Substrate Dicing Patents (Class 438/113)
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Publication number: 20150014863Abstract: A package structure includes a bottom package component, a top package component overlying and bonded to the bottom package component, and a dam between the bottom package component and the top package component. The dam has a top surface attached to a bottom surface of the top package component, and a bottom surface spaced apart from a top surface of the bottom package component.Type: ApplicationFiled: July 10, 2013Publication date: January 15, 2015Inventors: Ying-Ching Shih, Szu Wei Lu, Jing-Cheng Lin
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Publication number: 20150014844Abstract: A semiconductor package includes an interposer chip having a frontside, a backside, and a corner area on the backside defined by a first corner edge and a second corner edge of the interposer chip. A die is bonded to the frontside of the interposer chip. At least one dam structure is formed on the corner area of the backside of the interposer chip. The dam structure includes an edge aligned to at least one the first corner edge and the second corner edge of the interposer chip.Type: ApplicationFiled: July 10, 2013Publication date: January 15, 2015Inventors: Chih-Wei Wu, Szu Wei Lu, Jing-Cheng Lin
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Publication number: 20150014831Abstract: A Quad Flat Pack (QFP) type semiconductor device includes four corner tie bars that, instead of being trimmed, are used for power and/or ground connections, and alternatively, to control mold flow during the encapsulation step of the assembly process.Type: ApplicationFiled: July 11, 2013Publication date: January 15, 2015Inventors: Weng Hoong Chan, Ly Hoon Khoo, Boon Yew Low
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Publication number: 20150008583Abstract: A method for fabricating packaged semiconductor devices; attaching a batch-sized metallic grid with openings onto an adhesive tape having an insulating clear core covered by a layer of UV-releasable adhesive, the openings sized larger than a semiconductor chip; attaching a semiconductor chip onto the tape of each window, the chip terminals facing the adhesive surface; laminating insulating material of low coefficient of thermal expansion to fill gaps between each chip and respective grid; turning over assembly to place a carrier under backside of chips and lamination and to remove the tape; plasma-cleaning the assembly front side and sputtering uniform at least one metal layer across the assembly; optionally plating metal layers; and patterning the metal layers to form rerouting traces and extended contact pads for assembly.Type: ApplicationFiled: July 1, 2014Publication date: January 8, 2015Inventor: Mark A. Gerber
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Patent number: 8927395Abstract: In a wafer processing method, a modified layer is formed inside a wafer along planned dividing lines by irradiating the wafer with a laser beam with such a wavelength as to be transmitted through the wafer from the back surface side of the wafer along the dividing lines. A first modified layer is formed near the back surface of the wafer by irradiating the wafer with the light focal point of the laser beam positioned near the back surface of the wafer. The wafer is then irradiated with the light focal point of the laser beam positioned on the front surface side. Then plural second modified layers are formed in a multi-layering manner with sequential movement of the light focal point toward an area leading to the first modified layer. The wafer is divided into individual devices along the dividing lines by applying an external force to the wafer.Type: GrantFiled: March 12, 2014Date of Patent: January 6, 2015Assignee: Disco CorporationInventor: Masaru Nakamura
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Patent number: 8927335Abstract: Method for bonding of a plurality of chips onto a base wafer which contains chips on the front, the chips being stacked in at least one layer on the back of the base wafer and electrically conductive connections are established between the vertically adjacent chips, with the following steps: a) fixing of the front of the base wafer on a carrier, b) placing at least one layer of chips in defined positions on the back of the base wafer, and c) heat treatment of the chips on the base wafer fixed on the carrier, characterized in that prior to step c) at least partial separation of the chips of the base wafer into separated chip stack sections of the base after takes place.Type: GrantFiled: September 3, 2010Date of Patent: January 6, 2015Assignee: EV Group E. Thallner GmbHInventor: Markus Wimplinger
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Patent number: 8928129Abstract: A semiconductor device includes a substrate, a semiconductor chip, a first molding member and a metal layer. The substrate includes a first ground pad formed therein, the first ground pad having a first exposed surface exposed at a first surface of the substrate. The semiconductor chip is formed on the first surface of the substrate. The first molding member is formed on the first surface of the substrate and covers the semiconductor chip while not covering the first exposed surface. The metal layer covers the first molding member and extends to lateral surfaces of the substrate while contacting the first exposed surface.Type: GrantFiled: July 16, 2012Date of Patent: January 6, 2015Assignee: Samsung Electronics Co., Ltd.Inventor: In-Sang Song
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Patent number: 8927338Abstract: Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.Type: GrantFiled: June 13, 2013Date of Patent: January 6, 2015Assignee: International Business Machines CorporationInventors: Stephen W. Bedell, Wilfried E. Haensch, Bahman Hekmatshoartabari, Ghavam G. Shahidi, Davood Shahrjerdi
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Publication number: 20150004752Abstract: A semiconductor package is disclosed, which includes: a packaging substrate; a semiconductor element disposed on the packaging substrate in a flip-chip manner; a stopping portion formed at edges of the semiconductor element; an insulating layer formed on an active surface of the semiconductor element and the stopping portion; and an encapsulant formed between the packaging substrate and the insulating layer. The insulating layer has a recessed portion formed on the stopping portion and facing the packaging substrate such that during a reliability test, the recessed portion can prevent delamination occurring between the insulating layer and the stopping portion from extending to the active surface of the semiconductor element.Type: ApplicationFiled: November 21, 2013Publication date: January 1, 2015Applicant: Siliconware Precision Industries Co., Ltd.Inventors: Chang-Fu Lin, Chin-Tsai Yao, Ming-Chin Chuang, Keng-Hung Liu, Fu-Tang Huang
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Publication number: 20150004754Abstract: Semiconductor chips are provided. The semiconductor chip includes a semiconductor chip body having an arch-shaped groove in a backside thereof and a non-conductive material pattern filling the arch-shaped groove. Related methods are also provided.Type: ApplicationFiled: September 17, 2014Publication date: January 1, 2015Inventor: Jong Hyun NAM
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Publication number: 20150001739Abstract: A memory device, and a method of making the memory device, are disclosed. The memory device is fabricated by mounting one or more semiconductor die on a substrate, and wire bonding the die to the substrate. The die and wire bonds are encapsuated, and the encapsulated device is singulated. The wire bonds are severed during the singulation step, and thereafter the severed wire bonds are connected to the substrate by external connectors on one or more surfaces of the molding compound.Type: ApplicationFiled: October 22, 2012Publication date: January 1, 2015Inventors: Chin Tien Chiu, Cheeman Yu, Hem Takiar
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Publication number: 20150004753Abstract: There are provided a semiconductor package including an electromagnetic shielding structure having excellent electromagnetic interference (EMI) and electromagnetic susceptibility (EMS) characteristics, while protecting individual elements in an inner portion thereof from impacts, and a manufacturing method thereof. The semiconductor package includes: a substrate having ground electrodes formed on an upper surface thereof; at least one electronic component mounted on the upper surface of the substrate; an insulating molding part including an internal space in which the electronic component is accommodated, and fixed to the substrate such that at least a portion of the ground electrode is externally exposed; and a conductive shield part closely adhered to the molding part to cover an outer surface of the molding part and electrically connected to the externally exposed ground electrodes.Type: ApplicationFiled: September 16, 2014Publication date: January 1, 2015Inventor: Jin O. YOO
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Publication number: 20150004755Abstract: A semiconductor device manufacturing method comprising the steps of providing a matrix substrate having a main surface with plural device areas formed thereon, fixing plural semiconductor chips to the plural device areas respectively, then sealing the plural semiconductor chips all together with resin to form a block sealing member, dividing the block sealing member and the matrix substrate for each of the device areas by dicing, thereafter rubbing a surface of each of the diced sealing member portions with a brush, then storing semiconductor devices formed by the dicing once into pockets respectively of a tray, and conveying the semiconductor devices each individually from the tray. Since the substrate dividing work after block molding is performed by dicing while vacuum-chucking the surface of the block sealing member, the substrate division can be done without imposing any stress on an external terminal mounting surface of the matrix substrate.Type: ApplicationFiled: September 18, 2014Publication date: January 1, 2015Inventors: Tadashi Munakata, Shingo Oosaka, Mitsuru Kinoshita, Yoshihiko Yamaguchi, Noriyuki Takahashi
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Patent number: 8918971Abstract: A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.Type: GrantFiled: July 7, 2011Date of Patent: December 30, 2014Assignee: SII Crystal Technology Inc.Inventor: Junya Fukuda
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Patent number: 8921994Abstract: A method and apparatus are provided for manufacturing a lead frame based thermally enhanced package (9) with exposed heat spreader lid array (96) designed to be optimized for compression mold encapsulation of an integrated circuit die (94) by including a perimeter reservoir regions (97r) in each heat spreader lid (96) for movement of mold compound (98) displaced during the mold compression process.Type: GrantFiled: September 14, 2012Date of Patent: December 30, 2014Assignee: Freescale Semiconductor, Inc.Inventor: Leo M. Higgins, III
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Patent number: 8921162Abstract: A method for manufacturing an electronic component includes mounting a vibrating element on each singulation region of a base substrate, joining the surface of a lid substrate where grooves are arranged to the base substrate via low-melting glass so as to cover a functional element in each singulation region, thereby obtaining a laminate, and performing singulation in each singulation region by breaking the laminate along grooves.Type: GrantFiled: May 17, 2013Date of Patent: December 30, 2014Assignee: Seiko Epson CorporationInventor: Kenji Wada
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Publication number: 20140377909Abstract: Semiconductor packages having through electrodes and methods for fabricating the same are provided. The method may comprise providing a first substrate including a first circuit layer, forming a front mold layer on a front surface of the first substrate, grinding a back surface of the first substrate, forming a first through electrode that penetrates the first substrate to be electrically connected to the first circuit layer, providing a second substrate on the back surface of the first substrate, the second substrate including a second circuit layer that is electrically connected to the first through electrode, forming a back mold layer on the back surface of the first substrate, the back mold layer encapsulating the second substrate, and removing the front mold layer.Type: ApplicationFiled: April 29, 2014Publication date: December 25, 2014Inventors: Hyunsoo CHUNG, Keum-Hee MA, In-Young LEE, Moon Gi CHO, Chajea JO, Taeje CHO
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Publication number: 20140370659Abstract: A singulation apparatus includes a carrier having a plurality of singulation sites and a scribe line between each of the plurality of singulation sites and an adjacent singulation site. The carrier has a top surface configured to receive a semiconductor substrate thereon. Each of the plurality of singulation sites includes a deformable portion and at least one vacuum hole. The at least one vacuum hole and the deformable portion is configured to form a seal around the at least one vacuum holes when a force is applied. The present disclosure further includes a method of manufacturing semiconductor devices, especially for a singulation process.Type: ApplicationFiled: June 13, 2013Publication date: December 18, 2014Inventors: CHUN-CHENG LIN, YU-PENG TSAI, MENG-TSE CHEN, MING-DA CHENG, CHUNG-SHI LIU
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Publication number: 20140367854Abstract: Various examples are provided for interconnection structures for molded IC packages. In one example, among others, an IC package includes a substrate and an interposer. A plurality of conductive elements provide physical and electrical contact between a surface of the substrate and a surface of the interposer. A standoff element disposed between the surfaces of the substrate and interposer provides a minimum spacing between the surfaces of the substrate and interposer. In some implementations, a standoff element is disposed between an IC die disposed on the surface of the substrate and the surface of the interposer. In another example, a method includes coupling conductive elements to a surface of an interposer, attaching a standoff element, coupling the conductive elements to a surface of a substrate, and forming an embedded layer between the interposer and substrate. The standoff element defines a minimum gap between the interposer and the substrate.Type: ApplicationFiled: June 26, 2013Publication date: December 18, 2014Inventors: Sam Ziqun Zhao, Rezaur Rahman Khan
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Publication number: 20140367841Abstract: The present disclosure relates to a semiconductor package structure and semiconductor process. The semiconductor package includes a first substrate, a second substrate, a die, a plurality of interconnection elements and an encapsulation material. Each of the interconnection elements connects the first substrate and the second substrate. The encapsulation material encapsulates the interconnection elements. The encapsulation material defines a plurality of accommodation spaces to accommodate the interconnection elements, and the profile of each accommodation space is defined by the individual interconnection element, whereby the warpage behavior of the first substrate is in compliance with that of the second substrate during reflow.Type: ApplicationFiled: June 12, 2014Publication date: December 18, 2014Inventors: Shih-Ming HUANG, Chun-Hung LIN, Yi-Ting CHEN, Wen-Hsin LIN, Shih-Wei CHAN, Yung-Hsing CHANG
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Patent number: 8912045Abstract: Solder is simultaneously transferred from a mold to a plurality of 3D assembled modules to provide solder bumps on the modules. The mold includes cavities containing injected molten solder or preformed solder balls. A fixture including resilient pressure pads and vacuum lines extending through the pads applies pressure to the modules when they are positioned on the mold. Following reflow and solder transfer to the modules, the fixture is displaced with respect to the mold. The modules, being attached to the fixture by vacuum pressure through the pads, are displaced from the mold with the fixture.Type: GrantFiled: June 12, 2012Date of Patent: December 16, 2014Assignee: International Business Machines CorporationInventors: Bing Dang, Jae-Woong Nah
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Patent number: 8912078Abstract: Approaches for hybrid laser scribe and plasma etch dicing process for a wafer having backside solder bumps are described. For example, a method of dicing a semiconductor wafer having integrated circuits on a front side thereof and corresponding arrays of metal bumps on a backside thereof involves applying a dicing tape to the backside of the semiconductor wafer, the dicing tape covering the arrays of metal bumps. The method also involves, subsequently, forming a mask on the front side of the semiconductor wafer, the mask covering the integrated circuits. The method also involves forming scribe lines on the front side of the semiconductor wafer with a laser scribing process, the scribe lines formed in the mask and between the integrated circuits. The method also involves plasma etching the semiconductor wafer through the scribe lines to singulate the integrated circuits, the mask protecting the integrated circuits during the plasma etching.Type: GrantFiled: April 16, 2014Date of Patent: December 16, 2014Assignee: Applied Materials, Inc.Inventors: Wei-Sheng Lei, James S. Papanu, Aparna Iyer, Brad Eaton, Ajay Kumar
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Patent number: 8912025Abstract: A method of fabricating LED devices includes using a laser to form trenches between the LEDs and then using a chemical solution to remove slag creating by the laser.Type: GrantFiled: November 23, 2011Date of Patent: December 16, 2014Assignee: Soraa, Inc.Inventors: Andrew J. Felker, Rafael L. Aldaz, Max Batres
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Patent number: 8912047Abstract: A method produces a metal layer on a semiconductor substrate. A metal layer is produced on the semiconductor substrate by depositing metal particles. The metal particles include cores made of a first metal material and shells surrounding the cores. The shells are made of a second metal material that is resistant to oxidation.Type: GrantFiled: May 18, 2011Date of Patent: December 16, 2014Assignee: Infineon Technologies AGInventors: Khalil Hosseini, Hans-Joachim Schulze
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Patent number: 8912042Abstract: In a manufacturing method for layered chip packages, a layered substructure with at least one additional package joined thereto is used to produce a plurality of layered chip packages. The layered substructure includes a plurality of main bodies to be separated from each other later. Each main body includes: a main part having top and bottom surfaces and including a plurality of layer portions stacked on each other; and a plurality of main terminals disposed on at least one of the top and bottom surfaces of the main part. The additional package includes an additional semiconductor chip and at least one additional terminal that is electrically connected to the additional semiconductor chip and in contact with at least one of the plurality of main terminals.Type: GrantFiled: September 17, 2012Date of Patent: December 16, 2014Assignees: Headway Technologies, Inc., SAE Magnetics (H.K.) Ltd.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Atsushi Iijima, Ryuji Fujii
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Patent number: 8912048Abstract: A method of fabricating a semiconductor device includes attaching a semiconductor substrate to a carrier using a carrier fixing layer, where the semiconductor substrate including a plurality of semiconductor chips. The method further includes forming gaps between adjacent ones of the chips. The gaps may be formed using one or more chemicals or light which act to remove portions of the semiconductor substrate to expose the carrier fixing layer. Additional portions of the carrier fixing layer are then removed to allow for removal of the chips from the carrier.Type: GrantFiled: March 14, 2013Date of Patent: December 16, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-Youn Kim, Ji-Hwang Kim, Hae-Jung Yu, Cha-Jea Jo
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Patent number: 8912024Abstract: Front facing piggyback wafer assembly. In accordance with an embodiment of the present invention, a plurality of piggyback substrates are attached to a carrier wafer. The plurality of piggyback substrates are dissimilar in composition to the carrier wafer. The plurality of piggyback substrates are processed, while attached to the carrier wafer, to produce a plurality of integrated circuit devices. The plurality of integrated circuit devices are singulated to form individual integrated circuit devices. The carrier wafer may be processed to form integrated circuit structures prior to the attaching.Type: GrantFiled: November 18, 2011Date of Patent: December 16, 2014Assignee: Invensas CorporationInventors: Ilyas Mohammed, Masud Beroz, Liang Wang
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Patent number: 8906743Abstract: Methods for making semiconductor devices are disclosed herein. A method configured in accordance with a particular embodiment includes forming a spacer material on an encapsulant such that the encapsulant separates the spacer material from an active surface of a semiconductor device and at least one interconnect projecting away from the active surface. The method further includes molding the encapsulant such that at least a portion of the interconnect extends through the encapsulant and into the spacer material. The interconnect can include a contact surface that is substantially co-planar with the active surface of the semiconductor device for providing an electrical connection with the semiconductor device.Type: GrantFiled: January 11, 2013Date of Patent: December 9, 2014Assignee: Micron Technology, Inc.Inventors: Chan Yoo, Todd O. Bolken
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Patent number: 8906803Abstract: Accessing a workpiece object in semiconductor processing is disclosed. The workpiece object includes a mechanical support substrate, a release layer over the mechanical support substrate, and an integrated circuit substrate coupled over the release layer. The integrated circuit substrate includes a device layer having semiconductor devices. The method also includes etching through-substrate via (TSV) openings through the integrated circuit substrate that have buried ends at or within the release layer including using the release layer as an etch stop. TSVs are formed by introducing one or more conductive materials into the TSV openings. A die singulation trench is etched at least substantially through the integrated circuit substrate around a perimeter of an integrated circuit die. The integrated circuit die is at least substantially released from the mechanical support substrate.Type: GrantFiled: October 25, 2013Date of Patent: December 9, 2014Assignee: Sandia CorporationInventors: Murat Okandan, Gregory N. Nielson
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Publication number: 20140357023Abstract: A method of assembling a semiconductor device includes providing a substrate having an array of substrate elements linked by substrate corner elements and separated by slots extending between the corner elements. Semiconductor dies are positioned on the substrate elements. A cap, frame and contact structure is provided that has a corresponding array of caps supported by corner legs linking the caps to frame corner elements, frame elements linking the frame corner elements, and sets of electrical contact elements supported by the frame elements. The cap, frame and contact structure is fitted on the substrate with the caps extending over corresponding dies, the frame corner elements extending over the substrate corner elements, and the sets of electrical contact elements disposed in the slots. The dies are connected electrically with the electrical contact elements and the assembly is encapsulated and singulated. Singulating removes the frame elements.Type: ApplicationFiled: August 14, 2014Publication date: December 4, 2014Applicant: Freescale Semiconductor, Inc.Inventors: Baoguan Yin, Junhua Luo, Deguo Sun
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Publication number: 20140353838Abstract: Embodiments of the present disclosure include a semiconductor device and methods of forming a semiconductor device. An embodiment is a method of forming a semiconductor device, the method including bonding a die to a top surface of a first substrate, the die being electrically coupled to the first substrate, and forming a support structure on the top surface of the first substrate, the support structure being physically separated from the die with a top surface of the support structure being coplanar with a top surface of the die. The method further includes performing a sawing process on the first substrate, the sawing process sawing through the support structure.Type: ApplicationFiled: August 30, 2013Publication date: December 4, 2014Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih Ting Lin, Kung-Chen Yeh, Szu Wei Lu, Jing-Cheng Lin
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Patent number: 8900924Abstract: An embodiment of the invention provides a chip package which includes: a first chip; a second chip disposed on the first chip; a hole extending from a surface of the first chip towards the second chip; a conducting layer disposed on the surface of the first chip and extending into the hole and electrically connected to a conducting region or a doped region in the first chip; and a support bulk disposed between the first chip and the second chip, wherein the support bulk substantially and/or completely covers a bottom of the hole.Type: GrantFiled: February 5, 2014Date of Patent: December 2, 2014Inventors: Shu-Ming Chang, Tsang-Yu Liu, Yen-Shih Ho
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Patent number: 8895440Abstract: A semiconductor device has a TSV wafer and semiconductor die mounted over the TSV wafer. A channel is formed through the TSV wafer. An encapsulant is deposited over the semiconductor die and TSV wafer. Conductive TMV are formed through the encapsulant over the conductive TSV and contact pads of the semiconductor die. The conductive TMV can be formed through the channel. A conductive layer is formed over the encapsulant and electrically connected to the conductive TMV. The conductive TMV are formed during the same manufacturing process. An insulating layer is formed over the encapsulant and conductive layer. A plurality of semiconductor die of the same size or different sizes can be stacked over the TSV wafer. The plurality of semiconductor die can be stacked over opposite sides of the TSV wafer. An internal stacking module can be stacked over the semiconductor die and electrically connected through the conductive TMV.Type: GrantFiled: August 6, 2010Date of Patent: November 25, 2014Assignee: STATS ChipPAC, Ltd.Inventors: DaeSik Choi, Young Jin Woo, TaeWoo Lee
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Patent number: 8895345Abstract: The present invention provides a dicing method that achieves excellent dicing properties at low costs by removing a metal film through a metal processing operation with a diamond tool and then performing pulse laser beam irradiation. The dicing method is a method of dicing a substrate to be processed, devices being formed in the substrate to be processed, a metal film being formed on one surface of the substrate to be processed.Type: GrantFiled: June 13, 2011Date of Patent: November 25, 2014Assignee: Toshiba Kikai Kabushiki KaishaInventor: Takanobu Akiyama
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Patent number: 8895357Abstract: Presented is an integrated circuit packaged at the wafer level wafer (also referred to as a wafer level chip scale package, WLCSP), and a method of manufacturing the same. The WLCSP comprises a die having an electrically conductive redistribution layer, RDL, formed above the upper surface of the die, the RDL defining a signal routing circuit. The method comprises the steps of: depositing the electrically conductive RDL so as to form an electrically conductive ring surrounding the signal routing circuit; and coating the side and lower surfaces of the die with an electrically conductive shielding material.Type: GrantFiled: April 4, 2013Date of Patent: November 25, 2014Assignee: NXP B.V.Inventors: Tonny Kamphuis, Leonardus Antonius Elisabeth van Gemert, Caroline Catharina Maria Beelen-Hendrikx
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Patent number: 8895364Abstract: A structured wafer that includes through passages is used for device processing. Each of the through passages extends from or along one surface of the structured wafer and forms a pattern on a top surface area of the structured wafer. The top surface of the structured wafer is bonded to a device layer via a release layer. Devices are processed on the device layer, and are released from the structured wafer using etchant. The through passages within the structured wafer allow the etchant to access the release layer to thereby remove the release layer.Type: GrantFiled: April 2, 2014Date of Patent: November 25, 2014Assignee: Sandia CorporationInventors: Murat Okandan, Gregory N. Nielson
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Patent number: 8895362Abstract: Methods and apparatus provide for a structure, including: a first glass material layer; and a second material layer bonded to the first glass material layer via bonding material, where the bonding material is formed from one of glass frit material, ceramic frit material, glass ceramic frit material, and metal paste, which has been melted and cured.Type: GrantFiled: February 25, 2013Date of Patent: November 25, 2014Assignee: Corning IncorporatedInventors: James Gregory Couillard, Christopher Paul Daigler, Jiangwei Feng, Yawei Sun, Lili Tian, Ian David Tracy
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Patent number: 8895363Abstract: Consistent with an example embodiment, there is a method for assembling a wafer level chip scale processed (WLCSP) device from a wafer substrate, the method comprises grinding the back-side of the wafer substrate to a prescribed thickness. A plurality of trenches is sawed along a plurality of device die boundaries on a back-side surface of the wafer, the trenches having a bevel profile. The plurality of trenches is etched until the bevel profile of the plurality of trenches is rounded.Type: GrantFiled: March 15, 2013Date of Patent: November 25, 2014Assignee: NXP B.V.Inventors: Hartmut Buenning, Sascha Moeller, Guido Albermann, Thomas Rohleder, Michael Zernack
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Publication number: 20140339696Abstract: A package includes a device die having a substrate. A molding compound contacts a sidewall of the substrate. A metal pad is over the substrate. A passivation layer has a portion covering an edge portion of the metal pad. A metal pillar is over and contacting the metal pad. A dielectric layer is over the passivation layer. A package material formed of a molding compound or a polymer is over the dielectric layer. The dielectric layer includes a bottom portion between the passivation layer and the package material, and a sidewall portion between a sidewall of the metal pillar and a sidewall of the package material. A polymer layer is over the package material, the molding compound, and the metal pillar. A post-passivation interconnect (PPI) extends into the polymer layer. A solder ball is over the PPI, and is electrically coupled to the metal pad through the PPI.Type: ApplicationFiled: July 31, 2014Publication date: November 20, 2014Inventors: Chen-Hua Yu, Jing-Cheng Lin, Nai-Wei Liu, Jui-Pin Hung, Shin-Puu Jeng
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Publication number: 20140342505Abstract: A fabrication method of a semiconductor package is disclosed, which includes the steps of: providing a carrier; disposing at least a semiconductor element on the carrier; forming an encapsulant on the carrier and the semiconductor element for encapsulating the semiconductor element; removing the carrier; disposing a pressure member on the encapsulant; and forming an RDL structure on the semiconductor element and the encapsulant, thereby suppressing internal stresses through the pressure member so as to mitigate warpage on edges of the encapsulant.Type: ApplicationFiled: January 9, 2014Publication date: November 20, 2014Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTDInventors: Yan-Heng Chen, Chun-Tang Lin, Mu-Hsuan Chan, Chieh-Yuan Chi, Yan-Yi Liao
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Publication number: 20140339694Abstract: A method for manufacturing semiconductor devices includes providing a stack having a semiconductor wafer and a glass substrate with openings and at least one trench attached to the semiconductor wafer. The semiconductor wafer includes a plurality of semiconductor devices. The openings of the glass substrate leave respective areas of the semiconductor devices uncovered by the glass substrate and the trench connects the openings. A metal layer is formed at least on exposed walls of the trench and the openings and on the uncovered areas of the semiconductor devices of the semiconductor wafer. A metal region is formed by electroplating metal in the openings and the trench and by subsequently grinding the glass substrate to remove the trenches. The stack of the semiconductor wafer and the attached glass substrate is cut to separate the semiconductor devices.Type: ApplicationFiled: May 15, 2013Publication date: November 20, 2014Inventors: Carsten von Koblinski, Ulrike Fastner, Peter Zorn, Markus Ottowitz
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Publication number: 20140339683Abstract: A plurality of semiconductor die is mounted to a temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. A portion of the encapsulant is designated as a saw street between the die, and a portion of the encapsulant is designated as a substrate edge around a perimeter of the encapsulant. The carrier is removed. A first insulating layer is formed over the die, saw street, and substrate edge. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first conductive layer and first insulating layer. The encapsulant is singulated through the first insulating layer and saw street to separate the semiconductor die. A channel or net pattern can be formed in the first insulating layer on opposing sides of the saw street, or the first insulating layer covers the entire saw street and molding area around the semiconductor die.Type: ApplicationFiled: August 1, 2014Publication date: November 20, 2014Inventors: Yaojian Lin, Kang Chen, Jianmin Fang, Xia Feng, Xusheng Bao
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Patent number: 8889484Abstract: A component package and a method of forming are provided. A first component package may include a first semiconductor device having a pair of interposers attached thereto on opposing sides of the first semiconductor device. Each interposer may include conductive traces formed therein to provide electrical coupling to conductive features formed on the surfaces of the respective interposers. A plurality of through vias may provide for electrically connecting the interposers to one another. A first interposer may provide for electrical connections to a printed circuit board or subsequent semiconductor device. A second interposer may provide for electrical connections to a second semiconductor device and a second component package. The first and second component packages may be combined to form a Package-on-Package (“PoP”) structure.Type: GrantFiled: October 2, 2012Date of Patent: November 18, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Hua Chen, Chen-Shien Chen, Ching-Wen Hsiao, Ming Hung Tseng
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Patent number: 8890292Abstract: A method for manufacturing a semiconductor device includes forming at least one stripe-shaped protection film over a multilayer film in a scribe region of a semiconductor substrate having a plurality of semiconductor element regions formed therein, the protection film having a thickness larger in a center portion thereof than at an end surface thereof and being made of a member which transmits a laser beam, and removing the multilayer film in the scribe region by irradiating the protection film with a laser beam.Type: GrantFiled: September 17, 2013Date of Patent: November 18, 2014Assignee: Fujitsu Semiconductor LimitedInventor: Naoyuki Watanabe
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Patent number: 8889488Abstract: A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a substrate, a semiconductor element, a package body and a conductive part. The substrate has an electrical contact. The semiconductor element is disposed on the substrate. The package body covers the semiconductor element and defines a through hole from which the electrical contact is exposed. Wherein, the package body includes a resin body and a plurality of fiber layers. The fiber layers are disposed in the resin body and define a plurality of fiber apertures which is arranged as an array. The conductive part is electrically connected to the substrate through the through hole.Type: GrantFiled: September 3, 2013Date of Patent: November 18, 2014Assignee: Advanced Semiconductor Engineering, Inc.Inventors: Shin-Hua Chao, Chao-Yuan Liu, Hui-Ying Hsieh, Chih-Ming Chung
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Publication number: 20140332945Abstract: A method of etching a plurality of cavities in a wafer provides a wafer having a patterned hard mask layer. The patterned hard mask has open areas defining locations for first cavities and second cavities. A mask is applied to cover the patterned hard mask layer. The mask is etched to remove wafer material from areas defined by the second cavities. The mask is removed and etching then removes wafer material except as prevented by the hard mask layer. This leaves the first cavities with a first depth and further deepens the second cavities to a depth greater than the first depth. By suitably configuring the second cavities, a capped die can be formed by securing the wafer to a second wafer and removing at least a portion of the unsecured side of the first wafer to expose the second cavities, thereby forming a plurality of caps on the second wafer.Type: ApplicationFiled: July 23, 2014Publication date: November 13, 2014Inventors: Li Chen, Mitul Dalal
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Publication number: 20140335658Abstract: A semiconductor device and method of making a semiconductor device is described. An embedded die panel comprising a plurality of semiconductor die separated by saw streets is provided. A conductive layer is formed by an electroless plating process, the conductive layer comprising bussing lines disposed in the saw streets and a redistribution layer (RDL) coupled to the semiconductor die and bussing lines. An insulating layer is formed over the conductive layer and embedded die panel, the insulating layer comprising openings disposed over the conductive layer outside a footprint of the semiconductor die. Interconnect structures are formed in the openings in the insulating layer by using the conductive layer as part of an electroplating process. The embedded die panel is singulated through the saw streets after forming the interconnect structures to remove the bussing lines and to from individual fan-out wafer level packages (FOWLPs).Type: ApplicationFiled: May 9, 2013Publication date: November 13, 2014Inventors: Christopher M. Scanlan, Timothy L. Olson
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Publication number: 20140332943Abstract: A barrel-plating quad flat no-lead (QFN) package structure and a method for manufacturing the same. The method includes: providing a metal substrate for a plurality of QFN components; forming a first photoresist film on a top surface of the substrate; forming a plating pattern in the first photoresist film; forming a first metal layer containing a plurality of inner leads; etching the substrate from the back surface of the substrate to form a plurality of I/O pads; filling sealant in the etched areas; attaching at least one die in a predetermined region on the top surface of the substrate; connecting the die and the inner leads using metal wires; sealing the die, the inner leads, and the metal wires with a molding compound; separating the resulting joint QFN components into individual QFN components; and forming a second metal layer on the back surface of the I/O pads.Type: ApplicationFiled: May 6, 2014Publication date: November 13, 2014Applicant: Jiangsu Changjiang Electronics Technology Co., Ltd.Inventors: Xinchao WANG, Zhizhong LIANG
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Publication number: 20140335659Abstract: A semiconductor device includes a first semiconductor chip including a first surface, a second surface and a first terminal arranged on the first surface, a second semiconductor chip including a first surface, a second surface and a second terminal arranged on the first surface of the second semiconductor chip, a support substrate including a first surface bonded to the second surfaces of the first semiconductor chip and the second semiconductor chip, and an isolation groove formed on the first surface of the support substrate. The isolation includes a pair of side surfaces continuously extending from opposing side surfaces of the first semiconductor chip and the second semiconductor chip, respectively, and the isolation groove is formed into the support substrate to extend from the first surface of the support substrate. The isolation groove has a depth less than a thickness of the support substrate.Type: ApplicationFiled: July 25, 2014Publication date: November 13, 2014Inventor: Toshio NAKASAKI
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Patent number: 8883562Abstract: A stacked microelectronic unit is provided which can include a plurality of vertically stacked microelectronic elements each having a front surface, contacts exposed at the front surface, a rear surface and edges extending between the front and rear surfaces. Traces connected with the contacts may extend along the front surfaces towards edges of the microelectronic elements with the rear surface of at least one of the stacked microelectronic elements being adjacent to a top face of the microelectronic unit. A plurality of conductors may extend along edges of the microelectronic elements from the traces to the top face. The conductors may be conductively connected with unit contacts such that the unit contacts overlie the rear surface of the at least one microelectronic element adjacent to the top face.Type: GrantFiled: June 6, 2013Date of Patent: November 11, 2014Assignee: Tessera, Inc.Inventors: Belgacem Haba, Giles Humpston, David Ovrutsky, Laura Wills Mirkarimi