Substrate Dicing Patents (Class 438/113)
  • Publication number: 20140206146
    Abstract: A semiconductor package having electrical connecting structures includes: a conductive layer having a die pad and traces surrounding the die pad; a chip; bonding wires; an encapsulant with a plurality of cavities having a depth greater than the thickness of the die pad and traces for embedding the die pad and the traces therein, and the cavities exposing the die pad and the traces; a solder mask layer formed in the cavities and having a plurality of openings for exposing the trace ends and a portion of the die pad; and solder balls formed in the openings and electrically connected to the trace ends. Engaging the solder mask layer with the encapsulant enhances adhesion strength of the solder mask layer so as to prolong the moisture permeation path and enhance package reliability.
    Type: Application
    Filed: March 21, 2014
    Publication date: July 24, 2014
    Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.
    Inventors: Pang-Chun Lin, Chun-Yuan Li, Fu-Di Tang, Chien-Ping Huang, Chun-Chi Ke
  • Publication number: 20140203429
    Abstract: A package includes a device die including a first plurality of metal pillars at a top surface of the device die. The package further includes a die stack including a plurality of dies bonded together, and a second plurality of metal pillars at a top surface of the die stack. A polymer region includes first portions encircling the device die and the die stack, wherein a bottom surface of the polymer region is substantially level with a bottom surface of the device die and a bottom surface of the die stack. A top surface of the polymer region is level with top ends of the first plurality of metal pillars and top ends of the second plurality of metal pillars. Redistribution lines are formed over and electrically coupled to the first and the second plurality of metal pillars.
    Type: Application
    Filed: May 17, 2013
    Publication date: July 24, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Der-Chyang Yeh
  • Publication number: 20140206140
    Abstract: A method of forming an integrated circuit structure is provided. In an embodiment, the method includes bonding top dies onto a bottom wafer and then molding a first molding material onto and in between the top dies and the bottom wafer. The bottom wafer, the top dies, and the first molding material are sawed to form molding units. Each of the molding units includes one of the top dies and a bottom die sawed from the bottom wafer. The molding units are bonded onto a package substrate and a second molding material is molding onto the one of the molding units and the package substrate. Thereafter, the package substrate and the second molding material are sawed to form package-molded units.
    Type: Application
    Filed: March 25, 2014
    Publication date: July 24, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tsung-Ding Wang, Bo-I Lee, Chien-Hsun Lee
  • Patent number: 8785299
    Abstract: An embodiment is a device comprising a semiconductor die, an adhesive layer on a first side of the semiconductor die, and a molding compound surrounding the semiconductor die and the adhesive layer, wherein the molding compound is at a same level as the adhesive layer. The device further comprises a first post-passivation interconnect (PPI) electrically coupled to a second side of the semiconductor die, and a first connector electrically coupled to the first PPI, wherein the first connector is over and aligned to the molding compound.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: July 22, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yi-Chao Mao, Chin-Chuan Chang, Jui-Pin Hung, Jing-Cheng Lin
  • Patent number: 8785247
    Abstract: According to an embodiment, a chip package is provided, which includes: a substrate having a first surface and a second surface; a device region formed in the substrate; a passivation layer formed overlying the first surface of the substrate; at least a polymer planarization layer formed overlying the passivation layer; a package substrate disposed overlying the first surface of the substrate; and a spacer layer disposed between the package substrate and the passivation layer, wherein the spacer layer and the package substrate surround a cavity overlying the substrate, wherein the polymer planar layer does not extends to an outer edge of the spacer layer.
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: July 22, 2014
    Inventors: Yu-Lung Huang, Yu-Ting Huang
  • Patent number: 8785246
    Abstract: A semiconductor circuit design includes an outer seal-ring and an inner seal-ring for each sub-section of the design that may potentially be cut into separate die. The use of multiple seal-rings permits a single circuit design and fabrication run to be used to support flexibly packaging different product releases having different numbers of integrated circuit blocks per packaged unit.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: July 22, 2014
    Assignee: PLX Technology, Inc.
    Inventors: Duc Anh Vu, Jayalakshmana Kumar Pragasam, Vijay Meduri, Seyed Attaran, Michael J. Grubisich, Syed Ahmed, Aniket Singh
  • Patent number: 8785249
    Abstract: Aspects and examples include electrical components and methods of forming electrical components. In one example, a method includes selecting a substrate, forming a pattern of a first conductive material on a top surface of the substrate, forming a pattern of a second conductive material on a bottom surface of the substrate, dicing the substrate into one or more die having a first diced surface and a second diced surface, securing the first diced surface of each of the one or more die to a retaining material, encapsulating the one or more die in an encapsulent to form a reconstituted wafer, and forming a pattern of a third conductive material on the second diced surface by metalizing a surface of the reconstituted wafer.
    Type: Grant
    Filed: June 5, 2012
    Date of Patent: July 22, 2014
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventor: Maurice Karpman
  • Patent number: 8785234
    Abstract: A method for manufacturing a plurality of chips comprises the step of providing a wafer comprising a plurality of chip areas separated by one or more dicing lines, wherein the chip areas are arranged on a first main surface, the step of providing a laser absorption layer on a second main surface opposite to the first main surface and the step of providing a backside metal stack on the laser absorption layer. After that a laser light is applied to the laser absorption layer along the dicing lines before the chips are singulated along the dicing lines by using stealth dicing.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: July 22, 2014
    Assignee: Infineon Technologies AG
    Inventors: Gunther Mackh, Adolf Koller
  • Patent number: 8785332
    Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
    Type: Grant
    Filed: February 11, 2013
    Date of Patent: July 22, 2014
    Assignee: Plasma-Therm LLC
    Inventors: Chris Johnson, David Johnson, Linnell Martinez, David Pays-Volard, Rich Gauldin, Russell Westerman, Gordon M. Grivna
  • Publication number: 20140197540
    Abstract: A semiconductor device is manufactured by, first, providing a wafer, designated with a saw street guide, and having a bond pad formed on an active surface of the wafer. The wafer is taped with a dicing tape. The wafer is singulated along the saw street guide into a plurality of dies having a plurality of gaps between each of the plurality of dies. The dicing tape is stretched to expand the plurality of gaps to a predetermined distance. An organic material is deposited into each of the plurality of gaps. A top surface of the organic material is substantially coplanar with a top surface of a first die of the plurality of dies. A redistribution layer is patterned over a portion of the organic material. An under bump metallization (UBM) is deposited over the organic material in electrical communication, through the redistribution layer, with the bond pad.
    Type: Application
    Filed: March 14, 2014
    Publication date: July 17, 2014
    Applicant: STATS ChipPAC, Ltd.
    Inventors: Byung Tai Do, Heap Hoe Kuan
  • Patent number: 8779569
    Abstract: A semiconductor device 100 includes a first insulating material 110 attached to a second main surface 106b of a semiconductor chip 106, and a second insulating material 112 attached to side surfaces of the semiconductor chip 106, the first insulating material 110 and an island 102. The semiconductor chip 106 is fixed to the island 102 via the first insulating material 110 and the second insulating material 112. The first insulating material 110 ensures a high dielectric strength between the semiconductor chip 106 and the island 102. Though the second insulating material 112 having a modulus of elasticity greater than that of the first insulating material 110, the semiconductor chip 106 is firmly attached to the island 102.
    Type: Grant
    Filed: January 17, 2011
    Date of Patent: July 15, 2014
    Assignee: Rohm Co., Ltd.
    Inventors: Akihiro Kimura, Tsunemori Yamaguchi
  • Patent number: 8778780
    Abstract: Techniques for fabricating metal devices, such as vertical light-emitting diode (VLED) devices, power devices, laser diodes, and vertical cavity surface emitting laser devices, are provided. Devices produced accordingly may benefit from greater yields and enhanced performance over conventional metal devices, such as higher brightness of the light-emitting diode and increased thermal conductivity. Moreover, the invention discloses techniques in the fabrication arts that are applicable to GaN-based electronic devices in cases where there is a high heat dissipation rate of the metal devices that have an original non- (or low) thermally conductive and/or non- (or low) electrically conductive carrier substrate that has been removed.
    Type: Grant
    Filed: October 11, 2006
    Date of Patent: July 15, 2014
    Assignee: SemiLEDS Optoelectronics Co., Ltd.
    Inventors: Trung-Tri Doan, Chen-Fu Chu, Hao-Chun Cheng, Feng-Hsu Fan
  • Patent number: 8778806
    Abstract: The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
    Type: Grant
    Filed: April 17, 2012
    Date of Patent: July 15, 2014
    Assignee: Plasma-Therm LLC
    Inventors: Chris Johnson, David Johnson, David Pays-Volard, Linnell Martinez, Russell Westerman, Gordon M. Grivna
  • Publication number: 20140191386
    Abstract: A semiconductor package is provided. The semiconductor package includes a substrate; a semiconductor element having opposite active and inactive surfaces and disposed on the substrate via the active surface thereof, wherein the inactive surface of the semiconductor element is roughened; a thermally conductive layer bonded to the inactive surface of the semiconductor element; and a heat sink disposed on the thermally conductive layer. The roughened inactive surface facilitates the bonding between the semiconductor element and the thermally conductive layer so as to eliminate the need to perform a gold coating process and the use of a flux and consequently reduce the formation of voids in the thermally conductive layer.
    Type: Application
    Filed: May 15, 2013
    Publication date: July 10, 2014
    Applicant: SILICONWARE PRECISION INDUSTRIES CO., LTD.
    Inventors: Mei-Chin Lee, Wang-Ting Chen, Chi-Tung Yeh, Chun-Tang Lin, Yi-Che Lai
  • Patent number: 8772126
    Abstract: A cavity is etched from a front surface into a semiconductor substrate. After providing an etch stop structure at the bottom of the cavity, the cavity is closed. From a back surface opposite to the front surface the semiconductor substrate is grinded at least up to an edge of the etch stop structure oriented to the back surface. Providing the etch stop structure at the bottom of an etched cavity allows for precisely adjusting a thickness of a semiconductor body of a semiconductor device.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: July 8, 2014
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Anton Mauder
  • Patent number: 8772065
    Abstract: A package body (1) with an upper side (2), with an underside (22), opposite from the upper side (2), and with a side surface, which connects the upper side (2) and the underside (22) and is provided as a mounting surface (19), the package body (1) having a plurality of layers (8) which contain a ceramic material, and a main direction of extent of the layers (23, 24, 25) running obliquely in relation to the mounting surface (19). Furthermore, a method for producing a package body (1) is provided.
    Type: Grant
    Filed: September 12, 2012
    Date of Patent: July 8, 2014
    Assignee: OSRAM Opto Semiconductors GmbH
    Inventors: Georg Bogner, Karlheinz Arndt
  • Patent number: 8772088
    Abstract: In a high frequency module, electronic components are mounted on a mounting surface of a collective substrate including a plurality of unit substrates that include a via conductor electrically conducted to a ground potential in a peripheral portion thereof, and the mounting surface and the electronic components are encapsulated with an encapsulation layer. The collective substrate is cut on the encapsulation layer side, thereby forming a half-cut groove penetrating through the encapsulation layer and extending halfway along the collective substrate in a thickness direction such that the via conductor is exposed only at a bottom surface of the half-cut groove. A conductive shield layer is formed to cover the encapsulation layer and is electrically conducted to the exposed via conductor. The collective substrate is then cut into individual unit substrates each including the conductive shield layer electrically conducted to the ground potential through the via conductor.
    Type: Grant
    Filed: February 7, 2012
    Date of Patent: July 8, 2014
    Assignee: Murata Manufacturing Co., Ltd.
    Inventor: Takayuki Horibe
  • Patent number: 8772137
    Abstract: A semiconductor wafer with an assisting dicing structure. The wafer comprises a substrate having a front surface and a rear surface. The front surface of the substrate comprises at least two device regions separated by at least one dicing lane. The rear surface of the substrate comprises at least one pre-dicing trench formed therein and substantially aligned with the dicing lane. A method for dicing a semiconductor wafer is also disclosed.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: July 8, 2014
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsien-Wei Chen, Shih-Hsun Hsu
  • Publication number: 20140183718
    Abstract: A semiconductor device includes a standardized carrier. A semiconductor wafer includes a plurality of semiconductor die and a base semiconductor material. The semiconductor wafer is singulated through a first portion of the base semiconductor material to separate the semiconductor die. The semiconductor die are disposed over the standardized carrier. A size of the standardized carrier is independent from a size of the semiconductor die. An encapsulant is deposited over the standardized carrier and around the semiconductor die. An interconnect structure is formed over the semiconductor die while leaving the encapsulant devoid of the interconnect structure. The semiconductor device is singulated through the encapsulant. Encapsulant remains disposed on a side of the semiconductor die.
    Type: Application
    Filed: September 25, 2013
    Publication date: July 3, 2014
    Applicant: STATS ChipPAC, Ltd.
    Inventors: Byung Joon Han, Il Kwon Shim, Yaojian Lin, Pandi C. Marimuthu
  • Publication number: 20140183761
    Abstract: A semiconductor device includes a semiconductor die and an encapsulant deposited over and around the semiconductor die. A semiconductor wafer includes a plurality of semiconductor die and a base semiconductor material. A groove is formed in the base semiconductor material. The semiconductor wafer is singulated through the groove to separate the semiconductor die. The semiconductor die are disposed over a carrier with a distance of 500 micrometers (?m) or less between semiconductor die. The encapsulant covers a sidewall of the semiconductor die. A fan-in interconnect structure is formed over the semiconductor die while the encapsulant remains devoid of the fan-in interconnect structure. A portion of the encapsulant is removed from a non-active surface of the semiconductor die. The device is singulated through the encapsulant while leaving encapsulant disposed covering a sidewall of the semiconductor die. The encapsulant covering the sidewall includes a thickness of 50 ?m or less.
    Type: Application
    Filed: November 2, 2013
    Publication date: July 3, 2014
    Applicant: STATS ChipPAC, Ltd.
    Inventors: Yaojian Lin, Pandi C. Marimuthu, Il Kwon Shim, Byung Joon Han
  • Patent number: 8765527
    Abstract: A method of assembling Redistributed Chip Package (RCP) semiconductor devices. An active die structure is encapsulated in a molding compound with internal electrical contacts of the active die structure positioned at an active face of an encapsulation layer. A dummy die structure is positioned at a back face of the encapsulation layer. A redistribution layer is formed at an active face of the encapsulation layer. The redistribution layer includes a layer of insulating material and redistribution electrical interconnections. The insulating material is built up with grooves along saw streets. External electrical contacts exposed at a surface of the redistribution layer are connected with the redistribution electrical interconnections. The dummy die structure is removed and then the semiconductor devices are singulated.
    Type: Grant
    Filed: June 13, 2013
    Date of Patent: July 1, 2014
    Assignee: Freescale Semiconductor, Inc.
    Inventor: Dominic Koey
  • Publication number: 20140175637
    Abstract: An integrated circuit assembly includes a first substrate and a second substrate, with active layers formed on the first surfaces of each substrate, and with the second surfaces of each substrate coupled together. A method of fabricating an integrated circuit assembly includes forming active layers on the first surfaces of each of two substrates, and coupling the second surfaces of the substrates together.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: IO SEMICONDUCTOR, INC.
    Inventors: Michael A. Stuber, Stuart B. Molin
  • Publication number: 20140175666
    Abstract: Systems, methods, and devices are provided to enable an integrated circuit device of relatively higher capacity. Such an integrated circuit device may include at least two component integrated circuits that communicate with one another. Specifically, the component integrated circuits may communicate through a “stitched silicon interposer” that is larger than a reticle limit of the lithography system used to manufacture the interposer. To achieve this larger size, the stitched silicon interposer may be composed of at least two component interposers, each sized within the reticle limit and each separated from one another by a die seal structure.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Applicant: ALTERA CORPORATION
    Inventor: ALTERA CORPORATION
  • Publication number: 20140175623
    Abstract: A semiconductor wafer has a plurality of semiconductor die separated by a saw street. The wafer is mounted to dicing tape. The wafer is singulated through the saw street to expose side surfaces of the semiconductor die. An ESD protection layer is formed over the semiconductor die and around the exposed side surfaces of the semiconductor die. The ESD protection layer can be a metal layer, encapsulant film, conductive polymer, conductive ink, or insulating layer covered by a metal layer. The ESD protection layer is singulated between the semiconductor die. The semiconductor die covered by the ESD protection layer are mounted to a temporary carrier. An encapsulant is deposited over the ESD protection layer covering the semiconductor die. The carrier is removed. An interconnect structure is formed over the semiconductor die and encapsulant. The ESD protection layer is electrically connected to the interconnect structure to provide an ESD path.
    Type: Application
    Filed: March 1, 2014
    Publication date: June 26, 2014
    Applicant: STATS ChipPAC, Ltd.
    Inventors: Reza A. Pagaila, Jose A. Caparas, Pandi C. Marimuthu
  • Publication number: 20140175628
    Abstract: A semiconductor device comprises a first top electrode and a second top electrode at a front surface of the die, at least a Ni plating layer and an Au plating layer overlaying the Ni plating layer are formed on each of the first top electrode and the second top electrode. A copper clip attaches on the Au plating layer of the second top electrode. A gold (Au) stud bump is formed on the Au plating layer of the first top electrode with a copper wire connected on the stud bump. The Au stud bump is thicker than a thickness of the Au plating layer and thinner than a thickness of the copper clip to avoid copper wire NSOP (non-stick on pad) problem due to Ni plating layer diffusion during the solder reflow process in the copper clip attachment.
    Type: Application
    Filed: December 21, 2012
    Publication date: June 26, 2014
    Inventors: Hua Pan, Yueh-Se Ho, Jun Lu, Ming-Chen Lu, Zhiqiang Niu
  • Publication number: 20140179063
    Abstract: The invention is directed to firm bonding between semiconductor dies etc bonded to a lead frame and wire-bonding portions of the lead frame by ultrasonic Al wire bonding, and the prevention of shortcircuit between the semiconductor dies etc due to a remaining portion of the outer frame of the lead frame after the outer frame is cut. By extending the wire-bonding portion etc on the lead frame in a wire-bonding direction and connecting the wire-bonding portion etc to the outer frame of the lead frame through a connection lead etc, the ultrasonic vibration force in the ultrasonic Al wire bonding is prevented from dispersing and the Al wire and the wire-bonding portion etc are firmly bonded. The outer frame is cut after a resin sealing process is completed.
    Type: Application
    Filed: February 27, 2014
    Publication date: June 26, 2014
    Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Takeshi Sasaki, Masahiro Shindo, Kazumi Onda
  • Publication number: 20140179062
    Abstract: A device includes a first package component, and a second package component underlying, and bonded to, the first package component. A molding material is disposed under the first package component and molded to the first and the second package components, wherein the molding material and the first package component form an interface. An isolation region includes a first edge, wherein the first edge of the isolation region contacts a first edge of the first package component and a first edge of the molding material. The isolation has a bottom lower than the interface.
    Type: Application
    Filed: February 25, 2014
    Publication date: June 26, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Horng Chang, Tin-Hao Kuo, Tsung-Fu Tsai, Min-Feng Ku
  • Publication number: 20140175633
    Abstract: The present invention relates to a method of making a thermally conductive semiconductor assembly. In accordance with a preferred embodiment, the method includes: providing a chip; providing an interposer that includes a through via, a first contact pad on a first surface and a second contact pad on an opposite second surface; electrically coupling the chip to the first contact pad of the interposer by a conductive bump or a wire; providing a heat sink with a cavity; then attaching the chip and the interposer on the heat sink using an adhesive with the chip inserted into the cavity; and then forming a build-up circuitry on the second surface of the interposer. Accordingly, the heat sink can provide essential thermal dissipation for the embedded chip, and the interposer and build-up circuitry can respectively provide first and second level fan-out routing/interconnection for the embedded chip.
    Type: Application
    Filed: February 26, 2014
    Publication date: June 26, 2014
    Applicant: Bridge Semiconductor Corporation
    Inventors: Charles W.C. LIN, Chia-Chung WANG
  • Patent number: 8759969
    Abstract: In various embodiments, an integrated circuit die is provided. The integrated circuit die may include a circuit on a surface of a semiconductor substrate that has a peripheral sidewall extending substantially perpendicular to and away from the surface. A first protective layer may cover the sidewall of the semiconductor substrate and peripheral edges of the circuit to provide protection from contaminant diffusion. In some embodiments, a semiconductor substrate is provided that has a plurality of dice contained thereon. Each of the dice may have an integrated circuit region and a peripheral sidewall etched into the semiconductor substrate. A first protective layer may be used to cover the peripheral sidewall of the semiconductor substrate to provide protection from contaminant diffusion. Additional apparatuses, systems, and methods are disclosed.
    Type: Grant
    Filed: January 9, 2012
    Date of Patent: June 24, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Federico Pio
  • Patent number: 8759153
    Abstract: A graphene layer is generated on a substrate. A plastic material is deposited on the graphene layer to at least partially cover the graphene layer. The substrate is separated into at least two substrate pieces.
    Type: Grant
    Filed: September 6, 2011
    Date of Patent: June 24, 2014
    Assignee: Infineon Technologies AG
    Inventors: Klaus Elian, Guenther Ruhl, Horst Theuss, Irmgard Escher-Poeppel
  • Patent number: 8759154
    Abstract: A method for assembling die packages includes attaching contacts on a first side of a plurality of first die to substrate pads on a top surface of a composite carrier. The composite carrier includes a package substrate including at least one embedded metal layer having its bottom surface secured to a semiconductor wafer. The composite carrier minimizes effects of the CTE mismatch between the die and the package substrate during assembly reduces warpage of the die. After the attaching, the semiconductor wafer is removed from the package substrate. Electrically conductive connectors are attached to the bottom surface of the package substrate, and the package substrate is sawed to form a plurality of singulated die packages.
    Type: Grant
    Filed: September 25, 2012
    Date of Patent: June 24, 2014
    Assignee: Texas Instruments Incorporated
    Inventor: Margaret Simmons-Matthews
  • Publication number: 20140167252
    Abstract: Techniques are described herein for a dip soldering process which provides a low-profile, low-cost solder bump formation process which may be implemented to promote package thickness scaling (e.g., reduce the overall package thickness). For example, the dip soldering process disclosed herein may enable ultra-thin wafer-level packages (WLP), ultra-thin wafer level quad-flat no-leads (WQFN) packages, or the like.
    Type: Application
    Filed: December 18, 2012
    Publication date: June 19, 2014
    Applicant: MAXIM INTEGRATED PRODUCTS, INC.
    Inventor: Maxim Integrated Products, Inc.
  • Patent number: 8753923
    Abstract: A wafer processing method of dividing a wafer along streets. The wafer processing method includes a protective tape attaching step of attaching a protective tape to the front side of the wafer, a modified layer forming step of holding the wafer through the protective tape on a chuck table of a laser processing apparatus under suction and next applying a laser beam having a transmission wavelength to the wafer from the back side of the wafer along the streets, thereby forming a modified layer inside the wafer along each street, and a wafer dividing step of canceling suction holding of the wafer by the chuck table and next applying an air pressure to the wafer now placed on the holding surface in the condition where horizontal movement of the wafer is limited, thereby dividing the wafer along each street where the modified layer is formed, thus obtaining individual devices.
    Type: Grant
    Filed: March 7, 2013
    Date of Patent: June 17, 2014
    Assignee: Disco Corporation
    Inventors: Satoshi Kobayashi, Jinyan Zhao
  • Patent number: 8754515
    Abstract: Provided is a method of forming a package-on-package. An encapsulation is formed to cover a wafer using a wafer level molding process. The wafer includes a plurality of semiconductor chips and a plurality of through silicon vias (TSVs) passing through the semiconductor chips. The encapsulant may have openings aligned with the TSVs. The encapsulant and the semiconductor chips are divided to form a plurality of semiconductor packages. Another semiconductor package is stacked on one selected from the semiconductor packages. The other semiconductor package is electrically connected to the TSVs.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: June 17, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tae-Hun Kim, Jin-Woo Park, Dae-Young Choi, Mi-Yeon Kim, Sun-Hye Lee
  • Patent number: 8753960
    Abstract: A semiconductor wafer including an electrostatic discharge (ESD) protective device, and methods for fabricating the same. In one aspect, the method includes forming a first semiconductor device in a first semiconductor die region on the semiconductor wafer; forming a second semiconductor device in a second semiconductor die region on the semiconductor wafer; and forming a protective device in a scribe line region between (i) the first semiconductor die region and (ii) the second semiconductor die region.
    Type: Grant
    Filed: February 7, 2013
    Date of Patent: June 17, 2014
    Assignee: Marvell International Ltd.
    Inventors: Chuan-Cheng Cheng, Choy Hing Li, Shuhua Yu
  • Publication number: 20140162408
    Abstract: A method for dividing a thin film device having a first lower electrode layer, a second active layer and a third upper electrode layer, all three layers being continuous over the device, into separate cells which are to be electrically interconnected in series, at least the dividing of the cells being carried out in a single pass of a process head across the device, the process head performing at least the following steps in the single pass: a) making a first cut through the first, second and third layers; b) making a second cut through the second and third layers, the second cut being adjacent to the first cut; c) making a third cut through the third layer, the third cut being adjacent to the second cut and on the opposite side of the second cut to the first cut; wherein at least one of the first and second cuts is formed using two laser beams sequentially during the single pass of the process head across the device, the first laser beam forming a cut through at least one of the layers and the second laser b
    Type: Application
    Filed: July 13, 2012
    Publication date: June 12, 2014
    Applicant: M-SOLV LIMITED
    Inventor: Adam North Brunton
  • Publication number: 20140162407
    Abstract: Methods and systems for semiconductor packaging are disclosed and may include bonding a semiconductor wafer to a support structure, separating the wafer into discrete die, removing the die from the support structure, and attaching at least a subset of the die to a second support structure. Mold material may be placed in voids between the die utilizing a compression molding process, thereby generating a molded wafer, which may be demounted before depositing redistribution lines on the die and the mold material. Conductive balls may be placed on the redistribution lines before separating into molded packages. The molded wafer may be planarized utilizing a post-mold cure on a heated vacuum chuck after removing it from the second support structure. The redistribution lines may be electrically isolated utilizing polymer layers. The conductive balls may be placed on copper redistribution lines with a surface oxide layer at least 20 angstroms thick.
    Type: Application
    Filed: December 10, 2012
    Publication date: June 12, 2014
    Inventors: Curtis Michael Zwenger, Yoon Joo Kim, Brett Dunlap
  • Patent number: 8748291
    Abstract: A method for testing a strip of MEMS devices, the MEMS devices including at least a respective die of semiconductor material coupled to an internal surface of a common substrate and covered by a protection material; the method envisages: detecting electrical values generated by the MEMS devices in response to at least a testing stimulus; and, before the step of detecting, at least partially separating contiguous MEMS devices in the strip. The step of separating includes defining a separation trench between the contiguous MEMS devices, the separation trench extending through the whole thickness of the protection material and through a surface portion of the substrate, starting from the internal surface of the substrate.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: June 10, 2014
    Assignees: STMicroelectronics S.r.l., STMicroelectronics Ltd (Malta)
    Inventors: Mark Anthony Azzopardi, Conrad Cachia, Stefano Pozzi
  • Patent number: 8749031
    Abstract: According to one embodiment, a semiconductor device includes a semiconductor device body and an insulating adhesive layer. The semiconductor device body is formed with a square plate shape and has an element portion provided on a first major surface. The insulating adhesive layer is provided to cover a second major surface of the semiconductor device body and one or two of four side faces of the semiconductor device body.
    Type: Grant
    Filed: March 18, 2011
    Date of Patent: June 10, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Ryoji Matsushima
  • Patent number: 8748297
    Abstract: In one embodiment, a method of forming a semiconductor device includes forming openings in a substrate. The method includes forming a dummy fill material within the openings and thinning the substrate to expose the dummy fill material. The dummy fill material is removed.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: June 10, 2014
    Assignee: Infineon Technologies AG
    Inventors: Gudrun Stranzl, Martin Zgaga, Markus Kahn, Guenter Denifl
  • Patent number: 8746932
    Abstract: In the production of a light emitting device, in which a plurality of light emitting element parts carrying LED elements are formed on a substrate, and the substrate is diced, generation of shaving dusts is suppressed at the time of the dicing, and breakage of the substrate during the production process can be prevented. In the process of forming a slit crossing a region for forming a light emitting element part in a metal substrate, a recess which serves as a resin reservoir can be formed so as to cross the slit. The slit can be filled with an insulating material, the recess can be filled with a resin, and they both can be cured. A light emitting element part can be formed in the region for forming the light emitting element part, the metal substrate can be cut into units comprising one or a plurality of the light emitting element parts, and can be mounted on a printed circuit board on which a pattern is formed.
    Type: Grant
    Filed: November 17, 2010
    Date of Patent: June 10, 2014
    Assignee: Stanley Electric Co., Ltd.
    Inventors: Shunya Ide, Masanori Sato, Takahiko Nozaki, Takaaki Sakai, Hiroshi Kotani
  • Publication number: 20140151890
    Abstract: An embodiment is a device comprising a semiconductor die, an adhesive layer on a first side of the semiconductor die, and a molding compound surrounding the semiconductor die and the adhesive layer, wherein the molding compound is at a same level as the adhesive layer. The device further comprises a first post-passivation interconnect (PPI) electrically coupled to a second side of the semiconductor die, and a first connector electrically coupled to the first PPI, wherein the first connector is over and aligned to the molding compound.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 5, 2014
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yi-Chao Mao, Chin-Chuan Chang, Jui-Pin Hung, Jing-Cheng Lin
  • Publication number: 20140151865
    Abstract: A mechanism is provided by optically inspectable surface mount bonding of no-leads packages is enhanced. Embodiments of the present invention use a lead frame within the no-leads package that provides a plated surface not only along the bottom of the package but also in a direction substantially parallel to the sides of the package. Since the plated surface has a greater affinity for solder during a reflow process than does the bare metal of the lead frame, toe fillets have a greater chance of forming in a manner that can be optically inspected during a test for quality of the bonding of the package to a printed circuit board. In addition, a mold chase that conforms to the shape of the lead frame is used to prevent mold compound from adhering to the portions of the lead frame external to the package that are used as electrical contacts.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 5, 2014
    Inventor: Thomas H. Koschmieder
  • Publication number: 20140154842
    Abstract: A fabrication method of a semiconductor package includes the steps of: providing a carrier having a concave portion and a releasing layer formed on a surface thereof; disposing a chip on the releasing layer in the concave portion; forming an encapsulant on the chip and the releasing layer; removing the releasing layer and the carrier; and forming a circuit structure on the encapsulant and the chip. The design of the concave portion facilitates alignment of the chip to prevent it from displacement, thereby improving the product reliability. A semiconductor package fabricated by the fabrication method is also provided.
    Type: Application
    Filed: February 7, 2014
    Publication date: June 5, 2014
    Applicant: Siliconware Precision Industries Co., Ltd.
    Inventors: Chiang-Cheng Chang, Meng-Tsung Lee, Jung-Pang Huang, Shih-Kuang Chiu
  • Patent number: 8742547
    Abstract: A semiconductor wafer includes: a first semiconductor chip area formed with a semiconductor element; a second semiconductor chip area formed with a semiconductor element; and a scribe area sandwiched between the first and second semiconductor chip areas; wherein: the first semiconductor chip area includes a first metal ring surrounding the semiconductor element formed in the first semiconductor chip area; and the metal ring is constituted of a plurality of metal layers including a lower metal layer and an upper metal layer superposed upon the lower metal layer, and the upper metal layer is superposed upon the lower metal layer in such a manner that an outer side wall of the upper metal layer is flush with the outer side wall of the lower metal layer or is at an inner position of the first semiconductor chip area relative to the outer side wall of the lower metal layer.
    Type: Grant
    Filed: February 15, 2011
    Date of Patent: June 3, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Kazutaka Yoshizawa, Taiji Ema
  • Patent number: 8741665
    Abstract: A method of manufacturing a semiconductor module is provided. The method includes forming semiconductor chips on a bare substrate, performing a burn-in process on the bare substrate including the semiconductor chips, sorting semiconductor chips that exceed a predetermined level of operability determined by testing electrical driving in the semiconductor chips on the burned-in bare substrate, separating the semiconductor chips from one another by cutting the bare substrate, and directly mounting the module semiconductor chips on a module substrate.
    Type: Grant
    Filed: January 16, 2012
    Date of Patent: June 3, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sangyoung Kim, Jaereyun Jung, Sanggug Lee, Jongtae Park
  • Patent number: 8741692
    Abstract: A method for forming semiconductor devices with wafer-level packaging (WLP) includes providing a silicon-on-insulator (SOI) substrate, forming a mask on a silicon layer of the SOI substrate, etching the silicon layer through openings in the mask to form elements initially bonded to but later released from an insulator layer of the SOI substrate, bonding a support substrate to the silicon layer, depositing metal over through holes in the support substrate to contact the silicon layer, and singulating the semiconductor devices from the bonded SOI substrate and the support substrate. The support substrate defines depressions opposite the elements so the elements are not bonded to the support substrate. Each semiconductor device includes a hermetically sealed package having a portion of the SOI substrate and a portion of the support substrate.
    Type: Grant
    Filed: September 15, 2011
    Date of Patent: June 3, 2014
    Assignee: Advanced NuMicro Systems, Inc.
    Inventor: Yee-Chung Fu
  • Patent number: 8735220
    Abstract: A method for fabricating a re-built wafer which comprises chips having connection pads, comprising: fabricating a first wafer of chips, production on this wafer of a stack of at least one layer of redistribution of the pads of the chips on conductive tracks designed for the interconnection of the chips, this stack being designated the main RDL layer, cutting this wafer in order to obtain individual chips each furnished with their RDL layer, transferring the individual chips with their RDL layer to a sufficiently rigid support to remain flat during the following steps, which support is furnished with an adhesive layer, with the RDL layer on the adhesive layer, depositing a resin in order to encapsulate the chips, polymerizing the resin, removing the rigid support, depositing a single redistribution layer called a mini RDL in order to connect the conductive tracks of the main RDL layer up to interconnection contacts, through apertures made in the adhesive layer, the wafer comprising the polymerized resin, the c
    Type: Grant
    Filed: June 14, 2010
    Date of Patent: May 27, 2014
    Assignee: 3D Plus
    Inventor: Christian Val
  • Publication number: 20140138833
    Abstract: A semiconductor device includes a chip carrier and a semiconductor die with a semiconductor portion and a conductive structure. A soldered layer mechanically and electrically connects the chip carrier and the conductive structure at a soldering side of the semiconductor die. At the soldering side an outermost surface portion along an edge of the semiconductor die has a greater distance to the chip carrier than a central surface portion. The conductive structure covers the central surface portion and at least a section of an intermediate surface portion tilted to the central surface portion. Solder material is effectively prevented from coating such semiconductor surfaces that are prone to damages and solder-induced contamination is significantly reduced.
    Type: Application
    Filed: November 21, 2012
    Publication date: May 22, 2014
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Philipp Seng, Khalil Hosseini, Anton Mauder
  • Publication number: 20140138808
    Abstract: Embodiments of the present invention are directed to leadframe area array packaging technology for fabricating an area array of I/O contacts. A manufactured package includes a polymer material substrate, an interconnect layer positioned on top of the polymer material substrate, a die coupled to the interconnect layer via wire bonds or conductive pillars, and a molding compound encapsulating the die, the interconnect layer and the wire bonds or conductive pillars. The polymer material is typically formed on a carrier before assembly and is not removed to act as the substrate of the manufactured package. The polymer material substrate has a plurality of through holes that exposes the interconnect layer at predetermined locations and enables solder ball mounting or solder printing directly to the interconnect layer. In some embodiments, the semiconductor package includes a relief channel in the polymer material substrate to improve the reliability performance of the manufactured package.
    Type: Application
    Filed: November 19, 2012
    Publication date: May 22, 2014
    Applicant: UNITED TEST AND ASSEMBLY CENTER LTD.
    Inventors: Antonio Bambalan Dimaano, JR., Nathapong Suthiwongsunthorn, Yong Bo Yang