Composition Analysis Patents (Class 378/45)
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Patent number: 7436926Abstract: A sample sealing vessel 8 includes a plurality of wall faces comprising a material for transmitting X-ray, an X-ray source 1 is arranged at a wall face 11 to irradiate primary X-ray, a face 12 different from the face irradiated with the primary X-ray is arranged to be opposed to an X-ray detector 10, and the primary X-ray from the X-ray source 1 is arranged to be able to irradiate the wall face 12 of the sample sealing vessel to which the X-ray detector 10 is opposed.Type: GrantFiled: May 3, 2007Date of Patent: October 14, 2008Assignee: SII Nano Technology Inc.Inventors: Yoshiki Matoba, Takayuki Fukai, Masanori Takahashi, Yutaka Ikku
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Patent number: 7432501Abstract: An ionising particle analyser comprises a source of ionising particles, a charged particle detector, and an ionisable gas located between the source and the detector. The analyser further comprises a charged particle impeding device located between the source and the detector. The charged particle impeding device is arranged to be maintained in a first configuration at a potential to impede the passage of charged particles and pass uncharged particles.Type: GrantFiled: August 27, 2004Date of Patent: October 7, 2008Assignee: Council for the Central Laboratory of the Research CouncilsInventors: James Edmond Bateman, Gareth Derbyshire
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Patent number: 7430273Abstract: An analytical instrument is disclosed having both XRF and spark emission spectroscopy capabilities. In a particularly advantageous embodiment, a field portable XRF device is removably coupled to the instrument by means of a docking station. A first surface of the sample is irradiated with an X-ray beam, and the X-ray radiation fluorescently emitted from the sample is detected and analyzed to acquire elemental composition data. The instrument is further provided with a spark source located proximal a second surface of the sample and a detector for sensing the radiation emitted from the spark-excited material. The combined instrument enables the acquisition of complementary elemental composition data by XRF and spark emission spectroscopy without having to transport a sample between separate instruments.Type: GrantFiled: February 23, 2007Date of Patent: September 30, 2008Assignee: Thermo Fisher Scientific Inc.Inventor: Ravisekhar Yellepeddi
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Publication number: 20080220441Abstract: X-ray fluorescence (XRF) spectrometry has been used for detecting binding events and measuring binding selectivities between chemicals and receptors. XRF may also be used for estimating the therapeutic index of a chemical, for estimating the binding selectivity of a chemical versus chemical analogs, for measuring post-translational modifications of proteins, and for drug manufacturing.Type: ApplicationFiled: October 10, 2007Publication date: September 11, 2008Inventors: Eva R. Birnbaum, Andrew T. Koppisch, Sharon M. Baldwin, Benjamin P. Warner, T. Mark McCleskey, Jeffrey Joseph Stewart, Jennifer A. Berger, Michael N. Harris, Anthony K. Burrell
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Patent number: 7424092Abstract: An apparatus and method for accurately analyzing transition metal such as iron and copper contained as impurities in a hafnium-containing film on a semiconductor substrate, which is a sample, is provided. Ir-L? rays selected and split by a monochromator from X rays generated from an X-ray tube having an anode containing iridium, is applied to the sample so as to totally reflect on a hafnium film of the sample, and the fluorescent X rays generated in a direction other than the total reflection direction are detected by a detector. This makes it possible not only to detect Fe—K? rays, but also to suppress generation of Hf-L? rays which interferes with detection of Cu—K rays, and to shift the upper limit energy of the Raman scattering to be small so as to cancel overlapping with Cu—K rays.Type: GrantFiled: April 17, 2006Date of Patent: September 9, 2008Assignee: Technos Co., ltd.Inventor: Shinichi Terada
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Publication number: 20080212736Abstract: Described is an element analysis device, which can be used to obtain precise measurements even under unfavorable environmental conditions. For this, the device is provided with a transporting means with a measuring region (14) for transporting the substance (S) to be measured, an excitation source with an exit window located in a first case (22) and an X-ray fluorescence detector (30) that is directed toward the measuring region (14), as well as an entrance window (34) that is located in a second case (32). To minimize the air absorption and prevent dust and dirt from being deposited, a tube (40, 50) extends from the entrance window (34) and/or the exit window (24) in the direction of the measuring region, which tube is essentially tightly connected to the respective case (22, 32) and is open at the end facing the measuring region and is provided with a connection (44, 54) for feeding a flushing gas into the tube (FIG. 1).Type: ApplicationFiled: April 15, 2005Publication date: September 4, 2008Inventor: Albert Klein
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Patent number: 7420163Abstract: According to one embodiment of the invention, photoelectron spectroscopy is used to determine the thickness of one or more layers in a single or multi-layer structure on a substrate. The thickness may be determined by measuring the intensities of two photoelectron species or other atom-specific characteristic electron species emitted by the structure when bombarded with photons. A predictive intensity function that is dependent on the thickness of a layer is determined for each photoelectron species. A ratio of two predictive intensity functions is formulated, and the ratio is iterated to determine the thickness of a layer of the structure. According to one embodiment, two photoelectron species may be measured from a single layer to determine a thickness of that layer. According to another embodiment, two photoelectron species from different layers or from a substrate may be measured to determine a thickness of a layer.Type: GrantFiled: April 29, 2005Date of Patent: September 2, 2008Assignee: ReVera IncorporatedInventor: Bruno Schueler
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Publication number: 20080205592Abstract: An XRF system, preferably handheld, includes an X-ray source for directing X-rays to a sample, a detector responsive to X-rays emitted by the sample, and a filter assembly with multiple filter materials located between the X-ray source and the detector. An analyzer is responsive to detector and is configured to analyze the intensities of X-rays irradiated by the sample at one power setting and to choose a filter material which suppresses certain intensities with respect to other intensities. A device, controlled by the analyzer, automatically moves the filter assembly to the chosen filter material and then the analyzer increases the power setting to analyze certain non-suppressed intensities.Type: ApplicationFiled: February 27, 2007Publication date: August 28, 2008Inventors: Brendan Connors, Brad Hubbard-Nelson, Don Sackett
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Patent number: 7416462Abstract: To reuse glass used in a flat panel display, processing suitable for global environment such as processing of separating a lead component must be realized. A disassembly processing method for a flat panel display having a structure in which a face plate and rear plate mainly containing glass are airtightly joined via a frame with frit glass is characterized by including the step of separating the face plate and rear plate joined with the frit glass. The separation step is characterized by separating the face plate and rear plate by cutting, dissolution, or melting.Type: GrantFiled: January 3, 2005Date of Patent: August 26, 2008Assignee: Canon Kabushiki KaishaInventors: Takashi Noma, Toyoko Kobayashi, Taiko Motoi, Hiromitsu Takase, Naoko Miura, Shin Kobayashi
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Publication number: 20080192889Abstract: A handheld X-ray fluorescence (XRF) spectrometer is described. The handheld XRF spectrometer comprises a radiation source, a silicon drift detector (SDD), a cooling device configured to regulate the temperature of the SDD, at least one signal processing and power control module coupled to at least one of the radiation source, the SDD, and the cooling device, and a housing substantially encasing the radiation source, the SDD, the cooling device, and the at least one signal processing and power control module. The at least one signal processing and power control module includes at least one input/output connector.Type: ApplicationFiled: February 14, 2008Publication date: August 14, 2008Inventors: Martin Rohde, Larry Stephen Price, Vassili Kobyitchak
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Patent number: 7409037Abstract: An X-ray fluorescence analyzer has a structure that defines a chamber (102). There is a window (103) to the chamber in a surface that is to come next to a sample (101) outside the chamber. The window (103) comprises a foil that is permeable to X-rays. A detector (104) receives fluorescent X-rays through said window (103). A low pressure source (508) is coupled to the chamber (102) and configured to controllably lower the pressure of a gaseous medium in the chamber (102) to a pressure value between 760 torr and 10 torr. The X-ray fluorescence analyzer maintains a lowered pressure of a value between 760 torr and 10 torr in the chamber (102) for the duration of an X-ray fluorescence measurement.Type: GrantFiled: May 5, 2006Date of Patent: August 5, 2008Assignee: Oxford Instruments Analytical OyInventors: Erkki Tapani Puusaari, Hannu Rintamäki
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Publication number: 20080159473Abstract: A beam of electronic charges and a standing wave laser beam are generated. The beam of charges is collided with the standing wave laser beam at a substantial angle to generate a burst cone of high energy x-rays. The x-ray cone is split, collimated and steered to a collapse point of diagnosis within a patient's body. A selected volume of the patient's body is scanned for diagnosis by directing subsequent burst cones at an array of points within the volume. The fluorescence spectra are detected from each of the points resulting from the high energy x-ray scanning. A chart is generated distinguishing fluorescence spectra emitted from various points within the volume.Type: ApplicationFiled: January 3, 2007Publication date: July 3, 2008Inventor: Haile Selassie Clay
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Publication number: 20080159474Abstract: A dual source tube XRF system and method wherein a first x-ray source is employed to direct x-rays in a first energy band at a sample and at least a second x-ray source is employed to direct x-rays in a second energy band at the sample. A detector is responsive to x-rays emitted by the sample after irradiation by the first and second x-ray sources. An analyzer is responsive to the detector and is configured to determine the amount of at least a first substance in the sample based on irradiation of the sample by the first x-ray source and to determine the amount of at least a second substance in the sample based on irradiation of the sample by the second x-ray source. A controller is responsive to the analyzer and is configured to energize the first and second x-ray sources either simultaneously or sequentially.Type: ApplicationFiled: December 27, 2006Publication date: July 3, 2008Inventors: Brad Hubbard-Nelson, Peter John Hardman
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Publication number: 20080152079Abstract: A hand-held XRF analyzer including an x-ray source for emitting x-rays through a window to a sample. A detector behind the window is responsive to x-rays irradiated by the sample. A controlled volume about the x-ray source and the detector is maintained in a vacuum or a predetermined purge condition for a predetermined amount of time for increasing the sensitivity of the analyzer. A processor is responsive to the detector for analyzes the spectrum of irradiated x-rays and responsive to a pressure sensor for detecting a pressure change inside the controlled volume. The processor is configured to detect if the vacuum or the predetermined purge condition has been compromised.Type: ApplicationFiled: December 20, 2006Publication date: June 26, 2008Inventors: Bridget Tannian, Brad Hubbard-Nelson, Alfred Oleru
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Patent number: 7387891Abstract: An optical instrument is provided for simultaneously illuminating two or more spaced-apart reaction regions with an excitation beam generated by a light source. A collimating lens can be disposed along a beam path between the light source and the reaction regions to form bundles of collimated excitation beams, wherein each bundle corresponds to a respective reaction region. Methods of analysis using the optical instrument are also provided.Type: GrantFiled: May 19, 2003Date of Patent: June 17, 2008Assignee: Applera CorporationInventors: Steven J. Boege, Mark F. Oldham, Eugene F. Young
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Publication number: 20080137807Abstract: In a method for checking for leakage from tubular batteries, when tubular batteries (Ba) are fed with their respective axial centers aligned in parallel to each other to pass through a leakage check mechanism (12), a sealed end face (33) of the tubular batteries (Ba) is irradiated with an X-ray (34). A fluorescent X-ray (40) coming out of the sealed end face (33) is incident upon a detector (39) through a detection window (35). In accordance with the result of analysis on whether the incident fluorescent X-ray (40) contains a fluorescent X-ray (40) associated with an electrolyte component, it is determined whether leakage has occurred from the tubular batteries (Ba). A length (L1, L3, L5) of the detection window (35) in a direction of feed of the tubular batteries (Ba) is set to be less than a spacing (C1, C2) between the tubular batteries (Ba).Type: ApplicationFiled: November 24, 2005Publication date: June 12, 2008Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.Inventors: Hironori Yukisada, Takahito Takahashi, Masao Nakamura, Kazutoshi Okubo, Masaya Nakata
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Patent number: 7386337Abstract: Methods for correcting a bone density value for an effect of lead are disclosed. One method includes determining an apparent bone density in a patient; applying a correction factor to the apparent bone density, the correction factor being based on a blood lead level; and deriving a corrected bone density value for the patient.Type: GrantFiled: May 2, 2003Date of Patent: June 10, 2008Assignee: University of RochesterInventor: J. Edward Puzas
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Patent number: 7375359Abstract: An instrument and method for measuring the elemental composition of a test material. The instrument has a source of penetrating radiation for irradiating an irradiated region of the test material, a detector for detecting fluorescence emission by the test material and for generating a detector signal, and a controller for converting the detector signal into a spectrum characterizing the composition of the test material. A platen of attenuating material extends outward from adjacent to, and surrounding, the irradiated surface of the test material. In certain embodiments, the thickness of the attenuating platen is tapered with increasing radial distance from the central irradiated region of the test material.Type: GrantFiled: May 25, 2006Date of Patent: May 20, 2008Assignee: Thermo NITON Analyzers LLCInventor: Lee Grodzins
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Patent number: 7375327Abstract: A method and device to accurately obtain very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. A quantity of wear on the surface of a measurement sample including a base and a coating layer is measured by making a spectrum of the surface elements in a reference sample using a surface-element analysis device which analyzes elements on the surface of a substance from an energy spectrum of charged particles obtained by applying excited ionization radiation on the reference sample equivalent to the measurement and by measuring charged particles generated from the surface of the substance. A step of obtaining signal intensity ratios of plural elements from the spectrum is repeated a plurality of times while the surface of the reference sample is being etched and calibration curves which indicate a distribution of the signal intensity ratios of the plural elements in the reference sample are made.Type: GrantFiled: November 7, 2005Date of Patent: May 20, 2008Assignee: Kabushiki Kaisha ToshibaInventors: Masahiko Yoshiki, Makoto Kato
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Patent number: 7358494Abstract: The material composition of a thin film formed on a substrate or covered by a cap layer that shares one or more elements with the thin film can be determined by combining characteristic material data, such as characteristic x-ray data, from a material composition analysis tool, such as an electron probe-based x-ray metrology (EPMA) operation, with thickness data and (optionally) possible material phases for the thin film. The thickness data and/or the material phase options can be used to determine, for example, the penetration depth of a probe e-beam of the EPMA tool. Based on the penetration depth and the thin film thickness, the characteristic x-ray data from the EPMA operation can be analyzed to determine the composition (e.g., phase or elemental composition) of the thin film. An EPMA tool can include ellipsometry capabilities for all-in-one thickness and composition determination.Type: GrantFiled: June 15, 2005Date of Patent: April 15, 2008Assignee: KLA-Tencor Technologies CorporationInventors: Ying Gao, Moshe Sarfaty
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Patent number: 7356114Abstract: An X-ray fluorescence spectrometer includes an X-ray source 7 for irradiating a sample 1 at a predetermined incident angle ø with primary X-rays 6, and a detecting device 9 for measuring an intensity of fluorescent X-rays 8 generated from the sample at a predetermined detection angle ? and ?, wherein with two combinations of the incident angle ø and the detection angle ? and ?, in which combinations the incident angles ø and/or the detection angles ? and ? are different from each other, each intensity of the fluorescent X-rays 8 is measured and, also, the incident angle ø and the detection angle ? and ? in each of the combination are so set that with respect to a measurement depth represented by the coating weight, at which the intensity of the fluorescent X-rays 8 attains a value equal to 99% of the uppermost limit when the coating weight of a target coating to be measured is increased, respective measurement depths in the two combinations may be a value greater than the coating weight of a coating 3.Type: GrantFiled: September 13, 2006Date of Patent: April 8, 2008Assignee: Rigaku Industrial CorporationInventors: Yoshiyuki Kataoka, Eiichi Furusawa, Hisayuki Kohno
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Patent number: 7312446Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.Type: GrantFiled: October 8, 2003Date of Patent: December 25, 2007Assignee: Applied Materials, Israel, Ltd.Inventor: Dror Shemesh
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Patent number: 7313220Abstract: A device for realizing an online element analysis for a substance (S) that is conveyed past or flows past a measuring station is provided with a device for conveying the substance to be measured, a measuring station with an X-ray source (10), and an X-ray fluorescence detector (20) with radiation inlet. To improve the tolerance to calibration errors and a changing height of the sample surface, at least one first X-ray conductor (30) extends from the radiation inlet of the X-ray fluorescence detector in the direction of the conveying device (51).Type: GrantFiled: July 3, 2003Date of Patent: December 25, 2007Inventor: Elisabeth Katz
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Patent number: 7286633Abstract: A fuel analysis system and method wherein an x-ray source emits x-rays at an energy level below but proximate the absorption edge of sulfur. A monochromator is in the optical path between the source and a fuel sample for directing x-rays at a single energy level at the fuel sample to limit excitation of any sulfur in the fuel sample. A detector is responsive to x-rays emitted by the sample and an analyzer is responsive to the detector and configured to determine the amount of silicon and aluminum in the sample.Type: GrantFiled: October 24, 2006Date of Patent: October 23, 2007Assignee: Innov-X Systems, Inc.Inventors: Peter John Hardman, Bradley Hubbard-Nelson
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Patent number: 7254212Abstract: A system, including a particulate matter analyzer and collecting filter, provides a method of analyzing and collecting samples from fluids, such as collecting particulate matter from air. A mass measuring unit and composition analyzing unit can be provided for either simultaneous or immediately consecutive measurements within a single instrument. The filter material can have an antistatic electricity characteristic and can be impregnated with reference material to enable calibration of the composition analyzing unit.Type: GrantFiled: April 15, 2004Date of Patent: August 7, 2007Assignee: Horiba, Ltd.Inventors: Katsumi Saitoh, Junji Kato, Masahiko Fujiwara, Masayoshi Shinohara
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Patent number: 7245696Abstract: An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used.Type: GrantFiled: May 29, 2002Date of Patent: July 17, 2007Assignee: Xradia, Inc.Inventors: Wenbing Yun, Kenneth W. Nill
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Patent number: 7233643Abstract: A measurement apparatus and method are provided for determining the material composition of a sample. An X-ray fluorescence detector (412) detects fluorescent X-rays coming from said sample under irradiation with incident X-rays. A laser source (301) is adapted to produce a laser beam. Focusing optics (302) focus said laser beam into a focal spot on a surface of said sample. An optical sensor (312) detects optical emissions coming from particles of said sample upon being exposed to said laser beam at said focal spot. A gas administration subsystem (104, 105, 106, 107, 108) is adapted to controllably deliver gas to a space (101) around said focal spot.Type: GrantFiled: May 20, 2005Date of Patent: June 19, 2007Assignee: Oxford Instruments Analytical OyInventors: Heikki Johannes Sipilä, Tero Eklin, Kai Kuparinen
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Patent number: 7220964Abstract: In various embodiments, techniques are described for combining an X-ray detector (e.g., for providing EPMA) and an electron detector (e.g., for providing AES) to provide a tool for determining film compositions and thicknesses on a specimen, such as a semiconductor structure or wafer. In one embodiment, a system includes a beam generator configurable to direct an electron beam towards a specimen. The electron beam may generate Auger electrons and X-rays. The system may also include at least one electron detector disposed adjacent to (e.g., above) the specimen to detect electrons and measure their energies emanating from a top layer of the specimen. One or more X-ray detectors may be disposed adjacent to the specimen to detect X-rays.Type: GrantFiled: May 18, 2005Date of Patent: May 22, 2007Assignee: KLA-Tencor Technologies CorporationInventors: Ying Gao, Gary Janik
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Patent number: 7200200Abstract: An X-ray fluorescence measuring system and related measuring methods are disclosed, the system using X-ray energy at a level of less than 80 KeV may be directed toward a material, such as coal. The energy fluoresced may be detected (10) and used to measure the elemental composition of the material, including trace elements. The material may be moving or stationary.Type: GrantFiled: September 3, 2002Date of Patent: April 3, 2007Assignee: Quality Control, Inc.Inventors: Melvin J. Laurila, Claus C. Bachmann
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Patent number: 7197110Abstract: A method for identifying hazardous substances in a printed wiring assembly having a plurality of discrete components, using micro X-ray fluorescence spectroscopy. A micro X-ray fluorescence spectroscopy (?-XRF) and/or X-ray Absorption Fine Structure (XAFS) spectroscopy are used as detecting analyzers, to identify materials of concern in an electronic device. The device or assembly to be examined is analyzed by moving it in the X, Y, and Z directions under a probe in response to information in a reference database, to determine elemental composition at selected locations on the assembly, the probe positioned at an optimum analytical distance from each selected location for analysis. The determined elemental composition at each selected location is then correlated to the reference database, and the detected elements are assigned to the various components in the assembly.Type: GrantFiled: November 29, 2004Date of Patent: March 27, 2007Assignee: Motorola, Inc.Inventors: Michael Riess, Steven M. Scheifers, William L. Olson
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Patent number: 7187751Abstract: A calculating device 10 for calculating the concentration of elements contained in a sample 13 based on the FP method is provided. The calculating device 10 is operable to assume a concentration of unmeasured elements as far as unmeasured elements, of which fluorescent X-rays are not measured, are concerned, and, also, to utilize, in place of the secondary X-rays emanating from the unmeasured elements contained in the sample, scattered X-rays of the primary X-rays at least equal in number to the number of the unmeasured elements, of which concentrations are assumed, and including scattered X-rays of different wavelengths before they are scattered from the sample.Type: GrantFiled: May 11, 2006Date of Patent: March 6, 2007Assignee: Rigaku Industrial CorporationInventors: Naoki Kawahara, Shinya Hara, Makoto Doi
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Patent number: 7170970Abstract: The concentration(s) of element(s) contained in an unknown sample is measured without necessity of judging the sample relying on a human's eye and obtaining information from a supplier of the sample previously. The concentration(s) of trace element(s) such as Cd, Pb and Hg contained in parts for electronic or electric equipment is determined by (1) irradiating the sample with an X-ray so as to identify whether the type of the sample is a nonmetal-based material or a metal-based material; (2) selecting measuring conditions for a fluorescent X-ray analysis depending on the identified type of the sample; and (3) measuring the concentration(s) of one or more element(s) contained in the sample by the fluorescent X-ray analysis according to the selected measuring conditions.Type: GrantFiled: August 5, 2005Date of Patent: January 30, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yoshiyuki Tani, Hiroshi Iwamoto, Takao Hisazumi, Yukihiro Iwata, Etsuyoshi Sakaguchi
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Patent number: 7130370Abstract: Inventions related to the intra-vision means, designed for production of visually sensed images of the internal structure of an object, in particular, of a biological object, are aimed at higher accuracy of determining the relative density indices of the object's substance in the obtained image together with avoiding complex and expensive engineering; when used for diagnostic purposes in medicine, the dosage of tissues surrounding those that are examined is decreased. X-rays from source 1 is concentrated (for example, using X-ray lens 2) in the zone that includes the current point 4, to which the measurement results are attributed and which is located within the target area 7 of the object 5. Excited in this zone secondary scattered radiation (Compton, fluorescent) is transported (for example, using X-ray lens 3) to one or more detectors 6.Type: GrantFiled: June 22, 2004Date of Patent: October 31, 2006Inventor: Muradin Abubekirovich Kumakhov
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Patent number: 7120226Abstract: A method for detecting nuclear species in a sample by adaptive scanning using nuclear resonance fluorescence may comprise illuminating the target sample with photons from a source; detecting a signal in an energy channel; determining a scan evaluation parameter using the signal detected; determining whether the scan evaluation parameter meets a detection efficiency criterion; adjusting one or more system parameters such that the scan evaluation parameter meets the detection efficiency criterion; and comparing the signal in an energy channel to a predetermined species detection criterion to identify a species detection event. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons scattered from the target sample. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons transmitted through the target sample and scattered from at least one reference scatterer.Type: GrantFiled: November 19, 2004Date of Patent: October 10, 2006Assignee: Passport Systems, Inc.Inventors: Robert J. Ledoux, William Bertozzi
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Patent number: 7106826Abstract: A system and method for detecting a substance using x-ray fluorescence is disclosed. The detected substances may be explosives or controlled substances that have a specific chemical fluorescent signature. An energy source transmits an x-ray beam at a target. The target may be in a container or under a surface. The beam interacts with the target to produce fluorescent energy. An x-ray detector is at an angle relative to the energy source and gathers the fluorescent energy. The angle differs according to the physical configuration of the system. A portable embodiment will have a different angle than a stationary embodiment. A cooling mechanism cools the x-ray detector. The fluorescent energy is analyzed and processed by a multichannel analyzer and a computer. The computer determines whether the fluorescent energy from the target matches known fluorescent energies of specific substances. If the substance is detected, appropriate indications are made to prevent damage or acceptance of the substance.Type: GrantFiled: October 11, 2002Date of Patent: September 12, 2006Assignee: CDEX, Inc.Inventors: Wade M. Poteet, Harold K. Cauthen, Timothy D. Shriver
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Patent number: 7065174Abstract: A portable measurement apparatus is presented for inducing and measuring fluorescent X-ray radiation. It comprises an X-ray source (303, 902, 1005, 1105) adapted to controllably irradiate a sample (301, 803) with X-rays, and a detector (305, 406, 1006, 1106) adapted to detect fluorescent radiation emitted by said sample (301, 803). The X-ray source (303, 902, 1005, 1105) is an X-ray tube, an anode of which comprises at least one of silver, rhodium and molybdenium. Consequently said X-ray tube is adapted to controllably emit L-line radiation of at least one of silver, rhodium and molybdenium.Type: GrantFiled: November 12, 2004Date of Patent: June 20, 2006Assignee: Oxford Instruments Analytical OyInventors: Heikki Johannes Sipilä, Riitta Kaijansaari
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Patent number: 7049590Abstract: A method of reducing atom ejection from a sample during electron beam bombardment. An electron beam is directed through a low pressure environment toward a surface of the sample. The electron beam thereby impinges on the sample at a target location, and thereby causes characteristic x-ray emission from the target location of the sample. A capping precursor is introduced into the low pressure environment, where the capping precursor forms a capping layer on the surface of the sample at the target location when contacted by the electron beam. The capping layer thereby reduces atom ejection from the sample at the target location, while not appreciably impeding and confounding the characteristic x-ray emission from the target location of the sample.Type: GrantFiled: October 28, 2004Date of Patent: May 23, 2006Assignee: KLA-Tencor Technologies CorporationInventor: David Aitan Soltz
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Patent number: 7046760Abstract: A method of measuring a concentration of dopants of an objective thin film includes measuring a concentration of dopants of a first wafer, forming the objective thin film on the first wafer to form a second wafer, measuring a concentration of dopants of the second wafer, and obtaining the concentration of dopants of the objective thin film by subtracting the concentration of dopants of the first wafer from the concentration of dopants of the second wafer. Therefore, the concentration of dopants of the objective thin film may be measured without the use of a criterion wafer, thereby reducing measuring time. Also, the concentration of dopants of the objective thin film may be easily controlled, and therefore promptly corrected if necessary.Type: GrantFiled: March 1, 2004Date of Patent: May 16, 2006Assignee: Samsung Electronics Co., Ltd.Inventors: Tae-Kyoung Kim, Sun-Yong Choi, Chung-Sam Jun, Jeong-Hyun Choi
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Patent number: 7039158Abstract: A thin film analysis system includes multi-technique analysis capability. Grazing incidence x-ray reflectometry (GXR) can be combined with x-ray fluorescence (XRF) using wavelength-dispersive x-ray spectrometry (WDX) detectors to obtain accurate thickness measurements with GXR and high-resolution composition measurements with XRF using WDX detectors. A single x-ray beam can simultaneously provide the reflected x-rays for GXR and excite the thin film to generate characteristic x-rays for XRF. XRF can be combined with electron microprobe analysis (EMP), enabling XRF for thicker films while allowing the use of the faster EMP for thinner films. The same x-ray detector(s) can be used for both XRF and EMP to minimize component count. EMP can be combined with GXR to obtain rapid composition analysis and accurate thickness measurements, with the two techniques performed simultaneously to maximize throughput.Type: GrantFiled: October 14, 2004Date of Patent: May 2, 2006Assignee: KLA-Tencor Technologies CorporationInventors: Gary R. Janik, Jeffrey Moore
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Patent number: 7023954Abstract: A method for X-ray analysis of a sample includes aligning an optical radiation source with an X-ray excitation source, so that a spot on the sample that is irradiated by an X-ray beam generated by the X-ray excitation source is illuminated with optical radiation generated by the optical radiation source. Optical radiation that is reflected from the sample is used to generate a first signal, which is indicative of an alignment of the spot on the sample. The X-ray beam is aligned, responsively to the first signal, so that the spot coincides with a target area of the sample. X-ray photons received from the spot on the sample, after aligning the X-ray beam, are used in generating a second signal that is indicative of a characteristic of the target area.Type: GrantFiled: September 29, 2003Date of Patent: April 4, 2006Assignee: Jordan Valley Applied Radiation Ltd.Inventors: Tzachi Rafaeli, Isaac Mazor
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Patent number: 7020238Abstract: The measurement head (101) of an X-ray fluorescence analyzer device is protected against heat from a hot target by using an adapter (201). It comprises a sheet of material having low thermal conductivity and has a three-dimensional shape that follows the form of a front part of the measurement head (101). Said sheet of material is attached to said measurement head (101) and has a central part (401) which defines an opening (202) coincident with a radiation window (109) in said measurement head (101). Said attachment means (204, 205, 301, 302, 311, 312) are located at a part of said sheet of material that is distant from said central part (401).Type: GrantFiled: January 31, 2005Date of Patent: March 28, 2006Assignee: Oxford Instruments Analytical OyInventors: Esko Juhani Kantonen, Janne Adolf Petteri Kesälä, Erkki Tapani Puusaari, Heikki Johannes Sipilä
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Patent number: 7016462Abstract: A device, system and method for detecting and measuring concentrations of elements in fluids comprises: flowing a fluid through a central flow interelectrode gap of an ionic preconcentration cell separating an upper high specific surface area electrode from a lower high specific surface area electrode of the ionic preconcentration cell by a predetermined interelectrode gap width; and applying a voltage differential between the upper high surface area electrode and the lower high surface area electrode while the fluid is flowing through the central flow interelectrode gap. As such, this cell that utilizes its inherent capacitance for double layer formation to extract ultra-trace levels of ionic contaminants from fluids in order to enhance detection by x-ray fluorescence analysis.Type: GrantFiled: November 8, 2002Date of Patent: March 21, 2006Assignees: InterScience, Inc., KMD Science, Inc.Inventors: Robert F. Keville, Daniel D. Dietrich
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Patent number: 7016463Abstract: To provide a sample retainer for X-ray fluorescence analysis, which is used in pretreating a liquid sample and then in X-ray fluorescence analysis of contents of such liquid sample, can sufficiently improve the limit of detection by suppressing the background and, also, allowing the fluorescent X-rays of a high intensity to be emitted uniformly, the sample retainer 5 comprises a ring-shaped pedestal 2; a hydrophobic film 3 of a thickness smaller than 10 ?m and having a peripheral portion 3a held by the pedestal and also having a transmitting portion 3b for passage of X-rays therethrough; and a sheet-like liquid absorbent element 4 applied to the transmitting portion 3b of the hydrophobic film 3 and having a thickness within the range of 1 to 100 ?m; wherein a liquid sample 1 is adapted to be dispensed dropwise onto and dried on the liquid absorbent element 4b with contents of the liquid sample 1 consequently retained thereon.Type: GrantFiled: March 31, 2004Date of Patent: March 21, 2006Assignee: Rigaku Industrial CorporationInventors: Takao Moriyama, Michiko Inoue
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Patent number: 7006596Abstract: A spectrometer for detecting and quantifying elements in a sample. An exciter ionizes atoms in the sample, and the atoms thereby produce characteristic x-rays. A detector receives the x-rays and produces signals based on the x-rays. A filter system selectively blocks the x-rays from attaining the detector. The selective blocking of the x-rays is accomplished based on an energy of the x-rays. An analyzer receives the signals from the detector and detects and quantifies the elements in the sample based at least in part on the signals. In this manner, detector receives the light element x-rays, and the medium and heavy element x-rays are filtered out to avoid overwhelming the detector. This invention combines the large solid angle, high efficiency, and ability to measure the continuous background spectrum of the energy dispersive x-ray detector with the selectivity of the wavelength dispersive x-ray detector. It thus enables faster and more accurate measurement of light elements in thin films.Type: GrantFiled: May 9, 2003Date of Patent: February 28, 2006Assignee: KLA-Tencor Technologies CorporationInventor: Gary R. Janik
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Patent number: 6937691Abstract: An X-ray fluorescence spectrometric system includes a sample pre-treatment apparatus 10 for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and subsequently dried, an X-ray fluorescence spectrometer 40, and a transport apparatus 50 for transporting the substrate from the sample pre-treatment apparatus towards the X-ray fluorescence spectrometer, which system as a whole is easy to operate. This spectrometric system also includes a control apparatus 50 for controlling the sample pre-treatment apparatus 10, the X-ray fluorescence spectrometer 40 and the transport apparatus 50 in a totalized fashion.Type: GrantFiled: September 5, 2002Date of Patent: August 30, 2005Assignee: Rigaku Industrial CorporationInventors: Motoyuki Yamagami, Akihiro Ikeshita
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Patent number: 6934359Abstract: X-ray fluorescence (XRF) spectroscopy systems and methods are provided. One system includes a source of x-ray radiation and an excitation optic disposed between the x-ray radiation source and the sample for collecting x-ray radiation from the source and focusing the x-ray radiation to a focal point on the sample to incite at least one analyte in the sample to fluoresce. The system further includes an x-ray fluorescence detector and a collection optic comprising a doubly curved diffracting optic disposed between the sample and the x-ray fluorescence detector for collecting x-ray fluorescence from the focal point on the sample and focusing the fluorescent x-rays towards the x-ray fluorescence detector.Type: GrantFiled: December 19, 2003Date of Patent: August 23, 2005Assignee: X-Ray Optical Systems, Inc.Inventors: Zewu Chen, David M. Gibson
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Patent number: 6909770Abstract: Apparatus and methods in which one or more elemental taggants that are intrinsically located in an object are detected by x-ray fluorescence analysis under vacuum conditions to identify or verify the object's elemental content for elements with lower atomic numbers. By using x-ray fluorescence analysis, the apparatus and methods of the invention are simple and easy to use, as well as provide detection by a non line-of-sight method to establish the origin of objects, as well as their point of manufacture, authenticity, verification, security, and the presence of impurities. The invention is extremely advantageous because it provides the capability to measure lower atomic number elements in the field with a portable instrument.Type: GrantFiled: November 29, 2002Date of Patent: June 21, 2005Assignees: The United States of America as represented by the United States National Aeronautics and Space Administration, Keymaster Technologies, Inc.Inventors: Fred Schramm, Bruce Kaiser
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Patent number: 6895071Abstract: Reflectometry apparatus includes a radiation source, adapted to irradiate a sample with radiation over a range of angles relative to a surface of the sample, and a detector assembly, positioned to receive the radiation reflected from the sample over the range of angles and to generate a signal responsive thereto. A shutter is adjustably positionable to intercept the radiation, the shutter having a blocking position, in which it blocks the radiation in a lower portion of the range of angles, thereby allowing the reflected radiation to reach the array substantially only in a higher portion of the range, and a clear position, in which the radiation in the lower portion of the range reaches the array substantially without blockage.Type: GrantFiled: August 6, 2003Date of Patent: May 17, 2005Assignee: Jordon Valley Applied Radiation, Ltd.Inventors: Boris Yokhin, Alexander Dikopoltsev, Isaac Mazor, David Berman
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Patent number: 6885726Abstract: A fluorescent X-ray analysis apparatus includes: an X-ray generation source for radiating a beam of primary X-rays; spectroscopic elements circularly arranged so that their inner surfaces describe a circle centered on an optical axis of the beam of primary X-rays for monochromatizing the beam of primary X-rays and condensing the beam on a surface of an irradiation object; a spectroscopic element position adjuster for adjusting the positions of the spectroscopic elements; secondary X-rays detector for detecting secondary X-rays radiated from the surface of the irradiation object irradiated with the monochromatized beam of primary X-rays; a secondary X-ray detector position adjuster adjusting the position of the secondary X-ray detector; an irradiation object surface position detector detecting the position of the surface of the irradiation object; and a controller adjusting the positions of the spectroscopic elements through the spectroscopic element position adjuster to condense the monochromatized beam of prType: GrantFiled: April 22, 2003Date of Patent: April 26, 2005Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Yasushi Uehara, Teruo Shibano
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Patent number: 6885727Abstract: An apparatus determines the thickness and composition of a multi-layered sample comprised of at least a copper layer and a tin-copper alloy plating layer disposed on the copper layer. The sample is irradiated with primary X-rays and an energy-dispersive X-ray detector detects fluorescent X-rays and diffracted X-rays emitted from the sample. An X-ray spectrum of the detected fluorescent X-rays and diffracted X-rays is generated. The concentration of copper in the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the diffracted X-rays in the X-ray spectrum. The thickness of the tin-copper alloy plating layer of the sample is determined utilizing peak intensities of the fluorescent X-rays in the X-ray spectrum and the determined copper concentration.Type: GrantFiled: August 6, 2002Date of Patent: April 26, 2005Assignee: SII NanoTechnology Inc.Inventor: Koichi Tamura