Abstract: A lift mechanism includes a balance structure configured to hold an object, wherein the balance structure is rotateably connected to an arm structure at a pivot point. The pivot point is configured, and the object is positioned, such that the pivot point is substantially coincident with the center-of-mass of the object being moved. Weights may be selectively attached to the balance structure to adjust the center-of-mass. In one embodiment, the lift mechanism includes a base and an arm configured to rotate with respect to the base, wherein the arm is attached to the balance structure at the pivot point. In this way, heavy objects may be lifted, translated, and rotated into place safely in an efficient manner.

Abstract: The invention provides for a wafer positioning assembly for an assembler for assembling printhead integrated circuits on a carrier. The assembler includes an enclosure with a support assembly for operatively supporting a wafer with dies thereon, a die picking assembly for picking dice from said wafer, a die placement assembly for placing the dies onto the carrier, a die conveyance mechanism operatively conveying the dies from the die picking and placement assemblies, and a control system controlling the assembler. The wafer positioning assembly, in turn, includes a displacement assembly having a base plate with first and second stages mounted thereon, and a wafer support plate assembly rotatably mounted on the second stage. The support plate assembly is configured to receive the wafer and has a motor under control of the control system to rotate the support plate assembly underneath the die picking assembly.

Abstract: A method for putting a glass plate to a target position includes (a) putting the glass plate at a preliminary position above an air table that discharges air upwardly, by moving a suction member that supports the glass plate through suction; (b) releasing suction of the suction member, while air is discharged upwardly from the air table, thereby floating the glass plate at the preliminary position above the air table; and (c) moving a pressing member in a horizontal direction, while the pressing member is in abutment with a top surface of the glass plate and while air is discharged upwardly from the air table, thereby moving the glass plate in the horizontal direction from the preliminary position above the air table to the target position above the air table by a frictional force generated between the pressing member and the glass plate.

Abstract: Apparatus and methods for handling workpieces in a processing system. The workpiece vertical lift mechanism (200), which is disposed inside a process chamber (40) of the processing system is adapted to transfer a workpiece (55) to and from a pedestal portion (286) of an electrode (24). The pedestal portion (286) is configured to support the workpiece (55) during processing. The workpiece vertical lift mechanism (200) including a workpiece fixture (290) movable relative to the pedestal portion (286) between a first position in which the workpiece fixture (290) holds the workpiece (55) in a non-contacting relationship with the pedestal portion (286) and a second position in which the pedestal portion (286) projects above workpiece fixture (290) so as to transfer the workpiece (55) from the workpiece fixture (290) to the pedestal portion (286).

Abstract: The invention relates to an arrangement and a method for the transportation and synchronous distribution of packaging units, wherein the packaging units are continuously supplied on a transportation apparatus and distributed to two further transportation apparatuses (16, 16?). The packaging units are centered on the first transportation apparatus by means of two flaps (20a, 20b) wherein, according to the present invention, the movement of the flaps is mechanically coupled.

Abstract: In a side-docking type test handler, a descending mechanism lowers a horizontally postured test tray, which has been transferred into a soak chamber, down to a descent finish position and a vertical posture changing mechanism changes the posture of the test tray, which has been lowered to the descent finish position, from the horizontal state to a vertical state, to transfer the test tray into a test chamber. Further, a horizontal posture changing mechanism changes the posture of the test tray in the test chamber from the vertical state to the horizontal state while transferring the test tray to an ascent start position in a desoak chamber.

Abstract: A guide system for loading trailers with cargo is disclosed. In a particular embodiment, the system includes first and second tubular sleeves adapted to removably slide over cylindrical bollards, wherein the tubular sleeves are configured to rotate about a vertical axis of the cylindrical bollards. The system also includes first and second arms secured to the respective tubular sleeves, wherein the arms are adapted to sweep over a horizontal surface of a loading dock when the tubular sleeves are rotated. In addition, the system includes first and second pistons, wherein a first end of each piston is secured to a rear portion of the respective arm and the arm swings to a desired position in response to the respective piston. A slidable pin of each arm is configured to engage receptacles mounted in a horizontal surface of a loading dock when the arms are in a closed position.

Abstract: Problem to be Solved The present invention provides a method of adjusting any deviations of plate material, wherein the method can adjust the deviations in the lateral and longitudinal directions at one location. Also, the present invention provides the equipment for the method.

Abstract: Apparatus and method for reorienting a toroidally shaped core configured to carry a green tire. The core includes a central axis defined through first and second oppositely facing tapered recesses respectively including first and second locking mechanisms. The apparatus includes a core support structure including a base and a reorientation member connected for movement relative to said base and a core coupling member. The core coupling member connects for movement with the reorientation member and includes a core locking mechanism that couples with the core coupling member and locks the core coupling member to the core. A drive system couples with the reorientation member and operatively moves the reorientation member so as to change the orientation of the central axis from a first orientation to a second, different orientation transverse to the first orientation.

Abstract: A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.

Abstract: System and method of dispensing disc-based media and other consumer products. A user can interact with an automated business system to select disc-based media for rental and/or purchase. The automated business system can retrieve the selection from the interior of the automated business system and dispense the selection through a port to the user. The automated business system can retrieve the selection from the port in a return process.

Abstract: A device for the turning of flat articles, particularly blanks of folded boxes, includes conveying elements which define at least two conveying sections that are permeable to air and on which the articles are conveyed lying substantially flat, the conveying elements being mounted in a frame, a suction device arranged below the conveying element and to extend through the conveying section to increase the friction between the conveying elements and the articles, and a separate drive for each of the conveying elements of the respective conveying sections. The frame is mounted such that it can swivel about a pivot in the exit region of the frame relative to a machine frame.

Abstract: A material roll is transported to a roll changer by being arranged on a transport carriage. The material roll and transport carriage are placed on a transfer table which is moved into position between journal bearings of the roll changer. The transfer table is adapted to move the material roll transversely and along a longitudinal axis of the material roll and can pivot in a horizontal plane. An inclined position of the material roll, arranged on the transfer table, is determined by sensors. In this determined, axially aligned position, the material roll is axially aligned on the bearing journals. The roll size of the material is determined. An axially aligned position for roller support arms of a roll carrier of the roll changer is determined as a function of the determined roll size. An axially aligned position of the transfer table is determined as a function of the determined roll size and the determined inclined position of the material roll.

Abstract: The invention relates to a device and a method for the contactless personalisation of chips integrated into passports within a system for processing, sorting and packaging a large number of passports comprising a straight main transport path with a first transport direction for transporting the passports one behind the other through the system comprising a plurality of system modules for processing, sorting and/or packaging, with a respective straight first auxiliary transport path connected to the main transport path and arranged on either side thereof for leading the passports away from the main transport path in a second transport direction running perpendicular to the first transport direction, a plurality of coding stations arranged along the two first auxiliary transport paths and next to one another with respect to the first transport direction for coding the chips of the passports, and an equal plurality of transport elements which are respectively assigned to the coding stations and can be displaced

Abstract: The invention relates to an apparatus for aligning disordered sheet material. The apparatus according to the invention in particular has the advantage, that disordered sheet material is fast and reliably aligned, so that the sheet material can be formed into bundles. Since the alignment of the sheet material can be carried out automatically by the apparatus, i.e. in particular has not to be carried out by an operator, moreover, a cost-effective alignment of the disordered sheet material is permitted.

Abstract: Substrate processing methods and apparatus are disclosed. In some embodiments a substrate processing apparatus may comprise a support structure and a moveable stage including first and second stages. The moveable stage has one or more maglev units attached to the first stage and/or second stage proximate an edge of the first stage. The first stage retains one or more substrates and moves with respect to a first axis that is substantially fixed with respect to the second stage. The second stage translates along a second axis with respect to the support structure. In other embodiments, a primary motor may maintain a rotary stage at an angular speed and/or accelerate or decelerate the stage from a first angular speed to a second angular speed. A secondary motor may accelerate the stage from rest to the first angular speed and/or decelerate the stage from a non-zero angular speed.

Abstract: A method for securing a closure on a cylindrical container (such as a pharmaceutical vial) includes: positioning a closure in a first position, the closure being substantially centered via a centering assembly along an axis that is generally normal to the closure; translating the substantially centered closure along the axis to a second position; positioning a cylindrical container, the container being substantially centered via the centering assembly along the axis; translating the substantially centered closure along the axis to a third position in which it is adjacent the substantially centered container; and relatively rotating the closure and the container to secure the closure to the container. With such a method, both the closure and the cylinder can be centered along the axis, thereby registering them with each other for reliable securing.

Abstract: The present invention is a bale flipping device, comprising a first vertical bar, a second vertical bar, a third vertical bar, a fourth vertical bar, a first pivot arm, a second pivot arm, and a third pivot arm, wherein the first pivot arm connects the first vertical bar to the third vertical bar, wherein the second pivot arm connects the second vertical bar to the fourth vertical bar, and wherein the third pivot arm is parallel to the second pivot arm and also connects the second vertical bar to the fourth vertical bar. The pivot arms are pivotally connected to the vertical bars so that the entire device can be folded up when not in use. The device is designed to be installed on the side of a New Holland small bale stacker.

Abstract: A component transferring apparatus includes a shuttle; an inspection socket; a retaining device that moves between the shuttle and the inspection socket; a pressing device included in the retaining device to hold and transfer an electronic component; a position adjusting device that moves the pressing device to correct a position of the electronic component based on an image processing of image data obtained by photographing of the electronic component; a socket mark provided near the inspection socket; a hand mark provided on the retaining device such that the hand mark is positioned near the socket mark when the retaining device is moved to a mounting position where the electronic component hold by the pressing device is mounted in the inspection socket; a first camera provided on the shuttle to photograph a single image including the electronic component hold by the pressing device and the hand mark provided on the retaining device; a second camera that photographs a single image including the socket mark

Abstract: A transfer device is disclosed for transferring a plurality of stacks of disk-like objects such as frozen hamburger patties, from a plurality of first trays having bottom walls angled with respect to horizontal to a horizontal support platform spaced from the trays. The transfer device includes a support frame having wheels that is movable between first and second ends of a guide track and a pivotal frame pivotally attached to the support frame which pivotal frame supports upper and lower grippers for engaging the upper and lower sides of a plurality of stacks of objects and securely holding the stacks of objects as they are moved between first and second positions.

Abstract: A substrate processing system which is capable of preventing dust from becoming attached to substrates without increasing the degree of cleanliness of a clean room to a predetermined level, and also capable of increasing the substrate processing throughput without increasing the burden on workers. a plasma processing apparatus 2 that subjects semiconductor wafers W to plasma processing in a cleaned atmosphere. A SMIF 4 has a enclosure 23 that is connected to the plasma processing apparatus 2 and has a cleaned atmosphere therein, a pod stage 26 on which a pod 3 housing semiconductor wafers W is mounted, a pod mounting portion 24 that carries out removal of semiconductor wafers W from the pod 3 and housing of semiconductor wafers W into the pod 3, and a wafer cassette transfer arm 27 that transfers semiconductor wafers W between the pod stage 26 and the plasma processing apparatus 2 via the enclosure 23.

Abstract: A technique of a heavy object turning apparatus that is compact, is enabled to reduce the distance between the center of gravity of a heavy object and a pivot positioned on an axis, and is configured so that a turning arm and a drive unit has a length in the direction of an axis passing through the pivot around which the heavy object is turned. A control unit fixes a support base onto a stand. An orthogonal axis reduction gear serves as an anterior reduction gear and has a configuration in which an output shaft is on an axis of a planetary gear type reduction gear serving as the posterior reduction gear. An input shaft is perpendicular to the axis. The orthogonal reduction gear is constituted by a hypoid reduction gear or a worm-geared reduction gear. A motor is disposed on the bottom surface of the orthogonal reduction gear.

Abstract: In a device and a method for positioning an object, a drive of a movement device is controlled. To this end, a visual joystick is actuated, as a result of which a moveable actuator is moved, at least linearly by means of a display of a control unit of the movement device, into a position, in which a direction of movement, which can be implemented with the drive, is displayed symbolically. The drive for the movement of the object in the displayed direction of movement is initiated by means of a switching function of the actuator.

Abstract: A handling apparatus for information storage disks includes a conveying apparatus and a mounting base. The conveying apparatus includes a body, a conveying arm, a transmission device and a driving device. The body includes an arm holder. The arm holder has a guide channel. The guide channel includes a transverse passage and a longitudinal passage. The conveying arm is movably mounted in the arm holder and moves along the guide channel. The transmission device connects the driving device to the conveying arm so that the driving device moves the conveying arm in the guide channel. When the conveying arm moves in the transverse passage, the conveying arm has at least one linear self-alignment for positioning.

Abstract: In a method for depositing a flat object dropping freely into a lower compartment, a wall of the compartment at an angle in relation to a vertical is used as a flat deposit point for a flat side of the flat object. During passage of the flat object into the lower compartment an angular momentum is imparted to the flat object such that an angle of incidence between the wall and the flat side of the flat object is minimized.

Abstract: A picking mechanism may include a mechanical reference system for establishing the approximate number of sheets that will be “picked” from a larger stack each time the picking process occurs. A pick moves toward the stack of paper to insert itself between two sheets of paper at a level in the stack that is determined by the place the pick resides relative to the stack. In the preferred embodiment, the pick resides at said position because it is positioned at a adjustably fixed relationship to a reference member and the reference member rests on the top of the stack of paper when the pick is in a retracted position. Thus, the vertical distance between the reference member (and the top of the stack) and the point (edge) of the pick determines how many sheets will be picked at a time.

Abstract: The invention provides an apparatus for moving a mine conveyor segment (2, 3) between a first position in line with a train of conveyor segments and a second storage position out of line with the train of conveyor segments, comprising: a segment holder (9), and a guide (8) for guiding the movement of the segment (2, 3) between the first and the second position, wherein the apparatus is connectable to a device (102) for manipulating the train of conveyor segments such that the segment holder (9) is at least partially movable independent from the train manipulating device (102). The handling of the conveyor segments (2, 3) in the first position is not decisive for the status of the apparatus according the present invention, and therefore the handling of the segments outside the first position can coincide (overlap) with the operating of the launch platform.

Abstract: A method for calibrating a controller of a robotic arm in a microelectronics manufacturing apparatus that includes storing a default position for an edge detector, moving a blade on the robotic arm based on the default position of the edge detector such that at least three edge points on the blade pass through and are detected by the edge detector, generating a plurality of arm position measurements from an arm position sensor by measuring a position with the arm position sensor of the robotic arm at each position of the robotic arm at which an edge point of the blade is detected by the edge detector, and determining at least one of an actual position of the edge detector and an offset for measurements of the arm position sensor based on the plurality of arm position measurements.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.

Abstract: A mechanism for manipulation of a substrate over a substantially planar region has at least three, and up to six, degrees of freedom (DOF). The mechanism may be manufactured in various configurations, including triangular, and may use inherent symmetry to reduce the number of distinct components that must be manufactured. The mechanism may use parallelism to reduce the moving mass and thereby achieve higher levels of performance using less expensive motors while dissipating less power.

Abstract: A method and apparatus for automatic positioning and/or orientation of an object. The method includes applying a substance or component to an object, or takes advantage of a substance or component already on or associated with an object. The substance or component has a characteristic that can be utilized to automatically attract the substance or component. That characteristic is used to position, move, and/or orient the object automatically, without requiring manual handling. The object can then be further processed or handled. In one embodiment, the substance or component is a magnetically active substance or component. The attraction can be actuated by a magnet.

Abstract: Equipment for mechanical machining, especially the turning and drilling of mechanical workpieces, such as light alloy wheels and the like, includes at least one turning unit with a double chuck to support the workpieces being machined and a turning head designed to work in association with one or other of the chucks alternately. At least one first workpiece loading/unloading device can be used for moving the workpieces being machined on one or other of the chucks so as to bring about loading/unloading of the workpieces from one of the chucks at the same time as mechanical machining is being carried out on the other chuck. The equipment further includes at least one drilling unit operatively associated with the turning unit and including at least one first drilling head combined with at least one corresponding first workpiece-holding device and at least one second device for loading/unloading parts to move parts being machined in the drilling unit.

Abstract: To correct any positional misalignment of a substrate manifesting along the horizontal direction by utilizing a substrate transfer device alone without engaging a transfer arm in operation. A substrate transfer device comprises a plurality of support pins disposed at positions set apart from one another around a support shaft of a stage, which support a substrate, e.g., a wafer W, on the bottom surface thereof, a base at which the support pins are mounted, a vertical drive means (Z-direction drive means) for raising/lowering the substrate by driving the support pins up/down via the base and a horizontal drive means (X-direction drive means, Y-direction drive means) for adjusting the position of the substrate along the horizontal direction (X and Y directions) by horizontally driving the support pins via the base.

Abstract: An industrial robot that uses a simulated force vector to allow a work piece held by the robot end effector to be mated with a work piece whose location and orientation is not precisely known to the robot. When the end effector makes contact with the location and orientation in which the other work piece is held the robot provides a velocity command to minimize the force of the contact and also provides a search pattern in all directions and orientations to cause the end effector to bring the work piece it is holding in contact with the other work piece. The search pattern and the velocity command are continued until the two work pieces mate.

Abstract: A substrate is supported on a plurality of substrate supporting pins mounted to a second movable member. Next, so as to bring the plurality of substrate supporting pins close to a plurality of substrate supporting pins mounted to a first movable member, the first movable member and second movable member are moved, respectively. After this, with the substrate being supported between the substrate supporting pins, the first movable member and the second movable member are reversed. Then, the first movable member and the second movable member are moved relative to each other such that the respective plurality of substrate supporting pins are spaced apart from one another.

Abstract: A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis.

Abstract: The invention falls within the field of machines for orienting and aligning vessels or bottles made of plastics randomly inserted into a load vessel and in particular to a type of orienting and aligning machine that provides a plurality of elevators (6) that are vertically sliding along the internal wall of a rotating cylinder (1) containing randomly-placed bottles. More precisely, it refers to a device for automatically adjusting the size of the plurality of elevators placed inside the rotating cylinder depending on bottle size or format. The device provides a plurality of reduction elements (9), at least one for each elevator (6), each reduction element being inserted into the elevator without projecting and can go out of the elevator. Control means are provided for making the reduction elements go out simultaneously or sequentially.

Abstract: Methods and apparatus are provided for transporting a solid rocket motor, rocket or other object. A transport for an object suitably includes a trailer having a longitudinal axis. A tail support coupled to the trailer has a notch configured to receive a pin affixed to the object to prevent movement along the longitudinal axis during transport. A chock assembly includes a chock and a trolley, wherein the chock is configured to accept the solid rocket motor and to pivot about a rotation axis that is substantially perpendicular to the longitudinal axis of the trailer. By pivoting with the object, the rotable chock maintains intimate contact with the object during transport and/or elevation, thereby improving response to flexing of the transport and reducing the possibility of damage to the object.

Abstract: A calibration method suitable for highly precise and highly accurate surface metrology measurements is described. In preferred embodiments, an optical inspection tool including a movable optics system is characterized in terms of position and wavelength dependent quantities over a range of motion. Once the position-dependant quantities are determined at various wavelengths and positions, they are stored and used to interpret data from test wafers having an unknown metrology. Free of position-dependent variations and other information pertaining to the measurement system, the accuracy of the resulting wafer measurement more closely matches the precision of the tool than existing techniques. In particular embodiments, a portion of the characterization of the optical system is accomplished by using tilted black glass to provide a non-reflective reference.

Abstract: A load lock chamber and method for transferring large area substrates is provided. In one embodiment, a load lock chamber suitable for transferring large area substrates includes a plurality of vertically stacked single substrate transfer chambers. The configuration of vertically stacked single substrate transfer chambers contributes to reduced size and greater throughput as compared to conventional state of the art, dual slot dual substrate designs. Moreover, the increased throughput has been realized at reduced pumping and venting rates, which corresponds to reduced probability of substrate contamination due to particulates and condensation.

Abstract: An industrial robot that has uses a simulated force vector to allow a work piece held by the robot end effector to be mated with a work piece whose location and orientation is not precisely known to the robot. When the end effector makes contact with the location and orientation in which the other work piece is held the robot provides a velocity command to minimize the force of the contact and also provides a search pattern in all directions and orientations to cause the end effector to bring the work piece it is holding in contact with the other work piece. The search pattern and the velocity command are continued until the two work pieces mate.

Abstract: Apparatus and methods for handling pallets, such as for inspection and sorting, are disclosed. In a disclosed embodiment, an up-ender includes a support frame, a pallet-tilting mechanism coupled in a pivotal manner to the frame, and first and second generally upright pusher arms coupled to the frame. The pallet-tilting mechanism is pivotable between an up position and a down position, such that when the pallet-tilting mechanism is in the up position, an upright stack of pallets can be loaded onto the pallet-tilting mechanism and when pivoted to the down position, the stack is rotated about 90° so that the pallets become generally vertically oriented. The pallet-tilting mechanism also is adapted to displace the stack of vertically oriented pallets along a support surface. The pusher arms are positioned to receive the stack of pallets from the pallet-tilting mechanism and automatically index the pallets in the stack along the support surface.

Abstract: The present invention is a pre-aligner capable of determining the center of a wafer by casting light onto a wafer that is positioned above a charge-coupled device (CCD). The pre-aligner performs this operation by directing light emitted from a single LED simultaneously onto the wafer and the CCD. The light emitted from the LED is directed through a light guide in order to direct the light onto the wafer and CCD. A lens collimates the light exiting the light guide such that the light, as it passes the wafer's edge, is substantially perpendicular to the wafer's edge. The light guide may be removably secured to the pre-aligner housing for easy installation removal. The pre-aligner is capable of self-calibrate the LED.

Abstract: The invention relates to a simple and cost-effective method for aligning substrates. In order to achieve this, the invention provides a device for aligning disc-shaped substrates, in particular semiconductor wafers, comprising an alignment detection unit, at least one first support for receiving the substrate, which forms an oblique plane in relation to the horizontal, a stop against which the substrate can be displaced as a result of the oblique angle and a rotational device for rotating the substrate.

Abstract: A device for positioning disk-shaped objects (1) to inspect the front and rear sides of disk-shaped objects and to reduce the negative effect of large-area contact between the holder and the disk-shaped object. The device comprises a rotatable table (24) which can be adjusted in the x-y direction in an adjustment plane and is intended to accomodate a platform (3). A fork-shaped frame (8) is mounted on the platform so as to be rotatable about an axis of rotation which is aligned perpendicular to the surface of the platform (3) and the angle of tilt of which can be set relative to the adjustment plane. At its fork ends, the fork-shaped frame (8) has another axis of rotation which is aligned perpendicular to the axis of rotation of the fork-shaped frame (8) and about which a frame-shaped object holder (9) is mounted so as to be rotatable in the fork-shaped frame (8) for the purpose of turning the object.

Abstract: A convertible wheelchair is provided along with a separable lift module for engaging and elevating the convertible wheelchair to a selected elevation. A coupling assembly is operative associated with the lift module and adapted to extend therefrom to where the coupling assembly attaches to the convertible wheelchair. In one embodiment, the coupling assembly comprises a three-point attachment that results in the wheelchair being connected to the coupling assembly and hence the separable lift system at three points. Once coupled to the lift system, the convertible wheelchair, with a patient supported therein, can be raised to a selected elevation. Thereafter, the wheelchair can be converted from a chair configuration to any one of several examination configurations.

Abstract: A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis.

Abstract: In order to allow a glass plate (26) to fall over out of the position which is tilted somewhat to the vertical into an essentially horizontal position, the glass pane (26) standing up with its lower edge (28) on the conveyor device (22) and with its upper edge (29) resting against a support member (40) with rollers (44) is moved into the initial position. By moving the support member (40) away from the upper edge (29) of the glass pane (26) it is allowed to fall down to the rear so that it comes to rest on the support surface of the table (2). From this support surface which can be made as an air cushion or as a span with transport belts or rollers, a glass pane (26) which points up with its “nicer” side (27) can be delivered to further treatment, for example to a downstream device (18).

Abstract: When FOUPs (front opening unified pods) (80a, 80b) are mounted on shelves (111d, 121c), respectively, shelves (121a, 121b, 121c) are moved in the vertical direction by cylinders (127a, 127b, 127c), respectively. The FOUP (80b) is thereby moved above the FOUP (80a) to create a space (129), for ensuring a transport path (AR6) for the FOUP (80a). The FOUP 80a can therefore be transported to a shelf (141) without moving the FOUP (80b) to another shelf, achieving improved throughput of substrate processing.

Abstract: A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.