Abstract: A wafer aligning apparatus includes first and second wafer holders supporting first and second wafers, respectively, a holder moving unit configured to move at least one of the first and second wafer holders such that the first and second wafers are pre-aligned and face each other, one or more observing units arranged in a horizontal direction with respect to the pre-aligned first and second wafers and configured to observe edge portions of the first and second wafers in a state in which the first and second wafers are pre-aligned with each other by the holder moving unit and a controlling unit configured to control the holder moving unit to realign the first and second wafers when the edge portions of the first and second wafers are outside of a desired alignment state based on information observed by the one or more observing units.

Abstract: Systems and methods for processing a substrate include supplying steam in a chamber, arranging a substrate with a deposited layer that includes silicon in the chamber, and directing UV light onto the deposited layer in the presence of the steam for a predetermined conversion period to at least partially convert the deposited layer. Systems and methods for densifying a deposited layer of a substrate include supplying ammonia in a chamber, arranging the substrate that includes the deposited layer in the chamber, and directing UV light onto the deposited layer in the presence of the ammonia for a predetermined conversion period to at least partially densify the deposited layer.

Abstract: A conveyor assembly suitable for use in a substrate processing system includes: at least one substrate carrier having a substrate-carrying surface configured to support at least one substrate; a processing track; a return track; a drive system configured to drive the substrate carrier along the processing track and the return track; and at least one swivel unit configured to pivot the substrate carrier around a substantially horizontal axis from a first orientation into a second orientation, and/or vice versa. Also provided is a method for conveying a substrate carrier including: providing a substrate carrier; positioning the substrate carrier in a first orientation; conveying the substrate carrier along a first track; and rotating the substrate carrier around a substantially horizontal axis into a second orientation.

Abstract: A carrier system equipped with a fine movement stage holding a mounted wafer and can move along a predetermined plane, a chuck main section which holds the wafer above a predetermined position and can move vertically, and vertical movement pins supporting the wafer held by the chuck main section on the fine movement stage from below when the fine movement stage is positioned at the predetermined position and are vertically movable. A controller drives the chuck main section and the vertical movement pins downward until a lower surface of the wafer comes into contact with the fine movement stage while maintaining a hold state by the chuck main section to the wafer and a support state by the vertical movement pins to the wafer, and when the lower surface of the wafer comes into contact with the fine movement stage, the hold state and the support state are released.

Abstract: A method and a system for the automatic loading of air-transport units. In the method, the piece goods and the air-transport unit, on at least one side of which is an openable loading opening, are transported to the packing location, when the piece goods are packed automatically through the loading opening into the air-transport unit. The air-transport unit is tilted in connection with the packing, in such a way that the side with the loading opening is raised relative to the side opposite to the loading opening, so that the air-transport unit is loaded in at least two different attitudes.

Abstract: The present invention relates to an apparatus for turning steel products. The apparatus comprises a rotating shaft, a first turning plate, and a second turning plate. The first turning plate is fixedly mounted to the rotating shaft with a longitudinal axis of the first turning plate perpendicular to a longitudinal axis of the rotating shaft. The second turning plate is movably mounted to the rotating shaft with a longitudinal axis of the second turning plate perpendicular to a longitudinal axis of the rotating shaft.

Abstract: The present invention provides an alignment device of cutting machine, which includes: a stand and a ball transfer unit mounted on the stand. The ball transfer unit includes a main body, a first rotating body, and a plurality of second rotating bodies arranged between the main body and the first rotating body. The main body has an end forming a receiving chamber and thus forming a receiving chamber sidewall. The second rotating bodies are rotatably arranged on the receiving chamber sidewall. The main body forms an air entrance passage in communication with the receiving chamber. The receiving chamber sidewall extends out to form a bearing section corresponding to the air entrance passage. The bearing section has a side surface in which air outlet ports are formed. The main body has an opposite end forming a connection section that is mateable and coupleable to the stand.

Abstract: A pitch conversion device and pitch conversion method is directed to convert the pitch of a plurality of partition members arranged parallel to each other along an X-direction and include a plurality of entry members arranged parallel to each other in the X-direction and configured to enter between neighboring partition members, and a pushing member to push the plurality of entry members in turn and allow them to enter neighboring partition members while moving in the X direction. The entry members are biased in an exiting direction from between the neighboring partition members.

Abstract: A reusable up-ending device for loading or unloading nuclear fuel assembly shipping packages. The device has a translating base mounted to a fixed beam structure and two stabilizing arms affixed to a mounting fixture on the base that is secured to the operating floor. The stabilizing arms include a spring dampener and have a simple elbow joint that straightens after the package is up righted. Translation is achieved by means of a hand adjustable lead screw and enables the base to be most advantageously positioned. The shipping package is inserted into pivot mount blocks located at the front of the base and the package is secured at the pivot mount blocks by means of a trunnion and at the support arms by means of a locking pin. Once the package is up-righted the elbows on the support arms are locked in place.

Abstract: The present invention provides a cylindrical magnetic levitation stage and an exposure apparatus, which can form a nanoscale pattern of a large area directly on the surface of a large cylinder. The present invention provides an exposure apparatus including a new type of cylindrical magnetic levitation stage, which can levitate, rotate, and move a cylinder in the axial direction by the principle of magnetic levitation in a non-contact manner and form a nanoscale pattern on the surface of the cylinder, and a light source for irradiating light on the surface of the cylinder, thereby reducing the position error of the cylindrical magnetic levitation stage to a nanoscale size and correcting the error caused by mechanical processing in real time.

Abstract: The containers (B) comprised in an incoming flow of containers advancing in a given direction along an axis (XB), wherein the containers (B) may present with a first orientation or else a second orientation with respect to the direction of advance and with a first posture or else a second posture, are oriented so as to generate an outgoing flow of containers (B), in which, for example, the containers all present in a vertical position with an identical orientation.

Abstract: A method, where a verification of positioning of articles (3) is effected by means of sensors (14), and an improvement of positioning is effected by aligning a plane of end faces of the articles (3), consists in that the verification and improvement of positioning of rod-like articles (3) is effected simultaneously by means of an aligning device (1) provided with sensors (14), where the sensors (14) detect correct filling and/or arrangement of the articles (3), and the aligning device (1) aligns the plane of end faces of the articles (3) correctly filling the inside of a tray (6, 6?) or an intermediate store (7,7?), and in the event of detection of incorrect filling and/or arrangement the aligning device (1) is switched off and the operation of the entire unit is interrupted.

Abstract: The invention relates to a component manipulator for the dynamic positioning of a substrate to be treated in a thermal treatment process, wherein the component manipulator includes a main drive axle rotatable about a main rotary axis, a connection element and a substrate holder connectable to the connection element. In accordance with the invention the connection element is a ceramic connection element and a connection segment of the substrate holder is connectable to the connection element in a pull resistant and rotationally fixed manner by means of a plug and rotate connection with regard to a connection axis (V) of the plug and rotate connection and the substrate holder (5) is arranged rotatable about the connection axis (V). The invention further relates to a coating method, to a coating apparatus, as well as to the use of a component manipulator.

Abstract: An apparatus for optically measuring samples, including a radiation source configured to form an excitation beam in an excitation channel, a detector configured to detect an emission beam in an emission channel and a filter configured to be located, in an excitation position, in the excitation channel, and in an emission position, in the emission channel. The apparatus further includes a first filter storage comprising a first set of filter storage positions, a second filter storage comprising a second set of filter storage positions, and a filter transfer mechanism configured to move the filter between the excitation position, the emission position, the first set of filter storage positions and the second set of filter storage positions.

Abstract: A device for filling soluble containers is provided. The device includes an assembly for orienting capsules comprising a sheet component having a top sheet, a bottom sheet and a sliding sheet adapted to move between the top and bottom sheets. The top sheet includes slots for accommodating capsules, and the bottom sheet includes notches adapted to orient the capsules into a filling position. In a first position, the slots in the sliding sheet align with the slots in the top sheet. In a second position, the slots in the sliding sheet align with the notches in the bottom sheet. The assembly also includes a base component for guiding the oriented capsules therethrough. The base component can have an antistatic sheet fastened to the bottom surface. The sheet component can be loose fitted to the base component. An assembly for filling capsules is also provided.

Abstract: A robotic unscrambler apparatus is provided that ensures articles that are delivered in an initial orientation are transported in a conveyable orientation for further treatment at one or more stations in a production line. The apparatus includes a conveyance apparatus and at least one picker. An uprighting device is provided with a series of guides. The picker removes articles from the conveyance apparatus, and places the articles onto one of the guides. The uprighting device moves the guides between article placement positions and article conveyance positions. Each guide may include a contoured article support surface that facilitates centering of an article placed thereon.

Abstract: A method and apparatus are provided for configuring equipment (10) for automated orientation of elongate objects (56). The equipment includes a drum (12) with a cylindrical circumferential wall (14) and a central raised element (22) inside the drum, that slopes towards the circumferential wall, the outer edges of the raised element being spaced radially inwardly from the circumferential wall. The method includes sliding a plurality of sector elements (34) in a radial direction so that a trough (52) is defined between the circumferential wall of the drum and an outer edge of each sector element, the width of said trough corresponding generally to the width of the objects sought to be orientated.

Abstract: The invention concerns thin wafer handling for solar silicone wafers or other semiconductor thin wafer handling applications, especially after back grind process. The invention performs high speed, mass wafer transfer between varying pitch carriers. Transfers are between various types of wafer carriers as required (plastic, Teflon, PEEK, SiC, etc.).

Abstract: A skidding pallet (200) for use on the skid rails (110, 115) of a vessel is disclosed, the pallet comprising a supporting means such as a frame (230), a mounting means for the mounting of an object thereon, and at least one actuation means, such as a cylinder (240), attached to one of the supporting means or mounting means. In use, the supporting means interfaces with the skid rails and the actuation means are actuatable to cause the mounting means to rotate in relation to said supporting means and the skid rails.

Abstract: An aircraft engine module handling assembly including a carriage, a pivoting portion at a top of the carriage, a module support tooling, and an additional mechanism for assembly of the tooling on the pivoting portion, such that the module can be rotated from an original vertical position, observed when it reaches an assembly shop in a crate, to a horizontal position suitable for its assembly with another module of an engine.

Abstract: A substrate holder positioning method, capable of positioning a substrate holder without using any positioning jig, includes: measuring a first position of a substrate held on a substrate holder included in a substrate carrying mechanism; carrying the substrate held on the substrate holder to a substrate rotating unit for holding and rotating the substrate; turning the substrate held by the substrate rotating unit through a predetermined angle by the substrate rotating unit; transferring the substrate turned by the substrate rotating unit from the substrate rotating unit to the substrate holder; measuring a second position of the substrate transferred from the substrate rotating unit to the substrate holder; determining the position of the center of rotation of the substrate rotating unit on the basis of the first and the second position; and positioning the substrate holder on the basis of the position of the center of rotation.

Abstract: A card substrate rotator comprises a substrate support, a rotator mechanism and a lift mechanism. The substrate support is configured to receive a card substrate and comprises a feed roller. The rotator mechanism is configured to rotate the substrate support about an axis. The lift mechanism is configured to move the substrate support and the axis in a vertical plane.

Abstract: A bag turning machine comprises a frame, a shaft rotatably carried by the frame, a plurality of bag turning members carried by the shaft for receiving and turning a filled and sealed bag, and a brake. The brake resists rotation of the shaft upon receipt by the bag turning members of a filled and sealed bag and, following release by the bag turning members of the bag, arrests rotation of the shaft in a predetermined position for the bag turning members to receive another filled and sealed bag. Each bag is received in an upright position and moving substantially parallel to its width, which is less than its height and greater than its depth, and tipped over onto the bag turning members so that the bag lands on a side edge thereof. Rotating the bag turning members turns the bag to rest on its face while lowering the bag.

Abstract: The invention relates to apparatuses for turning racks (1) for specimen slides (4), having a rack receptacle for at least one rack, the rack (1) being oriented in the rack receptacle horizontally in a first position such that specimen slides in the rack are arranged vertically next to one another relative to a longitudinal axis of the rack, and the rack receptacle being pivotable around a rotation axis (8) into a second position in which the rack (1) is oriented vertically. The rotation axis (8) of the rack (1) extends obliquely with respect to the longitudinal axis (5) of the horizontally oriented rack (1), so that the rack (1) can be pivoted back and forth between the first and the second position by means of a 180-degree rotation around the rotation axis (8).

Abstract: A system for repositioning row bars includes a base support including a top surface, and a support arm positioned on the top surface and configured to rotate from a first position to a second position, a tray assembly coupled to the support arm, the tray assembly including a first tray including a plurality of first channels, each configured to retain one of the row bars in an initial position, a transfer substrate including a plurality of transfer channels, each configured to receive one of the row bars from the first tray as the support arm moves from the first position to the second position, and a second tray including a plurality of second channels, each configured to retain the one of the row bars in a final position, where the row bars in the final position are rotated by a preselected number of degrees from the initial position.

Abstract: The invention relates to an apparatus (100) for positioning a sample carrier plate, wherein the apparatus (100) comprises a main body (102) for receiving the sample carrier plate, positioning stops (106, 108) which are disposed in opposing first corner regions of the main body and are prestressed for clamping the sample carrier plate and mounted displaceably, an actuating device (114) which is disposed in a second corner region of the main body and is equipped such that by actuating the actuating device (114) the positioning stops (106, 108) can be transferred between an operating state engaging the sample carrier plate and an operating state releasing the sample carrier plate, and comprises a force transmitting element (118) which is equipped to transmit an actuating force from the actuating device to the positioning stops.

Abstract: Described herein are bioprinters comprising: one or more printer heads, wherein a printer head comprises a means for receiving and holding at least one cartridge, and wherein said cartridge comprises contents selected from one or more of: bio-ink and support material; a means for calibrating the position of at least one cartridge; and a means for dispensing the contents of at least one cartridge. Further described herein are methods for fabricating a tissue construct, comprising: a computer module receiving input of a visual representation of a desired tissue construct; a computer module generating a series of commands, wherein the commands are based on the visual representation and are readable by a bioprinter; a computer module providing the series of commands to a bioprinter; and the bioprinter depositing bio-ink and support material according to the commands to form a construct with a defined geometry.

Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate, the device having: aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by action on the substrate's outside contour, whereby the orientation along a substrate plane E that is formed with the carrier substrate is carried out by a contact surface of the substrate, and attaching means for at least partial prefixing of the oriented substrate on the carrier substrate.

Abstract: Provided are an alignment method and an alignment apparatus, in which the number of times to carry out alignment operation is reduced to reduce damage of a substrate and a mask and improve the productivity of evaporation using the mask. Vibrations in the direction of gravity of a substrate immediately after the substrate is brought in are measured by a laser vibrometer. Based on the obtained vibration data, a vibration control portion generates an antiphase vibrational wave. After the vibrational wave is applied to the substrate to reduce the vibrations of the substrate, the alignment between the substrate and a mask is carried out.

Abstract: The invention relates to a device (1) for overturning containers (2), particularly roller bottles intended for cell cultures, characterized in that it comprises a rotation actuator (3) associated by means of a transmission shaft (13) to a reducer (4) and a dynamic brake (5), a support (17) and rods (7) gripping the container (2), said support (17) being joined to the rotation actuator (3) by means of a shifter (16) of the transmission shaft (13) of the mentioned rotation actuator (3), the rotation actuator (3) being actuated by means of a pneumatic foot pedal (18), and the mentioned rotation actuator (3) in turn being associated to a timer (19) indicating the end of the overturning time of the container (2).

Abstract: A workpiece orientation apparatus includes a base, two pushing bars, a linear actuator, a connecting member, at least one first connecting bar, and a second connecting bar. The two pushing bars are slidably connected to the base and aligned apart along a first direction. The linear actuator is mounted on the base. The connecting member is driven by the linear actuator to move back and forth along a second direction. One end of the first connecting bar is rotatably connected to the connecting member, and the other end of the first connecting bar is rotatably connected to one of the two pushing bars. One end of the second connecting bar is connected to the first connecting bar and is rotatably assembled together on the connecting member. The other end of the second connecting bar is rotatably connected to the other of the two pushing bars.

Abstract: An apparatus and a method for aligning a package are proposed, wherein the apparatus comprises the following: a vacuum chamber (32) in which a vacuum is created such that a package (10), which is located inside the vacuum chamber (32), unfolds, and at least one fixing means (22) which fixes the aligned package (10).

Abstract: The invention relates to a method and a device for aligning substrates (2) in an XY-plane. A polygonal, flat substrate (2), the substrate plane of which is parallel to the XY-plane or lies in the XY-plane, is aligned with respect to reference coordinates and a reference angular position in the XY-plane. A corner (12) of the substrate (2) is detected using image detecting means (9). In addition, the position coordinates of the substrate (2) are determined. Using evaluating means (10), the angular position of the corner (12) of the substrate (2) in the XY-plane is determined, and the position differences between the reference coordinates and the position coordinates as well as the angle difference between the reference angular position and the angular position of the substrate corner (12) are calculated. The substrate (2) is moved and/or rotated in the XY-plane according to the determined position difference or the angle difference.

Abstract: A support structure for installation of a component assembly housed in a rotating, translating carriage chassis, the support structure including: a stationary rail that includes a shaft extruding perpendicular to the stationary rail; a rotating rail adapted to receive a carriage chassis rail, the rotating rail parallel to the stationary rail when the rotating rail is in a non-rotated position, the rotating rail including a shaft receptacle that receives the shaft, the rotating rail configured to rotate about the shaft and relative to the stationary rail; and a translation mechanism attached to the rotating rail, the translation mechanism enabling the carriage chassis rail to translate parallel to and along the rotating rail.

Abstract: A method and fixture using magnetic field assisted self-alignment for chip packaging. Typical embodiments include a magnetic device having one or more pole groups, each pole group including two or three poles. Some embodiments provide multiple pole groups arranged in a one or two dimensional pole group array. The poles can build up a self-alignment magnetic field. The structure of fixture is simple and easy to implement. Typical embodiments can greatly reduce chip packaging cost and make packaging more efficient. In accordance with typical embodiments, a chip and a substrate can be self-aligned magnetically regardless of their shapes.

Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.

Abstract: An apparatus for processing packages of eggs on a conveyor is disclosed which comprises an egg orienter configured and arranged with respect to the conveyor so as to adjust a position of one or more of the eggs in each of the packages so that each of the eggs in a given package assumes a particular orientation within that package. In some embodiments, the egg orienter may be located between an egg loading section and a package closing section of an egg packer. In addition, in some embodiments, the apparatus may further comprise a laser source and one or more optical steering elements configured and arranged to direct laser energy from the laser source so as to laser mark information on a surface of one or more of the eggs while the eggs are in a package disposed on the conveyor and in said particular orientation.

Abstract: An apparatus and method for imaging a biologic fluid sample quiescently residing within a chamber is provided. The chamber includes a first panel and a second panel, between which the biologic fluid sample quiescently resides. At least one of the first and second panels is flexible. The chamber has one or more fields that are each defined by a cross-sectional area. The apparatus comprises a field illuminator, a chamber flattener, a positioner, and an image dissector. The field illuminator has an objective lens. The chamber flattener has a platen with a window and a cover plate. The chamber flattener is operable to cause the chamber to assume a substantially uniform Z-axis position for substantially all of the fields within the chamber. The positioner is adapted to position the objective lens and the chamber relative to one another. The image dissector is adapted to image the sample residing within the chamber.

Abstract: Embodiments of the present invention generally relate to an apparatus and method for accurately aligning a plurality of substrates arranged in a planar array for batch processing. In one embodiment, the substrate alignment apparatus includes an array of oversized, recessed pockets for receiving the plurality of substrates. The substrate alignment apparatus may pick up the plurality of substrates from a location in which each substrate is not accurately positioned. Each pocket is configured at an angle from horizontal such that each substrate slides to a predefined corner of the pocket resulting in accurate alignment of each substrate. A vibration, tilting, directional brushes, or gas cushion may be provided to the substrate alignment apparatus to aid in low friction alignment of each substrate within its respective pocket. In one embodiment, the substrate alignment apparatus is an end effector for use on a transfer robot for use in a cluster-type processing system.

Abstract: The present invention comprises an apparatus and method for centering a substrate in a process chamber. In one embodiment, the apparatus comprises a substrate support having a support surface adapted to receive the placement of a substrate and a reference axis substantially perpendicular to the support surface, and a plurality of centering members extending above the support surface. Each centering member is biased into a first position and is movable to a second position by interacting with an opposing member. A movement between the first position and the second position thereby causes each centering member to releasably engage with a peripheral edge of the substrate to push the substrate in a direction toward the reference axis.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

Abstract: A device is provided for positioning a patient with respect to a radiation, the device being a polyarticulated robot including: —at least one linear horizontal displacement rail, —a connecting part capable of carrying out translations with respect to the linear rail and pivoting about an axis of rotation vertical to that linear rail, and —a robotic arm connected to the connecting part, the robotic arm including a wrist with concurrent axes of rotation connected to a patient support.

Abstract: The functionality and effectiveness of a goods feeding device for a front carton of a plurality of cartons or goods trays of a shelf-ready packaging system arranged one behind the other on a shelf of a display and storage rack, with goods or goods packaging stored therein, is further improved. The goods feeding device has a pusher plate for the goods on a slide housing which allows a manual rack-loading of deep commercial racks with narrow shelf spacings and a plurality of cartons or goods trays stored one behind the other is made substantially easier. This is achieved by virtue of the fact that the pusher plate is fixed in a height-adjustable manner to the slide housing and can be moved out of an erected work setting into a flattened position.

Abstract: A substrate position alignment mechanism performs position alignment of a substrate supported by each of one or more substrate support units in a chamber where the substrate is accommodated. Further, the substrate position alignment mechanism includes one or more position alignment members, each of which is rotated to make a contact with a side of the substrate in the chamber.

Abstract: Systems and methods that process a plurality of surgical instruments for cleaning and/or packaging. A device identifies a robot-ready insert having a predetermined configuration for accepting at least one type of surgical instrument. The surgical instruments are identified and oriented according to type using an automated apparatus. Specialized tools are also provided for automatically opening and closing surgical instruments, flipping instruments and assisting in the processing and maintenance of surgical instruments. The automated apparatus then places each of the surgical instrument types in one or more predetermined areas of the insert, configured to accept a predetermined set of surgical instrument types.

Abstract: Substrates are transported to accurate positions, while mounted on one hand of a transport robot. When substrates are to be transported from transporting chamber into processing chamber, a first mounting portion of a hand is located immediately above first processing position provided in processing chamber; and the substrate placed on first mounting portion is lifted up. Then, a second mounting portion is located immediately above second processing position by finely moving the hand. Next, the substrate on second mounting portion is lifted up. When the hand is pulled out from between the substrates and first and second processing positions and the substrates are lowered, the substrates are accurately arranged on first and second processing positions. When substrates are mounted on the hand in an order reverse to the above, the substrates in processing chamber can be accurately mounted on first and second mounting portions and be carried out.

Abstract: The inspiration to the “Device” conception was to ease strenuous conditions associated with physical requirements for moving extremely heavy reeled, spooled, or rolled units. The “Device” is a new instrument for use in handling large spools/reels. “Handling” is implied but not limited to interim transportation, and methods required to complete the function for final release of material from reels/spools. The simple machine concepts are integrated into the “Device” hereunder the Description in this document. Thereby claiming that unique combinations of proven concepts and principals to the Laws of nature, specifically Conservation of Energy; secure this culmination as intellectual property and claimed hereby this Non-Provisional Application. The first generation of devices will be made of wood. Wood is available in dimensional and sheet good form. Wood is easily cut and shaped and; possess the physical qualities sufficient to cover the stress specifications for the Device.

Abstract: A wafer handling mechanism is operated to place a wafer on a chuck. A chucking force is then applied to the wafer, whereby wafer support features of the chuck transfer a defect pattern onto a surface of the wafer. The surface of the wafer is analyzed by a defect metrology tool to obtain a mapping of the defect pattern transferred onto the surface of the wafer. A center coordinate of the chuck within a coordinate system of the wafer is determined by analyzing the defect pattern as transferred to the surface of the wafer. A spatial offset between the center coordinate of the chuck and the center of the wafer is determined. The spatial offset is used to adjust the wafer handling mechanism so as to enable alignment of the center of the wafer to the center coordinate of the chuck.

Abstract: The present disclosure relates to a system, method and article which may be configured to autonomously dispense a medium onto a relatively large surface relatively accurately.

Abstract: A stage for aligning a workpiece relative to analysing apparatus. The stage has a platform and means for maintaining a workpiece on the platform. The platform is operable to tilt relative to the analysing apparatus and thereby rotate the workpiece relative to the analysing apparatus.