Abstract: The invention provides a system and method for microscopic X-ray fluorescence. An X-ray source, X-ray focusing element and a tapered X-ray opaque focusing aperture provide a focused X-ray spot on a sample. The system translates a sample between an imaging position and a testing position. In the imaging position, the sample is aligned in three dimensions and after alignment, the system automatically translates the sample between the imaging position and the testing position. To avoid collision between the sample and other elements of the system, a position detecting device terminates the sample translation if the sample trips the position detecting device. The focusing aperture of the system has a tapered through opening to block unfocused X-rays and reduce or eliminate a halo effect. To detect low atomic number elements, a detector aperture is vacuum sealed to an X-ray detector and X-ray elements of the system are vacuum evacuated.

Abstract: Disclosed are an X-ray fluorescence (SRF) spectrometer and method for on-site and in-line determination of contaminant elements in lubricating oils and in fuel oils on board a marine vessel. An XRF source block 13 contains two radionuclide sources 16, 17 (e.g. Cd 109 and Fe 55), each oriented 180 degrees from the other to excite separate targets. The Cd 109 source 16 excites sample lube oil flowing through a low molecular weight sample line 18. The Fe 55 source 17 excites fuel oil manually presented to the source beam inside a low molecular weight vial 26 or other container. Two separate detectors A and B are arranged to detect the fluorescent x-rays from the targets, photons from the analyte atoms in the lube oil for example, and sulfur identifying x-rays from bunker fuel oil for example. The system allows both automated in-line and manual on-site analysis using one set of signal processing and multi-channel analyzer electronics 34, 37 as well as one computer 39 and user interface 43.

Abstract: An apparatus and a method for automatically inspecting a defect by an electron beam using an X-ray detector. The composition of a defective portion is analyzed with higher rapidity and the cause of the defect is easily and accurately determined based on an X-ray spectrum. The X-ray spectrum and the image of foreign particles formed on a process QC wafer are registered as reference data, and the defects generated on a process wafer are classified by collation with the reference data. The use of both the X-ray spectrum and the detected image optimizes the operating conditions for X-ray detection. A defect of which the X ray is to be detected is selected based on the result of classification of defect images automatically collected, and the defect is classified according to the features including both the composition and the external appearance.

Abstract: Apparatus and methods in which one or more elemental taggants that are extrinsically placed in an object are detected by x-ray fluorescence analysis to identify or authenticate the object are described. The taggant is manufactured as part of the object or the taggant is placed into a coating, packaging, label, or otherwise embedded onto the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence. The taggant is then analyzed by XRF and the analysis is then converted into a 2D symbol format that can be used in various security and authentication applications. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, without the limitations experience by current anti-counterfeiting technologies.

Abstract: A method for making a quantitative analysis of nickel that includes the steps of providing an amorphous silicon layer, forming an insulating film on the amorphous silicon layer, depositing nickel on the insulating film, etching a defined portion of the nickel with an etchant to create a specimen, drying the specimen on an AP1 film and subjecting the dried specimen to energy dispersive X-ray fluorescence analysis.

Abstract: An X-ray fluorescence measuring system and related measuring methods are disclosed, the system using X-ray energy at a level of less than 80 KeV may be directed toward a material, such as coal. The energy fluoresced may be detected (10) and used to measure the elemental composition of the material, including trace elements. The material may be moving or stationary.

Abstract: A non-resonant microwave imaging microscope and associated probe. The probe includes a sensor unit with two fixed electrodes, preferably a large outer electrode surrounding a small inner electrode which are approximately co-planar, thereby protecting the small inner electrode from an uneven topography. The outer electrode may be deposited on a conically shaped dielectric disk having a bore through which the inner electrode is placed. Non-resonant circuitry couples the inner electrode to the probe signal variably selected in the range of 10 MHz-50 GHz and to an amplifier whose output is coupled to a signal processor detector in-phase and out-of-phase components of the current or voltage across the two electrodes. A mechanical positioner moves the probe vertically towards the sample and scans it across the sample.

Abstract: A device and method for identifying the composition of a target sample. The target sample may be a matrix such as a metal alloy, a soil sample, or a work of art. The device includes an x-ray fluorescence detector that produces an x-ray signal output in response to the target sample. The device also includes an optical spectroscope that produces an optical signal output in response to the target sample. Further, a processor is included that analyzes and combines the x-ray signal output and the optical signal output to determine the composition of the test material. In one embodiment, the optical spectroscope is a laser induced photon fluorescence detector.

Abstract: Methods and apparatus are providing for characterizing thin films in an integrated circuit device. A target including multiple layers is scanned using an x-ray emission inducer. X-ray emissions characteristic of materials in the target are measured. In one example, multiple beam energies are used to conduct the scan. In another example, continuously varying beam energies are used. Information such as K-ratios or the intensity of the x-ray emissions is provided to determine the thickness and/or composition of layers in the scan target.

Abstract: A method of analyzing a composition depth profile of a solid surface layer, wherein actually-measured intensity of photoelectrons emitted from the solid surface layer by irradiating the solid surface layer containing at least two or more species of element with X rays and photoelectron calculated intensity obtained by making a calculation assuming an elemental composition ratio for each of a plurality of sub-layers into which the solid surface layer has been temporarily divided are utilized to determine a composition depth profile of the solid surface layer, the method including a step of at least repeating an approximate calculation including: distinguishing a specified sub-layer such that the calculated intensity best converges to the actually-measured intensity in the sub-layers; and correcting an elemental composition ratio at least for the specified sub-layer so that the calculated intensity converges to the actually-measured intensity, thereby determining the composition depth profile of the solid surfa

Abstract: Disclosed are apparatus and methods for characterizing a potential defect of a semiconductor structure. A charged particle beam is scanned over a structure which has a potential defect. X-rays are detected from the scanned structure. The X-rays are in response to the charged particle beam being scanned over the structure. The potential defect of the scanned structure is characterized based on the detected X-rays. For example, it may be determined whether a potentially defective via has a SiO2 plug defect by comparing an X-ray count ratio of oxygen over silicon of the defective via with an X-ray count ratio of a known defect-free reference via. If the defective via has a relatively high ratio (more oxygen than silicon) as compared to the reference via, then it may be determined that a SiO2 plug defect is present within the defective via. Otherwise, the via may be defmed as having a different type of defect (e.g., not a SiO2 plug defect) or defined resulting in a “false” defect.

Abstract: An electron microscope including an apparatus for x-ray analysis, is capable of performing elemental analysis with X-rays emitted from a specimen by electron beam irradiation, that is, inspection of foreign particles, for enhancement of yields in manufacturing, at high speed and with high precision and high space resolving power. The current quantity of the electron beam is automatically controlled such that an X-ray count rate falls within a range of 1000 to 2000 counts per second, a plurality of X-ray energy regions are set up when checking an X-ray spectrum against reference spectra stored in a database for analysis of the X-ray spectrum, matching is performed for each of the X-ray energy regions, and the distribution of the elements observed is analyzed on the basis of an intensity ratio between X-ray sample spectra obtained by electron beam irradiation at not less than two varied acceleration voltages.

Abstract: An x-ray fluorescence analyzer and method. The analyzer and method use a single radio-active source, such as, 241Am to determine the composition of a metal alloy or precious metal. The method compensates for Rayleigh scattering by first determining a scaling factor using a particular energy line in the spectrum of the test material and comparing that line to the same energy line for a pure metal. Based on the scaling factor the energy spectrum for the pure is compensated and then subtracted from the energy spectrum of the test material at discrete points.

Abstract: A method and device for producing visually sensed images of the internal structure of, particularly, a biological object. When used for diagnostic purposes in medicine the x-ray dosage of tissues surrounding the spot that is being examined is decreased.

Abstract: A sample preprocessing system for a fluorescent X-ray analysis includes a sample preprocessing apparatus for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and subsequently dried, a transport apparatus for transporting the substrate, and a control apparatus for controlling the sample preprocessing apparatus and the transport apparatus. The control apparatus 60 after having confirmed that the pressure difference between inside and outside of the apparatus 10 (20, 30) and the concentration of the reactive gas within the apparatus are within a predetermined range causes automatically opening and closing shutters 21a, 27 and 31a to thereby avoid a possible corrosion of the apparatuses positioned outside the sample preprocessing apparatus while increasing the service lifetime thereof.

Abstract: A method of measuring the transfer function of an X-ray optical component over a wide range of X-ray energies, which includes the steps of:

Abstract: To provide an X-ray fluorescence spectrometer of a simplified structure of a type in which a sample can be transported to an irradiating position where the sample is irradiated with primary X-rays and analysis can be achieved by positioning a target area to be measured of the sample. When an r drive means 37 drives an r drive shaft 43, a transporting function of transporting the sample 3 and a positioning function of positioning the target area in an r direction are performed. Also, a&thgr; drive shaft 53 of a &thgr; drive means 38 for performing the positioning function for positioning the target area in a &thgr; direction and the r drive shaft 43 of the r drive means 37 form a dual coaxial shaft assembly.

Abstract: A technique for measuring the chemical composition of surface particles or other small features which may be present on semiconductor wafers or other substrates. A particle is irradiated with a variable energy, focused incident electron beam. X-ray or electron emissions from the particle are monitored to detect an increase in output indicating the ionization threshold of the materials in the particle. The incident beam energy is correlated with the thresholds detected to determine the species present in the particle.

Abstract: The invention concerns an X-ray analysis system for controlling the humidity of a sample, a method for its operation as well as a humidifying apparatus itself. The analysis system has means for dividing a gas flow stream into two portions and for emerging a membrane humidifier tube, containing one of the gas flows, in a water bath in which the gas passing through that tube is moisturized to a desired degree. The two gas flows are subsequently reunited at a controlled temperature to provide for combined moisturized gas at a desired temperature and humidity. The gas is then sprayed onto the sample and an excess moisturize gas vented from the chamber to maintain a moisturize gas sample without condensation of water on or near the sample.

Abstract: Methods and apparatus are disclosed for detecting a thickness of a surficial layer (e.g., metal or insulating layer) on a workpiece (e.g., semiconductor wafer) during a process for planarizing the layer, so as to stop the process when a suitable process endpoint is reached. Layer thickness is detected based on a spectral-characteristic signal of reflected or transmitted signal light, obtained by directing a probe light onto the surface of the workpiece. Example spectral characteristics are local maxima and minima of signal-light waveform, differences or quotients of the same, a dispersion of the signal-light waveform, a component of a Fourier transform of the signal waveform, a cross-correlation function of the signal waveform. Alternatively, the zeroth order of signal light is selected for measurement, or a spatial coherence length of the probe light is compared with the degree of fineness of the pattern on the surface illuminated with the probe light.

Abstract: An X-ray fluorescence device and method are disclosed. The device includes a source block containing an X-ray source, a substantially X-ray transparent fluid flow path through the source block and proximate the X-ray source, and an X-ray detector separated from the X-ray source by the source block. First and second openings are provided in the source block between the X-ray source and the flow path and between the flow path and the detector respectively. In operation, source X-rays pass through the first opening and through the flow path. A portion of the source X-rays interact with a fluid in the flow path to create a fluid fluorescence response. The remainder of the source X-rays pass into a noise reduction cavity of the source block. The detector receives the portion of the fluid fluorescence response passing through the second opening and produces an output indicative of the presence and amount of selected components in the fluid.

Abstract: Where an object to be analyzed in an X-ray fluorescence analysis is a thin film sample, the X-ray fluorescence spectrometer facilitates selection of proper secondary X-ray lines to be measured to thereby facilitate an accurate analysis. The spectrometer includes a measuring line evaluating means 23 operable to calculate for each specified secondary X-ray line to be measured, a first theoretical intensity at a specified thickness and a composition of each of layers in the thin film and a second theoretical intensity at the thickness and the composition thereof when the thickness or a concentration has been changed by a predetermined quantity, to calculate a precision of a thickness or a precision of the concentration based on the first and second theoretical intensities, and to determine applicability or inapplicability of an analysis using the specified secondary X-ray line to be measured.

Abstract: An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used.

Abstract: To provide an X-ray fluorescence spectrometer capable of providing a stable fluorescent X-ray intensity regardless of the presence of irregularities or the like on a surface of a sample to be analyzed, the X-ray fluorescence spectrometer includes an X-ray source 1 including a primary X-ray limiting diaphragm 3. An aperture 3a of the primary X-ray limiting diaphragm 3 is of a shape effective to allow change in intensity of fluorescent X-rays 7 measured by a detector 8 to be not higher than 1% in the event that a height of the sample surface 5a relative to the X-ray source 1 and the detector 8 changes 1 mm at maximum.

Abstract: In a method for examining a living subject with an imaging method making use of the concentration of a contrast agent having a physical property that is identifiable with the imaging method in a region of interest (ROI) of the subject presented in time-successive images acquired with the imaging method representing quantitative values of the physical property, a histogram of the quantitative values of the physical property in the ROI is produced for each of the individual images, and the contrast agent concentration in the ROI is determined on the basis of the frequency of occurrence of the quantitative values of the physical property in the ROI.

Abstract: Apparatus and methods in which one or more elemental taggants that are extrinsically placed in an object are detected by x-ray fluorescence analysis to identify or authenticate the object are described. The taggant is manufactured as part of the object or the taggant is placed into a coating, packaging, label, or otherwise embedded onto the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence. The taggant is then analyzed by XRF and the analysis is then converted into a 2D symbol format that can be used in various security and authentication applications. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, without the limitations experience by current anti-counterfeiting technologies.

Abstract: Apparatus and methods in which one or more elemental taggants that are intrinsically located—or extrinsically placed—in an object are detected by x-ray fluorescence analysis to identify or track/trace the object or its point of manufacture, as well as to establish the origin of objects and their authenticity. The taggant is manufactured as part of the object or the taggant is placed into a coating, packaging, label, or otherwise embedded within or onto the object for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence to determine the unique elemental composition of the taggant within the respective object. The apparatus and methods can used in combination with, in place or, or in additional to current anti-counterfeiting technologies.

Abstract: In order to render the value of the fluorescent X-ray strength Ia2 of a standard sample 2 multiplied by the ratio PF1/PF2 between respective grading coefficients of standard samples 1 and 2 to approach the value of the fluorescent X-ray strength Ia1 of the standard sample 1, specific glancing angles øa* and øb* are determined. The abundance of a substance of interest is determined from fluorescent X-ray strengths Ia3 and Ib3 of a sample to be measured that is irradiated at the determined specific glancing angles øa* and øb*, to thereby provide an accurate determination of the abundance of the substance of interest.

Abstract: In order to render the value of the fluorescent X-ray strength Ia2 of a standard sample 2 multiplied by the ratio PF1/PF2 between respective grading coefficients of standard samples 1 and 2 to approach the value of the fluorescent X-ray strength Ia1 of the standard sample 1, specific glancing angles øa* and øb* are determined. The abundance of a substance of interest is determined from fluorescent X-ray strengths Ia3 and Ib3 of a sample to be measured that is irradiated at the determined specific glancing angles øa* and øb*, to thereby provide an accurate determination of the abundance of the substance of interest.

Abstract: The present invention includes a system for efficient and effective detection and characterization of dishing and/or erosion. An x-ray emission inducer is used to scan a target on a sample. The target can be scanned at an acute incident angle to allow characterization of the dishing and/or erosion and analysis of the metallization or thin film layer topology.

Abstract: Apparatus and methods in which one or more elemental taggants that are intrinsically located in an object are detected by x-ray fluorescence analysis under vacuum conditions to identify or verify the object's elemental content for elements with lower atomic numbers. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, as well as provide detection by a non line-of-sight method to establish the origin of objects, as well as their point of manufacture, authenticity, verification, security, and the presence of impurities. The invention is extremely advantageous because it provides the capability to measure lower atomic number elements in the field with a portable instrument.

Abstract: A method and system for safe mail transmission is provided. A letter is created with a marking compound that provides contrast in a detection system. The letter is sealed in a protective enclosure and scanned when received.

Abstract: In order to acquire typical X-ray spectra by dividing automatically dividing contained matter and regions where the density thereof differs into groups in X-ray mapping analysis, measurement starts with the spectra database empty, a designated location within the sample is irradiated with a primary beam by the primary beam control means, the sample is irradiated with the primary beam for a fixed period of time in order to acquire a measurement spectrum, the X-ray spectrum obtained through measurement and X-ray spectra in the spectra database are compared by the X-ray comparison means, the X-ray spectrum obtained through measurement is added to the database when no matching X-ray spectra exists in the database, and measurement is repeated at a designated measurement point.

Abstract: Method and system for analyzing local composition and structure of a compound having one or more non-zero gradients in concentration for one or more selected constituents in a selected direction. A beam of X rays having representative energy E is received by a mono-capillary or poly-capillary device and is directed at a selected small region of the compound. A portion of the X rays is diffracted at the selected region by one or more constituents of the compound, at each of two or more diffraction angles relative to a selected surface or lattice plane(s) of the compound; and the diffracted portion of X rays for each of these diffraction angles is received and analyzed at an X-ray detector. A portion of the X rays excites fluorescence radiation that is received by a fluorescence detector to estimate the relative concentrations in a compound having two or more constituents. Fluorescence X rays and diffraction X rays can be detected at each desired translational position and rotation for a target site.

Abstract: The invention relates to a device for X-ray fluorescence analysis wherein X-radiation of an X-ray source is directed upon a sample arranged on a sample carrier, and the fluorescence radiation is measured by a detector. On that occasion, the detection sensitivity, in particular, with respect to the total reflection X-ray fluorescence (TXRF) is to be increased for the most different samples. In order to solve this problem the sample to be analysed is placed on a multi-layer system, or a fluidic sample flows over such a multi-layer system. The multi-layer system consists of at least two or several individual layers which are arranged in a periodically repeating manner. Adjacent individual layers consist of materials having a different x-ray optical refractive index wherein the period thickness d in the multi-layer system and the angle of incidence &thgr; of the X-radiation meet the BRAGG relationship at the used wavelength &lgr; of X-radiation.

Abstract: In a device and a method for the analysis of atomic and molecular elements by way of wavelength dispersive x-ray spectrometric structures including at least one mirror or focussing device having a multi-layer structure onto which fluorescent radiation generated by primary x-ray or electrons beams from a sample to be examined is directed and the reflected fluorescence radiation is supplied to a measuring device for determining the nature of impurities contained in the sample, the multi-layer structure consists of at least a lanthanum layer and a boron carbide layer.

Abstract: In order to quickly and economically evaluate cleanliness of a metal with high representativity when quantities, compositions, etc., of non-metallic inclusion particles existing in a metal and resulting in product defects are evaluated by a sample collected during the production process of the metal, the present invention provides an evaluation method involving the steps of levitation-melting a metal piece for a predetermined time by cold crucible levitation-melting means, discharging non-metallic inclusion particles contained in the metal piece to the surface of a molten metal, and directly analyzing a curved and non-smooth sample surface after solidification by a fluorescent X-ray analysis method using an energy dispersion type spectroscope, or by other chemical or physical measurements, to measure or analyze the quantities of elements constituting the non-metallic inclusion particles and to determine quantity of the non-metallic inclusions.

Abstract: An apparatus comprises a source of penetrating radiation, a detector for that radiation, a sample container, and a stage between the source and the detector for supporting the sample container, wherein the sample container includes a data storage element and the apparatus includes a reader for that data storage element, the reader being connected to a control means adapted to control the apparatus on the basis of the content of the data storage element. Thus, by including information in the data storage element relating to the nature of the sample, the apparatus can be tuned to that type or class of sample and more reliable results obtained. A suitable data storage element is a bar code, and a suitable sample container is a tray.

Abstract: The invention provides device which is capable of performing both wave dispersive and energy dispersive x-ray fluorescence spectrometry on a single sample, and utilizing a single radiation detector, such as a PIN diode detector.

Abstract: An apparatus and method in which one or more taggants that are intrinsically located—or extrinsically placed—in an article or product, such as carpet. The taggants are detected by x-ray fluorescence analysis to identify or verify the article or its point of manufacture. The taggants are manufactured as part of the article or the taggant is placed into a coating, label, or otherwise embedded within the article for the purpose of later verifying the presence or absence of these elements by x-ray fluorescence, thus determining the unique elemental composition of the taggant within the article.

Abstract: An apparatus for preventing scattering of a primary X-ray beam during sample residue measurement using drip and dry analysis on an organic thin film sample support. A primary X-ray beam is transmitted through the organic film, and a hole is formed in a sample stage through which the X-ray passes. The surface of the hole is coated with a heavy metal film, and thereby substantially reduces scattering of the X-ray.

Abstract: Handling of a portable an X-ray fluorescence analyzer is simplified by providing in a housing of the X-ray fluorescence analyzer an X-ray source for irradiating primary X-rays onto a sample to be measured located outside the housing, and a light source in the housing for irradiating a visible light beam in the irradiating direction of the primary X-rays, the visible light beam having a different optical axis from the X-rays.

Abstract: In order to realize accurate measurement with an X-ray fluorescence thickness tester characterized by being non-destructive and non-contacting, a system comprises an X-ray generating source, a collimator for focusing primary X-rays, and a sample observation optical system for positioning and observation of microscopic sections. As thickness testing means, as detectors for detecting X-ray fluorescence generated from the sample there is one sensor having low counting efficiency but excellent energy resolution used for low energy counting, and another sensor having poor energy resolution but excellent counting efficiency used for counting high energy, these two sensors being arranged next to each other, and in stages subsequent to the detector preamps there are separate linear amps and frequency analyzers with respective signals being subjected to processing as spectrums for qualitative and quantitative analysis in a common control and computing section.

Abstract: A system and process for classifying a piece of material of unknown composition at high speeds, where the system connected to a power supply. The piece is irradiated with first x-rays from an x-ray source, causing the piece to fluoresce x-rays. The fluoresced x-rays are detected with an x-ray detector, and the piece of material is classified from the detected fluoresced x-rays. Detecting and classifying may be cumulatively performed in less than one second. An x-ray fluorescence spectrum of the piece of material may be determined from the detected fluoresced x-rays, and the detection of the fluoresced x-rays may be conditioned such that accurate determination of the x-ray fluorescence spectrum is not significantly compromised, slowed or complicated by extraneous x-rays. The piece of material may be classified by recognizing the spectral pattern of the determined x-ray fluorescence spectrum. The piece of material may be flattened prior to irradiation and detection.

Abstract: In an apparatus and a method for the analysis of atomic or molecular elements contained in a sample by wavelength dispersive X-ray spectrometry, wherein primary x ray or electron radiation is directed onto the sample whereby fluorescence radiation is emitted from the sample, the fluorescence radiation is directed onto a mirror or focussing device consisting of a multi-layer structure including pairs of layers of which one layer of a pair consists of lanthanum and the other consists of carbon and the fluorescence radiation is reflected from the mirror or focussing device onto an analysis detector for the analysis of the atomic or molecular elements contained in the sample.

Abstract: The invention relates to a method of analyzing a specimen comprising a compound material by X-ray fluorescence analysis wherein a beam of polychromatic primary X-rays is generated in an X-ray tube by conversion of electric current into X-rays, and said beam is directed at the specimen, and wherein the element specific fluorescent X-rays are selectively detected using means for detection and an intensity of said fluorescent X-rays is determined. After the electric current is applied to the X-ray tube and the intensity of element specific fluorescent X-rays is determined, a second intensity of the element specific fluorescent X-rays is determined while applying an electric current with a different value than the previous electric current, and at least the relative abundance of the chemical element present in the compound material is then determined using the values of both intensities. The thickness of the first layer can be determined simultaneously.

Abstract: The invention concerns a system, and its method of implementation, to determine the concentration of a substance mixed with a fluorophor and contained in one or more contacts of a matrix of contacts; it comprises: a microscope (1) associated with a magnifying objective lens (2) and with image acquisition means (4,5) to achieve a microscope image of the fluorescence of one of the contacts of the matrix or part of this contact; illumination means (11, 13) emitting a first beam to enable image acquisition in white light of said contact, and a second beam to excite the fluorophor contained in said contact; deflector means (15) for the second beam to ensure point by point scanning of the contact of the matrix; recording means (6, 7) to record the contact image; and processing means (6,7) of this image to quantify the fluorescence of the contact and determine the concentration of the substance.

Abstract: Apparatus for X-ray analysis has a combination of a rotating target X-ray tube and a composite monochromator. The composite monochromator has a first and a second elliptic monochromators joined with each other side by side. Each of the elliptic monochromators has a first focal point at which an X-ray focal spot on a target of the X-ray tube is disposed. Each of the elliptic monochromators has a synthetic multilayered thin film whose d-spacing varies continuously along an elliptic-arc. The shortest distance between the X-ray focal spot and the composite monochromator is set to 40 to 100 mm. Under the shortest distance condition, the effective focal spot size on the target is set to 40 to 100 micrometers to obtain the maximum X-ray intensity on a sample to be analyzed.

Abstract: Secure documents and methods and apparatus for making the same. The documents are made secure using apparatus and methods in which one or more taggants are placed in the paper or ink of the document. The present or absence of the taggant within the document is detected by x-ray fluorescence analysis, thereby identifying or verifying the document.

Abstract: To provide an X-ray fluorescence spectrometer capable of providing a stable fluorescent X-ray intensity regardless of the presence of irregularities or the like on a surface of a sample to be analyzed, the X-ray fluorescence spectrometer includes an X-ray source 1 including a primary X-ray limiting diaphragm 3. An aperture 3a of the primary X-ray limiting diaphragm 3 is of a shape effective to allow change in intensity of fluorescent X-rays 7 measured by a detector 8 to be not higher than 1% in the event that a height of the sample surface 5a relative to the X-ray source 1 and the detector 8 changes 1 mm at maximum.