Abstract: A method for forming gate dielectric layers having different thicknesses is provided, The method includes forming a lower oxide layer, a nitride layer, and an upper oxide layer on a semiconductor substrate; performing a first deglaze process to the semiconductor substrate keeping the lower oxide layer, the nitride layer, and the upper oxide layer in a first region, while removing the nitride layer and the upper oxide layer in second, third, and fourth regions; forming the first gate dielectric layer having a first thickness in the second, third, and fourth regions; performing a second deglaze process to the first gate dielectric layer in the third region, thereby forming a second gate dielectric layer having a second thickness; and performing a third deglaze process on the first gate dielectric layer on the fourth region, thereby forming a third gate dielectric layer having a third thickness.

Abstract: A method of manufacturing a semiconductor integrated circuit device is provided including providing a substrate with projecting island regions formed in stripes, with first regions of the substrate adjacent the projecting island regions and with a conductive film covering the projecting island regions and first regions. An insulating film is formed between the projecting island regions and conductive film, wherein the projecting island regions extend in a first direction in stripes. The conductive film is anisotropically etched using a mask covering contact regions to form conductive lines on sides of the projecting island regions and the contact regions integrated with the conductive lines, which conductive lines serve as common gate electrodes for MISFETs.

Abstract: In a method of manufacturing an SONOS type flash memory device, a first oxide layer and a buffer poly layer are formed over a surface of a semiconductor except for a memory cell region of a cell region. A second oxide layer, a nitride layer and a third oxide layer are formed. The poly buffer layer is exposed by etching specific regions in a peri region and in a DSL/SSL region of the cell region. A conductive layer is formed to electrically connect to the poly buffer layer. The third oxide layer, the nitride layer and the second nitride layer are selectively etched to form a gate of the memory cell region of the cell region. The buffer poly layer is selectively etched to form a gate in the DSL/SSL region of the cell region and a gate in the peri region.

Abstract: A split gate NAND flash memory structure is formed on a semiconductor substrate of a first conductivity type. The NAND structure comprises a first region of a second conductivity type and a second region of the second conductivity type in the substrate, spaced apart from the first region, thereby defining a channel region therebetween. A plurality of floating gates are spaced apart from one another and each is insulated from the channel region. A plurality of control gates are spaced apart from one another, with each control gate insulated from the channel region. Each of the control gate is between a pair of floating gates and is capacitively coupled to the pair of floating gates. A plurality of select gates are spaced apart from one another, with each select gate insulated from the channel region. Each select gate is between a pair of floating gates.

Abstract: A method of forming nonvolatile memory devices according to example embodiments of the present invention includes forming a device isolation layer defining active regions in a semiconductor substrate; forming a plurality of transistors on the active regions, the plurality of transistors comprising a pair of adjacent string selection transistors, a pair of adjacent ground selection transistors, and a plurality of memory cell transistors connected in series between the string selection transistors and ground selection transistors; forming a common source line using SEG between a pair of adjacent ground selection transistors so that the common source line has a top surface lower than a top surface of the pair of adjacent ground selection transistors.

Abstract: On a surface of a Si substrate, a nonvolatile memory cell, an nMOS transistor, and a pMOS transistor are formed, and thereafter an interlayer insulation film covering the nonvolatile memory cell, the nMOS transistor, and the pMOS transistor is formed. Next, in the interlayer insulation film, there are formed plural contact plugs connected respectively to a control gate of the nonvolatile memory cell, a source or a drain of the nMOS transistor, and a source or a drain of the PMOS transistor. Thereafter, there is formed a single-layer wiring connecting the control gate to the sources or drains of the nMOS transistor and the pMOS transistor via the plural contact plugs.

Abstract: A semiconductor device includes a semiconductor substrate having a surface, buried isolation regions protruding from the surface of the semiconductor substrate, and a first insulating layer on the surface of the semiconductor substrate between the isolation regions and including a fluorine, nitrogen, and/or heavy hydrogen impurity. A floating electrode is on the first insulating layer, a second insulating layer is on the floating electrode and the isolation regions, and a control gate electrode is on the second insulating layer. Related methods of forming semiconductor devices are also disclosed.

Abstract: A semiconductor device, which ensures device reliability especially in fine regions and enables great capacitance and high-speed operations, has memory cells including, in a first region of a main surface of a semiconductor substrate, a gate insulating film, a floating gate electrode, an interlayer insulating film, a control gate electrode, and source and drain regions of the second conduction type arranged in a matrix, with a shallow isolation structure for isolating the memory cells. When using a shallow structure buried with an insulating film for element isolation, the isolation withstand voltage in fine regions can be prevented from lowering and the variation in threshold level of selective transistors can be reduced. When the memory cells in a memory mat are divided by means of selective transistors, the disturb resistance of the memory cells can be improved.

Abstract: A method for integrating Non-Volatile Memory (NVM) circuitry with logic circuitry is provided. The method includes depositing a first layer of gate material over the NVM area and the logic area of the substrate. The method further includes depositing multiple adjoining sacrificial layers comprising nitride, oxide and nitride (ARC layer) overlying each other. The multiple adjoining sacrificial layers are used to pattern select gate and control gate of memory transistor in the NVM area, and the ARC layer of the multiple adjoining sacrificial layers is used to pattern gate of logic transistor in the logic area.

Abstract: A method for forming a semiconductor device includes providing a semiconductor substrate comprising silicon, forming a layer of dielectric on the surface of the semiconductor substrate, forming a gate electrode comprising silicon over the layer of dielectric, recessing the layer of dielectric under the gate electrode, filling the recess with a discrete charge storage material, oxidizing a portion of the gate electrode, and oxidizing a portion of the semiconductor substrate.

Abstract: Distance ?m between a floating gate and a drain contact of a floating gate transistor forming a memory cell is set to be greater than a distance ? determined based on a minimum design dimension between a control gate and a contact of a peripheral transistor. Data retention characteristics of a programmable memory which stores data in accordance with the amount of accumulated charges in the floating gate can be ensured without being affecting by mask misalignment or the like.

Abstract: A method of making a monolithic, three dimensional NAND string, includes forming a semiconductor active region of a first memory cell over a semiconductor active region of a second memory cell. The semiconductor active region of the first memory cell is a first pillar having a square or rectangular cross section when viewed from above, the first pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. The semiconductor active region of the second memory cell is a second pillar having a square or rectangular cross section when viewed from above, the second pillar located under the first pillar, the second pillar being a first conductivity type semiconductor region located between second conductivity type semiconductor regions. One second conductivity type semiconductor region in the first pillar contacts one second conductivity type semiconductor region in the second pillar.

Abstract: A memory cell (110) has a plurality of floating gates (120L, 120R). The channel region (170) comprises a plurality of sub-regions (220L, 220R) adjacent to the respective floating gates, and a connection region (210) between the floating gates. The connection region has the same conductivity type as the source/drain regions (160) to increase the channel conductivity. Therefore, the floating gates can be brought closer together even though the inter-gate dielectric (144) becomes thick between the floating gates, weakening the control gate's (104) electrical field in the channel.

Abstract: A first gate dielectric of a first transistor is disposed over a workpiece in a first region, and a second gate dielectric of a second transistor is disposed over the workpiece in a second region. The second gate dielectric comprises a different material than the first gate dielectric. A first dopant-bearing metal comprising a first dopant is disposed in recessed regions of the workpiece proximate the first gate dielectric, and a second dopant-bearing metal comprising a second dopant is disposed in recessed regions of the workpiece proximate the second gate dielectric. A first doped region comprising the first dopant is disposed in the workpiece adjacent the first dopant-bearing metal. A second doped region comprising the second dopant is disposed in the workpiece adjacent the second dopant-bearing metal. The dopant-bearing metals and the doped regions comprise source and drain regions of the first and second transistors.

Abstract: A semiconductor device having a field effect transistor and a method of forming the same are provided. The semiconductor device preferably includes a device active pattern disposed on a predetermined region of the substrate. The gate electrode preferably crosses over the device active pattern, interposed by a gate insulation layer. A support pattern is preferably interposed between the device active pattern and the substrate. The support pattern can be disposed under the gate electrode. A filling insulation pattern is preferably disposed between the device active pattern and the filling insulation pattern. The filling insulation pattern may be disposed under the source/drain region. A device active pattern under the gate electrode is preferably formed of a strained silicon having a lattice width wider than a silicon lattice.

Abstract: A method of manufacturing a semiconductor memory device is provided. The method includes: providing a semiconductor substrate, forming a cell transistor on the semiconductor substrate, and forming a SiON layer with a refractive index of about 1.8 or less on the cell transistor.

Abstract: A fabricating method of a semiconductor device includes: forming a first metal layer on a substrate and patterning the first metal layer to form a bottom metal line and a bottom electrode of a capacitor; forming an interlayer insulating layer on the resulting structure; forming a via hole in the interlayer insulating layer and forming a contact; etching the interlayer insulating layer to form a trench exposing the bottom electrode; forming a dielectric layer on the resulting structure, and removing the dielectric layer formed outside the trench; and forming a second metal layer on the resulting structure to form a top metal line and a top electrode of the capacitor.

Abstract: Provided are an embedded semiconductor device and a method of manufacturing an embedded semiconductor device. In a method of manufacturing the embedded semiconductor device, layers of at least one cell gate stack may be formed in a cell area of a substrate. A logic gate structure may be formed in a logic area of the substrate. First source/drain regions may be formed adjacent to the logic gate structure, and metal silicide patterns may be formed on the logic gate structure and the first source/drain regions. At least one hard mask may be formed on the layers of the at least one cell gate stack, and a blocking pattern may be formed to cover the logic gate structure and the first source/drain regions. The at least one cell gate stack may be formed in the cell area by etching the layers of the at least one cell gate stack using the at least one hard mask as an etching mask.

Abstract: NAND flash memory cell array and fabrication process in which cells having memory gates and charge storage layers are densely packed, with the memory gates in adjacent cells either overlapping or self-aligned with each other. The memory cells are arranged in rows between bit line diffusions and a common source diffusion, with the charge storage layers positioned beneath the memory gates in the cells. The memory gates are either polysilicon or polycide, and the charge storage gates are either a nitride or the combination of nitride and oxide. Programming is done either by hot electron injection from silicon substrate to the charge storage gates to build up a negative charge in the charge storage gates or by hot hole injection from the silicon substrate to the charge storage gates to build up a positive charge in the charge storage gates. Erasure is done by channel tunneling from the charge storage gates to the silicon substrate or vice versa, depending on the programming method.

Abstract: A semiconductor memory device includes a semiconductor substrate having a trench therein. First and second gate patterns are formed on a surface of the substrate adjacent the trench, a respective one of which is on a respective opposing side of the trench. A split source/drain region is formed in the substrate between the first gate pattern and the second gate pattern such that the split source/drain region is divided by the trench. The split source/drain region includes a first source/drain subregion between the first gate pattern and the trench and a second source/drain subregion between the second gate pattern and the trench and spaced apart from the first source/drain subregion. A connecting region is formed in the substrate that extends around the trench from the first source/drain subregion to the second source/drain subregion. Related methods are also discussed.

Abstract: A field effect transistor device and method, such device having source and drain electrodes in ohmic contact a semiconductor. A gate electrode-field plate structure is disposed between the source and drain electrodes. The gate electrode-field plate structure comprises: a dielectric; a first metal in Schottky contact the semiconductor; and a second metal. The second metal has: a first portion disposed over and electrically connected to a portion of the first metal; and a second portion, separated from a second portion of the first metal by a portion of the dielectric and extending beyond an edge of the first metal to an edge of the second metal. The edge of the first metal is further from the drain electrode than the edge of the second metal to provide a field-plate for the field effect transistor.

Abstract: A method of forming a gate of a semiconductor device, including the steps of sequentially forming a tunnel oxide film, a nitride film, a dielectric layer, a polysilicon layer, a metal silicide film, and a hard mask film on a semiconductor substrate; sequentially etching the hard mask film, the metal silicide film, the polysilicon layer, and a predetermined region of the dielectric layer, forming a control gate pattern and also exposing the nitride film; performing a thermal oxidization process on both sides of the control gate pattern, forming an oxide film; and stripping the exposed nitride film by a wet etch process, thereby exposing the tunnel oxide film.

Abstract: A nonvolatile semiconductor memory which is configured to include a plurality of word lines disposed in a row direction; a plurality of bit lines disposed in a column direction perpendicular to the word lines; memory cell transistors having a charge storage layer, provided in the column direction and an electronic storage condition of the memory cell transistor configured to be controlled by one of the plurality of the word lines connected to the memory cell; a plurality of first select transistors, each including a gate electrode, selecting the memory cell transistors provided in the column direction, arranged in the column direction and adjacent to the memory cell transistors at a first end of the memory cell transistors; and a first select gate line connected to each of the gate electrodes of the first select transistors.

Abstract: A method of manufacturing a MOS transistor device. First, a semiconductor substrate having a gate structure is prepared. The gate structure has two sidewalls and a liner on the sidewalls. Subsequently, a stressed cap layer is formed on the semiconductor substrate, and covers the gate structure and the liner. Next, an activating process is performed. Furthermore, the stressed cap layer is etched to be a salicide block. Afterward, a salicide process is performed to form a silicide layer on the regions that are not covered by the stressed cap layer.

Abstract: A semiconductor memory device can include select transistors and cell transistors on a semiconductor substrate. An insulation layer covers the select transistors and the cell transistors. The bit lines are in the insulation layer and are electrically connected to respective ones of the select transistors. The bit lines are arranged along at least two different parallel planes having different heights relative to the semiconductor substrate.

Abstract: A flash memory cell is provided. A deep well is disposed in a substrate and a well is disposed within the deep well. A stacked gate structure is disposed on the substrate. A source region and a drain region are disposed in the substrate on each side of the stacked gate structure. A select gate is disposed between the stacked gate structure and the source region. A first gate dielectric layer is disposed between the select gate and the stacked gate structure. A second gate dielectric layer is disposed between the select gate and the substrate. A shallow doped region is disposed in the substrate under the stacked gate structure and the select gate. A deep doped region is disposed in the substrate on one side of the stacked gate structure. The conductive plug on the substrate extends through the drain region and the deep doped region.

Abstract: A memory device may include a source region and a drain region formed in a substrate and a channel region formed in the substrate between the source and drain regions. The memory device may further include a first oxide layer formed over the channel region, the first oxide layer having a first dielectric constant, and a charge storage layer formed upon the first oxide layer. The memory device may further include a second oxide layer formed upon the charge storage layer, a layer of dielectric material formed upon the second oxide layer, the dielectric material having a second dielectric constant that is greater than the first dielectric constant, and a gate electrode formed upon the layer of dielectric material.

Abstract: A semiconductor device including a nonvolatile memory and the fabrication method of the semiconductor device is described.

Abstract: A nonvolatile semiconductor memory of an aspect of the present invention comprises a first element isolation insulating film containing an organic substance which surrounds a first region, a memory cell arranged in the first region, a second element isolation insulating film containing an organic substance which surrounds a second region, a peripheral transistor arranged in the second region, and a first impurity layer which is provided in the semiconductor substrate along a side surface of the second element isolation insulating film.

Abstract: Embodiments of the present invention disclose a memory device having an array of flash memory cells with source contacts that facilitate straight word lines, and a method for producing the same. The array is comprised of a plurality of non-intersecting shallow trench isolation (STI) regions that isolate a plurality of memory cell columns. A source column is implanted with n-type dopants after the formation of a tunnel oxide layer and a first polysilicon layer. The implanted source column is coupled to a plurality of common source lines that are coupled to a plurality of source regions associated with memory cells in the array. A source contact is coupled to the implanted source column for providing electrical coupling with the plurality of source regions. The source contact is collinear with a row of drain contacts that are coupled to drain regions associated with a row of memory cells. The arrangement of source contacts collinear with the row of drain contacts allows for straight word line formation.

Abstract: In a semiconductor device, the semiconductor device includes a conductive structure, first insulating layers and first conductive layer patterns. The conductive structure includes a first portion, second portions and third portions. The second portions extend in a first direction on the first portion. The second portions are spaced apart from one another in a second direction substantially perpendicular to the first direction. The third portions are provided on the second portions. The third portions are spaced apart from one another in the first and second directions. The first insulating layers cover sidewalls of the second portions. The first conductive layer patterns are provided on the first insulating layers.

Abstract: A scalable two-transistor memory (STTM) device includes a planar transistor and a vertical transistor on a semiconductor substrate. The planar transistor includes spaced apart metal silicide source/drain regions on the substrate and a floating gate electrode on the substrate between the metal silicide source/drain regions that controls a channel region of the planar transistor. The vertical transistor includes a tunnel junction structure on the floating gate electrode and a control gate electrode on a sidewall of the tunnel junction structure that controls a channel region of the vertical transistor. Related methods of forming STTM devices are also discussed.

Abstract: A split gate flash memory cell comprising a semiconductor substrate having a first insulating layer thereon and a floating gate with a first width is disclosed. The cell further comprises a second insulating layer, a control gate and a cap on the floating gate in sequence. The cap layer, the control gate and the second insulating layer have a same second width less than the first width. The cell also comprises a third insulating layer over the semiconductor substrate, the sidewalls of the control gate, the second insulating layer, the floating gate, and the first insulating layer. In addition, an erase gate formed on the third insulating layer is provided.

Abstract: A method of fabricating a non-volatile memory is provided. A stacked structure is formed over a substrate, and the stacked structure has a gate dielectric layer and a floating gate thereon. A first dielectric layer, a second dielectric layer and a third dielectric layer are respectively formed over the top and the sidewalls of the stacked structure and the exposed substrate. A charge storage layer covers over the top and sidewalls of the stacked structure. Also, a pair of auxiliary gates is formed over the substrate beside the charge storage layer, and a gap is between the auxiliary gates and the charge storage layer.

Abstract: A system and method are disclosed for providing EEPROM devices that combine the high endurance features of complex and expensive EEPROM devices and the low manufacturing costs of CMOS compatible EEPROM devices. A memory cell of the invention comprises a control capacitor, an erase capacitor, and a program capacitor, each of which comprises an NMOS transistor. The gates of the three NMOS transistors are connected together to form a floating gate. The drain of the NMOS transistor of the program capacitor is separately connected so that the program capacitor can also serve as a read transistor. A memory cell of the invention can be programmed or erased in an array of memory cells without disturbing the other memory cells in the array.

Abstract: A drain (7) includes a lightly-doped shallow impurity region (7a) aligned with a control gate (5), and a heavily-doped deep impurity region (7b) aligned with a sidewall film (8) and doped with impurities at a concentration higher than that of the lightly-doped shallow impurity region (7a). The lightly-doped shallow impurity region (7a) leads to improvement of the short-channel effect and programming efficiency. A drain contact hole forming portion (70) is provided to the heavily-doped impurity region (7b) to reduce the contact resistance at the drain (7).

Abstract: A process provides a gate dielectric layer of a first thickness for a memory array and for certain peripheral circuits on the same substrate as the memory array. High-voltage peripheral circuits are provided with a gate dielectric layer of a second thickness. Low-voltage peripheral circuits are provided with a gate dielectric layer of a third thickness. The process provides protection from subsequent process steps for a gate dielectric layer. Shallow trench isolation allows the memory array cells to be extremely small, thus providing high storage density.

Abstract: A semiconductor memory device employs a SONOS type memory architecture and includes a bit line diffusion layer in a shallow trench groove in which a conductive film is buried. This makes it possible to decrease the resistivity of the bit line diffusion layer without enlarging the area on the main surface of the semiconductor substrate, and to fabricate the semiconductor memory device having stable electric characteristics without enlarging the cell area. The bit line is formed by implanting ions into the sidewall of Si3N4.

Abstract: Some embodiments include methods of forming a NAND cell unit having a NAND string gate closest to a select gate with a different width than other NAND string gates more distant from the select gate. Some embodiments include utilization of an etch comprising HBr and O2 to extend a pattern through a carbon-containing layer. The patterned carbon-containing layer may be used to pattern NAND cell unit gates. Some embodiments include structures having a patterned carbon-containing layer defining a NAND cell unit having a NAND string gate closest to a select gate with a different width than other NAND string gates more distant from the select gate.

Abstract: A self-converged memory material element is created during the manufacture of a memory Cell comprising a base layer, with a bottom electrode, and an upper layer having a third, planarization stop layer over the base layer, a second layer over the third layer, and the first layer over the second layer. A keyhole opening is formed through the upper layer to expose the bottom electrode. The first layer has an overhanging portion extending into the opening. A dielectric material is deposited into the keyhole opening so to create a self-converged void within the keyhole opening. An anisotropic etch forms a sidewall of the dielectric material in the keyhole opening with an electrode hole aligned with the void and exposing the bottom electrode. A memory material is deposited into the electrode hole in contact with the bottom electrode and is planarized down to the third layer to create the memory material element.

Abstract: A method of forming a source contact of a NAND flash memory, including the steps of forming a tunnel oxide film on a semiconductor substrate, and then removing the tunnel oxide film in a region in which the source contact will be formed; sequentially forming a first polysilicon layer and a dielectric layer on the entire structure, and then removing the dielectric layer of a region in which select transistors will be formed; sequentially forming a second polysilicon layer on the regions for which the dielectric layer has been removed, forming a conductive film on the second polymer layer, and forming a hard mask on the conductive film; performing an etch process using a gate mask to etch a cell region up to the dielectric layer and at the same time, to etch the region in which the source contact will be formed up to on the tunnel oxide film, thereby forming source lines; performing an ion implantation process on the semiconductor substrate exposed at both sides of the source lines; sequentially etching the die

Abstract: A method for manufacturing a memory unit capable of storing multibits binary information. A gate is formed on a dielectric layer over a semiconductor substrate. Next, a first etching is performed to etch the semiconductor substrate by using the gate acting as an etching mask to remove exposed surface of the dielectric layer. Subsequently, a first oxide layer is conformally formed on the gate and the semiconductor substrate. An charge-trapping layer is conformally formed on the first oxide layer, and subsequently a second oxide layer is conformally formed on the isolating layer. Next, a second etching is performed to etch the second oxide layer and the charging-trapping layer to form sandwich spacers composed of the second oxide layer/the isolating layer/the first oxide layer on the substrate and the gate sidewall.

Abstract: The number of process steps for manufacturing a non-volatile memory is reduced while the performance of the non-volatile memory is improved. The non-volatile memory has a memory cell in which first, second and third P-type diffusion regions are formed in an N-type well, a select gate is formed via a select-gate insulating film over a channel between the first and second P-type diffusion regions, and a floating gate is formed via a floating-gate insulating film over a channel between the second and third P-type diffusion regions. The non-volatile memory has a peripheral circuit in which fourth and fifth P-type diffusion regions are formed in an N-type well, and a peripheral-circuit gate is formed via a peripheral-circuit gate insulating film over a channel between the fourth and fifth P-type diffusion regions. The film thickness of the floating-gate insulating film is greater than that of the select-gate insulating film and peripheral-circuit gate insulating film.

Abstract: A NAND-type non-volatile semiconductor memory device includes a gate insulating layer on an active region of a semiconductor substrate, first and second select gate structures on the active region, and a memory gate structure therebetween. The first and second select gate structures respectively include a plurality of select gate patterns, and the memory gate structure includes a plurality of storage gate patterns. The gate insulating layer includes a plurality of openings therein exposing portions of the active region between ones of the plurality of select gate patterns of the first and second select gate structures. The device may further include impurity regions in portions of the active region between the gate patterns, and halo regions adjacent ones of the impurity regions in the portions of the active region exposed by the openings in the gate insulating layer. Related fabrication methods are also discussed.

Abstract: According to embodiments of the invention, a bit line interlayer insulating layer is placed over a semiconductor substrate. A plurality of parallel bit line patterns are placed on the bit line interlayer insulating layer. Each of the bit line patterns has a bit line and a bit line capping layer pattern stacked thereon. Bit line spacers covers side walls of the bit line patterns, buried holes penetrate predetermined regions of the bit line interlayer insulating layer between the bit line patterns. And a plurality of storage node contact plugs are placed between the bit line patterns surrounding by the bit line spacers. At this time, the storage node contact plugs fill the buried holes.

Abstract: A semiconductor memory device includes a silicon substrate including a first region which has a buried insulating layer below a single-crystal silicon layer and a second region which does not have the buried insulating layer below the single-crystal silicon layer, at least one memory cell transistor which has a first gate electrode, the first gate electrode being provided on the single-crystal silicon layer in the first region, and at least one selective gate transistor which has a second gate electrode and is provided on the single-crystal silicon layer in the first region. The one selective gate transistor is provided in such a manner that a part of the second gate electrode is placed on the single-crystal silicon layer in the second region.

Abstract: A method for manufacturing a flash memory device including the steps of forming a gate oxide film for high voltage on the whole surface of a semiconductor substrate on which a cell region, a low voltage region and a high voltage region have been formed, etching the gate oxide film for high voltage formed in the cell region and the low voltage region by a predetermined depth, by forming photoresist patterns to expose the gate oxide film for high voltage formed in the cell region and the low voltage region, and performing a wet etching process using the photoresist patterns as an etching mask, removing the entire gate oxide film for high voltage formed in the cell region and the low voltage region, by performing a cleaning process on the resulting structure, removing the photoresist patterns, forming a floating gate electrode and a control gate electrode, by sequentially forming a tunnel oxide film, a first polysilicon film, a second polysilicon film, a dielectric film, a third polysilicon film and a metal sili

Abstract: A non-volatile memory device and a method of manufacturing the same, in which the program speed can be enhanced and the interference phenomenon can be reduced. The non-volatile memory device includes a semiconductor substrate having an active region defined by isolation layers arranged in one direction, a control gate arranged vertically to the direction in which the isolation layers are arranged, a floating gate formed on the active region below the control gate and having a lateral curve so that the floating gate has a width narrowed upwardly, a gate insulating layer formed between the floating gate and the semiconductor substrate, and a dielectric layer formed between the floating gate and the control gate.

Abstract: A memory device having at least one memory cell, and each memory cell is configured to store multiple bits. Each bit is stored in a charge storage layer of the memory cell. The memory device can include a double gate structure that can store 4-bits per cell that expands the density of the non-volatile memory device such as flash memory.

Abstract: A method of forming a bit line of a semiconductor memory device is performed as follows. A first interlayer insulating layer is formed over a semiconductor substrate in which an underlying structure is formed. A region of the first interlayer insulating layer is etched to form contact holes through which a contact region of the semiconductor substrate is exposed. A low-resistance tungsten layer is deposited on the entire surface including the contact holes, thus forming contacts. A CMP process is performed in order to mitigate surface roughness of the low-resistance tungsten layer. The low-resistance tungsten layer on the interlayer insulating layer is patterned in a bit line metal line pattern, forming a bit line.