Abstract: An apparatus and method for controlling the position of the tongs of a crane depending on bending of a slab are disclosed. Side surface detection units are installed at both ends of the tongs of a crane for gripping the side surfaces of one or more slabs, and are configured to detect one or more gaps generated due to bending of one of the slabs. A distance detection unit is configured to detect the distance between an uppermost slab and the crane. A control unit is configured to adjust the final grip position of the tongs using information about the gaps generated due to the bending of the slab. The information about the gaps is detected by the side surface detection units and the distance detection unit.

Abstract: An image forming system includes an input unit for input of setting information, an image forming unit, a conveying unit, a control unit, and a jam detecting unit, wherein a set of a plurality of different kinds of special sheets disposed in a predetermined order is used. When occurrence of a jam is detected by the jam detecting unit, the control unit recognizes whether a special sheet having been fed is present in the image forming system, and if it is recognized that a special sheet is present in the image forming system, the control unit controls the conveying unit, after the jam being released, to eject a special sheet or sheets as unnecessary up to one that is disposed preceding a special sheet that is of the same kind as a most front one that was present in the image forming system at the time of the occurrence of the jam.

Abstract: According to one embodiment, a control device which controls to, after the feed device has fed the booklet so as to bring the page on the other surface side of the booklet into contact with the contact roller unit and fold the page on the other surface side, feed the booklet to the page turning position again.

Abstract: A load monitoring system to provide the user with pertinent information necessary to plan, install and monitor load and tension measurements during over-head lifting practices. The process includes the measurement instrument with a power supply and data converter with a means of broadcasting data packets to a computer readable medium containing software which interprets the computer-implemented information in a presentable format. The process provides a means of planning for an over-head lifting practice and real time monitoring and recording of the over-head lifting practice. The process provides users the information to accurately install the over-head lifting device or the means of attachment to the architectural structure. Thus, saving time and resources in the planning and installation process, while monitoring real time loads being exerted onto the architectural structure creating a safer over-head lifting environment.

Abstract: A collector device includes a collector connected to a positioner, such as a robot arm. The positioner can automatically move the collector in multiple dimensions to collect objects into the collector according to a specified collection pattern. By moving the collector in multiple dimensions, the positioner provides for objects to be arranged in the collector according to a specified pattern. The positioner can also move the collector so that the collected objects are transferred to a second collector for shipping, storage, and the like.

Abstract: A device and a method for the handling of containers with a plurality of handling units. In the case of the device according to the invention and in the case of the method according to the invention a defective state in a handling element situated downstream is recognized and as a reaction to this recognition a specified container conveyed upstream is separated out, namely preferably that container which in the further course of operation would arrive at the handling element known to be operating defectively.

Abstract: In a communications network, such as the Internet, the invention comprises a method for arranging for the transportation of baggage for airline passengers, that comprises the steps of checking in bags with a ground delivery operator, obtaining passenger identification information, confirming the identity of the passenger, collecting passenger airline flight information, collecting the baggage from the origin location by the ground delivery operator, marking the baggage with an identifier, transmitting baggage information via a communications network and associating the baggage information with the airline flight information, securely transporting the baggage from the origin location to the origin airport, monitoring the location of the baggage during the transporting step, and providing location information of the baggage via the communications network.

Abstract: A control system for a boom crane, having a tower and a boom pivotally attached to the tower, a first actuator for creating a luffing movement of the boom, a second actuator for rotating the tower, first means for determining the position rA and/or velocity {dot over (r)}A of the boom head by measurement, second means for determining the rotational angle ?D and/or the rotational velocity {dot over (?)}D of the tower by measurement, the control system controlling the first actuator and the second actuator. In the control system of the present invention the acceleration of the load in the radial direction due to a rotation of the tower is compensated by a luffing movement of the boom in dependence on the rotational velocity {dot over (?)}D of the tower determined by the second means. The present invention further comprises a boom crane having such a system.

Abstract: A method for maximizing the overall efficiency of an insertion system by running the system with the optimal balance between system throughput and potential for system stoppages. In other words, the system is capable of running at less than maximum throughput if running at such throughput is causing excessive amounts of system stoppages and thus, negatively impacting overall system efficiency. The foregoing is accomplished by an algorithm that controls the flow of material being processed by a particular section of the machine, or “module”. This algorithm is capable of reducing the flow rate of material to, or within, that module if a problem arises downstream that may lead to a paper jam.

Abstract: A method for lift compensation of an item (12) which is connected to a vessel (1) by means of a rope (4) which is coiled around the rope drum (6) of a lifting device (2), the lifting device (2) being provided with a heave compensator (20), a controller (30) of the heave compensator (20) controlling the effect of the driving device (32, 34, 42) of the rope drum (6) on the basis of a heave term and a deviation term, the method comprising: —bringing a correction term into the heave compensation when, because of environmental forces, the force on the rope (4) falls outside a first limit (d, e); and—leaving the correction term out when the force on the rope (4) is within a second limit (c, f), the second limit (c, f) being equal to or different from the first limit (d, e).

Abstract: A system is provided for tracking and maintaining an inventory of location of containers that are stored on cargo ships or in a container yard. The system includes one or more sensors, such as GPS and INS sensors for obtaining real-time position information, as well as a processor configured to automatically provide post processing to recover lost data and to correct erroneous data, such as when real-time position signals are blocked or distorted, the post processing performed by estimating trajectories and correcting the location errors. Post-processed positioning techniques are continuously applied to the stored position data to iteratively determine calibrated position locations to provide calibrated second trajectory segments in a real-time fashion. The calibrated second trajectories are then used to identify the errors in the past real-time position data as soon as a segment of the second calibrated trajectory becomes statistically trustworthy.

Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder.

Abstract: Systems and methods for processing tobacco-oriented goods are disclosed. One embodiment of a method includes receiving a pick-up signal from a pick-up sensor. The pick-up signal is indicative of the picking up of a tobacco product unit that has been pre-sorted based on inclusion in an associated order. Also received is a put-down signal from a put-down sensor. The put-down signal is indicative of the fact that the tobacco product unit has been put down. A determination is made, based on a system parameter, whether the pick-up signal is properly associated with the put-down signal.

Abstract: A path risk evaluating apparatus includes a secondary collision likelihood direction evaluating unit (108) and a secondary collision likelihood distance evaluating unit (109) which evaluate, based on the relationship between a movement path and a position of objects in an environment where a mobile device moves, the likelihood of the mobile device having primary collision with a first object and the first object further having secondary collision with a second object; a risky attribute combination evaluating unit (112) which determines degree of damage when secondary collision occurs, by referring to information, indicating degree of damage when objects in the environment collide, held by a risky attribute combination information holding unit (111); and a path evaluating unit (113) which evaluates the risk of the moving path for the mobile device, based on the evaluation result from the secondary collision likelihood direction evaluating unit (108) and the secondary collision likelihood distance evaluating un

Abstract: A safety device and a processor are disclosed for a quay crane, both are configured to avert the hatch cover being lifted from a ship as a container on the hatch is lifted. A computer readable memory and server are disclosed that may provide the processor with a program system and/or installation package. Motion sensors are disclosed for use with the safety device that may contribute to estimating the movement of the hatch cover.

Abstract: A platform includes main transverse beams (“MTBs”), each supported by at least one hoist. It is determined whether a load on any MTB is different from the load on any other MTB by more than a predetermined amount. An MTB which has a load different from the load on any other MTB by more than a predetermined amount is selected and then vertically moved with respect to the other MTBs within a predetermined safety limit to transfer load between the selected MTB and the other MTBs while monitoring the loads on each MTB and the position of the selected MTB as vertical movement of the selected MTB proceeds. The monitored loads and position are compared with the safety limit; and the movement of the selected MTB stopped when either the desired load transfer is completed or the safety limit has been met.

Abstract: A platform includes main transverse beams (“MTBs”), each supported by at least one hoist. It is determined whether a load on any MTB is different from the load on any other MTB by more than a predetermined amount. An MTB which has a load different from the load on any other MTB by more than a predetermined amount is selected and then vertically moved with respect to the other MTBs within a predetermined safety limit to transfer load between the selected MTB and the other MTBs while monitoring the loads on each MTB and the position of the selected MTB as vertical movement of the selected MTB proceeds. The monitored loads and position are compared with the safety limit; and the movement of the selected MTB stopped when either the desired load transfer is completed or the safety limit has been met.

Abstract: A method and apparatus for feeding sheets of media from a media stack in an image production device is disclosed. The method may include fluffing a stack of media with a predetermined amount of air flow, sensing a number of fluffed media sheets in the media stack, determining if the number of fluffed media sheets equals or exceeds a predetermined value, wherein if it is determined that the number of fluffed media sheets equals or exceeds the predetermined value, feeding the fluffed media sheets to an image production section of the image production device.

Abstract: A method and a device for orienting the rotational position of containers, in particular bottles, wherein or by means of which a feature on the container is detected and an actual rotational position of the container is calculated on the basis of the detected feature and a control signal for moving the container to a desired rotational position is calculated, while the container is being rotated. The method and device reduce the time required for the orientation of the containers.

Abstract: A platform includes main transverse beams (“MTBs”), each supported by at least one hoist. It is determined whether a load on any MTB is different from the load on any other MTB by more than a predetermined amount. An MTB which has a load different from the load on any other MTB by more than a predetermined amount is selected and then vertically moved with respect to the other MTBs within a predetermined safety limit to transfer load between the selected MTB and the other MTBs while monitoring the loads on each MTB and the position of the selected MTB as vertical movement of the selected MTB proceeds. The monitored loads and position are compared with the safety limit; and the movement of the selected MTB stopped when either the desired load transfer is completed or the safety limit has been met.

Abstract: A shift and scan test tube rack apparatus and method comprised of an array of initially aligned racks each comprised of a row of spaced apart receptacles each having a receptacle window through which a barcode on a received barcode labeled test tube is viewable and each rack further comprised of a plurality of line of sight windows each interposed between two adjacent spaced apart receptacles, and a shifting device for individually shifting any one of the racks in the array of initially aligned racks to a shifted position that allows a plurality of the receptacle windows in the shifted rack to be viewed through the plurality of line of sight windows in the remaining aligned racks for reading barcodes on barcode labeled test tubes received in the shifted rack.

Abstract: In one aspect, detecting a splice connection along a component carrier tape extending from a component carrier tape feeder in a feeder slot on a pick-and-place machine having a pickup head is accomplished by scanning a section of a component carrier tape with a sensor, the sensor attached to the pick-and-place machine and positioned above or below a path of the component carrier tape, and detecting a splice connection with the sensor, the sensor generating a signal in response to detecting the splice connection such that the detection of the splice connection indicates the component carrier tape splice and such that the sensor is mounted such that relative position of the sensor with respect to the component carrier tape path is not affected by removal of the component carrier tape feeder slot or movement of the pickup head.

Abstract: A platform includes main transverse beams (“MTBs”), each supported by at least one hoist. It is determined whether a load on any MTB is different from the load on any other MTB by more than a predetermined amount. An MTB which has a load different from the load on any other MTB by more than a predetermined amount is selected and then vertically moved with respect to the other MTBs within a predetermined safety limit to transfer load between the selected MTB and the other MTBs while monitoring the loads on each MTB and the position of the selected MTB as vertical movement of the selected MTB proceeds. The monitored loads and position are compared with the safety limit; and the movement of the selected MTB stopped when either the desired load transfer is completed or the safety limit has been met.

Abstract: The invention relates to a method for the transfer of a load hanging at a load rope of a crane or excavator comprising a slewing gear, a luffing mechanism and a hoisting gear comprising a computer-controlled regulator for the damping of the load oscillation which has a trajectory planner, a disturbance observer and a state regulator with a pre-control, wherein the working space is first fixed by selection of two points, with one of the two points being fixed as the destination point by direction presetting by means of the hand lever and with the nominal speeds for the slewing gear and the luffing mechanism being preset by the hand lever signals.

Abstract: An automated materials handling system comprises a plurality of overhead hoist buffers (OHBs) for receiving a plurality of semiconductor wafer carriers. Each OHB is assigned to a respective one of a plurality of categories. Each wafer carrier is associated with one or more of the plurality of categories. Each respective category is associated with at least one of a plurality of event trigger types. An overhead transport (OHT) if provided for transporting each of the plurality of wafer carriers to a respective one of the OHBs in response to a respective trigger event. Each trigger event has one of the plurality of event trigger types. Each wafer carrier is stored in a respective one of the plurality of OHBs assigned to a respective one of the categories associated with the respective event trigger type of the trigger event causing that wafer carrier to be transported and stored.

Abstract: A feeder for rods into a lathe comprising a motorized thruster for sliding and pushing a rod along a guide towards a processing lathe until the rod is taken by the lathe. An automatic control device actuates the thruster to advance according to a first thrust value and a sensor detects the movement of the thruster. If the sensor detects a minimum movement or no movement at all a thrust increase is commanded up to a predetermined maximum value. If the thruster does not move at all, this indicates jamming.

Abstract: An autoloader system with modularization architecture and self-adaptive motion control ability for mass optical disks duplication includes four physical modules: a robot arm module with sensors and joints dedicates for delivering and picking up optical disks; an optical disk duplication tower has a number of optical drives in a stack, or a matrix for optical disk duplication; a motion control module has an embedded motion controller and a power source to synchronize the motion of robot arm and duplication; a platform module has a base frame to fix other modules and a user interface. Some disk stacks are situated on top of platform module. The use of a self-adaptive control algorithm, consisting of a Motion Strategy Database, Initial Process, Motion Planning Process, Motion Generation Process and Motion Monitor Process, to ascertain system configurations and components furthest satisfy the required flexibility for modifying/upgrading hardware or ever-changing user needs.

Abstract: A system for assembling a building lumber package includes a lumber sorter sequentially receiving a plurality of boards of different dimensions and selectively placing boards into a plurality of bins, a computer programmed to receive a list of different dimension lumber, to designate one or more bins for accumulating the lumber designated on the list, to receive dimension information identifying each board received by the sorter, and to control the lumber sorter to place boards designated on the list into bins designated for accumulating lumber identified on the list The system may process a plurality of orders for building lumber packages at essentially the same time. Lumber at a lumber mill is sorted into building lumber packages at the lumber mill and stacked and strapped by automated stackers and strappers at the lumber mill. The building lumber packages may be shipped directly from the lumber mill to a building site.

Abstract: A warehousing system includes a container for storing at least one item, a first electronic (e.g., radio frequency identification (RFID)) module associated with the first container, and a controller which wirelessly communicates with first electronic module, for directing a transfer of said at least one item to and/or from said first container. The inventive system may include, for example, a hybrid retail/warehouse system which includes a facility having a shelving area, and a picking area adjacent to the shelving area, and a layout so as to minimize a picking area and a walking distance between a picking area and a shelving area.

Abstract: An RFID enabled paper roll includes a tubular core, a paper stock wound around the core, and a radio frequency integrated circuit electrically coupled to an antenna and positioned on the core. A system for reading a radio frequency integrated circuit positioned on an item of inventory in a warehouse comprises a material handling device and an RFID reader coupled to the material handling device. The material handling device has at least member for use in transporting an item of inventory. The reader is configured to read the radio frequency integrated circuit associated with the item of inventory when the item is in proximity to the material handling device.

Abstract: Disclosed is a method and system for compensating for the load a part places on a part positioner system that positions the part for work operations by a robot. The part positioner system rotates a part holding assembly about the axis of rotation of a shoulder drive. The part holding assembly may have a column that extends perpendicular to the shoulder center line. A counter weight system is incorporated into the column that includes a counter weight pack that is moved along the length of the column. The shoulder drive drives the part and part holding assembly load in order to measure a torque applied to the shoulder drive. A load offset may be calculated based on the applied torque. The counter weight pack may then be moved to a position on the column calculated to balance the load of the part and part holding assembly.

Abstract: A technique is provided that can realize highly accurate skew correction without employing any particularly complicated device configuration. The quantity of skew of a sheet is determined in accordance with a detection result from a first pair of sensors. Driving of each of first rollers and second rollers is separately controlled to carry the sheet in such a manner as to reduce the quantity of skew determined in accordance with the detection result from the first pair of sensors. The quantity of skew of the sheet is determined in accordance with a detection result from a second pair of sensors. Driving of each of the first rollers and the second rollers is separately controlled to carry the sheet in such a manner as to reduce the quantity of skew determined in accordance with the detection result from the second pair of sensors.

Abstract: To provide a substrate transport apparatus and a substrate transport method that enable curtailing of a mounting wait time incidental to movement of support pins. Height data pertaining to components 10 mounted on a back side of a substrate 1 are stored beforehand. During substrate carrying-in operation, support pins 7 are caused to descend according to component height data and wait at a height h1 where to be able to avoid interference with the components 10. During substrate carrying-out operation, the support pins 7 are caused to descend according to the component height data and recede to the height h1 where to be able to avoid interference with the components 10.

Abstract: In the case of transporting an article to a load port which is occupied by another article, at the time of generating a transportation command, estimated arrival time T1 when the article arrives at the load port and estimated removal time T2 when the article which occupies the load port is removed are compared with each other. If the time T2 is earlier than the time T1, a transportation command for transporting the article to the load port is assigned. If the time t2 is later than the time T1, a transportation command for transporting the article to a buffer on the upstream side of the load port is assigned.

Abstract: A server includes a communication section which receives event information from an event detection device which detects a plurality of types of events occurring in a plurality of temporary storage devices provided at different locations, and transmits transportation load display information to a PC, a storage section which stores lot state data indicating states of lots and storage state data indicating states of the temporary storage devices, an update section which updates the lot state data and the storage state data based on the event information, and an information generation section which generates transportation load display information for notifying a lot transportation state to the user based on the lot state data and the storage state data.

Abstract: When a component (X) is fed to a pickup position (53) but no suction action is carried out due to a variety of reasons, a reverse feeding action is carried out to return the component (X), which has been fed to the pickup position (53), to a position upstream of the pickup position (53) in the tape feeding direction. The same component (X) is thus not wasted but is resupplied to the pickup position (53) in the following pickup action, whereby the amount of waste of components is reduced.

Abstract: A device for automatically controlling the edges of a web of sheeting has a first deflecting roller and a second deflecting roller, which are arranged parallel to each other, and also a drive for shifting the deflecting rollers in opposite axial directions. A sensor detects the position of the sheeting. The drive shifts the deflecting rollers in opposite axial directions and the ratio between the friction of the sheeting on the first deflecting roller and the friction of the sheeting on the second deflecting roller is changed on the basis of the position of the sheeting detected by the sensor.

Abstract: In a method for spacing bundles of a bundle layer by means of a manipulator gripper with at least one support base that engages bundles and a stop for the placement of bundles, separation between an edge of the support base and the stop is reduced, by a placement motion of the support base in a placement direction that is superimposed on the relative motion of the support base and the stop and is synchronized with this relative motion.

Abstract: Disclosed is a method for appointing an orientation flat, in which when there are a plurality of orientation flats with the same length, any one from among the orientation flats of the same length can be certainly appointed as a reference orientation flat. In the disclosed method, three orientation flats at three positions are detected, respectively, through the rotation of a semiconductor wafer, the lengths of three circular arcs between the three orientation flats are obtained, respectively, and then an orientation flat at the right side of the longest circular arc from among the three circular arcs is appointed as a reference orientation flat. Accordingly, it is possible to certainly appoint a reference orientation flat even though there exist a plurality of circular arcs with the same length.

Abstract: A carrier robot system and a control method for a carrier robot enabling teaching even when an operator cannot approach a teaching position for wafer conveyance are provided. In a carrier robot system comprising a robot which has a placement portion for placing an object presenting a low-profile form thereon and carries the object and a robot controller for controlling the robot, a jig mounted on the placement portion of the robot and having an image pickup member, an image processing portion for processing an image picked up by the image pickup member, and a superior control portion for controlling the robot controller and image processing portion from a superior position are provided.

Abstract: A facility for scheduling the picking of a plurality of items specified for an item shipment is described. When a first-picked item of the plurality is picked, the facility selects a first period of time of a target length during which the first-picked item is expected to arrive at a sorting machine. For each of the items specified for the item shipment other than the first-picked item, the facility designates a picking period for the item that, when shifted forward in time by an amount of time the item will take to arrive at the sorting machine once picked, falls completely within the first period of time.

Abstract: A multi-level parking lot has a multi-level parking lot comprising a roadway disposed on aground surface. A plurality of parking containers each adapted to receive and store an automotive passenger vehicle. At least two of the parking containers being vertically stacked to form an inner stack of vertically stacked parking containers extending generally parallel to a first side of the roadway. At least two of the parking containers are vertically stacked to form an outer stack of vertically stacked columns of parking containers extending generally parallel to the first side of the roadway, and located between the first side of the roadway and the inner stack of vertically stacked parking containers. Each of the plurality of parking containers having an access aperture generally facing toward the first side of the roadway for passage of the vehicle therethrough.

Abstract: A control system for a lifting device and a lifting device comprising the same are disclosed. The control system includes a control unit comprising a processor with a memory communicatively coupled to the processor and having computer readable and executable instructions. A battery is electrically coupled to the control unit in addition to at least one indicator. The processor executes the computer readable and executable instructions to: determine an operating characteristic of the lifting device and an operating time of the lifting device as the lifting device is actuated; determine an accumulated load-time parameter for the lifting device based on the operating characteristic and the operating time; store the accumulated load-time parameter in the memory of the lift control system; compare the accumulated load-time parameter to a service constant; and provide an indication the indicator that a lift structural component requires service based on the comparison.

Abstract: A gripping device for a manipulation system, particularly a robot, for receiving workpieces and feeding them from a readied stack of the workpieces to a manufacturing plant such as a metal sheet folding machine, punching press, welding plant, etc. The device has a gripper head fitted with gripping means such as suction cups, magnets, tongs, etc., and a detection system for detecting characteristics of the workpiece gripped by the gripping means. A pulse emitter excites vibrations in the workpiece and the vibration spectrum of the workpiece is compared to reference vibration data to determine characteristics of the gripped workpiece, such as whether two or more workpieces are stuck together, or whether the workpiece is the correct workpiece.

Abstract: In a method for palletizing packages using an automated manipulator, and a non-transitory computer-readable medium encoded with programming instructions for implementing the method, a sequence of grip positions is designated for accepting packages with the automated manipulator, and a supply of provided packages is automatically checked with regard to the grip positions of the packages in the supply. The supplied packages are palletized according to a predetermined initial palletizing pattern as long as the packages are supplied in the grip positions in the sequence. The packages are palletized by the manipulator according to an alternate palletizing pattern, different from the initial palletizing pattern, in the event that a package is not supplied to the manipulator in a grip position in the sequence.

Abstract: An automated medication preparation system for preparing a prescribed dosage of medication in a drug delivery device includes a plurality of stations for receiving, handling and processing the drug delivery device so that the prescribed dosage of medication is delivered to the drug delivery device and a transporting device that receives and holds more than one drug delivery device and moves the drug delivery devices in a controlled manner from one station to another station. The system is configured so that two or more separate drug delivery devices can be acted upon at the same time.

Abstract: In a preferred embodiment, an automated Pharmacy Admixture System (APAS) may include a manipulator system to transport medical containers such as bags, vials, or syringes in a compounding chamber regulated to a pressure below atmospheric pressure. In a preferred implementation, the manipulator system is configured to grasp and convey syringes, IV bags, and vials of varying shapes and sizes from a storage system in an adjacent chamber regulated at a pressure above atmospheric pressure. Various embodiments may include a controller adapted to actuate the manipulator system to bring a fill port of an IV bag, vial, or syringe into register with a filling port at a fluid transfer station in the chamber. A preferred implementation includes a sanitization system that can substantially sanitize a bung on a fill port of a vial or IV bag in preparation for transport to the fluid transfer station.

Abstract: Two robotic arms roam in separate, non-overlapping areas of a test station, avoiding collisions. A traveling buffer moves along x-tracks between a front position and a back position. In the front position, a first robotic arm loads IC chips from an input tray or stacker into buffer cavities in the traveling buffer. The traveling buffer then moves along the x-tracks to the back position, where a second robotic arm moves chips from the traveling buffer to test boards for testing. After testing, the second robotic arm moves chips to a second traveling buffer, which then moves along tracks to a front position for unloading by the first robotic arm. Two traveling buffers may move on the same tracks in a loop. The buffer cavities in the traveling buffer move on internal tracks to expand and contract spacing and pitch between the front and back positions to match test-board pitch.

Abstract: Substrate loading and unloading apparatus for automated loading and unloading of substrates (S) in a vacuum environment, for example the work region (A) of an electron beam lithography machine, comprises a substrate holder (13) with a substrate support table (17) and locating means (18 to 21) co-operable with the table to cause a supported substrate (S) to be pressed against and thereby located on the table (17). A vacuum vessel (10) defines a loading and unloading chamber (11) with a transfer port (12) which is communicable with the evacuated region (A) of the machine and permits transfer of the holder (13) between the chamber (11) and the region (A) entirely within the vacuum environment. Release means (22, 23; 28 to 33) are present to withhold the co-operation of the table and locating means and to provide a temporary substrate support clear of the table so that substrates can be transferred to and from the table.

Abstract: A technology to resolve positional deviations without using a transport robot. An object to be transported placed on a holding stand is rotated, so as to make an error angle ? to be zero; and thereafter, a temporarily placing portion is made to move obliquely to move for an error distance in a horizontal component, thereby locating the center of the object to be transported on the central axis line of the holding stand; and the object to be transported is placed on holding stand. In a case where an orientation of a notch is definite, the holding stand is further rotated by a desired amount. Without using the transport robot, it is possible to resolve an error angle and an error distance.