Monochromator Or Focusing Device Patents (Class 378/84)
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Patent number: 8357894Abstract: An improved microcalorimeter-type energy dispersive x-ray spectrometer provides sufficient energy resolution and throughput for practical high spatial resolution x-ray mapping of a sample at low electron beam energies. When used with a dual beam system that provides the capability to etch a layer from the sample, the system can be used for three-dimensional x-ray mapping. A preferred system uses an x-ray optic having a wide-angle opening to increase the fraction of x-rays leaving the sample that impinge on the detector and multiple detectors to avoid pulse pile up.Type: GrantFiled: August 10, 2010Date of Patent: January 22, 2013Assignee: FEI CompanyInventors: Milos Toth, Michael R. Scheinfein, Eric Silver, David Narum
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Publication number: 20120294426Abstract: The invention relates to a device for the delivery of a beam of X-rays for analysis of a sample (50), comprising: a source block (100) comprising X-ray emission means; an optical block (200) placed downstream of the source block (100), said optical block (200) comprising an optical monochromator component (210) having a reflecting surface (212) provided for conditioning X-rays emitted by the source block (100) according to unidimensional or bidimensional optical effect; and definition means (300) of X-rays comprising: an anti-diffusing member (310) for spatially delimiting X-rays conditioned by the optical monochromator component (210), placed downstream of the optical monochromator component (210) and comprising one or more plates (311) having portions (313) arranged to form a delimiting orifice (312), said portions (313) being coated with a monocrystalline material limiting the scattering of X-rays; a cut-off member (320) of X-rays emitted by the source block (100), comprising X-ray absorption means arrType: ApplicationFiled: January 18, 2011Publication date: November 22, 2012Applicant: XENOCSInventors: Pierre Panine, Peter Hoghoj
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Patent number: 8315358Abstract: Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods are disclosed. A DEI system, including strain matched crystals can comprise an X-ray source configured to generate a first X-ray beam. A first monochromator crystal can be positioned to intercept the first X-ray beam for producing a second X-ray beam. A second monochromator crystal can be positioned to intercept the second X-ray beam to produce a third X-ray beam for transmission through an object. The second monochromator crystal has a thickness selected such that a mechanical strain on a side of the first monochromator crystal is the same as a mechanical strain on the second monochromator crystal. An analyzer crystal has a thickness selected such that a mechanical strain on a side of the first monochromator crystal is the same as a mechanical strain on the analyzer crystal.Type: GrantFiled: June 3, 2010Date of Patent: November 20, 2012Assignee: Nextray, Inc.Inventors: Dean Connor, Zhong Zhong, Christopher Parham, Etta Pisano
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Patent number: 8311184Abstract: An X-ray imaging system that produces one or more fan-shaped beams is described. The system includes a target for emitting X rays that includes at least one target focal spot, and one or more graded multilayer optic devices in optical communication with the target. The optics transmits at least a portion of the source X rays to produce the one or more fan-shaped beams. The graded multilayer optic devices include at least a first graded multilayer section for redirecting and transmitting X rays through total internal reflection. The graded multilayer section includes a high-index layer of material having a first complex refractive index n1, a low-index layer of material having a second complex refractive index n2, and a grading zone disposed between the high-index and low-index layers of material. The grading zone includes a grading layer having a third complex refractive index n3 such that Re(n1)>Re(n2)>Re(n3).Type: GrantFiled: August 30, 2010Date of Patent: November 13, 2012Assignee: General Electric CompanyInventors: Susanne Madeline Lee, Peter Michael Edic, Forrest Frank Hopkins
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Patent number: 8249220Abstract: An x-ray optical system includes an x-ray source which emits x-rays, a first optical element which conditions the x-rays to form two beams and at least a second optical element which further conditions at least one of the two beams from the first optical element.Type: GrantFiled: October 14, 2009Date of Patent: August 21, 2012Assignee: Rigaku Innovative Technologies, Inc.Inventors: Boris Verman, Yuriy Platonov, Licai Jiang
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Patent number: 8243879Abstract: A source grating for X-rays and the like which can enhance spatial coherence and is used for X-ray phase contrast imaging is provided. The source grating for X-rays is disposed between an X-ray source and a test object and is used for X-ray phase contrast imaging. The source grating for X-rays includes a plurality of sub-gratings formed by periodically arranging projection parts each having a thickness shielding an X-ray at constant intervals. The plurality of sub-gratings are stacked in layers by being shifted.Type: GrantFiled: April 13, 2009Date of Patent: August 14, 2012Assignee: Canon Kabushiki KaishaInventors: Hidenosuke Itoh, Yoshikatsu Ichimura, Takashi Nakamura, Aya Imada
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Patent number: 8223925Abstract: A collimating device is described. The collimating device includes a housing defining an interior surface and an exterior surface of the collimating device. The housing includes an inlet and an outlet and a cavity extending between the inlet and the outlet. The collimating device also includes a plurality of ridges extending from the interior surface of the housing toward a center of the cavity. The plurality of ridges form a plurality of slits within the cavity configured to collimate radiation entering the inlet and exiting the outlet.Type: GrantFiled: April 15, 2010Date of Patent: July 17, 2012Assignee: Bruker AXS Handheld, Inc.Inventor: Robert F. Shannon, Jr.
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Patent number: 8208602Abstract: A system for producing at least one high flux photon beam is provided. The system includes two or more photon sources configured to produce photon beams, and at least one first stage optic device coupled to at least one of the photon sources and providing at least one focused photon beam through total internal reflection, wherein at least one of the photon beams and the focused photon beams are combined at a virtual focal spot.Type: GrantFiled: February 22, 2010Date of Patent: June 26, 2012Assignee: General Electric CompanyInventors: Susanne Madeline Lee, Peter Michael Edic, Vanita Mani, Forrest Frank Hopkins, Eberhard Neuser
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Patent number: 8204174Abstract: Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources are disclosed. A plurality of monochromator crystals may be positioned to intercept the plurality of first X-ray beams such that a plurality of second X-ray beams each having predetermined energy levels is produced. Further, an object to be imaged may be positioned in paths of the second x-ray beams for transmission of the second X-ray beams through the object and emitting from the object a plurality of transmission X-ray beams. The X-ray beams may be directed at angles of incidence upon a plurality of analyzer crystals for detecting an image of the object.Type: GrantFiled: February 19, 2010Date of Patent: June 19, 2012Assignee: Nextray, Inc.Inventors: Dean Connor, Christopher Parham, Etta Pisano, Waldo S. Hinshaw, Zhong Zhong, Brian P. Wilfley
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Publication number: 20120140891Abstract: A method and device for spectrometry analysis and for extracting a primary diffuse spectrum from a diffusion spectrum of diffuse radiation, according to a diffusion angle, coming from a material exposed to incident radiation through a surface, that includes the application of a spectral response function organized in the form of a matrix (M), known as a correlation matrix, of which each value aij corresponds with a number of detected photons, with energy Ei, constituting the multiple diffuse radiation, when a photon is detected, with energy Ej, of the primary diffuse radiation.Type: ApplicationFiled: December 5, 2011Publication date: June 7, 2012Applicant: Commissariat A L'Energie Atomique et Aux Energies AlternativesInventors: Joachim TABARY, Jean RINKEL
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Publication number: 20120114101Abstract: Systems and methods are disclosed herein for lenses based on crystal X-ray diffraction and reflection to be used to direct and energy filter X-ray beamsType: ApplicationFiled: November 23, 2011Publication date: May 10, 2012Inventors: Robert J. Ledoux, William Bertozzi, Stephen E. Korbly
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Patent number: 8175221Abstract: An x-ray beam processor system that includes an x-ray beam generator for generating x-ray beams; a collecting cone that includes multilayer waveguide optics; a condensing cone that includes multilayer waveguide optics; and polycapillary tubes with channels, where the polycapillary tubes link the collecting cone and the condensing cone.Type: GrantFiled: October 12, 2010Date of Patent: May 8, 2012Assignee: Inspired Surgical Technologies, Inc.Inventor: Kenneth Oosting
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Patent number: 8139717Abstract: A method for making a secondary collimator that includes at least one plate having a plurality of slits defined therein includes determining a gap thickness between plate positions of the secondary collimator based on at least one dimension of the at least one plate and fabricating a base plate from a base plate blank. The base plate includes at least two slots being spaced apart by the gap thickness. The at least one plate is inserted into a first slot of the at least two slots to form the secondary collimator.Type: GrantFiled: October 2, 2009Date of Patent: March 20, 2012Assignee: Morpho Detection, Inc.Inventors: Geoffrey Harding, Helmut Rudolf Otto Strecker, Peter Michael Edic
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Publication number: 20120063569Abstract: An x-ray focusing device and method for adjustably focusing x-rays in two orthogonal directions simultaneously. The device and method can be operated remotely using two pairs of orthogonal benders mounted on a rigid, open frame such that x-rays may pass through the opening in the frame. The added x-ray flux allows significantly higher brightness from the same x-ray source.Type: ApplicationFiled: September 8, 2011Publication date: March 15, 2012Applicant: Brookhaven Science Associates. LLCInventors: Edwin G. Haas, Christopher Stelmach, Zhong Zhong
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Publication number: 20120057677Abstract: The present invention relates to phase-contrast imaging which visualizes the phase information of coherent radiation passing a scanned object. Focused gratings are used which reduce the creation of trapezoid profile in a projection with a particular angle to the optical axis. A laser supported method is used in combination with a dedicating etching process for creating such focused grating structures.Type: ApplicationFiled: June 9, 2010Publication date: March 8, 2012Applicant: Koninklijke Philips Electronics N.V.Inventors: Gereon Vogtmeier, Klaus Juergen Engel, Thomas Koehler, Ewald Roessl
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Patent number: 8130902Abstract: Active optics apparatus and method for aligning active optics are provided for a high-resolution, active optic fluorescence analyzer combining a large acceptance solid angle with wide energy tunability. A plurality of rows of correctors selectively controlled to bend an elongated strip of single crystal material like Si (400) into substantially any precisely defined shape. A pair of pushers engages opposite ends of the silicon crystal strip exert only a force along the long axis of the crystal strip, and does not induce additional bending moments which would result in a torsion of the crystal.Type: GrantFiled: July 31, 2007Date of Patent: March 6, 2012Assignee: UChicago Argonne, LLCInventors: Bernhard W. Adams, Klaus Attenkofer, Oliver A. Schmidt
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Patent number: 8121254Abstract: On a multilayer film mirror, a protective layer is formed having a varied composition in the depth direction. The protective layer includes an interface side layer formed on a thin film layer, i.e., the outermost layer of a multilayer film, a surface side layer provided on the interface side layer as the outermost surface of an optical element, and an intermediate layer. The interface side layer has properties such as providing relative absorption of non-exposure light from a light source. The surface side layer suppresses oxidation of the surface of the multilayer film.Type: GrantFiled: July 24, 2009Date of Patent: February 21, 2012Assignee: Nikon CorporationInventors: Katsuhiko Murakami, Takaharu Komiya
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Patent number: 8085900Abstract: A Method for X-ray wavelength measurement and an X-ray wavelength measurement apparatus capable of determining absolute wavelength easily and carrying out wavelength measurement having high precision with a simple structure are provided. The present invention is a Method for X-ray wavelength measurement carried out by using a channel-cut crystal for wavelength measurement (20) in which two opposing cut planes are formed and the lattice constant of which is known, and the method diffracts X-ray in respective arrangements (?, +) and (+, ?) of the channel-cut crystal for wavelength measurement (20), to determine the absolute wavelength of the X-ray from the difference between crystal rotation angles in respective arrangements. This makes the alignment simpler, and, when only a channel-cut crystal suitable for measurement can be prepared, X-ray wavelength measurement can be carried out easily and with high precision.Type: GrantFiled: December 22, 2009Date of Patent: December 27, 2011Assignee: Rigaku CorporationInventor: Kazuhiko Omote
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Publication number: 20110299658Abstract: For a quasi-monochromatic x-ray radiation with high radiation intensity, an x-ray radiator generates quasi-monochromatic x-ray radiation to expose a subject from a point-shaped radiation source that emits a polychromatic x-ray radiation, and having a diffraction device to diffract the polychromatic x-ray radiation. The diffraction device has a super-mirror made of crystalline material with a flat surface. In the super-mirror, the crystalline material has at least one (in particular continuous) variation of the lattice plane spacing of the crystal lattice. The radiation source and the diffraction device are arranged such that quasi-monochromatic x-ray radiation is generated from the polychromatic x-ray radiation by partial reflection at the super-mirror.Type: ApplicationFiled: June 7, 2011Publication date: December 8, 2011Inventor: Philipp Bernhardt
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Patent number: 8068582Abstract: Systems and methods are disclosed herein for lenses based on crystal X-ray diffraction and reflection to be used to direct and energy filter X-ray beams.Type: GrantFiled: February 22, 2008Date of Patent: November 29, 2011Assignee: Passport Systems, Inc.Inventors: Robert J. Ledoux, William Bertozzi, Stephen E. Korbly
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Patent number: 8011830Abstract: A method and a system for calibrating an X-ray photoelectron spectroscopy (XPS) measurement are described. The method includes using an X-ray beam to generate an XPS signal from a sample and normalizing the XPS signal with a measured or estimated flux of the X-ray beam. The system includes an X-ray source for generating an X-ray beam and a sample holder for positioning a sample in a pathway of the X-ray beam. A detector is included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. Also included are a flux detector for determining a measured or estimated flux of the X-ray beam and a computing system for normalizing the XPS signal with the measured or estimated flux of the X-ray beam.Type: GrantFiled: April 27, 2009Date of Patent: September 6, 2011Assignee: Revera IncorporatedInventors: Bruno W. Schueler, David A. Reed, Bruce H. Newcome, Jeffrey A. Moore
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Patent number: 8000443Abstract: A high precision posture control method for sustaining the posture of an X-ray optical element constantly at 1 ?rad or less. A longitudinal condensation mirror and a lateral condensation mirror, each having a condensation plane band consisting of an elliptical reflective surface, are arranged perpendicularly to each other to form a K-B mirror arrangement. Fresnel mirrors are respectively constituted of a pair of planar reflective surfaces formed in the vicinities of the incident side end and the exit side end of the condensation plane band of each condensation mirror. Interference fringe by the Fresnel mirror of each condensation mirror is independently monitored at a position insusceptible to a condensation beam by the condensation plane band, and variation in interference fringe is detected electrically and its detection signal is used as a feedback signal for posture control of each condensation mirror.Type: GrantFiled: July 17, 2007Date of Patent: August 16, 2011Assignees: JTEC Corporation, Osaka UniversityInventors: Kazuto Yamauchi, Hidekazu Mimura, Hiromi Okada
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Patent number: 7991116Abstract: An x-ray system or method for exciting a sample under x-ray analysis, using a curved monochromating optic for directing a monochromatic x-ray beam from an x-ray source towards a first focal area. A second optic is positioned within, and receives, the monochromatic x-ray beam, and directs a focused x-ray beam towards a second focal area on the sample. A detector is positioned near the sample to collect radiation from the sample as a result of the focused x-ray beam. The curved monochromating optic produces a beam spot size at the first focal area larger than a beam spot size produced by the second optic at the second focal area, therefore, a beam spot size on the sample is thereby reduced using the second optic. Doubly-curved monochromating optics, and polycapillary optics, are disclosed as possible implementations of the optics.Type: GrantFiled: July 26, 2006Date of Patent: August 2, 2011Assignee: X-Ray Optical Systems, Inc.Inventors: Zewu Chen, Ning Gao, Walter Gibson
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Patent number: 7983389Abstract: An X-ray optical element (1, 1?, 1?) with a Soller slit comprising several lamellas for collimating an X-ray beam with respect to the direction of the axis (5, 15) of the Soller slit, and a further collimator for delimiting an X-ray (10), wherein the further collimator is rigidly connected to the Soller slit (2, 14) during operation, is characterized in that the X-ray beam (10) delimited by the further collimator intersects the axis (5, 15) of the Soller slit within the Soller slit, and the direction of the X-ray beam (10) subtends an angle ??10° with respect to the axis (5, 15) of the Soller slit. An X-ray optical element (1, 1?, 1?) with a Soller slit (2, 14) and a further collimator is thereby realized, which permits automatic change between the Soller slit (2, 14) and the further collimator.Type: GrantFiled: November 25, 2009Date of Patent: July 19, 2011Assignee: Bruker AXS GmbHInventors: Christoph Ollinger, Norbert Kuhnmuench
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Publication number: 20110170666Abstract: An x-ray analysis apparatus for illuminating a sample spot with an x-ray beam. An x-ray tube is provided having a source spot from which a diverging x-ray beam is produced having a characteristic first energy, and bremsstrahlung energy; a first x-ray optic receives the diverging x-ray beam and directs the beam toward the sample spot, while monochromating the beam; and a second x-ray optic receives the diverging x-ray beam and directs the beam toward the sample spot, while monochromating the beam to a second energy. The first x-ray optic may monochromate characteristic energy from the source spot, and the second x-ray optic may monochromate bremsstrahlung energy from the source spot. The x-ray optics may be curved diffracting optics, for receiving the diverging x-ray beam from the x-ray tube and focusing the beam at the sample spot. Detection is also provided to detect and measure various toxins in, e.g., manufactured products including toys and electronics.Type: ApplicationFiled: March 3, 2009Publication date: July 14, 2011Applicant: X-RAY OPTICAL SYSTEMS, INC.Inventors: Zewu Chen, David M. Gibson, Walter M. Gibson, Adam Bailey, R. Scott Semken, Kai Xin, John H. Burdett
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Patent number: 7978822Abstract: An X-ray imaging device and alignment/scanning system include at least one multilayer X-ray mirror mounted on a multi-axis adjustable mirror mount pivotable about a scanning axis. A mirror scanner is coupled with the mirror mount and synchronized with the X-ray source so that the mirror scanner moves the mirror mount about the scanning axis. The invention may include a plurality of mirrors, optionally in a stack, and preferably including first and second mirrors respectively adapted to reflect X-rays of first and second energies. A movable attenuation plate having a window selectively allows X-rays to be transmitted by one of the mirrors and blocks X-rays from the other mirror(s). Sets of the mirrors may be configured in blocks or interspersed. The mirror scanner may be operable at variable speeds to enable selective control of the scanning speed of the mirror.Type: GrantFiled: January 30, 2009Date of Patent: July 12, 2011Assignee: Reflective X-Ray Optics LLCInventor: David L. Windt
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Publication number: 20110135059Abstract: An X-ray optical configuration (1), comprising a position for an X-ray source (2), a position for a sample (3), a first focusing element (4) for directing X-ray radiation from the position of the X-ray source (2) via an intermediate focus (5) onto the position of the sample (3), and an X-ray detector (6) that can be moved on a circular arc (7) of radius R around the position of the sample (3), is characterized in that the configuration also comprises a second focusing element (8) for directing part of the X-ray radiation emanating from the intermediate focus (5) onto the position of the sample (3), and an aperture system (9) for selecting between illumination of the position of the sample (3) exclusively and directly from the intermediate focus (5) (=first optical path (10?)), or exclusively via the second focusing element (8) (=second optical path (10?)).Type: ApplicationFiled: November 30, 2010Publication date: June 9, 2011Applicant: Bruker AXS GmbHInventor: Christoph Ollinger
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Publication number: 20110129065Abstract: An X-ray monochromator including: a substrate having a concave surface; and an inorganic oxide film formed on the concave surface and having a plurality of pores, in which the plurality of pores of the inorganic oxide film being laid periodically in a stacked manner in the normal directions of the concave surface, and in which the plurality of pores being cylindrical is provided. The X-ray monochromator shows an excellent X-ray spectroscopic performance.Type: ApplicationFiled: October 29, 2010Publication date: June 2, 2011Applicant: CANON KABUSHIKI KAISHAInventors: Atsushi Komoto, Hirokatsu Miyata, Wataru Kubo
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Patent number: 7936860Abstract: An X-ray condensing method and its device are provided with an X-ray mirror that has a wavefront adjustable function to finely adjust a wavefront of a reflecting X-ray, measure an X-ray intensity distribution in the vicinity of a focus, measure an X-ray intensity distribution in the vicinity of the X-ray mirror or use a known X-ray intensity distribution of an incident X-ray, calculate a complex amplitude distribution at the reflective surface by using a phase restoration method from the X-ray intensity distribution in the vicinity of the focus and the X-ray intensity distribution in the vicinity of the reflective surface, calculate a wavefront aberration of an X-ray condensing optical system from the complex amplitude distribution, and control the reflective surface of the X-ray mirror with the wavefront adjustable function so that the wavefront aberration is minimized.Type: GrantFiled: December 27, 2007Date of Patent: May 3, 2011Assignees: JTEC Corporation, Osaka UniversityInventors: Kazuto Yamauchi, Hidekazu Mimura, Hiromi Okada
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Patent number: 7924978Abstract: System and method for XRD-based threat detection. An object is scanned with a first threat detection system. One or more alarm objects are identified. Data about the one or more alarm objects is passed from the first threat detection system to a second threat detection system and is used to move and/or to rotate the object in a predetermined ray path that decreases attenuation of scattered x-ray radiation. Also disclosed is a secondary collimator for XRD-based false alarm resolution in computed tomography {“CT”) threat detection systems. The secondary collimator comprises one or more slit apertures configured to provide a multi-angle capability that extends a range of momenta for which XRD intensities are measured for a predetermined range of photon intensities.Type: GrantFiled: February 23, 2009Date of Patent: April 12, 2011Assignee: Morpho Detection Inc.Inventor: Geoffrey Harding
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Patent number: 7903785Abstract: Provided is a method of bright-field imaging using x-rays in a sample to reveal lattice defects as well as structural inhomogeneities, the method comprising: (a) disposing a sample on a holder in the Laue transmission geometry and setting the sample to a single reflection in the Bragg diffraction; (b) projecting a beam of monochromatic x-rays on the sample; and (c) obtaining transmitted radiographic images and reversed diffracted images of the projected beam of monochromatic x-rays by the sample, respectively.Type: GrantFiled: July 12, 2006Date of Patent: March 8, 2011Assignees: Postech Foundation, Postech Academy-Industry FoundationInventors: Jung Ho Je, Jae Mok Yi
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Patent number: 7903784Abstract: Disclosed are an apparatus and method of filtering a narrow band X-ray. The apparatus includes a micro filter array to configure a plurality of micro filters in an array, a filter array storing unit to store a filter table having information about an angle of each of the plurality of micro filters within the micro filter array, and a control unit to retrieve the filter table to ascertain the angle of each of the plurality of micro filters. The control unit also controls an angle between each of the plurality of micro filters and a panel supporting the plurality of micro filters to be the ascertained angle, and filters and output a received broadband polychromatic X-ray to be the narrow band X-ray.Type: GrantFiled: June 17, 2009Date of Patent: March 8, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jong Ha Lee, Dong Goo Kang, Sung Su Kim, Young Hun Sung
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Patent number: 7889842Abstract: The invention relates to a crystalline lithium fluoride doped with at least 0.018 mol per kg of a divalent positive ion M present in the fluoride state, in particular of the single-crystal type. The ion may be Mg2+, Zn2+ or Co2+. This fluoride has a high reflectivity and intense radiation that can emanate therefrom may be effectively received by a fast light scintillator, especially of the rare-earth halide type. It is particularly useful as a monochromator for X-ray fluorescence radiation for the purpose of elemental analysis.Type: GrantFiled: January 13, 2005Date of Patent: February 15, 2011Assignee: Saint-Gobain Cristaux Et DetecteursInventors: Guillaume Gautier, Philippe Derouineau
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Patent number: 7881432Abstract: Disclosed is an X-ray reflecting device and an X-ray reflecting element constituting the X-ray reflecting device capable of facilitating a reduction in weight and being prepared in a relatively simple manner. The X-ray reflecting element of the present invention comprises a body made of a solid silicon, and a plurality of slits formed in the body in such a manner as to penetrate from a front surface to a back surface of the body. Each of the slits has a wall surface serving as an X-ray reflecting surface.Type: GrantFiled: April 4, 2008Date of Patent: February 1, 2011Assignee: Japan Aerospace Exploration AgencyInventors: Kazuhisa Mitsuda, Yuichiro Ezoe
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Patent number: 7875857Abstract: An X-ray photoelectron spectroscopy analysis system for analysing an insulating sample 20, and a method of XPS analysis. The system comprises an X-ray generating means 30 having an exit opening 32 and being arranged to generate primary X-rays 46,56 which pass out of the exit opening in a sample direction towards a sample surface 22 for irradiation thereof. It has been found that the X-ray generating means in use additionally generates unwanted electrons 258 which may pass out of the exit opening substantially in the sample direction and cause undesirable sample charging effects. The system further comprises an electron deflection field generating means 380,480,580 arranged to generate a deflection field upstream of the sample surface. The deflection field is configured to deflect the unwanted electrons away from the sample direction, such that the unwanted electrons are prevented from reaching the sample surface.Type: GrantFiled: October 3, 2007Date of Patent: January 25, 2011Assignee: Thermo Fisher Scientific Inc.Inventor: Bryan Robert Barnard
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Publication number: 20110013744Abstract: An X-ray analyzer includes a sample stage for holding and positioning a sample and an optical positioner assembly configured above the sample stage. The optical positioner assembly includes a body member having an opening; an optical positioner located within the opening; and at least one X-ray optic and an optical viewing lens coupled to a first camera. The at least one X-ray optic and the optical viewing lens are secured to the optical positioner. The optical positioner is configured to align one of the at least one X-ray optic and the optic viewing lens normal to the sample on the sample stage such that the sample is irradiated with X-rays through the X-ray optic along a path which is normal to the sample and coaxial with the optic viewing lens receiving light reflected from the sample when the optic viewing lens is positioned normal to the sample.Type: ApplicationFiled: July 16, 2009Publication date: January 20, 2011Applicant: EDAX, INC.Inventors: Joseph A. Nicolosi, Bob Westerdale, Bruce Elliott Scruggs, Sun Park
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Patent number: 7864922Abstract: An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractive regions of the analyzing crystal. X-ray blocking plates upstand from an end of a crystal support member supporting the analyzing crystal in the direction of angular dispersion of the crystal toward the inside of a Rowland circle. Incident X-rays going from the point X-ray source toward the crystal and X-rays diffracted by the crystal toward an X-ray detector are partially blocked by the X-ray blocking plates. The shielded regions vary according to the incident angle ? of the incident X-rays. Optimum or nearly optimum effective regions of the surface of the crystal can be used at all times.Type: GrantFiled: September 1, 2006Date of Patent: January 4, 2011Assignee: JEOL Ltd.Inventor: Kazuyasu Kawabe
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Patent number: 7848483Abstract: The present invention provides a multilayer structure including a substrate having formed on a surface thereof at least one period of individual layers, the period having at least two layers including a first layer which includes magnesium silicide and a second layer which includes at least one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, alloys, oxides, borides, silicides, and nitrides of these elements, silicon, carbon, silicon carbide, boron, and boron carbide. If the period includes three layers, the second layer includes one of silicon, carbon, silicon carbide, boron, and boron carbide and a third layer includes one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, and alloys, oxides, borides, silicides, and nitrides of these elements, the second layer being disposed between the first and the third layers.Type: GrantFiled: August 5, 2008Date of Patent: December 7, 2010Assignees: Rigaku Innovative Technologies, Rigaku Industrial CorporationInventors: Yuriy Y. Platonov, Kazuaki Shimizu
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Patent number: 7817779Abstract: Non-destructive analysis is carried out by irradiating an object with X-rays, for example, so that the X-rays from the object are incident on an analyzer crystal. The analyzer crystal can be of a transmission-type or a reflection-type. A pre-crystal device is used to make the radiation monochromated and parallelized. Atomic lattice planes of the pre-crystal device are approximately parallel with the atomic lattice planes of the analyzer crystal so as to use the angular analysis capability of the analyzer crystal. The thickness of the analyzer crystal is fixed.Type: GrantFiled: March 12, 2008Date of Patent: October 19, 2010Inventor: Masami Ando
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Patent number: 7817780Abstract: Disclosed is an X-ray reflecting device and an X-ray reflecting element constituting the X-ray reflecting device capable of facilitating a reduction in weight and being prepared in a relatively simple manner. The X-ray reflecting element of the present invention comprises a body made of a solid silicon, and a plurality of slits formed in the body in such a manner as to penetrate from a front surface to a back surface of the body. Each of the slits has a wall surface serving as an X-ray reflecting surface.Type: GrantFiled: December 29, 2005Date of Patent: October 19, 2010Assignee: Japan Aerospace Exploration AgencyInventors: Kazuhisa Mitsuda, Yuichiro Ezoe
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Patent number: 7809108Abstract: In an X-ray diffraction apparatus, a high brightness source, such as a rotating anode generator, is combined with demagnification X-ray optics to produce a beam with small image size and high-intensity. In one embodiment, an elliptical X-ray optic is positioned relative to the source and image focal points so that the magnification of the optic is less than one. The combination can produce high-intensity beams with beam images at the sample of less than 0.1 mm.Type: GrantFiled: February 1, 2008Date of Patent: October 5, 2010Assignee: Bruker AXS, Inc.Inventors: Arjen B. Storm, Robertus W. W. Hooft, Leendert J. Seijbel
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Publication number: 20100246769Abstract: In a method for the production of x-ray-optical gratings composed of a first material forming of periodically arranged grating webs and grating openings, a second material is applied by electroplating to fill the grid openings. The electroplating is continued until a cohesive layer of the second material with uniform height is created over the grating webs with this layer having a large absorption coefficient, the absorption properties of the grating structure of the grating are homogenized, so an improvement of the measurement signals that are generated with this grating is improved. Moreover, the mechanical stability of gratings produced in such a manner is improved.Type: ApplicationFiled: September 25, 2009Publication date: September 30, 2010Inventors: Christian David, Tilman Donath, Eckhard Hempel, Martin Hoheisel, Barbara Matthis, Franz Pfeiffer, Stefan Popescu
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Patent number: 7801272Abstract: In an X-ray diffraction method using the parallel beam method, an X-ray parallel beam is incident on a sample, and diffracted X-rays from the sample are reflected at a mirror and thereafter detected by an X-ray detector. The reflective surface of the mirror has a shape of an equiangular spiral that has a center located on the surface of the sample. A crystal lattice plane that causes reflection is parallel to the reflective surface at any point on the reflective surface. The X-ray detector is one-dimensional position sensitive in a plane parallel to the diffraction plane. A relative positional relationship between the mirror and the X-ray detector is determined so that reflected X-rays from different points on the reflective surface of the mirror reach different points on the X-ray detector respectively. This X-ray diffraction method is superior in angular resolution, and is small in X-ray intensity reduction, and is simple in structure.Type: GrantFiled: August 13, 2008Date of Patent: September 21, 2010Assignee: Rigaku CorporationInventor: Hideo Toraya
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Publication number: 20100195795Abstract: An X-ray multichannel spectrometer comprising a polychromatic source (2), a holding means (3) for holding a sample (1), a fluorescence channel (4) that selects X-ray beams of a special wavelength and energy, and a detector (5) for measuring the selected X-ray beams, a diffractometry channel (6) that selects, by means of a monochromator (7), an X-ray beam wavelength of the source subsequent to diffraction of the X-ray beams by the sample, and a detector (8) for measuring the selected X-ray beams, is characterized in that a single slit device (9) is provided between the source and the sample, which can be moved transversely with respect to the direction of the beam from the source, and the monochromator of the diffractometry channel is stationarily disposed with respect to the source and the sample and has an entry single slit (10) which defines, together with the movable single slit device and the sample position, the characteristic diffraction angle 2? of a predetermined crystal structure of the polycrystalliType: ApplicationFiled: January 27, 2010Publication date: August 5, 2010Applicant: Bruker AXS GmbHInventor: Rainer Golenhofen
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Patent number: 7769136Abstract: A positioning technique for aligning an X-ray lens (28) is described. A positioning apparatus (16) comprises a lens mounting component (44) and a positioning component (42). The positioning component (42) includes at least one goniometer stage (64, 66) having a center of rotation that substantially coincides with the X-ray emitting portion (36) (“hot spot”) of the X-ray source (12). The provision of one or more goniometer stages (64, 66) and, if required, one or more additional translation stages (60, 62) facilitates the adjustment of the X-ray lens (28) and makes the adjustment more intuitive.Type: GrantFiled: August 17, 2006Date of Patent: August 3, 2010Assignee: Unisantis FzeInventor: Thomas Baumann
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Patent number: 7770232Abstract: A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.Type: GrantFiled: March 16, 2006Date of Patent: August 3, 2010Assignee: RikenInventors: Akira Saito, Masakazu Aono, Yuji Kuwahara, Jyunpei Maruyama, Ken Manabe
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Publication number: 20100183122Abstract: An X-ray condensing method and its device are provided with an X-ray mirror that has a wavefront adjustable function to finely adjust a wavefront of a reflecting X-ray, measure an X-ray intensity distribution in the vicinity of a focus, measure an X-ray intensity distribution in the vicinity of the X-ray mirror or use a known X-ray intensity distribution of an incident X-ray, calculate a complex amplitude distribution at the reflective surface by using a phase restoration method from the X-ray intensity distribution in the vicinity of the focus and the X-ray intensity distribution in the vicinity of the reflective surface, calculate a wavefront aberration of an X-ray condensing optical system from the complex amplitude distribution, and control the reflective surface of the X-ray mirror with the wavefront adjustable function so that the wavefront aberration is minimized.Type: ApplicationFiled: December 27, 2007Publication date: July 22, 2010Applicants: Jtec Corporation, Osaka UniversityInventors: Kazuto Yamauchi, Hidekazu Mimura, Hiromi Okada
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Patent number: 7742564Abstract: Systems and methods for detecting an image of an object using an X-ray beam having a polychromatic energy distribution are disclosed. According to one aspect, a method can include detecting an image of an object. The method can include generating a first X-ray beam having a polychromatic energy distribution. Further, the method can include positioning a single monochromator crystal in a predetermined position to directly intercept the first X-ray beam such that a second X-ray beam having a predetermined energy level is produced. Further, an object can be positioned in the path of the second X-ray beam for transmission of the second X-ray beam through the object and emission from the object as a transmitted X-ray beam. The transmitted X-ray beam can be directed at an angle of incidence upon a crystal analyzer. Further, an image of the object can be detected from a beam diffracted from the analyzer crystal.Type: GrantFiled: January 24, 2007Date of Patent: June 22, 2010Assignees: The University of North Carolina at Chapel Hill, Brookhaven Science Associates, The University of SaskatchewanInventors: Christopher Parham, Zhong Zhong, Etta Pisano, Dean Connor, Leroy D. Chapman
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Patent number: 7742566Abstract: A multi-energy imaging system and method for selectively generating high-energy X-rays and low-energy X-ray beams are described. A pair of optic devices are used, one optic device being formed to emit high X-ray energies and the other optic device being formed to emit low X-ray energies. A selective filtering mechanism is used to filter the high X-ray energies from the low X-ray energies. The optic devices have at least a first solid phase layer having a first index of refraction with a first photon transmission property and a second solid phase layer having a second index of refraction with a second photon transmission property. The first and second layers are conformal to each other.Type: GrantFiled: December 7, 2007Date of Patent: June 22, 2010Assignee: General Electric CompanyInventors: Forrest Frank Hopkins, Susanne Madeline Lee, Peter Michael Edic
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Patent number: 7738630Abstract: An x-ray analysis apparatus for illuminating a sample spot with an x-ray beam. An x-ray tube is provided having a source spot from which a diverging x-ray beam is produced, the source spot requiring alignment along a transmission axis passing through the sample spot. A first housing section is provided, to which the x-ray tube is attached, including mounting features for adjustably mounting the x-ray tube therein such that the source spot coincides with the transmission axis. A second housing section includes a second axis coinciding with the transmission axis; and at least one x-ray optic attached to the second housing section for receiving the diverging x-ray beam and directing the beam toward the sample spot. Complimentary mating surfaces may be provided to align the first and second sections, and the optics, to the transmission axis. A third housing section may also be provided, including an aperture through which the x-ray beam passes, and to which a detector may be attached.Type: GrantFiled: March 4, 2009Date of Patent: June 15, 2010Assignee: X-Ray Optical Systems, Inc.Inventors: John H. Burdett, Jr., Adam Bailey, Zewu Chen, R. Scott Semken, Kai Xin