Abstract: A method for rotating and orienting cans in a multipack configuration pushes the cans off a conveyor belt to a scanning and rotating stations where the cans are rotated until the sensors detect that the cans are facing the correct direction. The cans are then shifted back to the conveyor belt. This is useful to prevent unintentional reading of e.g. bar codes on a single item.

Abstract: A system includes an interface for receiving a pod having a carrier that receives wafers, and that is initially enclosed within a base and a pod cover. The system also includes a mechanism that transfers an exposed carrier between the interface and a platform of a mass-transfer machine included in the system. The machine includes a gantry arm for transferring the carrier between the platform and a transfer station. A retainer assembly is positionable over the carrier at the transfer station, and over a process carrier that is used in a processing tool. Moveable retainers of the assembly receive and hold wafers. The machine includes an elevator that moves between the transfer station and the process carrier. The elevator extends and retracts for transferring wafers between the retainers and either the carrier or the process carrier. A turntable, that receives the process carrier, permits automatically reorienting wafers.

Abstract: An armature shaft having an eccentric cam body extending from one end thereof is gripped by an adjustable collet mechanism and rotated by a drive motor, preferably a stepping motor, having an output shaft movable in discrete increments. This rotation continues until an imaginary reference point on the periphery of the cam body reaches first and second angular positions. The preferred reference point is the point on the periphery of the end face of the cam body that is farthest from the axis of rotation of the armature shaft. The number of steps necessary to rotate the armature shaft so that the reference point is moved from the first angular position to the second angular position is determined as the armature shaft is rotated and used to determine the position of the reference point relative to a centerline between the first and second angular positions.

Abstract: A method of orienting wafers in an apparatus having a wafer receiving-workpiece holder such as an electro-static chuck for processing of the wafers and eliminating etch debris build-up at the wafer orienting notch. The method comprises the steps of first providing a plurality of wafers, each wafer having an orientation mark thereon and then securing a first wafer in the chuck with the first wafer orientation mark in a first position with respect to the chuck. Thereafter, the first wafer is removed from the chuck after desired processing of the first wafer. A subsequent wafer is secured in the chuck with the subsequent wafer orientation mark in a second position with respect to the chuck different than the first position.

Abstract: An infeed system that orients a log for a processing unit. A flight conveyor, a log turner and a sharp chain are in an overlapping arraignment. The flight conveyor conveys a log past a scanner which inputs scan data into a computer which determines the profile and orientation on the flight conveyor. The computer determines the desired orientation of the log for the processing unit. The log turner is arranged to rotate and skew the log to the desired orientation. The log is then transferred to the sharp chain conveyor. The overlapping arrangement of the flight conveyor, log turner and sharp chain maintains full control of the log at all times. The sharp chain conveys the log past a second scanner which inputs the scan data to the computer to determine the actual orientation of the log on the sharp chain. The infeed system may also be provided with a shift and lift mechanism for further controlling the log position relative to the processing unit.

Abstract: An IC package transfer mechanism for transferring molded IC packages to and from a flat tray with a large number of IC holder nests in an array and an IC magazine adapted to accommodate a large number of IC packages in a row within a tubular housing to be turned into a tilted position in loading and unloading operations to let IC packages slide into or out of the cylindrical housing automatically by gravity.

Abstract: A device and method for determining the center and orientation of a circular workpiece such as a semiconductor wafer. A beam of light from a light emitting diode is nearly collimated by a collimation lens before being reflected by a conical mirror. After reflecting from the conical mirror, the beam is reflected by a frustoconical mirror down to a flat annular mirror positioned below a semiconductor workpiece. That portion of the beam not intercepted by the workpiece is reflected back to the frustoconical mirror by the flat mirror. The return beam is then reflected by the conical mirror and passes through the collimating lens and forms a ring of light on a quadrature photodiode array. Light striking the quadrature photodiode array is converted into an electrical voltage or signal proportional to the amount of light striking each photodiode.

Abstract: An armature shaft having a cam body extending from one end thereof is inserted into a shaft-receiving transfer block of an armature lamination and shaft assembly machine so that the cam body has a desired angular orientation relative to the axis of rotation of the armature shaft. A stack of laminations with which the shaft is assembled is rotationally oriented using a rotatable support for the lamination stack and a pair of proximity detectors which sense the position of missing portions of one or more of the laminations.

Abstract: In an automatic pinsetter having an elevator mechanism for receiving bowling pins seriatim at a lower entrance portion from a pit area at a rear end of a bowling alley and for transporting the same upwardly for discharge at an upper end portion, a frutso-concial baffle is provided and is suspension mounted forwardly of the elevator mechanism and above a rearwardly moving conveyor. Fallen bowling pins in indiscriminate arrangement proceed rearwardly on the conveyor beneath a bridge which obstructs rearward ball movement and passes prone bowling pins only. Left and right hand guides cooperate with the baffle to define left and right hand entry passageways for the bowling pins in rearward movement to the entrance of the elevator mechanism. The passageways are insufficient in width to accommodate the side-ways passage of bowling pins. The baffle is also free to move in any direction over a limited degree of movement.

Abstract: An armature shaft having a cam body extending from one end thereof is inserted into a shaft-receiving transfer block of an armature lamination and shaft assembly machine so that the cam body has a desired angular orientation relative to the axis of rotation of the armature shaft. A stack of laminations with which the shaft is assembled is also angularly oriented.

Abstract: A box tilter that comprises a movable chassis and a container-supporting frame directly hinged to the chassis. The actuating force for lifting and tilting the container is provided by a hydraulic cylinder connected in retractable pulling relation between the chassis and a radial arm rigidly attached to the container-supporting frame and projecting backward from the hinge point. This radial-arm configuration reduces the distance of the container from the operator of the device and results in improved access to the items in the container.

Abstract: A roll handling apparatus for aligning and upending a plurality of rolls is disclosed. A C-hook is mounted on a vertical lifting arm. An elevated rail defines a path of travel for a travelling support which mounts the vertical lifting arm. A tiltable upender assembly is positioned adjacent the elevated rail and includes a deck assembly, opposed gates positioned on opposite sides of the deck assembly and a pivotable rear carrier assembly extending between the opposed gates. Lift cylinders are provided for tilting the deck assembly for correct alignment of the rolls. Pivot cylinders are provided for rotating the deck assembly and the carrier assembly ninety degrees to upend the correctly aligned rolls.

Abstract: A cartridge feeder for dispensing a plurality of cartridges in single order and in upright position, each cartridge being cylindrical shape and having a top end tapering to an aperture therein and a substantially flat bottom end. A hopper stores a plurality of the cartridges and feeds those cartridges to a throat in a bridge to which the hopper is connected. The cartridge is passed through the bridge throat and to the throat of a shuttle. A pair of axially positioned pins with opposing cups close against the top end and the bottom end of the cartridge. The shuttle moves from a location underneath the bridge to a location over a chute. When the shuttle is over the chute, the first and second pins separate releasing the cartridge to fall through the chute. The first and second pins have a profile which engage the cartridge in a manner causing the bottom end of the cartridge to always drop first. The cartridge passes through the chute to a trap door.

Abstract: An armature shaft having a cam body extending from one end thereof is inserted into a shaft-receiving transfer block of an armature lamination and shaft assembly machine so that the cam body has a desired angular orientation relative to the axis of rotation of the armature shaft. A stack of laminations with which the shaft is assembled is also angularly oriented.

Abstract: The cup return automat has a cup insertion chamber (1), a cup collection chamber (10) and a stacking shaft (9) arranged over the cup collection chamber for the cups to be stacked in the stacking shaft (9), with a device for ejecting the formed cup stack (5") laterally into the cup collection chamber (10). In between the cup insertion chamber (1) and the stacking shaft (9) there is located a transfer device, which only allows any cup received in the cup insertion chamber (1) to pass into the stacking shaft (9) when in the cup orientation permitting the cup stacking and with the cup opening turned downwards.

Abstract: A cassette carrier unit for carrying a cassette, in which a plurality of substrates are housed, into and out of cassette chambers of the multi-chamber system including a hand on which the cassette is mounted. A multi-joined arm for supports the swingable hand, and a base supports the multi-joined swingable arm. The multi-joined arm includes a first shaft member rotatably attached to the hand, a second shaft member rotatably attached to the base, a third shaft member rotated associating with the first shaft member but in a direction reverse to the direction in which the first shaft member is rotated, and a fourth shaft member rotatably attached to the base and to which rotation drive force is transmitted. A first arm is rotatably attached to the first shaft member at the front end thereof and to the second shaft member at the base end thereof.

Abstract: A container for storing a plurality of semiconductor wafers comprises two end walls and two side walls. The container has a main opening through which the wafers are inserted into or withdrawn from the container and a sub-opening through which a wafer counter approaches the wafers. A plurality of slots are formed in the container to hold the wafers one by one at intervals. Each slot includes a pair of grooves which are formed in inner surfaces of both the side walls, have a V-shaped cross-section, and which divergently open toward a central portion of the container. One surface of each groove serves as a supporting surface on which a wafer is disposed substantially horizontal when the container is positioned such that the reference plane is horizontal. The supporting surfaces of the pair of grooves have a pair of converging portions which converge toward the second opening.

Abstract: A wafer positioning device providing superior precision in a very thin configuration. Piezoelectric (vs. electrostrictive) solid state actuators provide precise positioning. To provide a thin configuration, the actuators are positioned horizontally. To move the wafer vertically, and to magnify the stroke of the actuators, there are provided displacement transformers. The positioning device provides positioning along four degrees of motion. The device can be mounted onto an x-y table to provide positioning along all six degrees of motion.

Abstract: A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a holding mechanism, disposed in the load-lock chamber for holding the wafer, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting mechanism for detecting a positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.

Abstract: A thermal processing station is provided with a first conveyor that conveys a wafer from a first conveyor access portion and a second conveyor that conveys another wafer from a second conveyor access opening portion. The wafer conveyed from the first conveyor is conveyed along a route consisting of the second conveyor, a washing portion, the second conveyor again, the first conveyor, and a thermal processing portion. On the other hand, the wafer conveyed from the second conveyor is conveyed along a route consisting of the washing portion, the second conveyor again, the first conveyor, and the thermal processing portion. An intermediate transfer portion that is free to rotate and rise and lower is provided between the first and second conveyor. A control section does not rotate the intermediate transfer portion while the wafer is being transferred along the former route, but it does rotate the intermediate transfer portion through 180.degree.

Abstract: The method and apparatus for positioning a semiconductor wafer incorporates an X.Y axis drive mechanism for moving a mounting bed with a rotary part mounted on the mounting bed for supporting a wafer horizontally and rotating around the vertical axis. An edge portion distance measuring device optically measures a distance from the center position of the rotary part to the edge portion of the wafer along intervals of a definite angle. A distance and angle calculating device calculates a distance between the center position of the wafer and the rotational center of the rotary part relative to a reference line, and an angle of a line connecting the center position of the wafer and the rotational center of the rotary part with respect to the reference line. A notched portion calculating device calculates a deflection angle of the notched portion of the wafer with respect to the reference line, and a deflection amount calculating device calculates the X.

Abstract: A load-lock unit is disposed between first and second atmospheres, for storing a wafer transferred from the first atmosphere, and which is blocked off from the first atmosphere, thereafter being set in an atmosphere at least substantially similar to the second atmosphere, and opened so as to communicate with the second atmosphere in order to transfer the wafer to the second atmosphere. The load-lock unit includes a load-lock chamber, a holding mechanism, disposed in the load-lock chamber for holding the wafer, a rotating mechanism for rotating the wafer held by the holding mechanism, and an error detecting mechanism for detecting a positional error of the center of the wafer and an orientation error of the wafer on the basis of data obtained by radiating light on the wafer which is rotating.

Abstract: A dumping apparatus for a bag filled with molten substance wherein a tippler and a driving apparatus therefor are simplified and miniaturized in structure and a bag can be pulled out smoothly from within a carrying can with a minimized impact and without the possibility of break and can be transferred safely to a pallet. The tippler is mounted for pivotal motion around a stationary axis, and when it is pivoted from a first transfer position, fork prongs thereof are moved from between adjacent rollers of a roller conveyor to take up carrying cans from the roller conveyor. The carrying cans are thereafter held and moved by a side frame of the tippler, and when the tippler is pivoted to a second transfer position at which the side frame thereof is inclined downwardly, bags filled with molten substance slip somewhat from the carrying cans due to their own weight so that they are partially received on a pallet on a pallet conveyor.

Abstract: A pick and plate apparatus for use in an automatic test handler picks up electronic devices from one type of tray, transfer the electronic devices in a horizontal plane to another type of tray, and places the electronic devices in a predetermined position on the other tray for testing and sorting. The pick and place apparatus includes a plurality of suction inlets for picking up the electronic devices from the tray with suction power caused by a vacuum, a guide frame for slidably mounting the plurality of suction inlets in a horizontal direction, a mechanism for providing up-and-down movement to the suction inlets for picking up the electronic devices from the one tray and placing the device in the other tray, and a mechanism for adjusting the spacing of the suction inlets to compensate for the differences in spacing between one tray and another tray.

Abstract: An arrangement is provided for a roller conveyor for efficiently accommodating two-way pallets. The arrangement includes a interim parking station in proximity to the initial and/or final end region of the roller conveyor. The interim parking station includes a parking surface characterized by a pair of spaced apart recesses to receive the forks of a forklift device. Thus, a two-way pallet can be picked up at a remote location by a forklift device in the conventional manner with the forks of the forklift device passing into spaces between adjacent scantlings of the pallet. The forklift device can then deposit the two-way pallet onto the scantlings. The same forklift device or a separate forklift device can then approach the interim parking station with the forks of the forklift device aligned parallel to the recesses in the parking surface of the interim parking station. The forks can be inserted into these recesses and beneath the bottom surface of the pallet to enable the two-way pallet to be transferred.

Abstract: A bottle loader and method for loading bottles onto shelves on a rack. The bottle loader has a carrier car rotatably supported on a frame. The bottles are placed in a vertical position and urged onto the carrier car. The bottles are then rotated on the carrier car from the vertical position to a horizontal position while horizontally aligning the bottles with the shelf on the rack. Once the bottles are aligned, they are urged off of the carrier car and onto the rack.

Abstract: A turntable for selectively accommodating different types of workpieces in which the system is designed for combining two turntables into one for handling two different workpieces which are rotated by two different motors. Preferably, one of the motors is connected to one of the tables for rotating the table continuously at a slow speed for treating large parts. The turntable is adapted to be selectively arranged for a second motor to drive a second table at incremental positions so as to index smaller parts for treatment. One drive shaft of the two motors is located within the other drive shaft which is hollow.

Abstract: This invention relates to apparatus for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

Abstract: A device (10) for positioning a glass sheet or other generally rigid planar object (G), having a roller bed table (12) for supporting the object in a horizontal plane and an overhead device (14) carrying a first set of spaced apart arms (26, 28, 30, 32), each of which has a vertically acting cylinder (70) near a free end thereof, and a second set of spaced apart arms (20, 22, 24) near a free end thereof, each of which has a horizontally acting cylinder (48) near the free end thereof. Each vertically acting cylinder has a sheet edge contacting element (74) at the free end of its cylinder rod (72), and these edge contacting elements act as fixed stops during the positioning of the object. Each horizontally acting cylinder has a sheet edge contacting element (52) of the free end of its cylinder rod (50), and these edge contacting elements act as movable stops during the positioning of the object.

Abstract: Agar-filled petri dishes with covers on them are taken in rows from a first conveyor belt through interface equipment to a horizontal infeed conveyor transporting them in axially aligned packs of ten through a conventional wrapping machine. Two alternate types of interface are used. A "parallel" interface stacks dishes from six columns simultaneously adjacent the end of the first conveyor, to create six stacks of dishes. These are transferred as a group to a lateral conveyor. The lateral conveyor transports the six stacks to a single stack transfer station where a transfer wheel having a horizontal axis receives the stacks and turns them from a vertical attitude to a horizonatal attitude moving in synchronization with the linear motion of the infeed conveyor.

Abstract: This invention relates to the field of paperboard tray forming machines which typically consist of an upper and lower die which interlock to deform a paperboard blank. The invention is an arcuate yoke having a pair of legs to which locating stops and side guide plates are rigidly attached. The die is angled to the earth so that a blank deposited onto the die is gravity biased toward the locating stops. The yoke is vibratingly driven and the blank is vibrated into position on the lower die by contacting the locating stops and side guide plates and vibrating to the blank's lowest position on the die.

Abstract: A vertical heat-treatment apparatus is provided with a mechanism for automatically transferring semiconductor wafers from carriers to a boat for a vertical type furnace. The automatic transferring mechanism comprises a port for receiving a plurality of carriers arranged in series in an upright state, a posture change mechanism for changing the posture of wafers in the carriers from the upright state to the horizontal state, a parallel transfer mechanism for transferring the carriers on the boat to the posture change mechanism, a carrier loading/unloading mechanism for loading the carriers on a station, a wafer loading/unloading mechanism for taking out the wafers from the carriers on the station in turn and transferring the taken-out wafers to the boat in turn, and a mounting mechanism for mounting the boat in the furnace. The carrier loading/unloading mechanism and the wafer loading/unloading mechanism are mounted on a common frame and are rotated and lifted at the same time.

Abstract: An apparatus for feeding an electrical connector to a connector termination press includes a slotted rotary drum that receives the leading connector from a ribbon of taped connectors carried on a reel, rotates the connector ninety degrees to reorient the connector and places it in a connector positioning track, and a push rod assembly that advances the connector into an aligned position underneath the ram of a connector termination press.

Abstract: This invention relates to a method and apparatus for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

Abstract: An apparatus for isolating a plurality of parts is operable, with, e.g., an image recognizing apparatus which records the position and configuration of the parts, and a conveying and placing apparatus used to align the parts on a part alignment section. The part isolating apparatus includes an isolation table having a centrally located bore defined by a surface sloping downwardly toward the center of the table, and a frame member for supporting the table. A bag member is mounted around the lower edge of the table for receiving a plurality of parts and includes an isolation frame for holding a part to be isolated. A thrusting head vertically lifts the bottom of the bag member. When the thrusting head ascends through the bore, one of the parts becomes isolated from the others.

Abstract: The wafer positioning apparatus has an X.multidot.Y axis drive mechanism for moving a mounting stock in the X-axis direction and the Y-axis direction in the X.multidot.Y coordinates on the horizontal plane; a wafer inserting section is fixed on the mounting stock and has a space for inserting a wafer horizontally; photosensors are installed at the wafer inserting section and arranged at regular intervals on positions corresponding to peripheral portions of the wafer so as to detect edge portions of the inserted wafer; and a rotary section is arranged at the center of the wafer inserting section to be attached to the center of the rear surface of the inserted wafer by suction. The wafer is held on a hand plate or the like of a separate carrier system and inserted horizontally into the center of the space within the wafer inserting section, and the photosensors act in this state and detect peripheral portions of the wafer, and at the same time the X.multidot.

Abstract: A catridge changer for carrying a cartridge to a utilization position and returning it to its initial position after the utilization thereof has a cartridge containing chamber for containing a number of cartridges therein, a hand member for gripping a selected cartridge, a hand moving device for moving the hand member gripping the selected cartridge to the cartridge containing chamber and the utilization position to carry the cartridge, and a correcting device for correcting the posture of the cartridge gripped by the hand member to a regular posture.

Abstract: This invention relates to apparatus for pre-aligning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .theta. from a desired orientation is determined. The wafer chuck of the transport stage is then displaced by a compensating amount.

Abstract: A method of positioning a wafer when plural chips arranged on the semiconductor wafer are to be measured by a probe apparatus. The direction in which probes of the probe apparatus are set is measured via a dummy wafer and stored as data. The positioning of the wafer can be achieved by the operation of a table on which the wafer is mounted. When the wafer is to be positioned, the chips-lined direction on the wafer is rotated to align with the moving coordinates of the table and then with the probes-set direction. A probing direction in which wafers are successively moved and a reference position on the wafer are determined, and this reference position is aligned with the position of the probes. Measurement is carried out relative to every position of the chips calculated from the reference position, while moving the table along the probing direction.

Abstract: A mechanism for automatically orientating cup bodies includes a cup-body rotating element, an element for measuring a peripheral configuration of the side wall of a cup body, and a central control element for comparing the peripheral configuration of the side wall thereof with a peripheral configuration of the side wall of a sample cup body as determined in advance. The central control element determines whether the two peripheral configurations coincide with each other, and determines the angle by which the cup body is to be rotated to orientate it in a selected direction for the connection of a handle thereto at a predetermined position thereon if the two peripheral configurations do not coincide with each other. Then, the central control element rotates the cup-body rotating element by the required angle to orientate the cup body in the selected direction.

Abstract: An apparatus for detecting an orientation flat of a wafer and centering the wafer includes a hand base, a pair of guide rollers mounted on the hand base, and a stopper mechanism mounted on the hand base. The hand base is operable to be located in opposed relation to one of opposite faces of the wafer, and has an axis therealong. The guide rollers serve to support the wafer located in opposed relation to the hand base, and are symmetrically disposed with respect to the axis of the hand base. The stopper mechanism cooperates with the pair of guide rollers to center the wafer, and are movable along the axis of the hand base and engageable with the orientation flat of the wafer.

Abstract: A unique piano moving apparatus is provided which may be operated to safely and efficiently move a grand piano by one or two individuals of average physical ability. A keyboard and jack assembly having a first support portion is mutually spaced from and intersecured to an opposing end jack assembly having a second support portion. The support portions are respectively adapted to underlie and support the key board and front end portions of a grand piano. The keyboard and jack and oppasing end jack assemblies are operable to lift the piano to a position in which it may be tilted on its side while still being supported by the piano moving apparatus. The tilted piano may then be slid off the moving apparatus onto a movable platform which may then be conveniently rolled to and loaded onto a waiting transport trailer. A winch device may be used to pull the movable platform and piano into the transport trailer.

Abstract: A device for detecting a position of an edge of a disk-like workpiece having an outer periphery whose shape includes a portion bearing positional information related to the workpiece, the device including a system for rotationally moving the workpiece; an illuminating system; and a photodetecting system; wherein the illuminating system and the photodetecting system are disposed so as to sandwich therebetween an outer peripheral portion of the workpiece when it is rotationally moved by the moving system and wherein the illuminating system projects, toward the photodetecting system, a light beam having an elongated shape in cross-section.

Abstract: A device for centering an object and rotating it to a desired angular position relative to a discerning feature. The centration device is particularly adapted for use as a station in a semiconductor wafer handling apparatus, and includes a rotatably driven chuck on which a wafer may be placed by a robot manipulator arm. The perimeter of the wafer is rotated between a light source and a linear array of charge coupled device elements, casting a shadow on the light sensitive elements as the wafer is rotated. A processor connected to the charge couple devices and to an angular position encoder on a shaft of the chuck rotating the wafer is operative to collect data relating the displacement of the perimeter from a reference point to the angular position of the wafer. The processor determines from the data a distance over which the wafer should be shifted on the chuck to center it relative to the reference point.

Abstract: A low-profile, automatically guided vehicle is provided with a vertically raisable cradle which can carry a roll either in a bilge position or an upright position. The vehicle is used in a roll-handling system which enables the vehicle to pass beneath the spaced, parallel arms of a storage rack that can be holding a roll either in the upright or bilge position. The vehicle can pass beneath a set of rolls on the storage racks so that passage of the vehicle either for depositing a paper roll or lifting a paper roll from the storage rack can be in a single, common direction. A transfer table is provided which has articulated arms that can be vertically raised. The arms can be moved lengthwise to the direction of the lengthwise axis of the roll in a bilge position, the arms can be raised vertically, or the arms can be carried moved to the lengthwise axis of the roll on the transfer table.

Abstract: Apparatus is set forth for prealigning the transport stage of an automated wafer handling lithographic system. The wafer is first rotated and its displacement in X, Y, and .THETA. from a desired orientation is determined. Rotation of the wafer is stopped when its angular position reaches a desired orientation. The wafer chuck of the transport stage is then displaced to compensate for any deviation of the wafer in the X and Y directions from a desired rectilinear orientation. This permits the wafer stage to present the wafer to the exposure station of a lithographic system aligned in the X, Y and .theta. directions.

Abstract: An apparatus for placing in location a circular article from a transport pallet and for moving the article to one or more control positions being angularly offset with respect to one another. The apparatus includes a gripping mechanism with grippers mounted on a gantry, a framework supported by a plate which can be raised and lowered, the framework including a mechanism for rotating the article about itself and leaving free an angular sector of 120.degree. at which all the parts of the article can be presented in order to be brought up to or brought into contact with a measurement or inspection mechanism the framework also comprising a mechanism to allow for correct location in any inclined direction or vertical. The apparatus is applicable to automation of control sequences or machining sequences without manual operation or intermediate return of the article between the operations of inspection or of machining.

Abstract: A system for transferring, positioning and machining a workpiece includes a transfer device for transferring the workpiece to a prescribed position, a positioning device disposed in the prescribed position for positioning the workpiece, a machine tool for machining the workpiece, and a delivery robot disposed in the prescribed position for delivering the workpiece to the machine tool. The positioning device is used to position workpieces successively. Therefore, it is not necessary to provide positioning devices which would otherwise be associated with respective workpieces. The positioning device includes a positioning pin which is displaceable toward and away from a workpiece. Since the positioning pin is not held against the workpiece at all times, the positioning pin is prevented from being damaged or broken by physical interference with surface irregularities of the workpiece.

Abstract: Disclosed is an apparatus and method of orienting a cylinder with an oblique end such that the slant of same faces a preferred direction. To this end, a special fixture is used which includes a central axial bore having a cylindrical surface which engages in bearing-like fashion with the oblique-ended cylinder. On opposite sides of the bore, are a magnet for imposing a magnetic field across the bore and across therefrom a dowel pin stop. The magnetic field acts to rotate the oblique-ended cylinder about the common axis of the bore and cylinder into a generally preferred position wherefrom the oblique-ended cylinder can come to its final resting position against the dowel pin stop.

Abstract: Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing machine, a temporary storage device mounted on the support structure for storing a wafer in position for pick up, the flat surfaces of the wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for carrying the wafer on the first engagement member between the temporary storage device and the engagement position, a first X-direction mover mounted on the support structure and operable to move the first engagement member parallel to the X-axis, a second wafer engagement member for carrying the wafer on the second engagement member between the temporary storage device and the engagement position, a second X-direction mover mounted on the support structure and operable to move the second engagement member parallel to the X-axis independent of the first engagement member, a Z-direction m