Abstract: This invention relates to a microfocus X-ray tube having a heat-dissipation solid formed on the target adhesively. Specifically, the heat-dissipation solid defining an opening is formed on the target surface irradiated with an electron beam. Heat generated adjacent the target surface by impingement of an electron beam having passed through the opening is promptly distributed by heat conduction through the surface solid. The heat-dissipation solid contributes to lowering of a surface temperature of the target layer with which the electron beam collides, and a reduction of evaporation of a material forming the target, thereby extending an X-ray generating time.

Abstract: A high energy photon source for generating EUV radiation comprises a nozzle emitting a supersonic stream of source material, a laser or electrical/magnetic pre-ionization mechanism and a laser or electrical/magnetic excitation mechanism and a skimmer plate between them providing a collimated high density beam of source material for excitation.

Abstract: A device for generating radiation or a source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.

Abstract: A ceramic electron beam accelerator is disclosed finding particularly efficacious uses in X-ray electronic circuit imaging and testing applications. The ceramic stage design eliminates the need for placing metal reinforcements between adjoining stages of the accelerator, thereby increasing the accelerator's mechanical robustness and reliability, while also reducing manufacturing costs.

Abstract: An x-ray source assembly capable of producing x-rays suitable for use in medical, explosive detection, and other areas. The assembly includes a housing having a two-part socket member (which holds the assembly's x-ray tube therein) positioned therein. The two-part housing defines an opening through with the tube's x-rays are emitted.

Abstract: An apparatus for controlling the transmission of electromagnetic radiation generated in a radiation generator is provided. The apparatus includes a printed circuit board having a substrate layer and at least one medium layer bound to the substrate layer. The printed circuit board is configured to control the transmission of the electromagnetic radiation.

Abstract: A radiation system for providing a projection beam of radiation is disclosed. The radiation system includes an extreme ultraviolet source for providing extreme ultra violet radiation, and a contamination barrier that includes a plurality of closely packed foil plates for trapping contaminant material coming from the radiation source. The contamination barrier encloses the extreme ultraviolet radiation source.

Abstract: A compact, self-contained x-ray source, and a compact x-ray source panel having a plurality of such x-ray sources arranged in a preferably broad-area pixelized array. Each x-ray source includes an electron source for producing an electron beam, an x-ray conversion target, and a multilayer insulator separating the electron source and the x-ray conversion target from each other. The multi-layer insulator preferably has a cylindrical configuration with a plurality of alternating insulator and conductor layers surrounding an acceleration channel leading from the electron source to the x-ray conversion target. A power source is connected to each x-ray source of the array to produce an accelerating gradient between the electron source and x-ray conversion target in any one or more of the x-ray sources independent of other x-ray sources in the array, so as to accelerate an electron beam towards the x-ray conversion target.

Abstract: A plasma radiation source is improved in such a way that the lifetime of the optics which is limited by the influence of debris is appreciably increased. A gas curtain through which the radiation proceeding from a source region in a vacuum chamber is emitted at a defined solid angle for debris suppression along an axis of the mean propagation direction of the radiation exits as a radially directed supersonic gas jet from a propulsion nozzle of a gas jet vacuum pump, which propulsion nozzle is arranged on the axis. The gas curtain is directed to an annular mixing nozzle that is arranged coaxial to the axis and is guided out of the vacuum chamber by a diffuser. This makes it possible to use source arrangements having an optimal conversion efficiency but extensive debris.

Abstract: An apparatus and method is described for effectively and efficiently providing plasma irradiation laser light pulses in an LPP EUV light source which may comprise a laser initial target irradiation pulse generating mechanism irradiating a plasma initiation target with an initial target irradiation pulse to form an EUV generating plasma having an emission region emitting in-band EUV light; a laser plasma irradiation pulse generating mechanism irradiating the plasma with a plasma irradiation pulse after the initial target irradiation pulse so as to compress emission material in the plasma toward the emission region of the plasma.

Abstract: A laparoscopic tumor therapy method and an articulated electron beam transport system are provided for use with a high power, long focus electron source for tumor therapy. The high power, long focus electron source generates an e-beam. The e-beam is transported through a laparoscopic tube proximate a target tumor for electron irradiation therapy.

Abstract: A system for generating a tunable X-ray pulse comprises a first electron beam source configured to direct a first electron pulse of predetermined energy and pulse length towards a first interaction zone, a laser beam source configured to direct a first photon pulse of predetermined energy and pulse length towards the first interaction zone to interact with the first electron pulse. The first interaction produces a substantially monochromatic second photon pulse of higher photon energy directed towards a second interaction zone, and a second electron beam source configured to direct a second electron pulse of predetermined energy and pulse length towards the second interaction zone so that the second interaction produces an X-ray pulse of predetermined energy and pulse length in a cascaded inverse Compton scattering (ICS) configuration.

Abstract: Disclosed is a device and method for generating X-rays having different energy levels as well as a material discrimination system thereof. The method comprises the steps of: generating a first pulse voltage, a second pulse voltage, a third pulse voltage and a fourth pulse voltage, generating a first electron beam having a first beam load and a second electron beam having a second beam load, respectively, based on the first pulse voltage and second pulse voltage, generating a first microwave having a first power and a second microwave having a second power, respectively, based on the third pulse voltage and the fourth pulse voltage, accelerating the first and second electron beams respectively using the first and second microwave to obtain the accelerated first electron beam and the second electron beam, hitting a target with the accelerated first electron beam and the second electron beam to generate a first X-ray and a second X-ray having different energy levels.

Abstract: A passive optical resonator stores optical pulses within a cavity to increase the optical power level of input pulses via resonant reflections without the use of an internal optical gain medium. In one embodiment for a Compton backscattering system, the optical resonator is a passive high finesse optical resonator that includes a mirror that is transmissive to x-rays.

Abstract: A radiograph system with an anode plate, a cathode plate, and a power source coupled to said anode plate and the cathode plate. At least two wires coupled between the anode plate and the cathode plate provide a configuration to form an X-pinch having a photon source size of less than five microns at energies above 2.5 keV. Material at the configuration forming the X-pinch vaporizes upon application of a suitable current to the wires forming a dense hot plasma and emitting a single x-ray pulse with sufficient photons having energies in the range of from about 2.5 keV to about 20 keV to provide a phase contrast image of an object in the path of the photons. Multiple simultaneous images may be formed of a plurality of objects. Suitable filters and x-ray detectors are provided.

Abstract: An elemental analyzer for identifying quantities of one or more elements in a material has a container for holding a material to be analyzed, a resonant gamma ray source unit for directing resonant gamma rays into the material in the container, and at least one detector for detecting gamma rays resonantly scattered by at least one predetermined element in the material. The resonant gamma ray source unit has an outer housing of gamma ray shield and a radiological shield material, with an inner chamber and an aperture directed towards the container, a moving gamma ray generator source of predetermined materials mounted in the chamber, the materials being selected from a predetermined group of materials which emit resonant gamma rays when exposed to particles or photons, the source being directed towards said aperture, and a source of particles or photons positioned in the chamber adjacent the gamma ray generator source.

Abstract: An x-ray radiator has a radiator housing from which x-ray radiation originating from a focus is emitted. A pre-diaphragm is disposed in the beam path of the x-ray radiation and has a diaphragm opening in or on the radiator housing. The pre-diaphragm is provided with at least one additional slit through which x-ray radiation can strike on at least one element for determination of the position of the focus. This element is sensitive to x-ray radiation. An x-ray device has such an x-ray radiator and a computed tomography apparatus has such an x-ray device.

Abstract: A Compton backscattering x-ray source includes an electron storage ring for storing electron bunches. A timing system refreshes an orbiting electron bunch according to a schedule selected to improve at least one attribute of x-ray emission. In one implementation, the electron bunch is periodically refreshed with a period of at least about 10 Hz.

Abstract: An energy beam is irradiated onto a target from an energy beam source, thereby generating an X-ray with an irradiating area to be irradiated onto an object. Then, the X-ray is introduced into a spectrometer, thereby generating an X-ray with parallelism through the selection of wavelength and wavelength range.

Abstract: The invention is directed to an apparatus for generating soft x-radiation, particularly EUV radiation, by laser-induced plasma. The object of the invention, to find a novel possibility for generating EUV radiation by means of a laser-induced plasma by which a temporally stable radiation emission in the desired wavelength region is ensured when interacting with the target without active regulation of the laser beam, is met according to the invention in that at least one laser is directed to the target, wherein the laser has at least one defined plane with a highly stable spatial distribution of the power density of the laser, and this defined plane is imaged on the target by an optical imaging system so as to be reduced so that the optical image of the defined plane is active for the plasma generation instead of the laser focus. The invention is applied in exposure machines for semiconductor lithography for spatially stable generation of radiation.

Abstract: An improved x-ray generation system produces a converging or diverging radiation pattern particularly suited for substantially cylindrical or spherical treatment devices. In an embodiment, the system comprises a closed or concave outer wall about a closed or concave inner wall. An electron emitter is situated on the inside surface of the outer wall, while a target film is situated on the outside surface of the inner wall. An extraction voltage at the emitter extracts electrons which are accelerated toward the inner wall by an acceleration voltage. Alternately, electron emission may be by thermonic means. Collisions of electrons with the target film causes x-ray emission, a substantial portion of which is directed through the inner wall into the space defined within. In an embodiment, the location of the emitter and target film are reversed, establishing a reflective rather than transmissive mode for convergent patterns and a transmissive mode for divergent patterns.

Abstract: An EUV light source device for protecting a collection mirror from debris that is considered harmful to a mirror coating. The EUV light source device includes: a chamber in which extreme ultra violet light is generated; a target injection unit and a target injection nozzle that supply the chamber with a material to become the target; a laser light source that applies a laser beam to the target so as to generate plasma; a collection mirror that collects the extreme ultra violet light emitted from the plasma; an X-ray source that ionizes neutral particles included in particles emitted from the plasma into charged particles; and plural magnets that generate a magnetic field within the chamber so as to trap at least the charged particles ionized by the X-ray source.

Abstract: A cathode head is provide that is suitable for use in an x-ray device that includes an anode having a target surface configured and arranged to receive electrons emitted by the cathode head. The cathode head may be constructed of magnetic or non-magnetic material and includes an emitter block carrying a filament that defines a longitudinal axis about which is disposed one or more magnetic coils. The filament is configured and arranged to emit an electron beam that defines a focal spot on the target surface of the anode. The magnetic coil, or coils, disposed about the longitudinal axis defined by the filament generate a magnetic field that enables control of the location of the focal spot on the target surface of the anode.

Abstract: A lithographic apparatus is disclosed. The apparatus includes an illumination system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate support that supports a substrate, a projection system that projects the patterned beam onto a target portion of the substrate, and a debris-mitigation system that mitigates debris particles which are formed during use of at least a part of the lithographic apparatus. The debris-mitigation system is arranged to apply a magnetic field so that at least charged debris particles are mitigated.

Abstract: The invention is directed to a method and an arrangement for the plasma-based generation of intensive short-wavelength radiation, particularly EUV radiation.

Abstract: An x-ray source provides both a line focus output and a point focus output, and is mounted on a rotatable support to allow easy changing between the two. A housing has ports at different angular positions relative to an anode, and each port has an associated optic appropriate for an x-ray beam passing through that port. Three or four ports may also be used to allow for different types of beam conditioning. The different beam optics may also do conditioning based on wavelength, and the anode may be of a composite material to provide different wavelength ranges. The rotatable support may be manual or motorized, and a lockout mechanism may be used to ensure that only one port is active at a time. The support may also be located on a movable table that is movable in multiple perpendicular directions.

Abstract: A mirror is reflective to light and transmissive to x-rays. The mirror has a continuous mirror surface and an x-ray aperture within a body portion of the mirror proximate the continuous mirror surface that is transmissive to x-rays.

Abstract: A method of producing a radiating plasma with an increased flux stability and uniformity is disclosed. The method comprises the steps of generating a primary target by urging a liquid under pressure through a nozzle; directing an energy pre-pulse onto the primary target to generate a secondary target in the form of a gas or plasma cloud; allowing the thus formed secondary target to expand for a predetermined period of time; and directing a main energy pulse onto the secondary target when the predetermined period of time has elapsed in order to produce a plasma radiating X-ray or EUV radiation. The pre-pulse has a beam waist size that is larger, in at least one dimension, than the corresponding dimension of the primary target.

Abstract: An x-ray source includes an insulating tube having a cylindrical inside surface defining a cylindrical vacuum cavity, a cathode located near a first end of the insulating tube and adapted to be optically heated for emitting electrons, an anode adapted for a voltage bias with respect to the cathode for accelerating electrons emitted from the cathode, an x-ray emitter target located near a second end of the insulating tube for impact by accelerated electrons, and a secondary emission reduction layer covering at least a portion of the inside surface and adapted to minimize charge build-up on the inside surface, wherein the insulating tube is adapted to be weakly conductive to support a uniform voltage gradient along the insulating tube and across the voltage bias between the cathode and the anode.

Abstract: A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber by means of a flexible capillary tubing of considerable length, wherein the orifice is an integral part of the capillary tubing. A jet formed by urging target material through the orifice is made to interact with a beam of energy, thus producing a radiating plasma emitting the desired electromagnetic radiation. The use of a flexible capillary tubing for supplying target material from a source of target material to an orifice, which is integrated with the tubing, within an interaction chamber, in order to form therein a jet of target material for interaction with an energy beam to generate x-ray or EUV radiation, is also disclosed.

Abstract: This invention relates to a microfocus X-ray tube having a heat-dissipation solid formed on the target adhesively. Specifically, the heat-dissipation solid defining an opening is formed on the target surface irradiated with an electron beam. Heat generated adjacent the target surface by impingement of an electron beam having passed through the opening is promptly distributed by heat conduction through the surface solid. The heat-dissipation solid contributes to lowering of a surface temperature of the target layer with which the electron beam collides, and a reduction of evaporation of a material forming the target, thereby extending an X-ray generating time.

Abstract: A device for generating radiation source based on a discharge includes a cathode and an anode. The cathode and anode material are supplied in fluid state. The material forms a plasma pinch when the device is in use. Optionally, nozzles may be used to supply the material. The cathode and/or anode may form a flat surface. The trajectories of the material may be elongated. A laser may be used to cause the discharge more easily. The laser may be directed on the anode of cathode or on a separate material located in between the anode and cathode.

Abstract: The present invention is an RF cavity for accelerating electrons in imaging applications such as x-ray tubes and CT applications. An RF cavity having electron emitters placed therein accelerates the electrons across the cavity. The geometric shape of the cavity determines the electromagnetic modes that are employed for the acceleration of electrons. The fast electrons are used to generate x-rays by interacting with a target, either a solid or a liquid target. The electron accelerator may be used in an arc source for a stationary computed tomography application, in an x-ray tube, as a booster for an electron gun, and other imaging applications.

Abstract: Devices and related methods are provided for irradiating a portion of a body. A device according to one embodiment can include a radiation needle, a fluorescent target, and an x-ray transmitting window. The radiation needle can include a radiation conduit having a first and second end for passing primary x-rays. An x-ray generator can generate the primary x-rays and pass the primary x-rays from the first end to second end. The fluorescent target can connect to the second end for absorbing the primary x-rays and produce by fluorescence secondary x-rays for irradiating a predetermined portion of the body. The fluorescent target having a surface for absorbing the primary x-rays to fluoresce and emit said secondary x-rays. The x-ray transmitting window can be positioned adjacent to the fluorescent target such that the secondary x-rays exit through the x-ray transmitting window. The secondary x-rays can irradiate target tissue within the body.

Abstract: In one embodiment, a method for designing a radiographic imaging system includes 1) receiving a number of design constraints for the system, and then 2) in response to the constraints, generating a plurality of radiographic imaging system designs, each having a different number of radiographic sources, and each requiring a different number of nominal scan passes to image a specimen region of interest. Designs having a greater number of radiographic sources have sets of translated radiographic detection areas sharing at least some coincident, nominal scan passes as compared to radiographic imaging system designs having fewer radiographic sources. Each set of translated radiographic detection areas is associated with a radiographic source that is replicated and translated with respect to a radiographic source that forms part of a radiographic imaging system design having fewer radiographic sources. Related systems and apparatus are also disclosed.

Abstract: A fastening device for a diaphragm for x-ray radiation has a base plate provided with an opening for the passage of x-ray radiation, the base plate being able to accommodate load forces, and at least one covering device which can be arranged for enclosure of a space on the base plate. A diaphragm can be housed in the space. A computer tomography apparatus embodies such a fastening device for a diaphragm.

Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.

Abstract: Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.

Abstract: Apparatus and methods are disclosed for forming plasma generated EUV light source optical elements, e.g., reflectors comprising MLM stacks employing various binary layer materials and capping layer(s) including single and binary capping layers for utilization in plasma generated EUV light source chambers, particularly where the plasma source material is reactive with one or more of the MLM materials.

Abstract: An electron emitter assembly and a method for generating an electron beam are provided. The electron emitter assembly includes a laser configured to emit a first light beam and a second light beam. The electron emitter assembly further includes a mirror configured to move to a first operational position to reflect the first light beam toward a first region of a photo-cathode. The mirror is further configured to move to a second operational position to reflect the second light beam toward a second region of the photo-cathode. The photo-cathode is configured to emit a first electron beam when the first light beam contacts the first region and to emit a second electron beam when the second light beam contacts the second region. The electron emitter assembly further includes an anode configured to receive the first and second electron beams from the photo-cathode.

Abstract: The invention relates to targets for an X-ray transmission tube (9); to a high efficiency, high excitation energy X-ray transmission tube; to combinations of the targets and high efficiency X-ray transmission tubes; and applications for utilizing such X-ray tubes. The target comprises two or more different thin foils (1) or at least two foils of the same material but different foil thickness on separate areas of a substantially planar substrate which is substantially transparent to X-rays. The target may also comprise at least two different foils (2, 3) layered sequentially one of the other, wherein X-rays are produced when an electron beam impinges the foil closest to the source fo the electron beam; wherein the energy of the electron beam is selectively changed to produce X-rays of a least one preselected energy characteristic of at least one of the foils.

Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprises a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, and a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.

Abstract: A miniaturized X-ray source is disclosed. It comprises an anode structure (43) and a cathode structure (41), each having an essentially pointed portion (44, 42), wherein at least the pointed portions being directed towards each other and enclosed in a vacuum cavity (49). The anode structure has an essentially dome shaped structure having a first essentially flat part (46) surrounded by a second essentially flat part (48), connected by a wall section (47), such that said first and second parts are located at different levels. The pointed portion is provided on said first flat portion and having an extension such that the apex of said pointed portion does not extend beyond the level of said second essentially flat part. A method of making an X-ray source is also disclosed.

Abstract: Devices are disclosed for generating X-rays, especially in a vacuum chamber from plasma formed by irradiating a target material with laser light, that provide convenient removal from the vacuum chamber of high-frequency-maintenance components without disturbing other components. In one configuration denoted a liquid-jet-type of X-ray generator, a nozzle (for spraying target material) and a mirror are situated in a vacuum chamber. The nozzle has a higher maintenance frequency than the mirror. A flange member is provided on an outer wall of the vacuum chamber to cover an opening in the wall. The nozzle is connected to a conduit having a base mounted to the flange member. The nozzle is removable for maintenance by detaching the flange member and withdrawing the nozzle through the opening. Thus, the highest-frequency-maintenance component, the nozzle, is removed without moving or removing any other component in the chamber, such as the mirror.

Abstract: A method for reducing the amount of shielding used in radiation sources, as well as, an improved radiation source (e.g., an x-ray producing device), are provided. The inventive method involves placement of a radiation producing target at the end of a vacuum drift tube and closer to and substantially in the center of a shield for blocking radiation emitted from the radiation producing target.

Abstract: An electron emitter assembly and a method for adjusting a size of electron beams are provided. The electron emitter assembly includes a laser configured to emit a first light beam. The electron emitter assembly further includes a lens assembly configured to receive the first light beam. The lens assembly is configured to adjust a size of the first light beam between a first predetermined size and a second predetermined size larger than the first predetermined size. The lens assembly emits the first light beam toward a photo-cathode. The photo-cathode is configured to emit a first electron beam having a third predetermined size when the first light beam having the first predetermined size contacts the photo-cathode. The photo-cathode is further configured to emit a second electron beam having a fourth predetermined size when the first light beam having the second predetermined size contacts the photo-cathode.

Abstract: A device for generating an x-ray point source includes a target, and an electron source for producing electrons which intersect with the target to generate an x-ray point source having a size which is confined by a dimension of the target.

Abstract: A RF linear electron accelerator system for generating a beam of accelerated electrons bunched in pulses having different energy spectra from pulse to pulse. The system is operable to generate a beam of high energy X-rays from such beam of accelerated electrons, using a conversion target, with pulses of the X-ray beam having energy spectra which are different from X-ray pulse to X-ray pulse. Preferably, the pulses of the electron beam have energy spectra which alternate from pulse to pulse and, correspondingly, the pulses of the X-ray beam have energy spectra which alternate from pulse to pulse. Also preferably, the current of electrons injected into the system's accelerating section and the frequency of the pulse RF power supplied to the accelerating section are changed in a synchronized manner to generate the electron beam. The system is employable in an inspection system for discriminating materials present in containers by atomic numbers.

Abstract: A device for generating X-rays having a source for emitting electrons accommodated in a vacuum space, a liquid metal for emitting X-rays as a result of the incidence of electrons, and a pump for causing a flow of the liquid metal through a constriction where the electrons emitted by the source impinge upon the liquid metal, the constriction having a cross-sectional area which, seen in a flow direction, increases so that during operation in the flow direction, a decrease of a flow velocity takes place such that a decrease of a pressure of the liquid metal in the constriction, caused by viscous flow losses, substantially corresponds with an increase of the pressure caused by the decrease of the velocity so that a uniform and relatively low mechanical load is exerted on a window separating the constriction from the vacuum space during operation.

Abstract: A composite stator is disclosed for use with rotationally driven apparatus, particularly high voltage x-ray tubes. The composite stator generally comprises a core, a plurality of motor windings, and a retaining band. The core is comprised of two or more core sections having slots defined therein for receiving the motor windings. The motor windings are wound through and between the slots of the core sections, after which the core sections are joined together to form the core. The core sections are maintained in an assembled configuration by the retaining band. The motor windings are interconnected to comprise the electromagnetic pole pairs of the composite stator, thereby allowing the stator to induce the rotation of the rotor assembly of the high voltage x-ray tube.