Abstract: Embodiments of the present invention relate to a method for a near non-adaptive virtual metrology for wafer processing control. In accordance with an embodiment of the present invention, a method for processing control comprises diagnosing a chamber of a processing tool that processes a wafer to identify a key chamber parameter, and controlling the chamber based on the key chamber parameter if the key chamber parameter can be controlled, or compensating a prediction model by changing to a secondary prediction model if the key chamber parameter cannot be sufficiently controlled.

Abstract: A system, method and/or computer program product for analyzing a functionality of at least two manufactured products obtain a first characteristic of a first manufactured product. The system acquires a second characteristic of a second manufactured product. The system identifies a common feature between the first characteristic and the second characteristic. The system identifies a distinguishable feature between the first characteristic and the second characteristic. The system determines a cause of a deviation of a functionality in the first manufactured product or the second manufactured product or both manufactured products based on the identified common feature or the identified distinguishable feature or both features.

Abstract: A package coding system for a cigarette manufacturing process is provided. An imprinting device imprints an alphanumeric code on each of a series of cigarette packages. A conveyor device conveys the cigarette packages in a feed direction. An inspection device is operably engaged with the conveyor device and inspects the alphanumeric code imprinted on each cigarette package conveyed by the conveyor device to determine whether any of the cigarette packages includes a defect in the imprinted alphanumeric code, and thus comprises a defective cigarette package. A removal device is operably engaged with the conveyor device and is configured to be in communication with the inspection device. The removal device is configured to remove the defective cigarette package from the series of cigarette packages conveyed by the conveyor device in response to identification thereof by the inspection device. An associated method is also provided.

Abstract: This invention facilitates monitoring operation for checking whether or not quality of a substrate deteriorates as well as operation for identifying a cause of deterioration in quality. Identification information of constituent elements related to measurement target sections (pads) on a component-mounted substrate is arranged into hierarchal structure data. A first axis is arranged with the measurement target sections associated with this arrangement. A second axis is arranged with information (identification information of lots and squeegees) representing production conditions of the substrates according to an order of the substrates being processed. A two-dimensional area defined by the first axis and the second axis is set. A color map is generated, in which measured data of the measurement target sections on the substrates are arranged in colors at corresponding positions within the two-dimensional area.

Abstract: A cast iron brake caliper with improved fatigue life, and a process and process equipment for pre-stressing a cast iron brake caliper to provide improved fatigue life, is provided. In the process, a load is applied to a cast iron caliper, where the load is high enough to locally yield and plastically deform the cast iron material, but not high enough to cause material failure, such as cracking. Upon load removal, residual compressive stresses in the cast iron caliper lower the mid-point of the stress range the plastically-deformed region of the caliper sees during in-service use, and thereby lowers the peak stress seen in this region, increasing fatigue life. The process permits a cast iron brake caliper to be designed to use less material and thus fit within constrained wheel rim envelopes, without the need to resort to high cost materials or other alternative design strategies.

Abstract: A method for designing masks adapted to the forming of integrated circuits, including the steps of: (a) forming a first test file including a set of configurations of integrated circuit elements; (b) forming a second test file comprising the elements of the first test file, less the elements corresponding to configurations forbidden by design rule manuals; (c) trans-forming the second test file by means of a set of logical operations implemented by computing means to obtain a mask file; (d) testing the mask file and, if the test is negative, modifying the design rule manuals; and (e) repeating steps (a) to (d) until the test of step (d) is positive.

Abstract: Disclosed herein is a device for cutting a glass sheet, continuously supplied after a melting and solidification process, into quadrangular glass substrates. The glass sheet cutting device includes two or more cutters for cutting a glass sheet into quadrangular glass substrates, a defect inspector for scanning the glass sheet to three-dimensionally check defect positions in a length direction, a width direction and a thickness direction of the glass sheet, a position adjuster for moving at least one of the cutters to a portion of the glass sheet at which few defects are distributed, and a controller for informing the position adjuster of positions of the cutters based on the scanned results received from the defect inspector.

Abstract: Methods used to monitor quality control of a baby formula manufacturing process are disclosed herein. Consequently, the methods and systems provide a means to perform quality manufacturing on an integrated level whereby baby formula manufacturers can achieve data and product integrity and ultimately minimize cost.

Abstract: A maintenance information management method comprising steps of: by a terminal processing apparatus, transmitting, to a management apparatus via a network, maintenance work information about an analyzer on which maintenance work has been performed; storing, in a maintenance work information storage section of the management apparatus, the maintenance work information transmitted via the network; and transmitting, to the terminal processing apparatus via the network, the maintenance work information of the analyzer, which is stored in the maintenance work information storage section.

Abstract: The present disclosure provides a semiconductor manufacturing method. The method includes performing a first process to a first plurality of semiconductor wafers; determining a sampling rate to the first plurality of semiconductor wafers based on process quality; determining sampling fields and sampling points to the first plurality of semiconductor wafers; measuring a subset of the first plurality of semiconductor wafers according to the sampling rate, the sampling fields and the sampling points; modifying a second process according to the measuring; and applying the second process to a second plurality of semiconductor wafers.

Abstract: A critical dimension controlling method in a semiconductor production process includes determining whether a model is to undergo a discontinuous production process when a run is inserted in a semiconductor manufacturing line, applying an offset for said model or a common offset for a model group including said model according to the determination, executing a production process in dependence upon a process variation along with the offset for the model or the common offset for the model group, and measuring an actual critical dimension in the production process. The offset for the model is calculated based on a previously measured actual critical dimension, and the calculated offset for the model is applied to the calculation of the common offset for the model group.

Abstract: A foreign matter detection unit detects an entry of an unexpected foreign matter that is other than the substrates by light transmitting optical sensors 7 having light projecting portions 7a and light receiving portions 7b at opening sections 3a, 3b formed in cover members 2 through which the substrates pass. By executing an emergency stop processing, when the entry of the foreign matter is detected at one of the opening sections, to stop the electronic component mounting apparatus that is adjacent to the opening section at which the entry of the foreign matter is detected, safety of the machine operators is properly ensured in check and confirmation works conducted at the time of machine troubles etc even in an electronic component assembling line in which the small-sized thin unit apparatuses are combined.

Abstract: An information processing apparatus, for processing information of a plurality of measured heights respectively corresponding to a plurality of measurement points on a surface of a substrate held by a chuck, includes a processor and an output device. The processor is configured to specify, with respect to the surface, a plurality of areas that are arrayed and a plurality of sections each constituted by a number of the plurality of areas, extract at least two inclinations of a plurality of inclinations respectively corresponding to the number of the plurality of areas based on the plurality of measured heights with respect to each of the plurality of sections, and cause the output device to output information specifying a section of the plurality of sections that satisfies a first condition that a product of two inclinations among the at least two inclinations exceeds a predetermined threshold.

Abstract: Some embodiments for a fault detection apparatus may include one or more monitors to detect at least three operating states of a sensor, such as pass, fail, and inoperative so as to enable a manufacturing facility to differentiate between situations in which a container does not have the appropriate machine readable label and situations wherein the sensor is actually inoperative. The fail state may be indicative of an object on a conveyor system not matching a predetermined description, identity or characteristic. The pass state may be indicative of an object on a conveyor system matching the predetermined description, identity or characteristic. The inoperative state may be indicative of a sensor output associated with a malfunction in the sensor itself. The fault detection apparatus may also include a fail-to-safe controller configured to detect these operating states.

Abstract: Provided is a substrate processing system configured to provide proper data. The substrate processing system comprises a substrate processing apparatus comprising a plurality of components, a controller configured to control the substrate processing apparatus by setting a sequence prescribing time and components, and a collection unit configured to collect data from the components. The collection unit is configured to match data collected from the components via the controller with data collected directly from the components.

Abstract: It is possible to compose a chart by filtering measurement information using a product wafer number in a server device including: an instruction receiving unit for storing therein plural measurement information, which is time sequential information measured in a plurality of manufacturing apparatuses and has a product wafer number and time information, and for receiving an output instruction of a chart containing the product wafer number; a fault detection unit for, when the instruction receiving unit receives the output instruction, reading a multiplicity of measurement information satisfying a product wafer number condition contained in the output instruction, and determining whether the read multiplicity of measurement information satisfies the condition information; an output information composing unit for composing the output information according to a determination result of the fault detection unit; and an output unit for outputting the output information composed by the output information composing un

Abstract: A method and system for estimating context offsets for run-to-run control in a semiconductor fabrication facility is described. In one embodiment, contexts associated with a process are identified. The process has one or more threads, and each thread involves one or more contexts. A set of input-output equations describing the process is defined. Each input-output equation corresponds to a thread and includes a thread offset expressed as a summation of individual context offsets. A state-space model is created that describes an evolution of the process using the set of input-output equations. The state-space model allows to estimate individual context offsets.

Abstract: An OA device for preloading content on memory cards is disclosed. A handler control module of a control unit performs a preloading process which comprises a preload check, preloading content based on digital content stored in buffers, and a preloaded content comparison, wherein memory cards at the initial column of a tray are checked, preloaded, and compared with the preloaded digital content using probes of a probe module. When the preloading content for the memory cards at the initial column of the tray is complete, the tray module or the probe module is moved by a stepper module by a predetermined distance, or the moving arm moves the probe module with a predetermined distance, to enable the memory cards at the next column of the tray to be checked, preloaded, and compared with the preloaded digital content using the probes while a sorting module picks up failed memory cards from the previous column based on records and instructions from the handler control module of the control unit.

Abstract: A method for advanced condition monitoring of an asset system includes sensing actual values of an operating condition for an operating regime of the asset system using at least one sensor; estimating sensed values of the operating condition by using an auto-associative neural network; determining a residual vector between the estimated sensed values and the actual values; and performing a fault diagnostic on the residual vector. In another method, an operating space of the asset system is segmented into operating regimes; the auto-associative neural network determines estimates of actual measured values; a residual vector is determined from the auto-associative neural network; a fault diagnostic is performed on the residual vector; and a change of the operation of the asset system is determined by analysis of the residual vector. An alert is provided if necessary. A smart sensor system includes an on-board processing unit for performing the method of the invention.

Abstract: The present invention relates to a method for determining a selected machining quality of components in a manufacturing process, particularly during metal cutting, having at least the following method steps of determining process-relevant variables by sensors and/or from the data stream in the machine controller, extracting variable curves characteristic for the respective machining process, selecting a number of different characteristics of the extracted variable curves, the linking of which enables a clear assignment to the selected machining quality, and multivariate linking of the selected characteristics to a characteristic pattern correlating with the selected machining quality.

Abstract: An industrial controller module (13a) is provided with a routine of program instructions (29a) for storing a log of I/O table state changes (31) in a defined portion of memory (23). Upon the occurrence of a trigger event, a file of the state changes (37) is saved in the memory (23). Each entry (32) in the log of I/O table state changes (31) includes a timestamp (33) and values of each word of I/O state data (36) that changed at a time of the timestamp. Logs of state change data (16a), including timestamp data, can also be saved for intelligent sensors and actuators (16) and uploaded with the log of controller processor state data (31) to a computer (20) with a diagnostic program (21a) for playing back the state changes and synchronizing changes of the intelligent sensors and actuators (16) with changes of the controller processor module (13a).

Abstract: Monitoring a process sector in a production facility includes establishing a tool defect index associated with a process sector in the production facility. The tool defect index includes a signal representing a defect factor associated with a tool in the process sector. Monitoring the process also requires determining whether the defect factor is a known defect factor or an unknown defect factor, and analyzing a unit from the tool if the defect factor is an unknown defect factor. Monitoring the process further requires identifying at least one defect on the unit from the tool, establishing that the at least one defect is a significant defect, determining cause of the significant defect, and creating an alert indicating that the tool associated with the process sector is producing units having significant defects.

Abstract: Systems and computer-readable media having computer-executable components are disclosed for generating a representation of flatness defects on a wafer. Data is received describing the thickness of the wafer at a plurality of points on a wafer divided into a plurality of sites. A reference plane is defined for each of the plurality of sites. For each of the sites, an upper plane and a lower plane are defined relative to the reference plane. A determination is made as to which of the plurality of points on the wafer represents a flatness defect by identifying which points are not disposed between the upper plane and lower plane. A representation is then generated depicting a location of each of the flatness defects on the wafer. In some embodiments, a single representation is generated depicting the location of flatness defects on a plurality of wafers.

Abstract: In one embodiment, a method for providing a user interface to graphically indicate a cause for fault-related events includes providing a user interface to illustrate a plurality of fault-related events for a plurality of recipes performed on a plurality of manufacturing process hardware tools, presenting in the user interface the plurality of recipes in a first axis and the plurality of manufacturing process hardware tools in a second axis, and graphically indicating in the user interface whether the plurality of fault-related events were caused by one of the plurality of manufacturing process hardware tools or one of the plurality of recipes performed on the one manufacturing process hardware tools.

Abstract: A method and a device for operating a machine tool are disclosed, wherein a machining operation of the machine tool is controlled by a parts program by storing a simulated configuration of the machine tool in the parts program, determining an actual configuration of the machine tool, comparing the actual configuration with the simulated configuration of the machine tool stored in the parts program, and generating a warning message if the actual configuration is not in conformance with the simulated configuration. This prevents errors in the machining process resulting from a discrepancy between the configuration of the machine tool used in the simulation of the parts program and the configuration of the actual machine tool during the actual machining operation.

Abstract: An apparatus and method for recovery and cleaning of broken substrates, especially beneficial for fabrication systems using silicon wafer carried on trays. Removal of broken wafers and particles from within the fabrication system is enabled without requiring disassembly of the system and without requiring manual labor.

Abstract: A method includes associating multiple real-time applications with a framework. The real-time applications include applications for monitoring or controlling equipment in at least one industrial facility. Each application has at least one input variable and at least one output variable. The method also includes identifying relationships between the input and output variables of the applications to identify data dependencies. The method further includes receiving data updates at the framework and notifying at least one of the applications of the data updates based on the data dependencies to support data-driven operation of the framework. The data-driven operation of the framework provides data to the applications to support performance monitoring of the equipment, analysis of the equipment's operation, and/or identification of abnormal equipment conditions.

Abstract: Embodiments of flexible laser manufacturing systems are disclosed herein. A flexible laser manufacturing system configured in accordance with one embodiment includes a plurality of laser processing stations. Each laser processing station can include a laser source configured to generate a laser beam for processing target material, and a first controller coupled to the laser source. The flexible laser manufacturing system also includes a second controller coupled to the first controller of the individual laser processing stations. The second controller is configured to monitor and instruct each of the first controllers for processing target material of each of the corresponding laser processing stations.

Abstract: A method and apparatus for processing an inconsistency. A shape of the inconsistency is identified in a location having layers of composite materials. A model of the location is created with a portion of a number of layers in the layers of composite materials removed to form a section based on the shape of the inconsistency and a policy for rework.

Abstract: A system, method and/or computer program product for analyzing a functionality of at least two manufactured products obtain a first characteristic of a first manufactured product. The system acquires a second characteristic of a second manufactured product. The system identifies a common feature between the first characteristic and the second characteristic. The system identifies a distinguishable feature between the first characteristic and the second characteristic. The system determines a cause of a deviation of a functionality in the first manufactured product or the second manufactured product or both manufactured products based on the identified common feature or the identified distinguishable feature or both features.

Abstract: A system separating defective dies from a wafer comprises a film frame platform and a pick-and-place device. The film frame platform comprises a support table assembly configured for supporting a film frame assembly and a platform surface configured to receive the placement of bins thereupon. The pick-and-place device is configured for moving in a linear manner between the support table assembly and the platform surface.

Abstract: A defect detecting method of a display device includes a defect counting process that measuring a feature amount for each partial region of a display device (P32), and counting regions which is determined as a defective portion based on the measured feature amount of the region (P36), a process that stopping a manufacturing line of the display device when a number of defects counted at the defect counting process is greater than a first threshold value (P38, P42), a defect density calculating process that calculating a defect density in a predetermined area when the number of defects counted at the defect counting process is smaller than the first threshold value (P38), and a process that stopping the manufacturing line of the display device when the defect density calculated at the defect density calculating process is higher than a second threshold value (P40, P42).

Abstract: A control device for preventing meandering of patterns for use in a patterned film manufacturing device which includes a film transferring equipment and a pattern forming equipment, includes a marking unit that forms markings on a predetermined reference position on the film, a recognizing unit that is located at the rear of the marking unit and recognizes positions of the markings on the film, a computing unit that computes an amount of meandering based on differences between the reference position and the recognized positions of the markings, a control unit that generates a correction signal for correcting positions of the marking unit and the pattern forming equipment corresponding to the computed the amount of meandering, and a correction unit that receives the correction signal and corrects positions of the marking unit and the pattern forming equipment based on the received correction signal.

Abstract: A method for predicting etch rate uniformity for qualifying health status of a processing chamber during substrate processing of substrates is provided. The method includes executing a recipe and receiving processing data from a first set of sensors. The method further includes analyzing the processing data utilizing a subsystem health check predictive model to determine calculated data, which includes at least one of etch rate data and uniformity data. The subsystem health check predictive model is constructed by correlating measurement data from a set of film substrates with processing data collected during analogous processing of a set of non-film substrates. The method yet also includes performing a comparison of the calculated data against a set of control limits as defined by the subsystem health check predictive model. The method yet further includes generating a warning if the calculated data is outside of the set of control limits.

Abstract: A method of testing figure quality of a convex mirror in which an optical quality substrate material is used. The substrate has a front convex surface that has to be polished and figured to high accuracy, typically ?/10 (HeNe), and a rear concave surface which only needs to be polished and figured to moderate surface figure accuracy, typically about 1-? (HeNe). Three separate interferometric null tests are then carried out to produce three independent sets of optical path difference (OPD) data. Null lenses, or nulling computer generated holograms (CGHs), are designed and used as needed in each test setup so that spherical aberration is corrected. All three separate interferometric tests are either ideal null tests, or near null tests. From the three sets of OPD data, surface figure errors on the rear and front surfaces of the test optic, h1(xi,yj) and h2(xi,yj), are calculated as well as the OPD error OPDI(xi,yj) introduced by refractive index inhomogeneity in the substrate material.

Abstract: The present invention is a method and system for detecting an abnormal on-line analysis or laboratory measurement and for predicting an abnormal quality excursion due to an abnormal process condition.

Abstract: A semiconductor device production control method includes monitoring, after a production process of a semiconductor device, a process result at a predetermined position of a pattern to which the process is applied, to obtain a deviation with respect to a predetermined target result, quantitatively obtaining a degree of influence on an operation of a semiconductor device from the deviation of the process result, and comparing the degree of influence that is quantitatively obtained with a predetermined allowable margin for operation specifications of the semiconductor device.

Abstract: An arrangement for implementing an automatic in-situ process control scheme during execution of a recipe is provided. The arrangement includes control-loop sensors configured at least for collecting a first set of sensor data to facilitate monitoring set points during the recipe execution, wherein the control-loop sensors being part of a process control loop. The arrangement also includes independent sensors configured at least for collecting a second set of sensor data, which is not part of the process control loop. The arrangement yet also includes a hub configured for at least receiving at least one of the first set of sensor data and the second set of sensor data. The arrangement yet further includes an analysis computer communicably coupled with the hub and configured for performing analysis of at least one of the first set of sensor data and the second set of sensor data.

Abstract: Computer-implemented methods for inspecting and/or classifying a wafer are provided. One computer-implemented includes detecting defects on a wafer using one or more defect detection parameters, which are determined based on a non-spatially localized characteristic of the wafer that is determined using output responsive to light scattered from the wafer generated by an inspection system. Another computer-implemented method includes classifying a wafer based on a combination of a non-spatially localized characteristic of the wafer determined using output responsive to light scattered from the wafer generated by an inspection system and a spatially localized characteristic of the wafer determined using the output.

Abstract: An alarm trend summary display system and method can utilize an alarm trend list that works together with an alarm summary list. A set of rows in the alarm trend list can be organized in a top-to-bottom manner. A set of alarm indicators within each row in the alarm trend list can be arranged in a right-to-left horizontal arrangement. The set of alarm indicators can be aligned with most recent alarms appearing on a right side of the alarm trend list. The specific alarm indicators can be selected in the alarm trend list, so that a corresponding item can be highlighted in the alarm summary list, if the alarms are active. Hence, the system and method can allow an operator to see when alarms occur, their sequence, relations and priority, which aid the operators cope with inevitable alarm floods.

Abstract: An apparatus is provided for producing pharmaceutical and pharmaceutical-like product. The apparatus provides real-time monitoring of the pharmaceutical product and can provide real-time control. The apparatus monitors the dosage both before and after it has been added to a carrier substrate. The apparatus can provide monitoring of each pharmaceutical product that is processed.

Abstract: A system, a method and a computer program product for identifying incompatible manufacturing tools. The system receives measurements of products that were subject to a manufacturing process involving a plurality of manufacturing tools. The measurements pertain to a performance characteristic of each product. The system evaluates whether each manufacturing tool implemented in a sequential manufacturing process individually performs normally based on the received measurements. In response to evaluating each manufacturing tool implemented in said manufacturing process individually performs normally, the system evaluates whether a first combination of the manufacturing tools together in sequential manufacturing process perform normally based on the received measurements.

Abstract: A vehicle is provided having a controller and a controller interface configured to control the vehicle. The controller that is provided to operate the vehicle is also provided with software usable for quality assurance testing of various vehicle portions.

Abstract: A system and method for efficiently transcribing verbal messages transmitted over the Internet (or other network) into text. The verbal messages are initially checked to ensure that they are in a valid format and include a return network address, and if so, are processed either as whole verbal messages or split into segments. These whole verbal messages and segments are processed by an automated speech recognition (ASR) program, which produces automatically recognized text. The automatically recognized text messages or segments are assigned to selected workbenches for manual editing and transcription, producing edited text. The segments of edited text are reassembled to produce whole edited text messages, undergo post processing to correct minor errors and output as an email, an SMS message, a file, or an input to a program. The automatically recognized text and manual edits thereof are returned as feedback to the ASR program to improve its accuracy.

Abstract: Methods and production control systems are presented in which design of experiments are performed in situ and produce model parameter estimates that relate actuator set points to any number of response variables, and the model is periodically updated based on these designed experiments and used as the basis for determining actuator set points.

Abstract: A method of analyzing production steps includes inputting application data associated with a production process having a plurality of process steps into a memory with each of the plurality of process steps including a plurality of tools. The method also includes loading process data associated with one of the plurality of process steps into the memory, performing a tool commonality analysis on each of the tools associated with the at least one of the plurality of process steps, identifying all tool-to-tool differences for the at least one of the plurality of process steps, performing a tool stratification analysis to identify one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps, and stopping the one of the plurality of tools that provides the largest variance contribution to the at least one of the plurality of process steps.

Abstract: An abnormality detection system includes a measurement unit, a decision unit, an alarm unit, and storage units, and serves to detect the abnormality in a control characteristic value of a plurality of products manufactured on the same production line. The decision unit receives the control characteristic value stored in the storage unit, and decides whether an abnormality exists, based on that value. More specifically, the decision unit decides that the control characteristic value is abnormal when, with respect to m (m is a natural number) pieces of the products that are consecutively manufactured, an absolute value of a difference in control characteristic value between each of the products and another manufactured immediately before the former is equal to or less than a predetermined constant.

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract: In a data processing method, import request data transmitted from a client is received. By comparing the application list against information indicating license settings of the application that are stored in advance, a determination is made as to whether or not the processing specified in a workflow is executable. A temporary workflow list is created, and a determination is made as to whether or not the upper limit for the registerable workflow number and data size is exceeded. When it is determined as registerable, execution data for executing respective workflows and display data for controlling display included in the temporary workflow list are acquired from the client, and the display is controlled so as to display the executable workflow and the inexecutable workflow in a fashion such that the executable workflow and the inexecutable workflow can be identified.

Abstract: Methods, systems, and software program for validation of pharmaceutical manufacturing processes and quality assurance process are described and disclosed herein. Consequently, the methods provide a means to perform validation on an integrated level whereby the quality control unit can ensure data and product integrity and minimize cost.