Plasma (e.g., Cold Plasma, Corona, Glow Discharge, Etc.) Patents (Class 427/535)
  • Patent number: 12359311
    Abstract: A doped or undoped silicon carbide film can be deposited using a remote plasma chemical vapor deposition (CVD) technique. One or more silicon-containing precursors are provided to a reaction chamber. Radical species, such as hydrogen radical species, are provided in a substantially low energy state or ground state and interact with the one or more silicon-containing precursors to deposit the silicon carbide film. A co-reactant may be flowed with the one or more silicon-containing precursors, where the co-reactant can be a depositing additive or a non-depositing additive to increase step coverage of the silicon carbide film.
    Type: Grant
    Filed: February 27, 2023
    Date of Patent: July 15, 2025
    Assignee: Lam Research Corporation
    Inventors: Matthew Scott Weimer, Bhadri N. Varadarajan, Bo Gong, Zhe Gui
  • Patent number: 12362150
    Abstract: The present technology is generally directed to semiconductor processing systems and methods. Systems and methods include a chamber having a plurality of chamber components, such as a pedestal, a lid stack, a faceplate, electrode, and a showerhead. The faceplate is supported with the lid stack and defines a plurality of first apertures and the showerhead is positioned between the faceplate and the pedestal and defines a plurality of second apertures. In systems and methods, the faceplate, the showerhead, the lid stack, the pedestal, or a combination thereof include an yttrium fluoride, yttrium oxyfluoride, or both yttrium fluoride and yttrium oxyfluoride coating having a thickness of greater than 10 ?m on at least a portion of the respective chamber component or combination thereof.
    Type: Grant
    Filed: March 9, 2023
    Date of Patent: July 15, 2025
    Assignee: Applied Materials, Inc.
    Inventors: Laksheswar Kalita, Joseph Behnke, Ryan Pakulski, Christopher L. Beaudry, Jonathan Strahle
  • Patent number: 12351911
    Abstract: The present disclosure provides a hydrophobic low-dielectric-constant film and a preparation method therefor. The low-dielectric-constant film is formed from one or more fluorine-containing compounds A by means of a plasma enhanced chemical vapor deposition method, and the one or more fluorine-containing compounds comprise a compound having the general formula CxSiyOmHnF2x+2y?n+2 or CxSiyOmHnF2x+2y?n, x being an integer from 1 to 20, y being an integer from 0 to 8, m being an integer from 0 to 6, and n being 0, 3, 6, 7, 9, 10, 12, 13, 15, 16, 17 and 19. Thus, a nano-film having a low dielectric constant and good hydrophobicity is formed on the surface of a substrate.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: July 8, 2025
    Assignee: Jiangsu Favored Nanotechnology Co., Ltd.
    Inventor: Jian Zong
  • Patent number: 12338527
    Abstract: Methods and apparatus reduce defects in substrates processed in a physical vapor (PVD) chamber. In some embodiments, a method for cleaning a process kit disposed in an inner volume of a process chamber includes positioning a non-sputtering shutter disk on a substrate support of the PVD chamber; energizing an oxygen-containing cleaning gas disposed in the inner volume of the PVD chamber to create a plasma reactive with carbon-based materials; and heating the process kit having a carbon-based material adhered thereto while exposed to the plasma to remove at least a portion of the carbon-based material adhered to the process kit.
    Type: Grant
    Filed: August 31, 2022
    Date of Patent: June 24, 2025
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Zhiyong Wang, Halbert Chong, Irena H. Wysok, Jianxin Lei, Rongjun Wang, Lei Zhou, Kirankumar Neelasandra Savandaiah, Sundarapandian Ramalinga Vijayalakshmi Reddy
  • Patent number: 12318776
    Abstract: A sample holder (10) comprises: an upper layer (20); a lower layer (40); a middle layer (30) between the upper and lower layers; and a sample chamber (33) formed by a through-hole in the middle layer (30), covered at its upper extent by a portion of the bottom surface of the upper layer (20), and at its lower extent by a portion of the top surface of the lower layer (40), wherein at least part of the bottom surface of the upper layer (20) overlapping a portion of a top periphery of the sample chamber (33) comprises a hydrophobic surface, wherein the hydrophobic surface is sufficiently hydrophobic that a contact angle of a water droplet on the hydrophobic surface would exceed 110°.
    Type: Grant
    Filed: January 22, 2019
    Date of Patent: June 3, 2025
    Assignee: Q-LINEA AB
    Inventors: Jonas Melin, Simon Uhrberg, Jonas Jarvius
  • Patent number: 12315837
    Abstract: The present disclosure describes a semiconductor structure having bonded wafers with storage layers and a method to bond wafers with storage layers. The semiconductor structure includes a first wafer including a first storage layer with carbon, a second wafer including a second storage layer with carbon, and a bonding layer interposed between the first and second wafers and in contact with the first and second storage layers.
    Type: Grant
    Filed: August 10, 2023
    Date of Patent: May 27, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: De-Yang Chiou, Yu-Yun Peng, Fu-Ting Yen, Keng-Chu Lin
  • Patent number: 12315778
    Abstract: The invention provides a laminated assembly dedicated to an enhanced heat discharge type electronic device application by providing an enhanced thermal performance to a silicon device. A graphite thin film/silicon substrate laminated assembly is provided by cleaning the surfaces of a smoothed graphite thin film and a silicon substrate under deaeration conditions for activation, thereby bringing them close to each other for spontaneous bonding. In such a laminated assembly wherein the graphite thin film is provided on the silicon substrate, the silicon substrate and graphite thin film come into contact directly via an interface.
    Type: Grant
    Filed: December 25, 2019
    Date of Patent: May 27, 2025
    Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
    Inventor: Masataka Hasegawa
  • Patent number: 12296792
    Abstract: A sensor-cleaning system includes a sensor of a vehicle, an electrode, and a computer communicatively coupled to the electrode. The sensor includes a lens. The electrode is positioned to draw dust from the lens when the electrode is energized. The computer is programmed to energize the electrode in response to the vehicle moving and deenergize the electrode in response to the vehicle being stationary.
    Type: Grant
    Filed: September 14, 2022
    Date of Patent: May 13, 2025
    Assignee: Ford Global Technologies, LLC
    Inventors: Lorne Forsythe, Lars Niklas Pettersson, Venkatesh Krishnan, Michael Robertson, Jr.
  • Patent number: 12297544
    Abstract: Provided is a hot press formed product, which is prepared by means of hot press forming of a Zn—Al—Mg-based plated steel material comprising base iron and a Zn—Al—Mg-based plated layer, and a method for preparing the same, the hot press formed product comprising an oxide layer formed on the surface thereof, wherein the content ratio of Al to Mg (Al/Mg) in the oxide layer is 0.8 or more.
    Type: Grant
    Filed: September 15, 2023
    Date of Patent: May 13, 2025
    Assignee: POSCO CO., LTD
    Inventors: Il-Ryoung Sohn, Hyeon-Seok Hwang, Jong-Sang Kim
  • Patent number: 12282641
    Abstract: Provided in the embodiments of the present disclosure are a display substrate and a display apparatus. The display substrate includes a base substrate, including: a display area, a bending area, which is connected to a side of the display area, and an extension area, which is connected to the side of the bending area that is away from the display area; a touch-control wiring group, wherein the touch-control wiring group is located in the extension area, and the touch-control wiring group includes a plurality of touch-control wirings, which extend in a first direction and are sequentially arranged in a second direction; and a first floating wiring group.
    Type: Grant
    Filed: July 27, 2022
    Date of Patent: April 22, 2025
    Assignees: Chengdu BOE Optoelectronics Technology Co., Ltd., BOE Technology Group Co., Ltd.
    Inventors: Shun Zhang, Yuanqi Zhang, Fan He
  • Patent number: 12278061
    Abstract: Provided are a conductive polymer-containing dispersion for obtaining a solid electrolytic capacitor with low equivalent series resistance (ESR) while maintaining the capacitance, a method for producing same, and a solid electrolytic capacitor having low ESR while maintaining the capacitance. A conductive polymer-containing dispersion comprising a conjugated conductive polymer (A), a polyanion (B), an additive (C), and a dispersion medium (D), wherein a hydrogen bond term ?H1 of the additive (C) as a Hansen solubility parameter is 5.0 to 20.0 MPa0.5.
    Type: Grant
    Filed: December 18, 2023
    Date of Patent: April 15, 2025
    Assignee: Resonac Corporation
    Inventors: Shingo Sugimoto, Hiroki Yamada, Takashi Okubo, Yuichiro Asoma
  • Patent number: 12246343
    Abstract: A method for coating a ceramic matrix composite substrate with an environmental barrier coating includes the steps of: treating a surface of a ceramic matrix composite substrate to adjust wettability of the surface; and applying an aqueous slurry-based environmental barrier coating to the surface. The treating step can be a plasma treatment to remove organic contaminants, and can also be a treatment to modify oxidative state of the surface. The treatment can produce a surface for treatment that is hydrophilic and has a contact angle with aqueous-slurry coating materials of less than 40 degrees.
    Type: Grant
    Filed: March 13, 2023
    Date of Patent: March 11, 2025
    Assignee: RTX Corporation
    Inventors: James T. Beals, Tania Bhatia Kashyap
  • Patent number: 12227728
    Abstract: A substrate surface may be modified with a polymer coating to render the surface suitable for plasma functionalization. The polymer coating is deposited onto the surface at ambient temperature to a thickness of less than 0.1 ?m. The polymer coating includes poly(p-xylylene) or a derivative thereof, and is capable of penetrating into pores of a porous substrate while no substantially altering the porosity of the substrate. The coated substrate is selected from a material lacking a primary or secondary aliphatic hydrogen atom.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: February 18, 2025
    Assignee: Applied Membrane Technology, Inc.
    Inventor: Ashok Sharma
  • Patent number: 12227447
    Abstract: A coating film-attached glass comprising a glass substrate, and a coating film provided on at least a part of a surface of the glass substrate, in which a region from the surface of the glass substrate on the coating film side to a predetermined depth is a modified layer, and the modified layer has a microcrystalline structure at least in part.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: February 18, 2025
    Assignee: NIPRO CORPORATION
    Inventors: Masamichi Wada, Atsushi Ishikawa
  • Patent number: 12222346
    Abstract: Provided are nanopore devices that include a hafnium oxide coating on the pores of the devices. Such devices exhibit improved stability, especially when in a salt solution environment. Also provided are related methods.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: February 11, 2025
    Assignee: The Trustees of the University of Pennsylvania
    Inventors: Marija Drndic, Yung-Chien Chou
  • Patent number: 12217958
    Abstract: A method of pre-treating a substrate on which graphene will be directly formed may include pre-treating the substrate using a pre-treatment gas including at least a carbon source and hydrogen.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: February 4, 2025
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Keunwook Shin, Janghee Lee, Seunggeol Nam, Hyeonjin Shin, Hyunseok Lim, Alum Jung, Kyung-Eun Byun, Jeonil Lee, Yeonchoo Cho
  • Patent number: 12163219
    Abstract: Forming a protective coating ex situ in an atomic layer deposition process to coat one or more chamber components subsequently installed in a reaction chamber provides a number of benefits over more conventional coating methods such as in situ deposition of an undercoat. In certain cases the protective coating may have a particular composition such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, and/or yttrium fluoride. The protective coating may help reduce contamination on wafers processed using the coated chamber component. Further, the protective coating may act to stabilize the processing conditions within the reaction chamber, thereby achieving very stable/uniform processing results over the course of processing many batches of wafers, and minimizing radical loss. Also described are a number of techniques that may be used to restore the protective coating after the coated chamber component is used to process semiconductor wafers.
    Type: Grant
    Filed: September 7, 2022
    Date of Patent: December 10, 2024
    Assignee: Lam Research Corporation
    Inventors: Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Warren Bailey, Tony Kaushal, Krishna Birru, William Schlosser, Bo Gong, Huatan Qiu, Fengyuan Lai, Leonard Wai Fung Kho, Anand Chandrashekar, Andrew H. Breninger, Chen-Hua Hsu, Geoffrey Hohn, Gang Liu, Rohit Khare
  • Patent number: 12165829
    Abstract: A single beam plasma or ion source apparatus, including multiple and different power sources, is provided. An aspect of the present apparatus and method employs simultaneous excitation of an ion source by DC and AC, or DC and RF power supplies. Another aspect employs an ion source including multiple magnets and magnetic shunts arranged in a generally E cross-sectional shape.
    Type: Grant
    Filed: September 23, 2021
    Date of Patent: December 10, 2024
    Assignee: Board of Trustees of Michigan State University
    Inventor: Qi Hua Fan
  • Patent number: 12122990
    Abstract: Provided is a culture container base material made of a polyolefin material, capable of readily forming a culture container for culturing adherent cells. The culture container base material is for culturing the adherent cells and made of the polyolefin material. At least a part of a surface of the base material is subjected to a surface treatment, where the surface of the base material is a culture surface of the culture container, and the surface subjected to the surface treatment has a static water contact angle of greater than 80° and a receding contact angle of less than 53°.
    Type: Grant
    Filed: November 3, 2020
    Date of Patent: October 22, 2024
    Assignee: TOYO SEIKAN GROUP HOLDINGS, LTD.
    Inventors: Yosuke Matsuoka, Satoshi Tanaka, Takahiko Totani, Takaharu Nishiyama
  • Patent number: 12098459
    Abstract: The invention relates to a method for adhesion of a thin film or functional layer to a substrate by applying a pulsed and/or alternating voltage.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: September 24, 2024
    Assignee: SY&SE SA
    Inventors: Florian Telmont, Sébastien Brun, Thierry Aellen, Sophie Farine, Herbert Keppner
  • Patent number: 12094768
    Abstract: A method is provided for sealing a seam in a self-aligned contact (SAC) layer that is disposed on a gate of a semiconductor structure. The method includes depositing a filler in the seam to seal the seam.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: September 17, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Che-Ming Hsu
  • Patent number: 12094709
    Abstract: Embodiments of the present disclosure generally relate to methods for gap fill deposition and film densification on microelectronic devices. The method includes forming an oxide layer containing silicon oxide and having an initial wet etch rate (WER) over features disposed on the substrate, and exposing the oxide layer to a first plasma treatment to produce a treated oxide layer. The first plasma treatment includes generating a first plasma by a first RF source and directing the first plasma to the oxide layer by a DC bias. The method also includes exposing the treated oxide layer to a second plasma treatment to produce a densified oxide layer. The second plasma treatment includes generating a second plasma by top and side RF sources and directing the second plasma to the treated oxide layer without a bias. The densified oxide layer has a final WER of less than one-half of the initial WER.
    Type: Grant
    Filed: July 30, 2021
    Date of Patent: September 17, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Jung Chan Lee, Mun Kyu Park, Jun Lee, Euhngi Lee, Kyu-Ha Shim, Deven Matthew Raj Mittal, Sungho Jo, Timothy Miller, Jingmei Liang, Praket Prakash Jha, Sanjay G. Kamath
  • Patent number: 12087561
    Abstract: A processing chamber such as a plasma etch chamber can perform deposition and etch operations, where byproducts of the deposition and etch operations can build up in a vacuum pump system fluidly coupled to the processing chamber. A vacuum pump system may have multiple roughing pumps so that etch gases can be diverted a roughing pump and deposition precursors can be diverted to another roughing pump. A divert line may route unused deposition precursors through a separate roughing pump. Deposition byproducts can be prevented from forming by incorporating one or more gas ejectors or venturi pumps at an outlet of a primary pump in a vacuum pump system. Cleaning operations, such as waferless automated cleaning operations, using certain clean chemistries may remove deposition byproducts before or after etch operations.
    Type: Grant
    Filed: June 6, 2023
    Date of Patent: September 10, 2024
    Assignee: Lam Research Corporation
    Inventors: John Stephen Drewery, Tom A. Kamp, Haoquan Yan, John Edward Daugherty, Ali Sucipto Tan, Ming-Kuei Tseng, Bruce Edmund Freeman
  • Patent number: 12077469
    Abstract: A method of manufacturing a glass container in preparation for direct digital printing includes forming a glass container having a glass wall and applying a primer coating to the glass container. The primer coating is applied by directing an atomized spray of an aqueous primer composition onto the glass container over an adherent base layer, such as a hot-end coating, which deposits the primer coating, followed by heating the primer coating with a heat source such as a flame. Upon being heated, the clarity of the primer coating is increased. As a result, a decorative marking may be printed onto the glass container without having to pretreat the glass container in a way that involves pyrolytically depositing a layer of silicon dioxide onto the glass container prior to printing.
    Type: Grant
    Filed: September 24, 2021
    Date of Patent: September 3, 2024
    Assignee: Owens-Brockway Glass Container Inc.
    Inventor: Brian Chisholm
  • Patent number: 12080521
    Abstract: A method of processing a substrate with plasma includes: coating surfaces of components inside a chamber with a film having conductive properties by turning a first gas containing carbon and hydrogen into plasma inside the chamber; loading the substrate into the chamber; and processing the substrate by turning a second gas into plasma inside the chamber in a state where the surfaces of the components inside the chamber are coated with the film having conductive properties.
    Type: Grant
    Filed: July 11, 2023
    Date of Patent: September 3, 2024
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Michiko Nakaya, Yuya Minoura, Taku Gohira
  • Patent number: 12049700
    Abstract: The invention relates to an atomic layer process printer for material deposition, etching and/or cleaning on an atomic scale in a selective area. The invention further relates to a method for material deposition, etching and/or cleaning on an atomic scale in a selective area using the atomic layer process printer.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: July 30, 2024
    Assignee: ATLANT 3D Nanosystems ApS
    Inventors: Maksym Plakhotnyuk, Ole Hansen, Boisen Anja, Tomas Rindzevicius, Ivan Kundrata, Karol Fröhlich, Julien Bachmann
  • Patent number: 12048947
    Abstract: To improve the complicated painting process of large three-dimensionally shaped components, preferably aircraft components, the masking step is automated. This is achieved by printing a masking medium onto the component with an inkjet method, the masking medium forming a masking film. The masking film masks the desired surface area and can be pulled off following the end of the painting. Preferably, spray films, functional printing inks or mold release agents are used as the masking medium.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: July 30, 2024
    Assignee: Airbus Operations GmbH
    Inventors: Carsten Barlag, Daniel Lahidjanian
  • Patent number: 12049640
    Abstract: A cell adhesive substrate comprising a substratum, on a surface of which a peptide group is immobilized, wherein the peptide group comprises a peptide containing 40% or more and 75% or less of one or two or more of basic amino acid residues selected from the group consisting of lysine, arginine and histidine and 25% or more of one or two or more of hydrophobic amino acid residues selected from the group consisting of leucine, isoleucine, glycine, alanine, valine, phenylalanine, proline, tryptophan and methionine. There is provided a cell adhesive substrate that is unlikely to cause an immune reaction and can maintain a cell adhesion effect for a long time.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: July 30, 2024
    Assignee: TORAY INDUSTRIES, INC.
    Inventors: Kenichi Harimoto, Hirokazu Sakaguchi
  • Patent number: 12046420
    Abstract: A meta-material is disclosed that includes a first layer composed of graphene, and one or more additional layers, each composed of glassy carbon or graphene. A method of producing an engineered material includes depositing a graphene precursor on a substrate, pyrolyzing the graphene precursor to allow the formation of graphene, depositing a glassy carbon precursor the graphene, pyrolyzing to allow the formation of glassy carbon from the glassy carbon precursor, depositing a graphene precursor on the glassy carbon, and pyrolyzing the graphene precursor to allow the formation of graphene.
    Type: Grant
    Filed: October 25, 2022
    Date of Patent: July 23, 2024
    Assignee: San Diego State University Research Foundation
    Inventors: Samuel K. Kassegne, Elisa Castagnola, Surabhi Nimbalkar
  • Patent number: 12031660
    Abstract: A system for use in maintaining a pipe includes a motorized apparatus including a body assembly and at least one maintenance device. The at least one maintenance device includes a sprayer, a heater, and an infrared sensor. The system includes at least one controller configured to apply the at least one coating material to the interior surface of the pipe at a work location using the sprayer, heat the interior surface of the pipe at the work location using the heater to begin a cure of the at least one coating material, generate one or more infrared images of the work location using the infrared sensor while using the heater to cure the at least one coating material, and perform a non-destructive evaluation (NDE) of the work location based on the one or more infrared images.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: July 9, 2024
    Assignee: General Electric Company
    Inventors: Alexander Kyle Duncan, Todd William Danko, Venkata Vijayaraghava Nalladega
  • Patent number: 12009217
    Abstract: Provided are a substrate processing method and a substrate processing apparatus for forming a low-resistance metal-containing nitride film. The substrate processing method includes: a step of providing a substrate in a processing container; a step of forming a metal-containing nitride film on the substrate by repeating supplying an organic metal-containing gas and a nitrogen-containing gas alternately for a first predetermined number of cycles; a step of modifying the metal-containing nitride film by generating plasma in the processing container; and a step of repeating the step of forming the metal-containing nitride film and the step of modifying the metal-containing nitride film for a second predetermined number of cycles.
    Type: Grant
    Filed: March 4, 2020
    Date of Patent: June 11, 2024
    Assignee: Tokyo Electron Limited
    Inventors: Tsuyoshi Takahashi, Yu Nunoshige
  • Patent number: 12001193
    Abstract: Apparatus for extending substrate queue time for hybrid bonding by preserving plasma activation. In some embodiments, the apparatus may include an environmentally controllable space with a support for holding a die or a substrate, a gas velocity accelerator that recirculates one or more gases laterally across the support, a filter, a humidifier apparatus that is fluidly connected to the environmentally controllable space, wherein the humidifier apparatus enables controllable humidity levels within the environmentally controllable space, a pressurizing apparatus fluidly connected to the humidifier apparatus on an output and fluidly connected to at least one gas supply on an input, a relative humidity (RH) sensor positioned within the environmentally controllable space, and an environment controller in communication with at least the humidifier apparatus and the RH sensor, wherein the environment controller is configured to maintain an RH level of approximately 80% to approximately 95%.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: June 4, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Ying Wang, Xundong Dai, Guan Huei See, Ruiping Wang, Michael R. Rice, Hari Kishen Ponnekanti, Nirmalya Maity
  • Patent number: 11952663
    Abstract: Exemplary semiconductor processing chambers may include a substrate support including a top surface. A peripheral edge region of the top surface may be recessed relative to a medial region of the top surface. The chambers may include a pumping liner disposed about an exterior surface of the substrate support. The chambers may include a liner disposed between the substrate support and the pumping liner. The liner may be spaced apart from the exterior surface to define a purge lumen between the liner and the substrate support. The chambers may include an edge ring seated on the peripheral edge region. The edge ring may extend beyond a peripheral edge of the substrate support and above a portion of the liner. A gap may be formed between a bottom surface of the edge ring and a top surface of the liner. The gap and the purge lumen may be fluidly coupled.
    Type: Grant
    Filed: May 8, 2023
    Date of Patent: April 9, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Nitin Pathak, Tuan A. Nguyen, Amit Bansal, Badri N. Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez
  • Patent number: 11926744
    Abstract: An object is to provide a printing ink that has high environmental friendliness and is excellent in quick dry-curability of a coating when a plasma is used as a curing system. A solution is to provide an ink composition for plasma curing including a photocatalyst compound and/or a composite of a metal component and a photocatalyst compound and to provide an additive for an ink composition for plasma curing, the additive including a photocatalyst compound and/or a composite of a metal component and a photocatalyst compound.
    Type: Grant
    Filed: August 20, 2019
    Date of Patent: March 12, 2024
    Assignee: SAKATA INX CORPORATION
    Inventors: Takashi Ishizuka, Yasutsugu Mochizuki
  • Patent number: 11915923
    Abstract: A plasma processing system is provided. The system includes a hydrogen gas supply and a hydrocarbon gas supply and a processing chamber. The system includes a first mass flow controller (MFC) for controlling hydrogen gas flow into the processing chamber and a second MFC for controlling hydrocarbon gas flow into the processing chamber. The system includes a plasma source for generating plasma at the processing chamber. The plasma is for etching SnO2. The system includes a controller for regulating the first MFC and the second MFC such that a ratio of hydrocarbon gas flow to the hydrogen gas flow into the processing chamber is between 1% and 60% so that when SnH4 is produced during said etching SnO2. The SnH4 is configured to react with hydrocarbon gas to produce an organotin compound that is volatilizable in a reaction that is more kinetically favorable than SnH4 decomposition into Sn powder.
    Type: Grant
    Filed: November 5, 2020
    Date of Patent: February 27, 2024
    Assignee: Lam Research Corporation
    Inventors: Akhil Singhal, Dustin Zachary Austin, Jeongseok Ha, Pei-Chi Liu
  • Patent number: 11851741
    Abstract: A hard carbon film that forms a sliding surface of a sliding member, wherein the hard carbon film includes terminal atoms that bond to carbon atoms and has a plurality of protruding shaped parts, part of which protrude from the surface thereof, with the periphery of each of the plurality of protruding shaped parts being terminated by a terminal atom. A manufacturing method for the hard carbon film for producing the hard carbon film on a sliding surface of the sliding member using arc vapor deposition having graphite as the vaporization source, wherein a gas containing the terminal atoms that bond to carbon atoms is introduced, and the plurality of protruding shaped parts is grown on the surface of the hard carbon film while terminating the periphery of the plurality of protruding shaped parts by bonding of the terminal atoms to carbon atoms.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: December 26, 2023
    Assignee: NIPPON ITF, INC.
    Inventors: Takehiko Ooshiro, Yukako Fukutani, Koji Miyake
  • Patent number: 11826710
    Abstract: Porous liquid-filtering membranes having a repeatable distribution of pores of a small dimension are provided, as well as pillar templates that are used to produce such liquid filtering membranes. Also disclosed are methods of making and using the pillar templates to make porous liquid filtering membranes.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: November 28, 2023
    Assignee: GLOBAL LIFE SCIENCES SOLUTIONS USA, LLC
    Inventors: Douglas Albagli, William A Hennessy
  • Patent number: 11795541
    Abstract: A method (100) of cooling a deposition source (200) is described. The method includes stopping (110) depositing material from the deposition source, the deposition source being arranged in a deposition chamber (250), and introducing (120) a cooling gas into the deposition chamber (250), the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity ? of ??0.05 [W/(m*K)].
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: October 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Claire Armstrong, Frank Schnappenberger, Thomas Deppisch
  • Patent number: 11756796
    Abstract: A method may include providing a substrate having, on a first surface of the substrate, a low dielectric constant layer characterized by a layer thickness. The method may include heating the substrate to a substrate temperature in a range of 200° C. to 550° C.; and directing an ion implant treatment to the low dielectric constant layer, while the substrate temperature is in the range of 200° C. to 550° C. As such, the ion implant treatment may include implanting a low weight ion species, at an ion energy generating an implant depth equal to 40% to 175% of the layer thickness.
    Type: Grant
    Filed: May 12, 2021
    Date of Patent: September 12, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Rajesh Prasad, Martin Seamons, Shan Tang, Qi Gao, Deven Raj Mittal, Kyuha Shim
  • Patent number: 11753304
    Abstract: Systems and method for producing graphene on a substrate are described. Certain types of exemplar systems include lateral arrangements of a substrate gas scavenging environment and an annealing environment. Certain other types of exemplar systems include lateral arrangements of a graphene producing environment and a cooling environment, which cools the graphene produced on the substrate. Yet other types of exemplar systems include lateral arrangements of a localized annealing environment, localized graphene producing environment and a localized cooling environment inside the same enclosure. Certain type of exemplar methods for producing graphene on a substrate include scavenging a first portion of the substrate and preferably, contemporaneously annealing a second portion of the substrate.
    Type: Grant
    Filed: December 6, 2022
    Date of Patent: September 12, 2023
    Assignee: General Graphene Corporation
    Inventors: Vig Sherrill, Mira Baraket, Richard Philpott
  • Patent number: 11746421
    Abstract: A method for forming a crystalline metal layer on a three-dimensional (3D) substrate is provided. The method includes applying crystal growth ink to a surface of the 3D substrate, wherein the crystal growth ink includes a metal ionic precursor and a structuring liquid; and exposing the 3D substrate to plasma irradiation from plasma in a vacuum chamber to cause the growing of a crystalline metal layer on the 3D substrate, wherein the exposure is based on a set of predefined exposure parameters.
    Type: Grant
    Filed: July 23, 2019
    Date of Patent: September 5, 2023
    Assignee: ORELTECH LTD.
    Inventors: Natalia Zamoshchik, Konstantin Livanov, Yana Sheynin
  • Patent number: 11673368
    Abstract: A decoration member including: a color developing layer including a light reflective layer and a light absorbing layer provided on the light reflective layer; and a substrate provided on one surface of the color developing layer. The substrate includes a pattern layer, and the light absorbing layer includes silicon (Si).
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: June 13, 2023
    Assignee: LG CHEM, LTD
    Inventors: Yong Chan Kim, Ki Hwan Kim, Nansra Heo, Jeong Woo Shon, Jin Suk Song, Pilsung Jo
  • Patent number: 11651956
    Abstract: A method for removing a native oxide film from a semiconductor substrate includes repetitively depositing layers of germanium on the native oxide and heating the substrate causing the layer of germanium to form germanium oxide, desorbing a portion of the native oxide film. The process is repeated until the oxide film is removed. A subsequent layer of strontium titanate can be deposited on the semiconductor substrate, over either residual germanium or a deposited germanium layer. The germanium can be converted to silicon germanium oxide by exposing the strontium titanate to oxygen.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: May 16, 2023
    Assignee: PSIQUANTUM, CORP.
    Inventors: Yong Liang, Vimal Kumar Kamineni
  • Patent number: 11646179
    Abstract: A plasma processing apparatus includes a chamber providing a space for processing a substrate, a substrate stage configured to support the substrate within the chamber and including a lower electrode, an upper electrode facing the lower electrode, a focus ring in or on an upper peripheral region of the substrate stage to surround the substrate, and a plasma adjustment assembly in at least one of a first position between the upper electrode and the lower electrode and a second position between the focus ring and the lower electrode, the plasma adjustment assembly including a photoreactive material layer and a plurality of light sources configured to irradiate light onto a local region of the photoreactive material layer. A capacitance of the local region is changed as the light is irradiated to the local region.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: May 9, 2023
    Inventors: Jang-Yeob Lee, Sungyeol Kim, Jinyeong Yun, Minsung Kim, HoSun Yoo
  • Patent number: 11643725
    Abstract: Exemplary semiconductor processing chambers may include a substrate support including a top surface. A peripheral edge region of the top surface may be recessed relative to a medial region of the top surface. The chambers may include a pumping liner disposed about an exterior surface of the substrate support. The chambers may include a liner disposed between the substrate support and the pumping liner. The liner may be spaced apart from the exterior surface to define a purge lumen between the liner and the substrate support. The chambers may include an edge ring seated on the peripheral edge region. The edge ring may extend beyond a peripheral edge of the substrate support and above a portion of the liner. A gap may be formed between a bottom surface of the edge ring and a top surface of the liner. The gap and the purge lumen may be fluidly coupled.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: May 9, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Nitin Pathak, Tuan A. Nguyen, Amit Bansal, Badri N. Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez
  • Patent number: 11584646
    Abstract: The present disclosure provides nanostructure compositions and methods of producing nanostructure compositions. The nanostructure compositions comprise at least one population of nanostructures, at least one reactive diluent, at least one anaerobic stabilizer, and optionally at least one organic resin. The present disclosure also provides nanostructure films comprising a nanostructure layer and methods of making nanostructure films.
    Type: Grant
    Filed: January 12, 2021
    Date of Patent: February 21, 2023
    Assignee: Nanosys, Inc.
    Inventors: Austin Smith, David Olmeijer, Jared Lynch, Minghu Tu, Charles Hotz
  • Patent number: 11548208
    Abstract: According to one embodiment, a template includes a base body, and a first film. The base body has a first surface and a second surface. The first surface includes silicon oxide and spreads along a first plane. The second surface crosses the first plane. The first film includes aluminum oxide. A direction from the second surface toward the first film is aligned with a direction perpendicular to the second surface. A thickness of the first film along the direction perpendicular to the second surface is not less than 0.3 nm and not more than 10 ?m. The first surface includes an unevenness.
    Type: Grant
    Filed: October 5, 2021
    Date of Patent: January 10, 2023
    Assignee: KIOXIA Corporation
    Inventors: Koji Asakawa, Shinobu Sugimura
  • Patent number: 11551926
    Abstract: A method of forming a microelectronic device comprises treating a base structure with a first precursor to adsorb the first precursor to a surface of the base structure and form a first material. The first precursor comprises a hydrazine-based compound including Si—N—Si bonds. The first material is treated with a second precursor to covert the first material into a second material. The second precursor comprises a Si-centered radical. The second material is treaded with a third precursor to covert the second material into a third material comprising Si and N. The third precursor comprises an N-centered radical. An ALD system and a method of forming a seal material through ALD are also described.
    Type: Grant
    Filed: January 22, 2021
    Date of Patent: January 10, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Farrell M. Good, Robert K. Grubbs
  • Patent number: 11530129
    Abstract: Disclosed is a method of fabricating a MEMS membrane structure. The method comprises: forming a silicon oxide film dam structure on a silicon substrate; depositing an adhesive layer and then forming a sacrificial layer; depositing a surface protective film on the sacrificial layer; etching the surface protective film and the sacrificial layer, thus forming trenches of first to third rows on the silicon oxide film dam structure; depositing a support film inside of the trenches of first to third rows and on the surface protective film of the sacrificial layer, thus forming a membrane; and removing the sacrificial layer disposed inside the support film deposited inside of the trench of first row, thus forming an empty space.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: December 20, 2022
    Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Boung Ju Lee, Boo Taek Lim
  • Patent number: 11515150
    Abstract: Exemplary processing methods may include forming a plasma of a deposition precursor in a processing region of a semiconductor processing chamber. The methods may include adjusting a variable capacitor within 20% of a resonance peak. The variable capacitor may be coupled with an electrode incorporated within a substrate support on which a substrate is seated. The methods may include depositing a material on the substrate.
    Type: Grant
    Filed: October 22, 2020
    Date of Patent: November 29, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Michael Wenyoung Tsiang, Abdul Aziz Khaja, Li-Qun Xia, Kevin Hsiao, Liangfa Hu, Yayun Cheng