Abstract: A capacitor array may include a bottom electrode, a plurality of top electrodes, at least one dielectric medium and a plurality of switching mechanisms. Each switching mechanism may separably electronically connect two or more top electrodes. The at least one dielectric medium may include a plurality of discrete capacitors each in contact with a top electrode and the bottom electrode.

Abstract: A piezoelectric thin film sensor array is used to scan and capture biometric data, for example, a fingerprint image. In one embodiment, a multi-layer structure includes a PVDF layer in between two conductor grids arranged orthogonally to one another. Urethane can be added to one side where a finger is placed. A foam substrate can be used as a support. In one feature, the PVDF, and grids can be peeled off like a label for easy replacement. Multiplexers are switched to scan the sensor. A single pixel or a group of pixels can be detected and output to an image memory. The presence of a fingerprint ridge is detected by virtue of a ring-down oscillation that arises from reflection when an electric field is applied to the piezoelectric thin film sensor array at a pixel in contact with the fingerprint ridge. For example, such a ring-down value associated with a fingerprint ridge can be detected at about 150 ns. (or 5 cycles at 30 MHZ). Other reflections indicative of additional biometrics (e.g.

Abstract: A capacitive sensor for measuring a dynamical quantity based on a change in capacitance has a semiconductor substrate having a weight supported by beams so as to undergo displacement according to the dynamical quantity. The semiconductor substrate is sandwiched between glass substrates on which fixed electrodes are disposed in a position facing the weight with minute gaps existing between the glass substrates and the weight. A substrate electrode is disposed on one of the glass substrates and contacts a part of the semiconductor substrate. A recess having a size equal to or larger than a contact area in which the semiconductor substrate contacts the substrate electrode is formed in the semiconductor substrate, and a contact electrode is disposed in the recess in contact with the substrate electrode.

Abstract: A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

Abstract: A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and ridge valleys of a fingerprint on a swiped finger. The rate sensor senses the speed of the finger as it is swiped across the image sensor. The sensor circuit supplies image drive signals to the image sensor and detects image signals in response to the drive signals. The sensor circuit supplies rate drive signals to the rate sensor and detects rate signals in response to the rate drive signals. The sensor circuit further coordinates the image signals and the rate signals to provide a fingerprint image. The image sensor may be configured as an image pickup plate and multiple image drive plates formed on a substrate, such as a flexible printed circuit board or other flexible substrate which may conform to the shape of the finger.

Abstract: An accelerometer device comprises a dielectric seismic mass separated by a gap from an underlying comb-shaped planar capacitor. The principle for measuring acceleration detecting capacitance change according to movement of the dielectric mass in the fringe electrical field. This measuring principle is verified by FEM simulation. The simple structure of the accelerometer device allows the polymer Parylene to be used as the proof mass, greatly simplifying the technology by requiring only surface micromachining. Prototype accelerometers are fabricated and calibrated with the aid of off-chip capacitive readout IC.

Abstract: Micromachined structures, such as fixed drive or sensing fingers of an inertial sensor, are anchored to a substrate using multiple anchors or elongated anchors in order to reduce the bending or twisting of the micromachined structure about the anchor point.

Abstract: A fingerprint sensing system includes an image sensor, a rate sensor and a sensor circuit. The image sensor includes a linear array of capacitive sensors for capacitive sensing of ridge peaks and ridge valleys of a fingerprint on a swiped finger. The rate sensor senses the speed of the finger as it is swiped across the image sensor. The sensor circuit supplies image drive signals to the image sensor and detects image signals in response to the drive signals. The sensor circuit supplies rate drive signals to the rate sensor and detects rate signals in response to the rate drive signals. The sensor circuit further coordinates the image signals and the rate signals to provide a fingerprint image. The image sensor may be configured as an image pickup plate and multiple image drive plates formed on a substrate, such as a flexible printed circuit board or other flexible substrate which may conform to the shape of the finger.

Abstract: An acceleration sensor is formed on a top surface of a laminated silicon-on-insulator substrate. The acceleration sensor is composed of first and second capacitors each including a movable electrode that moves according to acceleration imposed thereon. The first and the second capacitors are so made that their capacitances change differently when the same acceleration is imposed and that the capacitance difference represents an amount of acceleration imposed thereon. A third capacitor having an output electrode solidly connected to the base substrate via the insulation layer is also formed on the same silicon-on-insulator substrate. An output representing amount of acceleration is taken out from the output electrode of the third capacitor.

Abstract: A capacitive light/dimmer switch which uses soft or fuzzy fabrics made with electronic textiles instead of, or as an extension of, metal or plastic plates. The soft fabric material, which may be in the form of a pompom, tassel, fur, or other electronic trim element, provides an attractive and compelling user interface that is soft to the touch. The user simply touches the pompom, as he would the dimmer plate, to cause the amount of light to increase or decrease. The electronic textiles of the light controller comprise electrodes integrated into their yarns or fibers, resulting in a conductive material (electronic textile) that may be used as the user interface. This conductive material is electrically connected to a sensing circuit by either AC coupling or DC contact. When the user touches the conductive material, the sensing circuit measures the change in load of the electrodes, and the lighting is changed.

Abstract: A biometric sensing device includes sensing arrays for sensing a biological surface swiped across the sensing arrays in an arbitrary direction. This device allows for simultaneously sensing different features of a biological surface where the features have the smallest distinguishable features of different size. Using the technique of interleaving partial images, the resolution of the biometric sensing device is increased. Therefore, a small and robust biometric sensing device is provided, which allows for sensing high resolution images.

Abstract: A capacitive humidity sensor includes a detection portion and a reference portion. The detection portion includes detection electrodes and a moisture sensitive film. The reference portion includes reference electrodes and a moisture permeation film as a capacitance adjusting film. The capacitive humidity sensor detects humidity by converting a capacitance difference between a capacitance of the detection electrodes and a capacitance of the reference electrodes to an electric signal by using a capacitance-voltage conversion circuit. The moisture permeation film reduces offset voltage of the capacitive humidity sensor. Thus, an offset compensation circuit or the like is not required.

Abstract: A P type substrate is provided on a surface thereof with varactor elements. The varactor element has an N well formed on the surface of the P type substrate, and a gate insulating film is formed on the N well, with a polysilicon layer formed further thereon. On the other hand, the varactor element has an N well formed on the surface of the P type substrate, and a gate insulating film, greater than the gate insulating film in thickness, is formed on the N well. The polysilicon layer is then formed on the gate insulating film. Furthermore, the polysilicon layer is connected to a gate terminal, while the N well is connected to an S/D terminal via N+ diffusion layers.

Abstract: The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.

Abstract: A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.

Abstract: A variable capacitor includes a stator and a rotor rotatably supported by a cover relative to the stator. The stator includes a first stator electrode of two or more layers and a second stator electrode of two or more layers in the interior of a dielectric substrate. The first stator electrode is connected to a first external electrode and the second stator electrode is connected to a second external electrode. The rotor includes a rotor electrode of two pieces opposing the stator electrodes, and capacitances are defined in the areas of overlap of the rotor electrode and stator electrodes. The capacitances are adjustable to extremely small levels.

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode (4) and a stationary electrode (5), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

Abstract: A sensor chip (100) includes comb-toothed movable electrodes (24) displaceable in a Y-direction, and comb-toothed stationary electrodes (30, 31, 40, 41) arranged to confront those movable electrodes (24), on one face side of a semiconductor substrate (10). The sensor chip (100) detects acceleration on the basis of a capacity change accompanying an acceleration application in the Y-direction between the movable electrodes (24) and the stationary electrodes (30, 31, 41, 42). The stationary electrodes (30, 31, 41, 42) are individually disposed to confront each other on one and other sides of the direction taken along the Y-direction in the individual movable electrodes (24). The individual electrode pads (25a, 30a, 31a, 40a, 41a) and the circuit chip (200) are electrically connected by bump electrodes (300) so that one face of the substrate (10) confronts the circuit chip (200).

Abstract: A micromachined device has a body suspended over a substrate and movable in a plane relative to the substrate. The body has a perimeter portion, a first cross-piece portion extending from one part of the perimeter portion to another part of the perimeter portion to define at least first and second apertures, a first plurality of fingers extending along parallel axes from the perimeter portion into the first aperture, and a second plurality of fingers extending along parallel axes from the perimeter portion into the second aperture.

Abstract: A physical quantity sensor for detecting physical quantity includes a substrate having an opening; a beam protruding in the opening of the substrate and supported on the substrate; and a fixed electrode supported on the substrate. The beam is movable in a vertical direction of the substrate so that the physical quantity in the vertical direction is detectable. The sensor can be minimized, and has excellent output characteristics. Further, a manufacturing cost of the sensor is small.

Abstract: Variable capacitive device, such as a capacitor, controllable in voltage Vc including at least one first armature (L) and one second armature (R), the armatures being separated by an insulation layer (D) including several conducting aggregates separated from each other. The use of the capacitor according to the invention in a resonant circuit.

Abstract: A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.

Abstract: In a capacitive type dynamic quantity sensor, a width of a beam in a beam portion extending in a direction that is perpendicular to a predetermined deformation direction and a gap disposed between a movable electrode and the fixed electrode in the predetermined deformation direction are approximately identical. Accordingly, manufacturing error is prevented from affecting the sensitivity of the capacitive type dynamic quantity sensor. For example, a manufacturing tolerance error of ±2.5% is allowed as a result of designing the width of the beam and the gap to be identical in length.

Abstract: A capacitance-sensing vibratory gyro includes a capacitance-sensing circuit that detects changes in capacitances of a sensing element. The capacitance-sensing circuit includes two operational amplifiers. The inverting input terminal of each operational amplifier is connected to the corresponding sensing electrode in the sensing element. A bias voltage generated by dividing a power supply voltage with resistors is applied to the non-inverting input terminals of the operational amplifiers. The bias voltage is applied to each sensing electrode by imaginary short-circuiting in the operational amplifiers so that the bias voltage directly depends on the power supply voltage.

Abstract: A capacitive device includes a substrate, a movable electrode, and a fixed electrode. The movable electrode is located above a surface of the substrate and is movable with respect to the substrate along directions that are substantially orthogonal to the surface. The fixed electrode is stationary with respect to the substrate. When the movable electrode is displaced in a first direction that is substantially orthogonal to the surface, the total sum of area-distance quotients in the overlap between the electrodes remains substantially unchanged or decreases to provide a first reduction rate that is substantially zero or more. On the other hand, when the movable electrode is displaced in a second direction that is substantially opposite to the first direction, the total sum of area-distance quotients remains substantially unchanged or decreases to provide a second reduction rate that is substantially zero or more. The reduction rates are different from each other.

Abstract: A MEMS structure is provided having a cap that encapsulates and protects the fragile components of the device, while having an electrical trace embedded in a nonconductive substrate. The electrical trace includes a first terminal end that is exposed to the peripheral region of the device, and a second end that is connected to the MEMS structure to facilitate operation of the device.

Abstract: An integrated, tunable capacitor has terminal regions that extend significantly deeper into the semiconductor body than the customary source/drain terminal regions in the conventional CMOS varactors. For this purpose, by way of example, well-type regions or collector deep implantation regions may be provided, with which the depleted regions occurring in the event of large tuning voltages extend significantly further into the semiconductor body. The varactor with a large tuning range can be produced without additional outlay in mass production methods and can be used, for example, in phase-locked loops.

Abstract: An electrostatic drive having a plurality of mover electrodes operatively secured to a mover, and a plurality of stator electrodes operatively secured to a stator. The mover and stator are configured to move relative to each other via electrostatic force generated between the mover electrodes and the stator electrodes. The electrostatic drive includes a driver configured to place the stator electrodes in any of a number of sequential voltage states, each being defined by a combination of LO and HI voltage levels at the individual stator electrodes. Transition from one voltage state to a sequentially adjacent voltage state produces a step size of relative movement between the mover and stator. For each of the sequential voltage states, the driver is further configured to selectively vary voltage applied at one of the stator electrodes to an amount between the LO and the HI voltage levels, in order to produce a proportionally smaller step size.

Abstract: A capacitance type dynamical quantity sensor includes a semiconductor substrate, a weight portion being displaced in accordance with a dynamical quantity, a movable electrode integrated with the weight portion, and a fixed electrode facing the movable electrode. The movable electrode and the fixed electrode provide a capacitor having a capacitance. The movable electrode is movable in accordance with the dynamical quantity. The capacitance of capacitor is changed in accordance with a displacement of the movable electrode so that the dynamical quantity as the capacitance change is measured with an outer circuit. The facing surface of the movable electrode facing the fixed electrode has a substantially rectangular shape, and an aspect ratio of the facing surface is in a range between 0.1 and 10.

Abstract: Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive dielectric, a common top plate and first and second bottom plates associated with a first and second capacitor, respectively. Changes in humidity affect the humidity-sensitive dielectric thereby causing changes in the capacitive value of said series capacitive circuit.

Abstract: This invention relates to an apparatus and method of using a high frequency, high power, fluid dielectric variable capacitor for an impedance matching network. The apparatus includes of a bow-tie rotary vane, a set of two fixed vanes, and a set of rotating vanes adapted to rotate interdigitally between the fixed vanes. A dielectric fluid is circulated between the fixed vanes and the rotating vanes for cooling the device. This arrangement facilitates production of a device having a higher capacitance and a smaller size, thus making it suitable for use in a matching network.

Abstract: A pressure sensor may include a first membrane that flexes in response to pressure, a reference cavity covered by the first membrane where the reference cavity contains a vacuum and a second membrane, adjacent to the first membrane, the first and second membranes forming a capacitor having a capacitance that varies in accordance with the flexing of the first membrane and the pressure.

Abstract: A new type of high-Q variable capacitor includes a substrate, a first electrically conductive layer fixed to the substrate, a dielectric layer fixed to a portion of the electrically conductive layer, and a second electrically conductive layer having an anchor portion and a free portion. The anchor portion is fixed to the dielectric layer and the free portion is initially fixed to the dielectric layer, but is released from the dielectric layer to become separated from the dielectric layer, and wherein an inherent stress profile in the second electrically conductive layer biases the free portion away from the a dielectric layer. When a bias voltage is applied between the first electrically conductive layer and the second electrically conductive layer, electrostatic forces in the free portion bend the free portion towards the first electrically conductive layer, thereby increasing the capacitance of the capacitor.

Abstract: A microelectronic tunable capacitor and a method for fabricating the capacitor are described. The capacitor is formed by a micro-actuator, a first fixed capacitor plate and a second swayable capacitor plate suspended over the first plate. The micro-actuator is formed by a pair of fixed electrodes positioned spaced-apart from each other sandwiching without contact a suspended arm electrode swayable between the pair of fixed eletrodes. The second swayable capacitor plate is mounted to the suspended arm and sways by an electrostatic force between the pair of fixed electrodes to suitably adjust a desirable capacitance for the tunable capacitor.

Abstract: The invention provides a highly reliable acceleration sensor capable of being manufactured at a low cost easily, and a manufacturing method the acceleration sensor. The acceleration sensor comprises: a fixed electrode (50, a movable electrode (40), and a mass member (30) joined to the movable electrode (40) and displaceable. The mass member (30) is mainly constructed of a thin polyimide membrane (2). Therefore the acceleration sensor can be manufactured in a shorter period of time and more easily as compared with a conventional construction utilizing a polysilicon membrane, and a shorter manufacturing time and lower cost is achieved.

Abstract: A micromechanical component placed on a substrate face includes at least one cell. A counter-electrode of a cell capacitor is placed under a cavity. The counter-electrode can be made from a first part of a lower conductive layer. An optionally circular membrane used as an electrode of the capacitor is placed above the cavity. The membrane is homogeneous, has a substantially uniform thickness, and can be part of an upper conductive layer preferably supported by a second part of the lower conductive layer. A caustic channel used to remove the sacrificial coating in order to form the cavity is laterally connected thereto. The channel has a vertical dimension equal to the vertical dimension of the cavity. A closure is adjacent to the channel and disposed outside the membrane. The component can be used as a pressure sensor, and can have several cells each adjacent to six other cells. A process for fabricating a micromechanical component is also provided.

Abstract: A yarn sensor (25) for monitoring at least one parameter of a traveling yarn (17), e.g., in spinning and bobbin-winding machines, has a measuring gap (16) and a housing made of a non-conductive plastic material for containing electronic components. The housing surface is covered by a metallic coating such that the electronic components are surrounded by the coating (21). At least a portion of the surface inside the measuring gap (16) is free of the coating (21). The metallic coating is connected with a heat conductor to remove heat via the metallic coating (21). Undesirable effects on the measurement results can be substantially reduced, and the quality of the measurement results can be increased.

Abstract: An adjuster nut is rotatably supported to a vacuum container of a vacuum variable capacitor of a vacuum variable capacitor device. The adjuster nut has a nut portion, and a shank made of an insulating material. The shank has a first end integrated with the nut portion and a second end adapted to be directly coupled with a rotational shaft of a driving portion of the vacuum variable capacitor device. Another type of the adjuster nut has a deformable bellows, a nut portion, and a shank made of an insulating material. A second end of the nut portion is coupled with a first end of the bellows. The shank has a first end coupled with a second end of a bellows, and a second end adapted to be directly coupled with the rotational shaft of the driving portion of the vacuum variable capacitor device.

Abstract: An electronic device (1), e.g. a mobile telephone having a front cover (6) and a capacitive proximity sensor, comprising: a first electrode (9; 27) and a second electrode (8; 21, 20), said first electrode having a large face (11, 12, 13; 29); and detector means connected to the first electrode (9, 27) and the second electrode (8, 21, 20) for detecting the capacitance of the first electrode relatively to the second electrode and for providing a control signal (Vprox) responsive to the capacitance. The large face (11, 12, 13; 29) of the first electrode is inclined relative to the front cover (6).

Abstract: An electrically tunable device, particularly for microwaves, includes a carrier substrate, conductors, and at least one tunable ferroelectric layer. Between the conductors and the tunable ferroelectric layer, a buffer layer including a thin film structure having a non-ferroelectric material is arranged.

Abstract: The present invention relates to an electric capacitor and, more specifically, to its electrical terminals. One problem that occurs while mounting the capacitor provided with the standard terminals on a pc board, is that the capsule is positioned to close to it and thus leaving no space between said board and the capsule resulting in a big difficulty to clean the board after the electrical components that have been welded to it. This problem is especially critical since, after the welding stage, the pc board has to be washed with a cleaning solution that can be stuck on said terminals resulting in malfunction of the electrical circuit. The solution that is known so far is the use of steps assembled in the cover disc.

Abstract: The invention relates to a metallization for a film capacitor, wherein a dielectric capacitor film provided with a metallic coating is wound into a capacitor element in the running direction of the capacitor film, whereby the coating is provided with a segmentation.

Abstract: A touch switch apparatus for detecting the presence of an object such as a human appendage, the apparatus having a touch pad and a local control circuit connected to the touch pad and to a controlled device. The touch pad preferable includes a first electrode and a second electrode spaced from and surrounding the first electrode. The control circuit is preferably in integrated circuit form. A signal is provided to the touch pad to generate an electric field thereabout. Introduction of a stimulus near the touch pad disturbs the electric field. The control circuit detects the electric field disturbance in and generates a control signal in response.

Abstract: Micromechanical inertial sensors are formed of a plurality of substantially-planar semiconductor wafers interspersed with oxide layers. The sensitive element is located within an internal aperture of a wafer of the device and is separate therefrom. It is connected to an overlying oxide layer at pedestals that minimize contact area to thereby reduce stray capacitance. Portions of side edges of the various wafers are successively recessed to create topside-exposed wafer sections that permit the grounding of all exposed portions of the device as operational potentials are applied to internal electrodes and sensitive elements.

Abstract: A micromachined device is provided that establishes select dimensional relationships between micromachined structures to achieve correlation in dimensional variation among these structures.

Abstract: A method for fabricating a micromechanical component, in particular a surface-micromechanical acceleration sensor, involves preparing a substrate and providing an insulation layer on the substrate, in which a patterned circuit trace layer is buried. A conductive layer, including a first region and a second region, is provided on the insulation layer, and a movable element is configured in the first region by forming a first plurality of trenches and by using an etching agent to remove at least one portion of the insulation layer from underneath the conductive layer. A contact element is formed and electrically connected to the circuit trace layer in the second region by configuring a second plurality of trenches, and the resultant movable element is encapsulated in the first region. The second plurality of trenches for forming the contact element in the second region is first formed after the encapsulation of the movable element formed in the first region.

Abstract: Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

Abstract: A semiconductor physical quantity sensor includes a substrate, a beam-structure movable portion and a fixed portion. The beam-structure movable portion is suspended by four anchors formed of polycrystalline films. A rectangular mass is suspended between beams. Movable electrodes project from both sides of the mass. First fixed electrodes and second fixed electrodes are fixedly provided on the surface of the substrate. The substrate has a laminated structure, wherein an oxide film, attaching film, insulating films, conductive film and insulating film are laminated on the substrate. An anchor formed from the conductive film is electrically connected to the attaching film. An electrode pad made of an aluminum film is provided the above the anchor. Because this structure enables the potential of the attaching film to be fixed, parasitic capacitance can be decreased.

Abstract: A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.

Abstract: A tunable capacitor having low loss and a corresponding high Q is provided. The tunable capacitor includes first and second substrates having first and second capacitor plates disposed, respectively, thereon. The capacitor plates may include a high temperature superconductor material. A MEMS actuator, that is either driven by electrostatic force, heat or both, operably contacts the second substrate so that once the actuator is engaged it responds by displacing the second substrate, thereby varying the capacitance between said first capacitor plate and said second capacitor plate. As such, the capacitance can be controlled based upon the relative spacing between the first and second capacitor plates. The MEMS actuator may either be operably attached to the second substrate or detached, yet supporting, the second substrate.