isolating trenches are formed by trench and refill forming dielectrically isolated conductive silicon electrodes for drive, sense and guards. For pressure sensing devices according to the invention, the pressure port is opposed to the electrical wire bond pads for ease of packaging. Dual-axis accelerometers measuring in plane acceleration and out of plane acceleration are also described. A third axis in plane is easy to achieve by duplicating and rotating the accelerometer 90 degrees about its out of plane axis Creating resonant structures, angular rate sensors, bolometers, and many other structures are possible with this process technology. Key advantages are hermeticity, vertical vias, vertical and horizontal gap capability, single crystal materials, wafer level packaging, small size, high performance and low cost.
    Type: Grant
    Filed: February 16, 2007
    Date of Patent: May 26, 2009
    Assignee: LV Sensors, Inc.
    Inventors: Curtis A. Ray, Janusz Bryzek
  • Patent number: 7511937
    Abstract: A variable capacitance element of the invention includes: a columnar vibrator formed inside a cylindrical hole of a supporting wall; a first circular driving electrode disposed above the columnar vibrator; a first circular capacitive electrode disposed in the middle of the columnar vibrator; a second circular driving electrode disposed on the periphery of the cylindrical hole of the supporting wall; and a second circular capacitive electrode disposed on an inner side surface of the supporting wall. An electrostatic force is increased or decreased sequentially in the circumferential direction of the second driving electrode that is divided into four parts by sequentially increasing or decreasing the driving voltage in the circumferential direction of the second driving electrode. As a result, the columnar vibrator is rotated to change the electrostatic capacitance between the first capacitive electrode and the second capacitive electrode.
    Type: Grant
    Filed: October 9, 2007
    Date of Patent: March 31, 2009
    Assignee: ALPS Electric Co., Ltd.
    Inventor: Shinji Murata
  • Publication number: 20090080138
    Abstract: One embodiment of the present invention relates to a variable capacitor that operates without moving mechanical parts. In this capacitor electrically conductive electrodes are separated by an enclosed chamber filled with an electrically conductive material. The electrically conductive material can freely vary its position within the chamber. The capacitance of the device will vary as position of the conductive material changes due to external mechanical motion (ex: rotation vibration, etc.) of the device. Other embodiments of this device are also disclosed.
    Type: Application
    Filed: September 20, 2007
    Publication date: March 26, 2009
    Inventors: Markus Lohndorf, Terje Kvisteroey, Horst Theuss, Bjoern Blixhavn
  • Patent number: 7505245
    Abstract: A method for manufacturing a semiconductor physical quantity sensor including a support substrate, a movable electrode, a fixed electrode is provided. The method includes the steps of: preparing a multi-layered substrate; forming a compression stress layer on a part of a surface of the semiconductor layer; forming a trench in the semiconductor layer; and releasing the movable electrode from the substrate by removing the insulation film. In the step of releasing, the part of the semiconductor layer, on which the compression stress layer is disposed, is cambered by the compression stress toward a direction apart from the substrate.
    Type: Grant
    Filed: September 15, 2005
    Date of Patent: March 17, 2009
    Assignee: DENSO CORPORATION
    Inventor: Kenichi Yokoyama
  • Patent number: 7505246
    Abstract: The variable capacitance (1) according to the invention is based on a novel principle: a dielectric fluid (20) is placed in the air gap constituted by two capacitor electrodes (12, 14), the fluid being able to be displaced in a direction and outside the cavity (10) formed between said two electrodes (12, 14). Advantageously, the dielectric fluid (20) is displaced according to the principle of communicating vessels, with the presence of a second cavity (30) in fluidic relation with the first cavity. Actuation electrodes (46, 48) in the second cavity (30) induce the deflection of a membrane (44) in order to modify the relative heights of fluidic liquid in the two cavities (10, 30).
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: March 17, 2009
    Assignee: Commissariat A l'Energie Atomique
    Inventor: Fabrice Casset
  • Publication number: 20090059465
    Abstract: A capacitive device including at least one actuator structure formed on a substrate is provided. The capacitive device further includes a moveable structure formed on the substrate and mechanically coupled to the at least one actuator structure. The moveable structure includes a moveable capacitive plate and a bridge, formed substantially planar to the moveable capacitive plate. The bridge is used to mechanically and electrically couple the moveable capacitive plate to a signal line formed on the substrate such that the moveable capacitive plate moves up or down based on a force generated by the at least one actuator structure.
    Type: Application
    Filed: August 31, 2007
    Publication date: March 5, 2009
    Inventor: Lianjun Liu