Abstract: A method for crystallizing a lithium transition metal oxide thin film for an electrode of a thin film-type lithium secondary battery is provided, in which the lithium transition metal oxide thin film is reacted with oxygen or argon plasma induced by a microwave or a radio frequency wave, thereby obtaining an excellent lithium transition metal oxide thin film in a degree of crystallization and electrochemical characteristics.

Abstract: This invention relates to a magnetic recording medium having a structure in which an undercoating film, a magnetic thin film, a protective film, and an organic film are stacked on a substrate in the order named. Since the protective film contains carbon and silicon and a portion of silicon in at least an interface in contact with the organic film consists of a silicon oxide, the surface of the magnetic recording medium is not degraded even by frequent contact with a magnetic head upon driving or stopping of the magnetic recording medium. This invention also relates to a method of manufacturing the same.

Abstract: The present invention concerns a process for modifying oxidizable surfaces, including diamond surfaces, including methods for metallizing these surfaces, where these methods include oxidation of these surfaces. The present invention also relates to the products of these methods. In this process, a surface is first plasma oxidized, usually under an RF O2 plasma. Chemical functional groups are then attached to the surface. If the surface is to be metallized, the chemical functional groups are selected to be catalyzable, the surface is then catalyzed for electroless metallization, and the surface is finally treated with an electroless plating solution to metallize the surface. If modified surface is to be patterned, the modified surface is exposed through a mask to pattern the surface after the attachment of the chemical functional groups.

Abstract: Coatings, devices and methods are provided, wherein the contacting surface of a medical device with at least one contacting surface for contacting a bodily fluid or tissue is modified by plasma treatment in a plasma comprising nitrogen-containing molecules and oxygen-containing molecules. The nitrogen-containing molecules include NH3, (NH4)+, N2O, NO, NO2 and N2O4, and the oxygen-containing molecules include O2 and O3. The plasma-modified contacting surface exhibits decreased adhesion of at least some mammalian cells, such as platelets and leukocytes, decreased restenosis when used with stents, and increased apoptosis. Additional layers may be applied, including plasma polymerized hydrocyclosiloxane monomers, amine-providing groups such as N-trimethylsilyl-allylamine, polyoxyalkylene tethers, and bioactive compounds.

Abstract: A heat-processing apparatus for deposition and reformation for forming a tantalum oxide film on a semiconductor substrate includes an airtight process chamber for accommodating the wafer and a worktable for supporting the wafer thereon. A heater for heating the wafer is disposed in the worktable. The process chamber is connected to an exhaust section for exhausting the process chamber. The process chamber is also connected to a section for supplying pentoethoxytantalum as a precursor of the tantalum oxide, a line for supplying an oxidizing gas, and a section for supplying a reforming gas for the tantalum oxide. The reforming gas consists of an excited oxygen gas containing no ions or electrons.

Abstract: An apparatus and a process for the production of an organic EL device, which permits a high freedom of apparatus designing, permits effective processing and gives an organic EL device having a high light emission efficiency and excellent device characteristics, the apparatus comprising means of cleaning a surface of a substrate on which at least a hole-injecting electrode is formed, and means of forming an organic layer on the cleaned surface of the substrate, the cleaning means being for performing the cleaning with ozone gas generated with the ozonizer.

Abstract: Injection stretch blowmolded polyester tubes have been developed for use in packaging water-containing products. Polyester resins have good barrier properties for organic materials but poor moisture barrier properties. It has been found that the moisture barrier properties can be increased by coating the exterior surface of the tube with a first material which adheres to the tube polyester surface and to an overlayer of a moisture barrier comprising polyvinylidene chloride, However, since the overlayer of polyvinylidene chloride can develop a yellow tint, the overlayer in one embodiment is coated with an opaque decorative layer to prevent or mask the gradual yellowing of the polyvinylidene chloride overlayer. In another embodiment where the tube is to be substantially transparent, the product in the tube will have a color that will substantially cancel the yellow tint that is developed by the polyvinylidene chloride overlayer.

Abstract: The present invention provides medical devices such as medication infusion pumps having internal surfaces that are treated to inhibit protein denaturation. In accordance with the invention, hydrophilic internal surfaces and related coating methods are provided to reduce or eliminate accumulation of medication deposits which can otherwise occur when handling complex protein-based medications. Preferred hydrophilic pump surfaces include hydrophilic surfactants (PEO) or (PEG) coatings which exhibit very low protein adsorption characteristics. Several methods are disclosed for producing such treated surfaces including the covalent attachment of hydrophilic surfactants.

Abstract: A process for the surface treatment of a running substrate by an electrical discharge created between two roller electrodes, comprising a first roller electrode and a second roller electrode, in a gas mixture comprising the steps of passing the substrate in between the two roller electrodes by applying it against the first roller electrode; injecting the gas mixture between the rollers to apply a first surface treatment to the substrate; passing the substrate in between the two roller electrodes by applying it against a second roller electrode; and injecting the gas mixture between the rollers to apply a second surface treatment to the substrate.

Abstract: A method for making a multi-layered integrated circuit structure, includes depositing a methyl compound spin on glass layer over a substrate. The spin on glass layer is treated by plasma-deposition to form a SiO2 skin on the methyl compound spin on glass layer and then treated again by plasma-deposition to form a cap layer which adheres to the SiO2 skin.

Abstract: A process for modifying the surfaces of a polymer, ceramic, ITO or glass by irradiating energized ion particles onto the surfaces of the polymer, ceramic, ITO or glass, while blowing a reactive gas directly over the surface of the polymer, ceramic, ITO or glass under a vacuum condition, to decrease the wetting angle of the surface. The process can be widely used in the fields of polymers because it provides effects of increasing the spreading of aqueous dyestuffs, increasing adhesive strength with other materials and inhibition of light scattering by decreasing the wetting angle of the material surface.

Abstract: Method for creating an electric discharge in an initial gas which is at atmospheric pressure and lies between two exciting electrodes, comprising applying a supply voltage to the two electrodes which is an AC voltage whose amplitude and frequency are adapted in order to maintain (1) at least a portion of the components of the gas in the excited state, and/or (2) the presence of electrons, between two successive half-cycles of the supply voltage.

Abstract: A method for attaching adherent metal components, particularly a copper film, on at least one surface of a polyimide substrate is provided. The method comprises the steps of: exposing at least one surface of the polyimide substrate to a reactive gas plasma that provides a level of ion bombardment of the polyimide surface sufficient to disrupt at least a portion of the imide groups on the surface and to form reactive carboxylate groups, carbonyl groups and other carbon-oxygen functional groups on the surface; and then depositing a metal film onto the chemically-modified surface without intervening exposure to air. The present invention also provides a copper-coated polyimide product comprising a polyimide substrate having a substantially smooth and chemically-modified surface and a copper film directly attached to the surface, i.e., the product is free of a polymeric adhesive layer or tie coat between the surface of the polyimide substrate and the copper film.

Abstract: A push button switch covering member of a silicone rubber is imparted with excellent resistance against stain deposition and abrasive wearing by providing a protective overcoating layer of a urethane resin-based coating composition capable of being cured by forming urethane linkages between isocyanate groups of a polyisocyanate compound and hydroxy groups of a polyhydroxy compound. The coating procedure with the coating composition on the surface of a silicone rubber-made covering member is preceded by a plasma treatment so as to activate the surface resulting in an increased adhesive bonding strength between the silicone rubber body and the coating layer. The improvement is more remarkable when the plasma-activated surface is subjected to a priming treatment with a silane coupling agent and coating with the coating composition is undertaken as soon as possible or within 60 minutes after completion of the plasma treatment.

Abstract: A magnetic recording medium is prepared by forming on a plastic substrate, a nickel oxide underlayer having a plane (200) which is predominantly oriented in parallel with the surface of the plastic substrate, then forming on the nickel oxide underlayer at a substrate temperature of less 240° C., a cobalt-containing magnetite thin film having a plane (400) which is predominantly oriented in parallel with the surface of the plastic substrate, and finally oxidizing the cobalt-containing magnetite thin film in a plasma-activated oxygen atmosphere containing a rare gas at a substrate temperature of less than 240° C. while incorporating the rare gas into oxygen. This results in a cobalt-containing maghemite thin film as a perpendicular magnetic film having a spacing of a plane (400) of not more than 2.082 Å. The magnetic recording medium so produced is useful for high-density recording using a plastic substrate.

Abstract: A low resistance magnetic tunnel junction with low resistance barrier layer and method of fabrication is disclosed. A first magnetic layer of material with a surface is provided and a continuous layer of material, e.g. aluminum, is formed on the surface of the first magnetic layer. The continuous layer of material is treated to produce a low resistance barrier layer of oxynitride material and a second magnetic layer is formed on the barrier layer of oxynitride material to complete the low resistance magnetic tunnel junction.

Abstract: A homogeneous marker is formed, possibly by the adsorption of trace amounts of an ambient material such as carbon monoxide gas, at a surface of a deposited material when the plasma in momentarily interrupted during plasma enhanced chemical vapor deposition or other deposition processes involving the presence of a plasma. When the deposited material is etched, the resulting crystal dislocations or adsorbed gas is detected as a marker by optical emission spectroscopy techniques. The accuracy of an end point determination of the etching process can be increased by providing a sequence of such markers within the bulk or volume of the deposited material. The markers, being merely an interface such as a slight crystal dislocation in otherwise homogeneous material, do not affect the electrical, chemical or optical properties of the remainder of the predetermined deposited material and thus the homogeneity of the deposited material is not significantly affected.

Abstract: The invention relates to a method for corrosion-resistant coating of metal substrates by means of plasma polymerization, wherein the substrate is subjected to mechanical, chemical and/or electrochemical smoothing in a pre-treatment step and is subsequently exposed to a plasma at a temperature of less than 200° C. and at a pressure of 10−5 bis 100 mbars, whereby in a first step the surface is activated in a reducing plasma and in a second step the polymer is separated from a plasma containing at least one hydrocarbon or silico-organic compound which can be vaporized in plasma conditions, optionally contains oxygen, nitrogen or sulphur and can contain fluorine.

Abstract: A method is disclosed which forms a thin film by setting a substrate in place in a vacuum vessel provided with a gas inlet and introducing reaction gases through the gas inlet into the vacuum vessel and meanwhile applying a high-frequency electric power to the reaction gases thereby inducing generation of plasma and deposition of the thin film of the reaction product of the reaction gases on the substrate, which method is characterized in that prior to the introduction of the reaction gas, a discharge gas formed of a component gas of the reaction gases which by itself assumes the state of plasma and possesses substantially no ability to form the thin film or a plurality of reaction gases which in itself possesses substantially no ability to form the thin film is introduced into the vacuum vessel and the high-frequency electric power is meanwhile applied to the discharging gas thereby inducing the generation of plasma and effecting a pretreatment, and thereafter the reaction gases are introduced into the vacuu

Abstract: According to the present invention there is now provided a body of cemented carbide or cermets coated with at least one diamond layer. The diamond layer is smooth on all sides of the body with an Ra<1 &mgr;m. According to the present invention there is also provided a method for reactive ion etching of a diamond layer on a complex shape body where the etching is efficient at all sides of the body exposed to the plasma. The etching is made using a C— or oxygen-containing plasma with the possibility of etching of a diamond layer covered by an outer layer of preferably a Si containing material.

Abstract: The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.

Abstract: The present invention provides an optically clear, hydrophilic coating upon the surface of a silicone medical device by sequentially subjecting the surface of the lens to plasma polymerization reaction in a hydrocarbon atmosphere to form a carbon layer, and then graft polymerizinga mixture of monomers comprising hydrophilic monomers onto the carbon layer. The invention is especially useful for forming a biocompatible coating on silicone hydrogel contact lenses.

Abstract: A reactor for corona destruction of volatile organic compounds (VOCs), a multi-surface catalyst for the reactor and a method of making the catalyst for the reactor. The reactor has a catalyst of a high dielectric material with an enhanced surface area. A catalyst layer stack is formed by depositing a high dielectric layer on a substrate and, then depositing a conductive layer on the dielectric layer. The catalyst layer stack is bombarded by low RF energy ions to form an enhanced surface area and to form a protective layer over the conductive layer. Catalyst layer stacks may be joined back to form double-sided catalyst layer stacks. The catalyst layer stack may be diced into small pieces that are used in the reactor or the whole catalyst layer stack may be used.

Abstract: A method and apparatus for producing a polyethylene coated paperboard material with a mirror-pocket finish and a predetermined Dyne level is disclosed herein. The apparatus and method utilizes a double corona treatment on a single polyethylene surface to create the material with the predetermined Dyne level. Such paperboard material is often used for fabrication of cups, and the like. The predetermined Dyne level is required for printing requirements. The method and apparatus allow for the production of the predetermined Dyne level material at standard laminator operating speeds.

Abstract: A new method for making patterned magnetic storage media with magnetic and substantially non-magnetic zones utilizes a selective oxidation processes. Selective oxidation is achieved by subjecting a magnetic layer to an oxygen plasma through voids in a patterned mask. A high resolution patterned mask is made by embossing and reactive ion etch processes. The method is used to fabricate patterned magnetic disks media with alternating magnetic and non-magnetic zones ranging from 10 to 1000 Nanometers in width. Magnetic storage disks produced by this method have high-bit densities, minimal topography and reduced signal noise.

Abstract: The present invention is a plastic container coated with a multi-layer barrier coating. The multi-layer barrier coating is useful for providing an effective barrier against gas permeability in containers and for extending shelf-life of containers, especially plastic evacuated blood collection devices.

Abstract: A process for modifying a metal surface by irradiating energized ion particles onto a metal surface while blowing a reactive gas directly on the metal surface under a vacuum condition. The process can achieve the effect of decreasing the wetting angle of the polymer or metal surface and enhancing the strength and the surface energy of the metal.

Abstract: A method for treating the surface of substantially each deagglomerated particle of an array of easily agglomerated particles by contacting deagglomerated particles with a plasma-activated gas species and modifying the surfaces of the deagglomerated particles to aid subsequent incorporation of the particles into a matrix composition; the module for deagglomerating and dispersing the particles into the plasma-activated gas; the apparatus that comprises the deagglomeration module (322) and a reaction chamber (20) in which the particles are treated with the plasma-activated gas; the method for deagglomerating particles that may reagglomerate after plasma treatment; and a color composition containing plasma-treated pigment particles.

Abstract: A composite silicon dioxide layer with a reduced dielectric constant is formed by enhancing the surface sensitivity of a PECVD liner layer with activated oxygen. Pores form in an SACVD layer of silicon dioxide deposited from a TEOS precursor over the sensitized PECVD layer. The pores reduce the dielectric constant of the composite layer. Activated oxygen is provided to the PECVD layer in the form of ozone or an oxygen-based plasma.

Abstract: A method for providing a substantially-smooth protective coating on a metal-based substrate is disclosed. A thermal barrier coating is first applied over the substrate by plasma-spraying. The coating is then plasma-heated according to a time- and temperature schedule sufficient to re-melt its surface region, allowing the coating material to flow and smoothen. The surface region is then allowed to cool to a temperature below its melting point. After being cooled, the surface is much smoother than when originally applied, which allows the coating to be used in a higher-temperature environment. The coating is often zirconia-based, e.g., yttria-stabilized zirconia.

Abstract: The present invention provides a surface modification method that provides beneficial changes in surface properties, can modify a surface to a greater depth than previous methods, and that is suitable for industrial application. The present method comprises applying a thin-film coating to a surface of a substrate, then subjecting the coated surface to an ion beam. The ion beam power pulse heats the coated surface, leading to alloying between the material in the coating and the material of the substrate. Rapid cooling of the alloyed layer after an ion beam pulse can lead to formation of metastable alloys and microstructures not accessible by conventional alloying methods or intense ion beam treatment of the substrate alone.

Abstract: A method and apparatus for neutralizing a wafer in a plasma reactor following a deposition process which charges the wafer and hinders removal of the wafer from the plasma reactor. The wafer is exposed to a plasma of a noble gas such as helium to energize the reaction zone. Then a sufficient amount of an inert electronegative gas such as oxygen to neutralize the wafer is introduced into the plasma reactor in the absence of RF power or other gases. The neutralized wafer is readily removed from the plasma chamber.

Abstract: The invention provides a method of manufacturing a large-area electronic device, for example a flat panel display, comprising thin-film circuit elements, and also laser apparatus for crystallizing a portion of a semiconductor thin-film (1) with a beam (11) of set energy. The energy of the beam (11) is set in accordance with the output from a light detector (22) to regulate the crystallization of a device portion (3,4 and/or 5) of a semiconductor thin film (1) at which the beam (11) is subsequently directed with its set energy. The light detector (22) monitors the surface quality of a previously crystallized portion (2). In accordance with the present invention, the light detector (22) is located at a position outside the specular reflection path (25) of the light returned by the surface area of the crystallized portion (2) and detects a threshold increase (D) in intensity (I.sub.s) of the light (26) being scattered by the surface area of the crystallized portion.

Abstract: The invention concerns a method of treating surfaces and surface-adjacent layers of dental components in particular. A series of several different plasma treatments produces high adhesion between the plasma-treated surface and a layer of plastic applied thereto. The invention also concerns a method of sealing the surface of work by treating it with plasma and covering it with a layer that contains silicate.

Abstract: In a chemical vapor deposition process a surface layer is formed on an antireflective layer to prevent amines in the antireflective layer from neutralizing acid components formed during the exposure of an overlying photoresist layer. The surface layer is formed by introducing an oxygen-containing gas such as N.sub.2 O into the CVD chamber in the presence of radio frequency power, after the antireflective layer has been formed.

Abstract: An ophthalmic lens consisting of a substrate made of organic glass, of an abrasion-resistant coating, of a layer of impact-resistant primer and of an inorganic antireflective coating, wherein the surface of the said substrate is covered with the abrasion-resistant coating and in that the impact-resistant primer layer is inserted between the said abrasion-resistant layer and the anti-reflective coating, wherein the abrasion-resistant coating comprises a hydrolyzate or a mixture of hydrolyzates of a silane compound of formula: ##STR1## in which: R.sup.1 denotes an organic group containing an epoxy group;R.sup.2 is a hydrocarbon radical which has 1 or 2 carbon atoms; andR.sup.3 is a hydrocarbon group which has from 1 to 4 carbon atoms, and a is 0 or 1 in value.

Abstract: Surface preoxidation of the substrate is carried out by bringing the substrate into contact with an oxidizing gas excited by a cold plasma, the substrate being situated in the flowing afterglow of the cold plasma used to excite the oxidizing element and being heated to an oxidation temperature of less than 500.degree. C. A metal oxide is formed at the surface of the preoxidized substrate by heterogeneous oxidation of a metal halide with a gas mixture including an oxidizing element activated by a cold plasma. The oxidizing gas mixture is brought into contact with the halide as directly as possible in the vicinity of the substrate arranged in the far flowing afterglow of the cold plasma. The cold plasma is preferably generated by microwaves. The process can be used in particular for producing a protective coating on a cladding tube of a nuclear fuel rod.

Abstract: A method of microwave heating of a substrate in a plasma processing chamber wherein a heatup gas is supplied into the processing chamber, the heatup process gas is energized with microwave power to heat an exposed surface of the substrate, a reactant gas is supplied into the processing chamber and the reactant gas is energized into a plasma gas state to process the substrate.

Abstract: A process for the preparation of slippery, hydrophilic polyurethane hydrogel coating compositions, and materials composed of a polymeric plastic or rubber substrate or a metal substrate with a coating of a slippery, hydrophilic polyurethane hydrogel thereon, such that the coating composition tenaciously adheres to the substrate, are disclosed. The coating compositions and coated materials are non-toxic and biocompatible, and are ideally suited for use on medical devices, particularly, catheters, catheter balloons and stents. The coating compositions, coated materials and coated devices demonstrate low coefficients of friction in contact with body fluids, especially blood, as well as a high degree of wear permanence over prolonged use of the device. The hydrogel coating compositions are capable of being dried to facilitate storage of the devices to which they have been applied, and can be instantly reactivated for later use by exposure to water.

Abstract: An apparatus and method for facilitating plasma processing and in particular chemical plasma enhanced vapor deposition, plasma polymerization or plasma treatment of barrier materials onto the interior surface of containers barrier materials are useful for providing an effective barrier against gas and/or water permeability in containers and for extending shelf-life of containers, especially plastic evacuated blood collection devices.

Abstract: Wire arc spraying using repetitively pulsed, high temperature gas jets, usually referred to as plasma jets, and generated by capillary discharges, substantially increases the velocity of atomized and entrained molten droplets. The quality of coatings produced is improved by increasing the velocity with which coating particles impact the coated surface. The effectiveness of wire-arc spraying is improved by replacing the usual atomizing air stream with a rapidly pulsed high velocity plasma jet. Pulsed power provides higher coating particle velocities leading to improved coatings. 50 micron aluminum droplets with velocities of 1500 m/s are produced. Pulsed plasma jet spraying provides the means to coat the insides of pipes, tubes, and engine block cylinders with very high velocity droplet impact.

Abstract: The present invention is a method of treating foam for improving wettability. The method includes treating foam with reactive species which interact to produce reaction products. The reaction products are then removed from foam. Finally, after removing reaction products the foam is treated with reactive species which interact to produce additional reaction products.

Abstract: A process for CVD coating of a hollow body with a barrier layer, comprising measuring the temperature inside of the body by igniting plasma within said body with at least one ignition pulse and correlating the time between the ignition pulse and a pulse of light given off by plasma ignition, and a device for carrying out such a process.

Abstract: To promote the characteristic of an interface between a gate insulating film and a semiconductor and control the threshold voltage, in forming the insulating film, a surface on which the insulating film is to be formed is previously exposed to activated oxygen and thereafter, the insulating film is formed on the surface, or in steps of manufacturing a thin film transistor, the insulating film is formed with monosilane, dinitrogen monoxide and oxygen as raw materials.

Abstract: Antimicrobial activity is imparted to the surface(s) of an apparatus or article by a method, comprising:copolymerizing tertbutylaminoethyl methacrylate with at least one other aliphatically unsaturated monomer in the presence of said apparatus or article by which adhesion of the copolymer to said surface(s) is achieved. In an embodiment of the invention, adhesion of the polymer coating on the apparatus or article occurs by graft copolymerization.

Abstract: The present invention is a plastic container coated with a multi-layer barrier coating. The multi-layer barrier coating is useful for providing an effective barrier against gas permeability in containers and for extending shelf-life of containers, especially plastic evacuated blood collection devices.

Abstract: The invention relates to a process for the surface treatment of at least one portion of an article comprising at least one plastic material, the process comprising a step of fluorination for out most 12 seconds, following a step of an energetic surface oxidation of this portion.

Abstract: A carrier for surface plasmon resonance is prepared by coating a silver layer on the carrier surface, followed by heating the material for a time sufficient to anneal it.

Abstract: An an improved process for surface modification of solid substrates, such as polymers and carbon-based materials, is disclosed. The preferred process comprises three steps: a first activation step wherein reactive hydrogen groups are formed in a surface layer of a polymeric or carbon-based material; a second silylation step wherein the reactive hydrogen groups are reacted with a silylating agent to form silicon-containing groups; and a third stabilization step wherein an upper portion of the activated, silylated layer is oxidatively converted to a silicon and oxygen enriched surface layer. The process can be performed using materials not having pre-existing reactive hydrogen groups or precursor groups. Modified materials according to the present invention have improved properties, such as erosion resistance and oxygen and water barrier properties, and are potentially useful in numerous industries, such as aerospace and packaging.

Abstract: A coated porous substrate composed of a hydrophobic polymer which is substantially uniformly coated with a hydrophilic polymeric material. The substrate may be a sheet-like material, examples of which are foams, fibers, and fibrous webs. The fibrous webs desirably will be nonwoven webs. The coating on the substrate is durable to an aqueous medium at a temperature in a range of from about 10.degree. C. to about 50.degree. C. and does not significantly suppress the surface tension of an aqueous medium with which the coated substrate may come in contact. The hydrophobic polymer may be a polyolefin, such as polyethylene or polypropylene. The hydrophilic polymeric material with which the polymer fibers are coated may be a polysaccharide or a modified polysaccharide. Also provided is a method of preparing a coated porous substrate which involves providing a porous substrate composed of a hydrophobic polymer. At least a portion of the substrate then is exposed to a field of reactive species.